CN108004508A - A kind of crucible - Google Patents
A kind of crucible Download PDFInfo
- Publication number
- CN108004508A CN108004508A CN201711160262.4A CN201711160262A CN108004508A CN 108004508 A CN108004508 A CN 108004508A CN 201711160262 A CN201711160262 A CN 201711160262A CN 108004508 A CN108004508 A CN 108004508A
- Authority
- CN
- China
- Prior art keywords
- crucible
- lid
- metalwork
- crucible body
- bolt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
The invention discloses a kind of crucible, including：Crucible body with crucible mouth；Crucible lid, lid link together at crucible mouth and by bolt and the locking of crucible body；With the metalwork that thermal expansion can occur, it is arranged between crucible body and crucible lid, and is expanded by itself to eliminate the gap between crucible body and crucible lid when heated.Crucible provided by the invention, the metalwork of thermal expansion can be occurred by being provided between crucible body and crucible lid, metalwork extrudes crucible body and crucible lid when heated by the expansion of itself, gap between crucible body and crucible lid is eliminated with this, so that sealing is better achieved in crucible body and crucible lid, the problem of avoiding the occurrence of leakage, prevents the machine of delaying；In addition the coupling mechanism force of crucible bolt in clamping screw is also without especially big, more convenient for assembling, the abrasion that crucible lid is brought with nut because screwing extruding can also be reduced at the same time, and bolt can carry out coupling mechanism force by the expansion of metalwork lifting compensation, ensure to seal when being deposited, the practicality is more preferable.
Description
Technical field
Present document relates to but be not limited to evaporation coating technique, espespecially a kind of crucible.
Background technology
Existing crucible includes crucible body and crucible lid, crucible body and the rectangular shape of crucible lid, is locked on any side of crucible
There are multiple bolts, bolt is used to locking together with crucible body and crucible lid.Since the temperature in use of crucible is higher, therefore in crucible body and crucible lid
Between the gasket of silica gel, rubber etc. cannot be set to be sealed, currently employed sealing means are：The opening's edge of crucible body
The lower face of plane and crucible lid mutually compresses realization sealing, and this requires the coupling mechanism force of bolt is larger.
Wherein, the nut of bolt is directly pressed on crucible and covers, and when firmly twisting bolt, the nut of bolt is produced with crucible lid to rub
Wipe, with the increase of dismounting number, bolt the upper surface for the inserting hole (toroidal) that crucible covers can be pressed fall into and to inserting hole
Inner bulge (hole wall of inserting hole deforms and is in non-circular shape), bolt is not easy to pass completely through interspersed in such cases
Hole, that is, it is spiral cannot be screwed on crucible body in place, gap at this moment just occurs between crucible body and crucible lid and causes to leak, into
And machine problem of delaying.
The content of the invention
At least one of in order to solve the above-mentioned technical problem, there is provided herein a kind of crucible, can preferably block
Gap between crucible body and crucible lid, avoids the problem that leaking between crucible body and crucible lid with the increase of dismounting number,
The practicality is more preferable.
In order to reach this paper purposes, the present invention provides a kind of crucible, including：Crucible body with crucible mouth；Crucible lid, lid are mounted in
Link together at the crucible mouth and by bolt and crucible body locking；With the metalwork that thermal expansion can occur, institute is arranged at
State between crucible body and the crucible lid, and expanded by itself to eliminate the seam between the crucible body and the crucible lid when heated
Gap.
Alternatively, holding tank is provided with the crucible body, the crucible lid also covers the notch of the holding tank at the same time, described
Metalwork is located in the holding tank；Wherein, cell wall and the institute of the holding tank are compressed during the metalwork expanded by heating at the same time
State crucible lid.
Alternatively, the metalwork and the holding tank shape in a ring.
Alternatively, the metalwork is an integral structure with the crucible lid.
Alternatively, the crucible covers the slot for being provided with T-shaped, and the lateral surface of the crucible body is protruding with two joint bars, described
Crucible body is plugged in the slot in which can push and pull by two joint bars, and the metalwork is located at the joint bar and the slot
Between cell wall；Wherein, the cell wall of the joint bar and the slot is compressed during the metalwork expanded by heating at the same time.
Alternatively, the crucible mouth is located at the top of the crucible body, the metalwork be arranged at the lower face of the joint bar with
Between the cell wall of the slot；Wherein, the cell wall of the joint bar and the slot is compressed during the metalwork expanded by heating at the same time,
So that the opening's edge of the crucible mouth is pressed on the lower face of the crucible lid.
Alternatively, the through hole passed through for the bolt is provided with the metalwork.
Alternatively, the crucible further includes：Metal gasket, is arranged between the nut of the bolt and the crucible body.
Alternatively, the crucible body and the rectangular shape of the crucible lid, the elongated shape of metal gasket.
Alternatively, the material of the metalwork is aluminium alloy, and the material of the metal gasket is white steel.
Compared with prior art, crucible provided by the invention, is provided with the gold that thermal expansion can occur between crucible body and crucible lid
Belong to part, metalwork extrudes crucible body and crucible lid when heated by the expansion of itself, is eliminated with this between crucible body and crucible lid
Gap so that the problem of crucible body and crucible lid are better achieved sealing, avoid the occurrence of leakage, prevents the machine of delaying；In addition crucible is being locked
The coupling mechanism force of bolt more convenient for assembling, while can also reduce crucible lid with nut because screwing also without especially greatly during bolt
The abrasion for extruding and bringing, and bolt can carry out coupling mechanism force by the expansion of metalwork lifting compensation, close to ensure when being deposited
Envelope, the practicality are more preferable.
Moreover, when crucible is dismantled after the cooling period, metalwork is also shunk because of cooling, the thrust that the nut of bolt is subject to
Reduce, it is easier to unscrew and disassemble.
The further feature and advantage of this paper will illustrate in the following description, also, partly become from specification
It is clear that or understood by implementing herein.The purpose of this paper and other advantages can be by specification, claims
And specifically noted structure is realized and obtained in attached drawing.
Brief description of the drawings
Attached drawing is used for providing further understanding this paper technical solutions, and a part for constitution instruction, with this Shen
Embodiment please is used for the technical solution for explaining this paper together, does not form the limitation to this paper technical solutions.
Fig. 1 is the structure diagram of the crucible described in one embodiment of the invention；
Fig. 2 is the structure diagram of the crucible described in another embodiment of the present invention；
Fig. 3 is the structure diagram of the crucible described in further embodiment of the present invention；
Fig. 4 be Fig. 2 shown in crucible in metal gasket structure diagram.
Wherein, the correspondence in Fig. 1 to Fig. 4 between reference numeral and component names is：
1 crucible body, 2 crucible lids, 3 bolts, 4 metalworks, 5 holding tanks, 6 slots, 7 joint bars, 8 metal gaskets, 9 connection ozzles.
Embodiment
For the purpose, technical scheme and advantage of this paper are more clearly understood, the reality below in conjunction with attached drawing to this paper
Example is applied to be described in detail.It should be noted that in the case where there is no conflict, the spy in embodiment and embodiment in the application
Sign can be mutually combined.
Many details are elaborated in the following description in order to fully understand herein, still, can also be adopted herein
Implemented with other different from mode described here, therefore, the protection domain of this paper and from following public specific implementation
The limitation of example.
The crucible of some embodiments herein is described below in conjunction with the accompanying drawings.
Crucible provided by the invention, as shown in Figure 1 to Figure 3, including：Crucible body 1 with crucible mouth；Crucible lid 2, lid is mounted in described
Link together at crucible mouth and by bolt 3 and the crucible body 1 locking；Metalwork 4 with thermal expansion can occur, is arranged at institute
State between crucible body 1 and the crucible lid 2, and expanded by itself to eliminate between the crucible body 1 and the crucible lid 2 when heated
Gap.
Crucible provided by the invention, is provided with the metalwork 4 that thermal expansion can occur, metalwork 4 between crucible body 1 and crucible lid 2
Crucible body 1 and crucible lid 2 are extruded by the expansion of itself when heated, the gap between crucible body 1 and crucible lid 2 is eliminated with this, is made
Obtain crucible body 1 and sealing is better achieved in crucible lid 2, avoid leaking in evaporation, prevent machine problem of delaying；In addition crucible exists
The coupling mechanism force of bolt 3 more convenient for assembling, while can also reduce crucible lid 2 and nut also without especially greatly during clamping screw 3
The abrasion that brings because screwing extruding, and when being deposited bolt coupling mechanism force can be carried out by the expansion of metalwork 4 lifting compensation, come
Ensure sealing, the practicality is more preferable.
Moreover, when crucible is dismantled after the cooling period, metalwork 4 is also shunk because of cooling, can be reduced to crucible body 1 and crucible lid
2 extruding force, the thrust that the nut of bolt 3 is subject to reduce, it is easier to unscrew and disassemble.
In one embodiment of the present of invention, as depicted in figs. 1 and 2, holding tank 5, the crucible lid are provided with the crucible body 1
2 also cover the notch of the holding tank 5 at the same time, and the metalwork 4 is located in the holding tank 5；Wherein, the metalwork 4 by
The cell wall of the holding tank 5 and the crucible lid 2 are compressed during thermal expansion at the same time, the mouth of the crucible mouth of lower surface and crucible body 1 to crucible lid 2
Gap between is blocked, and is avoided leaking at the gap during evaporation, is better assured that evaporation process is normally carried out,
Machine problem of delaying is prevented, the depth of holding tank 5 is preferably 5mm, 6mm or 7mm.
Specifically, upward, holding tank 5 is arranged in the opening's edge of crucible mouth the crucible mouth of crucible body 1, the lid of crucible lid 2 on the crucible body 1,
And holding tank 5 is covered at the same time, metalwork 4 is arranged in holding tank 5, has then screwed bolt 3 again.Metalwork 4 and holding tank 5 are equal
Shape in a ring, expands, turgor holding tank 5, the upper end of metalwork 4 is pressed on crucible lid 2 because of expansion after metalwork 4 is heated
On lower face, the gap blocked between crucible body 1 and crucible lid 2 is realized in this way.
Certainly, metalwork 4 may be set to be integral structure with crucible lid 2, can also realize the purpose of the application, its objective
Without departing from the design philosophy of the present invention, details are not described herein, should also belong in the protection domain of the application.
In an alternative embodiment of the invention, as shown in figure 3, the slot 6 of T-shaped is provided with the crucible lid 2, the crucible body
1 lateral surface is protruding with two joint bars 7, and the crucible body 1 is plugged in the slot 6 in which can push and pull by two joint bars 7, institute
Metalwork 4 is stated between the joint bar 7 and the cell wall of the slot 6；Wherein, pressed at the same time during 4 expanded by heating of metalwork
The cell wall of the tight joint bar 7 and the slot 6, the gap between the crucible body 1 and the crucible lid 2 is eliminated with this.
Such as：Crucible mouth is located at the top of crucible body 1, and metalwork 4 is plate-like and is covered at the crucible mouth of crucible body 1 (in this conceptual scheme
It is not shown), expand and be pressed between the opening's edge of crucible body 1 and the lower face of crucible lid 2 when metalwork 4 is heated, come in this way
Block the gap between crucible body 1 and crucible lid 2.
It can also be：As shown in figure 3, the crucible mouth is located at the top of the crucible body 1, the 4 elongated shape of metalwork,
And it is arranged between the lower face of the joint bar 7 and the cell wall of the slot 6；Wherein, during 4 expanded by heating of metalwork at the same time
The cell wall of the joint bar 7 and the slot 6 is compressed, so that the opening's edge of the crucible mouth is pressed on the lower face of the crucible lid 2,
Realize the gap eliminated between the crucible body 1 and the crucible lid 2, prevent crucible leakage problem occur in evaporation.
Wherein, the through hole passed through for the bolt 3 is both provided with the metalwork 4 and the joint bar 7, with locking screw
Passed through during bolt 3 for bolt 3, while bolt 3 can play the role of positioning to metalwork 4, occur after preventing 4 expanded by heating of metalwork
Dislocation reduces sealed crucible.
In yet another embodiment of the present invention, as shown in Figure 2 and Figure 4, the crucible further includes：Metal gasket 8, is arranged at
Between the nut of the bolt 3 and the crucible body 1, the rigidity of metal gasket 8 preferably, and connecing relative to nut and crucible lid 2
Contacting surface product is larger, and when such clamping screw 3 would not damage the inserting hole on crucible lid 2, at most cause metal gasket 8 to deform or damage
It is bad, it can ensure crucible normal use by way of maintenance either replaces metal gasket 8 in such cases.
Wherein, the crucible body 1 and the rectangular shape of the crucible lid 2, the 8 elongated shape of metal gasket and including pair
Claim two set, in order to ensure that each position of crucible occurs without leakage problem, the both sides of crucible are both provided with multiple bolts
3, multiple holes passed through for bolt 3 or notch are correspondingly arranged on metal gasket 8.It is fixed to be provided with the upper surface of the crucible lid 2
The ledge structure of position metal gasket 8.
Preferably, the material of the metalwork 4 is preferably aluminium alloy, its fusing point is higher, thermal expansivity is preferable, the metal
The material of gasket 8 is preferably white steel, its intensity is preferable.
Preferably, as shown in Figure 1 to Figure 3, connection ozzle is provided with the crucible lid 2 (i.e.：Nozzle).
In conclusion crucible provided by the invention, is provided with the metalwork that thermal expansion can occur between crucible body and crucible lid, gold
Belong to part crucible body and crucible lid are extruded by the expansion of itself when heated, the gap between crucible body and crucible lid is eliminated with this, is made
Crucible body and crucible lid the problem of sealing is better achieved, avoids the occurrence of leakage, prevent the machine of delaying；In addition crucible spiral shell in clamping screw
The coupling mechanism force of bolt more convenient for assembling, while can also reduce crucible lid with nut because screwing extruding and band also without especially greatly
The abrasion come, and bolt can carry out coupling mechanism force by the expansion of metalwork lifting compensation, ensure to seal when being deposited, it is practical
Property is more preferable.
Moreover, when crucible is dismantled after the cooling period, metalwork is also shunk because of cooling, the thrust that the nut of bolt is subject to
Reduce, it is easier to unscrew and disassemble.
In description herein, term " installation ", " connected ", " connection ", " fixation " etc. should all be interpreted broadly, for example,
" connection " can be fixedly connected or be detachably connected, or be integrally connected；It can be directly connected, can also lead to
Intermediary is crossed to be indirectly connected.For the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning herein.
In the description of this specification, the description of term " one embodiment ", " some embodiments ", " specific embodiment " etc.
Mean to combine at least one implementation that the particular features, structures, materials, or characteristics that the embodiment or example describe are contained in this paper
In example or example.In the present specification, schematic expression of the above terms is not necessarily referring to identical embodiment or example.
Moreover, the particular features, structures, materials, or characteristics of description can be in any one or more embodiments or example with suitable
Mode combine.
Although embodiment disclosed herein is as above, the content is only the implementation for readily appreciating and using herein
Mode, is not limited to herein.Technical staff in any this paper fieldss, do not depart from spirit disclosed herein and
On the premise of scope, any modification and change, but the patent protection model of this paper can be carried out in the form and details of implementation
Enclose, still should be subject to the scope of the claims as defined in the appended claims.
Claims (10)
- A kind of 1. crucible, it is characterised in that including：Crucible body with crucible mouth；Crucible lid, lid link together at the crucible mouth and by bolt and crucible body locking；WithThe metalwork of thermal expansion can occur, be arranged between the crucible body and the crucible lid, and pass through itself expansion when heated To eliminate the gap between the crucible body and the crucible lid.
- 2. crucible according to claim 1, it is characterised in that holding tank is provided with the crucible body, the crucible lid is at the same time The notch of the holding tank is also covered, the metalwork is located in the holding tank；Wherein, the cell wall of the holding tank and the crucible lid are compressed during the metalwork expanded by heating at the same time.
- 3. crucible according to claim 2, it is characterised in that the metalwork and the holding tank shape in a ring.
- 4. crucible according to claim 2, it is characterised in that the metalwork is an integral structure with the crucible lid.
- 5. crucible according to claim 1, it is characterised in that the crucible covers the slot for being provided with T-shaped, the crucible body Lateral surface is protruding with two joint bars, and the crucible body is plugged in the slot in which can push and pull by two joint bars, the metal Part is between the joint bar and the cell wall of the slot；Wherein, the cell wall of the joint bar and the slot is compressed during the metalwork expanded by heating at the same time.
- 6. crucible according to claim 5, it is characterised in that the crucible mouth is located at the top of the crucible body, the metal Part is arranged between the lower face of the joint bar and the cell wall of the slot；Wherein, the cell wall of the joint bar and the slot is compressed during the metalwork expanded by heating at the same time, so that the crucible mouth Opening's edge be pressed on the lower face of the crucible lid.
- 7. crucible according to claim 6, it is characterised in that be provided with the metalwork and lead to for what the bolt passed through Hole.
- 8. crucible according to any one of claim 1 to 7, it is characterised in that further include：Metal gasket, is arranged between the nut of the bolt and the crucible body.
- 9. crucible according to claim 8, it is characterised in that the crucible body and the rectangular shape of the crucible lid, the gold Belong to the elongated shape of gasket.
- 10. crucible according to claim 8, it is characterised in that the material of the metalwork is aluminium alloy, the metal gasket The material of piece is white steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711160262.4A CN108004508A (en) | 2017-11-20 | 2017-11-20 | A kind of crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711160262.4A CN108004508A (en) | 2017-11-20 | 2017-11-20 | A kind of crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108004508A true CN108004508A (en) | 2018-05-08 |
Family
ID=62053165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711160262.4A Pending CN108004508A (en) | 2017-11-20 | 2017-11-20 | A kind of crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108004508A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115522167A (en) * | 2022-09-22 | 2022-12-27 | 京东方科技集团股份有限公司 | Evaporation source equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060111040A (en) * | 2005-04-21 | 2006-10-26 | 황창훈 | Evaporation cell with large-capacity crucibles for large-size oled manufacturing |
| KR20140141311A (en) * | 2013-05-31 | 2014-12-10 | 삼성디스플레이 주식회사 | Cubicle apparatus and deposition apparatus with the same |
| CN107326329A (en) * | 2017-08-31 | 2017-11-07 | 京东方科技集团股份有限公司 | Evaporation source and evaporation coating device |
| CN207418852U (en) * | 2017-11-20 | 2018-05-29 | 京东方科技集团股份有限公司 | A kind of crucible |
-
2017
- 2017-11-20 CN CN201711160262.4A patent/CN108004508A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060111040A (en) * | 2005-04-21 | 2006-10-26 | 황창훈 | Evaporation cell with large-capacity crucibles for large-size oled manufacturing |
| KR20140141311A (en) * | 2013-05-31 | 2014-12-10 | 삼성디스플레이 주식회사 | Cubicle apparatus and deposition apparatus with the same |
| CN107326329A (en) * | 2017-08-31 | 2017-11-07 | 京东方科技集团股份有限公司 | Evaporation source and evaporation coating device |
| CN207418852U (en) * | 2017-11-20 | 2018-05-29 | 京东方科技集团股份有限公司 | A kind of crucible |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115522167A (en) * | 2022-09-22 | 2022-12-27 | 京东方科技集团股份有限公司 | Evaporation source equipment |
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