CN107923736A - Three-dimensional measuring apparatus - Google Patents
Three-dimensional measuring apparatus Download PDFInfo
- Publication number
- CN107923736A CN107923736A CN201680046181.9A CN201680046181A CN107923736A CN 107923736 A CN107923736 A CN 107923736A CN 201680046181 A CN201680046181 A CN 201680046181A CN 107923736 A CN107923736 A CN 107923736A
- Authority
- CN
- China
- Prior art keywords
- shooting
- candy strip
- grating
- light
- light intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
Abstract
Three-dimensional measuring apparatus is provided, when carrying out three-dimensional measurement using phase shift method, measurement accuracy can be significantly increased.Base board checking device (1) includes：Lighting device (4), the candy strip predetermined from the surface projection of oblique direction printed base plate (2)；Camera (5), shoots the part for having projected candy strip on printed base plate (2)；Control device (6), implements the various controls in base board checking device (1) and image procossing, calculation process.Also, the candy strip on mobile projector to printed base plate (2), and shoot the candy strip of the movement several times, for each pixel by the added luminance of each pixel of a series of view data of the shooting, calculates its average value.
Description
Technical field
It the present invention relates to the use of the three-dimensional measuring apparatus that phase shift method carries out three-dimensional measurement.
Background technology
In general, it is first, pre- on printed base plate is configured in the case of electronic unit being installed on printed base plate
Cream solder is printed on fixed electrode pattern.Then, the viscosity based on the cream solder fixes electronics temporarily on printed base plate
Component.Afterwards, the printed base plate is imported into reflow ovens, by being welded by predetermined reflow process.Recently, led
Enter the previous stage of reflow ovens, it is necessary to check the printing state of cream solder, use three-dimensional measurement sometimes when carrying out the inspection
Device.
In recent years it has been proposed that the various contactless three-dimensional measuring apparatus using light.It is known that have using phase shift method
Three-dimensional measuring apparatus.
In the three-dimensional measuring apparatus using phase shift method, predetermined bar is projected to measured object by predetermined projecting cell
Line pattern.Projecting cell possesses the light source for sending predetermined light and the grating that the light from the light source is transformed to candy strip
And form.
Above-mentioned grating is configured to the composition being alternately arranged as the transmittance section through light with the light shielding part for covering light.
Also, the striped projected on measured object is shot in the shooting unit of the surface of measured object using configuration
Pattern.As shooting unit, CCD camera being made of lens and capturing element etc. etc. is used.
Here, it is in the past known to have following technology：By with the wavy luminous intensity point of the rectangle via above-mentioned raster transform
The candy strip of cloth staggers focus projection to measured object, is thus projected as the bar graph with sinuous light intensity distributions
Case (referring for example to patent document 1).
Under above-mentioned composition, by shooting unit shooting view data on each pixel light intensity (brightness) I by
Following formula (U1) provides.
Wherein, f：Gain, e：Offset,The phase of candy strip.
Then, above-mentioned grating is carried out moving control, makes the phase of candy strip for example with 4 stages Change, introduce has intensity distribution I corresponding with these successively0、I1、I2、I3Image
Data, phase is obtained based on following formula (U2)
Use the phasePrinciple based on triangulation can obtain the height in each coordinate (X, Y) on measured object
(Z)。
Citation
Patent document
Patent document 1：Japanese Patent Laid-Open 2007-85862 publications.
The content of the invention
Problem to be solved by the invention
But it is different from the situation of focusing, it is desired state that the focus misalignment of candy strip is maintained management
Very difficult, the light intensity distributions (waveform) for projecting to candy strip on determinand are easily in disorder, it is possible to will not become just
The wavy light intensity distributions of string.
In addition, the focus misalignment of candy strip also can be different according to the relative position relation from measured object, because
This with the relative position relation of measured object once change, then the light intensity distributions (waveform) of candy strip be able to may also be sent out
Changing.
Further, due to focus projection of staggering, projected fringe pattern can not be also carried out using telecentric optical system.
As a result, worry that the measurement accuracy in three-dimensional measurement declines.
In addition, the above problem is not limited to the elevation carrection of the cream solder printed on printed base plate etc., in others three
It is also existing for tieing up in the field of measuring device.
The present invention is to complete in view of the foregoing, and its purpose is to provide when carrying out three-dimensional measurement using phase shift method
The three-dimensional measuring apparatus of measurement accuracy can be significantly increased.
The means used to solve the problem
Hereinafter, on suitable for solve the above problems each technical solution subitem illustrate.In addition, as needed to corresponding
Technical solution be attached distinctive action effect.
A kind of 1. three-dimensional measuring apparatus of technical solution, it is characterised in that including：
Projecting cell, the projecting cell are pre- with sending the light source of predetermined light, being transformed to the light from the light source
The grating of fixed candy strip and the driving unit that the grating can be moved, and can be by the stripe pattern projection to quilt
Measure thing (such as printed base plate)；
Shooting unit, the shooting unit can shoot the measured object for having projected the candy strip；
Image acquisition unit, described image acquiring unit control the projecting cell and the shooting unit, can obtain
The different multiple images data of light intensity distributions；And
Image processing unit, described image processing unit can be based on the multiple images obtained by described image acquiring unit
Data perform the three-dimensional measurement of the measured object by phase shift method,
Described image acquiring unit
After a view data in obtaining described multiple images data,
The mobile processing of the mobile grating is performed, also,
The shooting for being continuously shot (exposure) is performed in the scheduled period least partially overlapped with the mobile period of the grating
Processing,
Alternatively,
Perform and shot several times (exposure) in the scheduled period least partially overlapped with the mobile period of the grating
Shooting processing, and perform and be added for each pixel or average shooting result (each pixel for the multiple images data being taken
Brightness value) processing.
According to above-mentioned technical proposal 1, the predetermined candy strip of mobile projector to measured object (such as it is wavy with rectangle
Light intensity distributions candy strip), and the candy strip of the movement is continuously shot or shoots several times, for each pixel phase
Add or the average shooting result.
Thus, phase shift method is utilized to carry out the different multiple images data of the required light intensity distributions of three-dimensional measurement in acquisition
In a view data after, compared with the situation for only projecting predetermined candy strip and shooting, can obtain with more connecing
The view data of the nearly preferably light intensity distributions of sine wave.
Here, " sinusoidal wave shape " refers to " being in the shape of sine wave ", in the case where being referred to simply as " sinusoidal wave shape ", not only
Refer to preferable " sine wave ", further include and be similar to the waveform of " sine wave " (on others such as " rectangular waves " described later " non-just
String ripple " is also the same).
In addition, above-mentioned " predetermined candy strip " is also comprising " candy strip with sinuous light intensity distributions ".
That is, candy strip of the projection with nonideal " sine wave ", the light intensity distributions for being similar to sine wave can also be configured to, obtained
Take the view data with the light intensity distributions closer to preferable sine wave.
