CN108107439A - Etching machines vacuum transmission intracavitary mechanical arm position measures method and device - Google Patents
Etching machines vacuum transmission intracavitary mechanical arm position measures method and device Download PDFInfo
- Publication number
- CN108107439A CN108107439A CN201711235148.3A CN201711235148A CN108107439A CN 108107439 A CN108107439 A CN 108107439A CN 201711235148 A CN201711235148 A CN 201711235148A CN 108107439 A CN108107439 A CN 108107439A
- Authority
- CN
- China
- Prior art keywords
- mechanical arm
- reflector
- laser light
- pedestal
- etching machines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The invention discloses a kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm position method for measurement, and laser light source and photodetector are installed on mechanical arm pedestal, reflector is installed at the top of transmission cavity；Laser pulse is sent to reflector, then receives the laser returned from reflector with photodetector, the Y direction location information of mechanical arm is obtained by the turnaround time of exploring laser light pulse.The invention also discloses a kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm position-measurement devices.The present invention can know the state of mechanical arm Y direction in time, convenient for finding failure cause.
Description
Technical field
The present invention relates to integrated circuit manufacturing equipment field, more particularly to a kind of oxide-film etching machines vacuum transmission chamber
Interior mechanical arm position method for measurement.The invention further relates to a kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm positions
Measuring device.
Background technology
TEL tactras (Dong electricity electronics corporations etching machine TRCTRAS platforms) platform device is mainly used for oxide-film etching
Technique, mechanical arm and its pedestal are designed to move back and forth in the transmission cavity of the platform so that platform can be 6 with carry
Process cavity.The movement of mechanical arm is divided into R direction of principal axis, Θ direction of principal axis and Y direction.
R direction of principal axis：The telescopic direction of arm.
Θ direction of principal axis：The direction of rotation of arm.
Y direction：The back-and-forth motion direction of arm and pedestal.
The control mode that mechanical arm specifically moves is：
1.R direction of principal axis, Θ direction of principal axis：It is rotated and controlled by motor by two motors below mechanical arm.
2.Y direction of principal axis：By the back-and-forth motion of navigation screw rod control arm pedestal.
Y direction move the shortcomings that be：
(1), arm pedestal is supported by the litter of both sides, and pedestal is mutually fixed with axle sleeve, and navigation screw rod is driven by servomotor
Axle sleeve is controlled to move back and forth.Therefore, the mobile band moving base of axle sleeve slides on litter.Such control mode relies on servo
The accurate control of motor.
(2), the phase mutual friction of navigation screw rod and axle sleeve, causes galling and generates gap so that arm Y direction
The accuracy of movement declines.
(3), pedestal and axle sleeve are fixed by 4 screws, and due to continuous back and forth movement, screw may loosen so that arm Y
The movement warp of direction of principal axis.In extreme conditions, screw even comes off.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm positions
Method for measurement is put, can know the state of mechanical arm Y direction in time, convenient for finding failure cause；For this purpose, the present invention will also
A kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm position-measurement device is provided.
In order to solve the above technical problems, the oxide-film etching machines vacuum transmission intracavitary mechanical arm position of the present invention measures
Method adopts the following technical scheme that realization：Laser light source and photodetector on mechanical arm pedestal are installed, transmitted
Top of chamber installs reflector；Laser pulse is sent to reflector, then receives the light returned from reflector with photodetector, leads to
The turnaround time of detecting optical pulses is spent to obtain the Y direction location information of mechanical arm.
The oxide-film etching machines vacuum transmission intracavitary mechanical arm position-measurement device, including：
One laser light source, on mechanical arm pedestal, for emitting laser pulse；
One reflector, at the top of transmission cavity, for the laser pulse of reflection laser light source transmitting；
One photodetector, on mechanical arm pedestal, for the laser pulse of reception reflector transmitting.
The measuring device obtains the Y direction position of mechanical arm by the turnaround time of exploring laser light pulse
Confidence ceases.
Method and apparatus using the present invention can understand mechanical arm in the position of Y direction in real time.So can and
When the state for knowing mechanical arm Y direction, convenient for find failure cause, increase technology stability, reduce product defect production
It is raw.
Description of the drawings
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings：
Fig. 1 is the oxide-film etching machines vacuum transmission intracavitary mechanical arm position-measurement device schematic diagram.
Specific embodiment
The principle of oxide-film etching machines vacuum transmission intracavitary mechanical arm position method for measurement is：Distance measure
The time * light velocity/2 of=photon flight.
With reference to shown in Fig. 1, the oxide-film etching machines vacuum transmission intracavitary mechanical arm position-measurement device it is specific
It is achieved in that：
Laser light source 1 and photodetector 2 on mechanical arm pedestal are installed, reflector 3 is installed at the top of transmission cavity.By
The laser light source 1 sends laser pulse to reflector 3, then receives the light returned from reflector 3 with photodetector 2, leads to
Flight (round-trip) time of exploring laser light pulse is spent to obtain target range S.
Oxide-film etching machines vacuum transmission intracavitary mechanical arm position method for measurement, utilizes TOF (flight time)
Technology, position of the measurement mechanical arm pedestal in vacuum transmission chamber, while it is known that the Y-axis relative position of mechanical arm.
And master control logic 4 and device software are combined, the positional value of such arm pedestal can be in real time by device Host
Understand.Device Host sets the position of Y-axis, and the location information of position-measurement device inspecting manipuator arm pedestal drives according to calculating
Dynamic servomotor movement.The amount of exercise for the Y-axis that servomotor movement simultaneously drives can be by position-measurement device Real-time Feedback.Such as
There are abnormal conditions in fruit, convenient for finding in time.Increase technology stability, reduce product defect and generate.
The present invention is described in detail above by specific embodiment, but these are not formed to the present invention's
Limitation.Without departing from the principles of the present invention, those skilled in the art can also make many modification and improvement, these
It should be regarded as protection scope of the present invention.
Claims (9)
1. a kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm position method for measurement, it is characterised in that：In manipulator
Laser light source and photodetector on arm pedestal are installed, reflector is installed at the top of transmission cavity；Laser pulse is sent to reflector,
Then receive the laser returned from reflector with photodetector, machine is obtained by the turnaround time of exploring laser light pulse
The Y direction location information of tool arm.
2. the method as described in claim 1, it is characterised in that：Device Host understands the positional value of mechanical arm pedestal in real time.
3. the method as described in claim 1, it is characterised in that：Device Host sets the position of mechanical arm Y-axis, detects in real time
The location information of mechanical arm pedestal is moved according to driving servomotor is calculated.
4. the method as described in claim 1, it is characterised in that：The displacement for the mechanical arm Y-axis that servomotor movement drives
By detecting Real-time Feedback.
5. a kind of oxide-film etching machines vacuum transmission intracavitary mechanical arm position-measurement device, which is characterized in that including：
One laser light source, on mechanical arm pedestal, for emitting laser pulse；
One reflector, at the top of transmission cavity, for the laser pulse of reflection laser light source transmitting；
One photodetector, on mechanical arm pedestal, for the laser pulse of reception reflector transmitting.
6. measuring device as claimed in claim 5, it is characterised in that：By the turnaround time of exploring laser light pulse come
To the Y direction location information of mechanical arm.
7. measuring device as claimed in claim 5, it is characterised in that：Device Host understands the position of mechanical arm pedestal in real time
Value.
8. measuring device as claimed in claim 5, it is characterised in that：Device Host sets the position of mechanical arm Y-axis, in real time
The location information of inspecting manipuator arm pedestal is moved according to driving servomotor is calculated.
9. measuring device as claimed in claim 5, it is characterised in that：The position for the mechanical arm Y-axis that servomotor movement drives
Shifting amount is by detecting Real-time Feedback.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711235148.3A CN108107439A (en) | 2017-11-30 | 2017-11-30 | Etching machines vacuum transmission intracavitary mechanical arm position measures method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711235148.3A CN108107439A (en) | 2017-11-30 | 2017-11-30 | Etching machines vacuum transmission intracavitary mechanical arm position measures method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108107439A true CN108107439A (en) | 2018-06-01 |
Family
ID=62207997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711235148.3A Pending CN108107439A (en) | 2017-11-30 | 2017-11-30 | Etching machines vacuum transmission intracavitary mechanical arm position measures method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108107439A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205049110U (en) * | 2015-10-23 | 2016-02-24 | 承德石油高等专科学校 | Double anode height finding positioner based on laser rangefinder technique |
| CN206317082U (en) * | 2016-08-31 | 2017-07-11 | 中冶华天工程技术有限公司 | Stacking machine arm active terminal detent mechanism |
| CN106956258A (en) * | 2016-01-08 | 2017-07-18 | 上银科技股份有限公司 | Paths planning method and compensator that array is picked and placeed are carried out using mechanical arm |
| CN106994696A (en) * | 2016-01-22 | 2017-08-01 | 波音公司 | Optical alignment is used for the apparatus and method of the workpiece of robot manipulation |
-
2017
- 2017-11-30 CN CN201711235148.3A patent/CN108107439A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205049110U (en) * | 2015-10-23 | 2016-02-24 | 承德石油高等专科学校 | Double anode height finding positioner based on laser rangefinder technique |
| CN106956258A (en) * | 2016-01-08 | 2017-07-18 | 上银科技股份有限公司 | Paths planning method and compensator that array is picked and placeed are carried out using mechanical arm |
| CN106994696A (en) * | 2016-01-22 | 2017-08-01 | 波音公司 | Optical alignment is used for the apparatus and method of the workpiece of robot manipulation |
| CN206317082U (en) * | 2016-08-31 | 2017-07-11 | 中冶华天工程技术有限公司 | Stacking machine arm active terminal detent mechanism |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101906942B1 (en) | Calibration of a coordinate measuring machine using a calibration laser head at the tool centre point | |
| US9862097B2 (en) | Industrial robot system having sensor assembly | |
| CN103111753A (en) | Full-automatic wafer dicing saw control system based on vision | |
| CN105737735B (en) | Portable self calibration end effector repetitive positioning accuracy measuring device and method | |
| CN103115566A (en) | Line laser and image detection device | |
| CN104267670A (en) | Compensation method and circuit for laser flight marking hardware | |
| CN105865341B (en) | Industrial robot spatial pose repetitive positioning accuracy measuring device and method | |
| WO2016155310A1 (en) | Method and device for calibrating positioning and orientation system of coal mining machine based on laser scan | |
| AU2020257144A1 (en) | Apparatus and procedure for homing and subsequent positioning of axes of a numerical control machine | |
| CN103925938B (en) | Inverted pendulum formula simulated target source for the detection of photoelectric measurement equipment performance indications | |
| CN112207629A (en) | Compensation method for open-loop dynamic error of motion control mechanism | |
| CN207147428U (en) | A kind of axle scanning means of dot laser four | |
| JP5162471B2 (en) | Method for controlling axial relative position and / or relative movement and machine tool | |
| US20220288731A1 (en) | Linkage turntable and decoupling control method thereof | |
| CN108107439A (en) | Etching machines vacuum transmission intracavitary mechanical arm position measures method and device | |
| US20210229216A1 (en) | Systems and methods for improving accuracy in large area laser processing using position feedforward compensation | |
| CN104932207A (en) | Position synchronization method for direct-writing photoetching equipment | |
| CN111948667A (en) | Three-dimensional scanning system | |
| CN110030940B (en) | Object surface high-precision three-dimensional measurement method and device based on rotary coding technology | |
| CN103616000B (en) | A kind of motion synchronization precision detection device | |
| KR101540704B1 (en) | Collision defensive measure that use Gantry distance measuring equipment and this | |
| CN116481420A (en) | Device and method for accurately positioning target point and measuring large-sized workpiece | |
| CN115700349A (en) | Method for measuring influence of temperature rise of screw rod on positioning error of horizontal shaft and control system | |
| JP2022179366A (en) | Sensor fusion for line tracking | |
| CN113775179A (en) | Concrete pump truck 3D printing control method and system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180601 |