CN107931078A - A kind of online real-time ultrasound cleaning device of underwater lens based on MEMS ultrasound transducer arrays - Google Patents
A kind of online real-time ultrasound cleaning device of underwater lens based on MEMS ultrasound transducer arrays Download PDFInfo
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- CN107931078A CN107931078A CN201710984973.7A CN201710984973A CN107931078A CN 107931078 A CN107931078 A CN 107931078A CN 201710984973 A CN201710984973 A CN 201710984973A CN 107931078 A CN107931078 A CN 107931078A
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- mems
- ultrasound transducer
- transducer arrays
- circular base
- module
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- 238000002604 ultrasonography Methods 0.000 title claims abstract description 72
- 238000003491 array Methods 0.000 title claims abstract description 45
- 238000004140 cleaning Methods 0.000 title claims abstract description 25
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims description 17
- 239000003292 glue Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 238000005265 energy consumption Methods 0.000 abstract description 6
- 230000008859 change Effects 0.000 abstract description 5
- 238000005406 washing Methods 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000003373 anti-fouling effect Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000005202 decontamination Methods 0.000 description 2
- 230000003588 decontaminative effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000013535 sea water Substances 0.000 description 2
- 230000026683 transduction Effects 0.000 description 2
- 238000010361 transduction Methods 0.000 description 2
- 206010040844 Skin exfoliation Diseases 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000004078 waterproofing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0625—Annular array
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/74—Underwater
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Studio Devices (AREA)
Abstract
The invention discloses a kind of online real-time ultrasound cleaning device of the ocean underwater lens based on MEMS ultrasound transducer arrays.Ultrasonic cleaning equipment is small using size, the MEMS ultrasound transducer arrays for consuming energy low and easy of integration, multiple ultrasound transducer array modules can be arranged on circular base by uniform circular, transducer array mould each transducer unit in the block can work independently, it can realize and ocean underwater lens are carried out with online real-time or fixed time cleaning, and any working status of transducer unit and the work number of transducer array module in ultrasound transducer array can be controlled according to actual conditions, so as to change the radiating surface of ultrasonic cleaning, energy consumption can also be saved while high-efficiency washing.
Description
Technical field
The present invention relates to a kind of ultrasonic cleaning equipment for being based on micro electronmechanical (MEMS) ultrasound transducer array, more particularly to
The online real-time ultrasound cleaning device of the undersea surveillance equipment camera lens such as ocean Underwater Camera.
Background technology
Detection and research to ocean are both to develop the needs of national marine economy, while are also to protect ocean, realization can
The undersea surveillance such as the basis of sustainable development, Underwater Camera equipment is focused in ocean underwater operation with being played in scientific research of seas
The effect wanted.Then due to marine biofouling, the surface for any object being put into seawater will soon be by one layer of biomembrane
Covered, equipment can influenced just by being attached to the biomembrane of the sensitive component surfaces of other supervision equipments such as Underwater Camera camera lens
Often use.
Effective anti-pollution measure is the guarantee that undersea surveillance equipment can work normally, and anti-fouling method main at present can be with
It is divided into the antifouling method of physics, chemical preservation method and bioantifouling method, latter two method is due to using chemical-biological coating, to ocean ring
Border can cause a degree of pollution.Ultrasonic cleaning in physics anti-fouling method is to vibrate production in water using ultrasonic device
Raw cavitation effect, forms a series of micro-bubbles, bubbles burst impacted object surface, achievees the purpose that part is washed in cleaning.Ultrasound
Ripple cleaning is a kind of anti-pollution measure of clean and effective, but current ultrasonic cleaning equipment size is bigger, and energy consumption is high, it is impossible to will
It is integrated on Underwater Camera cleans camera lens in real time.In order to enable this kind of supervision equipment of Underwater Camera normal
Work, can only be recovered to the enterprising pedestrian of the water surface and be carried out for cleaning, or using robot dive to monitor position
Cleaning, seriously hinders the progress of ocean underwater operation and scientific research, while also considerably increase the maintenance cost of equipment.
According to large-scale use of the current Underwater Camera in ocean development and there is presently no a kind of effective
Anti-fouling method, it is necessary to provide a kind of for the simple, efficient while opposite of the undersea surveillance equipment camera lens such as Underwater Camera
Economic antifouling decontamination plant.