According to the technical program, the projected fringe pattern in the state of focusing, can also obtain with sinusoidal wave shape
Light intensity distributions view data.By can in the state of focusing projected fringe pattern, easily maintain candy strip
Light intensity distributions (waveform).Also, telecentric optical system can be also used to carry out the projection of candy strip.
As a result, when carrying out three-dimensional measurement using phase shift method, measurement accuracy can be significantly increased.
In addition, the shift action of the grating in above-mentioned " mobile processing " can be the continuous action of grating continuous moving,
It can be grating intermittent movement (mobile scheduled volume) intermitten.
In addition, perform it is above-mentioned " be continuously shot in the scheduled period least partially overlapped with the mobile period of grating (or
Shot several times) shooting processing " be also contained in and start shooting processing under the halted state before the mobile beginning of grating
Terminate situation of shooting processing etc. in situation and halted state after the mobile stopping of grating.Thus, for example, it is configured to
After starting shooting processing under the halted state of grating, start the movement of grating, terminate after the mobile stopping of the grating
The shooting is handled.
Three-dimensional measuring apparatus of the technical solution 2. as described in technical solution 1, it is characterised in that in the movement with the grating
The beginning of processing starts the shooting processing at the same time or in mobile processing procedure, in the stopping of the mobile processing with the grating
Terminate the shooting processing at the same time or in mobile processing procedure.
According to above-mentioned technical proposal 2, change all the time in the position (phase) of the candy strip of scheduled period shooting.Thus,
Compared with the situation of the data comprising the candy strip partly not moved, it can obtain with the light closer to preferable sine wave
The view data of intensity distribution.As a result measurement accuracy can be further improved.
Three-dimensional measuring apparatus of the technical solution 3. as described in technical solution 1 or 2, it is characterised in that the predetermined striped
Pattern is the candy strip for the light intensity distributions for having non-sine wavy.
In addition, above-mentioned " non-sinusoidal waveform " such as referring to " rectangular wave ", " trapezoidal wave ", " triangular wave ", " sawtooth waveforms " it is non-" just
The pre- standing wave of string ripple ".
In general, go forward side by side with projecting the candy strip of the light intensity distributions with non-sine wavy (such as rectangle is wavy)
Row three-dimensional measurement is compared, and three-dimensional measurement, measurement essence are carried out for projecting the candy strip with sinuous light intensity distributions
Spend.
But as described above, by candy strip of the projecting cell generation with sinuous light intensity distributions very
It is difficult, it is possible to form machinery and complicate.
In this respect, according to the technical program 3, it will not form the machinery of projecting cell and complicate, projecting to have is not
The candy strip of the light intensity distributions of the non-sine wavy (such as rectangle is wavy) of sine wave, and can be by fairly simple
The acquisition such as control process and calculation process has the view data of sinuous light intensity distributions.As a result, it is possible to suppress machinery
The complication of composition, and then suppress manufacture cost.
Three-dimensional measuring apparatus of the technical solution 4. as described in any of technical solution 1 to 3, it is characterised in that the light
Grid are that the configuration being alternately arranged through the transmittance section of light with the light shielding part for covering light is formed.
According to above-mentioned technical proposal 4, the action effect identical with above-mentioned technical proposal 3 is played.By using this technology side
The grating of two values as case, can project at least (hereinafter referred to as " bright with brightness maximum and constant flat valley point
Portion ") and brightness minimum and constant flat valley point (hereinafter referred to as " dark portion ") light intensity distributions candy strip.That is,
It can project with rectangle is wavy or the candy strip of trapezoidal wavy light intensity distributions.
In general, the light for passing through grating is not complete directional light, since the diffraction of transmittance section and the boundary portion of light shielding part is made
With etc., the boundary portion in " the bright portion " and " dark portion " of candy strip can produce mid gray regions, therefore will not become complete
Rectangular wave.
Here, configuration space of the transmittance section in grating and light shielding part etc. is formed and different, but in " bright portion " and
In the case that the luminance gradients of the mid gray regions of the boundary portion of " dark portion " is precipitous, become with rectangle wavy luminous intensity point
The candy strip of cloth, in the case where the luminance gradient of mid gray regions relaxes, becomes with trapezoidal wavy luminous intensity point
The candy strip of cloth.
Three-dimensional measuring apparatus of the technical solution 5. as described in any of technical solution 1 to 4, it is characterised in that the quilt
Measurement thing is the printed base plate either wafer substrate formed with solder bump for being printed with cream solder.
According to above-mentioned technical proposal 5, it can carry out being printed onto the cream solder of printed base plate or be formed at wafer substrate
The elevation carrection of solder bump etc..And then in the inspection of cream solder or solder bump, its measured value can be based on and carried out
The quality judgement of cream solder or solder bump.Therefore, in the inspection, above-mentioned each technical solution effect is played the role of
Fruit, can accurately carry out fine or not judgement.As a result, it is possible to improve solder printing check device or solder bump check device
Check precision.
Brief description of the drawings
Fig. 1 is the brief composition figure for schematically showing base board checking device.
Fig. 2 is the block diagram electrically formed for representing base board checking device.
Fig. 3 is the figure for the form for schematically showing the candy strip projected on printed base plate.
Fig. 4 is the sequence diagram acted for illustrating the processing of camera and lighting device.
Fig. 5 is represented in the first simulation often by scheduled time capturing element in X-direction (coordinate X1~X8)
The table of light intensity distributions.
Fig. 6 is represented in the first simulation often by scheduled time capturing element in X-direction (coordinate X9~X16)
The table of light intensity distributions.
Fig. 7 is represented in the first simulation often by scheduled time capturing element in X-direction (coordinate X17~X24)
Light intensity distributions table.
Fig. 8 is represented in the first simulation often by scheduled time capturing element in X-direction (coordinate X25~X32)
Light intensity distributions table.
Fig. 9 is represented in the first simulation often by scheduled time capturing element in X-direction (coordinate X33~X36)
Light intensity distributions table.
Figure 10 is the table related with the first simulation, and (a) represents capturing element in X-direction (coordinate X1~X10)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 11 is the table related with the first simulation, and (a) represents capturing element in X-direction (coordinate X11~X20)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 12 is the table related with the first simulation, and (a) represents capturing element in X-direction (coordinate X21~X30)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 13 is the table related with the first simulation, and (a) represents capturing element in X-direction (coordinate X31~X36)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 14 is the curve map for the light intensity distributions for representing the candy strip that the first simulation is related to.
Figure 15 is the curve map for the light intensity distributions for representing the preferable sine wave shown in Figure 10~Figure 13 (a).
Figure 16 is the curve map for depicting the various average values shown in Figure 10~Figure 13 (b).
Figure 17 is the curve map for the difference for depicting various average values and ideal value shown in Figure 10~Figure 13 (c).
Figure 18 is represented in the second simulation often by scheduled time capturing element in X-direction (coordinate X1~X8)
The table of light intensity distributions.
Figure 19 is represented in the second simulation often by scheduled time capturing element in X-direction (coordinate X9~X16)
Light intensity distributions table.
Figure 20 is represented in the second simulation often by scheduled time capturing element in X-direction (coordinate X17~X24)
Light intensity distributions table.
