CN107991771A - A kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation - Google Patents
A kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation Download PDFInfo
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- CN107991771A CN107991771A CN201711168829.2A CN201711168829A CN107991771A CN 107991771 A CN107991771 A CN 107991771A CN 201711168829 A CN201711168829 A CN 201711168829A CN 107991771 A CN107991771 A CN 107991771A
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Abstract
A kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation disclosed by the invention, belongs to micronano optical field.The present invention obtains the amplitude and dynamic phasing information of target light field, by determining super clever nano surface rectangular column azimuth angle theta, realizes the phase-modulation of target light field by varying the structure size of super clever nano surface rectangular column；Amplitude is combined with phase information, so as to fulfill arbitrary complex amplitude regulation and control are carried out in single pixel；Determine the cycle on super clever surface, the selected corresponding Fourier's level of all diffraction times is overlapped, set the complex amplitude information of super clever surface each unit structure accordingly, realize the selective excitation to spatial diffraction time.The present invention, which has, carries out the amplitude of target light field sublevel processing, target light field phase can consecutive variations the advantages of.The present invention can reduce the complexity of super clever surface design and processing, be widely used in the fields such as light field shaping, laser parallel processing and micronano optical detection.
Description
Technical field
The present invention relates to a kind of diffraction time independence selective excitation method, more particularly to one kind to be based on the super clever surface of medium
The production method of complex amplitude modulation, belongs to micronano optical field.
Background technology
Super clever surface is a kind of plane that the physical characteristic being not present in nature is realized using the design of artificial micro-nano structure
Artificial electromagnetic material, is changed local by the strong optical response of the construction units such as the nano-antenna of sub-wavelength dimensions, resonator
Light field responds, so as to fulfill the wavefront modification of sub-wavelength pixel.Realize that phase change is different using light path accumulation from traditional, surpass
Clever surface can realize the mutation of phase in the structure much smaller than wavelength.In addition, super clever surface can also realize amplitude, polarization
The regulation and control of the others optical parameter such as state, angular momentum, wave vector.Device and application study based on super clever surface have been directed to many
Aspect, including plane super lens, metamaterial zone plate, beam splitter, controllable surface phasmon beam splitter, and high-resolution
Rate 3D hologram imaging etc..
Diffraction grating is a kind of effective way for realizing Beam Control.By the design of screen periods and duty cycle, it is based on
Grating equation and rigorous Vector Analysis are theoretical, it is possible to achieve the excitation of continuous diffraction level and specific energy point in cut-off level
Cloth.Darman raster is improved on the basis of traditional raster, by each separate unit to being divided in screen periods into
Row phase optimization, it is possible to achieve a peacekeeping two-dimentional light beam array, and realize energy be uniformly distributed or the distribution of specific ratio.So
And this design method based on optimization algorithm can not realize the complete inhibition to non-selected level, therefore can not realize to every
The independent control of a level.Meanwhile this simple phase-modulation is difficult to realize higher diffraction efficiency.A kind of feasible solution
Method is to change the method for phase-only modulation, while carries out complex amplitude modulation to amplitude and phase.Dimensionally, traditional Dammam
Device can not also be applied to integrated optical system, and the relevant research in part has begun to attempt Dammam optimization method with surpassing
Clever surface is combined, to generate two-dimensional lattice and vortex array.
The content of the invention
The independent alternative excitation of diffraction time can not be realized in order to solve the problems, such as to exist in the prior art, and the present invention is public
A kind of diffraction time selective excitation method technical problems to be solved based on super clever surface complex amplitude modulation opened are realization
To the selective excitation of spatial diffraction time.
The present invention is achieved through the following technical solutions.
A kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation disclosed by the invention, by changing
Become the structure size of super clever nano surface rectangular column, obtain the amplitude and dynamic phasing information of target light field, it is super clever by determining
Nano surface rectangular column azimuth angle theta, realizes the phase-modulation of target light field.Amplitude is combined with phase information, so as to fulfill
Arbitrary complex amplitude regulation and control are carried out in single pixel.Determine the cycle on super clever surface, selected all diffraction times are corresponded to
Fourier's level be overlapped, and set the complex amplitude information of super clever surface each unit structure accordingly, that is, realize to space biography
Broadcast the selective excitation of diffraction time.
A kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation disclosed by the invention, including such as
Lower step：
Step 1：Structure size by varying super clever nano surface rectangular column realizes Modulation and Amplitude Modulation.
Realized by the nanometer rectangle rod structure of dielectric material on the super clever surface.In identical incident wavelength and incidence
Under conditions of polarization, if keeping the azimuth of nanometer rectangular column identical, adjusting nanometer rectangular column physical dimension can cause conversely
The change of rotation direction transmitted light complex amplitude.The different length and the complex amplitude transmitance of the nanometer rectangular column of width pass through two
The result of the linearly polarized light incidence of vertical direction is calculated.
Step 2：Determine super clever nano surface rectangular column azimuth angle theta, realize the phase-modulation of target light field.
According to berry phase principle, when the circularly polarized light of a certain rotation direction is incident, make through anisotropic nanometer rectangular column
With rear, the circular polarization transmitted light of opposite rotation direction is chosen, the whole story state that corresponding polarization state develops is located at the arctic of poincare sphere respectively
And the South Pole.Under DC Electric Field, the different nanometer rectangle rod structure of two azimuth angle thetas produces and azimuth pair itself respectively
The electric polarization response answered, polarization direction is parallel with the major axis of nanometer rectangular column, thus two kinds of corresponding electric polarization respond there is
Different Evolution Paths.Although whole story state is identical, the phase of the scattered field of described two nanometer rectangular columns is different, phase
Difference is equal to the half at the space multistory angle that two Evolution Paths include in poincare sphere.Therefore, according to above-mentioned principle, when left-handed or right
When the circularly polarized light of rotation is incident, the phase offset of the transmitted light of opposite rotation direction is azimuthal two times of nanometer rectangular column.
Step 3：Realized based on super clever surface and arbitrary complex amplitude regulation and control are carried out in single pixel.
For default different amplitude, corresponding various sizes of nanometer rectangular column meeting while Modulation and Amplitude Modulation is realized
Subsidiary extra phase place change, the extra phase variable quantity is obtained by numerical simulation.Nanometer is rotated by opposite direction
The cellular construction of rectangular column, additional compensation phase αcAbove-mentioned extra phase place change is compensated, different length can be made
The nanometer rectangle rod structure of degree obtains identical initial phase.And it can be led according to above-mentioned berry phase principle, different azimuths
Scattered field is caused to produce different SPA sudden phase anomalies.By above-mentioned compensation azimuth angle alphacIt is combined with berry phase and realizes arbitrary phase tune
System.The nanometer rectangular column Modulation and Amplitude Modulation of final gained is determined that its azimuth angle theta is proportional to shellfish by the length and width of nanometer rectangular column
In phase and compensation phase αcSuperposition value, i.e., nanometer rectangular column azimuth angle theta is determined according to formula (1), according to definite nanometer
Rectangular column azimuth angle theta realizes the phase-modulation of target light field, and then realizes that complex amplitude is modulated.
θ=(α-αc)/2 (1)
Wherein：α be target light field phase value, αcTo compensate phase, its numerical value is equal to the nanometer square of different cross section size
The phase place change of the opposite rotation direction transmission complex amplitude of shape column.
Step 4：Determine the cycle on super clever surface, the selected corresponding Fourier's level of all diffraction times is folded
Add, and set the complex amplitude information of super clever surface each unit structure accordingly, that is, realize the selectivity to spatial diffraction time
Excitation.
The size for changing nanometer rectangular column by step 1 realizes Modulation and Amplitude Modulation, and a nanometer rectangular column side is determined by step 2
Parallactic angle θ realizes the phase-modulation of target light field, and realizes to regulate and control the complex amplitude of single pixel structure by step 3, and according to
The target complex amplitude information of actual condition setting determines the size and azimuth angle theta of super clever surface each unit structure, that is, realizes to sky
Between propagate diffraction time selective excitation.
Further include step 5：A kind of diffraction modulated based on super clever surface complex amplitude realized by step 1 to step 4
Level selective excitation method, arbitrarily modulates propagation field amplitude and phase, and the diffraction time of two-dimensional space is carried out
Arbitrary selection, Practical Project is solved the problems, such as applied to fields such as beam shaping, laser parallel processing and micronano optical detections.
Beneficial effect：
1st, a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation disclosed by the invention, passes through
Compensate azimuth angle alphacIt is combined with berry phase, carries out arbitrary complex amplitude regulation and control in sub-wavelength dimensions, realize complex light field point
Cloth and propagation, and diffraction time selective excitation method.
