CN108061983B - Method and device for measuring distance from alignment film boundary to display area - Google Patents
Method and device for measuring distance from alignment film boundary to display area Download PDFInfo
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- CN108061983B CN108061983B CN201810005610.9A CN201810005610A CN108061983B CN 108061983 B CN108061983 B CN 108061983B CN 201810005610 A CN201810005610 A CN 201810005610A CN 108061983 B CN108061983 B CN 108061983B
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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Abstract
The invention discloses a method and a device for measuring the distance from the boundary of an alignment film to a display area. The method comprises the following steps: detecting the capacitance of a certain arrangement of plate capacitors arranged at the periphery of a display area of a substrate, wherein an alignment film vertically penetrates through and is coated on a first electrode of the alignment film; acquiring a working curve of the capacitance of the panel capacitor under the action of the alignment film under different coating conditions, wherein the coating conditions are associated with a first distance from the boundary of the alignment film to the end part of the first electrode on the display area side; determining a first distance between a boundary of the alignment film to the end of the first electrode based on the detected capacitance and the operation curve; and determining a distance from a boundary of the alignment film to the display region based on the first distance and a second distance from the first electrode to the display region. Therefore, the measuring speed and the measuring accuracy are greatly improved, and the dependence on the professional level of personnel is obviously eliminated; the operation is simple, the cost is low, the time of a new product production line can be reduced, and the utilization rate of the production line is improved.
Description
Technical Field
The invention relates to the technical field of liquid crystal display, in particular to a method and a device for measuring the distance (EM value for short) from the boundary of an alignment film on an array substrate to a display area.
Background
In the production process of the tft-lcd, the distance (EM value) from the alignment film boundary to the display region needs to be strictly controlled. When the EM value is too small, the boundary of the alignment film enters the display area, and edge light leakage is caused; when the EM value is too large, the alignment film covers a portion of the frame sealing glue region or the pad region, which is likely to cause other defects. Currently, the EM value is measured mainly by moving the camera to the edge of the display area, continuously adjusting the position of the camera to find the boundary of the alignment film in the image returned by the camera, manually identifying the boundary of the alignment film, and then manually measuring the EM value in the image returned by the camera.
The inventors have found that there are a number of problems in the current measurement of EM values. The alignment film is a transparent film, the edge of the alignment film is not easy to identify in a picture returned by a camera, the edge is difficult to find, false detection is easy to cause, and adjustment of an EM value is misled, so that edge light leakage, a frame sealing glue area or a pad area covering a part and the like are increased badly. Meanwhile, the existing measuring process takes a long time and depends heavily on personal experience of detection personnel, so that the instability of a detection result is increased, the time of production line occupation of a new product is increased, and the utilization rate of the production line is reduced.
Disclosure of Invention
Therefore, it is desirable to provide a method and a device for measuring the distance from the boundary of the alignment film to the display area, which avoid the dependence on the manual identification capability of the transparent alignment film, and can accurately, rapidly and even automatically measure the distance from the boundary of the alignment film to the display area, thereby automatically identifying the boundary of the alignment film, avoiding misleading on EM value adjustment, reducing the occurrence of defects, and simultaneously reducing the time consumption of a new product production line and improving the utilization rate of the production line.
According to a first aspect of the present invention, there is provided a method for measuring a distance from a boundary of an alignment film to a display region, comprising the steps of:
detecting the capacitance of a certain arrangement of plate capacitors arranged at the periphery of a display area of a substrate, wherein the alignment film vertically penetrates through and is coated on first electrodes of the plate capacitors;
acquiring a working curve of the capacitance of the certain arrangement of flat capacitors under the action of the alignment films under different coating conditions, wherein the coating conditions are associated with a first distance from the boundary of the alignment films to the end part of the first electrode on the display area side;
determining a first distance between a boundary of an alignment film to an end of the first electrode on the display region side based on the detected capacitance and the operation curve; and
and determining the distance from the boundary of the alignment film to the display area based on the first distance and the second distance between the first electrode and the display area.
Preferably, both electrodes of the panel capacitor are rectangular.
Preferably, the two electrodes of the plate capacitor are opposite and equal in area.
Preferably, the coating condition comprises a coating area.
Preferably, the coating condition includes a first distance between a boundary of the alignment film to an end of the first electrode on the display region side.