Figure 21 is represented in the second simulation often by scheduled time capturing element in X-direction (coordinate X25~X32)
Light intensity distributions table.
Figure 22 is represented in the second simulation often by scheduled time capturing element in X-direction (coordinate X33~X36)
Light intensity distributions table.
Figure 23 is the table related with the second simulation, and (a) represents capturing element in X-direction (coordinate X1~X10)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 24 is the table related with the second simulation, and (a) represents capturing element in X-direction (coordinate X11~X20)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 25 is the table related with the second simulation, and (a) represents capturing element in X-direction (coordinate X21~X30)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 26 is the table related with the second simulation, and (a) represents capturing element in X-direction (coordinate X31~X36)
The table of the light intensity distributions of preferable sine wave, (b) is the table for the various average values for representing the brightness value in each pixel, and (c) is
Represent the table of ideal value and the difference of various average values.
Figure 27 is the curve map for the light intensity distributions for representing the candy strip that the second simulation is related to.
Figure 28 is the curve map for the light intensity distributions for representing the preferable sine wave shown in Figure 23~Figure 26 (a).
Figure 29 is the curve map for depicting the various average values shown in Figure 23~Figure 26 (b).
Figure 30 is the curve map for the difference for depicting various average values and ideal value shown in Figure 23~Figure 26 (c).
(a) of Figure 31~(d) is that the processing for illustrating camera and lighting device in other embodiments acts
Sequence diagram.
Embodiment
Hereinafter, it is explained with reference to an embodiment.Fig. 1 is to schematically show three possessed in present embodiment
Tie up the brief of the base board checking device 1 of measuring device and form figure.As shown in the drawing, base board checking device 1 includes：Mounting table 3, is used
In placing the printed base plate 2 as measured object, the cream solder K (references as measurement object are printed with printed base plate 2
Fig. 3)；As the lighting device 4 of projecting cell, the candy strip (striped predetermined from the surface projection of oblique direction printed base plate 2
The light pattern of shape)；As the camera 5 of shooting unit, for shooting the part for having projected candy strip on printed base plate 2；With
And the various controls in the base board checking device 1 such as control device 6, the drive control for implementing lighting device 4 and camera 5 and figure
As processing, calculation process.Control device 6 forms the image acquisition unit and image processing unit in present embodiment.
Motor 15,16 is provided with mounting table 3, by by 6 drive control of the control device motor 15,16 so that put
The printed base plate 2 being placed on mounting table 3 is slided to arbitrary direction (X-direction and Y direction).
Lighting device 4 includes sending the light source 4a of predetermined light and the light from light source 4a is transformed to bar graph
The original screen panel 4b of case, by 6 drive control of control device.Here, it is directed to collector lens from the light source 4a light sent and (saves sketch map
Show), there as directional light after, be directed to projecting lens (illustration omitted) via original screen panel 4b, thrown in printed base plate 2
Shadow is candy strip.
Alternatively, it is also possible to be configured to use telecentricity in the optical system of the lighting device such as collector lens or projecting lens 4
Optical system.Its height and position when inspection area is moved of printed base plate 2 is possible to that minor variations can occur.If use telecentricity
Optical system, then will not be influenced by such change, can accurately be measured.
Original screen panel 4b become through light linear transmittance section and cover the linear light shielding part of light with light source 4a
The orthogonal predetermined direction of optical axis on the configuration that is alternately arranged form.Thereby, it is possible to have rectangular wave to the projection of printed base plate 2
The candy strip of shape or trapezoidal wavy light intensity distributions.As shown in figure 3, in the present embodiment, it is projected the direction of striped
The candy strip orthogonal and parallel with Y direction with X-direction.
In general, the light for passing through original screen panel 4b is not complete directional light, due in the boundary portion of transmittance section and light shielding part
Diffraction etc., the boundary portion in " the bright portion " and " dark portion " of candy strip can produce mid gray regions, therefore will not become
Complete rectangular wave.But in figure 3, to put it more simply, mid gray regions are eliminated, the striated pattern figure being worth with light and shade two
Candy strip is shown.
Here, configuration space of the transmittance section in original screen panel 4b and light shielding part etc. is formed and different, in " bright portion " and
In the case that the luminance gradients of mid gray regions at the boundary portion of " dark portion " is precipitous, become with the wavy luminous intensity of rectangle
The candy strip (with reference to Figure 14) of distribution, in the case where the luminance gradient of mid gray regions relaxes, becomes with trapezoidal wave
The candy strip of the light intensity distributions of shape (with reference to Figure 27).
Further, lighting device 4 possesses the driving unit such as motor for moving grating plate 4b (illustration omitted).Control dress
6 are put by being driven control to the driving unit, can carry out to the predetermined direction orthogonal with the optical axis of light source 4a with
The mobile processing of certain speed continuous moving original screen panel 4b.In a manner of being moved down by candy strip along X-direction
Project to printed base plate 2.
Camera 5 possesses lens and capturing element etc..In the present embodiment, ccd sensor is employed as capturing element.
The capturing element of present embodiment has the resolution ratio of 512 pixels for example in X-direction (horizontal direction), (hangs down in Y direction
Nogata to) on have 480 pixels resolution ratio.
Camera 5 is by 6 drive control of control device.More specifically, control device 6 is based on from being arranged at original screen panel 4b's
At the time of at the time of the signal of the encoder (illustration omitted) of driving unit obtains moving grating plate 4b and taking in image by camera 5
Synchronization while carry out shooting processing.
It is transformed to by the view data that camera 5 is shot inside the camera 5 after digital signal with the shape of digital signal
Formula is input into control device 6, and is stored in image data storage apparatus 24 described later.Also, control device 6 is based on the image
Data implement image procossing described later and calculation process etc..
Here, electric form of control device 6 is illustrated.As shown in Fig. 2, control device 6 possesses：Perform substrate inspection
Look into the overall control of device 1 CPU and input/output interface 21 (hereinafter referred to as " CPU etc. 21 "), by keyboard, mouse, touch surface
The compositions such as plate as " input unit " input unit 22, having the conduct of display picture of CRT or liquid crystal etc., " display is single
The display device 23 of member ", the image data storage apparatus 24 for storing the view data that is shot by camera 5 etc., for storing
The operation result storage device 25 of various operation results and the setting data for prestoring the various information such as design data
Storage device 26 etc..In addition, these each devices 22~26 and CPU etc. 21 is electrically connected.
Then, describe what is carried out by base board checking device 1 for each inspection area of printed base plate 2 in detail with reference to Fig. 4
Auditing routine.Fig. 4 is the sequence diagram acted for illustrating the processing of camera 5 and lighting device 4.
The auditing routine is performed by control device 6 (CPU etc. 21).In the present embodiment, distinguish for each inspection area
4 image acquisition process are carried out, thus obtain 4 groups of different view data of light intensity distributions.
The drive control motor 15,16 first of control device 6 moves printed base plate 2, by the visual field (coverage) of camera 5
Aligned with the predetermined inspection area on printed base plate 2.In addition, inspection area is using the size in the visual field of camera 5 as 1 list
Simultaneously split a region among the surface of printed base plate 2 in advance in position.
Then, 6 drive control lighting device 4 of control device, is set as the first initial setting position by the position of original screen panel 4b
(such as position of phase " 0 ° ") is put, starts the image acquisition process of first time.In addition, the initial, set position quilt of original screen panel 4b
It is set as that the phase of respectively different in the image acquisition process of 4 times candy strip in initial, set position differs 90 ° respectively
(a quarter spacing).
When starting the image acquisition process of first time, the M1 predetermined at the time of of control device 6 makes the light source of lighting device 4
4a shines, and starts the projection of candy strip, starts simultaneously at the mobile processing of original screen panel 4b.Thus, it is projected to inspection area
Candy strip is along X-direction with certain speed continuous moving.
In addition, 6 drive control camera 5 of control device, N1 starts shooting processing predetermined at the time of.But in this implementation
N1, which is carved, at the beginning of the shooting processing that M1 and camera 5 are carved in mode, at the beginning of the mobile processing of original screen panel 4b is set to phase
Together.
When shooting processing start when, during its execution in, several times carry out camera 5 shooting (exposure).More specifically
Say, whenever candy strip movement predetermined amount delta x (such as equivalent to candy strip 10 ° of phase distance) when, i.e., whenever process
During scheduled time Δ t, printed base plate 2 is shot.Here, whenever by the scheduled time Δ t when by the view data that camera 5 is shot with
When send image data storage apparatus 24 to and store.
Then, control device 6 is terminating the mobile processing of original screen panel 4b from M2 at the time of the moment, M1 was after the scheduled time,
And terminate the projection of candy strip.Also, control device 6 is terminating camera from N2 at the time of the moment, N1 was after the scheduled time
5 shooting processing.But in the present embodiment, at the shooting of the finish time M2 and camera 5 of the mobile processing of original screen panel 4b
The finish time N2 of reason is set to identical.
At the end of the shooting processing of camera 5, control device 6 is performed based on the shooting result handled by the shooting
Predetermined calculation process.More specifically, the sequence of images data shot in being handled in shooting are performed (whenever candy strip
Mobile predetermined amount delta x and the multiple images data shot) the brightness value of each pixel calculate it for each pixel phase adduction and be averaged
The average treatment of value.Thus, the view data with sinuous light intensity distributions is obtained.
Also, the view data obtained by above-mentioned average treatment is stored in operation result storage device by control device 6
25, terminate the image acquisition process of first time.
On the other hand, after image acquisition process of the control device 6 in first time terminates or the image in first time obtains
Drive control lighting device 4 in the above-mentioned average treatment implementation procedure that processing is related to is taken, the position of original screen panel 4b is set in
Two initial, set positions (such as from the first initial, set position the phase offset a quarter spacing of candy strip phase
The position of " 90 ° ").
Afterwards, control device 6 starts secondary image acquisition process.In addition, secondary image acquisition process is suitable
Sequence is identical with the image acquisition process of above-mentioned first time, therefore description is omitted (on being obtained for the third time with the 4th image
Take processing similarly).
Control device 6, which is worked as, passes through image of secondary image acquisition process acquisition with sinuous light intensity distributions
During data, operation result storage device 25 is stored in, terminates secondary image acquisition process.
Control device 6 is related to after secondary image acquisition process terminates or in secondary image acquisition process
Above-mentioned average treatment implementation procedure in drive control lighting device 4, the position of original screen panel 4b is set in the 3rd initial setting
Position (such as from the second initial, set position the phase " 180 ° " of the phase offset a quarter spacing of candy strip position
Put), start the image acquisition process of third time.
Control device 6 is when image of the image acquisition process acquisition with sinuous light intensity distributions by third time
During data, operation result storage device 25 is stored in, terminates the image acquisition process of the third time.
Control device 6 is related to after the image acquisition process of third time terminates or in the image acquisition process of third time
Above-mentioned average treatment implementation procedure in drive control lighting device 4, the position of original screen panel 4b is set in the 4th initial setting
Position (such as from the 3rd initial, set position the phase " 270 ° " of the phase offset a quarter spacing of candy strip position
Put), the image acquisition process that beginning is the 4th time.
Control device 6 is when image of the image acquisition process acquisition with sinuous light intensity distributions by the 4th time
During data, operation result storage device 25 is stored in, terminates the image acquisition process of the 4th time.
In this way, by carrying out above-mentioned four image acquisition process, four groups of different picture numbers of light intensity distributions can be obtained
According to.Thereby, it is possible to what is obtained and shoot each 90 ° of the phase change of the candy strip with sinuous light intensity distributions
The identical view data of four groups of view data.
Then, control device 6 based on the four groups of view data (brightness value of each pixel) obtained as described above by carrying on the back
The known phase shift method also illustrated in scape technology carries out three-dimensional measurement (elevation carrection), and the measurement result is stored in computing knot
Fruit storage device 25.
Then, control device 6 is based on the quality that three-dimensional measuring result (altitude information in each coordinate) carries out cream solder K
Judgement is handled.Specifically, measurement result detection of the control device 6 based on the inspection area obtained as described above is higher than datum level
Cream solder K print range, the height at each position within the range is integrated, thus calculates printed paste
The amount of solder K.
Then, control device 6 by data such as position, area, height or the amounts of cream solder K so obtained with depositing in advance
Be stored in setting data storage device 26 reference data (gerber data etc.) be compared judgement, according to the comparative result whether
In allowed band, to judge the quality of the printing state of the cream solder K in the inspection area.
During this processing is carried out, 6 drive control motor 15,16 of control device, printed base plate 2 is moved to next
A inspection area, later above-mentioned a series of processing are repeated in whole inspection areas, and it is whole thus to terminate printed base plate 2
The inspection of body.
In the following, the result of the action effect by simplation verification base board checking device 1 of the present embodiment is shown.It is first
First, the simulation (the in the case of there is the candy strip of the wavy light intensity distributions of rectangle illustrating projection with reference to Fig. 5~Figure 17
One simulation) result.
In this simulation, using 36 pixel size of X-direction of capturing element as a cycle, be projected in " bright portion " and
With rectangle wavy light intensity distributions of the boundary portion of " dark portion " there are the mid gray regions (luminance gradient) of 2 pixel sizes
Candy strip, whenever by the scheduled time Δ t when, make the candy strip in the X-axis direction move 1 pixel size (bar graph
10 ° of sizes of phase of case).
Fig. 5~Fig. 9 is the coordinate position (transverse axis of each pixel in the X-direction for represent capturing element：Coordinate X1~X36)
With with (the longitudinal axis as time goes by：Time t1~t36) candy strip to change brightness value relation table.That is, it is
The table of the light intensity distributions of capturing element in the X-axis direction when representing often to pass through the scheduled time.But it is maximum by brightness
The brightness value in " bright portion " is assumed to " 1 ", and brightness is assumed to " 0 " for the brightness value of minimum " dark portion ", is simulated.
