CN108054125B - Overlap joint type carbon fiber carrier plate - Google Patents
Overlap joint type carbon fiber carrier plate Download PDFInfo
- Publication number
- CN108054125B CN108054125B CN201810024713.XA CN201810024713A CN108054125B CN 108054125 B CN108054125 B CN 108054125B CN 201810024713 A CN201810024713 A CN 201810024713A CN 108054125 B CN108054125 B CN 108054125B
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- China
- Prior art keywords
- transverse
- main ribs
- carbon fiber
- longitudinal
- rib
- Prior art date
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- 229920000049 Carbon (fiber) Polymers 0.000 title claims abstract description 44
- 239000004917 carbon fiber Substances 0.000 title claims abstract description 44
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 title claims abstract description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 16
- 239000010703 silicon Substances 0.000 claims abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 4
- 239000010439 graphite Substances 0.000 claims abstract description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 239000007770 graphite material Substances 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
- H01L21/67336—Trays for chips characterized by a material, a roughness, a coating or the like
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laminated Bodies (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a lap joint type carbon fiber carrier plate, which comprises a carbon fiber transverse rib plate, a carbon fiber transverse main rib, a carbon fiber longitudinal main rib and a graphite carrier plate guide bar, wherein the carbon fiber transverse rib plate is made of carbon fiber; the guide strips of the carrier plates at the two ends are respectively connected to the transverse rib plates at the two ends through M6 screws; the longitudinal main ribs are arranged in parallel at equal intervals along the transverse direction and are respectively overlapped on the transverse main ribs and the transverse rib plates through M2 screws; the transverse main ribs are arranged in parallel at equal intervals along the longitudinal direction and are respectively lapped on the longitudinal main ribs through M2 screws; the longitudinal main ribs and the transverse main ribs comprise a main body part and a limiting part which are integrally arranged, the longitudinal main ribs and the transverse main ribs are overlapped through the main body part, and a silicon wafer bearing area is formed through the limiting part. The invention has novel structure, is formed by overlapping the carbon fiber rib plates and the main ribs, reduces the manufacturing cost of materials and can realize local repair by only partially replacing the main ribs.
Description
Technical Field
The invention relates to the technical field of solar cell silicon wafer production, in particular to a lap joint type carbon fiber carrier plate for silicon wafer bearing.
Background
The limited nature of conventional energy resources and the increasing environmental pressure have led to renewed support for new and renewable energy technology development in many countries around the world. New energy is one of five technical fields with the most decisive force in the world economic development of twenty-first century. Solar energy is a clean, efficient and never-failing new energy source. The photovoltaic power generation has the advantages of safety, reliability, no noise, no pollution, less restriction, low failure rate, simple maintenance and the like, and has a very unique effect under the realistic conditions of severe cold in the western wide range of China, various terrains and scattered living. Solar cells are the core device for photovoltaic power generation.
In the production process of the solar cell, a silicon wafer is placed on a carrier plate, the silicon wafer is carried by the carrier plate and enters solar cell coating equipment, process reaction is carried out in the equipment, meanwhile, a process chamber of the process is heated to high temperature of 400 ℃, the highest temperature reaches 600 ℃, and the carrier plate is required to have stronger high temperature resistance. Meanwhile, the conveying line of the processing equipment has larger span, so that the carrier plate has large size, light weight and good rigidity. In conclusion, the carbon fiber material is very suitable, and the carbon fiber plate has excellent performances of high strength, low density, high temperature resistance and the like. At present, the common practice in the industry is to use the whole carbon fiber plate to process the required shape characteristics to bear the silicon wafer, the whole carbon fiber plate is expensive, meanwhile, the characteristics required to be processed are very large, the area below the silicon wafer is required to be processed into hollowed-out parts, the processing amount of materials is relatively large, and the method is a great challenge for the low-profit solar energy industry.
Therefore, how to reduce the production and use costs while using carbon fiber materials is a problem that this patent needs to solve.
