CN107976763B - Five-dimensional grating adjusting frame - Google Patents
Five-dimensional grating adjusting frame Download PDFInfo
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- CN107976763B CN107976763B CN201711458224.7A CN201711458224A CN107976763B CN 107976763 B CN107976763 B CN 107976763B CN 201711458224 A CN201711458224 A CN 201711458224A CN 107976763 B CN107976763 B CN 107976763B
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Abstract
The invention relates to a five-dimensional grating adjusting frame, which belongs to the technical field of grating adjusting frames and sequentially comprises a manual adjusting mechanism, a pitching and rotating adjusting mechanism, a deflection adjusting mechanism, a translation adjusting mechanism and a supporting bottom plate from top to bottom.
Description
Technical Field
The invention belongs to the technical field of grating adjusting frames, and particularly relates to a five-dimensional grating adjusting frame.
Background
The compressor is an indispensable part of the ultra-short pulse laser system and is responsible for compressing the amplified laser pulse in time. With the progress of laser related technology and the continuous improvement of peak power, the caliber of a core device, namely a grating, of a compressor is also continuously enlarged. The compressor of the PW-level OPCPA technical platform is formed by symmetrically arranging two groups of gratings which are parallel to each other, so that the pulse compression can output hundred joules of energy, the pulse width is compressed to the magnitude of 20fs, and four-meter-level gratings are needed to achieve the aim.
In order to save the construction cost, five-dimensional adjustment of the rice-grade grating is required to be realized in a limited compressor space, and the existing adjusting frame driving device is positioned on the back of the grating, occupies a large space and cannot be installed in the existing compressor.
Disclosure of Invention
Considering the small space behind the grating, the inventors have used an adjustment frame with a bottom placed drive.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the five-dimensional grating adjusting frame is arranged on the periphery of the grating, the adjusting frame sequentially comprises a manual adjusting mechanism, a pitching and rotating adjusting mechanism, a deflection adjusting mechanism, a translation adjusting mechanism and a supporting bottom plate from top to bottom, a first supporting plate is arranged among the manual adjusting mechanism, the pitching and rotating adjusting mechanism, a second supporting plate is arranged among the pitching and rotating adjusting mechanism and the deflection adjusting mechanism, and a third supporting plate is arranged among the deflection adjusting mechanism and the translation adjusting mechanism;
the pitching and rotating adjusting mechanism comprises a middle adjusting mechanism, a left adjusting mechanism and a right adjusting mechanism which are arranged in parallel and have the same structure, the left adjusting mechanism comprises a driving assembly and a guiding assembly, the driving assembly comprises a first motor, a first ball screw, an upper wedge and a lower wedge, inclined planes of the upper wedge and the lower wedge are oppositely arranged, the first motor is fixedly arranged on the upper surface of a second supporting plate, the output end of the first motor is connected with a screw rod of the first ball screw, the vertical plane of the lower wedge is fixedly connected with a nut of the first ball screw, the horizontal plane of the upper wedge is connected with the lower surface of the first supporting plate, and the guiding assembly is arranged on the vertical plane of the upper wedge, the horizontal plane of the lower wedge and the inclined plane of the upper wedge and the inclined plane of the lower wedge, which are oppositely arranged.
Further, manual adjustment mechanism includes regulation pole, kicking block and fixed block, the bottom of kicking block and fixed block all links firmly with first backup pad, adjust the pole and set up along the length direction of frame, and its and first backup pad upper surface line contact.
Further, the adjusting rod is located between the top block and the fixed block, and an adjusting bolt for tightly pushing the adjusting rod penetrates through the top block.
Further, the support column with the first groove at the top is fixedly arranged on the upper surface of the first support plate, the first ball head embedded in the first groove is arranged on the side face of the frame, and the bottom of the first ball head is located above the adjusting rod and is in line contact with the adjusting rod.
The manual adjusting mechanism adopts a linear supporting structure, enhances the bearing capacity of the bottom of the frame, adjusts the pitching angle of the frame, and simultaneously avoids local deformation of the frame caused by multi-point support, thereby affecting the grating.
Further, the guide assembly comprises a guide block and a guide rail, the guide block is located on the guide rail, the guide block can slide along the guide rail, the guide rail of the guide assembly located on the vertical surface of the upper wedge block is fixedly connected with the upper surface of the second support plate through a guide rail fixing block, the guide block of the guide assembly located on the horizontal surface of the lower wedge block is fixedly connected with the upper surface of the second support plate, the guide block of the guide assembly located on the horizontal surface of the lower wedge block is fixedly connected with the horizontal surface of the lower wedge block, the guide rail of the guide assembly located on the inclined surface of the upper wedge block and the inclined surface of the lower wedge block which are oppositely arranged is fixedly connected with the inclined surface of the lower wedge block, and the guide block of the guide assembly is fixedly connected with the inclined surface of the upper wedge block.
Further, a second ball head is arranged at the position, corresponding to the horizontal plane of the upper wedge block, of the lower surface of the first supporting plate, a second groove opposite to the second ball head is arranged at the horizontal plane of the upper wedge block of the middle adjusting mechanism, the horizontal plane of the upper wedge block of the left adjusting mechanism and the horizontal plane of the upper wedge block of the right adjusting mechanism, the longitudinal section of one of the 3 second grooves is conical, the longitudinal section of one of the 3 second grooves is V-shaped, and the longitudinal section of one of the 3 second grooves is U-shaped.
The pitching and rotating adjusting mechanism adopts a three-point supporting structure with compact structure, and simultaneously, an upper wedge block and a lower wedge block which are oppositely arranged are adopted to meet the requirement of low thickness of the adjusting frame, and a guide assembly is adopted to meet the requirement of high precision of the adjusting frame. Meanwhile, the second ball head is matched with the second groove in a positioning way, and the pitching and normal rotation operation of the grating and the frame is realized through linkage of the middle adjusting mechanism, the left adjusting mechanism and the right adjusting mechanism. The middle adjusting mechanism independently realizes pitching operation, and the left adjusting mechanism and the right adjusting mechanism are linked to realize normal rotation operation.
Further, the deflection adjusting mechanism comprises a crossed roller bearing, a second motor and a second ball screw, wherein the outer ring of the crossed roller bearing is fixedly connected with the upper surface of the third supporting plate, the inner ring of the crossed roller bearing is fixedly connected with the lower surface of the second supporting plate, the screw of the second ball screw is fixedly connected with the output end of the second motor, the nut of the second ball screw is fixedly connected with the lower surface of the second supporting plate, and the second motor is fixedly arranged on the upper surface of the third supporting plate.
Because the weight and the size of the part of the adjusting frame above the deflection adjusting mechanism are large, the large-size thin crossed roller bearing is selected as the slewing bearing, and the requirements of high precision, low thickness and high load of the adjusting frame are met. The cross roller bearing has a supporting diameter of about 350mm, a thickness of about 30mm or less, rated dynamic load capacity of up to ton level, and negative play state inside, and provides stable support for the frame.
Further, translation adjustment mechanism includes translation drive assembly and translation direction subassembly, translation drive assembly includes third motor and third ball, third motor sets firmly in third backup pad lower surface, and the screw rod of third ball is connected to its output, third ball's nut sets firmly in the supporting baseplate upper surface, in order to provide stable support for crossing roller bearing, adopts 2 to the structure that translation direction subassembly distributes the support, promptly translation direction subassembly is parallel and spaced is equipped with 4.
Further, the translation guide assembly comprises a sliding rail and a sliding block positioned on the sliding rail, the sliding rail is fixedly arranged on the upper surface of the supporting bottom plate, and the sliding block is fixedly arranged on the lower surface of the third supporting plate.
Further, be equipped with the kidney slot on the supporting baseplate, the slide rail is located the kidney slot, and the fixed of being convenient for reduces whole height simultaneously.
The beneficial effects of the invention are as follows:
the pitching angle of the frame is manually adjusted through the manual adjusting mechanism, the pitching and rotating adjusting mechanism adjusts the pitching and rotating of the frame and the grating, the frame and the grating rotate around a normal line through the deflection adjusting mechanism, the translation of the frame and the grating is realized through the translation adjusting mechanism, and meanwhile, the manual adjusting mechanism, the pitching and rotating adjusting mechanism, the deflection adjusting mechanism and the translation adjusting mechanism are sequentially arranged along the vertical direction, so that the space below the frame is fully utilized, the structure is novel, and the adjusting precision is high.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a side view of the overall structure of the present invention;
FIG. 3 is a side view of the manual adjustment mechanism;
FIG. 4 is a top view of the manual adjustment mechanism;
FIG. 5 is a front view of the pitch and yaw adjustment mechanism;
FIG. 6 is a side view of a pitch and yaw adjustment mechanism;
FIG. 7 is a top view of the pitch and yaw adjustment mechanism;
FIG. 8 is a rear view of the yaw adjustment mechanism;
FIG. 9 is a top view of the yaw adjustment mechanism;
FIG. 10 is a side view of the translation adjustment mechanism;
fig. 11 is a top view of the translation adjustment mechanism.
In the accompanying drawings: 1-grating, 2-frame, 3-manual adjustment mechanism, 4-pitch and rotation adjustment mechanism, 5-yaw adjustment mechanism, 6-translation adjustment mechanism, 7-support shoe, 8-first support shoe, 9-second support shoe, 10-third support shoe, 11-frame handle, 12-first ball head, 13-support shoe, 14-first groove, 15-fixed block, 16-adjustment bar, 17-top block, 18-adjustment bolt, 19-first motor, 20-guide rail fixed block, 21-upper wedge block, 22-lower wedge block, 23-guide rail, 24-guide block, 25-guide rail, 26-guide block, 27-guide rail, 28-guide block, 29-first ball screw, 30-cross roller bearing, 31-second motor, 32-second ball screw, 33-third motor, 34-third ball screw, 35-slide rail, 36-slide block.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without making creative efforts should fall within the scope of protection of the present application. In addition, directional words such as "upper", "lower", "left", "right", and the like, as used in the following embodiments are merely directions with reference to the drawings, and thus, the directional words used are intended to illustrate, not to limit, the invention.
Embodiment one:
as shown in fig. 1-2, a five-dimensional grating adjusting frame is arranged on the periphery of a grating 1, the adjusting frame sequentially comprises a manual adjusting mechanism 3, a pitching and rotating adjusting mechanism 4, a deflection adjusting mechanism 5, a translation adjusting mechanism 6 and a supporting bottom plate 7 from top to bottom, meanwhile, a first supporting plate 8 is arranged between the manual adjusting mechanism 3 and the pitching and rotating adjusting mechanism 4, a second supporting plate 9 is arranged between the pitching and rotating adjusting mechanism 4 and the deflection adjusting mechanism 5, a third supporting plate 10 is arranged between the deflection adjusting mechanism 5 and the translation adjusting mechanism 6, and the supporting bottom plate 7 is fixedly connected with the bottom surface of a compressor.
As shown in fig. 1-4, the manual adjustment mechanism 3 includes an adjusting rod 16, a top block 17 and a fixed block 15, wherein the bottoms of the top block 17 and the fixed block 15 are fixedly connected with the first support plate 8, and the adjusting rod 16 is arranged along the length direction of the frame 2 and is in line contact with the upper surface of the first support plate 8. The adjusting rod 16 is located between the top block 17 and the fixed block 15, and an adjusting bolt 18 for tightly pushing the adjusting rod 16 is penetrated through the top block 17. The upper surface of the first supporting plate 8 is fixedly provided with a supporting column 13 with a first groove 14 at the top, the side surface of the frame 2 is provided with a first ball head 12 embedded in the first groove 14, and the bottom of the first ball head is positioned above the adjusting rod 16 and is in line contact with the adjusting rod 16. The first groove 14 cooperates with the first ball head 12 to limit the two-dimensional translational freedom of the frame 2, and at the same time, the frame 2 and the adjusting rod 16 can rotate relatively, so that the pitching angle of the frame 2 can be adjusted manually. The manual adjusting mechanism 3 adopts a linear supporting structure, so that the bearing capacity of the bottom of the frame 2 is enhanced, and meanwhile, the local deformation of the frame 2 caused by multi-point support is avoided, and the grating 1 is further influenced. In addition, the top of the frame 2 is provided with a frame handle 11, which is convenient for moving the frame 2.
Embodiment two:
as shown in fig. 1-2 and 5-7, the pitch and yaw adjustment mechanism 4 includes a center adjustment mechanism, a left adjustment mechanism, and a right adjustment mechanism that are arranged in parallel and at intervals and are identical in structure. The left side adjustment mechanism comprises a driving assembly and a guiding assembly, the driving assembly comprises a first motor 19, a first ball screw 29, an upper wedge block 21 and a lower wedge block 22, inclined planes of the upper wedge block 21 and the lower wedge block 22 are oppositely arranged, the first motor 19 is a stepping motor and fixedly arranged on the upper surface of the second supporting plate 9, the output end of the first motor is connected with a screw rod of the first ball screw 29, the vertical surface of the lower wedge block 22 is fixedly connected with a nut of the first ball screw 29, that is, the first motor 19 is started, the lower wedge block 22 and the nut of the first ball screw 29 can be driven to linearly move, meanwhile, the horizontal surface of the upper wedge block 21 is connected with the lower surface of the first supporting plate 8, that is, the upper wedge block 21 and the first supporting plate 8 are connected into a whole, and the lower wedge block 22 and the upper wedge block 21 can relatively move.
Meanwhile, guide components are arranged at the vertical surface of the upper wedge block 21, the horizontal surface of the lower wedge block 22 and the inclined surfaces of the upper wedge block 21 and the lower wedge block 22 which are oppositely arranged. The guide assembly comprises a guide block and a guide rail, wherein the guide block is positioned on the guide rail and can slide along the guide rail. Wherein, the guide rail 23 of the guide assembly positioned at the vertical surface of the upper wedge block 21 is fixedly connected with the upper surface of the second support plate 9 through the guide rail fixing block 20, and the guide block 24 is fixedly connected with the vertical surface of the upper wedge block 21. The guide rail 25 of the guide assembly located at the level of the lower wedge 22 is fixedly connected to the upper surface of the second support plate 9, and the guide block 26 thereof is fixedly connected to the level of the lower wedge 22. The guide rail 27 of the guide assembly positioned at the inclined plane of the upper wedge block 21 and the lower wedge block 22 which are oppositely arranged is fixedly connected with the inclined plane of the lower wedge block 22, and the guide block 28 is fixedly connected with the inclined plane of the upper wedge block 21. That is, when the lower wedge 22 moves linearly, the upper wedge 21 is caused to displace in the vertical direction due to the opposite inclined surfaces of the upper wedge 21 and the lower wedge 22, thereby changing the distance between the first support plate 8 and the second support plate 9, i.e., changing the thickness of the adjusting bracket.
In addition, a second ball head is arranged at the position of the lower surface of the first support plate 8 corresponding to the horizontal plane of the upper wedge block 21, a second groove opposite to the second ball head is arranged at the horizontal plane of the upper wedge block 21 of the middle adjusting mechanism, the left adjusting mechanism and the right adjusting mechanism, that is, the horizontal planes of the 3 upper wedges 21 are all provided with the second grooves, the longitudinal section of one of the 3 second grooves is conical, the longitudinal section of one of the 3 second grooves is V-shaped, and the longitudinal section of one of the 3 second grooves is U-shaped (namely, the bottom of the groove is a plane). The pitching and rotating adjusting mechanism 4 adopts a three-point supporting structure with a compact structure, simultaneously, an upper wedge block 21 and a lower wedge block 22 which are oppositely arranged are adopted, the requirement of low thickness of the adjusting frame is met, and a guide assembly is adopted to meet the requirement of high precision of the adjusting frame. And meanwhile, the second ball head is matched with the second groove in a positioning way. In addition, the longitudinal sections of the 3 second grooves are set to be different shapes, and the pitching and normal rotation operation of the grating 1 and the frame 2 is realized through the linkage of the middle adjusting mechanism, the left adjusting mechanism and the right adjusting mechanism, wherein the middle adjusting mechanism independently realizes the pitching operation of the first supporting plate 8 and the mechanism above the first supporting plate 8, the pitching adjusting precision is 0.76 mu rad/step, the left adjusting mechanism and the right adjusting mechanism realize the normal rotation operation of the first supporting plate 8 and the mechanism above the first supporting plate 8, and the rotation adjusting precision is 0.60 mu rad/step.
Embodiment III:
as shown in fig. 1-2 and fig. 8-9, the deflection adjusting mechanism 5 includes a crossed roller bearing 30, a second motor 31 and a second ball screw 32, wherein an outer ring of the crossed roller bearing 30 is fixedly connected with the upper surface of the third support plate 10, and an inner ring of the crossed roller bearing is fixedly connected with the lower surface of the second support plate 9, that is, when the outer ring and the inner ring of the crossed roller bearing 30 rotate relatively, the second support plate 9 and the third support plate 10 can be driven to rotate relatively, so as to realize deflection of the second support plate 9 and the mechanism above the second support plate 9. The screw rod of the second ball screw 32 is fixedly connected with the output end of the second motor 31, the nut of the second ball screw is fixedly connected with the lower surface of the second supporting plate 9, and the second motor 31 is a stepping motor and is fixedly arranged on the upper surface of the third supporting plate 10.
Because the weight and the size of the part of the adjusting frame above the deflection adjusting mechanism 5 are large, the large-size thin crossed roller bearing 30 is selected as a slewing bearing, and the requirements of high accuracy, low thickness and high load of the adjusting frame are met. The cross roller bearing 30 has a supporting diameter of about 350mm, a thickness of about 30mm or less, a rated dynamic load capacity of about ton, a negative play state in the cross roller bearing, and a stable support for the frame, wherein the deflection adjustment precision is 0.45 mu rad/step.
Embodiment four:
as shown in fig. 1-2 and fig. 9-11, the translation adjusting mechanism 6 includes a translation driving assembly and a translation guiding assembly, the translation driving assembly includes a third motor 33 and a third ball screw 34, the third motor 33 is a stepper motor, and is fixedly disposed on the lower surface of the third support plate 10, the output end of the third motor is connected with a screw rod of the third ball screw 34, and a nut of the third ball screw 34 is fixedly disposed on the upper surface of the support bottom plate 7, so as to provide stable support for the crossed roller bearing 30, a structure in which 2 pairs of translation guiding assemblies are distributed and supported is adopted, that is, the translation guiding assemblies are parallel and spaced, and 4 translation guiding assemblies are disposed. The translation guide assembly comprises a sliding rail 35 and a sliding block 36 positioned on the sliding rail 35, the sliding rail 35 is fixedly arranged on the upper surface of the supporting bottom plate 7, and the sliding block 36 is fixedly arranged on the lower surface of the third supporting plate 10. The supporting bottom plate 7 is provided with a waist-shaped groove, and the sliding rail 35 is positioned in the waist-shaped groove, so that the fixing is convenient, and the whole height is reduced. That is, the nut of the third ball screw 34 is fixed with the supporting base plate 7, the third motor 33 is started to drive the screw of the third ball screw 34, the third supporting plate 10 and the mechanism above the third supporting plate 10 to realize linear translation, and the translation adjustment precision is 0.73 μm/step.
The foregoing detailed description of the invention has been presented for purposes of illustration and description, but is not intended to limit the scope of the invention, i.e., the invention is not limited to the details shown and described.
Claims (10)
1. The five-dimensional grating adjusting frame is characterized by sequentially comprising a manual adjusting mechanism, a pitching and rotating adjusting mechanism, a deflection adjusting mechanism, a translation adjusting mechanism and a supporting bottom plate from top to bottom, wherein a first supporting plate is arranged among the manual adjusting mechanism, the pitching and rotating adjusting mechanism, a second supporting plate is arranged among the pitching and rotating adjusting mechanism and the deflection adjusting mechanism, a third supporting plate is arranged among the deflection adjusting mechanism and the translation adjusting mechanism, and the supporting bottom plate is fixedly connected with the bottom surface of the compressor;
the pitching and rotating adjusting mechanism comprises a middle adjusting mechanism, a left adjusting mechanism and a right adjusting mechanism which are arranged in parallel and have the same structure, the left adjusting mechanism comprises a driving assembly and a guiding assembly, the driving assembly comprises a first motor, a first ball screw, an upper wedge and a lower wedge, inclined planes of the upper wedge and the lower wedge are oppositely arranged, the first motor is fixedly arranged on the upper surface of a second supporting plate, the output end of the first motor is connected with a screw rod of the first ball screw, the vertical plane of the lower wedge is fixedly connected with a nut of the first ball screw, the horizontal plane of the upper wedge is connected with the lower surface of the first supporting plate, and the guiding assembly is arranged on the vertical plane of the upper wedge, the horizontal plane of the lower wedge and the inclined plane of the upper wedge and the inclined plane of the lower wedge, which are oppositely arranged.
2. The five-dimensional grating adjusting frame according to claim 1, wherein the manual adjusting mechanism comprises an adjusting rod, a top block and a fixed block, the bottoms of the top block and the fixed block are fixedly connected with the first supporting plate, the adjusting rod is arranged along the length direction of the frame, and the adjusting rod is in line contact with the upper surface of the first supporting plate.
3. The five-dimensional grating adjusting frame according to claim 2, wherein the adjusting rod is located between the top block and the fixed block, and an adjusting bolt for tightly pushing the adjusting rod is penetrated through the top block.
4. The five-dimensional grating adjusting frame according to claim 3, wherein the supporting column with the first groove at the top is fixedly arranged on the upper surface of the first supporting plate, the first ball head embedded in the first groove is arranged on the side surface of the frame, and the bottom of the first ball head is positioned above the adjusting rod and is in line contact with the adjusting rod.
5. The five-dimensional grating adjusting frame according to claim 1, wherein the guide assembly comprises a guide block and a guide rail, the guide block is located on the guide rail, the guide block can slide along the guide rail, the guide rail of the guide assembly located on the vertical surface of the upper wedge block is fixedly connected with the upper surface of the second support plate through a guide rail fixing block, the guide block of the guide assembly located on the horizontal surface of the lower wedge block is fixedly connected with the upper surface of the second support plate, the guide block of the guide assembly located on the horizontal surface of the lower wedge block is fixedly connected with the horizontal surface of the lower wedge block, the guide rail of the guide assembly located on the inclined surface of the upper wedge block and the inclined surface of the lower wedge block which are oppositely arranged is fixedly connected with the inclined surface of the lower wedge block, and the guide block of the guide assembly is fixedly connected with the inclined surface of the upper wedge block.
6. The five-dimensional grating adjusting frame according to claim 5, wherein a second ball head is arranged at a position, corresponding to the horizontal plane of the upper wedge block, of the lower surface of the first supporting plate, a second groove opposite to the second ball head is arranged at the horizontal plane of the upper wedge block of the middle adjusting mechanism, the left adjusting mechanism and the right adjusting mechanism, the longitudinal section of one of the 3 second grooves is conical, the longitudinal section of one of the 3 second grooves is V-shaped, and the longitudinal section of one of the 3 second grooves is U-shaped.
7. The five-dimensional grating adjusting frame according to claim 1, wherein the deflection adjusting mechanism comprises a crossed roller bearing, a second motor and a second ball screw, an outer ring of the crossed roller bearing is fixedly connected with the upper surface of the third supporting plate, an inner ring of the crossed roller bearing is fixedly connected with the lower surface of the second supporting plate, a screw rod of the second ball screw is fixedly connected with the output end of the second motor, a nut of the second ball screw is fixedly connected with the lower surface of the second supporting plate, and the second motor is fixedly arranged on the upper surface of the third supporting plate.
8. The five-dimensional grating adjusting frame according to claim 1, wherein the translation adjusting mechanism comprises a translation driving assembly and a translation guiding assembly, the translation driving assembly comprises a third motor and a third ball screw, the third motor is fixedly arranged on the lower surface of the third supporting plate, the output end of the third motor is connected with a screw rod of the third ball screw, nuts of the third ball screw are fixedly arranged on the upper surface of the supporting base plate, and 4 translation guiding assemblies are arranged in parallel and at intervals.
9. The five-dimensional grating adjusting frame according to claim 8, wherein the translation guide assembly comprises a sliding rail and a sliding block positioned on the sliding rail, the sliding rail is fixedly arranged on the upper surface of the supporting bottom plate, and the sliding block is fixedly arranged on the lower surface of the third supporting plate.
10. The five-dimensional grating adjustment frame according to claim 9, wherein the support base plate is provided with a kidney-shaped groove, and the slide rail is located in the kidney-shaped groove.
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| CN201711458224.7A CN107976763B (en) | 2017-12-28 | 2017-12-28 | Five-dimensional grating adjusting frame |
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| CN201711458224.7A CN107976763B (en) | 2017-12-28 | 2017-12-28 | Five-dimensional grating adjusting frame |
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| CN110361828B (en) * | 2019-08-22 | 2024-02-09 | 中国工程物理研究院机械制造工艺研究所 | Large-caliber optical element precise adjustment mirror bracket |
| CN113985553A (en) * | 2021-11-12 | 2022-01-28 | 中国科学院长春光学精密机械与物理研究所 | Grating pitching attitude adjusting device |
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| 5-DOF光栅拼接并联装置的优化设计与实验验证;张文辉;中国优秀硕士学位论文全文数据库工程科技Ⅱ辑;C030-97 * |
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