In addition, Fig. 5~Fig. 9 only shows a cycle size (36 pixel size in the X-axis direction) of candy strip, still
The actually candy strip in continued presence multiple cycles in the X-axis direction.That is, the luminous intensity of the Range Representation of coordinate X1~X36
Distribution exists repeatedly.
As shown in Fig. 5~Fig. 9, in shooting time t1, the scope of coordinate X2~X17 is " the bright portion " of brightness value " 1 ", coordinate
The scope of X20~X35 is " dark portion " of brightness value " 0 ".In addition, in the coordinate equivalent to " bright portion " and the boundary portion of " dark portion "
X36, X1 and coordinate X18, X19 are respectively present the mid gray regions of 2 pixel sizes of brightness value gradual change.That is, shooting time t1
Candy strip light intensity distributions as the curve of Figure 14.
Also, in the shooting time t2 that have passed through scheduled time Δ t from shooting time t1, the scope of coordinate X3~X18 is
" the bright portion " of brightness value " 1 ", the scope of coordinate X21~X36 are " dark portion " of brightness value " 0 ".Further, from shooting time t2
Have passed through the shooting time t3 of scheduled time Δ t, the scope of coordinate X4~X19 is " the bright portion " of brightness value " 1 ", coordinate X22~
The scope of X1 is " dark portion " of brightness value " 0 ".
In this way, the light intensity distributions of candy strip often move 1 pixel by scheduled time Δ t to the right direction of Fig. 5~Fig. 9
Size.
Then, compared with the candy strip of the light intensity distributions with preferable sine wave and verify.Figure 10~figure
13 (a) is the coordinate position (coordinate X1~X36) for representing each pixel of capturing element in the X-axis direction and preferable sine wave
Light intensity distributions (ideal value) relation table.Here, show that cycle, amplitude and phase and having for shooting time t1 are upper
State the light intensity distributions of the identical preferable sine wave of candy strip of the wavy light intensity distributions of rectangle.The reason of shooting time t1
The sine wave thought curve as shown in figure 15 is such.
(b) of Figure 10~Figure 13 is the coordinate position (transverse axis for each pixel of capturing element in the X-axis direction：Coordinate
X1~X36) represent multiple for what is shot centered on the view data shot in shooting time t1 within the front and rear scheduled time
The table for the result (average value) that view data (brightness value of each pixel) is averaging processing.
More specifically, in (b) of Figure 10~Figure 13, in the superiors as comparative example, directly illustrate without
In the view data (brightness value of each pixel) of shooting time t1 shootings in the case of average treatment.
In the second layer from above, show at front and rear each 1 centered on shooting time t1, i.e. in shooting time t36
Average value is divided in 3 etc. of 3 view data (brightness value of each pixel) equalization of~t2 shootings.
In the third layer from above, show at front and rear each 2 centered on shooting time t1, i.e. in shooting time t35
Average value is divided in 5 etc. of 5 view data (brightness value of each pixel) equalization of~t3 shootings.
At the 4th layer from above, show at front and rear each 3 centered on shooting time t1, i.e. in shooting time t34
Average value is divided in 7 etc. of 7 view data (brightness value of each pixel) equalization of~t4 shootings.
In the layer 5 from above, show at front and rear each 4 centered on shooting time t1, i.e. in shooting time t33
Average value is divided in 9 etc. of 9 view data (brightness value of each pixel) equalization of~t5 shootings.
In the layer 6 from above, show at front and rear each 5 centered on shooting time t1, i.e. in shooting time t32
Average value is divided in 11 etc. of 11 view data (brightness value of each pixel) equalization of~t6 shootings.
In the layer 7 from above, show at front and rear each 6 centered on shooting time t1, i.e. in shooting time t31
Average value is divided in 13 etc. of 13 view data (brightness value of each pixel) equalization of~t7 shootings.
Also, if above-mentioned each average value shown in (b) of Figure 10~Figure 13 is drawn respectively, as the song shown in Figure 16
Line.
In addition, (c) of Figure 10~Figure 13 is the coordinate position (transverse axis for each pixel of capturing element in the X-axis direction：
Coordinate X1~X36) represent each average value shown in (b) of each ideal value and Figure 10~Figure 13 shown in (a) of Figure 10~Figure 13
Difference table.
More specifically, in (c) of Figure 10~Figure 13, in the superiors as comparative example, show without average
In the view data (brightness value of each pixel) of shooting time t1 shootings and the difference of each ideal value in the case of processing.
From above the second layer show above-mentioned each 3 etc. the differences for dividing average value and each ideal value.The from above the 3rd
Layer shows above-mentioned each 5 etc. the differences for dividing average value and each ideal value.From above the 4th layer show that above-mentioned each 7 decile is averaged
The difference of value and each ideal value.From above layer 5 show above-mentioned each 9 etc. the differences for dividing average value and each ideal value.From upper
Play layer 6 and show above-mentioned each 11 etc. the differences for dividing average value and each ideal value in face.From above layer 7 show it is above-mentioned each
13 etc. divide the difference of average value and each ideal value.
Also, if above-mentioned each value shown in (c) of Figure 10~Figure 13 is drawn respectively, as song as shown in figure 17
Line.In addition, the right end in Figure 13 (c) shows that each pixel (coordinate X1~X36) for capturing element in the X-axis direction is shown
Above-mentioned each average value average and each average value maximum.
Observe the right end of Figure 13 (c), Figure 16,17 etc. understand, such as divide average value to be in a ratio of 5 etc. with 3 and divide average value, and 5
Decile average value is in a ratio of 7 etc. and divides average value such, as mean number increases, the error with preferable sine wave (ideal value)
Gradually decrease, 13 etc. divide the error of average value minimum.Therefore, in this simulation, more preferably average value is divided to pass through phase using 13 etc.
Shifting method carries out three-dimensional measurement.
Then, illustrate that projection has a case that the candy strip of trapezoidal wavy light intensity distributions with reference to Figure 18~Figure 30
The result of Imitating (the second simulation).
In this simulation, using 36 pixel size of X-direction of capturing element as a cycle, be projected in " bright portion " and
The boundary portion of " dark portion " is there are the mid gray regions (luminance gradient) of 12 pixel sizes with trapezoidal wavy luminous intensity point
The candy strip of cloth, whenever by scheduled time Δ t, makes the candy strip move 1 pixel size (striped in the X-axis direction
10 ° of sizes of phase of pattern).
Figure 18~Figure 22 is the coordinate position (transverse axis for representing each pixel of capturing element in the X-axis direction：Coordinate X1~
X36) and with the (longitudinal axis as time goes by：Time t1~t36) candy strip to change brightness value relation table.
That is, it is the table that represents every light intensity distributions by capturing element during the scheduled time in the X-axis direction.It is but brightness is maximum
The brightness value in " bright portion " be assumed to " 1 ", the brightness value of " dark portion " of brightness minimum be assumed to " 0 ", simulated.
