CN108019527B

CN108019527B - Manual vacuum pre-pumping valve

Info

Publication number: CN108019527B
Application number: CN201711283597.5A
Authority: CN
Inventors: 王怀德; 张扬; 陈智勇; 许泉
Original assignee: Beijing Beifen Instrument Technology Co ltd
Current assignee: Beijing Beifen Instrument Technology Co ltd
Priority date: 2017-12-07
Filing date: 2017-12-07
Publication date: 2023-07-18
Anticipated expiration: 2037-12-07
Also published as: CN108019527A

Abstract

The invention discloses a manual vacuum pre-pumping valve, which comprises a valve body, a valve rod end, a first channel and a second channel, wherein the first channel and the second channel are communicated with a cavity; one end of the valve rod is provided with a valve cone, the valve cone is positioned in the cavity, and when the valve rod rotates and rotates the valve cone to the position of the inner side end face of the second channel, the conical surface of the valve cone is in sealing connection with the inner side end face of the second channel, so that the second channel is separated from the third channel. According to the invention, the valve cone at the end part of the valve rod and the inner side end surface of the second channel form plug-in fit sealing, and the metal cone surface sealing is adopted, so that the reliability and durability of the whole valve structure are greatly improved, the processing and manufacturing are simple, and the cost is low.

Description

Manual vacuum pre-pumping valve

Technical Field

The invention relates to the field of vacuum systems, in particular to a manual vacuum pre-pumping valve which is mainly used for switching connection of a low vacuum air pump, a high vacuum air pump or a vacuum cavity piece between the low vacuum air pump and the high vacuum air pump.

Background

The existing valve for vacuumizing is usually a ball valve, a needle valve or a butterfly valve with larger caliber, is of a standard type, has strong interchangeability, and is convenient to purchase and replace because the metal sealing piece or the nonmetal sealing piece at the sealing part of the valve body is the standard piece. However, the three valves have the following technical defects:

1) The conventional needle valve has the defects that the caliber of a valve hole is too small, the gas passing capability in unit time is limited, and the requirement of rapid air extraction cannot be met;

2) Ball valves or large-caliber butterfly valves are often not suitable for being integrated into small-sized precise instruments due to large volume;

3) The existing valve has single function, can only realize the air suction function, and can not realize two functions of air suction and air discharge on the same valve body;

4) The existing valve seal is usually in a linear seal mode, the reliability is poor, the leakage probability is high, and the service life is short.

Disclosure of Invention

Aiming at the defects in the prior art, the invention provides the manual vacuum pre-pumping valve which can realize two functions of pumping and deflating on the same valve body.

In order to achieve the above purpose, the invention adopts the following technical scheme:

the manual vacuum pre-pumping valve comprises a valve body and a valve rod, wherein a cavity is formed in the valve body, a first channel and a second channel which are communicated with the cavity are arranged at two ends of the valve body, a third channel which is communicated with the cavity is further arranged on the side face of the valve body, the valve rod is arranged in the first channel, a sealing assembly is sleeved on the valve rod, and the valve rod is in threaded sealing connection with the inner side face of the first channel; one end of the valve rod is provided with a valve cone, the valve cone is positioned in the cavity, and when the valve rod rotates and rotates the valve cone to the position of the inner side end face of the second channel, the conical surface of the valve cone is in sealing connection with the inner side end face of the second channel, so that the second channel is separated from the third channel.

The valve cone comprises a cylinder and a cone body which are connected with each other, a mounting groove is formed in the upper end face of the cylinder, the mounting groove is sleeved at the end part of the valve rod, and the cylinder is fixedly connected with the end part of the valve rod through a fastener.

The connecting end of the valve rod forms a spherical structure, and the spherical structure is arranged in the mounting groove of the valve cone.

The valve rod positioned in the first channel is sequentially provided with a smooth surface and a thread surface along the direction close to the cavity, a sealing gap is formed between the smooth surface and the first channel, and the sealing assembly is positioned in the sealing gap; the outer side surface of the sealing component is provided with a set of locking nuts arranged on the smooth surface, and the locking nuts are in threaded connection with the inner side surface of the first channel.

The sealing assembly comprises a compression ring sleeved on the smooth surface and a pressing sheet, wherein an extrusion conical surface is formed on the pressing sheet, and the outer circular surface of the pressing sheet is in sealing connection with the threaded surface of the first channel; the compression ring is formed into an extrusion inclined plane matched with the extrusion conical surface, and the inner side end face of the lock nut is in end face extrusion fit with the compression ring.

The tabletting is polytetrafluoroethylene.

The valve body comprises a first valve body and a second valve body, the first channel and the cavity are formed in the first valve body, the second valve body is coaxially fixed at the opening position of the cavity of the first valve body, and the second channel is formed in the second valve body.

The end part of the inner side of the second channel is also provided with a hollow third valve body, the third valve body is coaxially fastened in the second channel in the second valve body, the inner wall of the third valve body is in sealing connection with the second valve body, one end of the third valve body extends into the cavity, and the conical surface of the valve cone and the end surface of the third valve body form plug-in sealing.

The valve cone is made of stainless steel, and the third valve body is made of metal oxygen-free copper.

The free end of the second valve body is fixedly provided with a connecting flange, the side surface of the first valve body is also provided with an air exhaust pipeline communicated with the cavity, and the third channel is formed in the air exhaust pipeline.

The technical scheme of the invention has the following advantages:

A. according to the invention, the first channel, the second channel and the third channel are established in the valve body, the valve rod is positioned in the first channel, the valve cone is arranged at the end part of the valve rod, the valve cone and the inner side end surface of the second channel form plug-in matched sealing, when the valve is in an open position, the valve rod is rotated to drive the valve cone to separate from the second channel, the second channel is communicated with the third channel, and air extraction can be performed; when the valve rod is rotated to enable the valve cone to form plug-in sealing fit with the inner side end face of the second channel, the second channel and the third channel can be separated. The invention adopts the metal conical surface for sealing, greatly improves the reliability and durability of the whole valve structure, and has simple processing and manufacturing and low cost.

B. The valve rod is provided with the thread surface and the smooth surface, the thread surface is close to the cavity and is in threaded connection with the internal thread of the first channel, the smooth surface is provided with the sealing component and the locking nut for extruding the sealing component, the locking nut enables the valve rod and the first channel to be in a sealing state by extruding the sealing component, and of course, the valve rod is rotated to enable the valve cone to be separated from the inner side end surface of the first channel, so that the air release function of the valve body can be realized, external air can enter the cavity in a high vacuum state through the third channel, and the air release function can be simultaneously realized in a precision instrument with higher integration level.

C. The valve cone is compact in structure, small in size and convenient to install, the compression joint sealing between the valve rod and the pressing sheet is realized by the extrusion action of the locking nut on the matching inclined plane between the pressing ring and the pressing sheet when the valve cone is opened, the valve can be used in an environment of-50 ℃ to +80 ℃, the application range is wide, and the reliability and the durability are high.

D. The flange or the external connection interface connected with the second channel and the flange or the external connection interface connected with the third channel can be manufactured according to different requirements, and the interchangeability is strong.

Drawings

In order to more clearly illustrate the embodiments of the present invention, the drawings that are required for the embodiments will be briefly described, and it will be apparent that the drawings in the following description are some embodiments of the present invention and that other drawings may be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of the overall structure of a vacuum pre-pump valve provided by the invention;

FIG. 2 is a schematic view of the first valve body shown in FIG. 1;

FIG. 3 is a schematic view of the valve stem structure shown in FIG. 1;

FIG. 4 is a schematic view of the press ring structure shown in FIG. 1;

fig. 5 is a schematic view of the tablet configuration shown in fig. 1.

Reference numerals illustrate:

1-valve body

11-a first valve body, 12-a second valve body, 13-a third valve body;

2-valve rod

21-sphere structure;

3-chamber; 4-a first channel; 5-a second channel; 6-a third channel;

7-seal assembly

71-press ring, 711-press inclined plane, 72-press sheet, 721-press conical surface,

8-valve cone

81-a cylinder, 811-a mounting groove, 82-a cone;

9-a fastener; 10-smooth surface, 20-thread surface; 30-sealing the gap; 40-locking nut;

50-connecting flanges; 60-an air extraction pipeline.

Detailed Description

The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

As shown in fig. 1, the invention provides a manual vacuum pre-pumping valve, which comprises a valve body 1 and a valve rod 2, wherein a cavity 3 is formed in the valve body 1, a first channel 4 and a second channel 5 which are communicated with the cavity 3 are arranged at two ends of the valve body 1, a third channel 6 which is communicated with the cavity 3 is also arranged on the side surface of the valve body 1, the third channel can be an external air suction pipeline 60 or a flange, the valve rod 2 is arranged in the first channel 4, a sealing assembly 7 is sleeved on the valve rod 2, and the valve rod and the first channel 4 are in sealing connection through the sealing assembly 7. As shown in fig. 2, an internal thread is arranged in the first channel, an external thread is arranged on the valve rod 2, and the valve rod 2 is in threaded connection with the inner side surface of the first channel 4; meanwhile, one end of the valve rod 2 is provided with a valve cone 8, the valve cone 8 is positioned in the cavity 3, and when the valve rod 2 drives the valve cone 8 to enter the inner side end face of the second channel 5 by rotating the valve rod 2, the conical surface of the valve cone 8 is in sealing connection with the inner side end face of the second channel 5, so that the second channel 5 is separated from the third channel 6. According to the invention, the first channel 4, the second channel 5 and the third channel 6 are established in the valve body, when the valve is in the open position, the valve rod is rotated to drive the valve cone to separate from the second channel, and the second channel is communicated with the third channel, so that air extraction can be performed; when the valve rod is rotated to enable the valve cone to form plug-in sealing fit with the inner side end face of the second channel, the second channel and the third channel can be separated. The valve cone adopted by the invention is preferably made of a soft metal material, preferably oxygen-free copper, and is made of stainless steel and harder due to the fact that the valve cone is made of soft material, and the valve cone meets the requirement of metal sealing in a vacuum manual, so that sealing under the high vacuum condition can be realized.

By adopting the metal conical surface for sealing, the reliability and the durability of the whole valve structure are greatly improved, the processing and the manufacturing are simple, and the cost is low.

The valve cone 8 comprises a cylinder 81 and a cone 82 which are connected with each other, a mounting groove 811 is formed on the upper end surface of the cylinder 81, the mounting groove 811 is sleeved on the end of the valve rod 2, and the cylinder 81 is fixedly connected with the end of the valve rod 2 through a fastener 9. As the valve rod shown in FIG. 3, a spherical structure is formed at the connecting end face of the valve rod and is arranged in the mounting groove of the valve cone, meanwhile, an annular groove is further formed in the rear of the spherical structure, a fastener is arranged in the annular groove, the valve cone is connected with the valve rod, and when the valve cone performs sealing, the spherical structure can better realize centering sealing.

As in the valve stem structure of fig. 3, a smooth surface 10 and a thread surface 20 are sequentially provided on the valve stem 2 located in the first passage 4 in a direction approaching the chamber 3, a seal gap 30 is formed between the smooth surface 10 and the first passage 4, and the seal assembly 7 is located in the seal gap 30; the outer side surface of the sealing component 7 is provided with a set of locking nuts 40 arranged on the smooth surface 10, the locking nuts 40 are in threaded connection with the inner side surface of the first channel 4, and the sealing between the valve rod and the valve body can be realized by extruding the sealing component 7 through the locking nuts.

The seal assembly 7 is shown in fig. 1, and comprises a compression ring 71 sleeved on the smooth surface 10 and a pressing sheet 72, wherein an extrusion conical surface 721 is formed on the pressing sheet 72, and as shown in fig. 5, the outer circular surface of the pressing sheet 72 is in sealing connection with the end part of the threaded surface of the first channel 4 through occlusion; as shown in fig. 4, a pressing inclined surface 711 matching with the pressing conical surface 721 is formed on the pressing ring 71, and the inner end surface of the lock nut 40 is press-fitted with the pressing ring 71. The pressing piece 72 is preferably polytetrafluoroethylene, but not limited thereto, and may be made of other rubber materials.

After the valve rod is rotated in place, the locking nut is screwed to enable the end face of the valve rod to axially extrude the compression ring 71, the extrusion inclined surface 711 on the compression ring 71 can move upwards along the extrusion conical surface 721 on the compression plate 72, and the compression ring 71 is made of a metal material, so that the compression plate can tightly encircle the smooth surface of the valve rod in the process of extrusion compression, thereby realizing axial sealing, being capable of being used in an environment ranging from minus 50 ℃ to +80 ℃, and having wide application range and high reliability and durability.

The valve body 1 in the invention is shown in fig. 1 and 2, and comprises a first valve body 11 and a second valve body 12, wherein the first channel 4 and the chamber 3 are formed in the first valve body 11, the second valve body 12 is coaxially fixed at the opening position of the chamber 3 of the first valve body 11, and the second channel 5 is formed in the second valve body 12, so that the valve cone at the end part of the valve rod and the second channel 5 in the second valve body can realize plug-in sealing.

The invention further preferably further provides a hollow third valve body 13 at the inner side end of the second channel 5, the third valve body 13 is coaxially fastened in the second channel 5 in the second valve body 12, the outer wall of the third valve body 13 is in sealing connection with the inner wall of the second valve body 12 and the end of the first valve body and the end of the second valve body respectively through welding, one end of the third valve body 13 extends into the cavity 3, the conical surface of the valve cone 8 and the end surface of the third valve body 13 form plug-in sealing, the valve cone can be preferably made of stainless steel, the third valve body is preferably made of oxygen-free copper, and the third valve body is softer than the valve cone due to the fact that the valve cone is better in sealing when the valve cone and the valve body are matched.

As shown in fig. 1, a connecting flange 50 is fixed at the free end of the second valve body 12, a pumping pipeline 60 communicated with the cavity 3 is further arranged on the side surface of the first valve body 11, and the third channel 6 is formed in the pumping pipeline 60. The vacuum pre-pumping valve is divided into an opening state and a closing state, when the pre-pumping valve is in the opening state, namely, the threaded surface of the valve rod and the pressing ring pressing sheet are tightly pressed together, and the pressing sheet is tightly pressed around the valve rod through the pressing ring by the acting force of the locking nut, so that sealing is realized. And then connecting the pre-pumping connecting flange to a high vacuum pump or a vacuum cavity such as an ion pump, connecting an air suction pipeline to a pre-pumping low vacuum mechanical pump or a pre-pumping system containing a high vacuum air suction pump, starting air suction, rotating a valve rod until a valve cone is tightly propped against a third valve body 13 after a certain high vacuum is reached, wherein the state is a closing state of the pre-pumping valve, and the high vacuum pump or the vacuum cavity is in a high vacuum state at the moment.

Of course, the high vacuum pump or vacuum chamber is maintained in the high vacuum state described above, and the low vacuum mechanical pump or the pre-pump system including the high vacuum pump connected to the pump line 60 is removed, and the pump line 60 is connected to the atmosphere. If the high vacuum pump or the vacuum cavity in the high vacuum state needs to be deflated, the valve rod is only required to be rotated, so that the valve cone is separated from the third valve body, and external air can enter the high vacuum pump or the vacuum cavity through the air extraction pipeline 60, so that the deflation function of the valve is realized. The locking nut and the sealing component always keep the sealing state with the valve rod in the whole air suction and air discharge process of the valve body, the position in the first channel is kept unchanged, and the locking nut and the sealing component can simultaneously give consideration to the air suction and air discharge functions in a precise instrument with higher integration level.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While obvious variations or modifications are contemplated as falling within the scope of the present invention.

Claims

1. The manual vacuum pre-pumping valve comprises a valve body (1) and a valve rod (2), wherein a cavity (3) is formed in the valve body (1), and is characterized in that a first channel (4) and a second channel (5) which are communicated with the cavity (3) are arranged at two ends of the valve body (1), a third channel (6) which is communicated with the cavity (3) is further arranged on the side face of the valve body (1), the valve rod (2) is arranged in the first channel (4), a sealing assembly (7) is sleeved on the valve rod, and the valve rod (2) is in threaded sealing connection with the inner side face of the first channel (4); one end of the valve rod (2) is provided with a valve cone (8), the valve cone (8) is positioned in the cavity (3), and when the valve rod (2) rotates and rotates the valve cone (8) to the inner side end surface of the second channel (5), the conical surface of the valve cone (8) and the inner side end surface of the second channel (5) form sealing connection so as to separate the second channel (5) from the third channel (6);

the valve rod (2) positioned in the first channel (4) is sequentially provided with a smooth surface (10) and a thread surface (20) along the direction approaching to the cavity (3), a sealing gap (30) is formed between the smooth surface (10) and the first channel (4), and the sealing assembly (7) is positioned in the sealing gap (30); a set of lock nuts (40) arranged on the smooth surface (10) are arranged on the outer side surface of the sealing assembly (7), and the lock nuts (40) are in threaded connection with the inner side surface of the first channel (4);

the sealing assembly (7) comprises a compression ring (71) and a pressing sheet (72) which are sleeved on the smooth surface (10), an extrusion conical surface (721) is formed on the pressing sheet (72), and the outer circular surface of the pressing sheet (72) is in sealing connection with the threaded surface of the first channel (4); an extrusion inclined surface (711) matched with the extrusion conical surface (721) is formed on the compression ring (71), and the inner side end surface of the lock nut (40) is in end surface extrusion fit with the compression ring (71).

2. A manual vacuum pre-suction valve according to claim 1, characterized in that the valve cone (8) comprises a cylinder (81) and a cone (82) which are connected with each other, a mounting groove (811) is formed on the upper end surface of the cylinder (81), the mounting groove (811) is sleeved on the end part of the valve rod (2), and the cylinder (81) is fixedly connected with the end part of the valve rod (2) through a fastener (9).

3. A manual vacuum pre-pump valve according to claim 2, characterized in that the connecting end of the valve stem (2) forms a spherical structure (21), the spherical structure (21) being arranged in a mounting groove (811) of the valve cone (8).

4. The manual vacuum pre-pump valve according to claim 1, wherein the compression sheet (72) is polytetrafluoroethylene.

5. A manual vacuum pre-pump valve according to any one of claims 1-4, characterized in that the valve body (1) comprises a first valve body (11) and a second valve body (12), the first channel (4) and the chamber (3) are molded in the first valve body (11), the second valve body (12) is coaxially fixed in the opening position of the chamber (3) of the first valve body (11), and the second channel (5) is molded in the second valve body (12).

6. The manual vacuum pre-pumping valve according to claim 5, wherein a hollow third valve body (13) is further arranged at the inner side end part of the second channel (5), the third valve body (13) is coaxially fastened in the second channel (5) in the second valve body (12), the inner wall of the third valve body (13) is in sealing connection with the second valve body (12), one end of the third valve body (13) extends into the cavity (3), and the conical surface of the valve cone (8) and the end face of the third valve body (13) form plug-in sealing.

7. Manual vacuum pre-pump valve according to claim 6, characterized in that the valve cone (8) is of stainless steel material and the third valve body (13) is of metal oxygen free copper material.

8. The manual vacuum pre-suction valve according to claim 7, characterized in that the free end of the second valve body (12) is fixed with a connecting flange (50), the side of the first valve body (11) is further provided with a suction line (60) communicating with the chamber (3), and the third channel (6) is formed in the suction line (60).