CN108070825A - Vacuum deposition apparatus and vacuum coating methods - Google Patents
Vacuum deposition apparatus and vacuum coating methods Download PDFInfo
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- CN108070825A CN108070825A CN201711084964.9A CN201711084964A CN108070825A CN 108070825 A CN108070825 A CN 108070825A CN 201711084964 A CN201711084964 A CN 201711084964A CN 108070825 A CN108070825 A CN 108070825A
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- crucible
- storage container
- vacuum
- evaporation material
- deposition apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to vacuum deposition apparatus（10）, there is vacuum chamber（2）；For receiving evaporation material（11）Crucible（31）；With for evaporation material（11）Storage container（41）Supplementary device（40）；And positioner（50）, which is formed to make the crucible（31）In vapor deposition position（33）With supplementary view（34）Between move back and forth, the supplementary view from the storage container for supplementing evaporation material；The wherein vapor deposition position（33）With the supplementary view（34）Positioned at the internal vacuum chamber.
Description
The present invention relates to a kind of vacuum deposition apparatus, particularly for coating optical element.The invention further relates to a kind of correspondences
Crucible cover with supplementary device and a kind of for evaporation material to be evaporated to the vacuum covering side on substrate in a vacuum
Method.
The vacuum deposition apparatus of type described in introductory song is known.Especially from a kind of vacuum known to 1 835 048 B1 of EP
Evaporated device and hemisphere cover（Kalotte）, have to hold and for rotation and/or the device of rolling object.
Vacuum evaporation equipment is interpreted as following equipment herein：By this equipment can in vacuum state, it is especially high
Coating of objects under vacuum state.Such as cathode sputtering equipment and evaporation equipment just belong to vacuum evaporation equipment, pass through these equipment
It can be with evaporation coating device, be for example evaporated by means of material definite in terms of electron beam or calorifics.By such equipment,
Such as thin film coated can be provided for optical element and non-optical elements.Optical element is hereinafter interpreted as following object：
The object expection is to electromagnetic radiation（Such as visible ray, UV or IR radiation）With what is absorbed, transmit, reflect, reflect or scatter
Function.Belong to the especially lens of optical element, such as eyeglass lens or contact lens.In addition it is flat to belong to also having for optical element
Face and round optic, prism, spherical shape or aspherical ophthalmic len, the spectacle glass piece with frame, oval ophthalmic len etc..
Non-optical elements are hereinafter interpreted as consumables.Such as it can be mentioned that instrument or its part, such as drill bit or equipment zero
Part.
The advantages of vacuum coating installation disclosed in 1 835 048 B1 of EP is, is overturn by using self-action and is
System can efficiently coat the obverse and reverse of such as optical lens in a course of work.
It is desirable that, provide a kind of can realize that the coating of bigger is more under efficient coating procedure in this context
The vacuum deposition apparatus of sample.In addition also it is desirable that, being capable of simply and inexpensively reality from existing equipment
The now device.
From a kind of vacuum coating installation known to 2 006 411 A1 of EP, wherein vacuum chamber a wall be break-through and
With the rotatable receiver for deposition unit with multiple rooms.Deposition unit can be placed in one of these rooms and
It can be directed by rotating from the outside of vacuum chamber in the inside of vacuum coating installation.Therefore deposition unit can be from outside
（Environmental air pressure）It is transferred to internal vacuum chamber（Vacuum）, and need not be by vacuum chamber venting.However such device is time-consuming expense
Power and costliness.
Become known for being evaporated in vacuo the dress of high-temperature superconductor in the case where continuous material supplements from 1 558 782 B1 of EP
It puts and method.High temperature superconducting materia is delivered continuously to vapor deposition area by conveying device from supplementary device.By means of on the rotating pan
Material track is continuously fed.
It is conveyed from a kind of known to 196 53 088 A1 of DE for directly supplementing the vibration coil pipe of evaporation source in a vacuum chamber
Device.The vibration coil pipe conveying device includes the tank for receiving material to be transported（The tank has conveying coil pipe on the inside of it）, by means of
Pendulous device with activation magnet and swing anchor can be swung and be arranged at the vacuum chamber surrounded by vacuum wall
In.The shortcomings that this solution, is complexity height.Due in the swing anchor in vacuum chamber and outside vacuum chamber
Activation magnet between existing gap, vacuum wall should especially be expanded by thin-walled, nonmagnetic component.Others are mended
Fill that put from JP61003880A and JP6173004A2 be known.
In addition, it is known for the supplementary device of vacuum coating installation, wherein evaporation material is continuously（Such as item
Carrying material or cable material）It is fed into evaporation coating device.DE 11 2,008 000 669 T5, DE 10 can be for example mentioned herein
2012 109 626 A1, US 2015/203958 A1, JP 4301071A and US 4262160A.However such solution is
It is time-consuming and laborious and expensive.In addition from a kind of deposition unit locking device known to 10 2,011 016 814 A1 of DE.
In this context, it is an object of the invention to provide a kind of vacuum deposition apparatus, the vacuum deposition apparatus is efficient
Coating procedure under can realize the coating diversity of bigger.In addition also it is desirable that, from existing equipment, especially
From existing the device can simply and be inexpensively realized for coating the equipment of optical element.
According to an aspect of the present invention, thus, it is proposed that providing a kind of vacuum deposition apparatus, particularly for coating optics member
Part, the vacuum deposition apparatus have：
- vacuum chamber；
- for receiving the crucible of evaporation material；
- for the storage container of evaporation material；And
- positioner, the positioner are formed that the crucible is made to move back and forth between vapor deposition position and supplementary view,
The supplementary view is used to supplement evaporation material from the storage container；
Wherein vapor deposition position and the supplementary view is located at the internal vacuum chamber.
Inventors have realised that especially when self-action is used to overturn system, in each case in individual crucible
Evaporation material amount may deficiency.For example, in the case of positive and negative flat coating, such as applicant passes through according to European patent
What the self-action overturning system of 2 057 299 B1 of document EP 1 835 048 B1 or EP can be realized, compared with One-sided coatings
For need the evaporation material amount of bigger.
Layer depending on desirable coating constructs, single especially in the case of the complicated coating for spectacle glass piece
The receiving capacity of only crucible is insufficient for required evaporation material amount.Due to limited receiving capacity, so applying
The possible diversity of layer variant is restricted.
It possible solution and be, the crucible of the bigger with sufficient receiving capacity is provided.
However inventors have realised that increase the quantity of the crucible of existing coating equipment and/or capacity is received only to have
It is feasible in the case of limit.In addition, in order to which the painting evaporated evaporation material from the crucible of bigger and have bigger evaporation coating device covers
Standby installing is related to significant cost.
Inventor has also recognised that, uses supplementary device（Evaporation material is directly fed into the position that should be deposited）
Also it is related to significant structural requirement.For example, material feeding may cause to block so that the coating of substrate is no longer uniform.In addition,
Evaporation material may be deposited at supplementary device so that needs clean supplementary device time-consuming and laboriously.In addition, it is covered for existing painting
It is standby to install such supplementary device（Such as from known to previously mentioned 196 53 088 A1 of DE）It is time-consuming and laborious and high
Expensive.Device described in previously mentioned 2 006 411 A1 of EP is also time-consuming and laborious and related to high cost.
Inventor has also recognised that continous way material is fed（Such as from previously mentioned 1 558 782 B1 of EP
It is known）It is unnecessary, because even also needing only to limited quantity of material in the case of positive and negative flat coating.In addition,
In that patent the disclosed continous way material feeding requirement by means of material track to the quantity of material that is output in rotating disk into
The metering of row high precision.
The basis of present inventive concept is, keep as far as possible the existing coating equipment for optical element component and
These components are made full use of when material subsequently transports.
The coating processes of optical element are characterized in that, during the coating process, usually by different evaporation materials
Multiple layers are deposited on a substrate（Such as spectacle glass piece）.For example, alternately deposit the first high index of refraction vapor deposition material
Material（Such as TiO2）Multiple layers and second of low-refraction evaporation material（Such as SiO2）Multiple layers.Thereby produce dielectric
Minute surface or optical filter, such as in order to provide the antireflection coatings for spectacle glass piece.
Alternating between different evaporation materials may proceed as follows, i.e. be provided with the more of different evaporation materials
A crucible（Evaporated receptacles）, these crucibles follow one another to one vapor deposition position movement.Such as crucible plate can be set therefore,
The crucible plate has the first crucible for receiving the first evaporation material of the first amount and the second vapor deposition for the first amount of reception
Second crucible of material.It is to be understood that crucible plate can also have other crucibles.
In such device, positioner can be selectively by the first or second（It is or optionally other）Crucible moves
It moves in vapor deposition position.Evaporation coating device is formed to evaporate evaporation material from the corresponding crucible in vapor deposition position.
Evaporation coating device can have preferably modulated electron-beam evaporator or by evaporation material thermal evaporation.
In proposed vacuum deposition apparatus, setting is at least one to be used to receive the crucible of evaporation material and for steaming
Plate the storage container of material.Positioner is formed that the crucible is made back and forth to transport between vapor deposition position and supplementary view
Dynamic, which is used to supplement evaporation material from the storage container.Wherein the vapor deposition position and the supplementary view, which are located at, is somebody's turn to do
Internal vacuum chamber.In other words, positioner is formed crucible position and supplementary view is being deposited in internal vacuum chamber
Between move back and forth.
Since proposed positioner is formed to make at least crucible reciprocal between vapor deposition position and supplementary view
Mobile, involved crucible can be supplemented being deposited outside position.The advantages of this solution, is that it is possible to significantly
Reduce complexity.For example, instead of laterally feeding（It may be necessary in position is deposited, to avoid blocking in evaporation
Substrate）, other evaporation material can be directly supplemented from top.
Preferably, the identical positioner be additionally operable to by the crucible with different evaporation materials be moved to vapor deposition position in,
And by these crucibles it is at least one vapor deposition position and supplementary view between move back and forth.The advantages of this solution
It is, do not cause additional cost and can preferably uses existing controller.Furthermore it is preferred that in supplementary view
Crucible supplemented, and simultaneously in parallel, evaporation material is applied to base from the other crucible in position is deposited
On piece.
Since vacuum deposition apparatus has the storage container for receiving the evaporation material of the second amount and is formed to use
In by the evaporation material of the second amount（Completely）It is transferred in the crucible of supplementary view, following coating can also be carried out：It needs
The amount of the receiving capacity of the coating of the independent evaporation material of relatively large amount, especially more than crucible.Preferably, evaporation material is from storage
Container is completely transferred in crucible so that need not measure or control supplementary material amount in the device.Preferably, supplementary device
Storage container have predetermined receiving capacity, the receiving capacity be not more than crucible to be filled receiving capacity, preferably therewith
It is corresponding.The advantages of this solution, is the simple structure of very little complexity.
Since supplementary view and vapor deposition position are located at internal vacuum chamber, there is no need to penetrate the wall of vacuum chamber, so as to reduce
Consuming and cost.In addition, as described in 2 006 411 A1 of EP, transit directly to high vacuum from atmospheric pressure and easily go out
Existing problem.In order to which coating material is introduced from outside into, it is recommended to use multistage technique especially has to carry out pressure match
The technique of medial compartment.In addition, when subsequently introducing material, it is different from 2 006 411 A1 of EP, it is not sent into any surrounding air
（It may cause the indoor pressure oscillation of vacuum and/or coating may be negatively affected, such as due to oxidation process）.
In proposed solution, the evaporation material in storage container is preferably exposed to true in vacuum chamber
It is empty.Evaporation material is preconditioned in storage container as a result,.For example, it can reduce or prevent during the coating process
Anti-avulsion gas.Thus eliminate for pressure match or for pre-adjusted medial compartment.Therefore the advantages of proposed solution
It can be, coating procedure can become more stable in terms for the treatment of process and therefore can realize better coating quality.Separately
The advantages of outer, can be the efficiency for shortening the process time and therefore improving equipment.
According to the second aspect of the invention, it is proposed that it is a kind of for vacuum deposition apparatus, there is the earthenware of supplementary device
Crucible lid, the wherein crucible cover are formed to cover crucible plate, which has crucible and other crucible, the crucible cover
Have
- for receiving the storage container of evaporation material；
Wherein the storage container is arranged at the upside of the crucible cover, and the crucible cover is formed to come with its downside
Cover the crucible plate；
Wherein the crucible cover has the first opening, to expose the crucible for being located at vapor deposition position of the crucible plate, and wherein should
Crucible cover has the second opening；And
Wherein the supplementary device is also formed as the evaporation material through second opening from the storage container at upside
In be transferred to the crucible plate at downside in the crucible of supplementary view.
The advantages of this solution, is, can simply install the existing device for being used to evaporate evaporation material.It is excellent
Selection of land substitutes existing crucible cover by the proposed crucible cover with supplementary device.Use proposed solution
It can especially implement to need the relatively great amount of independent coating processes for evaporating evaporation material.
Second opening and therefore supplementary view arranges with being preferably as follows：Make its being not currently in covered crucible plate
The position that the crucible of position is deposited is corresponding.
According to the third aspect of the present invention, it is proposed that a kind of vacuum coating methods, this method have steps of：
- in a vacuum chamber evaporate evaporation material from the crucible in vapor deposition position；
- in the internal vacuum chamber crucible is moved to supplementary view from the vapor deposition position, and by the evaporation material from the storage
Container is deposited to be transferred in the crucible；
- crucible is moved to the vapor deposition position from the supplementary view, and the evaporation material is evaporated from the crucible.
By this method can to provide a method this method have the advantages that previously for device one in described or
It is multiple.Preferably, this method can be performed with the device according to one of foregoing aspect.
It can be proposed in a design, storage container is arranged at internal vacuum chamber.The advantages of this design is, no
Must in order to material is fed and by vacuum chamber break-through.Other high sealing elements expended or a kind of lock lock system can be cancelled
（Schleusensystem）, particular with the lock lock system for the medial compartment that can dividually vacuumize.
It can be proposed in a design, in supplementary view, the outlet of storage container is located immediately at the opening of the crucible
Top.The evaporation coating device can have the supplementary device for including the storage container.The storage container of supplementary device and in supplement
One of crucible of crucible plate in position self can especially arrange as follows：So that the outlet of storage container located immediately at
The overthe openings of crucible.In other words, in filling, storage container can be preferably directly located above crucible to be filled.This
Kind design the advantages of be, evaporation material can be simply transported in crucible from storage container, for example, can simply from
It is dropped downward into storage container in crucible.With reference to proposed crucible cover, storage container can be arranged at crucible cover or crucible
Cover board second opening on, and one of these crucibles for example as the supplementary view below this opening by rotating crucible
Plate is positioned.Rotation can be carried out for example in the range of the rotation of normal crucible plate during coating processes, then from
The first evaporation material is deposited in first crucible for the first time.
In a kind of design, storage container and the crucible in supplementary view can arrange as follows：So that evaporation material
It is transferred to by means of gravity from storage container in crucible.Preferably, the inclusion of storage container shifts or is emptied into completely crucible
In.
In a kind of design, in addition vacuum deposition apparatus can have the closure member for storage container.Vacuum is steamed as a result,
Plating appts can be formed that the evaporation material from storage container is made to be emptied into from storage container by the opening of the closure member
In one of crucible of crucible plate in supplementary view.For example, closure member may be embodied as gate, turnover panel or sliding part.Such as
Fruit activates closure member, then the evaporation material from storage container can be preferably by force of gravity to the earthenware in supplementary view
In crucible.The advantages of this solution, is, the transport mechanism and/or metering device of any complexity is not required.
In an improvement project, closure member can be designed as the other device connection with vacuum coating installation as follows
It connects：So that it activates the other device while also realizes the opening of closure member.It is this be related to be a little, need not activate appoint
What additional actuator.Therefore, vacuum deposition apparatus can with cost it is very cheap realize.For example, can will anyway all
The machinery being present in vacuum chamber（Rotation）Device（Such as it is used for（In addition）The gate of hot vaporizer）It is connected with closure member
And activate the mechanical device.Alternatively or additionally, the electromechanics that can set to activate closure member activates device.
In a kind of design, storage container can be formed the storage container of infundibulate or cylinder.In a kind of design
In, closure member can be arranged at the downside of storage container.The advantages of infundibulate storage container, is that evaporation material can store up
It deposits in container and is sent to the closure member at downside along hopper walls.
In a kind of design, vacuum deposition apparatus be formed in single cleanup process by evaporation material from storage
Container is deposited to be completely transferred in the crucible in supplementary view.The advantages of this design, is simply to measure.Since storage is held
Device disposably empties completely, so time-consuming and laborious measurement and metering is not required.Therefore construction is simplified.Can especially it cancel true
Additional measurement and metering device in empty evaporation coating device.It is previously given desirable when filling storage container instead of this
Quantity of material.Therefore it is not related to continous way material supplement especially.It is to be understood that even if when emptying completely, storage can also be retained in
By the residual volume of structure qualification in container.
In a kind of design, can also be had according to the device of first aspect：Crucible plate, the crucible plate have above-mentioned earthenware
Crucible and other crucible；And the crucible cover for covering the crucible plate, the storage container of wherein supplementary device are arranged at this
At the upside of crucible cover, and the crucible cover is formed for cover the crucible plate on the downside of it, the wherein crucible cover to have
There is the first opening, to expose the crucible for being located at vapor deposition position of the crucible plate；And with the second opening, with will pass through this
What the evaporation material was transferred to from the storage container at upside the crucible plate at downside by two openings is located at supplement
In the crucible of position.
The advantages of this design, is that it is possible to prevent adjacent with the crucible in position is deposited however be hidden by crucible cover
The pollution of the crucible of lid.For example, it thus it can be prevented that around the splashings arrival for the crucible for coming comfortable vapor deposition position that there is it
The crucible of his evaporation material.Therefore higher coating quality or layer quality can be realized.
In addition, generate following synergistic effect, i.e. crucible cover can be used as supplementary device or its storage container simultaneously
Mechanical receiving element.Another advantage is to be achieved in the complexity of very little.In addition, existing coating unit can be with simple side
Formula method equips supplementary device according to the present invention.
In a kind of design, crucible can be moved back and forth by rotary motion between vapor deposition position and supplementary view.Example
Such as, be provided in rotatable crucible plate and these crucibles it is at least one can by rotary motion in vapor deposition position with mending
It fills between position and moves back and forth.Such rotary motion of crucible plate or rotation can advantageously be in the range of coating processes just
Normal crucible rotation, to be replaced between the different crucibles with different evaporation materials.Advantage in particular, in that, Neng Goushi
Existing corresponding synergistic effect.
In a kind of design, at least one and/or storage container in these crucibles can be formed to receive
Granular evaporation material.In particular, in that, easily this can be deposited by gravity using the advantages of graininess evaporation material
Material is transferred to from storage container in one of crucible in supplementary view.
In a kind of design, vacuum deposition apparatus can have material induction element, which is formed
For being guided evaporation material to the crucible in supplementary view from storage container.For example, material induction element can be funnel
Or connecting tube, the material induction element guide evaporation material into crucible from storage container.
In a kind of design, vacuum deposition apparatus can be electron beam evaporation device.
In a kind of design, vacuum deposition apparatus can have the holding unit for substrate to be coated, fixing dress
It puts and is arranged at internal vacuum chamber, wherein being formed turnover device for the holding unit of substrate to be coated, such as exist
Disclosed in 2 057 299 B1 of EP 1 836 048 B1 or EP.
The advantages of being described in detail previously with reference to first aspect present invention is accordingly suitable for the invention other aspects.
It is self-evident, it these above-mentioned features and can not only will respectively provided in feature described below
Combination in use, but also in other combinations or can be used alone, without departing from the scope of the present invention.
Embodiments of the present invention are illustrated in the accompanying drawings and it is explained in more detail in the following description.
Attached drawing is shown：
Fig. 1 shows the schematic illustration of the embodiment of the vacuum coating installation with vacuum deposition apparatus；
Fig. 2 shows the embodiment of the crucible plate with multiple crucibles；
Fig. 3 shows the embodiment of crucible plate, crucible cover and supplementary device；
Fig. 4 is shown in terms of the interior room of the vacuum coating installation of another embodiment with device according to an aspect of the present invention
Perspective diagram；And
Fig. 5 shows the embodiment of the flow chart of vacuum coating methods according to embodiments of the present invention.
Fig. 1 shows the schematic illustration of vacuum coating installation 1 according to an aspect of the present invention.Vacuum coating installation 1 has
For the vacuum deposition apparatus 10 with vacuum chamber 2 being evaporated to evaporation material on substrate 3 in a vacuum and for treating
The holding unit 4 of coated substrates 3.Vacuum deposition apparatus 10 can especially be formed to coat optical element.Preferably, very
The component of empty evaporation coating device 10 is arranged in completely inside vacuum chamber 2.Position 33 especially is deposited and supplementary view 34 is located at the vacuum
Inside room 2.Its advantage is, the sealing of vacuum chamber 2 is improved and limits the complexity of equipment.
Substrate 3 may, for example, be optical element to be coated, such as optical lens or spectacle glass.Holding unit is preferably certainly
Dynamic formula turnover device, which can carry out substrate 3 positive and negative coating, and need not intermittently lead to vacuum chamber 2 again
Gas.Such turnover device is for example disclosed in 2 057 299 B1 of EP 1 835 048 B1 or EP.It is set for vacuum covering
Standby vacuum chamber is known, and details are not described herein.In general, vacuum chamber 2 have pressure seal container and for
Wherein generate the pump of negative pressure or vacuum.
Vacuum deposition apparatus 10 have vacuum chamber 2, for receive evaporation material 11 crucible 31, with evaporation material 11
The supplementary device 40 of storage container 41；And positioner 50, the positioner are formed to make crucible 31 in vapor deposition position 33
With for being moved back and forth between the supplementary view 34 of storage container supplement evaporation material, wherein vapor deposition position 33 and supplementary view
34 are located at internal vacuum chamber.
Shown embodiment has vacuum deposition apparatus 10, evaporation coating device 20, crucible plate 30, supplementary device 40 in Fig. 1
With positioner 50.
Evaporation coating device 20 is formed to steam evaporation material 11,12 from the crucible 31,32 in vapor deposition position 33
Hair.In this example, evaporation coating device 20 is electron beam evaporation plating device, which evaporates vapor deposition by means of electron beam 21
Material 11.Electron beam 21 can be preferably by means of modulated magnetic field towards in the crucible 31,32 being deposited in position 33
Evaporation material 11 deflects.The evaporation material of evaporation is diffused into vacuum chamber 2 from evaporation position and then is deposited on as coating
On substrate 3.
Crucible plate 30 has for the first crucible 31 of the first evaporation material 11 of the first amount of reception and for receiving first
Second crucible 32 of the second evaporation material 12 of amount.
Fig. 2 shows the top view with the crucible plate 30 of multiple crucibles 31,32,35,36,37.These crucibles can receive
Same or different evaporation material.In this example, there are five crucibles, such as the layer for dielectric filter piece for the tool of crucible plate 30
The high index of refraction of construction, middle refractive index, low-index material and conductive material such as ITO（Indium tin oxide）With optional use
In another material of scratch resistant coatings.As seen from Figure 2, increase the crucible of existing coating equipment quantity and/or
Receive capacity only feasible in a limiting case.In addition, it is steamed to evaporate evaporation material from the crucible of bigger with bigger
The installing of the coating equipment of plating appts is related to significantly larger cost.Evaporation coating device 20 must be for example changed therefore so that electricity
Beamlet 21 can cover the region of bigger.
In existing coating equipment, the receiving capacity of crucible is typically enough to the one side of complete coated substrates 3.In manual overturning
This in the conventionally fabricated flow of spectacle glass piece is enough, because the vacuum chamber 2 of coating equipment is after coating glass one side
It is ventilated and is opened, so as to manual overturning sheet glass.In this course, when for example requiring the spy of relatively large amount evaporation material
In different coating it is necessary to when, crucible can also be filled again with evaporation material.
Crucible plate 30 can be preferably formed as the circular plate with the upper side and lower side.Crucible 31,32 is arranged at
The upside of crucible plate 30 and it can for example be configured to the recess in upside.Optionally, crucible can have so-called liner
Or crucible insert.It is easy cleaning crucible plate using the advantages of liner and is easily filled with evaporation material 11,12.
Crucible plate 30 couples with positioner 50, which is formed to make in this crucible 31,32 extremely
Few one moves back and forth between vapor deposition position 33 and supplementary view 34.In the embodiment shown in fig. 1, positioner 50 shows
Driving unit is shown as to meaning property, which can rotate crucible plate 30 around rotation axis 51, such as pass through arrow 52
It is shown.In other words, crucible plate 30 be rotatable and these crucibles 31,32 at least one can pass through rotary motion 52
It is moved back and forth between vapor deposition position 33 and supplementary view 34.
Supplementary device 40 can be as shown in fig. 1, preferably to combine with crucible cover 60.For example, existing crucible cover can be with
By being replaced according to an aspect of the present invention with the crucible cover 60 of supplementary device 40.Fig. 3 shows corresponding top view.Crucible cover
60 have the first opening 61, so that the crucible 31 for being in the crucible plate 30 of vapor deposition position 33 is exposed.Other crucible is subject to earthenware
Crucible lid 60 is protected, from the pollution of material to be deposited.It is possible thereby to realize high coating quality.Crucible cover 60 also has second to open
Mouth 62, second opening can also become supplementary opening.By second opening 62, can by the first evaporation material of the second amount from
The storage container 41 of supplementary device 40 is transferred to the supplementary view for being located at 62 lower section of supplementary device or the second opening of crucible plate 30
In crucible 31,32 in.It is optionally possible to one or more other supplementary openings 62 ' and other supplementary device are set
40’。
As shown in FIG. 1, supplementary device 40 has to receive evaporation material 11（It is herein the first vapor deposition of the second amount
Material 11）Storage container 41.Supplementary device 40 is also formed as shifting the first evaporation material 11 of the second amount everywhere
In the crucible 31, one of 32 of crucible plate 30 in supplementary view 34.In an illustrated embodiment, the positioning of desirable crucible
It is carried out by rotating crucible plate 30.Rotation preferably by during coating processes in the range of normal crucible rotation
Driving unit through existing positioner 50 carries out.
The advantages of proposed solution, can be easily to measure evaporation material.This can be realized as follows：It is required
The amount for the evaporation material 11 wanted is previously given when filling storage container 41, such as by container size or receives capacity
（Maximum loading）Or amount is measured in advance.Crucible 31,32 in supplementary view 34, below supplementary device 40 then can be with
It is quantitatively supplemented by emptying storage container 41 completely in cleanup process.Therefore other be not required in 2 inside of vacuum chamber
Metering or measuring device.
Another advantage of proposed solution is evaporation material 11 being simply transported to from storage container 41
In crucible 31,32 in supplementary view 34.The storage container 41 of supplementary device 40 can directly be arranged in supplementary view 34
In the top of crucible 31,32.Preferably, storage container 41 is arranged at therefore in the second opening 62 of crucible cover 62.It is desired
Crucible 31,32 lower section of the second opening 62 can be located in as described above by rotation crucible plate 30.Storage container 41 can be with
Such as it is formed funnel shaped or cylindrical storage container, closure member 42 is provided on the downside of it.The envelope of supplementary device 40
When closing member 42 is opened, evaporation material 11 is slipped into from storage container 41 in crucible 31,32 by means of gravity.In this embodiment, seal
Closing member 42 is formed sliding part or gate, however can also be other embodiment, such as is formed turnover panel or trapdoor.
It is optionally possible to material induction element 43 is set（It is illustratively shown herein in the form of connecting tube）, which is formed
To be used to the evaporation material 11 of the second amount being directed to the crucible 31, one of 32 in supplementary view 34 from storage container 41.
Another advantage can be, simply activate supplementary device so as to suitable time point by evaporation material 11 from
Storage container 41 is transferred in desirable crucible 31,32.
Fig. 4 is shown out of, another embodiment with device according to an aspect of the present invention vacuum coating installation 10
The perspective diagram that room is seen.The closure member 42 of storage container 41 is implemented in the form of sliding part herein.Closure member is herein with having deposited
In the device 70 in vacuum chamber（It is herein mechanical rotary device, which for example moves the gate of hot vaporizer）
It is connected as follows so that the actuating of device 70 also achieves the opening of closure member 42.At suitable time point, such as in the first amount
Evaporation material 11 from crucible 31 evaporate after and crucible 31 storage container is located in by rotary motion 52
After 41 lower sections, closure member 42 can be automatically turned on by activating the other device 70.For example, closure member 42 can lead to
Chain 44 is crossed with device 70 to be connected.Since device 70 is rotated and chain is rolled, closure member 42 is drawn from supplementary device
It is dynamic, then expose in the downside of storage container 41 and be open so that the evaporation material for the second amount being included in can be by means of
Gravity is fallen into the crucible 31,32 being located in supplementary view below.Alternatively or additionally, it can set and be mended for activating
Fill put 40 for example electromechanical activation device.
Fig. 5 shows the flow chart of method 80, and this method is used to that material will to be deposited by the vacuum coating installation according to the disclosure
Material is evaporated in vacuo on substrate.
In first step S81, at least one crucible is filled with evaporation material.In the second step, by storage container
It is filled with evaporation material.
Then, third step S83 evacuates vacuum chamber, and generates the vacuum for coating procedure.Previously described step
Suddenly it is preparation measures.
In step S84, evaporation material 11 is evaporated to vacuum chamber 2 from the crucible 31 in vapor deposition position is all or part of
In.Optionally, evaporation material and the overturning of the first amount can be applied to substrate afterwards.It preferably, can be with the positive and negative of coated substrates
Face, and need not be intermittently by vacuum chamber venting.
In step S85, crucible 31 is moved to supplementary view 34 from vapor deposition position 33 inside vacuum chamber 2, and will
Evaporation material 11 is transferred to from storage container 41 in crucible.
In a step s 86, the crucible 31 through supplement from supplementary view 34 be moved to vapor deposition position 33, and evaporation material from
Crucible evaporates.
And then, in the step S87 of core process arranged downstream, by generating atmospheric pressure again to vacuum chamber venting.
Then vacuum chamber can be opened and take out coated substrate.
Claims (13)
1. vacuum deposition apparatus（10）, have：
- vacuum chamber（2）；
- be used to receive evaporation material（11）Crucible（31）；
- for evaporation material（11）Storage container（41）；And
- positioner（50）, the positioner is formed to make the crucible（31）In vapor deposition position（33）With supplement
Position（34）Between move back and forth, the supplementary view is used for from the storage container（41）Middle supplement evaporation material（11）；
It is characterized in that, the vapor deposition position（33）With the supplementary view（34）Positioned at the internal vacuum chamber.
2. vacuum deposition apparatus according to claim 1（10）, which is characterized in that the storage container（41）It is arranged at
The vacuum chamber（2）It is internal.
3. the vacuum deposition apparatus according to one of preceding claims（10）, which is characterized in that in the supplementary view
（34）In, the storage container（41）Outlet located immediately at the crucible（31）Overthe openings.
4. the vacuum deposition apparatus according to one of preceding claims（10）, it is characterised in that for the storage container
（41）Closure member（42）.
5. vacuum deposition apparatus according to claim 4（10）, it is characterised in that device in addition（40）, wherein the envelope
Closing member（42）Be designed to as follows with other device（70）Connection：So that the actuating other device（70）It is also real
Now by the closure member（42）It opens.
6. vacuum deposition apparatus according to claim 4 or 5（10）, which is characterized in that the storage container（41）By shape
As funnel shaped or cylindrical.
7. the vacuum deposition apparatus according to one of claim 4 to 6（10）, which is characterized in that the closure member（42）Quilt
It is arranged in the storage container（41）Downside at.
8. the vacuum deposition apparatus according to one of preceding claims（10）, which is characterized in that the vacuum deposition apparatus
（10）Be formed in single cleanup process by the evaporation material（11）From the storage container（41）Transfer completely
To in the supplementary view（34）The crucible（31）In.
9. the vacuum deposition apparatus according to one of preceding claims（10）, it is characterised in that：Crucible plate（30）, the earthenware
Crucible plate has the crucible（31）With other crucible（32）；And for covering the crucible plate（30）Crucible cover（60）,
Wherein described supplementary device（40）Storage container（41）It is arranged at the crucible cover（60）Upside at, it is and described
Crucible cover（60）It is formed to cover the crucible plate with its downside（30）,
Wherein described crucible cover（60）With the first opening（61）, to expose the crucible plate（30）Be located at the vapor deposition position
It puts（33）Crucible（31,32）；And the crucible cover also has the second opening（62）, will pass through second opening（62）
By the evaporation material（11）From the storage container at upside（41）The crucible plate being transferred at downside（30）
Be located at the supplementary view（34）Crucible（31,32）In.
10. the vacuum deposition apparatus according to one of preceding claims（10）, which is characterized in that the vacuum evaporation dress
It puts（10）It is electron beam evaporation device.
11. for the vacuum deposition apparatus according to one of claims 1 to 10（10）Have supplementary device（40）Earthenware
Crucible lid（60）, wherein the crucible cover（60）It is formed to cover crucible plate（30）, the crucible plate is with crucible（31）
With other crucible（32）, the crucible cover has
- be used to receive evaporation material（11）Storage container（41）；
Wherein described storage container（41）It is arranged at the crucible cover（60）Upside at, and the crucible cover（60）By shape
As for covering the crucible plate with its downside（30）；
Wherein described crucible cover（60）With the first opening（61）, to expose the crucible plate（30）Be located at vapor deposition position
（33）Crucible（31,32）, and wherein described crucible cover（60）With the second opening（62）；And
Wherein described supplementary device（40）It is also formed as being open by described second（62）By the evaporation material（11）From
The storage container at upside（41）In be transferred to the crucible plate at downside（30）Be located at supplementary view（34）'s
Crucible（31,32）In.
12. the vacuum deposition apparatus according to one of preceding claims（10）, it is characterised in that for substrate to be coated
（3）Holding unit（4）, the holding unit is arranged at the vacuum chamber（2）Inside, wherein for substrate to be coated
（3）The holding unit（4）It is formed turnover device.
13. vacuum coating methods（80）, there are following steps：
- in vacuum chamber（2）It is middle by evaporation material（11）From the crucible in vapor deposition position（31）Middle evaporation（S84）；
It is characterized in that
- in the vacuum chamber（2）Inside is by the crucible（31）From the vapor deposition position（33）It is moved to supplementary view（34）, and
And by the evaporation material（11）From the storage container（41）It is transferred in the crucible（S85）；And
- by the crucible（31）From the supplementary view（34）It is moved to the vapor deposition position（33）, and by the vapor deposition material
Material（11）It is evaporated from the crucible（S86）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310034540.0A CN115961256A (en) | 2016-11-07 | 2017-11-07 | Vacuum deposition apparatus and vacuum coating method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016121256.3 | 2016-11-07 | ||
| DE102016121256.3A DE102016121256B4 (en) | 2016-11-07 | 2016-11-07 | Vacuum evaporation device, crucible cover with refill device and vacuum coating process |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310034540.0A Division CN115961256A (en) | 2016-11-07 | 2017-11-07 | Vacuum deposition apparatus and vacuum coating method |
Publications (1)
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| CN108070825A true CN108070825A (en) | 2018-05-25 |
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ID=62002871
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| CN202310034540.0A Pending CN115961256A (en) | 2016-11-07 | 2017-11-07 | Vacuum deposition apparatus and vacuum coating method |
| CN201711084964.9A Pending CN108070825A (en) | 2016-11-07 | 2017-11-07 | Vacuum deposition apparatus and vacuum coating methods |
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| CN (2) | CN115961256A (en) |
| DE (1) | DE102016121256B4 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113227438A (en) * | 2018-11-30 | 2021-08-06 | 磁性流体技术（美国）公司 | Crucible cover for electron beam source coating |
| CN116770236A (en) * | 2023-08-15 | 2023-09-19 | 广州市博泰光学科技有限公司 | Vacuum coating machine for optical lens coating |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108728801B (en) * | 2018-05-28 | 2019-11-12 | 深圳市华星光电技术有限公司 | Evaporation coating device and evaporation coating method |
| DE102023101846A1 (en) | 2023-01-25 | 2024-07-25 | Ferrotec Europe Gmbh | Evaporation crucible |
| CN116770234B (en) * | 2023-06-25 | 2023-12-15 | 苏州佑伦真空设备科技有限公司 | Crucible device for preventing material mixing |
| CN118581429A (en) * | 2024-08-06 | 2024-09-03 | 苏州佑伦真空设备科技有限公司 | Self-positioning crucible for evaporation |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE102016121256A1 (en) | 2018-05-09 |
| DE102016121256B4 (en) | 2020-11-26 |
| CN115961256A (en) | 2023-04-14 |
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Application publication date: 20180525 |