In addition, Figure 18~Figure 22 only shows a cycle size (36 pixel size in the X-axis direction) of candy strip, but
It is the actually candy strip in continued presence multiple cycles in the X-axis direction.That is, the light intensity of the Range Representation of coordinate X1~X36
Degree distribution exists repeatedly.
As shown in Figure 18~Figure 22, in shooting time t1, the scope of coordinate X7~X12 is " the bright portion " of brightness value " 1 ", is sat
The scope for marking X25~X30 is " dark portion " of brightness value " 0 ".In addition, in the coordinate equivalent to " bright portion " and the boundary portion of " dark portion "
X31~X6 and coordinate X13~X24 is respectively present the mid gray regions of 12 pixel sizes of brightness value gradual change.That is, shooting time
The light intensity distributions of the candy strip of t1 are as the curve of Figure 27.
Also, in the shooting time t2 that have passed through scheduled time Δ t from shooting time t1, the scope of coordinate X8~X13 is
" the bright portion " of brightness value " 1 ", the scope of coordinate X26~X31 are " dark portion " of brightness value " 0 ".Also, passed through from shooting time t2
The shooting time t3 of scheduled time Δ t is crossed, the scope of coordinate X9~X14 is " the bright portion " of brightness value " 1 ", coordinate X27~X32
Scope be brightness value " 0 " " dark portion ".
In this way, the light intensity distributions of candy strip are moved whenever by scheduled time Δ t to the right direction of Figure 18~Figure 22
Dynamic 1 pixel size.
Then, compared with the candy strip of the light intensity distributions with preferable sine wave and verify.Figure 23~figure
26 (a) is the coordinate position (coordinate X1~X36) for representing each pixel of capturing element in the X-axis direction and preferable sine wave
Light intensity distributions (ideal value) relation table.Here, show that cycle, amplitude and phase and having for shooting time t1 are upper
State the light intensity distributions of the identical preferable sine wave of candy strip of trapezoidal wavy light intensity distributions.The reason of shooting time t1
The sine wave thought curve as shown in figure 28 is such.
(b) of Figure 23~Figure 26 is the coordinate position (transverse axis for each pixel of capturing element in the X-axis direction：Coordinate
X1~X36) represent for multiple figures for being shot in the front and rear scheduled time centered on the view data shot in shooting time t1
As the table for the result (average value) that data (brightness value of each pixel) are averaging processing.
More specifically, in (b) of Figure 23~Figure 26, in the superiors as comparative example, directly illustrate without
In the view data (brightness value of each pixel) of shooting time t1 shootings in the case of average treatment.
The second layer is played above, show front and rear each 1 centered on shooting time t1, i.e. shooting time t36~
Average value is divided in 3 etc. of 3 view data (brightness value of each pixel) equalization of t2 shootings.
In the third layer from above, show at front and rear each 2 centered on shooting time t1, i.e. in shooting time t35
Average value is divided in 5 etc. of 5 view data (brightness value of each pixel) equalization of~t3 shootings.
At the 4th layer from above, show front and rear each 3, i.e. shooting time t34 centered on shooting time t1~
Average value is divided in 7 etc. of 7 view data (brightness value of each pixel) equalization of t4 shootings.
In the layer 5 from above, show at front and rear each 4 centered on shooting time t1, i.e. in shooting time t33
Average value is divided in 9 etc. of 9 view data (brightness value of each pixel) equalization of~t5 shootings.
Also, if above-mentioned each average value shown in (b) of Figure 23~Figure 26 is drawn respectively, as the song shown in Figure 29
Line.
In addition, (c) of Figure 23~Figure 26 is the coordinate position (transverse axis for each pixel of capturing element in the X-axis direction：
Coordinate X1~X36) represent each average value shown in (b) of each ideal value and Figure 23~Figure 26 shown in (a) of Figure 23~Figure 26
Difference table.
More specifically, in (c) of Figure 23~Figure 26, in the superiors as comparative example, show without average
In the view data (brightness value of each pixel) of shooting time t1 shootings and the difference of each ideal value in the case of processing.
From above the second layer show above-mentioned each 3 etc. the differences for dividing average value and each ideal value.The from above the 3rd
Layer shows above-mentioned each 5 etc. the differences for dividing average value and each ideal value.From above the 4th layer show that above-mentioned each 7 decile is averaged
The difference of value and each ideal value.From above layer 5 show above-mentioned each 9 etc. the differences for dividing average value and each ideal value.
Also, if above-mentioned each value shown in (c) of Figure 23~Figure 26 is drawn respectively, as the curve shown in Figure 30.
In addition, the right end in Figure 26 (c) is shown for shown in capturing element each pixel (coordinate X1~X36) in the X-axis direction
Average and each average value the maximum of above-mentioned each average value.
Observe the right end of Figure 26 (c), Figure 29,30 understand that and in the error of preferable sine wave (ideal value), 5 deciles are put down
Average is minimum.Therefore, in this simulation, more preferably average value is divided to carry out three-dimensional measurement by phase shift method using 5 etc..
But divide average value and 7 etc. to divide average value, 9 etc. to divide average value on others 3 etc., with 5 deciles in this simulation
Average value is compared, simply and ideal value difference it is slightly larger, close enough preferable sine wave, therefore even if using these into
Row three-dimensional measurement, can also carry out the good measurement of precision.
As previously discussed, according to the present embodiment, mobile projector is wavy or trapezoidal wavy with rectangle to printed base plate 2
Light intensity distributions candy strip, and the candy strip of the movement is shot several times, for each pixel by the shooting
The added luminance of each pixel of a series of view data, calculates its average value.
Thus, obtaining by the different multiple images data of the phase shift method progress required light intensity distributions of three-dimensional measurement
In 1 view data after, with only projection with rectangle is wavy or the candy strip of trapezoidal wavy light intensity distributions simultaneously
The situation of shooting is compared, and can obtain the view data with the light intensity distributions closer to preferable sine wave.
In addition, according to the present embodiment, the projected fringe pattern in the state of focusing, can also obtain with sine
The view data of wavy light intensity distributions.Due to can in the state of focusing projected fringe pattern, so as to easily maintain bar
The light intensity distributions (waveform) of line pattern.
As a result, when carrying out three-dimensional measurement using phase shift method, measurement accuracy can be significantly increased.
Further, according to the present embodiment, projection there can be non-sine in the case where not making machinery form complication
The rectangle of ripple is wavy or the candy strip of trapezoidal wavy light intensity distributions, and can by fairly simple control process and
The acquisitions such as calculation process have the view data of sinuous light intensity distributions.As a result, it is possible to suppress the complexity of machinery composition
Change, and then suppress manufacture cost.
In addition, being not limited to the contents of the above embodiment, can also for example implement as follows.Certainly, non-example below
Other application examples, the modification shown are also natural possible.
(a) in the above-described embodiment, three-dimensional measuring apparatus is embodied as printing on measurement printed base plate 2 to the cream of formation
The base board checking device 1 of the height of shape solder K, but not limited to this, such as can also be embodied as what is printed on measurement substrate
The composition of the height of the miscellaneous parts such as the electronic unit installed on solder bump, substrate.