Disclosure of Invention
In order to solve the technical problems, the invention provides a lap joint type carbon fiber carrier plate, which comprises a carbon fiber transverse rib plate, a carbon fiber transverse main rib, a carbon fiber longitudinal main rib and a graphite carrier plate guide bar;
the support plate guide strips at the two ends are respectively connected to the transverse rib plates at the two ends through screws and used for transversely moving and guiding the support plate;
the longitudinal main ribs are arranged in parallel at equal intervals along the transverse direction and are respectively lapped on the transverse main ribs and the transverse rib plates through screws;
the transverse main ribs are arranged in parallel at equal intervals along the longitudinal direction and are respectively lapped on the longitudinal main ribs through screws;
the longitudinal main ribs and the transverse main ribs comprise a main body part and a limiting part which are integrally arranged, and the longitudinal main ribs and the transverse main ribs are overlapped through the main body part and form a silicon wafer bearing area through the limiting part.
The two ends of the longitudinal main ribs are provided with grooves with the same thickness as the transverse rib plates, and the two ends of the longitudinal main ribs are lapped on the transverse rib plates at the two ends through the grooves and are locked and connected through M2 screws.
The longitudinal main ribs are provided with clamping grooves with the same width and thickness as those of the main body parts of the transverse main ribs at equal intervals, the main body parts of the transverse main ribs are clamped into the clamping grooves to achieve lap joint, locking grooves are formed in the other sides of the longitudinal main ribs, which correspond to the clamping grooves, locking holes penetrating through the clamping grooves and the locking grooves are formed in the other sides of the longitudinal main ribs, and the longitudinal main ribs and the transverse main ribs are locked at lap joint positions through screws corresponding to the locking holes.
The limiting parts of the transverse main ribs are identical to the limiting parts of the longitudinal main ribs in height, and the limiting parts form a silicon wafer bearing area identical to the silicon wafer in specification through longitudinal and transverse enclosing.
According to the technical scheme, the lap joint scheme is used, the large frame of the structure is determined through finite element analysis, analysis and calculation, and then the carbon fiber material has the material properties of high temperature resistance, corrosion resistance and high strength by selecting proper carbon fiber rib plates and main ribs according to the size of the required carrier plate to be lap-jointed and combined into the carrier plate; the rib plates of the carbon fibers and the main ribs are connected through mortise and tenon joints and are combined with lock screws, so that the stability of the frame is ensured; selecting carbon fiber rib plates with proper length, width and height and main ribs to ensure the rigidity of the frame; through the measures, the stability and rigidity problems of the carrier plate are solved, and meanwhile, the material cost is greatly reduced due to the application of the carbon fiber material; meanwhile, if the carrier plate is damaged, the repair of the carrier plate can be realized by replacing local carbon fiber main ribs, so that the cost caused by replacing the whole plate is reduced; in addition, the support plate guide strip is made of graphite material, and the graphite material has the advantages of high temperature resistance, small friction coefficient and the like.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the description of the embodiments will be briefly described below.
FIG. 1 is a schematic front perspective view of a lapped carbon fiber carrier plate according to an embodiment of the present invention;
FIG. 2 is a schematic view of a back perspective structure of a lapped carbon fiber carrier plate according to an embodiment of the present invention;
FIG. 3 is a schematic side view of an end of a lapped carbon fiber carrier plate according to an embodiment of the present invention;
fig. 4 is a schematic view of a vertical main rib in a three-dimensional structure according to an embodiment of the present invention;
FIG. 5 is an enlarged schematic view of the structure of the portion I in FIG. 4;
fig. 6 is a schematic cross-sectional structure of a transverse main rib according to an embodiment of the present invention.
The figures represent the numbers:
1. transverse rib plate 2, silicon slice 3.M2 screw
4.M6 screw 5. Transverse Main Reinforcement 6. Longitudinal Main Reinforcement
7. Carrier plate guide bar 8, clamping groove 9 and locking groove
10. Locking hole 11. Limit part
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Referring to fig. 1-6, the lap joint type carbon fiber carrier plate provided by the invention comprises a carbon fiber transverse rib plate 1, a carbon fiber transverse main rib 5, a carbon fiber longitudinal main rib 6 and a graphite carrier plate guide bar 7; the two ends of the carrier plate guide strips 7 are respectively connected to the two ends of the transverse rib plates 1 through M6 screws 4 for transverse movement guide of the carrier plates; the longitudinal main ribs 6 are arranged in parallel at equal intervals along the transverse direction and are respectively overlapped on the transverse main ribs 5 and the transverse rib plates 1 through M2 screws; the transverse main ribs 5 are arranged in parallel at equal intervals along the longitudinal direction and are respectively overlapped on the longitudinal main ribs 6 through M2 screws; the longitudinal main ribs 6 and the transverse main ribs 5 comprise a main body part and a limiting part 11 which are integrally arranged, the longitudinal main ribs 6 and the transverse main ribs 5 are overlapped through the main body part, the limiting part 11 of the transverse main ribs 5 is consistent with the limiting part 11 of the longitudinal main ribs 6 in height, and the limiting part 11 forms a silicon wafer bearing area consistent with the specification of the silicon wafer 2 through longitudinal and transverse enclosing.
Grooves with the same thickness as the transverse rib plates 1 are formed in the two ends of the longitudinal main rib 6, and the two ends of the longitudinal main rib 6 are lapped on the transverse rib plates 1 at the two ends through the grooves and are locked and connected through M2 screws 3; the longitudinal main ribs 6 are provided with clamping grooves 8 which are equal in distance with the width and thickness of the main body of the transverse main ribs 5 and correspond to one side of the transverse main ribs 5, overlap joint is achieved by clamping the main body of the transverse main ribs 5 into the clamping grooves 8, locking grooves 9 are formed in the other side of the longitudinal main ribs 6, corresponding to the clamping grooves 8, locking holes 10 penetrating through the clamping grooves 8 and the locking grooves 9 are formed in the other side of the longitudinal main ribs 6, and the longitudinal main ribs 6 and the transverse main ribs 5 are locked at the overlap joint positions through M2 screws 3 corresponding to the locking holes 10 at the positions of the locking grooves 9.
The invention uses the lap joint scheme, the large frame of the structure is determined by finite element analysis, analysis and calculation, and then the carbon fiber material has the material properties of high temperature resistance, corrosion resistance and high strength by selecting the proper carbon fiber transverse rib plate 1, the transverse main rib 5 and the longitudinal main rib 6 to be lap-jointed and combined into the carrier plate according to the size of the required carrier plate; the transverse rib plates 1, the transverse main ribs 5 and the longitudinal main ribs 6 of the carbon fibers are connected through mortise and tenon joints and combined with the lock M2 screws 3, so that the stability of the frame is ensured; the carbon fiber transverse rib plates 1, the transverse main ribs 5 and the longitudinal main ribs 6 with proper length, width and height are selected to ensure the rigidity of the frame; through the measures, the stability and rigidity problems of the carrier plate are solved, and meanwhile, the material cost is greatly reduced due to the application of the carbon fiber material; meanwhile, if the carrier plate is damaged, the carrier plate can be repaired by replacing the local carbon fiber transverse main ribs 5 or the longitudinal main ribs 6, so that the cost caused by replacing the whole plate is reduced; in addition, the carrier plate guide strip 7 is made of graphite material, and the graphite material has the advantages of high temperature resistance, small friction coefficient and the like.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to the embodiments described above will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (3)
1. The lap joint type carbon fiber carrier plate is characterized by comprising a carbon fiber transverse rib plate, a carbon fiber transverse main rib, a carbon fiber longitudinal main rib and a graphite carrier plate guide bar;
the support plate guide strips at the two ends are respectively connected to the transverse rib plates at the two ends through screws and used for transversely moving and guiding the support plate;
the longitudinal main ribs are arranged in parallel at equal intervals along the transverse direction and are respectively lapped on the transverse main ribs and the transverse rib plates through screws;
the transverse main ribs are arranged in parallel at equal intervals along the longitudinal direction and are respectively lapped on the longitudinal main ribs through screws;
the longitudinal main ribs are provided with clamping grooves with the same width and thickness as those of the main body parts of the transverse main ribs at equal intervals on one side of the longitudinal main ribs, the main body parts of the transverse main ribs are clamped into the clamping grooves to realize lap joint, locking grooves are formed on the other side of the longitudinal main ribs, which corresponds to the clamping grooves, locking holes penetrating through the clamping grooves and the locking grooves are formed on the other side of the longitudinal main ribs, and the longitudinal main ribs and the transverse main ribs are locked at the lap joint positions through screws, which correspond to the locking holes, on the locking groove positions;
the longitudinal main ribs and the transverse main ribs comprise a main body part and a limiting part which are integrally arranged, and the longitudinal main ribs and the transverse main ribs are overlapped through the main body part and form a silicon wafer bearing area through the limiting part.
2. The lapped carbon fiber support plate according to claim 1, wherein grooves with the same thickness as the transverse rib plates are formed at two ends of the longitudinal main rib, and the two ends of the longitudinal main rib are lapped on the transverse rib plates at two ends through the grooves and are locked and connected through screws.
3. The lapped carbon fiber carrier plate according to claim 1, wherein the limiting part of the transverse main rib is in height conformity with the limiting part of the longitudinal main rib, and the limiting part forms a silicon wafer bearing area in conformity with the silicon wafer specification through longitudinal and transverse enclosing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810024713.XA CN108054125B (en) | 2018-01-11 | 2018-01-11 | Overlap joint type carbon fiber carrier plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810024713.XA CN108054125B (en) | 2018-01-11 | 2018-01-11 | Overlap joint type carbon fiber carrier plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108054125A CN108054125A (en) | 2018-05-18 |
| CN108054125B true CN108054125B (en) | 2024-02-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810024713.XA Active CN108054125B (en) | 2018-01-11 | 2018-01-11 | Overlap joint type carbon fiber carrier plate |
Country Status (1)
| Country | Link |
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| CN (1) | CN108054125B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115161620A (en) * | 2022-07-12 | 2022-10-11 | 上海德瀛睿创半导体科技有限公司 | Support plate and coating equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201834967U (en) * | 2010-10-11 | 2011-05-18 | 晶澳太阳能有限公司 | Graphite frame for silicon solar battery plates |
| CN202279141U (en) * | 2011-10-19 | 2012-06-20 | 深圳市创益科技发展有限公司 | Transfer vehicle for loading solar cell substrates |
| CN203593784U (en) * | 2013-11-26 | 2014-05-14 | 苏州阿特斯阳光电力科技有限公司 | Graphite frame |
| CN206271738U (en) * | 2016-12-22 | 2017-06-20 | 南京仁厚科技有限公司 | Hook carries upper plated film support plate |
| CN206293458U (en) * | 2016-12-14 | 2017-06-30 | 南京仁厚科技有限公司 | A kind of support plate for solar battery sheet coating process |
| CN207731912U (en) * | 2018-01-11 | 2018-08-14 | 常州比太黑硅科技有限公司 | A kind of bridging type carbon fiber support plate |
-
2018
- 2018-01-11 CN CN201810024713.XA patent/CN108054125B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201834967U (en) * | 2010-10-11 | 2011-05-18 | 晶澳太阳能有限公司 | Graphite frame for silicon solar battery plates |
| CN202279141U (en) * | 2011-10-19 | 2012-06-20 | 深圳市创益科技发展有限公司 | Transfer vehicle for loading solar cell substrates |
| CN203593784U (en) * | 2013-11-26 | 2014-05-14 | 苏州阿特斯阳光电力科技有限公司 | Graphite frame |
| CN206293458U (en) * | 2016-12-14 | 2017-06-30 | 南京仁厚科技有限公司 | A kind of support plate for solar battery sheet coating process |
| CN206271738U (en) * | 2016-12-22 | 2017-06-20 | 南京仁厚科技有限公司 | Hook carries upper plated film support plate |
| CN207731912U (en) * | 2018-01-11 | 2018-08-14 | 常州比太黑硅科技有限公司 | A kind of bridging type carbon fiber support plate |
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| Publication number | Publication date |
|---|---|
| CN108054125A (en) | 2018-05-18 |
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