CN107922235A

CN107922235A - It is layered glass structure

Info

Publication number: CN107922235A
Application number: CN201680048713.2A
Authority: CN
Inventors: D·L·巴特勒; M·J·德内卡; D·W·霍托夫; D·R·鲍尔斯; P·坦登
Original assignee: Corning Inc
Current assignee: Corning Inc
Priority date: 2015-08-21
Filing date: 2016-08-18
Publication date: 2018-04-17
Also published as: EP3337768A1; WO2017034904A1; JP2018531863A

Abstract

Disclosed herein is layering glass structure and manufacture method.The described method includes making soot deposit on dense glass base material to form composite construction, and the composite construction is sintered to form layering glass structure.Dense glass base material can be obtained by being modified to the fibre-optical preform comprising plane surface.Composite construction can include one or more soot layers.Layering glass structure can stack to be formed by combining multiple composite constructions, then the stacking is sintered and fused and be formed.Layering glass structure can be further heated to softening, and be drawn to control linear dimension.Layering glass structure or the layering glass structure of drawing can be configured to slab guide.

Description

It is layered glass structure

The priority of the U.S. Patent application for the Serial No. 62/207992 submitted this application claims August 21 in 2015, its Entire disclosure is totally incorporated herein by reference.

Technical field

This specification is related to the structure with multiple glassy layers.More specifically, this specification is related to by covering glass The waveguide for the core glass layer that glass layer surrounds.More specifically, this specification is related to slab guide, it has doped with dilute The core glass layer of earth elements and peripheral undoped cladding glass layer.

Background

Waveguide is widely used as the laser amplifier in optical system.Waveguide is by being encapsulated between low-refraction cladding regions High index of refraction core area form.Waveguide laser receives input laser beam and is amplified, to provide the defeated of more power Go out light beam.Amplification occurs in core area, and the core area is can to improve the gain media of input laser beam power.Core Body region generally comprises matrix, and the matrix combines the optical centre (such as rare earth element ion) for providing gain.Matrix can be with It is crystalline material or glass material, and is introduced optical centre as dopant.Crystalline material includes monocrystalline and ceramics.With generation The crystalline gain media of table includes oxide-base material (such as YAG, YVO doped with rare earth element₄), it is representative Glass gain media include oxide glass host material (such as silica or modified titanium dioxide doped with rare earth element Silicon).

Concern for superlaser recently promotes people to be directed to exploitation, and there is enough gains to provide tens of kilowatt extremely The waveguide laser of several megawatts of output powers.High-gain can be realized by the highly doped level for the optical centre for providing gain, And/or the size by scaling up gain media is realized with increasing by the optical path length of waveguide.Compared to glass Glass gain media, crystalline gain media allow generally for the doped level of higher, but are difficult to scale up size, and usually compare glass Glass gain media produces the scattering loss of higher.Optical centre as such as rare earth element ion is usually in glass gain media In there is lower dissolubility and lower doping concentration, but glass gain media is easier to put in proportion than crystalline gain media Large scale, and show lower scattering loss.

The waveguide based on crystalline gain media for being directed to exploitation for high power laser light application produces little effect, because crystallization Material is difficult to scale up size, and needs long processing time to produce large-sized crystallization medium.With large-sized glass Glass gain media is available, but sufficiently expensive in the case of using existing manufacturing technology.Manufacture is needed to be used for waveguide Glass cost effective method.

Summary of the invention

The present disclosure describes the manufacture of the glass structure with multiple glassy layers.These glass structures can be used as waveguide, and The covering of core layer and low-refraction comprising high index of refraction.In one embodiment, the waveguide is a kind of slab guide, It has the center high index of refraction core layer being positioned between low-refraction top covering and low-refraction under-clad layer.Core layer and bag Layer is the different glass of composition.Core layer can include the silica based glasses with rare earth dopant.Covering is silica Base glass.Silica based glasses include pure silicon dioxide or improved silica.Improved silica is using titanium dioxide Titanium, germanium oxide or alumina modified silica.

Technique for manufacturing glass structure is included in successive sedimentation soot on dense glass base material.Dense glass base material with Soot maker relatively moves in soot deposition process, and dense glass base material and porous cigarette are included to be formed in continuous processing The composite construction of soot layer.Porous soot layers can be made to be deposited on one or more surfaces of dense glass base material, to form tool There is the multi-layer compound structure of two or more layers.Composite construction consolidation can be made to form densification hierarchy.Densification Hierarchy may make up prefabricated component, from the prefabricated component drawing waveguide.In other embodiments, hierarchy can will be densified Fused together with existing glass entity, to increase extra layer.In another embodiment, can be to two or more A multi-layer compound structure is individually consolidated, and then fuses together them, to form densification hierarchy.Alternatively, can Two or more multi-layer compound structures are combined before consolidation and are used as with reference to fusing together, to form densification Hierarchy.

This specification extends to：

A kind of method for manufacturing layering glass structure, the described method includes：

Forming composite construction, the composite construction includes the first soot layers on the dense glass base material, and described first Soot layers have at least 100 μm of thickness；

Layering glass structure is prepared by the composite construction, described prepare includes consolidating first soot layers；And

The layering glass structure is drawn, the first soot layers of the consolidation have in the layering glass structure of the drawing There is at least 10 μm of thickness.

This specification extends to：

The first composite construction is formed, first composite construction includes the first soot on the first dense glass base material Layer, first soot layers have at least 100 μm of thickness；

The second composite construction is formed, second composite construction includes the second soot on the second dense glass base material Layer, second soot layers have at least 100 μm of thickness；

Stacked structure is formed by stacking first composite construction and second composite construction, the stacking includes First soot layers are made to be contacted with second soot layers.

This specification extends to：

Consolidate first composite construction, the consolidation includes consolidating first soot layers；

Stacked structure, the heap are formed by the first composite construction and second composite construction that stack the consolidation It is folded to include making the first soot layers of the consolidation contact with second soot layers.

This specification extends to：

Stacked structure is formed by stacking glassy layer in first soot layers.

Other features and advantages of the present invention, Partial Feature and advantage pair therein are given in the following detailed description It will be appreciated that for those skilled in the art, or by implementing institute in word description and its claims and attached drawing State embodiment and be realized.

It is to be understood that what general description and following detailed description above was all merely exemplary, for providing understanding The property of claims and the overview of feature or frame.

Appended attached drawing, which provides, to be further understood, and attached drawing is incorporated in the present specification and a part for constitution instruction. Attached drawing is the illustration to the selected aspect of this specification, the principle of its method included together with specification to this specification and Operation, product and composition explain.It is characterized in the diagram for embodiment selected by this specification shown in attached drawing, its It need not draw in appropriate proportions.

The brief description of accompanying drawing

Although this specification is made knots with claims, specifically note and clearly define described technology contents, Think to more fully understand this specification by described description in conjunction with the following drawings, wherein：

Fig. 1 is a kind of schematic diagram of slab guide.

Fig. 2 illustrates the continuous laser sintering and consolidation of composite construction.

Fig. 3 shows the size adjusting of the multilayer glass structures carried out using drawing process.

Fig. 4 illustrates a kind of fibre-optical preform.

Fig. 5 illustrates the dense glass base material with the plane surface formed by fibre-optical preform.

Fig. 6 illustrates deposition of the soot layers on the plane surface of dense glass base material.

Fig. 7 shows the laser sintered of the soot layers that are formed on the plane surface of dense glass base material.

Fig. 8 shows deposition of the soot layers on the sinter layer being formed on the plane surface of dense glass base material.

Fig. 9 shows the representative processing for the layering glass structure with the core surrounded by two coverings Program.

Figure 10 is shown by combining two composite constructions to form layering glass structure.

Figure 11 is shown by making layering glass structure be combined with composite glass structure to form layering glass structure.

Figure 12 is shown by combining two layering glass structures to form layering glass structure.

Figure 13 is shown using outside vapor deposition method to produce glassy layer.

Figure 14 is shown by composite construction or layering glass structure and the existing or glassy layer that is individually formed to be formed It is layered glass structure.

The embodiment illustrated in attached drawing is exemplary, it is no intended to limits the model of detailed description or the claims Enclose.As possible, make the same or similar feature is presented with like reference characters in the accompanying drawings.

Detailed description of the invention

In the following, the illustrative embodiments of this specification are described in detail.

This specification provides the hierarchy with core glass layer region and glass-clad region.This specification also provides For manufacturing the low-cost manufacture method of layering glass structure.These layering glass structures can be used as waveguide, amplifier and/or swash Light device.

In one embodiment, layering glass structure is configured to slab guide.Fig. 1 is exemplified with one according to this specification Kind slab guide.Slab guide 10 includes core layer 20, covering 15 and covering 25.The thickness of core layer 20 is at 5 μm to 300 μm In the range of or in the range of 10 μm to 300 μm or in the range of 25 μm to 250 μm or in 50 μm to 200 μm of scope It is interior or in the range of 75 μm to 150 μm.Each in covering 15 and covering 25 is all thicker than core layer 20.Covering 15 and bag Layer 25 thickness be at least 10 μm or at least 25 μm or at least 50 μm or at least 100 μm or at least 250 μm or At least 500 μm or at least 1mm or at least 2mm or at least 5mm or at least 10mm or at least 15mm or At least 20mm or in the range of 10 μm to 50mm or in the range of 25 μm to 40mm or in 50 μm to 30mm of scope It is interior or in the range of 100 μm to 25mm or in the range of 150 μm to 25mm or in the range of 200 μm to 25mm or In the range of 250 μm to 25mm or in the range of 500 μm to 25mm.Covering 15 and covering 25 can have identical or different Thickness.

Core layer 20 and covering 15 and covering 25 include glass material.Compared to covering 15 and covering 25, core layer 20 It is the glass material of refractive index higher.Core layer 20 and covering 15 and covering 25 can be through overdoping or undoped Glass.The glass can be by doped or undoped silica.The glass can be through overdoping or without The silica based glasses of doping.Silica based glasses include pure silicon dioxide glass, utilize one or more of oxides (such as Al₂O₃、GeO₂、Ga₂O₃、B₂O₃、P₂O₅), transition metal oxide (such as TiO₂), alkali metal oxide and alkaline earth gold Belong to the silica glass of oxide modifying and be doped with the silica glass of fluorine and/or chlorine.

Core layer 20 and covering 15 and covering 25 are different in composition.Covering 15 and covering 25 can have identical or different Composition.When planar-light guide 10 is used as laser, core layer 20 includes the glass with dopant, and forms for amplification Gain media.Glass with dopant can be the silica based glasses with dopant or the pure dioxy with dopant SiClx glass.Dopant can be luminescent metal ion, such as rare earth element ion or transition metal ions.In a kind of embodiment party In formula, core layer 20 includes the silica glass doped with rare earth element or the improved silica glass doped with rare earth element Glass, and covering 15 and covering 25 include undoped silica glass, undoped improved silica glass or doped with The silica glass of fluorine and/or chlorine.Rare earth dopant includes Yb³⁺、Er³⁺、Tm³⁺And Nd³⁺.Comprising oxide modifier (such as Al₂O₃、GeO₂、TiO₂Or Ga₂O₃) dissolubility of the rare earth dopant in silica based glasses can be improved, and higher can be passed through Rare earth element ion doping concentration obtain more high-gain.Rare earth dopant may also function as increase silica based glasses refractive index Effect, and help to reach core-cladding index contrast for realizing needed for effective waveguide.

This specification provides the batch processing for being used for manufacturing layering glass structure.The processing includes soot layers being deposited on On dense glass base material.Dense glass base material can have be layered glass structure core layer it is corresponding composition or with layering The corresponding composition of covering of glass structure.In one embodiment, dense glass base material has a plane surface, and soot Deposition occurs on the plane surface.Dense glass base material can be rectangular flat or the arbitrary shape with plane surface.

The soot for forming soot layers on dense glass base material is supplied using soot maker.In a kind of embodiment party In formula, soot maker is burner, and soot produces in the following manner：By the way that soot precursor is delivered to burner and is made Soot precursor is reacted or decomposed to form the soot particles for being deposited on dense glass base material.