The content of the invention
The present invention provides a kind of online real-time ultrasound cleaning of ocean underwater lens based on MEMS ultrasound transducer arrays
Device, it is therefore an objective to solve the problems, such as the decontamination of the undersea surveillance equipment camera lens such as current Underwater Camera, equipment can be existed for a long time
Underwater normal work.
The online real-time ultrasound cleaning device of underwater lens of the present invention is used with size is small, energy consumption is low and is easily integrated
The advantages that MEMS ultrasound transducer arrays as main operation element, MEMS ultrasonic transducers can be that MEMS piezoelectric types surpass
Sonic transducer or MEMS capacitive ultrasonic transducer, each transducer unit can work independently, the array of transducer
Form can be with circular array, annular array or rectangular array.
Concrete technical scheme of the present invention is as follows：
The online real-time ultrasound cleaning device of underwater lens based on MEMS ultrasound transducer arrays, it include circular base,
MEMS ultrasound transducer arrays module, cover board, annular sealing cover and control drive circuit module, circular base is used for will be clear
Cleaning device is fixed on undersea surveillance equipment camera lens；Circular base circumferentially offers several through holes, and MEMS is provided with through hole
Ultrasound transducer array module, the MEMS ultrasonic transductions arranged in array format are integrated with MEMS ultrasound transducer array modules
Device, the acoustic radiation directions of MEMS ultrasonic transducers is towards camera lens to be cleaned；The through hole is located at circular base outer surface side
Sealing is fixed by cover board；The through hole external rings of circular base circumferential direction around being fixed with annular sealing cover, for through hole into
Row secondary waterproof seals；MEMS ultrasound transducer arrays module is connected with control drive circuit module, MEMS ultrasonic transducer battle arrays
Row module is integrated on circular base.
Preferably, the MEMS ultrasonic transducers change for MEMS piezoelectric type ultrasonic transducers or MEMS capacitive ultrasound
Can device.
Preferably, the ultrasonic cleaning equipment is connected common power source with undersea surveillance equipment.
Preferably, the through hole and the MEMS ultrasound transducer arrays module are towards circular base inner surface side
Between sealing fixation carried out by marine glue.
Preferably, signal line three-way hole is offered on cover board and circular base, MEMS ultrasound transducer array modules
Signal wire is connected after passing through signal line three-way hole with control drive circuit module.
Preferably, to be located at circular base outer surface side rectangular for the through hole, positioned at circular base inner surface one
Side is rounded.
Preferably, the cover board bottom hollow out, MEMS ultrasound transducer array modules are installed in the hollow out position,
Both are coordinated with clearance fit or transition.
Preferably, the array format of the MEMS ultrasonic transducers for circular array, annular array, rectangular array or
At least one of other regular arrays.
The work that the present invention can control any transducer unit in MEMS ultrasound transducer arrays according to being actually needed
Make state and control the work number of transducer array module, so as to change the radiating surface of ultrasonic cleaning, underwater lens are carried out
It is online in real time or timing cleaning, high-efficiency washing while can also save energy consumption.Package unit is simple in structure, reliable operation,
It is adapted to work in the environment of high hydraulic pressure in the sea.
Brief description of the drawings
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with attached drawing, to the present invention into one
Step explanation, wherein：
Fig. 1 is the structure diagram of the present invention.
Fig. 2 is the partial enlarged view in region I in Fig. 1.
In figure：1. circular base, 2.MEMS ultrasound transducer array modules, 3. cover boards, 4. annular sealing covers, 5. controls are driven
Dynamic circuit module, 6. undersea surveillance equipment camera lenses, the signal line three-way hole on A. circular bases, the signal line three-way hole on B. cover boards.
Embodiment
The present invention is further elaborated and illustrated with reference to the accompanying drawings and detailed description.Each implementation in the present invention
The technical characteristic of mode can carry out respective combination on the premise of not colliding with each other.
