CN107984024B - Wire saw - Google Patents
Wire saw Download PDFInfo
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- CN107984024B CN107984024B CN201711069588.6A CN201711069588A CN107984024B CN 107984024 B CN107984024 B CN 107984024B CN 201711069588 A CN201711069588 A CN 201711069588A CN 107984024 B CN107984024 B CN 107984024B
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- wire
- wire saw
- frame
- common bearing
- saw according
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0061—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for guiding or feeding saw wires
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention relates to a wire saw (10) for cutting a piece of material, the wire saw comprising: a first wire guide roller (1) and a second wire guide roller (2) for supporting a cutting area (19) formed by a cutting wire; and a frame (3) for supporting wire guiding rollers (1, 2) and made of a first material, wherein the wire guiding rollers (1, 2) are rotatably mounted to the frame (3) by means of bearings (4, 5), characterized in that the wire saw (10) comprises at least one common bearing block (6), in which bearing block (6) a first bearing (4) for supporting the first wire guiding roller (1) and a second bearing (5) for supporting the second wire guiding roller (2) are accommodated, wherein the at least one common bearing block (6) is made of a second material and is mounted to the frame (3), wherein the young's modulus of the second material is higher than the young's modulus of the first material, preferably at least three times higher.
Description
Technical Field
The present invention relates to a wire saw according to the preamble of claim 1 and a method for manufacturing a wire saw according to the preamble of claim 25.
Background
EP2826582B1 discloses a wire saw having a frame and four openings for receiving a set of wire guide rollers. The frame is made of a mineral casting and incorporates four bearing sleeves and one or more temperature control shield portions. The frame has two openings 102 for the rotation axis 103. The bearing sleeve 130 is disposed within the opening 102, typically by gluing and/or crimping. The forces acting on the wire guide rollers and the forces between the wire guide rollers are transmitted to the frame interior via the bearing sleeves. The temperature control prevention part has only a cooling/heating function. A disadvantage of this construction is that in order to reliably absorb the forces generated by tensioning of the wires in the wire web (which may consist of several thousand coil parts, generating loads of several tons), a frame of considerable mass must be used. These forces act in the direction between the axes of rotation of the wire guide rollers and, if a frame of great mass is not used, cause deformation of the frame formed by the mineral casting. Frame deformation leads to poor wire guide roller alignment, compromising cut quality.
CH690419a5 discloses a wire saw integrated in a frame in the form of a monolithic box structure made of a material with a low coefficient of expansion. The frame has an internal thermostatically controlled fluid passage. The frame has four symmetrically arranged openings forming four cylinders. The wire guide roller is mounted in the frame by being supported at its ends by bearings.
EP2546014a1 discloses a device for driving a wire or a wire-like object, which may be part of a wire saw.
WO2014087340a2 discloses a wire management system which may be part of a wire saw.
Disclosure of Invention
The object of the present invention is to overcome the problems that may arise if materials such as mineral castings or other materials with a lower young's modulus are used for manufacturing the frame of a wire saw. The aim of the invention is to use a frame which has a lower weight and/or a lower density and/or which allows an easier manufacture of the frame, but at the same time ensures a higher cutting quality by overcoming the problem of frame deformation. The manufacture of the wire saw can be made easier and allows for greater flexibility in the manufacturing process. Furthermore, the frame should be constructed to take up as little space as possible so that the wire guide rollers can be brought closer to each other if desired.
The above object is achieved by a wire saw as mentioned at the outset, comprising at least one common bearing housing in which a first bearing for supporting the first wire guide roller and a second bearing for supporting the second wire guide roller are accommodated, wherein the at least one common bearing housing is made of a second material and is mounted to the frame, wherein the young's modulus of the second material is higher than the young's modulus of the first material, preferably at least three times higher.
Two wire guide rollers (spanning the cutting zone) are supported at least one end thereof by the common bearing support. In this way, the forces acting on the thread-guiding rollers due to the tension of the cutting thread are transmitted into the common bearing blocks, so that the common bearing blocks take up these forces, without the frame being affected by these forces and by the vibrations occurring between the thread-guiding rollers. The common bearing seat is preferably formed as one piece. The bearing blocks (for the wire guide rollers) are received in openings formed in the common bearing block. The common bearing block has a spectacle shape or spectacle-like shape.
In a preferred embodiment, the bearing seat has a first opening and a second opening, wherein the first bearing is fully embedded in the first opening and the second bearing is fully embedded in the second opening. In this way a very stable structure can be achieved. The forces acting between the wire guide rollers due to the tension (i.e. radial forces) of the cutting zone are fully transferred into the common bearing housing.
Preferably, the first and second bearings are spaced from the first material of the frame by the second material of the bearing housings, respectively, in all directions perpendicular to the axis of rotation of the wire guide roller. In other words, each of the first and second bearings is surrounded by the second material of the bearing housing around its entire periphery; alternatively, the bearing is completely surrounded in the radial direction by the second material of the bearing seat. Thereby forming a very stable structure. The frame is not subjected to forces acting between the wire guide rollers due to the tension (i.e. radial forces) of the cutting zone.
Preferably, the first bearing and the second bearing are entirely supported by the common bearing mount. The bearings are fully supported by the common bearing block, i.e. they are not in contact with the frame. This ensures that the forces acting between the wire guide rollers due to the tension (i.e. radial forces) of the cutting zone do not affect the first material of the frame.
The basic principle of the invention will be described in connection with two wire guiding rollers. In the case of three or four wire-guiding rollers, however, the common bearing housing can also accommodate a third or fourth bearing housing.
With the solution according to the invention, the frame can be designed in smaller dimensions, thus saving space and being lighter in weight compared to prior art frames. It is preferred that the first common bearing housing supports the wire guide roller at one end thereof and the second bearing housing supports the wire guide roller at the other end thereof. The beneficial effects of the invention can be realized at both ends of the on-line guide roller.
The young's modulus of the common bearing housing may be selected such that the rotation axis of the wire guide roller hardly moves when the cutting wire is tensioned on the wire guide roller. This choice depends on the wire tension, length and diameter of the wire guide rollers, the type of material to be cut, etc. In a preferred embodiment, the second material (forming the common bearing block) is a metal, preferably steel, such as ductile or ductile iron.
Preferably, the second material is made of cast iron or cast steel, preferably ductile cast iron or ductile cast iron, to resist the large forces acting on the common bearing block.
In a preferred embodiment, the first and second wire guide rollers each comprise a plurality of wire guide grooves extending around their surface, wherein the wire guide grooves receive the ends of the wire portions forming the cutting area, wherein preferably the number of wire guide grooves formed on the wire guide rollers is more than 500, preferably more than 1000, more preferably more than 2000. The wire portions of the cutting zone are parallel to each other. Such wire saws are used for manufacturing wafers from (semiconductor) blocks or ingots. Other typical materials that are cut with wire saws are sapphire, boron, quartz and rare earth metals.
In addition to the first and second wire guide rollers described above, the wire saw may further include other wire guide rollers, offset rollers, tension rollers, storage rollers, and work rollers.
A further advantage of the invention is that the frame is better able to absorb forces more evenly and that the weight and/or size (in particular the thickness) of the frame can be reduced. In this way, a relative reduction in cost may be achieved. And the present invention increases the "parallelism" and/or "perpendicularity" of the wire-guiding rollers.
Furthermore, in order to achieve the necessary stiffness and rigidity for high cutting quality, the distance between the wire guide rollers can be reduced, since less material is required (volumetric measurement).
The distance between the axes of the wire-guiding rollers, i.e. the distance between the bearings in the common bearing housing, can be chosen elastically. The design of the frame is generally constant and the design of the common bearing blocks (in particular the distance between the axes of rotation) can be varied according to customer requirements. In a preferred embodiment, the at least one common bearing block is replaceably mounted on the frame.
Preferably, the at least one common bearing seat is embedded in a recess formed in the frame. This provides a strong and stable connection between the common bearing block and the frame. Also, this embodiment is characterized in that space can be saved.
Preferably, the wire saw comprises two common bearing housings, wherein each bearing housing accommodates a first bearing for supporting the first wire guide roller and a second bearing for supporting the second wire guide roller. One of the two bearing housings supports the wire guide roller at one end thereof, and the other bearing housing supports the wire guide roller at the other end thereof. Thus, the beneficial effects of the present invention can be achieved at both ends of the wire guide roller. The opposing frame portions each carry or accommodate a common bearing housing and are prevented from deforming due to forces acting between the two wire guide rollers (across the cutting zone).
Preferably, the first material is a mineral casting and the second material is a metal, preferably steel. Young's modulus of mineral castings is typically 30-45kN/mm2. The Young's modulus of steel is typically about 210kN/mm2. Thus combining a mineral casting (frame) and steel (common bearing block) is the preferred embodiment.
Preferably, the common bearing block may be surrounded by the first material of the frame, preferably along its entire periphery. A strong and immovable connection between the frame (first material) and the common bearing block (second material) can thereby be achieved.
Preferably, the at least one common bearing block is bonded or recast within the recess, preferably from the same material as the frame. The adhesive/recast material may comprise, for example, a mineral cast piece (liquid or viscous) that is placed into the recess after the frame is made.
Preferably, the outer side of the common housing and/or the inner wall of the recess has a groove, preferably an annularly extending groove, filled with a binder or recast material.
Preferably, the wire guide rollers extend between opposite frame walls of the frame, wherein a recess is formed in each frame wall in which a common bearing block for supporting the wire guide rollers is embedded.
Preferably, the frame has an opening for moving the piece of material into the cutting region of the wire saw, preferably adjacent the opening, more preferably above the at least one common bearing block, wherein preferably the at least one common bearing block has a recess adjacent the opening. With this embodiment, the transport of the piece of material to the cutting region of the wire saw is facilitated, the piece of material (e.g., ingot, block or core) typically being bonded to the workpiece support/fixture.
Preferably, the wire saw has at least one wire drum for temporarily storing the cutting wire, wherein the wire drum is engaged by the cutting wire with the wire guide roller and is arranged in a space separate from and/or below the cutting region of the wire saw. Preferably, the wire saw has at least two wire drums for temporarily storing the cutting wire: a wire supply drum (unused wire) and a wire storage drum (used wire).
Offset and/or tension rollers are also typically provided in wire saws. A benefit of this embodiment is that the wire saw can be designed very compact and space-saving if the roller(s) are arranged below the cutting area, i.e. below the area where the wire guiding rollers and the cutting area are arranged. This arrangement below the cutting range is possible because the frame can be designed to be lighter in weight and more space-saving. The path of the cutting wire between the wire guide roller and the associated at least one cutting wire drum is shorter and thus results in a shorter dimensional chain and facilitates the alignment of the rollers and/or pulleys.
Preferably, the at least one bearing seat is substantially rectangular or oval in shape.
Preferably, the width of the at least one common bearing block is at least 1.5 times, preferably at least 2 times, greater than its height. As the width of the common bearing housing, it is understood that it is parallel to the direction between the axes of the wire guide rollers. Typically, the cutting area is horizontal, i.e. the width of the common carrier is horizontal.
Preferably, the width of the at least one common bearing block is greater than the sum of the distance between the axes of rotation of the thread guiding rollers and the diameter of the thread guiding rollers by at least one time, preferably by 1.5 times. Such an embodiment means that during manufacture of the wire saw, bearing blocks with different distances between the first bearing and the second bearing can be used, which enables the wire saw to be manufactured on demand according to customer requirements during later stages of manufacture. The size of the recess formed in the frame may be the same for all frames produced in one production cycle. However, there may be options to use different bearing housings, for example bearing housings having the same width and/or height but different distances between the bearings. And the stronger the bearing seat should be if the harder the material being cut. Thereby achieving a high degree of flexibility for the customer.
Preferably, the recess is formed as a through-hole in a frame wall of the frame and/or wherein the common bearing seat is embedded in a form-fitting manner in the recess, preferably leaving room for adhesive. The support of the common bearing block in the frame is reliable, stable and immovable.
Preferably, the width of the recess formed in the frame (i.e. the dimension parallel to the line of connection between the axes of the wire guide rollers) is at least 10% greater than the width of the common chock, preferably at least 15% greater, more preferably at least 20% greater. Here, a "small" bearing seat may also be used. The free space between the bearing block and the frame can be filled by an intermediate part (complementary part). The common bearing seat may have a fitting or positioning portion for positioning it in the recess so that its position can be correctly determined even in the case where the size of the recess is larger than that of the common bearing seat.
Thus, in a preferred embodiment, the at least one common bearing block has at least one locating formation which cooperates with a corresponding (preferably form-fitting) locating formation formed on the frame.
In a preferred embodiment at least one, preferably each, of said first and second bearings is sleeved with a sleeve separating the respective bearing from the material of said common housing in a radial direction, wherein preferably said sleeve outer surface is in direct contact with the material of said common housing. The sleeve helps to evenly distribute the force from the bearing on the bearing seat.
In a preferred embodiment the wire saw comprises at least one motor for driving at least one of the wire guide rollers, wherein the motor is attached to the common bearing housing, wherein preferably the motor is completely supported by the common bearing housing. In this way, the frame is decoupled from the driving force. Preferably, the entire weight of the motor is supported by the bearing housing.
In a preferred embodiment, the common bearing housing has a weight of at least 100kg, preferably at least 150kg, more preferably at least 180 kg. The greater weight of the common bearing blocks ensures a stable structure which not only absorbs the forces acting between the wire-guiding rollers, but also reduces the vibrations (greater inertia) transmitted to the frame.
In a preferred embodiment, the common bearing seat has a thickness in the direction of the axis of rotation of the bearing of at least 150mm, preferably at least 180 mm. Such a high-mass common housing can reliably absorb forces arising from tensioning of the wire in the wire network (which may be formed by several thousand coil portions, generating loads of several tons). The same applies to the following embodiments.
In a preferred embodiment, the volume of the common housing extending between the bearings amounts to at least 5.000cm3Preferably at least 7.500cm3. The volume is defined laterally by a bearing boundary and longitudinally by an upper plane including the topmost point of the two bearings and a lower plane including the lowest point of the two bearings.
In a preferred embodiment, at least one lead-through, preferably a channel, is formed in the common bearing housing, wherein preferably the lead-through is used for accommodating a cable and/or a cooling medium and/or a pressurizing medium. The common bearing block has an additional function here. One of the functions is to cool the bearing by means of a (circulating) cooling medium, preferably a cooling fluid. Preferably, an end of the conduction portion in the common bearing housing is connected to an end of the conduction portion formed in the frame.
The invention also aims to provide a method for manufacturing a wire saw according to the invention, comprising the following steps: at least one common bearing block is mounted to the frame, preferably embedded within the frame, preferably by adhesive.
Preferably, the frame is cast, preferably from a mineral casting, and wherein the at least one common bearing block is embedded within the frame after or during casting of the frame.
Preferably, the at least one common bearing seat is embedded in a recess formed in the frame, wherein the recess is preferably formed during casting of the frame.
Drawings
Further embodiments of the invention are shown in the drawings and defined in the dependent claims. The list of reference numbers forms part of this disclosure. The invention will be described in detail below with reference to the accompanying drawings:
FIG. 1 shows a frame of a wire saw with an embedded bearing mount according to one embodiment of the invention;
fig. 2 shows a wire saw with a frame according to fig. 1;
fig. 3 shows a wire saw with a wire drum located in the space below the cutting range;
FIG. 4 shows an embodiment with a larger distance between the bearing openings in the bearing seats;
FIG. 5 shows an embodiment with a small distance between the bearing openings in the bearing seats;
FIG. 6 illustrates an embodiment in which the width of the bearing seat is less than the width of the recess formed in the frame;
fig. 7 schematically illustrates a method of manufacturing a wire saw; and
fig. 8 shows a preferred embodiment of a wire saw.
Detailed Description
Fig. 2 and 3 show a wire saw 10 according to the invention for cutting a material block 20, in particular for slicing, squaring and/or squaring a material block (e.g. a hard brittle material and/or a semiconductor material). Fig. 1 shows the frame 3 of the wire saw 10 shown in fig. 2.
The wire saw 10 comprises a first wire guide roller 1 and a second wire guide roller 2 for supporting a cutting area 19 formed by the cutting wire. The frame 3 supports the wire guide rollers 1 and 2 and is made of a first material. The wire guiding rollers 1 and 2 are rotatably mounted to the frame 3 by bearings 4 and 5.
The wire saw 10 comprises at least one common bearing block 6, in which bearing block 6 a first bearing 4 for supporting the first wire guide roller 1 and a second bearing 5 for supporting the second wire guide roller 2 are accommodated. In the preferred embodiment of fig. 1 and 2, the wire saw 10 comprises two common bearing blocks 6, wherein each bearing block 6 accommodates a first bearing 4 for supporting the first wire guide roller 1 and a second bearing 5 for supporting the second wire guide roller 2. One of the two bearing blocks 6 supports the wire guiding roll 1, 2 at one end of the wire guiding roll 1, 2, and the other bearing block 6 supports the wire guiding roll 1, 2 at the other end of the wire guiding roll 1, 2. Each bearing seat 6 has a first opening 14 (accommodating the first bearing 4) and a second opening 15 (accommodating the second bearing 5). As can be seen from fig. 1 and 3, the first bearing 4 is completely embedded in the first opening 14 and the second bearing 5 is completely embedded in the second opening 15. The first bearing 4 and the second bearing 5 are spaced from the first material of the frame 3 by the second material of the bearing blocks 6 in all directions perpendicular to the axis of rotation of the wire guiding rollers 1, 2. The first bearing 4 and the second bearing 5 are completely supported by a common bearing seat 6. Each bearing block 6 is mounted to the frame 3. In the preferred embodiment, the bearing seat 6 is embedded in a recess 7 formed in the frame 3 (fig. 1). The recess 7 may be formed as a through hole in the frame walls 8, 9 of the frame 3, and the common bearing seat 6 may be embedded in the recess 7 in a form-fitting manner.
The common bearing support(s) 6 is made of a second material, wherein the young's modulus of the second material (bearing support) is higher, preferably at least three times higher, than the young's modulus of the first material (frame).
Preferably, the first material is a mineral casting (Young's modulus of about 30-45 kN/mm)2) The second material is a metal, preferably steel (Young's modulus of about 150-2). The forces acting between the wire guide rollers 1 and 2 due to the tension of the cutting zone 19 are taken up by the common bearing housing 6 and the frame 3 is not subjected to these forces.
The common bearing block 6 may be surrounded by the first material of the frame 3, preferably along its entire periphery (fig. 1). At least one common bearing block (6) is bonded or recast within the recess 7 (once the common bearing block is in place, the material for the frame is cast between the frame and the common bearing block), preferably recast from the same material as the frame 3.
As shown in fig. 2, the wire guiding rollers 1, 2 extend between opposite frame walls 8 and 9 of the frame 3, a recess 7 being formed in each of the frame walls 8 and 9, and a common bearing housing 6 for supporting the wire guiding rollers 1, 2 is embedded in the recess 7.
The frame 3 may have an opening 11 (here above the at least one common bearing block 6) for moving the piece of material into the cutting area of the wire saw 10. For optimum design and feeding of material blocks, at least one common bearing block 6 may have a recess 12 adjacent to the opening 11.
As can be seen from fig. 3, the wire saw 10 can have at least one (here two) wire drum 17, 18 for temporarily storing the wire. The wire drums 17, 18 cooperate with the wire guide rollers 1, 2 via the cutting wire and are arranged in a space separate from the cutting region of the wire saw 10 and below the cutting region of the wire saw 10. The space in which the rollers 17, 18 are arranged is separated from the cutting area by a wall 16.
The shape of the bearing seat 6 is substantially rectangular or oval. When it is desired to accommodate, for example, three wire guide rollers, the bearing housings may have a generally triangular shape (with three recesses). Each bearing seat 6 has a first opening 14 (accommodating the first bearing 4) and a second opening 15 (accommodating the second bearing 5), see fig. 4 to 6. The bearing housing 6 thus has a spectacle-like shape.
In fig. 4 to 6, the adaptability of the bearing seat is shown. Different bearing blocks 6 can be mounted to the frame 3 according to the customer's needs (without changing the design of the frame 3).
Fig. 4 shows that the bearing seat 6 has a larger distance between the openings 14, 15.
If the distance between the wire guiding rollers 1, 2 needs to be smaller, a bearing housing according to fig. 5 can be used. Here, preferably, the width of the at least one common bearing housing 6 is greater than the sum of the distance between the axes of rotation of the thread guiding rollers 1, 2 and at least one time (preferably 1.5 times) the diameter of the thread guiding rollers 1, 2.
In the embodiment of fig. 6, the width of the recess 7 is greater than the width of the bearing seat 6. Here, the recess 7 formed in the frame 3 is preferably at least 10% larger, preferably at least 15% larger, more preferably at least 20% larger than the width of the common bearing seat 6. The intermediate space will be filled by a filling material 13 (e.g. mineral casting material, metal plate, etc.).
Fig. 4 to 6 also show a positioning structure 21 formed on the bearing housing 6. The locating formations 21 cooperate with corresponding locating formations formed in the frame 3.
The invention also relates to a method 100 (fig. 7) for manufacturing a wire saw 10, comprising: at least one common bearing block 6 is mounted/embedded in the frame 3, which has been cast previously in step 101, step 102. Preferably, the recess 7 is formed in the casting step 101. The step 102 of embedding the common housing 6 is preferably done by means of an adhesive or a casting material. The frame 3 may be cast, preferably from a mineral casting; after casting the frame 3 or (alternatively) during casting of the frame 3, the common bearing seat(s) 6 are embedded within the frame 3.
Fig. 8 shows an embodiment of a wire saw 10. The bearing 4 is sleeved with a sleeve 24, and the sleeve 24 separates the bearing 4 from the material of the common bearing seat 6 in the radial direction. The outer surface of the sleeve 24 may directly contact the material of the common housing 6.
As can be seen from fig. 8, a motor 22 for driving the wire guide rollers is attached to the common bearing housing 6. The motor 22 may be supported entirely by the common bearing support 6.
As already mentioned, the common bearing seat 6:
may have a weight of at least 100kg, preferably at least 150kg, more preferably at least 180 kg; and/or
It may have a thickness of at least 150mm, preferably at least 180mm, in the direction of the axis of rotation of the bearing.
In a preferred embodiment, the volume of the common bearing seat extending between the bearings 4, 5 amounts to at least 5.000cm3Preferably at least 7.500cm3。
Fig. 8 also shows a lead-through 23 in the form of a channel, which lead-through 23 is formed in the common bearing seat 6. The leadthrough 23 may accommodate a cable and/or a cooling medium and/or a pressurizing medium. One end of the conduction portion 23 in the common bearing housing 6 may communicate with one end of a conduction portion formed in the frame 3.
The present invention is not limited to these examples. Other variants are possible for a person skilled in the art and are also within the scope of the invention as defined by the appended claims. The individual features described above, in particular with reference to the drawings, can be combined with one another to form further embodiments and/or can be used with appropriate modifications to the description in the claims and the rest of the description.
1 first thread guide roll
2 second wire guide roller
3 frame
4 first bearing
5 second bearing
6 sharing bearing seat
7 concave part
8 frame wall
9 frame wall
10 wire saw
11 opening
12 notches
13 Filler material
14 first opening
15 second opening
16 wall
17 supply roller
18 storage drum
19 cutting area
20 workpiece
21 positioning structure
22 electric machine
23 conduction part
24 shaft sleeve
Claims (50)
1. A wire saw (10) for cutting a block of material, the wire saw comprising:
a first wire guide roller (1) and a second wire guide roller (2) for supporting a cutting area (19) formed by a cutting wire; and
a frame (3) for supporting the wire guiding rollers (1, 2) and made of a first material,
wherein the wire guiding rollers (1, 2) are rotatably mounted to the frame (3) by bearings (4, 5),
characterized in that the wire saw (10) comprises at least one common bearing housing (6), in which housing (6) a first bearing (4) for supporting the first wire guide roller (1) and a second bearing (5) for supporting the second wire guide roller (2) are accommodated, wherein the at least one common bearing housing (6) is made of a second material and is mounted to the frame (3), wherein the Young's modulus of the second material is higher than the Young's modulus of the first material,
wherein the wire guiding rollers (1, 2) are supported at least one of their ends by the common bearing housing (6) such that the forces acting on the wire guiding rollers (1, 2) due to the tension of the cutting wire are transmitted into the common bearing housing (6) so that the common bearing housing (6) is subjected to these forces, while the frame (3) is not affected by these forces and by vibrations occurring between the wire guiding rollers (1, 2).
2. Wire saw according to claim 1, wherein the at least one common bearing seat (6) is embedded in a recess (7) formed in the frame (3).
3. Wire saw according to claim 1 or 2, wherein the bearing housing (6) has a first opening (14) and a second opening (15), wherein the first bearing (4) is completely embedded in the first opening (14) and the second bearing (5) is completely embedded in the second opening (15).
4. Wire saw according to claim 1 or 2, wherein the first bearing (4) and the second bearing (5) are spaced apart from the first material of the frame (3) by the second material of the bearing blocks (6), respectively, in all directions perpendicular to the axis of rotation of the wire guiding rollers (1, 2).
5. Wire saw according to claim 1 or 2, wherein the first bearing (4) and the second bearing (5) are completely supported by the common bearing seat (6).
6. Wire saw according to claim 1 or 2, wherein the wire saw (10) comprises two common bearing housings (6), wherein each bearing housing (6) accommodates a first bearing (4) for supporting the first wire guiding roller (1) and a second bearing (5) for supporting the second wire guiding roller (2), wherein one bearing housing (6) supports the wire guiding roller (1, 2) at one end of the wire guiding roller (1, 2) and the other bearing housing (6) supports the wire guiding roller (1, 2) at the other end of the wire guiding roller (1, 2).
7. Wire saw according to claim 1 or 2, wherein the first material is a mineral casting and the second material is a metal, and/or wherein the second material is made of cast iron or cast steel.
8. Wire saw according to claim 1 or 2, wherein the forces acting between the wire guiding rollers (1, 2) due to the tension of the cutting zone (19) are taken up by the common bearing housing (6), the frame (3) not being subjected to these forces.
9. Wire saw according to claim 1 or 2, wherein the common bearing seat (6) is surrounded by the first material of the frame (3).
10. Wire saw according to claim 2, wherein the at least one common bearing block (6) is glued or recast in the recess (7).
11. Wire saw according to claim 1 or 2, wherein the wire guiding rollers (1, 2) extend between opposite frame walls (8, 9) of the frame (3), wherein a recess (7) is formed in each frame wall (8, 9), in which recess (7) a common bearing block (6) for supporting the wire guiding rollers (1, 2) is embedded.
12. Wire saw according to claim 1 or 2, wherein the frame (3) has an opening (11) for moving the piece of material into a cutting area of the wire saw (10).
13. Wire saw according to claim 1 or 2, wherein the wire saw (10) has at least one wire drum (17, 18) for temporarily storing a cutting wire, wherein the wire drum (17, 18) cooperates with the wire guide rollers (1, 2) via the cutting wire and is arranged in a space separate from the cutting area of the wire saw (10) and/or below the cutting area of the wire saw (10).
14. Wire saw according to claim 1 or 2, wherein the at least one common bearing block (6) is substantially rectangular or oval in shape.
15. Wire saw according to claim 1 or 2, wherein the width of the at least one common bearing housing (6) is larger than at least one time the distance between the axes of rotation of the wire guiding rollers (1, 2) and the diameter of the wire guiding rollers (1, 2).
16. Wire saw according to claim 2, wherein the recess (7) is formed as a through hole in a frame wall (8, 9) of the frame (3) and/or wherein the common bearing seat (6) is embedded in a form-fitting manner in the recess (7).
17. A wire saw according to claim 2, wherein the recess (7) formed in the frame (3) has a width which is at least 10% larger than the width of the common bearing seat (6).
18. Wire saw according to claim 1 or 2, wherein at least one of the first bearing (4) and the second bearing (5) is sleeved with a bushing (24) separating the respective bearing (4, 5) from the material of the common bearing seat (6) in radial direction.
19. Wire saw according to claim 1 or 2, wherein the wire saw (10) comprises at least one motor (22) for driving at least one of the wire guide rollers (1, 2), wherein the motor (22) is attached to the common bearing housing (6).
20. Wire saw according to claim 1 or 2, wherein the common bearing block (6) has a weight of at least 100 kg.
21. Wire saw according to claim 1 or 2, wherein the common bearing block (6) has a thickness of at least 150mm in the direction of the axis of rotation of the bearings (4, 5).
22. Wire saw according to claim 1 or 2, wherein the volume of the common bearing seat (6) extending between the bearings (4, 5) amounts to at least 5.000cm3。
23. Wire saw according to claim 1 or 2, wherein at least one lead-through (23) is formed in the common bearing housing (6).
24. Wire saw according to claim 1, wherein the wire saw (10) is used for slicing, squaring and/or slicing a block of material.
25. The wire saw of claim 1, wherein the young's modulus of the second material is at least three times higher than the young's modulus of the first material.
26. The wire saw of claim 7, wherein the second material is steel.
27. The wire saw of claim 7, wherein the second material is made of ductile or ductile cast iron.
28. Wire saw according to claim 9, wherein the common bearing housing (6) is surrounded by the first material of the frame (3) along the entire periphery of the common bearing housing (6).
29. Wire saw according to claim 10, wherein the at least one common bearing block (6) is recast in the recess (7) from the same material as the frame (3).
30. Wire saw according to claim 12, wherein the opening is above the at least one common bearing block (6).
31. Wire saw according to claim 12, wherein the at least one common bearing block (6) has a recess (12) adjacent to the opening (11).
32. Wire saw according to claim 15, wherein the width of the at least one common bearing housing (6) is larger than the sum of the distance between the axes of rotation of the wire guiding rollers (1, 2) and 1.5 times the diameter of the wire guiding rollers (1, 2).
33. A wire saw according to claim 17, wherein the recess (7) formed in the frame (3) has a width which is at least 15% larger than the width of the common bearing seat (6).
34. A wire saw according to claim 33, wherein the recess (7) formed in the frame (3) has a width which is at least 20% larger than the width of the common bearing seat (6).
35. Wire saw according to claim 18, wherein each of the first bearing (4) and the second bearing (5) is sleeved with the bushing (24).
36. Wire saw according to claim 18, wherein the outer surface of the bushing (24) is in direct contact with the material of the common bearing block (6).
37. Wire saw according to claim 19, wherein the motor (22) is completely supported by the common bearing block (6).
38. Wire saw according to claim 20, wherein the common bearing block (6) has a weight of at least 150 kg.
39. Wire saw according to claim 38, wherein the common bearing block (6) has a weight of at least 180 kg.
40. Wire saw according to claim 21, wherein the common bearing block (6) has a thickness of at least 180mm in the direction of the axis of rotation of the bearings (4, 5).
41. Wire saw according to claim 22, wherein the volume of the common bearing seat (6) extending between the bearings (4, 5) amounts to at least 7.500cm3。
42. Wire saw according to claim 23, wherein the lead-through (23) is a channel.
43. Wire saw according to claim 23, wherein the leadthrough (23) is intended to accommodate a wire and/or a cooling medium and/or a pressurizing medium.
44. Method (100) for manufacturing a wire saw (10) according to any of the preceding claims, comprising the steps of: (102) at least one common bearing block (6) is mounted to the frame (3).
45. Method according to claim 44, wherein the frame (3) is cast (101), and wherein the at least one common bearing block (6) is embedded within the frame (3) after casting (101) the frame (3) or during casting the frame (3).
46. A method according to claim 44, wherein the at least one common bearing seat (6) is embedded within the frame (3).
47. A method according to claim 44, wherein the at least one common bearing block (6) is mounted to the frame (3) by means of an adhesive or a cast material.
48. A method according to claim 45, wherein the frame (3) is cast from a mineral casting.
49. A method according to claim 45, wherein the at least one common bearing seat (6) is embedded within a recess (7) formed in the frame (3).
50. A method according to claim 49, wherein the recess (7) is formed during casting (101) of the frame (3).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16195874 | 2016-10-26 | ||
EP16195874.9 | 2016-10-26 |
Publications (2)
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CN107984024A CN107984024A (en) | 2018-05-04 |
CN107984024B true CN107984024B (en) | 2022-01-28 |
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Application Number | Title | Priority Date | Filing Date |
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CN201711069588.6A Active CN107984024B (en) | 2016-10-26 | 2017-10-26 | Wire saw |
CN201721474465.6U Expired - Fee Related CN208374353U (en) | 2016-10-26 | 2017-10-26 | Scroll saw |
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CN201721474465.6U Expired - Fee Related CN208374353U (en) | 2016-10-26 | 2017-10-26 | Scroll saw |
Country Status (5)
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EP (1) | EP3532231A1 (en) |
JP (1) | JP7041145B2 (en) |
CN (2) | CN107984024B (en) |
TW (1) | TW201829101A (en) |
WO (1) | WO2018078552A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TW201829101A (en) * | 2016-10-26 | 2018-08-16 | 瑞士商梅耶博格(瑞士)股份有限公司 | Wire saw |
DE102019207719A1 (en) * | 2019-05-27 | 2020-12-03 | Siltronic Ag | Method for severing a multiplicity of wafers from workpieces during a number of severing operations by means of a wire saw and semiconductor wafer made of monocrystalline silicon |
EP3760354A1 (en) * | 2019-07-03 | 2021-01-06 | Hilti Aktiengesellschaft | Ring saw |
CN113635465A (en) * | 2021-07-30 | 2021-11-12 | 隆基绿能科技股份有限公司 | Silicon wafer cutting method |
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- 2017-10-26 CN CN201711069588.6A patent/CN107984024B/en active Active
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Also Published As
Publication number | Publication date |
---|---|
CN208374353U (en) | 2019-01-15 |
EP3532231A1 (en) | 2019-09-04 |
JP2019535540A (en) | 2019-12-12 |
TW201829101A (en) | 2018-08-16 |
JP7041145B2 (en) | 2022-03-23 |
WO2018078552A1 (en) | 2018-05-03 |
CN107984024A (en) | 2018-05-04 |
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