Preferably, the working curve is obtained by: arranging the certain arrangement of plate capacitors in a blank area of the substrate; coating alignment films of different areas on the first electrodes of the certain arrangement of plate capacitors, and enabling the alignment films to vertically penetrate through the first electrodes; and measuring the capacitance of the plate capacitor which is arranged in a certain way under the action of the alignment films with different coating areas, thereby obtaining the corresponding relation between the different coating areas and the capacitance as the working curve.
Preferably, the step of determining a first distance between the alignment film boundary to the end of the first electrode on the display region side based on the detected capacitance and the operation curve includes: obtaining the coating area of the alignment film corresponding to the detected capacitance based on the detected capacitance and the working curve; and a coating area of the corresponding alignment film, determining a first distance between a boundary of the alignment film and an end of the first electrode on the display region side.
Preferably, the first electrode of the panel capacitor is fabricated with a second indium zinc oxide layer and at the same layer.
According to a second aspect of the present invention, there is provided a measuring device of a distance from a boundary of an alignment film to a display region, characterized in that the measuring device comprises a plate capacitor having an arrangement, the plate capacitor comprising:
the first electrode is arranged at the periphery of the display area of the substrate;
the second electrode is arranged above the first electrode at a certain distance and has a certain dead-against area with the first electrode; and
and a coating portion of an alignment film that is a portion of the alignment film vertically passing through and coated on the first electrode of the panel capacitor.
Preferably, the first electrode of the panel capacitor is fabricated with a second indium zinc oxide layer and at the same layer.
The invention can realize the following beneficial technical effects: the measurement speed and the measurement accuracy are greatly improved, and the dependence on the professional level of personnel is obviously eliminated; the operation is simple, the cost is low, the time of a new product production line can be reduced, and the utilization rate of the production line is improved.
Drawings
Features, advantages, and technical and industrial significance of exemplary embodiments of the present invention will be described below with reference to the accompanying drawings, in which like reference numerals refer to like elements, and in which:
FIG. 1 is a schematic view showing a method of measuring a distance (abbreviated as EM value) from a boundary of an alignment film to a display region according to the prior art;
fig. 2 is a schematic view showing a method of measuring a distance (abbreviated as EM value) from a boundary of an alignment film to a display region according to a first embodiment of the present invention;
fig. 3 is a schematic cross-sectional view of a plate capacitor 6 as a measuring device of the distance from the boundary of an alignment film to a display region according to a second embodiment of the present invention, in which the structural relationship with the display region and the alignment film 3 is shown in its application; and
fig. 4 shows a top view of the substrate electrode 4 (also referred to as a first electrode) in the flat capacitor 6 according to the second embodiment of the present invention, in which the alignment film region S1 coated with the alignment film is shown.
Detailed Description
The following detailed description of embodiments of the invention is provided in connection with the accompanying drawings and the detailed description of embodiments of the invention, but is not intended to limit the invention.
Fig. 1 is a schematic diagram showing a method of measuring a distance (abbreviated as an EM value) from a boundary of an alignment film 3 to a display region 1 in the related art. As shown in fig. 1, the camera 2 is moved to the edge of the display area, the inspector manually observes the image 2 'returned by the camera 2, finds the boundary of the alignment film 3 by continuously adjusting the position of the camera 2, manually identifies the boundary of the alignment film 3, and manually measures the EM value in the image 2' returned by the camera 2. However, since the alignment film 3 is a transparent thin film, the boundary thereof is not easily recognized in the camera frame 2', which makes it difficult for the inspector to find the boundary, and thus makes it easy to cause false inspection or missing inspection, and further makes it possible to mislead the adjustment of the EM value, which causes undesirable increase of edge light leakage, poor frame sealing adhesive area or poor pad area of the covered portion, and the like. The existing measurement process is heavily dependent on the professional level of detection personnel, and the detection result is unstable. In addition, the existing measuring process needs to spend a long time, the time of the production line of a new product is increased, and the utilization rate of the production line is reduced.
Fig. 2 shows a schematic diagram of a measuring method of a distance (abbreviated as EM value) from a boundary of an alignment film 3 to a display area 1 according to a first embodiment of the present invention, the measuring method includes the steps of detecting a capacitance of an arrangement of flat capacitors 6 disposed at a periphery of the display area 1 of a substrate (step 11), as shown in fig. 2, through which the alignment film 3 vertically passes and is coated on substrate electrodes 4 of the flat capacitors 6, acquiring a working curve of the capacitance of the arrangement of flat capacitors 6 under different coating conditions associated with a first distance (e.g., L1 shown in fig. 3 and 4) from the boundary of the alignment film 3 to an end of the substrate electrodes 4 on the display area 1 side by the alignment film 3 (step 12), determining a first distance L (e.g., L shown in fig. 3 and 4) from the boundary of the alignment film 3 to the end of the substrate electrodes 4 on the display area 1 side based on the detected capacitance and the working curve (step 13), and determining a distance (e.g., a distance L) from the boundary of the alignment film 3 to the substrate electrodes 4 and a second distance (e.g., L) from the boundary of the alignment film 3 to the display area 1 (step 3).