As illustrated in fig. 1 and 2, a kind of ocean underwater lens based on MEMS ultrasound transducer arrays of the present embodiment are real online
When ultrasonic cleaning equipment, including circular base 1, MEMS ultrasound transducer arrays module 2, cover board 3, annular sealing cover 4, control drive
Dynamic circuit module 5.Package unit is fixed on undersea surveillance equipment camera lens 6 by circular base 1, compact-sized.Annular
Pedestal 1 is circumferential to offer several through holes, and MEMS ultrasound transducer arrays module 2, MEMS ultrasonic transducers are provided with through hole
The MEMS ultrasonic transducers arranged in array format are integrated with array module 2.In order to realize the cleaning to camera lens, MEMS ultrasounds
The acoustic radiation direction (direction of transmitting ultrasonic wave) of transducer need to be towards camera lens to be cleaned, i.e., to 1 center position spoke of circular base
Penetrate ultrasonic wave.
Transducer array module uses cover board 3 and the double-deck fixing seal of annular sealing cover 4, and MEMS is installed on circular base 1
The cross sectional shape at the through hole both ends of ultrasound transducer array module 2 is different, and it is rectangular that it is located at 1 outer surface side of circular base,
It is rounded positioned at 1 inner surface side of circular base.Cover board 3 also uses the rectangle to match with through hole, and inner surface hollow out, MEMS
In the hollow out position, both are coordinated the floor installation of ultrasound transducer array module 2 with clearance fit or transition.Cover board is close
Conjunction is fixed on through hole and is located at circular base outer surface side, and each MEMS ultrasound transducer arrays module 2 utilizes its base and lid
The unilateral breasting of radial direction is formed between plate 3.The base round diameter of MEMS ultrasound transducer arrays module 2 is slightly less than circular base
The round diameter of 1 through hole, module strengthen fixed and sealing effect at edge towards 1 inner surface side of circular base using marine glue
Fruit.Ultrasound transducer array module cover 3 itself relies on the rectangle part in 1 through hole of circular base to fix, so as to limit
MEMS ultrasound transducer arrays module 2 is in tangential movement.It is fastened around on this basis using annular sealing cover 4 outside through hole
Portion, can use seal washer or marine glue to carry out water-proofing treatment between annular sealing cover 4 and circular base 1, by this two
Secondary fixing seal, sealing effect is good, is adapted to work in the environment of high hydraulic pressure in the sea.
For cover board 3 with offering signal line three-way hole on circular base 1, MEMS ultrasound transducer arrays module 2 is integrated in ring
On shape pedestal.Control drive circuit module 5 is fixed on above circular base 1, shares power supply with undersea surveillance equipment, and pass through ring
The signal line three-way hole B on signal line three-way hole A and cover board on shape pedestal is connected with MEMS ultrasound transducer arrays module 2.Control
Drive circuit module 5 processed can use the ultrasonic transducer driving circuit that matches with MEMS ultrasound transducer arrays module 2, and one
As mainly include processor, ultrasonic signal driver and ultrasonic power amplifier.Control drive circuit module 5 can be adopted
With the module that transducer producer is prewired or recommends, the various drive modules reported in the prior art, its particular type can also be used
Number and the mode of connection it is unlimited, as long as the control of MEMS ultrasonic transducers can be realized.
MEMS ultrasound transducer arrays module 2 is fixed close using ultrasound transducer array module cover 3 and annular sealing cover 4
It is enclosed on circular base 1, MEMS ultrasonic transducers are the elementary cells for forming MEMS ultrasound transducer array modules, it can be
MEMS piezoelectric type ultrasonic transducers or MEMS capacitive ultrasonic transducer, device are based on MEMS micro fabrications, performance
Steady operation is reliable.
MEMS ultrasound transducer arrays module by MEMS ultrasound transducer arrays, array format can be circular array,
Annular array or rectangular array and other regular arrays, device size after array is small, simple in structure, energy consumption is low and is easy to
It is integrated.The effect mould of MEMS ultrasonic transducers directly contacts seawater by through hole circle side and plays a role.MEMS ultrasonic transductions
The signal of device picks out the upper surface of cover board from top electrode, then transfers out, the letter of each MEMS ultrasound transducer arrays module
Number connect together, finally uniformly pass to control drive circuit module 5.
When have camera lens is cleaned when needing, control drive circuit module 5 can produce corresponding drive signal, drive
MEMS ultrasound transducer arrays module 2 carries out ultrasonic vibration, and produces cavitation effect in water, by the biomembrane on camera lens surface
With other dirty peelings so that achieve the purpose that to underwater lens carry out clean in real time online.It can be controlled according to being actually needed
The work of the working status of any transducer unit and control transducer array module 2 in MEMS ultrasound transducer arrays module 2
Number, so as to change the radiating surface of ultrasonic cleaning, high-efficiency washing undersea surveillance equipment camera lens 6 whiles, can also save energy consumption.
The device of the invention is simple in structure, stable work in work, the camera lens of underwater monitor can be carried out online real-time
Or the cleaning of timing, it can be worked normally for a long time in water.
Embodiment described above is a kind of preferable scheme of the present invention, and so it is not intended to limiting the invention.Have
The those of ordinary skill of technical field is closed, without departing from the spirit and scope of the present invention, various changes can also be made
Change and modification.Therefore the technical solution that all modes for taking equivalent substitution or equivalent transformation are obtained, all falls within the guarantor of the present invention
In the range of shield.
Claims (8)
- A kind of 1. online real-time ultrasound cleaning device of underwater lens based on MEMS ultrasound transducer arrays, it is characterised in that bag Include circular base (1), MEMS ultrasound transducer arrays module (2), cover board (3), annular sealing cover (4) and control drive circuit Module (5), circular base (1) are used to cleaning device being fixed on undersea surveillance equipment camera lens；Circular base (1) circumferentially opens up There are several through holes, MEMS ultrasound transducer arrays module (2), MEMS ultrasound transducer arrays module (2) are installed in through hole In be integrated with the MEMS ultrasonic transducers arranged in array format, the acoustic radiation directions of MEMS ultrasonic transducers is towards mirror to be cleaned Head；The through hole is located at circular base (1) outer surface side and sealing is fixed by cover board (3)；Circular base (1) is circumferential Through hole external rings around being fixed with annular sealing cover (4), for carrying out secondary waterproof sealing to through hole；MEMS ultrasonic transducer battle arrays Row module (2) is connected with control drive circuit module (5), and MEMS ultrasound transducer arrays module (2) is integrated on circular base.
- 2. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, the MEMS ultrasonic transducers are MEMS piezoelectric type ultrasonic transducers or MEMS capacitive ultrasonic transducer.
- 3. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, the ultrasonic cleaning equipment is connected common power source with undersea surveillance equipment.
- 4. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, the through hole and the MEMS ultrasound transducer arrays module (2) are towards circular base (1) inner surface side Between sealing fixation carried out by marine glue.
- 5. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, cover board (3) on circular base (1) with offering signal line three-way hole, MEMS ultrasound transducer arrays module (2) Signal wire pass through signal line three-way hole after with control drive circuit module (5) be connected.
- 6. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, to be located at circular base (1) outer surface side rectangular for the through hole, positioned at circular base (1) inner surface one Side is rounded.
- 7. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, cover board (3) bottom hollow out, MEMS ultrasound transducer arrays module (2) are installed in the hollow out position, Both are coordinated with clearance fit or transition.
- 8. the online real-time ultrasound cleaning device of underwater lens as claimed in claim 1 based on MEMS ultrasound transducer arrays, It is characterized in that, the array format of the MEMS ultrasonic transducers is circular array, annular array, rectangular array or other rule Then at least one of array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710984973.7A CN107931078B (en) | 2017-10-20 | 2017-10-20 | Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710984973.7A CN107931078B (en) | 2017-10-20 | 2017-10-20 | Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107931078A true CN107931078A (en) | 2018-04-20 |
| CN107931078B CN107931078B (en) | 2022-10-21 |
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|---|---|---|---|
| CN201710984973.7A Active CN107931078B (en) | 2017-10-20 | 2017-10-20 | Online real-time ultrasonic cleaning device of camera lens under water based on MEMS ultrasonic transducer array |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110216109A (en) * | 2019-04-17 | 2019-09-10 | 山东科技大学 | A kind of device using bubble cavitation corrosion cleaning marine biofouling |
| CN111167792A (en) * | 2020-01-10 | 2020-05-19 | 淮阴工学院 | Automatic cleaning device for Bernoulli experimental equipment |
| CN113247221A (en) * | 2021-07-07 | 2021-08-13 | 深之蓝海洋科技股份有限公司 | Underwater robot and lens decontamination method thereof |
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| CN107931078B (en) | 2022-10-21 |
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