CN107966236A - Pressure sensor, sphygmomanometer and pressure sensor manufacture method - Google Patents
Pressure sensor, sphygmomanometer and pressure sensor manufacture method Download PDFInfo
- Publication number
- CN107966236A CN107966236A CN201810048535.4A CN201810048535A CN107966236A CN 107966236 A CN107966236 A CN 107966236A CN 201810048535 A CN201810048535 A CN 201810048535A CN 107966236 A CN107966236 A CN 107966236A
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- pressure
- chip
- temperature
- pressure sensor
- sensitives
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 230000036413 temperature sense Effects 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000005516 engineering process Methods 0.000 claims description 8
- 230000009977 dual effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 230000006698 induction Effects 0.000 description 34
- 230000036772 blood pressure Effects 0.000 description 7
- 238000009530 blood pressure measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/021—Measuring pressure in heart or blood vessels
- A61B5/02141—Details of apparatus construction, e.g. pump units or housings therefor, cuff pressurising systems, arrangements of fluid conduits or circuits
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/021—Measuring pressure in heart or blood vessels
- A61B5/022—Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0247—Pressure sensors
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Cardiology (AREA)
- Physics & Mathematics (AREA)
- Vascular Medicine (AREA)
- Biomedical Technology (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Veterinary Medicine (AREA)
- Heart & Thoracic Surgery (AREA)
- Physiology (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- General Physics & Mathematics (AREA)
- Ophthalmology & Optometry (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
Abstract
A kind of pressure sensor, including a substrate, two pressure sensitive chips and a temperature sense chip are packaged with the substrate, each pressure sensitive chip is used to individually sense extraneous gas air pressure, the circuit of the two pressure sensitives chip on the substrate is independent mutually, the circuit of the temperature sense chip and the two pressure sensitives chip is separate, and for sensing the gas temperature angle value of the two pressure sensitives chip circumference, when the air pressure of external object gas described in two pressure sensitive chip senses, the temperature sense chip can sense the temperature value of the external object gas, to be compensated to atmospheric pressure value of the two pressure sensitives chip senses to the external object gas.Manufacture method and a kind of sphygmomanometer the invention further relates to a kind of pressure sensor.
Description
Technical field
The present invention relates to a kind of pressure sensor, sphygmomanometer and pressure sensor manufacture method.
Background technology
Pressure sensor is mainly used in electronic sphygmomanometer in medical health field, for sensing human blood-pressure.Pressure
Itself quality of sensor directly determines the service life of sphygmomanometer, and the precision of pressure sensor also directly determines blood pressure measurement
Resultant error size.Conditional electronic sphygmomanometer uses the pressure sensor of single pressure sensitive chip, and testing result is directly by this
The quality of pressure sensor determines, in long-time in use, the error of such pressure sensor generation is larger, and sphygmomanometer control
Device processed can not detect deviation caused by sensor itself drift, while when pressure sensor damages, sphygmomanometer was using
Pressure protection will not be carried out in journey, or even the air pressure that can produce sphygmomanometer inflation hurts user.
The content of the invention
Present invention seek to address that the above problem, and a kind of accuracy of detection height is provided, pressure sensor, the blood pressure of safety durable
Meter and pressure sensor manufacture method.
A kind of pressure sensor, including a substrate, are packaged with two pressure sensitive chips and a temperature sense on the substrate
Chip, each pressure sensitive chip are used for the air pressure for individually sensing extraneous gas, and the two pressure sensitives chip is in the substrate
On circuit it is independent mutually, the circuit of the temperature sense chip and the two pressure sensitives chip is separate, and is used to feel
The gas temperature angle value of the two pressure sensitives chip circumference is surveyed, when the gas of external object gas described in two pressure sensitive chip senses
During pressure, the temperature sense chip can sense the temperature value of the external object gas, with to the two pressure sensitives chip sense
The atmospheric pressure value for measuring the external object gas compensates.
A kind of sphygmomanometer, the sphygmomanometer include controller, and the controller connects the two pressure sensitives chip and institute
Temperature sense chip is stated, the controller can read atmospheric pressure value and the reading of the object gas of the two pressure sensitives chip senses
The actual temperature value of object gas described in the temperature sense chip senses, the controller can be according to the two pressure sensitives cores
Piece sensing the object gas atmospheric pressure value whether default error range judge the two pressure sensitives chip whether work
Make normally, the controller can be according to the actual temperature value of the object gas of the temperature sense chip senses relative to mark
Temperature gap at quasi- temperature, the gas of the object gas sensed to the two pressure sensitives chip under the actual temperature
Pressure value compensates.
A kind of manufacture method of pressure sensor comprises the following steps：
Some pressure sensitive chips are separated out on same wafer；
Choose the pressure sensitive chip of two bridge resistances within a preset range and pressure sensitive chip is made；And
By the two pressure sensitives chip and a temperature sense chip package to same substrate.
Further, the two pressure sensitives chip and the temperature sense chip are encapsulated to described by micro-electromechanical technology
Substrate forms surface-adhered type sensor module.
Further, the two pressure sensitives chip and the temperature sense chip are encapsulated to described by micro-electromechanical technology
Substrate forms dual inline type sensor module.
Further, two pressure sensor chip is encapsulated as gauge pressure pattern.
Further, stomata is offered on the substrate, the stomata connects two pressure sensitive chip bottoms.
Further, two pressure sensor chip is encapsulated as absolute pressure pattern.
The positive effect of the present invention is that double pressure sensitive chips of monomer encapsulation can substantially reduce pressure sensor mistake
The risk brought is imitated, prevents sphygmomanometer in single pressure sensitive chip failure, arm band, which continues to shrink, causes asking for user's injury
Topic.Meanwhile double pressure sensitive chips of monomer encapsulation can effectively improve the accuracy of detection of blood pressure, prevent sensor itself fail,
The compensation effect of temperature sense chip is equipped with, expands the Applicable temperature scope of sensor, makes the use environment temperature model of sphygmomanometer
Increase is enclosed, ensures that pressure measurements are reliable and stable, makes to be really achieved using the product of the sensor and is safely and effectively expected mesh
Mark.
Brief description of the drawings
Fig. 1 is the schematic top plan view of sensor in embodiment of the present invention.
Fig. 2 is to do section view at the schematic elevation view of sensor in Fig. 1, wherein substrate and pressure sensitive chip.
Fig. 3 is to do section view at the left view schematic diagram of sensor in Fig. 1, wherein substrate and pressure sensitive chip.
Fig. 4 is the bridge circuit schematic diagram of a chip in embodiment of the present invention.
Fig. 5 is the schematic diagram that sensor carries pin in Fig. 1.
Fig. 6 is the high-level schematic functional block diagram of a sphygmomanometer in embodiment of the present invention.
Fig. 7 is the flow chart of a pressure sensor manufacture method in embodiment of the present invention.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, the every other reality that those of ordinary skill in the art are obtained without making creative work
Example is applied, belongs to the scope of protection of the invention.
It should be noted that when an element is considered as " connection " another element, it can be directly to separately
One element may be simultaneously present the element being centrally located.When an element is considered as " being arranged at " another element,
It can be set directly on another element or may be simultaneously present the element being centrally located.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The normally understood implication of technical staff is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term as used herein " and/or " include one or more phases
The arbitrary and all combination of the Listed Items of pass.
An embodiment of the present invention is related to a kind of pressure sensor, sphygmomanometer and pressure sensor manufacture method.
Please refer to Fig.1 to Fig.3, in an embodiment, a pressure sensor 10 includes a substrate 11, a first pressure senses
Chip 13, a second pressure induction chip 14 and a temperature sense chip 15.First pressure induction chip 13, second pressure sensing
Chip 14 and temperature sense chip 15 are once encapsulated to substrate 11.Substrate 11 sets off bottom plate for one.Substrate 11 offers at the same time
Connect the stomata 111 of first pressure induction chip 13 and second pressure induction chip 14.First pressure induction chip 13 and second
The circuit of pressure sensitive chip 14 on the substrate 11 is independent mutually and can individually sense external pressure, wherein a pressure sensitive chip
Pressure sensing capabilities will not be lost because of the failure of another pressure sensitive chip to the sensing of exterior object gas, ensure that pressure
The expection ability to work of sensor.Temperature sense chip 15 can sense the ambient temperature value of the two pressure sensitives chip circumference,
Temperature sense chip 15 and the circuit of two pressure sensors are separate, and will not be because of the circuit malfunction of any pressure sensitive chip
And lose expected ability to work.
In the present embodiment, first pressure induction chip 13 selects same wafer to cut with second pressure induction chip 14
Cut, and the bridge resistance of first pressure induction chip 13 and second pressure induction chip 14 is within a preset range.In this way, can be
Keep first pressure induction chip 13 to show with the one of second pressure induction chip 14 on physical features and realize pressure-sensing effect
Uniformity.
First pressure induction chip 13, second pressure induction chip 14 and temperature sense chip 15 can pass through micro-electromechanical technology
(MEMS) mode encapsulates to substrate 11 and forms surface-adhered type (SMT) sensor module, can also pass through MEMS package to substrate
11 are formed as dual inline type (DIP) sensor module.
First pressure induction chip 13 can be encapsulated as gauge pressure pattern or absolute pressure pattern with second pressure induction chip 14.Envelope
Fill for gauge pressure pattern when, refer to Fig. 2 and Fig. 3, external pressure enters pressure sensor annular seal space, atmospheric pressure by pressure catheter
Pressure sensor bottom is entered by stomata 111 naturally, carries out the measurement of target air pressure.When being encapsulated as absolute pressure pattern, exterior gas
Pressure enters pressure sensor annular seal space, sensor base sealing by pressure catheter, and atmospheric pressure cannot then enter.
Please continue to refer to Fig. 4 and Fig. 5, in the present embodiment, first pressure induction chip 13 includes a bridge circuit, should
Bridge circuit includes pin 1-5.Second pressure induction chip 14 has identical structure with first pressure induction chip 13, including draws
Foot 6-10.First pressure induction chip 13 is encapsulated with second pressure induction chip 14 afterwards there is identical pin to arrange on the substrate 11
Column direction.
Please continue to refer to Fig. 6, in present embodiment, a sphygmomanometer 100 includes 10 and one controller 30 of pressure sensor.Control
Device 30 processed connects first pressure induction chip 13, second pressure induction chip 14 and temperature sense on pressure sensor 10 at the same time
Chip 15.Controller 30 can control first pressure induction chip 13 and second pressure induction chip 14 to carry out blood pressure measurement at the same time,
Controller 30 can obtain the testing result of first pressure induction chip 13 and second pressure induction chip 14.Controller 30 can basis
Whether the atmospheric pressure value for the external object gas that first pressure induction chip 13 and second pressure induction chip 14 sense is default
Whether error range is working properly to judge first pressure induction chip 13 and second pressure induction chip 14.
Under normal circumstances, work when sphygmomanometer 100 is in normal temperature, such as 20 degree Celsius, pressure sensor passes through continuous
Supercharging measures to form pressure-voltage curve to export different voltage, and at this time, pressure-voltage curve is standard value.Work as blood
Pressure meter 100 is different from normal temperature under the same conditions, and such as 10 degree Celsius or 25 degree Celsius when works, the actual production of pressure sensor
Raw pressure-voltage curve can and normal temperature under pressure-voltage curve produce deviation, thus need according to temperature gap
Compensate.
The atmospheric pressure value that controller 30 can be sensed in first pressure induction chip 13 and second pressure induction chip 14 it is same
When obtain the actual temperature value of the sensing of temperature sense chip 15, obtain relative to the temperature gap under normal temperature, and then to two
The atmospheric pressure value of pressure sensitive chip senses compensates, and pressure-voltage curve is tended to standard value.In this way, expand sensor
Applicable temperature scope, increases the use environment temperature range of sphygmomanometer, ensures that pressure measurements are reliable and stable, makes to apply and is somebody's turn to do
The product of sensor is really achieved safely and effectively target.
It is independent of each other since first pressure induction chip 13 independently works with second pressure induction chip 14, when wherein
During one pressure sensitive chip failure, another pressure sensitive chip can work on, and controller 30 can be based on single pressure sensitive core
The result of piece is exported.The use of the double pressure sensitive chips singly encapsulated can greatly reduce the risk of blood pressure detecting, prevent
Only for sphygmomanometer in single pressure sensitive chip failure, arm band continues the problem of contraction causes user to injure.Meanwhile singly encapsulate
Double pressure sensitive chips can effectively improve the accuracy of detection of blood pressure, be equipped with the compensation effect of temperature sense chip 15, measurement result
It is more reliable and more stable.On the other hand, sphygmomanometer can be according to the atmospheric pressure value of double pressure sensitive chips of acquisition to the reliable of sphygmomanometer
Property carry out self-test, for example, as the differences of two atmospheric pressure values be more than a preset value when, can quickly judge an at least pressure sensitive chip
Failure, controller allow blood pressure to be stopped, ensure the reliability of blood pressure measurement and the security that user uses accordingly.During maintenance,
It can also allow businessman's specific aim to replace pressure sensitive chip, reduce maintenance cost.
Referring to Fig. 7, in an embodiment, a kind of manufacture method of pressure sensor, comprises the following steps：
Step 71：Some pressure sensitive chips are separated out on same wafer.
Step 73：Choose the pressure sensitive chip of two bridge resistances within a preset range and pressure sensitive chip is made,
In present embodiment, the immediate two pressure sensitives chip of two bridge resistances is selected in default scope.
Step 75：By two pressure sensitive chips and temperature sense chip package to same substrate.
In the above method, two pressure sensitive chips and temperature sense chip are encapsulated to the substrate shape by micro-electromechanical technology
Into surface-adhered type sensor module or dual inline type sensor module.Two pressure sensor chips are encapsulated as gauge pressure pattern
Or absolute pressure pattern.
In another embodiment, pressure sensor can once encapsulate 3 or more pressure sensitive chips, or once encapsulate
2 or more temperature sense chips, to realize similar technique effect.
Embodiment described above only expresses the several embodiments of the present invention, its description is more specific and detailed, but simultaneously
Therefore the limitation to the scope of the claims of the present invention cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the guarantor of the present invention
Protect scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (8)
1. a kind of pressure sensor, including a substrate, it is characterised in that：Two pressure sensitive chips and one are packaged with the substrate
Temperature sense chip, each pressure sensitive chip are used for the air pressure for individually sensing extraneous gas, and the two pressure sensitives chip exists
Circuit on the substrate is independent mutually, and the circuit of the temperature sense chip and the two pressure sensitives chip is separate,
And for sensing the gas temperature angle value of the two pressure sensitives chip circumference, when external object described in two pressure sensitive chip senses
During the air pressure of gas, the temperature sense chip can sense the temperature value of the external object gas, with to two feeling of stress
The atmospheric pressure value of chip senses to the external object gas is answered to compensate.
A kind of 2. sphygmomanometer using pressure sensor as claimed in claim 1, it is characterised in that：The sphygmomanometer includes control
Device processed, the controller connect the two pressure sensitives chip and the temperature sense chip, and the controller can read described
Object gas described in the atmospheric pressure value and the reading temperature sense chip senses of the object gas of two pressure sensitive chip senses
Actual temperature value, the controller can according to the atmospheric pressure value of the object gas of the two pressure sensitives chip senses whether
Default error range judges whether the two pressure sensitives chip is working properly, and the controller can be according to the temperature sense
The actual temperature value of the object gas of chip senses is relative to the temperature gap under normal temperature, to two pressure sensitive
The atmospheric pressure value for the object gas that chip senses under the actual temperature compensates.
A kind of 3. manufacture method of pressure sensor as claimed in claim 1, it is characterised in that：The described method includes following step
Suddenly：
Some pressure sensitive chips are separated out on same wafer；
Choose the pressure sensitive chip of two bridge resistances within a preset range and pressure sensitive chip is made；And
By the two pressure sensitives chip and a temperature sense chip package to same substrate.
4. the manufacture method of pressure sensor as claimed in claim 3, it is characterised in that：The two pressure sensitives chip and institute
Temperature sense chip is stated to encapsulate to substrate formation surface-adhered type sensor module by micro-electromechanical technology.
5. the manufacture method of pressure sensor as claimed in claim 3, it is characterised in that：The two pressure sensitives chip and institute
Temperature sense chip is stated to encapsulate to substrate formation dual inline type sensor module by micro-electromechanical technology.
6. the manufacture method of pressure sensor as claimed in claim 3, it is characterised in that：The two pressure sensor chips quilt
It is encapsulated as gauge pressure pattern.
7. the manufacture method of pressure sensor as claimed in claim 6, it is characterised in that：Stomata is offered on the substrate,
The stomata connects two pressure sensitive chip bottoms.
8. the manufacture method of pressure sensor as claimed in claim 3, it is characterised in that：The two pressure sensor chips quilt
It is encapsulated as absolute pressure pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810048535.4A CN107966236A (en) | 2018-01-18 | 2018-01-18 | Pressure sensor, sphygmomanometer and pressure sensor manufacture method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810048535.4A CN107966236A (en) | 2018-01-18 | 2018-01-18 | Pressure sensor, sphygmomanometer and pressure sensor manufacture method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107966236A true CN107966236A (en) | 2018-04-27 |
| CN107966236A8 CN107966236A8 (en) | 2018-09-28 |
Family
ID=61993523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810048535.4A Pending CN107966236A (en) | 2018-01-18 | 2018-01-18 | Pressure sensor, sphygmomanometer and pressure sensor manufacture method |
Country Status (1)
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| CN (1) | CN107966236A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019140594A1 (en) * | 2018-01-18 | 2019-07-25 | 深圳市永盟电子科技限公司 | Pressure sensor, sphygmomanometer, and method for manufacturing pressure sensor |
| CN113167662A (en) * | 2018-09-17 | 2021-07-23 | 哈钦森技术股份有限公司 | Integrated sensor and circuit |
| CN115388854A (en) * | 2022-08-26 | 2022-11-25 | 南京高华科技股份有限公司 | Air pressure height sensor |
| WO2023005847A1 (en) * | 2021-07-30 | 2023-02-02 | 华为技术有限公司 | Blood pressure measuring apparatus |
| CN116649938A (en) * | 2023-07-31 | 2023-08-29 | 深圳市长坤科技有限公司 | Blood pressure measurement system based on bluetooth communication |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN107966236A8 (en) | 2018-09-28 |
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