As shown in fig. 2 and 3, the plate capacitor 6 includes: the substrate electrode 4, the said substrate electrode 4 is set up in the display interval 1 periphery of the base plate; a detection electrode 5 (also referred to as a second electrode), the detection electrode 5 being disposed above the substrate electrode 4 at a distance d and having a certain facing area S with the substrate electrode 4.
According to the theory of the plate capacitor, the following steps are carried out: capacitor with a capacitor element
Where S is the area of the substrate electrode 4 facing the detection electrode 5, the dielectric constant, and d is the distance between the electrodes in the capacitor 6. Note that when the substrate electrode 4 and the detection electrode 5 are both equal in area and face each other, the area S of any one electrode, for example, the detection electrode 5, is the facing area. As shown in fig. 2 and 3, the alignment film 3 vertically passes through and is coated on the substrate electrode 4 of the panel capacitor 6, whereby the portion of the alignment film 3 vertically passing through and coated on the substrate electrode 4 of the panel capacitor 6, that is, the coated portion of the alignment film 3, becomes a portion of the dielectric between the substrate electrode 4 and the detection electrode 5. When the plate capacitor 6 is arranged, that is, the facing area S and the inter-electrode distance d are set, the capacitance value C is related only to the dielectric constant, and the area of the coated portion of the alignment film 3 is the only factor to be affected.
Considering that the alignment film 3 passes perpendicularly through the substrate electrode 4, that is, the longitudinal extension direction of the alignment film 3 is perpendicular to the extension direction of the substrate electrode 4, when the shape of the substrate electrode 4 is set as a part of a certain arrangement of the capacitor 6, it is possible to establish a correspondence between the area of the coated portion of the alignment film 3 and a first distance between the boundary of the alignment film 3 to the end of the substrate electrode 4 on the display region 1 side, thereby converting the former into the first distance.
That is, the parameter affecting and thus affecting the capacitance value C is a parameter related to different coating conditions of the alignment film 3 with respect to the substrate electrode 4, including but not limited to the coating area of the alignment film 3 and the first distance between the boundary of the alignment film 3 and the end of the display region 1 side of the substrate electrode 4, and may also include other parameters into which the area of the coated portion of the alignment film 3 is converted, note that the other parameter is associated with and can be uniquely converted to the first distance (L1 shown in fig. 3 and 4) between the boundary of the alignment film 3 and the end of the display region 1 side of the substrate electrode 4.
For a circular substrate electrode 4 with a set diameter, the alignment film 3 passing through the substrate electrode 4 perpendicularly coats an arc region of the substrate electrode 4, the edge of one side of the coated part far away from the display region 1 is a chord of the arc region, and the area of the arc region and the chord length (or the corresponding central angle) have a unique corresponding relationship, so that the chord length or the corresponding central angle can be used as parameters related to different coating conditions of the alignment film 3 relative to the substrate electrode 4. Note that the chord length or central angle also corresponds to the first distance (i.e., the height of the arcuate region) and can be uniquely translated into the first distance.
The capacitance of the plate capacitor 6 detected in step 11 is correlated with the coating condition of the alignment film 3 with respect to the substrate electrode 4 therein, and as long as the correlation is known (step 12), the actual coating condition of the alignment film 3 with respect to the substrate electrode 4 can be found by collating the correlation with the detected capacitance of the plate capacitor 5, and further (the coating condition is not the first distance) or directly calculating (the coating condition is the first distance) the first distance between the boundary of the alignment film 3 and the end portion of the substrate electrode 4 on the display region 1 side (step 13).
In step 12, the working curves of the capacitances of the arranged plate capacitors 6 under the action of the alignment films 3 under different coating conditions are obtained. As an example, the following steps may be taken to obtain the working curve: the certain arrangement of plate capacitors 6 is arranged in the blank area of the substrate; coating alignment films 3 with different areas on the substrate electrodes 4 of the certain arrangement of flat capacitors 6, and enabling the alignment films 3 to vertically penetrate through the substrate electrodes 4; and measuring the capacitance of the plate capacitor 6 which is arranged in a certain way under the action of the alignment films 3 with different coating areas, thereby obtaining the corresponding relation between the different coating areas and the capacitance as the working curve.
The acquisition may be to set the alignment films 3 and the plate capacitors 6 in different coating conditions in situ (performed together with the detection process), and detect the capacitances of a series of corresponding plate capacitors 6 to generate a working curve of coating condition parameter-capacitance value.
The implementation of the acquisition is not limited thereto, and the relatively time-consuming process of generating the working curve may be performed online (together with the detection process) or offline, and the generated working curve corresponding to the certain arrangement of plate capacitors 6 is stored in a suitable memory for the processor to call in the program for calculating the EM value. In this way, the pre-generated and stored working curve corresponding to the certain arrangement of plate capacitors 6 can be shared and invoked by the measurement process using the EM value of the certain arrangement of plate capacitors 6. Therefore, the measurement speed of the EM value can be greatly accelerated, the pre-generated and stored working curve corresponding to the plate capacitor 6 which is arranged in a certain way can be efficiently utilized, and the waste of resources and time on the repeated generation of the plate capacitor is avoided.
In step 14, the distance from the boundary of the alignment film 3 to the display region 1 can be determined, for example, by summing up, based on the first distance (e.g., L1 shown in fig. 3 and 4) and the second distance (e.g., L2 shown in fig. 3) between the substrate electrode 4 and the display region 1, the second distance (e.g., L2 shown in fig. 3) between the substrate electrode 4 and the display region 1 can be measured by moving the camera 2, adjusting the position thereof in the image transmitted back by the camera 2 to find the boundary on the side of the display region 1 of the substrate electrode 4, and then measuring the distance between the boundary and the display region 1 in the transmitted back image as the second distance, but the determination method of the second distance is not limited thereto.
Preferably, the substrate electrode 4 can be fabricated simultaneously with the fabrication process of the second indium zinc oxide layer, at the same level as the second indium zinc oxide layer, without adding process steps. The second distance between the substrate electrode 4 and the display area 1 may be set when it is manufactured. In this way, the set second distance can be directly used in step 14 without a corresponding measurement having to be carried out.
The shapes and mutual relationships of the two substrates of the above-described plate capacitor 6 are not particularly limited, and may include any of a rectangle, a circle, an ellipse, and the like, as long as a certain arrangement of the plate capacitor 6 utilized at the time of detection is ensured to be the same as a certain arrangement of the plate capacitor 6 to which the operation curve referred at the time of calculation belongs.
Preferably, the two electrodes 4 and 5 of the plate capacitor 6 are rectangular, thereby facilitating the calculation of the first distance in step 13.
Examples of plate capacitors with rectangular electrodes
The following describes in detail the process of plotting the working curve and the process of measuring the EM value of the alignment film, taking as an example the case where the two electrodes 4 and 5 of the plate capacitor 6 are rectangular, equal in area, and face each other.
The substrate electrodes 4 are disposed at the periphery of the substrate display region 1 for measuring the EM value of the alignment film, and a plurality of the same substrate electrodes 4 are disposed in the blank region of the substrate for plotting the working curve, wherein, as shown in fig. 3 and 4, all the substrate electrodes 4 and the detection electrodes 5 have the same size, are oppositely positioned, are rectangular in shape, have the length of L, the width of W, the area of S, and S is L × W, and the distance between the substrate electrodes 4 and the detection electrodes 5 is d, wherein the numerical values of L and W, d are not limited.
For example, the substrate electrode 4 is manufactured at the same time as the manufacturing process of the array substrate of the second indium zinc oxide layer, and is positioned at the same layer as the second indium zinc oxide layer, so that no additional process step is needed.
The working curve is plotted as follows.
A plurality of same substrate electrodes 4 are arranged in the blank area of the array substrate, the alignment films 3 with different set areas S1 are coated, the reference capacitors 6 (in contrast to the measuring capacitors 6 for measurement) are formed by the corresponding detection electrodes 5 in the certain arrangement, and the capacitance values of the reference capacitors 6 are measured.
According to the theory of the plate capacitor, the following steps are carried out: capacitor with a capacitor element
S is the facing area of the substrate electrode 4 and the detection electrode 5, and since the substrate electrode 4 and the detection electrode 5 are facing and have the same area, S can be the area S of the substrate electrode 4, which is the dielectric constant, and d is the distance between the electrodes in the capacitor 6. The reference capacitors have the same values of S and d, and the capacitance C is only relevant. At this time, the coating area S1 (shown in fig. 4) of the alignment film 3 is the only factor of influence, and the difference is only related to the coating area S1 of the alignment film 3. Since the difference of the coating area S1 of the alignment film 3 causes the difference of the capacitors C, and S1 and C form a one-to-one correspondence relationship, a C-S1 working curve relating the capacitance C and the coating area S1 of the alignment film 3 can be drawn by using data processing software.
The measurement process of the alignment film EM value is as follows.
The substrate electrode 4 is disposed on the periphery of the display region 1 of the array substrate, the alignment film 3 is coated, the sensing electrode 5 is brought close to the substrate electrode 4, the sensing capacitor 6 is formed in the same arrangement as the above-mentioned reference capacitor except for the alignment film 3, and the capacitance of the sensing capacitor 6 is measured, the capacitance value C of the sensing capacitor is substituted into the above-mentioned C-S1 working curve to obtain the coated area S1 of the alignment film 3, since the substrate electrode 4 is rectangular, as shown in fig. 3 and 4, S1 ═ L1 × W (L1 is the first distance between the boundary of the alignment film 3 and the end of the display region 1 side of the substrate electrode 4), the first distance L1 is calculated, and the second distance L2 (as shown in fig. 3) from the substrate electrode 4 to the display region 1 is added to obtain the EM value, that is L1 + L2, wherein the value of the second distance L2 is not limited, specifically, the second distance L2 may be set in the return image of the camera by the above-mentioned method, and the substrate electrode 4 may be previously prepared to measure the substrate electrode 4.
With the above-described method for measuring the distance (abbreviated as EM value) from the boundary of the alignment film 3 to the display area 1 (including the example of the flat capacitor having the rectangular electrode and those described above) according to the present invention, the first distance between the boundary of the alignment film 3 and the end of the substrate electrode 4 on the display area 1 side can be obtained quickly and accurately with reference to the corresponding operation curve based on the capacitance of the detection capacitor 6 obtained by the detection, the process of obtaining the first distance involves only the simple processes of constructing the detection capacitor 6, the capacitance of the detection capacitor 6 and the related calculation, the process of fabricating the substrate electrode 4 in the process of constructing the capacitor 6 can be fabricated simultaneously with the process of fabricating the second indium zinc oxide layer, is in the same layer as the second indium zinc oxide layer, does not require the addition of process steps, is simple in operation, low in cost, and does not depend on the experience of the person, the worker who is simply trained can finish the manufacture of the detection capacitor 6; the capacitance detection of the capacitor 6 may be performed by an inherent detection circuit, and even the detected value of the capacitance may be automatically read out and supplied to data processing software; knowing a certain arrangement of the detection/reference capacitor 6, the corresponding parameters and formulas can be written into the data processing software, with which the corresponding operating curve is automatically retrieved and the first distance is automatically calculated. The process of obtaining the second distance may be measured in the image returned by the camera by the above method, or may be preset when the substrate electrode 4 is manufactured. The preset mode avoids the detection process; even if the measurement is carried out in the image returned by the camera by adopting the method, the substrate electrode 4 is not transparent like the alignment film 3 and can be easily identified manually in the image returned by the camera, and the shape of the substrate electrode 4 is known, the substrate electrode can be rapidly and automatically identified or segmented in the image returned by the camera by utilizing a mode identification or object segmentation algorithm, so that the calculation is rapidly and automatically carried out.
Compared with the prior art, the measuring method for the distance (EM value for short) from the boundary of the alignment film 3 to the display area 1 has greatly improved measuring speed and accuracy, and is remarkably free from dependence on professional level of personnel. The measuring method is simple to operate and low in cost, and can reduce the time occupied by a new product production line and improve the utilization rate of the production line.
As an example, fig. 3 shows a schematic cross-sectional view of a plate capacitor 6 as a measuring device of the distance from the boundary of the alignment film 3 to the display region 1 according to a second embodiment of the present invention, in which the structural relationship with the display region 1 and the alignment film 3 is shown in its application. In particular, the measuring device comprises a plate capacitor 6 having an arrangement comprising: the substrate electrode 4, the said substrate electrode 4 is set up in the display interval 1 periphery of the base plate; the detection electrode 5 is arranged above the substrate electrode 4 at a certain distance d, and has a certain facing area with the substrate electrode 4, and when the two facing areas are the same, the facing area is the electrode area S of the detection electrode 5 or the substrate electrode 4; and a coating portion of the alignment film 3, which is a portion of the alignment film 3 vertically passing through (as shown in fig. 2) and coated on the substrate electrode 4 of the panel capacitor 6, that is, a portion of the alignment film 3 overlapping the substrate electrode 4 in fig. 3.
The plate capacitor 6 may be used as the detection capacitor described above, and may also be used as the reference capacitor described above.
Preferably, the substrate electrode 4 of the panel capacitor 6 is formed together with the second indium zinc oxide layer in the same layer, so that the measuring device can be manufactured without additional process steps, and is convenient and low in cost, and has little influence on other process steps of the liquid crystal display. After the detection of the EM value of the alignment film 3 is completed, the detection electrode 5 and the corresponding capacitor 6 may be removed, thereby minimizing the influence on other process steps of the liquid crystal display.
The above embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and the scope of the present invention is defined by the claims. Various modifications and equivalents may be made by those skilled in the art within the spirit and scope of the present invention, and such modifications and equivalents should also be considered as falling within the scope of the present invention.
Claims (10)
1. A method for measuring a distance from a boundary of an alignment film to a display region, comprising the steps of:
detecting the capacitance of a certain arrangement of plate capacitors arranged at the periphery of a display area of a substrate, wherein the alignment film vertically penetrates through and is coated on first electrodes of the plate capacitors;
acquiring a working curve of the capacitance of the certain arrangement of flat capacitors under the action of the alignment films under different coating conditions, wherein the coating conditions are associated with a first distance from the boundary of the alignment films to the end part of the first electrode on the display area side;
determining a first distance between a boundary of an alignment film to an end of the first electrode on the display region side based on the detected capacitance and the operation curve; and
and determining the distance from the boundary of the alignment film to the display area based on the first distance and the second distance between the first electrode and the display area.
2. The measurement method according to claim 1, wherein both electrodes of the plate capacitor are rectangular.
3. The measurement method according to claim 2, wherein the two electrodes of the plate capacitor are opposite and equal in area.
4. The measurement method according to claim 2, wherein the coating condition includes a coating area.
5. The measuring method according to claim 2, wherein the coating condition includes a first distance between a boundary of the alignment film to an end portion on the display region side of the first electrode.
6. The measurement method according to claim 1, characterized in that the operating curve is obtained by:
arranging the certain arrangement of plate capacitors in a blank area of the substrate;
coating alignment films of different areas on the first electrodes of the certain arrangement of plate capacitors, and enabling the alignment films to vertically penetrate through the first electrodes;
and measuring the capacitance of the plate capacitor which is arranged in a certain way under the action of the alignment films with different coating areas, thereby obtaining the corresponding relation between the different coating areas and the capacitance as the working curve.
7. The measuring method according to claim 6, wherein the step of determining a first distance between a boundary of an alignment film to an end of the first electrode on the display area side based on the detected capacitance and the operation curve comprises:
obtaining the coating area of the alignment film corresponding to the detected capacitance based on the detected capacitance and the working curve;
and a coating area of the corresponding alignment film, determining a first distance between a boundary of the alignment film and an end of the first electrode on the display region side.
8. A method of measurement according to claim 1, wherein the first electrode of the plate capacitor is fabricated with a second indium zinc oxide layer and at the same level.
9. A device for measuring a distance from a boundary of an alignment film to a display region, comprising a plate capacitor having an arrangement, the plate capacitor comprising:
the first electrode is arranged at the periphery of the display area of the substrate;
the second electrode is arranged above the first electrode at a certain distance and has a certain dead-against area with the first electrode; and
and a coating portion of an alignment film that is a portion of the alignment film vertically passing through and coated on the first electrode of the panel capacitor.
10. The device for measuring the distance from the boundary of an alignment film to a display area according to claim 9, wherein the first electrode of the panel capacitor is formed together with the second indium zinc oxide layer and is in the same layer.
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| CN103105703A (en) * | 2013-01-30 | 2013-05-15 | 北京京东方光电科技有限公司 | Detection method of alignment layer and relative device |
| CN103604359A (en) * | 2013-11-26 | 2014-02-26 | 北京金自能源科技发展有限公司 | Relative-position detection method of band-like material |
| CN103676328A (en) * | 2013-12-20 | 2014-03-26 | 深圳市华星光电技术有限公司 | Edge obtaining method and detecting method for alignment film |
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