CN108036930A - A kind of detecting system of Transimission Grating Diffraction Efficiencies - Google Patents
A kind of detecting system of Transimission Grating Diffraction Efficiencies Download PDFInfo
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- CN108036930A CN108036930A CN201711463346.5A CN201711463346A CN108036930A CN 108036930 A CN108036930 A CN 108036930A CN 201711463346 A CN201711463346 A CN 201711463346A CN 108036930 A CN108036930 A CN 108036930A
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- light
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- transimission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The invention discloses a kind of detecting system of Transimission Grating Diffraction Efficiencies, including：For generating the laser plasma light source for the incident beam for including grenz ray and extreme ultraviolet waveband；For receiving the incident beam and selecting the grenz ray or the monochromatic light-dividing device of extreme ultraviolet waveband outgoing, wherein, transmission grating to be measured is arranged in the light extraction light path of the monochromatic light-dividing device；And, for receiving the exit image of the monochromatic light-dividing device or the reception device for the diffraction image for receiving the transmission grating to be measured, to analyze the relative diffraction of the transmission grating to be measured and/or absolute diffraction efficiency according to the exit image and the diffraction image.As shown in the above, technical solution provided by the invention, the laser plasma light source of use has the advantages that small, price is low etc., disclosure satisfy that the demand in numerous laboratories, and detecting system provided by the invention equally has the advantages that simple in structure, debugging is convenient, of low cost.
Description
Technical field
The present invention relates to the detection technique field of Transimission Grating Diffraction Efficiencies, more specifically, is related to a kind of transmitted light
The detecting system of grid diffraction efficiency.
Background technology
Transmission-type grating is a kind of important dispersion element to grow up the last century 80's, is applied in soft X
Ray and extreme ultraviolet waveband, have many merits such as light harvesting solid angle is big, spectral region is wide.The dispersion element can with the time,
Spatial discrimination equipment is combined, and forms the energy measuring device of time of measuring energy spectrum characteristics and space energy spectrum characteristics at the same time, therefore, thoroughly
Penetrate the important function that spectral measurement work of the grating in each field plays in the middle.
But quantitative spectral measurement is carried out by transmission grating, it is necessary to the diffraction efficiency of its spectrum at different levels into rower
It is fixed.By taking transmission grating first-order diffraction spectrum as an example, the absolute diffraction efficiency of its level-one refers to first-order diffraction light intensity and experimental light sources intensity
Ratio, its level-one relative diffraction refers to the ratio of first-order diffraction light intensity and Zero-order diffractive light intensity.And transmission grating is absolute
The scaling method of diffraction efficiency usually has two kinds：First, the calibration of diffraction efficiency is carried out by enough energy points, so as to give
Go out change curve of the transmission grating diffraction efficiencies at different levels with incident laser energy；Another method is according to transmission grating to be calibrated
Structural parameters, theorize model, and transmission grating diffraction efficiencies at different levels are demarcated by the method for theoretical calculation.
Have staking-out work of the Duo Jia scientific research institutions to transmission grating both at home and abroad to have made intensive studies, and establish calculating
The rectangle grid line model of Transimission Grating Diffraction Efficiencies and trapezoidal grid line model etc..But these theoretical models are simply to transmission grating grid
The one kind in line section is approximate, with truth there are gap, therefore has certain limitation.In grenz ray and extreme ultraviolet ripple
In terms of section Transimission Grating Diffraction Efficiencies experimental calibration, domestic and international laboratory would generally select synchrotron radiation light source as experiment light
Source, but due to this kind of light source limited amount at home at present, can not meet that numerous laboratories carry out the need of the wave band optical research
Will.
The content of the invention
In view of this, the present invention provides a kind of detecting system of Transimission Grating Diffraction Efficiencies, laser plasma is passed through
Light source produces the incident beam for including grenz ray and extreme ultraviolet waveband, and then by monochromatic light-dividing device to the incident beam
It is divided after obtaining grenz ray or extreme ultraviolet waveband, the analysis that diffraction efficiency is carried out to transmission grating to be measured calculates；The present invention
The laser plasma light source of use has the advantages that small, price is low etc., disclosure satisfy that the demand in numerous laboratories, and this
The detecting system that invention provides equally has the advantages that simple in structure, debugging is convenient, of low cost.