(b) in the above-described embodiment, it is configured to obtain the first of candy strip when carrying out three-dimensional measurement by phase shift method
4 groups of view data of 90 ° of beginning phase difference, but phse conversion number and phse conversion amount not limited to this.Energy can also be used
The other phse conversion numbers and phse conversion amount of three-dimensional measurement are enough carried out by phase shift method.
For example, being configured to obtain 3 groups of view data progress three-dimensional measurement that phase differs 120 ° (or 90 °), also may be used
Three-dimensional measurement is carried out to be configured to obtain 2 groups of view data of 180 ° of difference of phase (or 90 °).
(c) in the above-described embodiment, it is configured to projection with rectangle is wavy or the bar of trapezoidal wavy light intensity distributions
Line pattern, obtains the view data with sinuous light intensity distributions.
Not limited to this, for example, can also be configured to projection have triangle it is wavy or saw-shaped is wavy wait others non-sines it is wavy
Light intensity distributions candy strip, obtain with sinuous light intensity distributions view data.Certainly, if possible
Words, can also be configured to projection with there is no the bar of the wavy light intensity distributions of the rectangle of mid gray regions (luminance gradient)
Line pattern, obtains the view data with sinuous light intensity distributions.
It is similar to (sinuous) light of sine wave with nonideal sine wave alternatively, it is also possible to be configured to projection
The candy strip of intensity distribution, obtains the view data with the light intensity distributions closer to preferable sine wave.
(d) composition of projecting cell is not limited to the lighting device 4 that the above embodiment is related to.
Such as in the above-described embodiment, light is employed as the grating that the light from light source 4a is transformed to candy strip
Screen 4b.
Not limited to this, such as can also use liquid crystal panel as grating.Liquid crystal panel shape between a pair of of transparent substrate
Into liquid crystal layer, and possess common electrode of the configuration on a transparent substrate and in a manner of opposed with its it is transparent at another
Multiple band electrodes is set up in parallel on substrate, the switch element being connected respectively with each band electrode by drive circuit pair is (thin
Film transistor etc.) on-off control is carried out, and the voltage for being applied to each band electrode is controlled, thus switch and each band electrode
The light transmission rate of corresponding each grid stroke, forms the high transmittance section of light transmission rate and the low light shielding part of light transmission rate is alternately arranged
Grating pattern.Also, can be into the mobile processing of line raster by these transmittance sections of switching control and the position of light shielding part.
Use alternatively, it is also possible to replace liquid crystal panel and used the DLP (registration mark) of digital mirroring device to be used as light
Grid.
(e) in the above-described embodiment, transmittance section is employed and the grating (original screen panel of two values that light shielding part is alternately arranged
4b), but not limited to this, such as can also be configured on original screen panel or liquid crystal panel formed more than 3 grades transmitances it is different
The grating pattern of multivalue.
(f) in the above-described embodiment, the shooting processing of M1 and camera 5 is carved at the beginning of the mobile processing of original screen panel 4b
Start time N1 is set to identical, and the shooting processing of the finish time M2 of the mobile processing of original screen panel 4b and camera 5
Finish time N2 is set to identical.
Not limited to this, as shown in Figure 31 (a), can also be configured to after the mobile beginning (start time M1) of original screen panel 4b
Start the shooting processing (start time N1) of camera 5, terminate phase before the mobile stopping (finish time M2) of original screen panel 4b
The shooting processing (finish time N2) of machine 5.
In addition, as shown in Figure 31 (b), can also be configured to open before the mobile beginning (start time M1) of original screen panel 4b
The shooting processing (start time N1) of beginning camera 5, with the mobile stopping (finish time M2) of original screen panel 4b while or before
Terminate the shooting processing (finish time N2) of camera 5.
In addition, as shown in Figure 31 (c), can also be configured to the mobile beginning (start time M1) of original screen panel 4b at the same time
Or start the shooting processing (start time N1) of camera 5 afterwards, tied afterwards in the mobile stopping (finish time M2) of original screen panel 4b
The shooting processing (finish time N2) of Shu Xiangji 5.
In addition, as shown in Figure 31 (d), can also be configured to start before the mobile beginning (start time M1) of original screen panel 4b
The shooting processing (start time N1) of camera 5, terminates the bat of camera 5 after the mobile stopping (finish time M2) of original screen panel 4b
Take the photograph processing (finish time N2).
(g) in the above-described embodiment, in each image acquisition process, be configured to by the driving units such as motor carry out with
The mobile processing of certain speed continuous moving original screen panel 4b.The driving unit of original screen panel 4b is not limited to as motor etc. continuously
The component of moving grating plate 4b, such as the intermittent movement as piezoelectric element etc. can also be used (to move) grating with scheduled volume
The component of plate 4b.
In the case where carrying out the mobile processing of original screen panel 4b by driving units such as piezoelectric elements, such as it is configured to
Mobile processing once is acted by intermittent movement once and carried out, and can also be configured to the multiple intermittent movement by scheduled volume
Action carries out.
In addition, in the above-described embodiment, it is configured to stop original screen panel 4b in image acquisition process each time, still
It can also be configured to the original screen panel 4b during four image acquisition process are carried out and be carried out continuously shift action.
(h) in the above-described embodiment, it is configured in each image acquisition process, divides in the moving process of original screen panel 4b
(exposure) is repeatedly shot, for each pixel by the added luminance of each pixel of a series of view data of the shooting,
Calculate its average value.
Not limited to this, can also be configured to omit and calculate the processing of average value, based on by each of a series of view data
The brightness value of pixel carries out three-dimensional measurement for the summarized information (view data) that each pixel is added.
Alternatively, it is also possible to be configured in each image acquisition process, bat is carried out continuously in the moving process of original screen panel 4b
(exposure) is taken the photograph, the view data based on the shooting carries out three-dimensional measurement.
In addition, in general, the light quantity (light income) that capturing element receives is more, it can more obtain being more suitable for the picture of measurement
The good image of matter, i.e. noise or quantized error influence small image.But if shooting (exposure) time length, can cause
Capturing element reaches saturated level, and image becomes so-called " over-exposed ".On the other hand, by as embodiment described above
Shooting (exposure) is repeated several times in the moving process of original screen panel 4b, by being added brightness value for each pixel, thus
The more images of light income can be obtained unsaturatedly.
On the other hand, as long as capturing element is not reaching to the scope of saturated level, then in the moving process of original screen panel 4b
The processing load for being carried out continuously shooting (exposure) is few.
(i) in the above-described embodiment, the capturing element as camera 5 employs ccd sensor, but capturing element is not
It is limited to this, such as cmos sensor etc. can also be used.
In addition, in the case where using general CCD camera etc., data transmission can not be carried out in exposure, therefore such as
In the case that the above embodiment is shot (exposure) several times in the moving process of original screen panel 4b like that, it is necessary in this phase
Between carry out data transmission (reading).
On the other hand, as camera 5 using CMOS cameras or with can data transmission in exposure function CCD camera
Deng in the case of, shooting (exposure) and data transmission can partly repeat, therefore can shorten time of measuring.
Symbol description
1 ... base board checking device, 2 ... printed base plates, 4 ... lighting devices, 4a ... light sources, 4b ... original screen panels, 5 ... cameras,
6 ... control devices, 24 ... image data memory cells.
Claims (5)
- A kind of 1. three-dimensional measuring apparatus, it is characterised in that including：Projecting cell, the projecting cell are predetermined with sending the light source of predetermined light, being transformed to the light from the light source The grating of candy strip and the driving unit that the grating can be moved, and can by the stripe pattern projection to be measured Thing；Shooting unit, the shooting unit can shoot the measured object for having projected the candy strip；Image acquisition unit, described image acquiring unit control the projecting cell and the shooting unit, can obtain light intensity Degree is distributed different multiple images data；AndImage processing unit, described image processing unit can be based on the multiple images data obtained by described image acquiring unit The three-dimensional measurement of the measured object is performed by phase shift method,Described image acquiring unitAfter a view data in obtaining described multiple images data,The mobile processing of the mobile grating is performed, also,The shooting being continuously shot is performed in the scheduled period least partially overlapped with the mobile period of the grating to handle,Alternatively,The shooting shot several times is performed in the scheduled period least partially overlapped with the mobile period of the grating to handle, And perform the processing for the addition of each pixel or the average shooting result.
- 2. three-dimensional measuring apparatus as claimed in claim 1, it is characterised in thatStart the shooting processing while the mobile processing with the grating starts or in mobile processing procedure, with Terminate the shooting processing while the mobile processing of the grating stops or in mobile processing procedure.
- 3. three-dimensional measuring apparatus as claimed in claim 1 or 2, it is characterised in thatThe predetermined candy strip is the candy strip for the light intensity distributions for having non-sine wavy.
- 4. three-dimensional measuring apparatus as claimed any one in claims 1 to 3, it is characterised in thatThe grating is that the configuration being alternately arranged through the transmittance section of light with the light shielding part for covering light is formed.
- 5. three-dimensional measuring apparatus according to any one of claims 1 to 4, it is characterised in thatThe measured object is the printed base plate either wafer substrate formed with solder bump for being printed with cream solder.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015231661A JP6062523B1 (en) | 2015-11-27 | 2015-11-27 | 3D measuring device |
| JP2015-231661 | 2015-11-27 | ||
| PCT/JP2016/070238 WO2017090268A1 (en) | 2015-11-27 | 2016-07-08 | Three-dimensional measurement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107923736A true CN107923736A (en) | 2018-04-17 |
| CN107923736B CN107923736B (en) | 2020-01-24 |
Family
ID=57800032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680046181.9A Active CN107923736B (en) | 2015-11-27 | 2016-07-08 | Three-dimensional measuring device |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP6062523B1 (en) |
| CN (1) | CN107923736B (en) |
| DE (1) | DE112016005425T5 (en) |
| MX (1) | MX366402B (en) |
| TW (1) | TWI610061B (en) |
| WO (1) | WO2017090268A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114424020A (en) * | 2019-10-28 | 2022-04-29 | 电装波动株式会社 | Three-dimensional measuring device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007113958A (en) * | 2005-10-18 | 2007-05-10 | Yamatake Corp | System, method, and program for three-dimensional measurement |
| CN101900534A (en) * | 2009-05-27 | 2010-12-01 | 株式会社高永科技 | 3-d shape measurement equipment and method for measuring three-dimensional shape |
| CN103162641A (en) * | 2011-12-15 | 2013-06-19 | Ckd株式会社 | Device for measuring three dimensional shape |
| JP2013167464A (en) * | 2012-02-14 | 2013-08-29 | Ckd Corp | Three-dimensional measurement device |
| JP2015087244A (en) * | 2013-10-30 | 2015-05-07 | キヤノン株式会社 | Image processor and image processing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4701948B2 (en) * | 2005-09-21 | 2011-06-15 | オムロン株式会社 | Pattern light irradiation device, three-dimensional shape measurement device, and pattern light irradiation method |
| CN100561258C (en) * | 2008-02-01 | 2009-11-18 | 黑龙江科技学院 | Phase-shifted grating in a kind of three-dimension measuring system |
-
2015
- 2015-11-27 JP JP2015231661A patent/JP6062523B1/en active Active
-
2016
- 2016-05-31 TW TW105116968A patent/TWI610061B/en active
- 2016-07-08 DE DE112016005425.4T patent/DE112016005425T5/en active Pending
- 2016-07-08 WO PCT/JP2016/070238 patent/WO2017090268A1/en active Application Filing
- 2016-07-08 MX MX2018001490A patent/MX366402B/en active IP Right Grant
- 2016-07-08 CN CN201680046181.9A patent/CN107923736B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007113958A (en) * | 2005-10-18 | 2007-05-10 | Yamatake Corp | System, method, and program for three-dimensional measurement |
| CN101900534A (en) * | 2009-05-27 | 2010-12-01 | 株式会社高永科技 | 3-d shape measurement equipment and method for measuring three-dimensional shape |
| CN103162641A (en) * | 2011-12-15 | 2013-06-19 | Ckd株式会社 | Device for measuring three dimensional shape |
| JP2013167464A (en) * | 2012-02-14 | 2013-08-29 | Ckd Corp | Three-dimensional measurement device |
| JP2015087244A (en) * | 2013-10-30 | 2015-05-07 | キヤノン株式会社 | Image processor and image processing method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114424020A (en) * | 2019-10-28 | 2022-04-29 | 电装波动株式会社 | Three-dimensional measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201719112A (en) | 2017-06-01 |
| WO2017090268A1 (en) | 2017-06-01 |
| JP6062523B1 (en) | 2017-01-18 |
| MX366402B (en) | 2019-07-08 |
| TWI610061B (en) | 2018-01-01 |
| MX2018001490A (en) | 2018-08-01 |
| CN107923736B (en) | 2020-01-24 |
| DE112016005425T5 (en) | 2018-08-16 |
| JP2017096866A (en) | 2017-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108139208A (en) | Three-dimensional measuring apparatus | |
| TWI582383B (en) | Three-dimensional measuring device | |
| US8896845B2 (en) | Device for measuring three dimensional shape | |
| TWI589838B (en) | Three-dimensional measuring device | |
| CN108700409B (en) | Three-dimensional measuring device | |
| JP5847568B2 (en) | 3D measuring device | |
| TWI641802B (en) | Three-dimensional measuring device | |
| JP3536097B2 (en) | Method and apparatus for measuring grating projection shape using frequency modulation grating | |
| WO2017064875A1 (en) | Device for three-dimensional measurement | |
| CN107923736A (en) | Three-dimensional measuring apparatus | |
| TWI606227B (en) | Three-dimensional measuring device | |
| JP2015102532A (en) | Three-dimensional shape measurement device | |
| CN108139206A (en) | Three-dimensional measuring apparatus | |
| CN107532889B (en) | Three-dimensional measuring device | |
| TW202117670A (en) | Apparatus for three-dimensional measurement |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |