CN108020886A - A kind of MEMS fibre optic attenuators - Google Patents
A kind of MEMS fibre optic attenuators Download PDFInfo
- Publication number
- CN108020886A CN108020886A CN201610961710.XA CN201610961710A CN108020886A CN 108020886 A CN108020886 A CN 108020886A CN 201610961710 A CN201610961710 A CN 201610961710A CN 108020886 A CN108020886 A CN 108020886A
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- Prior art keywords
- speculum
- light
- collimater
- mems
- light beam
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
- G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
Abstract
The invention discloses a kind of MEMS fibre optic attenuators, it sequentially includes light output collimater along the direction of propagation of light, first speculum, second speculum, 3rd speculum and light-receiving collimater, first speculum is driven by MEMS to be rotated, the reflecting surface of second speculum and the 3rd speculum is parallel and is oppositely arranged, the light output collimater will be emitted on the first speculum after beam collimation, light beam is reflexed on the second speculum through the first speculum again, the light beam reflected by the second speculum is reflexed on the 3rd speculum, light beam enters light-receiving collimater after being reflected between the second speculum and the 3rd speculum several times.The present invention is by folding mirror light path, and the coupling mismatch loss for making small angle variation introduce hot spot translation generation by distance between overlength collimater is much larger than light beam coupling mismatch loss caused by angle change, so as to obtain relatively low PDL and WDL.
Description
Technical field
The present invention relates to optical-fibre communications field, more particularly to a kind of MEMS fibre optic attenuators.
Background technology
Variable optical attenuator（VOA）It is the common device in optical communication network, variable optical attenuator can work as according to light path
In needs it is any decay need light intensity.MEMS fibre optic attenuators are one kind very common in variable optical attenuator, the decay
Device is by the use of MEMS as major control element, by controlling the angle change of MEMS upper reflectors to cause direction of beam propagation change to reach
To the purpose of optical attenuation.
Fig. 1 is the structure diagram of traditional MEMS fibre optic attenuator, and the attenuator is mainly by one MEMS1 and one double light
Fine collimater 2 is formed, and a wherein optical fiber of the optical signal through double-fiber collimator 2 enters collimater, passes through the optical fiber collimator
It will be emitted to after beam collimation on the speculum of MEMS, then reflect back into collimater through MEMS mirror, then from collimater
Another fiber coupling output.By controlling the rotation of MEMS upper reflectors, change the biography of the reflected beams on MEMS mirror
Broadcast direction（Angle）To realize the purpose of control optical attenuation.The MEMS fibre optic attenuators are simple in structure, are easily assembled, and are the most normal
The structure for the MEMS fibre optic attenuators seen.But PDL and WDL indexs are not special to the MEMS fibre optic attenuators under normal conditions
Good, PDL and WDL are two very important indexs of variable optical attenuator, normal conditions MEMS optical fiber under 20dB decay
The PDL of attenuator can reach 0.3dB, and WDL can reach 0.5dB.
Fig. 2 is fibre optic attenuator attenuation principle schematic diagram, which includes two single optical fiber calibrators, collimater 1 and collimation
Device 2, light beam travel to collimater 2 from collimater 1 and carry out coupling output.In the structure shown here, mainly collimated the reason for optical attenuation
Caused by the coupling mismatch of device 1 and collimater 2, i.e., the light that collimater 1 is sent is coupled mainly by the angular mismatch of light beam to collimater 2
(inclined θ angles) and light beam dislocation mismatch are (caused by inclined Δ d).Due to traditional MEMS fibre optic attenuators（Such as Fig. 1）Due to passing
It is very short to broadcast light path, generally<5mm, so the main cause of light intensity attenuation is caused by the angular mismatch of light beam, this is also to cause the MEMS light
One of the reason for PDL and WDL indexs of fine attenuator are bad.
The content of the invention
In order to solve deficiency of the prior art, it is an object of the invention to provide one kind can obtain relatively low PDL and WDL
MEMS fibre optic attenuators.
To achieve the above object, the present invention uses following technical scheme：
A kind of MEMS fibre optic attenuators, it sequentially includes light output collimater, the first speculum, second anti-along the direction of propagation of light
Penetrate mirror, the 3rd speculum and light-receiving collimater, first speculum is driven by MEMS to be rotated, second speculum and
The reflecting surface of 3rd speculum is parallel and is oppositely arranged, and the light output collimater will be emitted to the first speculum after beam collimation
On, light beam is reflexed on the second speculum through the first speculum again, and the light beam reflected by the second speculum reflexes to the 3rd
On speculum, light beam enters light-receiving collimater after being reflected between the second speculum and the 3rd speculum several times.
Further, the MEMS fibre optic attenuators further include the 4th speculum, and light beam is anti-in the second speculum and the 3rd
Penetrate between mirror after reflecting several times and reflex on the 4th speculum, the light beam after the reflection of the 4th speculum enters light-receiving
Collimater.
The light output collimater and light-receiving collimater are single optical fiber calibrator.
The MEMS drives the rotation of the first speculum to change the direction of propagation by the first speculum the reflected beams.
The distance between described light output collimater and light-receiving collimater can by varying light beam in the second speculum and
Order of reflection between 3rd speculum is adjusted.
The present invention uses above technical scheme, has following technique effect：
Difference lies in pass through folding mirror light path with traditional MEMS fibre optic attenuator for the MEMS fibre optic attenuators of the present invention（Light beam
Some secondary reflections on the second speculum and the 3rd speculum）, make low-angle by distance between overlength collimater（θ）Change
Introduce hot spot translation（Δd）The coupling mismatch loss of generation causes the coupling mismatch loss of light beam much larger than angle change, so that
Obtain relatively low PDL and WDL.The distance between light output collimater and light-receiving collimater of the present invention L can be adjusted as needed
It is whole, such as allow light beam order of reflection on the second speculum and the 3rd speculum to increase, you can to increase the length of L.
Brief description of the drawings
The present invention is described in further details below in conjunction with the drawings and specific embodiments：
Fig. 1 is the structure diagram of traditional MEMS fibre optic attenuator；
Fig. 2 is fibre optic attenuator attenuation principle schematic diagram；
Fig. 3 is the structure diagram of MEMS fibre optic attenuators of the present invention.
Embodiment
As shown in figure 3, the MEMS fibre optic attenuators of the present invention, it sequentially includes light output collimater along the direction of propagation of light
5th, the first speculum 1, the second speculum 2, the 3rd speculum 3 and light-receiving collimater 6, first speculum 1 pass through MEMS
7 driving rotations, second speculum 2 is parallel with the reflecting surface of the 3rd speculum 3 and is oppositely arranged, the light output collimater
5 will be emitted to after beam collimation on the first speculum 1, and light beam is reflexed on the second speculum 2 through the first speculum 1 again, pass through
The light beam that second speculum 2 reflects is reflexed on the 3rd speculum 3, and light beam is between the second speculum 2 and the 3rd speculum 3
Enter light-receiving collimater 6 after reflection several times.
In the present embodiment, MEMS fibre optic attenuators further include the 4th speculum 4, and light beam is in the second speculum 2 and the 3rd
Reflexed to after being reflected between speculum 3 several times on the 4th speculum 4, the light beam after the reflection of the 4th speculum 4 enters
Light-receiving collimater 6.
The light output collimater 5 and light-receiving collimater 6 are single optical fiber calibrator.
The MEMS 7 can drive the rotation of the first speculum 1 to change the biography by 1 the reflected beams of the first speculum
Broadcast direction.The distance between described light output collimater 5 and light-receiving collimater 6 can be by varying light beams in the second speculum 2
And the 3rd order of reflection between speculum 3 is adjusted.
The operation principle of the present invention：It is anti-on the second speculum and the 3rd speculum by folding mirror light path, i.e. light beam
Penetrate several times, make low-angle by distance between overlength collimater（θ）Change introduces hot spot translation（Δd）Produce coupling mismatch damage
Consumption causes light beam coupling mismatch loss much larger than angle change, so as to obtain relatively low PDL and WDL.If collimater output facula
A diameter of 0.4mm, propagation distance L=l2+l3+ ... l7=100mm between collimater, then θ=0.2 ° can just make hot spot coupling
Shifted by delta d=0.35mm is closed, damage so caused by the θ changes angular much larger than light beam of mismatch loss caused by coupling dislocation shifted by delta d
Consumption.In addition, the distance between light output collimater of the present invention and light-receiving collimater can be adjusted as needed.
Claims (5)
- A kind of 1. MEMS fibre optic attenuators, it is characterised in that：It sequentially includes light output collimater, first along the direction of propagation of light Speculum, the second speculum, the 3rd speculum and light-receiving collimater, first speculum is driven by MEMS to be rotated, institute State that the reflecting surface of the second speculum and the 3rd speculum is parallel and be oppositely arranged, and the light output collimater will go out after beam collimation It is mapped on the first speculum, light beam is reflexed on the second speculum through the first speculum again, is reflected by the second speculum Light beam is reflexed on the 3rd speculum, and light beam connects after being reflected between the second speculum and the 3rd speculum several times into light Receive collimater.
- A kind of 2. MEMS fibre optic attenuators according to claim 1, it is characterised in that：The MEMS fibre optic attenuators also wrap The 4th speculum is included, light beam reflexes to the 4th speculum after being reflected between the second speculum and the 3rd speculum several times On, the light beam after the reflection of the 4th speculum enters light-receiving collimater.
- A kind of 3. MEMS fibre optic attenuators according to claim 1, it is characterised in that：The light output collimater and light connect It is single optical fiber calibrator to receive collimater.
- A kind of 4. MEMS fibre optic attenuators according to claim 1, it is characterised in that：The MEMS drives the first speculum Rotation is so as to change the direction of propagation by the first speculum the reflected beams.
- A kind of 5. MEMS fibre optic attenuators according to claim 1, it is characterised in that：The light output collimater and light connect Receiving the distance between collimater can be adjusted by varying order of reflection of the light beam between the second speculum and the 3rd speculum It is whole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610961710.XA CN108020886B (en) | 2016-11-04 | 2016-11-04 | MEMS optical fiber attenuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610961710.XA CN108020886B (en) | 2016-11-04 | 2016-11-04 | MEMS optical fiber attenuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108020886A true CN108020886A (en) | 2018-05-11 |
| CN108020886B CN108020886B (en) | 2020-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610961710.XA Active CN108020886B (en) | 2016-11-04 | 2016-11-04 | MEMS optical fiber attenuator |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6636682B2 (en) * | 2001-10-31 | 2003-10-21 | Hon Hai Precision Ind. Co., Ltd. | Variable optical attenuator having integrated reflective device |
| US20080205845A1 (en) * | 2007-02-02 | 2008-08-28 | Jds Uniphase Corporation | Variable Optical Attenuator |
| CN201266248Y (en) * | 2008-07-29 | 2009-07-01 | 翔光(上海)光通讯器材有限公司 | Adjustable optical attenuator |
| CN201478678U (en) * | 2009-09-10 | 2010-05-19 | 福州高意通讯有限公司 | Tension type folding-cavity laser |
| CN101963685A (en) * | 2009-07-22 | 2011-02-02 | 北京波联汇成科技有限公司 | Variable optical attenuator capable of compensating WDL by adjusting optical waveguide position |
| CN102645702A (en) * | 2011-02-22 | 2012-08-22 | 大连兆阳软件科技有限公司 | Novel small-sized mechanical variable laser attenuation device |
| CN105403953A (en) * | 2014-09-11 | 2016-03-16 | 波若威科技股份有限公司 | Tunable optical attenuator with wavelength dependent loss compensation |
-
2016
- 2016-11-04 CN CN201610961710.XA patent/CN108020886B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6636682B2 (en) * | 2001-10-31 | 2003-10-21 | Hon Hai Precision Ind. Co., Ltd. | Variable optical attenuator having integrated reflective device |
| US20080205845A1 (en) * | 2007-02-02 | 2008-08-28 | Jds Uniphase Corporation | Variable Optical Attenuator |
| CN201266248Y (en) * | 2008-07-29 | 2009-07-01 | 翔光(上海)光通讯器材有限公司 | Adjustable optical attenuator |
| CN101963685A (en) * | 2009-07-22 | 2011-02-02 | 北京波联汇成科技有限公司 | Variable optical attenuator capable of compensating WDL by adjusting optical waveguide position |
| CN201478678U (en) * | 2009-09-10 | 2010-05-19 | 福州高意通讯有限公司 | Tension type folding-cavity laser |
| CN102645702A (en) * | 2011-02-22 | 2012-08-22 | 大连兆阳软件科技有限公司 | Novel small-sized mechanical variable laser attenuation device |
| CN105403953A (en) * | 2014-09-11 | 2016-03-16 | 波若威科技股份有限公司 | Tunable optical attenuator with wavelength dependent loss compensation |
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| Publication number | Publication date |
|---|---|
| CN108020886B (en) | 2020-10-16 |
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