CN107966103A - Hypersensitive displacement sensing method and device based on local spin characteristic - Google Patents
Hypersensitive displacement sensing method and device based on local spin characteristic Download PDFInfo
- Publication number
- CN107966103A CN107966103A CN201710951555.8A CN201710951555A CN107966103A CN 107966103 A CN107966103 A CN 107966103A CN 201710951555 A CN201710951555 A CN 201710951555A CN 107966103 A CN107966103 A CN 107966103A
- Authority
- CN
- China
- Prior art keywords
- field
- light
- hypersensitive
- detection
- local spin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The present invention is suitable for field of optical measuring technologies, there is provided a kind of hypersensitive displacement sensing method and device based on local spin characteristic, the described method includes：The local spin state near field is produced with the near field vortex light field NF OV of the position linearity change at detection using excitation；The local spin state of the NF OV near field is coupled to far field using nanostructured, obtains elliptically polarized light；Detect the elliptically polarized light from curl, so as to obtain the displacement information of the position at the detection.Method for sensing provided by the invention is able to detect that accurate displacement information, and high sensitivity, cost is low, there is higher practical value.
Description
Technical field
The invention belongs to field of optical measuring technologies, more particularly to a kind of hypersensitive displacement based on local spin characteristic to pass
Sensing method and device.
Background technology
Nanosecond science and technology have led 21 century new Industrial Revolution, it constantly to information technology, biotechnology, medicine, the energy,
The field such as environment synthesis and ubiquit, and gradually obtain major progress.Before accurate nano measurement technology is Development of Nano-technology
Carry and catalyst, science and technology starts from measurement, and e measurement technology is also the important symbol of a national science and technology, the development need of nanometer technology
People have Nanometer World sufficient understanding, this is just required to measure under nanometer even smaller scale, operates, assembles
Scientific method and key technology, and corresponding installations and facilities.
Technology of Precision Measurement is referred to as high-precision hypersensitive displacement sensing technology, it is mainly following several using having at present
A aspect：One, Ultraprecision Machining and micromachine manufacturing technology aspect, these technologies are required for having determining for superhigh precision
Position could complete, such as the nanometer translation stage (PI) that laboratory generally uses just needs accurate location technology to support；Two, biology
Engineering technology and medical science technical elements, such as, micro- surgical operation is completed by the jiggle robot with sensor, can be with
Greatly mitigate the burden of doctor, shorten operating time, preserve patient's muscle power, and improve success rate, therefore have and widely should
Use prospect；The development of this technology is highly dependent on high-precision hypersensitive displacement sensing；Three, scanning probe microscopy aspect,
Sensitive displacement sensing technology is one of core technology of scanning probe microscopy, directly influence microscopical imaging arrangement and
Affected ability.High-precision hypersensitive displacement sensing in the above except having important application, also in fiber alignment, magnetic storage
The fields such as equipment, Nanometrology have significant application value.
Current high-precision hypersensitive displacement sensing technology mainly uses electricity means, by flexible feedback mechanism come real
It is existing, in addition it is exactly by the i.e. traditional optical measurement means of traditional optical imaging method.Both detection means cut both ways,
Pass through the method for electricity, it is possible to achieve very high precision, but in order to overcome noise, its cost is immeasurable；And pass through
Using traditional optical imaging method, due to being limited be subject to optical diffraction limit, its measurement sensitivity is compared to electricity means
Much lower, precision is difficult further to be lifted.
Therefore, it is necessary to a kind of brand-new high-precision hypersensitive displacement sensing technology, to realize hypersensitive and high-precision position
Move sensing.
The content of the invention
The present invention provides a kind of hypersensitive displacement sensing method and device based on local spin characteristic, it is desirable to provide a kind of
The characteristic changed according to the local spin state of NF-OV light fields with the position linearity at detection, by the local spin of NF-OV light fields
State is coupled to far field and is detected, so as to obtain hypersensitive and the brand-new optical sensing methods of high precision displacement information.