2nd, a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation disclosed by the invention, uses
The complexity for being the dielectric material nanometer rectangle pillar array structure based on super clever surface, the super design of clever surface and processing being reduced
Degree, can be widely applied for light field shaping, the field such as laser parallel processing and micronano optical detection
3rd, a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation disclosed by the invention, passes through
Change the design of the structure size and azimuth angle theta of super clever nano surface rectangular column, have and the amplitude of target light field is divided
The advantages of rank processing, the phase of target light field can realize consecutive variations.
Brief description of the drawings
Fig. 1 is a kind of diffraction time selective excitation method stream based on super clever surface complex amplitude modulation disclosed by the invention
Cheng Tu；
Fig. 2 is the design principle schematic diagram of far field construction level selective excitation method of the present invention；
Fig. 3 is the complex amplitude information for the nanometer rectangular column of target wavelength.Wherein Fig. 3 a are transmission amplitude, and Fig. 3 b are
Phase is compensated, Fig. 3 c are corresponding azimuth
Fig. 4 a are the result figure based on the super clever surface of the invention processed under a scanning electron microscope, and Fig. 4 b are observation
Experimental provision schematic diagram.P：Polarizer；W：Quarter wave plate.
The level selective excitation result that Fig. 5 is generated based on the present invention.Wherein scheme a and correspond to answering for level for " META " pattern
Amplitude terminal objective pattern, figure b are the numerical simulation result of 5 rank amplitudes and continuous phase, and figure c is to process sample based on super clever surface
The experimental result of product.
Embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.Specific embodiment described herein only to
Explain the present invention, be not intended to limit the present invention.
Embodiment 1：
For the feasibility of verification method, (each corresponding level by taking selective excitation is shaped like the diffraction time of " META " as an example
As shown in Figure 2), the specific design of the super clever nano surface rectangular column array of medium is carried out.
The present embodiment discloses a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation, specific real
Existing method is as follows：
Step 1：Size by varying super clever nano surface rectangular column realizes Modulation and Amplitude Modulation.
Realized by the nanometer rectangle rod structure of dielectric material on the super clever surface.As shown in Fig. 2, sub-wavelength dimensions
Nanometer rectangular column is machined in substrate of glass.For design wavelength 785nm, the refractive index of dielectric material silicon can pass through ellipsometer
Measurement, at design wavelength, it is n=3.8502+0.0109i to measure refraction value.In identical incident wavelength and incident polarization
Under the conditions of, if keeping the azimuth of nanometer rectangular column identical, adjusting nanometer rectangular column physical dimension can cause opposite rotation direction saturating
Penetrate the change of recovery amplitude.The complex amplitude transmitance of the different length nanometer rectangular column can pass through two vertical direction
The result of linearly polarized light incidence is calculated.
Length and width scope is respectively set to 80 to 200nm, 40nm to 150nm, receives different length and width
Rice rectangular column is scanned by numerical simulation, obtains circularly polarized light incidence under correspondingly-sized, opposite rotation direction circularly polarized light outgoing
Complex amplitude transmitance, so as to obtain various sizes of amplitude relation, as shown in Figure 3a.
Step 2：Determine super clever nano surface rectangular column azimuth angle theta, realize the phase-modulation of target light field.
Various sizes of nanometer rectangular column can attach extra phase place change while Modulation and Amplitude Modulation is realized, pass through numerical value
Simulation can obtain the extra phase variable quantity.By being compensated to subsidiary extra phase change, can make not
Nanometer rectangular column with length obtains identical initial phase.Meanwhile it can be caused according to berry phase principle, different azimuths
Scattered field produces different SPA sudden phase anomalies.When a kind of specific circularly polarized light incidence, the phase of the transmitted light of opposite rotation direction is inclined
Move as azimuthal two times of nanometer rectangular column.
Step 3：Realized based on super clever surface and arbitrary complex amplitude regulation and control are carried out in single pixel.
(0.2,0.4,0.6,0.8 0.9589), can by numerical simulation for the amplitude that 5 different in selecting step one
Obtain the extra phase change subsidiary while Modulation and Amplitude Modulation is realized of various sizes of nanometer rectangular column.Revolved by opposite direction
Turn the cellular construction of nanometer rectangular column, additional compensation azimuth can be to above-mentioned extra phase place change αcCompensate, can
The nanometer rectangle rod structure of different length is enough set to obtain identical initial phase, as shown in Figure 3b.And according to above-mentioned berry phase
Principle, different azimuths can cause scattered field to produce different SPA sudden phase anomalies.Above-mentioned compensation phase is mutually tied with berry phase
Arbitrary phase-modulation is realized in conjunction.The nanometer rectangular column Modulation and Amplitude Modulation of final gained is determined by the length and width of nanometer rectangular column
Fixed, its azimuth angle theta is berry phase and the superposition value of compensation phase, i.e., determines nanometer rectangular column azimuth angle theta according to formula (1),
The phase-modulation of target light field is realized according to definite nanometer rectangular column azimuth angle theta, and then realizes that complex amplitude is modulated.Shown in Fig. 3 c
Size for five selected nanometer rectangular columns and its corresponding azimuth in initial phase.
Step 4：Determine the cycle on super clever surface, the selected corresponding Fourier's level of all diffraction times is folded
Add, and set the complex amplitude information of super clever surface each unit structure accordingly, you can realize the selective excitation of diffraction time.
The size for changing nanometer rectangular column by step 1 realizes Modulation and Amplitude Modulation, and a nanometer rectangular column side is determined by step 2
Parallactic angle θ realizes the phase-modulation of target light field, and realizes to regulate and control the complex amplitude of single pixel structure by step 3.For each
Selected diffraction time, the stack result of its Fourier expansion formula are represented by
Wherein p, q be two-dimensional directional on diffraction time, dx, dyFor the cycle of both direction.According to the pattern of " META " point
Cloth selects corresponding each diffraction time.As shown in Fig. 2, the value of p, q are respectively between -5 to 5 and -7 to 7.Due to selected accordingly
Each level of correspondence result maximum it is overlapping in same position, i.e., for arbitrary m, n, as (x, y)=(ndx/p,mdy/q)
When, U=1.Here, the value corresponding to the point is much larger than the numerical value of other positions, therefore is unfavorable for the amplitude tune being normalized
System.Small phase shift is carried out to each level, i.e.,
Wherein lcFor the pel spacing of nanostructured.Afterwards, selected and corresponded to respectively according to the amplitude of formula (3) and phase value
Nanometer column dimension, and determine corresponding azimuth.The selective excitation of diffraction time can be achieved.
The nanometer rectangular column of dielectric material described above can be realized by beamwriter lithography and beam-plasma etching.Processing
The result of the super clever surface completed under a scanning electron microscope is as shown in fig. 4 a.Final design result can pass through Fig. 4 b institutes
Show that experimental provision is observed.The laser light source of 785nm is converted into required circularly polarized light and enters by polarizer and 1/4 wave plate
It is incident upon sample surfaces.Received by microcobjective in transmission direction by CCD.Fig. 5 a show target pattern, Fig. 5 b, 5c point
Wei not analog result and experimental result.The two mutually coincide well, and non-selected level is effectively suppressed.
The present embodiment can propagate answering for the arbitrarily complicated light field on medium super clever surface of the light field realization based on berry phase
Modulation and Amplitude Modulation, realizes the independent alternative excitation of diffraction time.Complex amplitude modulator approach design is easy, easy to process, can
Arbitrarily to be modulated to amplitude and phase, have in fields such as beam shaping, laser parallel processing and micronano optical detections
Important application value.
Above-described specific descriptions, have carried out further specifically the purpose, technical solution and beneficial effect of invention
It is bright, it should be understood that the foregoing is merely the specific embodiment of the present invention, for explaining the present invention, it is not used to limit this
The protection domain of invention, within the spirit and principles of the invention, any modification, equivalent substitution, improvement and etc. done should all
Within protection scope of the present invention.
Claims (6)
- A kind of 1. diffraction time selective excitation method based on super clever surface complex amplitude modulation, it is characterised in that：Including as follows Step：Step 1：Structure size by varying super clever nano surface rectangular column realizes Modulation and Amplitude Modulation；Step 2：Determine super clever nano surface rectangular column azimuth angle theta, realize the phase-modulation of target light field；Step 3：Realized based on super clever surface and arbitrary complex amplitude regulation and control are carried out in single pixel；Step 4：Determine the cycle on super clever surface, the selected corresponding Fourier's level of all diffraction times is overlapped, and The complex amplitude information of super clever surface each unit structure is set accordingly, that is, realizes the selective excitation to spatial diffraction time.
- 2. a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation as claimed in claim 1, its It is characterized in that：Further include step 5：A kind of the spreading out based on super clever surface complex amplitude modulation realized by step 1 to step 4 Penetrate level selective excitation method, propagation field amplitude and phase arbitrarily modulated, to the diffraction time of two-dimensional space into The arbitrary selection of row, solves Practical Project applied to fields such as beam shaping, laser parallel processing and micronano optical detections and asks Topic.
- 3. a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation as claimed in claim 1 or 2, It is characterized in that：Step 1 concrete methods of realizing is,Realized by the nanometer rectangle rod structure of dielectric material on the super clever surface；In identical incident wavelength and incident polarization Under conditions of, if keeping nanometer rectangular column azimuth angle theta identical, adjusting nanometer rectangular column physical dimension can cause opposite rotation direction saturating Penetrate the change of recovery amplitude；The different length and the complex amplitude transmitance of the nanometer rectangular column of width pass through two Vertical Squares To the result of linearly polarized light incidence be calculated.
- 4. a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation as claimed in claim 3, its It is characterized in that：Step 2 concrete methods of realizing is,According to berry phase principle, when the circularly polarized light of a certain rotation direction is incident, after the effect of anisotropic nanometer rectangular column, The circular polarization transmitted light of opposite rotation direction is chosen, the whole story state that corresponding polarization state develops is located at the arctic and south of poincare sphere respectively Pole；Under DC Electric Field, the different nanometer rectangle rod structure of two azimuth angle thetas produces corresponding with azimuth itself respectively Electric polarization responds, and polarization direction is parallel with the major axis of nanometer rectangular column, therefore there is difference for two kinds of corresponding electric polarization responses Evolution Paths；Although whole story state is identical, the phase of the scattered field of described two nanometer rectangular columns is different, phase difference etc. Half in the space multistory angle that two Evolution Paths include in poincare sphere；Therefore, according to above-mentioned principle, when left or right rotation When circularly polarized light is incident, the phase offset of the transmitted light of opposite rotation direction is azimuthal two times of nanometer rectangular column.
- 5. a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation as claimed in claim 4, its It is characterized in that：Step 3 concrete methods of realizing is,For default different amplitude, corresponding various sizes of nanometer rectangular column can attach while Modulation and Amplitude Modulation is realized Extra phase place change, the extra phase variable quantity is obtained by numerical simulation；Nanometer rectangle is rotated by opposite direction The cellular construction of column, additional compensation phase αcAbove-mentioned extra phase place change is compensated, different length can be made Nanometer rectangle rod structure obtains identical initial phase；And according to above-mentioned berry phase principle, different azimuths can cause to dissipate Penetrate field and produce different SPA sudden phase anomalies；By above-mentioned compensation azimuth angle alphacIt is combined with berry phase and realizes arbitrary phase-modulation； The nanometer rectangular column Modulation and Amplitude Modulation of final gained is determined that its azimuth angle theta is proportional in shellfish by the length and width of nanometer rectangular column Phase and compensation phase αcSuperposition value, i.e., nanometer rectangular column azimuth angle theta is determined according to formula (1), according to definite nanometer square Shape column azimuth angle theta realizes the phase-modulation of target light field, and then realizes that complex amplitude is modulated；θ=(α-αc)/2 (1)Wherein：α be target light field phase value, αcTo compensate phase, its numerical value is equal to the nanometer rectangular column phase of different cross section size Phase place change of the derotation to transmission complex amplitude.
- 6. a kind of diffraction time selective excitation method based on super clever surface complex amplitude modulation as claimed in claim 5, its It is characterized in that：Step 4 concrete methods of realizing is,The size for changing nanometer rectangular column by step 1 realizes Modulation and Amplitude Modulation, and a nanometer rectangular column azimuth is determined by step 2 θ realizes the phase-modulation of target light field, and realizes to regulate and control the complex amplitude of single pixel structure by step 3, and according to reality The target complex amplitude information of operating mode setting determines the size and azimuth angle theta of super clever surface each unit structure, that is, realizes and space is passed Broadcast the selective excitation of diffraction time.
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