To achieve the above object, technical solution provided by the invention is as follows：
A kind of detecting system of Transimission Grating Diffraction Efficiencies, including：
For generating the laser plasma light source for the incident beam for including grenz ray and extreme ultraviolet waveband；
For receiving the incident beam and selecting the monochromatic light splitting of the grenz ray or extreme ultraviolet waveband outgoing
Device, wherein, transmission grating to be measured is arranged in the light extraction light path of the monochromatic light-dividing device；
And for receiving the exit image of the monochromatic light-dividing device or receiving the diffraction pattern of the transmission grating to be measured
The reception device of picture, is imitated with analyzing the opposite diffraction of the transmission grating to be measured according to the exit image and the diffraction image
Rate and/or absolute diffraction efficiency.
Optionally, the laser plasma light source includes：
Nd：YAG laser；
It is arranged at the Nd：Convergent lens in the light extraction light path of YAG laser；
And it is arranged at the target in the light extraction light path of the convergent lens.
Optionally, the Nd：YAG laser is used for after the default light pulse of output first, exports the second default light again
Pulse, the power of the described first default light pulse are less than the power of the described second default light pulse.
Optionally, the target is metallic copper target.
Optionally, the monochromatic light-dividing device includes：
The entrance slit being arranged in the light extraction light path of the laser plasma light source；
The concave grating being arranged in the light extraction light path of the entrance slit；
And the exit slit in the light extraction light path of the concave grating is arranged at, wherein, the entrance slit, concave surface
Grating and exit slit form Rowland circle.
Optionally, the exit slit, the transmission grating to be measured and the reception device are located on same axis.
Optionally, the reception device is back illumination CCD camera.
Optionally, the monochromatic light-dividing device carries out wavelength scaling using default light supply apparatus.
Optionally, the default light supply apparatus is Hollow Atoms device.
Optionally, the working gas of the Hollow Atoms device is He gas.
Compared to the prior art, technical solution provided by the invention at least has the following advantages：
The present invention provides a kind of detecting system of Transimission Grating Diffraction Efficiencies, including：For generate include grenz ray with
The laser plasma light source of the incident beam of extreme ultraviolet waveband；For receiving the incident beam and the selection grenz ray
Or the monochromatic light-dividing device of the extreme ultraviolet waveband outgoing, wherein, transmission grating to be measured is arranged at the monochromatic light-dividing device
In light extraction light path；And for receiving the exit image of the monochromatic light-dividing device or receiving spreading out for the transmission grating to be measured
The reception device of image is penetrated, is spread out with analyzing the opposite of the transmission grating to be measured according to the exit image and the diffraction image
Penetrate efficiency and/or absolute diffraction efficiency.
As shown in the above, technical solution provided by the invention, is produced by laser plasma light source and includes soft X
The incident beam of ray and extreme ultraviolet waveband, and then the incident beam is divided to obtain soft X by monochromatic light-dividing device and is penetrated
After line or extreme ultraviolet waveband, the analysis that diffraction efficiency is carried out to transmission grating to be measured calculates；The laser plasma that the present invention uses
Body light source has the advantages that small, price is low etc., disclosure satisfy that the demand in numerous laboratories, and detection system provided by the invention
System equally has the advantages that simple in structure, debugging is convenient, of low cost.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of structure diagram of the detecting system of Transimission Grating Diffraction Efficiencies provided by the embodiments of the present application；
Fig. 2 is the structure diagram of the detecting system of another Transimission Grating Diffraction Efficiencies provided by the embodiments of the present application；
Fig. 3 is a kind of Nd provided by the embodiments of the present application：YAG laser exports the schematic diagram of pulse.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment, belongs to the scope of protection of the invention.
As described in background, have staking-out work of the Duo Jia scientific research institutions to transmission grating both at home and abroad to be goed deep into
Research, and establish the rectangle grid line model for calculating Transimission Grating Diffraction Efficiencies and trapezoidal grid line model etc..But these theoretical moulds
Type is one kind approximation to transmission grating grid line section, with truth there are gap, therefore has certain limitation.
Grenz ray and extreme ultraviolet waveband Transimission Grating Diffraction Efficiencies experimental calibration aspect, domestic and international laboratory would generally select synchronous spoke
Light source is penetrated as experimental light sources, but due to this kind of light source limited amount at home at present, can not meet that numerous laboratories are somebody's turn to do
The needs of wave band optical research.
Based on this, the embodiment of the present application provides a kind of detecting system of Transimission Grating Diffraction Efficiencies, by laser etc. from
Daughter light source produces the incident beam for including grenz ray and extreme ultraviolet waveband, and then by monochromatic light-dividing device to the incidence
Light beam is divided after obtaining grenz ray or extreme ultraviolet waveband, and the analysis that diffraction efficiency is carried out to transmission grating to be measured calculates；This
The laser plasma light source that application embodiment uses has the advantages that small, price is low etc., disclosure satisfy that numerous laboratories
Demand, and detecting system provided by the embodiments of the present application equally has the advantages that simple in structure, debugging is convenient, of low cost.
To achieve the above object, technical solution provided by the embodiments of the present application is as follows, specifically combines Fig. 1 to Fig. 3 to the embodiment of the present application
The technical solution of offer is described in detail.
Refering to what is shown in Fig. 1, it is a kind of structure of the detecting system of Transimission Grating Diffraction Efficiencies provided by the embodiments of the present application
Schematic diagram, wherein, the detecting system of Transimission Grating Diffraction Efficiencies includes：
For generating the laser plasma light source 100 for the incident beam for including grenz ray and extreme ultraviolet waveband；
For receiving the incident beam and selecting the monochromatic light splitting of the grenz ray or extreme ultraviolet waveband outgoing
Device 200, wherein, transmission grating 300 to be measured is arranged in the light extraction light path of the monochromatic light-dividing device 200；
And for receiving the exit image of the monochromatic light-dividing device 200 or receiving the transmission grating 300 to be measured
The reception device 400 of diffraction image, to analyze the transmission grating to be measured according to the exit image and the diffraction image
Relative diffraction and/or absolute diffraction efficiency.
As shown in the above, technical solution provided by the embodiments of the present application, bag is produced by laser plasma light source
The incident beam of grenz ray and extreme ultraviolet waveband is included, and then the incident beam be divided by monochromatic light-dividing device
To after grenz ray or extreme ultraviolet waveband, the analysis that diffraction efficiency is carried out to transmission grating to be measured calculates；The embodiment of the present application uses
Laser plasma light source there is small, price is low etc., disclosure satisfy that the demand in numerous laboratories, and the application
The detecting system that embodiment provides equally has the advantages that simple in structure, debugging is convenient, of low cost.
The detecting system of specific Transimission Grating Diffraction Efficiencies provided by the embodiments of the present application is carried out below in conjunction with the accompanying drawings
Detailed description.Refering to what is shown in Fig. 2, the detecting system for another Transimission Grating Diffraction Efficiencies provided by the embodiments of the present application
Structure diagram, wherein, the laser plasma light source provided by the embodiments of the present application includes：
Nd：YAG (Neodymium-doped Yttrium Aluminium Garnet) laser 110；
It is arranged at the Nd：Convergent lens 120 in the light extraction light path of YAG laser 110；
And it is arranged at the target 130 in the light extraction light path of the convergent lens 120.
Laser plasma light source provided by the embodiments of the present application, its compared with synchrotron radiation type light source, have it is small,
The advantages that price is low and easy to repair and uses, is adapted to use in most of laboratories.The target of laser plasma light source
Material is divided into a variety of targets such as gas target, liquid target and solid target.The density of target is higher, its absorption efficiency also can be higher, therefore
The light radiation intensity of output also can be higher.Optionally, target provided by the embodiments of the present application selects solid target, further,
The target is metallic copper target.
Laser plasma light source provided by the embodiments of the present application is by Nd:YAG laser, convergent lens and metallic copper target
Three parts form.First by Nd：YAG laser produces a branch of light pulse, with reference to shown in Fig. 3, institute provided by the embodiments of the present application
State Nd：YAG laser is used for after the default light pulse S1 of output first, again the default light pulse S2 of output second, and described first
The power of default light pulse S1 is less than the power of the described second default light pulse S2.That is, Nd provided by the embodiments of the present application：YAG
Laser output light pulse be made of two pulse signals, previous first predetermined pulse can be described as prepulsing, its power compared with
It is low, can be 108W/cm2, wherein, the main function of prepulsing is makes target gasify and ionize, at this moment, in the surface meeting of target
Produce the plasma of one layer of low-density；Then export one second predetermined pulse again and can be described as main pulse, the power of main pulse compared with
Height, can be 1011W/cm2~1014W/cm2, including endpoint value, the plasma heating of generation it is high to form high temperature by main pulse
Density plasma, includes grenz ray and pole so as to be produced by complex processes such as bremsstrahlung, recombination radiation and beta radiations
The incident beam of ultraviolet band.
Refering to what is shown in Fig. 2, the monochromatic light-dividing device provided by the embodiments of the present application includes：
The entrance slit 210 being arranged in the light extraction light path of the laser plasma light source 100；
The concave grating 220 being arranged in the light extraction light path of the entrance slit 210；
And the exit slit 230 in the light extraction light path of the concave grating 220 is arranged at, wherein, the entrance slit
210th, concave grating 220 and exit slit 230 form Rowland circle.
Entrance slit, concave grating and exit slit provided by the embodiments of the present application form a Rowland circle system, concave surface light
The radius of curvature of grid is the radius of Rowland circle, and exit slit can move on the circumference of Rowland circle, when incident beam passes through
After concave grating light splitting, change exit slit relative position, corresponding homogeneous beam can be obtained.And then connect by follow-up
Receiving apparatus directly receives the exit image of exit slit, and transmission grating to be measured is set between exit slit and reception device
Afterwards, grating diffration image to be measured is received, then exit image and diffraction image are analyzed to obtain negative transmission grating to be measured
Relative diffraction and/or absolute diffraction efficiency.
In order to enable detecting system to be accurately scanned detection, the monochromatic light splitting dress provided by the embodiments of the present application
Put and wavelength scaling is carried out using default light supply apparatus.By considering the default light supply apparatus provided by the embodiments of the present application
For Hollow Atoms device, i.e., by Hollow Atoms device to including the monochromatic light-dividing device of concave grating into traveling wave
Long calibration.
Hollow Atoms device is relatively stable glow discharge spot lamp, its working gas is generally the gas such as He, Ne, Ar
Body.Wherein, Hollow Atoms device is generally made of tubular anode, hollow cathode and difference room.Hollow cathode is closed by copper tungsten
Golden female conical polar cap and cathode seat composition, is conducive to conductive and heat dissipation；Anode is made of aluminum, is cylindrical in shape；Cathode and anode it
Between insulated with tetrafluoroethene.The working gas of the Hollow Atoms device provided by the embodiments of the present application is He gas, wherein,
From the spectrum of the U.S. NIST several gases provided, in the range of 1nm~60nm, He is optimal working gas, this
The spectral line of emission for being primarily due to He is discrete, and stronger spectral line has more than three, and apart from each other each other, this is
Bringing great convenience property of staking-out work.
Transmitting using working gas as 30.38nm, 53.70nm, 58.43nm of the Hollow Atoms device of He gas below
Spectrum, Wavelength calibration is carried out to monochromatic light-dividing device.First, for concave grating as dispersion element, its grating equation can be (1) formula
Formation：
λ=d [1- (ra/R)2]12-d[1-(rb/R)2]1/2 (1)
Wherein, raFor the distance of entrance slit to concave grating；rbFor the distance of exit slit to concave grating；R is concave surface
Grating radius of curvature；D is concave grating incisure density；λ is corresponding wavelength at exit slit.In one embodiment of the application,
The concave grating radius of curvature used in the staking-out work that the application provides can be set as 2217.6mm, and delineation density is
600L/mm, delineation area are 30mm × 50mm, and incidence angle is 87 °, service band 1-60nm.In entrance slit and it is emitted narrow
When slit width degree is 50 μm, its spectral resolution is 0.08nm.
In calibration process, Hollow Atoms device centre produce He plasmas, give off He ion and
Atomic spectra, the channel electron multiplier of quantum efficiency known to detector selection.Specific scaling step is as follows：Utilize He hollow cathodes
Known spectral line 30.38nm, 53.70nm, 58.43nm that light supply apparatus is sent, three known spectral lines are calculated according to (1) formula
The r of (30.38nm, 53.70nm, 58.43nm) positionbTheoretical value corresponds to 436.75mm, 569.80mm, 592.94mm respectively,
Exit slit is about adjusted to the position of 436.75mm, by adjusting the position of exit slit, find light intensity maximum and remember
Position readings of exit slit at this time under record.According to the method described above and so on, then two other spectral line 53.70nm is found respectively
With the position of the exit slit corresponding to 58.43nm.Establish curve and fit quadratic equation with one unknown：
Y=A+B1x+B2x2 (2)
Wherein, y represents wavelength in formula；X represents the position of exit slit.By three groups of data generations measured in calibration process
Enter above-mentioned equation, can draw A, B1And B2These three unknowm coefficients, so as to also just obtain exit slit position readings and wavelength
One-to-one relationship.
After completing to the calibration work of monochromatic light-dividing device, Transimission Grating Diffraction Efficiencies to be measured can be examined
Survey.Since air has very strong absorption to grenz ray and extreme ultraviolet waveband, whole detecting system removes Nd：YAG laser and
Outside convergent lens, other devices will be placed among vacuum.Metallic target is placed in target chamber, concave grating, transmitted light to be measured
Grid should all be placed in vacuum chamber, and are connected using bellows.It is evacuated in vacuum chamber using mechanical pump and turbomolecular pump,
Vacuum in detection process should be 2.5 × below 10-2Pa.It is the exit slit provided by the embodiments of the present application, described to be measured
Transmission grating and the reception device are located on same axis, wherein, the light path adjustment of whole detecting system can use visible ray
Laser carries out, and main purpose is to ensure that at exit slit, transmission grating to be measured and reception device face on the same axis.Treat light
After road is adjusted, fixed each device position, opens mechanical pump and turbomolecular pump starts to vacuumize, true when detecting system
When reciprocal of duty cycle reaches calibration request, Nd is opened：YAG laser is detected work.
In the above-mentioned any one embodiment of the application, the reception device that the application provides is back illumination CCD
(Charge-coupled Device, charge coupled cell) camera.
The embodiment of the present application provides a kind of detecting system of Transimission Grating Diffraction Efficiencies, including：Include soft X for generating
The laser plasma light source of the incident beam of ray and extreme ultraviolet waveband；For receiving described in the incident beam and selection
Grenz ray or the monochromatic light-dividing device of extreme ultraviolet waveband outgoing, wherein, transmission grating to be measured is arranged at the monochromatic light splitting
In the light extraction light path of device；And for receiving the exit image of the monochromatic light-dividing device or receiving the transmitted light to be measured
The reception device of the diffraction image of grid, to analyze the transmission grating to be measured according to the exit image and the diffraction image
Relative diffraction and/or absolute diffraction efficiency.
As shown in the above, technical solution provided by the embodiments of the present application, bag is produced by laser plasma light source
The incident beam of grenz ray and extreme ultraviolet waveband is included, and then the incident beam be divided by monochromatic light-dividing device
To after grenz ray or extreme ultraviolet waveband, the analysis that diffraction efficiency is carried out to transmission grating to be measured calculates；The embodiment of the present application uses
Laser plasma light source there is small, price is low etc., disclosure satisfy that the demand in numerous laboratories, and the application
The detecting system that embodiment provides equally has the advantages that simple in structure, debugging is convenient, of low cost.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and the principles and novel features disclosed herein phase one
The most wide scope caused.
Claims (10)
- A kind of 1. detecting system of Transimission Grating Diffraction Efficiencies, it is characterised in that including：For generating the laser plasma light source for the incident beam for including grenz ray and extreme ultraviolet waveband；For receiving the incident beam and selecting the grenz ray or the monochromatic light-dividing device of extreme ultraviolet waveband outgoing, Wherein, transmission grating to be measured is arranged in the light extraction light path of the monochromatic light-dividing device；And the diffraction image for receiving the exit image of the monochromatic light-dividing device or receiving the transmission grating to be measured Reception device, to analyze the relative diffraction of the transmission grating to be measured according to the exit image and the diffraction image And/or absolute diffraction efficiency.
- 2. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 1, it is characterised in that the laser plasma Body light source includes：Nd：YAG laser；It is arranged at the Nd：Convergent lens in the light extraction light path of YAG laser；And it is arranged at the target in the light extraction light path of the convergent lens.
- 3. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 2, it is characterised in that the Nd：YAG laser Device is used for after the default light pulse of output first, exports the second default light pulse, the power of the described first default light pulse again Less than the power of the described second default light pulse.
- 4. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 2, it is characterised in that the target is metal Copper target material.
- 5. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 1, it is characterised in that the monochromatic light splitting dress Put including：The entrance slit being arranged in the light extraction light path of the laser plasma light source；The concave grating being arranged in the light extraction light path of the entrance slit；And the exit slit in the light extraction light path of the concave grating is arranged at, wherein, the entrance slit, concave grating Rowland circle is formed with exit slit.
- 6. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 5, it is characterised in that the exit slit, The transmission grating to be measured and the reception device are located on same axis.
- 7. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 1, it is characterised in that the reception device is Back illumination CCD camera.
- 8. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 1, it is characterised in that the monochromatic light splitting dress Put and wavelength scaling is carried out using default light supply apparatus.
- 9. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 8, it is characterised in that the default light source dress It is set to Hollow Atoms device.
- 10. the detecting system of Transimission Grating Diffraction Efficiencies according to claim 9, it is characterised in that the hollow cathode The working gas of light supply apparatus is He gas.
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