The present invention provides a kind of hypersensitive displacement sensing method based on local spin characteristic, the described method includes：
Near field vortex light field NF- of the local spin state with the position linearity change at detection is produced using excitation
OV；
The local spin state of the NF-OV is coupled to far field using nanostructured, obtains elliptically polarized light；
Detect the elliptically polarized light from curl, so as to obtain the displacement information of the position at the detection.
Further, the near field vortex light field is the focousing field with vortex phase.
Further, the near field vortex light field is the evanscent field with vortex phase.
Further, the evanscent field is the surface phasmon vortex light of the modulated spin special distribution of circular dichroism
Field SPOV；
It is described to produce near field vortex light field of the local spin state with the position linearity change at detection using excitation
NF-OV, including：
Using liquid crystal Spatial transmission slide modulated incident light beam, modulated outgoing beam is obtained, and utilize modulated
For outgoing beam as exciting light, it is special with the spin circular dichroism that the position linearity at detection changes that excitation produces local spin state
The SPOV of distribution；
The incident beam includes the left-handed light beam and right-hand beam of superposition, and the modulated outgoing beam is：It is described
Left-handed light beam is turned right with respect to incident beam center toward pre-determined distance and the right-hand beam is moved left with respect to incident beam center
The light beam that mobile pre-determined distance is formed.
Present invention also offers a kind of hypersensitive displacement sensing apparatus based on local spin characteristic, described device includes：
Unit is excited, for producing near field of the local spin state with the position linearity change at detection using excitation
Vortex light field NF-OV；
Response unit, for the local spin state of the NF-OV to be coupled to far field using nanostructured, obtains oval inclined
Shake light；
Detection unit, for detect the elliptically polarized light from curl, so as to obtain the position of the position at the detection
Move information.
Further, the near field vortex light field is the focousing field with vortex phase.
Further, the near field vortex light field is the evanscent field with vortex phase.
Further, the evanscent field is the surface phasmon vortex light of the modulated spin special distribution of circular dichroism
Field SPOV；
The excitation unit is specifically used for：Using liquid crystal Spatial transmission slide modulated incident light beam, obtain it is modulated go out
Irradiating light beam, and by the use of modulated outgoing beam as exciting light, excitation produces local spin state with the position linearity at detection
The SPOV of the special distribution of spin circular dichroism of change；
The incident beam includes the left-handed light beam and right-hand beam of superposition, and the modulated outgoing beam is：It is described
Left-handed light beam is turned right with respect to incident beam center toward pre-determined distance and the right-hand beam is moved left with respect to incident beam center
The light beam that mobile pre-determined distance is formed.
Compared with prior art, the present invention beneficial effect is：It is provided by the invention a kind of based on local spin characteristic
Hypersensitive displacement sensing method and device, first, local spin state are produced with the position linearity at detection using excitation
The NF-OV of change；Then, the local spin state of the NF-OV is coupled to far field using nanostructured, obtains elliptical polarization
Light；Finally, detect the elliptically polarized light from curl, so as to obtain the displacement information of the position at the detection；The present invention
Compared with prior art, the characteristic changed by using the local spin state of NF-OV light fields with the position linearity at detection, will
The local spin state of NF-OV light fields is coupled to far field and is detected, so that displacement information is obtained, method for sensing provided by the invention
It is able to detect that accurate displacement information, high sensitivity, cost is low, there is higher practical value.
Brief description of the drawings
Fig. 1 is a kind of flow of hypersensitive displacement sensing method based on local spin characteristic provided in an embodiment of the present invention
Schematic diagram；
Fig. 2 (a) is vortex schematic diagram in single order SPOV light field planes provided in an embodiment of the present invention；
Fig. 2 (b) is spin circular dichroism intensity distribution signal in single order SPOV light fields plane provided in an embodiment of the present invention
Figure；
Fig. 2 (c) is simulation knot of the SPOV light fields spin fashion provided in an embodiment of the present invention with change in location indicatrix
Fruit (straight line portion therein can be used for carrying out position sensing)；
Fig. 3 (a) is the intensity map of the SPOV transverse fields of the special distribution of spin provided in an embodiment of the present invention；
Fig. 3 (b) is the spin circular dichroism intensity of the SPOV transverse fields of the special distribution of spin provided in an embodiment of the present invention
Distribution map；
Fig. 3 (c) is to be used for carrying out displacement detection in the SPOV transverse fields of the special distribution of spin provided in an embodiment of the present invention
The linearity schematic diagram of region spin distribution；
Fig. 4 is a kind of module of hypersensitive displacement sensing apparatus based on local spin characteristic provided in an embodiment of the present invention
Schematic diagram.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Since the displacement sensing method of displacement sensing method and traditional optical that electricity exists in the prior art all cannot be into
The problem of row hypersensitive and high-precision displacement sensing.
In order to solve the above-mentioned technical problem, the present invention proposes a kind of hypersensitive displacement sensing side based on local spin characteristic
Method and device, the characteristic changed by using the local spin state of near field vortex light field with the position linearity at detection, come nearly
The local spin state of field vortex light field is coupled to far field and is detected, so as to obtain displacement information.
Lower mask body introduces a kind of hypersensitive displacement sensing method based on local spin characteristic proposed by the present invention, this is
A kind of brand-new pure optical means realizes hypersensitive displacement sensing.
Because traditional optical measurement means are limited be subject to optical diffraction limit, its measurement sensitivity is compared to electricity hand
Section is much lower.Near field optic studies the optical field distribution in one wave-length coverage of body surface, relative to far-field optics
Speech, can overcome optical diffraction limit, reach the resolution size of smaller and the label size of smaller；In addition, under Near Field,
The polarization vector characteristic of light field is more obvious, and especially when light field has orbital angular momentum (near field vortex light field), its is peculiar
Track-spin angular momentaum hybridization character provides possibility for more accurate optical measurement.This feature is referred to displacement and passed by us
In sense technology, the local spin characteristic by detecting near field vortex light field realizes the displacement sensing of Ethylmercurichlorendimide level.
We are surface plasma propagation field (the Surface Plasmon to be formed in metal film surfaces
Polariton, SPP) exemplified by, the SPP light fields of metallic film surface have local polarization characteristic, and this local polarization characteristic is not with electricity
Propagate and change in field.Detect the local polarization characteristic of light field, can be achieved with accurately positioning, realize position sensing.We are sharp
With plane two the component Ex and Ey of SPP light fields, if there is the phase difference of fixed pi/2 or-pi/2 between the two components,
With the change of amplitude, then can be obtained by very good, consecutive variations, easy to measurement near field polarization state be longitudinal direction from
Rotation, determines its spin properties, and then the purpose of hypersensitive displacement sensing.
Based on this, an embodiment of the present invention provides a kind of hypersensitive displacement sensing method based on local spin characteristic, such as
Shown in Fig. 1, the described method includes：
Step S101, near field vortex of the local spin state with the position linearity change at detection is produced using excitation
Light field NF-OV；
Specifically, the near field vortex light field can be the focousing field with vortex phase or carry vortex phase
The evanscent field of position.
More specifically, the evanscent field can be radial surface phasmon vortex light field SPOV or modulate after
The special distribution of spin circular dichroism surface phasmon vortex light field SPOV；
Specifically, radial direction vortex light excitation surface etc. can be utilized using radial direction vortex light as exciting light from the principle
Gas ions propagation field SPP, produces radial direction SPOV, the SPOV that the local spin state near field changes with the position linearity at detection
Shown in the helical phase carried such as Fig. 2 (a), there are the phase difference of fixed pi/2 or-pi/2, formation office between itself Ex and Ey component
Domain is spinned, and displacement sensing can be carried out with the leading variation characteristic of position using the local spin characteristic of SPOV；In addition, Fig. 2 (a) is
Single order SPOV light fields and local spin schematic diagram, Fig. 2 (b) are spin circular dichroism intensity distribution in single order SPOV light fields plane
Schematic diagram, Fig. 2 (c) are analog result of the SPOV light fields spin fashion provided in an embodiment of the present invention with change in location indicatrix
(straight line portion therein can be used for carrying out position sensing).
In fact, in practical applications, if using above-mentioned excited single single order SPOV light fields, due to its circle pair
Title property, it is difficult to ensure that the accuracy of single dimension in displacement detection process is actually carried out.We can further modulate excitation
Light, produces the SPOV light fields for special distribution of spinning, and to reduce detection difficulty, improves practical value.Specifically, we devise one
A liquid crystal Spatial transmission slide, its function are that the position of incident left-handed (dextrorotation) light beam is mutually modulated so that the near field of outgoing
For the center of the relatively former light field in the center of vortex light field, a degree of offset of (right side) appearance of turning left is partially (left-handed according to line
Light and the superposition of right-handed rotation) it is incident, then it can must arrive that -1 rank vortex light field of offset is turned left at center and center is turned right offset at the same time
+ 1 rank vortex light field, both are superimposed and then form new light field, our this technologies be referred to as to be conjugated vortex light field staggered superposition
Technology.The light beam new using this as excitation produce local spin state with the position linearity at detection change from rounding two
Shown in central area intensity distribution such as Fig. 3 (a) of the SPOV of the special distribution of color, the SPOV of excitation, spin distribution such as Fig. 3
(b).Us are detected specific to progress displacement to select shown in one section of best region such as Fig. 3 (c) of the spin change linearity.It is true
It is upper, it is necessary to it is clear that, carry out the near field vortex light field of the special distribution of this spin needed during displacement detection, be not limited to lead to
Conjugation vortex light field staggered superposition technology of the present invention is crossed to produce.
Step S102, is coupled to far field by the local spin state of the NF-OV using nanostructured, obtains elliptical polarization
Light；
Specifically, diverse location has different spin states in NF-OV light field planes, we are by can be to NF-OV
Local spin state is coupled to far field and is detected by the nanostructured of light field response.
Step S103, detect the elliptically polarized light from curl so that obtain the position at the detection displacement letter
Breath.
Specifically, detection be coupled to the elliptically polarized light in far field from curl (the either ellipse degree of bias or elliptical polarization),
It can obtain the displacement information of the position at the detection.
Fig. 3 (b) is the spin circular dichroism intensity distribution of special SPOV light fields central area used, it may be seen that
Spin circular dichroism is scattered in one-dimensional distribution, is not changed in vertical dimensions, relative to the annular spread of radial direction SPOV light fields,
The position movement of certain dimension does not influence the detection of vertical dimensions, can obtain more preferable practical application.Fig. 3 (c) is the light field
In be used for carrying out displacement search coverage spin distribution linearity figure, the further analysis to Fig. 3 (c), we obtain this method
Displacement measurement sensitivity can reachMagnitude, hundred nanometer scale of measurement range, scope-ratio of precision reaches 105Amount
Level.
A kind of hypersensitive displacement sensing method based on local spin characteristic provided in an embodiment of the present invention, by using near
The characteristic that the local spin state of field vortex light field changes with the position linearity at detection, by the local spin of near field vortex light field
State is coupled to far field and is detected, so as to obtain displacement information, method for sensing provided by the invention is able to detect that accurate position
Information is moved, high sensitivity, cost is low, there is higher practical value.
Present invention also offers a kind of hypersensitive displacement sensing apparatus based on local spin characteristic, as shown in figure 4, described
Device includes：
Unit 10 is excited, for producing local spin state with the near of the position linearity change at detection using excitation
Field vortex light field NF-OV；
Specifically, the near field vortex light field can be the focousing field with vortex phase or carry vortex phase
The evanscent field of position.
More specifically, the evanscent field can be radial surface phasmon vortex light field SPOV or modulate after
The special distribution of spin circular dichroism surface phasmon vortex light field SPOV.
If the near field vortex light field is the SPOV of the modulated spin special distribution of circular dichroism, then, the excitation
Unit 10 is specifically used for：Using liquid crystal Spatial transmission slide modulated incident light beam, modulated outgoing beam is obtained, and utilize tune
Outgoing beam after system produces the spin circular dichroism that local spin state changes with the position linearity at detection as exciting light, excitation
The SPOV of the special distribution of property.
Wherein, the incident beam includes the left-handed light beam and right-hand beam of superposition, and the modulated outgoing beam is：
The left-handed light beam is past with respect to incident beam center to move left pre-determined distance and the opposite incident beam center of the right-hand beam
Toward the light beam for moving right pre-determined distance formation.
Response unit 20, for the local spin state of the NF-OV to be coupled to far field using nanostructured, obtains ellipse
Polarised light；
Detection unit 30, for detect the elliptically polarized light from curl, so as to obtain the position at the detection
Displacement information.
It should be noted that excitation unit 10, response unit 20 and detection unit 30 provided in an embodiment of the present invention all may be used
To pass through hardware realization.
A kind of hypersensitive displacement sensing apparatus based on local spin characteristic provided in an embodiment of the present invention, by using near
The characteristic that the local spin state of field vortex light field changes with the position linearity at detection, by the local of near field vortex light field light field
Spin state is coupled to far field and is detected, so as to obtain displacement information, sensing device provided by the invention is able to detect that accurately
Displacement information, high sensitivity, cost is low, there is higher practical value.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement made within refreshing and principle etc., should all be included in the protection scope of the present invention.
Claims (8)
- A kind of 1. hypersensitive displacement sensing method based on local spin characteristic, it is characterised in that the described method includes：Near field vortex light field NF-OV of the local spin state with the position linearity change at detection is produced using excitation；The local spin state of the NF-OV is coupled to far field using nanostructured, obtains elliptically polarized light；Detect the elliptically polarized light from curl, so as to obtain the displacement information of the position at the detection.
- 2. hypersensitive displacement sensing method as claimed in claim 1, it is characterised in that the near field vortex light field is with rotation The focousing field of whirlpool phase.
- 3. hypersensitive displacement sensing method as claimed in claim 1, it is characterised in that the near field vortex light field is with rotation The evanscent field of whirlpool phase.
- 4. hypersensitive displacement sensing method as claimed in claim 3, it is characterised in that the evanscent field is modulated spin The surface phasmon vortex light field SPOV of the special distribution of circular dichroism；It is described to produce near field vortex light field NF- of the local spin state with the position linearity change at detection using excitation OV, including：Using liquid crystal Spatial transmission slide modulated incident light beam, modulated outgoing beam is obtained, and utilize modulated outgoing Light beam produces the special distribution of spin circular dichroism that local spin state changes with the position linearity at detection as exciting light, excitation SPOV；The incident beam includes the left-handed light beam and right-hand beam of superposition, and the modulated outgoing beam is：It is described left-handed Light beam is with respect to incident beam center toward moving left pre-determined distance and the right-hand beam with respect to incident beam center toward moving right The light beam that pre-determined distance is formed.
- 5. a kind of hypersensitive displacement sensing apparatus based on local spin characteristic, it is characterised in that described device includes：Unit is excited, for producing near field vortex of the local spin state with the position linearity change at detection using excitation Light field NF-OV；Response unit, for the local spin state of the NF-OV to be coupled to far field using nanostructured, obtains elliptical polarization Light；Detection unit, for detect the elliptically polarized light from curl so that obtain the position at the detection displacement letter Breath.
- 6. hypersensitive displacement sensing apparatus as claimed in claim 5, it is characterised in that the near field vortex light field is with rotation The focousing field of whirlpool phase.
- 7. hypersensitive displacement sensing apparatus as claimed in claim 5, it is characterised in that the near field vortex light field is with rotation The evanscent field of whirlpool phase.
- 8. hypersensitive displacement sensing apparatus as claimed in claim 7, it is characterised in that the evanscent field is modulated spin The surface phasmon vortex light field SPOV of the special distribution of circular dichroism；The excitation unit is specifically used for：Using liquid crystal Spatial transmission slide modulated incident light beam, modulated emergent light is obtained Beam, and by the use of modulated outgoing beam as exciting light, excitation produces local spin state and changes with the position linearity at detection The special distribution of spin circular dichroism SPOV；The incident beam includes the left-handed light beam and right-hand beam of superposition, and the modulated outgoing beam is：It is described left-handed Light beam is with respect to incident beam center toward moving left pre-determined distance and the right-hand beam with respect to incident beam center toward moving right The light beam that pre-determined distance is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710951555.8A CN107966103B (en) | 2017-10-13 | 2017-10-13 | Hypersensitive displacement sensing method and device based on local spin characteristic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710951555.8A CN107966103B (en) | 2017-10-13 | 2017-10-13 | Hypersensitive displacement sensing method and device based on local spin characteristic |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107966103A true CN107966103A (en) | 2018-04-27 |
| CN107966103B CN107966103B (en) | 2019-11-19 |
Family
ID=61996657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710951555.8A Active CN107966103B (en) | 2017-10-13 | 2017-10-13 | Hypersensitive displacement sensing method and device based on local spin characteristic |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107966103B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358434A (en) * | 2018-12-12 | 2019-02-19 | 浙江理工大学 | Orhtogonal linear polarizaiton light annular spread spacing-controllable system based on vector vortex beams |
| CN109375397A (en) * | 2018-12-12 | 2019-02-22 | 浙江理工大学 | A kind of range-measurement system of the orthogonal circular polarizations light based on vector vortex beams |
| CN109506579A (en) * | 2018-12-29 | 2019-03-22 | 浙江理工大学 | A kind of distance measurement system and method based on vector vortex light beam |
| CN109557679A (en) * | 2019-01-07 | 2019-04-02 | 浙江理工大学 | A kind of linearly polarized light generating means of the vector beam based on radial polarisation variation |
| WO2019071545A1 (en) * | 2017-10-13 | 2019-04-18 | 深圳大学 | Local spin characteristics-based ultra-sensitive displacement sensing method and device |
| CN110673350A (en) * | 2019-09-03 | 2020-01-10 | 深圳大学 | Vortex half-wave plate and system for generating elliptical radial polarized light beam |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153669A (en) * | 1991-03-27 | 1992-10-06 | Hughes Danbury Optical Systems, Inc. | Three wavelength optical measurement apparatus and method |
| US5677768A (en) * | 1996-07-03 | 1997-10-14 | Hewlett-Packard Company | Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame |
| CN1278057A (en) * | 2000-07-07 | 2000-12-27 | 清华大学 | Method for achieving nano-meter measurement utilizing synthetic wave length method |
| CN1560594A (en) * | 2004-02-18 | 2005-01-05 | 山东大学 | Spin polarized channel atomic force microtechnic |
| CN102121818A (en) * | 2010-12-15 | 2011-07-13 | 浙江大学 | Method and device for measurement of nanometer resolution total reflection differential micrometric displacement |
| CN106289094A (en) * | 2015-05-26 | 2017-01-04 | 中国科学院微电子研究所 | A kind of method and apparatus utilizing surface phasmon scattering detection nano-particle pattern |
| CN206147194U (en) * | 2016-10-25 | 2017-05-03 | 深圳大学 | Generation system of optics swirl |
-
2017
- 2017-10-13 CN CN201710951555.8A patent/CN107966103B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153669A (en) * | 1991-03-27 | 1992-10-06 | Hughes Danbury Optical Systems, Inc. | Three wavelength optical measurement apparatus and method |
| US5677768A (en) * | 1996-07-03 | 1997-10-14 | Hewlett-Packard Company | Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame |
| CN1278057A (en) * | 2000-07-07 | 2000-12-27 | 清华大学 | Method for achieving nano-meter measurement utilizing synthetic wave length method |
| CN1560594A (en) * | 2004-02-18 | 2005-01-05 | 山东大学 | Spin polarized channel atomic force microtechnic |
| CN102121818A (en) * | 2010-12-15 | 2011-07-13 | 浙江大学 | Method and device for measurement of nanometer resolution total reflection differential micrometric displacement |
| CN106289094A (en) * | 2015-05-26 | 2017-01-04 | 中国科学院微电子研究所 | A kind of method and apparatus utilizing surface phasmon scattering detection nano-particle pattern |
| CN206147194U (en) * | 2016-10-25 | 2017-05-03 | 深圳大学 | Generation system of optics swirl |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019071545A1 (en) * | 2017-10-13 | 2019-04-18 | 深圳大学 | Local spin characteristics-based ultra-sensitive displacement sensing method and device |
| CN109358434A (en) * | 2018-12-12 | 2019-02-19 | 浙江理工大学 | Orhtogonal linear polarizaiton light annular spread spacing-controllable system based on vector vortex beams |
| CN109375397A (en) * | 2018-12-12 | 2019-02-22 | 浙江理工大学 | A kind of range-measurement system of the orthogonal circular polarizations light based on vector vortex beams |
| CN109375397B (en) * | 2018-12-12 | 2021-04-30 | 浙江理工大学 | Orthogonal circularly polarized light ranging system based on vector vortex light beams |
| CN109358434B (en) * | 2018-12-12 | 2021-04-30 | 浙江理工大学 | Orthogonal linearly polarized light annular distribution interval controllable system based on vector vortex light beam |
| CN109506579A (en) * | 2018-12-29 | 2019-03-22 | 浙江理工大学 | A kind of distance measurement system and method based on vector vortex light beam |
| CN109506579B (en) * | 2018-12-29 | 2020-10-20 | 浙江理工大学 | Distance detection system and method based on vector vortex light beam |
| CN109557679A (en) * | 2019-01-07 | 2019-04-02 | 浙江理工大学 | A kind of linearly polarized light generating means of the vector beam based on radial polarisation variation |
| CN109557679B (en) * | 2019-01-07 | 2020-10-27 | 浙江理工大学 | Linear polarization light generation device of vector light beam based on radial polarization change |
| CN110673350A (en) * | 2019-09-03 | 2020-01-10 | 深圳大学 | Vortex half-wave plate and system for generating elliptical radial polarized light beam |
| CN110673350B (en) * | 2019-09-03 | 2021-10-19 | 深圳大学 | Vortex half-wave plate and system for generating elliptical radial polarized light beam |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107966103B (en) | 2019-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107966103B (en) | Hypersensitive displacement sensing method and device based on local spin characteristic | |
| Neugebauer et al. | Magnetic and electric transverse spin density of spatially confined light | |
| Banzer et al. | The photonic wheel: demonstration of a state of light with purely transverse angular momentum | |
| Araneda et al. | Wavelength-scale errors in optical localization due to spin–orbit coupling of light | |
| Lin et al. | The effects of polarization of the incident light-modeling and analysis of a SPR multimode optical fiber sensor | |
| Nugent et al. | A phase odyssey | |
| JP4223769B2 (en) | measuring device | |
| Failla et al. | Orientational imaging of subwavelength Au particles with higher order laser modes | |
| Shi et al. | Spin photonics: from transverse spin to photonic skyrmions | |
| CN105891744A (en) | Spatially resolved magneto-optic Kerr effect measurement device | |
| CN109490278A (en) | The rotary SPR of triangle microprism tests optical chip | |
| Shi et al. | Optical near-field measurement for spin-orbit interaction of light | |
| CN102621071B (en) | Differential interference phase detecting method and device of vector beam excitation surface plasma | |
| CN114324247B (en) | Optical measurement method for double-channel detection based on quantum weak measurement and application thereof | |
| Masajada et al. | Optical vortex dynamics induced by vortex lens shift—optical system error analysis | |
| CN109490279A (en) | The rotary SPR sensorgram chip of D-shaped microtrabeculae mirror | |
| US20210223165A1 (en) | Ultrasensitive displacement sensing method and device based on local spin characteristics | |
| JP5914903B2 (en) | Magneto-optical effect measuring device | |
| Popiołek-Masajada et al. | Phase recovery with the optical vortex microscope | |
| Sun et al. | Imaging to single virus by using surface plasmon polariton scattering | |
| Nechayev et al. | Shaping field gradients for nanolocalization | |
| Moore | Visualizing the invisible: imaging techniques for the structural biologist | |
| Qiu et al. | Simultaneous light spin and orbital angular momentum detection using orthogonal nanoslit pairs in semi-ring array | |
| Forbes et al. | Customized optical chirality of vortex structured light through state and degree-of-polarization control | |
| WO2007020272A2 (en) | Microscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |