CN108073192A - A kind of intelligent gas hood based on high/low-temperature impact system - Google Patents

A kind of intelligent gas hood based on high/low-temperature impact system Download PDF

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Publication number
CN108073192A
CN108073192A CN201711276827.5A CN201711276827A CN108073192A CN 108073192 A CN108073192 A CN 108073192A CN 201711276827 A CN201711276827 A CN 201711276827A CN 108073192 A CN108073192 A CN 108073192A
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CN
China
Prior art keywords
low
gas hood
drive mechanism
impact system
horizontal drive
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Pending
Application number
CN201711276827.5A
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Chinese (zh)
Inventor
郭伟
曹巍
陈雷刚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huali Microelectronics Corp
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Shanghai Huali Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201711276827.5A priority Critical patent/CN108073192A/en
Publication of CN108073192A publication Critical patent/CN108073192A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

The present invention proposes a kind of intelligent gas hood based on high/low-temperature impact system, including high-low temperature resistant sealing ring, gas flow sensor, horizontal drive mechanism, agitation fan, motor, fixed supporting seat, wherein described high-low temperature resistant sealing ring is arranged at the fixed supporting seat bottom, and the gas flow sensor and horizontal drive mechanism are arranged on the high-low temperature resistant sealing ring, and the agitation fan is arranged at by motor inside intelligent gas hood.Intelligent gas hood proposed by the present invention based on high/low-temperature impact system can reduce the direct shock-testing sample of height warm air, improve test data accuracy, height warm air is reduced to leak, test noise is reduced, reduces and triggers secondary injury because height warm air leaks, improve Security of test.

Description

A kind of intelligent gas hood based on high/low-temperature impact system
Technical field
It is a kind of based on high/low temperature the present invention relates to high/low-temperature impact system testing gas hood automaton, and more particularly to The intelligent gas hood of impact system.
Background technology
The high/low-temperature impact system that semiconductor industry uses at present uses the direct shock-testing sample of height warm air, so Causing test sample each several part, temperature distribution is non-uniform, causes each several part discontinuity, influences test sample yield and test The accuracy of data.Some Test Engineers install porous nozzle additional to single hole nozzle and reduce what air-flow directly impacted test sample It influences.But there is no much improvement, and test sample each several part, can not simulation test sample working environment there are temperature difference.
The leakproofness that is contacted with test board of gas hood of the system of high/low temperature test at present will by Test Engineer repeatedly It adjusts, it is time-consuming and laborious.It can not ensure when running into extensive sample test to contact closed type, cause height because sealing not perfect property Warm air, which leaks, causes noise, (125 degree) scald test employees of high temperature gas flow.Low-temperature airflow (subzero 40 degree) liquid Change generation droplet inflow lower section board and cause line short and electric leakage, and then harm test employee and board are safe.
The content of the invention
The present invention proposes a kind of intelligent gas hood based on high/low-temperature impact system, solves problems with:
(1) because of the direct shock-testing sample of height warm air, the inaccuracy of Example Test Data is triggered.
(2) reduce because high temperature gas flow leaks the scald of initiation, the board electric leakage and short circuit accident that cryogenic gas liquefaction triggers.
(3) because height warm air leaks, the test noise of initiation.
In order to achieve the above object, the present invention proposes a kind of intelligent gas hood based on high/low-temperature impact system, including resistance to height Low temperature seal ring, gas flow sensor, horizontal drive mechanism, agitation fan, motor, fixed supporting seat, wherein the resistance to height Low temperature seal ring is arranged at the fixed supporting seat bottom, and the gas flow sensor and horizontal drive mechanism are arranged at described On high-low temperature resistant sealing ring, the agitation fan is arranged at by motor inside intelligent gas hood.
Further, the high/low temperature airflow stirring that the agitation fan inputs high/low-temperature impact system is uniform.
Further, the quantity of the gas flow sensor and horizontal drive mechanism is multiple to set uniformly and symmetrically It is placed on the high-low temperature resistant sealing ring.
Further, the gas flow sensor and horizontal drive mechanism correspond, each gas flow sensor One group of mechanism is formed with corresponding horizontal drive mechanism, is arranged on the high-low temperature resistant sealing ring.
Further, the quantity of the gas flow sensor and horizontal drive mechanism is respectively 6, forms 6 groups of mechanisms It symmetrically is arranged on the high-low temperature resistant sealing ring.
Further, in the presence of the gas flow sensor detects abnormal airflow, signal is exported according to sensor, The high-low temperature resistant sealing ring at the horizontal drive mechanism Work Promote gas hood edge of opposite position, increases the sealing of gas hood Property.
Intelligent gas hood proposed by the present invention based on high/low-temperature impact system, can reduce height warm air and directly impact survey Test agent improves test data accuracy, reduces height warm air and leaks, reduces test noise, reduce outside because of height warm air Initiation secondary injury is let out, improves Security of test.
Description of the drawings
Fig. 1 show the intelligent gas cover structure schematic diagram based on high/low-temperature impact system of present pre-ferred embodiments.
Fig. 2 show the intelligent gas hood present invention looks up structural representation of present pre-ferred embodiments.
Specific embodiment
The specific embodiment of the present invention is provided below in conjunction with attached drawing, but the invention is not restricted to following embodiments.Root According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is using very simple The form of change and using non-accurate ratio, is only used for conveniently, lucidly aiding in illustrating the purpose of the embodiment of the present invention.
It please refers to Fig.1 and Fig. 2, Fig. 1 show the intelligent gas based on high/low-temperature impact system of present pre-ferred embodiments Cover structure schematic diagram.Fig. 2 show the intelligent gas hood present invention looks up structural representation of present pre-ferred embodiments.The present invention proposes a kind of Intelligent gas hood based on high/low-temperature impact system, including high-low temperature resistant sealing ring 100, gas flow sensor 200, horizontal drive Mechanism 300, agitation fan 400, motor 500, fixed supporting seat 600, wherein the high-low temperature resistant sealing ring 100 be arranged at it is described It is close that 600 bottom of fixed supporting seat, the gas flow sensor 200 and horizontal drive mechanism 300 are arranged at the high-low temperature resistant In seal ring 100, the agitation fan 400 is arranged at by motor 500 inside intelligent gas hood.
Preferred embodiment according to the present invention, the height warm air that the agitation fan 400 inputs high/low-temperature impact system It stirs evenly, the air-flow in gas hood is made to be avoided there is no the larger temperature difference because the direct shock-testing sample of height warm air generates Yield decline and test data inaccuracy.
The quantity of the gas flow sensor 200 and horizontal drive mechanism 300 is multiple, uniformly and is symmetrically disposed on On the high-low temperature resistant sealing ring 100.The gas flow sensor 200 and horizontal drive mechanism 300 correspond, Mei Geqi Body flow sensor 200 and corresponding horizontal drive mechanism 300 form one group of mechanism, are arranged at the high-low temperature resistant sealing ring On 100.In present pre-ferred embodiments, the quantity of the gas flow sensor 200 and horizontal drive mechanism 300 is respectively It 6, forms 6 groups of mechanisms and symmetrically is arranged on the high-low temperature resistant sealing ring 100.
In the presence of the gas flow sensor 200 detects abnormal airflow, signal is exported according to sensor, it is corresponding The high-low temperature resistant sealing ring 100 at the 300 Work Promote gas hood edge of horizontal drive mechanism of position increases gas hood and test board Leakproofness, so as to reduce seal closure gas leak, and then realize and reduce test noise, it is energy saving and reduce because of height wet Stream leaks the accident of initiation.
In conclusion the intelligent gas hood proposed by the present invention based on high/low-temperature impact system, with stirring wind in seal closure Fan substitutes traditional single tube and multitube nozzle, thus avoids the direct shock-testing sample of height warm air.It is installed additional on seal closure Horizontal drive mechanism and gas flow sensor realize that seal closure comes into full contact with test board, reduce high/low temperature gas leak, drop Low test noise reduces and triggers secondary injury because height warm air leaks, improves Security of test.
Although the present invention is disclosed above with preferred embodiment, however, it is not to limit the invention.Skill belonging to the present invention Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause This, the scope of protection of the present invention is defined by those of the claims.

Claims (6)

1. a kind of intelligent gas hood based on high/low-temperature impact system, which is characterized in that including high-low temperature resistant sealing ring, gas flow Sensor, horizontal drive mechanism, agitation fan, motor, fixed supporting seat, wherein the high-low temperature resistant sealing ring be arranged at it is described Fixed supporting seat bottom, the gas flow sensor and horizontal drive mechanism are arranged on the high-low temperature resistant sealing ring, institute Agitation fan is stated to be arranged inside intelligent gas hood by motor.
2. the intelligent gas hood according to claim 1 based on high/low-temperature impact system, which is characterized in that the agitation fan The high/low temperature airflow stirring that high/low-temperature impact system is inputted is uniform.
3. the intelligent gas hood according to claim 1 based on high/low-temperature impact system, which is characterized in that the gas flow The quantity of sensor and horizontal drive mechanism is multiple, uniformly and is symmetrically disposed on the high-low temperature resistant sealing ring.
4. the intelligent gas hood according to claim 3 based on high/low-temperature impact system, which is characterized in that the gas flow Sensor and horizontal drive mechanism correspond, and each gas flow sensor and corresponding horizontal drive mechanism form one group of machine Structure is arranged on the high-low temperature resistant sealing ring.
5. the intelligent gas hood according to claim 4 based on high/low-temperature impact system, which is characterized in that the gas flow The quantity of sensor and horizontal drive mechanism is respectively 6, and it is close that 6 groups of mechanisms of formation symmetrically are arranged at the high-low temperature resistant In seal ring.
6. the intelligent gas hood according to claim 1 based on high/low-temperature impact system, which is characterized in that when the gas stream In the presence of quantity sensor detects abnormal airflow, signal, the horizontal drive mechanism work of opposite position are exported according to sensor The high-low temperature resistant sealing ring at gas hood edge is promoted, increases the leakproofness of gas hood.
CN201711276827.5A 2017-12-06 2017-12-06 A kind of intelligent gas hood based on high/low-temperature impact system Pending CN108073192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711276827.5A CN108073192A (en) 2017-12-06 2017-12-06 A kind of intelligent gas hood based on high/low-temperature impact system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711276827.5A CN108073192A (en) 2017-12-06 2017-12-06 A kind of intelligent gas hood based on high/low-temperature impact system

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Publication Number Publication Date
CN108073192A true CN108073192A (en) 2018-05-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114216924A (en) * 2021-12-06 2022-03-22 中船九江大正科技有限公司 Temperature simulation test box based on incremental PID algorithm

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JPS54124788A (en) * 1978-03-20 1979-09-27 Toyota Motor Co Ltd Device for measuring degree of sealing of dust cover for ball joint
CN1621660A (en) * 2004-12-28 2005-06-01 蒋子刚 Kneading positive-displacement method of fluid machinery and mechanism and purpose thereof
CN203389658U (en) * 2013-07-04 2014-01-15 江苏白雪电器股份有限公司 High-low temperature resistant test chamber
CN103969004A (en) * 2014-05-13 2014-08-06 上海宇航系统工程研究所 High-low temperature environment dustproof sealing ring sealing performance testing device and testing method
CN204412277U (en) * 2014-12-30 2015-06-24 广东宏展科技有限公司 A kind of high-and-low temperature humid heat test box of rapid temperature rise and drop
CN204751033U (en) * 2015-07-02 2015-11-11 依顿科技有限公司 Dustless case of high low -temperature constant -temperature
CN105833923A (en) * 2016-05-10 2016-08-10 湖州唯立仪表厂 High-precision high-low-temperature constant-temperature testing device
CN205587003U (en) * 2016-05-10 2016-09-21 湖州唯立仪表厂 High low -temperature constant -temperature test device of high accuracy
CN106039336A (en) * 2016-08-05 2016-10-26 杨记宗 Multifunctional constant-temperature constant-humidity chamber
CN205797237U (en) * 2016-06-17 2016-12-14 中国航空无线电电子研究所 A kind of low-and high-temp test facility
CN206114497U (en) * 2016-10-26 2017-04-19 杭州泰鼎检测技术有限公司 High -low -temperature thermal -humidity test box

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124788A (en) * 1978-03-20 1979-09-27 Toyota Motor Co Ltd Device for measuring degree of sealing of dust cover for ball joint
CN1621660A (en) * 2004-12-28 2005-06-01 蒋子刚 Kneading positive-displacement method of fluid machinery and mechanism and purpose thereof
CN203389658U (en) * 2013-07-04 2014-01-15 江苏白雪电器股份有限公司 High-low temperature resistant test chamber
CN103969004A (en) * 2014-05-13 2014-08-06 上海宇航系统工程研究所 High-low temperature environment dustproof sealing ring sealing performance testing device and testing method
CN204412277U (en) * 2014-12-30 2015-06-24 广东宏展科技有限公司 A kind of high-and-low temperature humid heat test box of rapid temperature rise and drop
CN204751033U (en) * 2015-07-02 2015-11-11 依顿科技有限公司 Dustless case of high low -temperature constant -temperature
CN105833923A (en) * 2016-05-10 2016-08-10 湖州唯立仪表厂 High-precision high-low-temperature constant-temperature testing device
CN205587003U (en) * 2016-05-10 2016-09-21 湖州唯立仪表厂 High low -temperature constant -temperature test device of high accuracy
CN205797237U (en) * 2016-06-17 2016-12-14 中国航空无线电电子研究所 A kind of low-and high-temp test facility
CN106039336A (en) * 2016-08-05 2016-10-26 杨记宗 Multifunctional constant-temperature constant-humidity chamber
CN206114497U (en) * 2016-10-26 2017-04-19 杭州泰鼎检测技术有限公司 High -low -temperature thermal -humidity test box

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114216924A (en) * 2021-12-06 2022-03-22 中船九江大正科技有限公司 Temperature simulation test box based on incremental PID algorithm
CN114216924B (en) * 2021-12-06 2023-08-25 中船九江大正科技有限公司 Temperature simulation test box based on incremental PID algorithm

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Application publication date: 20180525