The various devices and technique known in the art for being used to generate soot particles can be used.Usually by soot particles with cigarette The form of soot stream is transferred on deposition surface.Example available for the soot generating means in the various embodiments of the processing Including flame hydrolysis burner, such as those are commonly used in IVD, OVD and VAD and planar depositions known in the art processing Device.It is special that suitable burner configuration is disclosed in 6606883,5922100,6837076,6743011 and No. 6736633 U.S. In profit, disclosures of these documents is incorporated herein by reference in their entirety.

Soot maker can include single burner or multiple burners.It is l that a kind of exemplary burner, which has length, And the output surface that width is w.The output surface can include N row gases aperture, wherein, N can in the range of 1 to 20 or more Greatly.In one embodiment, each aperture includes the hole of a diameter of 0.076cm.The length l of output surface can about 2.5 to In the range of 30.5cm or bigger, and width can be in the range of 0.1 to 7.5cm.Optionally, multiple burners can be configured to combustion Burner array, to produce substantially continuous soot particles stream in the length and width of array.Can to the quantity of burner and/ Or the size of burner array is adjusted or configures, so that the presumptive area on soot covering dense glass base material deposited surface.

For example, burner array can include multiple single burners (for example, being placed by end to end), these single combustions Burner configuration is shaped as and deposits temporary transient and spatially uniform soot particles layer.Burner array can include multiple modules Linear array, these modules are positioned along common direction, to provide soot on the width of extension.Representational burning Device module and burner array are described in No. 8746013 United States Patent (USP)s, and the disclosure of which includes this by reference of text Text.Therefore, it can be used to be formed in specific region of the soot maker on dense glass base material and there is substantially evening chemical group Into the single layer of the soot with substantially uniform thickness.Can be by mobile dense glass base material and/or soot maker in densification Expand area coverage using soot particles in the additional areas of glass baseplate deposition surface." uniformly composition " and " uniform thickness " Refer to that the composition in given area and thickness change are less than or equal to the 20% of average composition or thickness.In certain embodiments In, it is flat in soot that one or both of the composition change of soot and thickness change may be less than or equal to each of which The 10% of average.

A kind of representative burner can include 9 row gas apertures.In use, according to a kind of embodiment party Formula, center alignment (such as the 5th row) offer silica gaseous precursors/carrier gas mixture, and adjacent row (such as the 4th Row and the 6th row) oxygen for being used for that silica gaseous precursors to be carried out with Chemical Measurement control is provided.Positioned at center line both sides Subsequent two row gas aperture (such as the 2nd row, the 3rd row, the 7th row and the 8th row) provides extra oxygen, and the stream of oxygen can be used Speed provides oxidant to control Chemical Measurement and soot density for igniting.Outermost row aperture (such as the 1st row and 9th row) such as CH can be provided₄/O₂Or H₂/O₂Ignition mixture.The example gases flow rate of this 9 column linear burner Scope is listed in table 1.

The example gases flow rate of 1.9 column linear burner of table

Gas	Burner column	Exemplary flow rate
			OMCTS	5	15 gram/minutes
N₂	5	40SLPM
			O₂	4,6	18SLPM
O₂	2,3,7,8	36SLPM
			CH₄	1,9	36SLPM
O₂	1,9	30SLPM

In addition to burner, other soot generating means (such as plasma heating soot sprayer etc.) can be used Soot particles needed for processing are provided.In plasma heating soot sprayer, provided with certain speed with single one or more The pre-formed soot particles of kind composition, and plasma is passed to, soot particles are heated to depositing required by plasma Temperature.In addition, in some embodiments, the combination of burner and plasma heating soot sprayer can be used to provide glass Glass soot particles.In purpose is facilitated, unless indicated to the contrary, " burner " otherwise used herein represents to be used at this All soot generating means of reason, unless indicated to the contrary.

Between being typically included in precursor chemical (such as gaseous compound) chemistry occurs for the operation of soot generating means React to form glass soot particles.Optionally, can also by the supply energy or supplementary heating device of such as plasma come Auxiliary so chemical reaction.

For example, it is sinterable to form the silica soot of silica glass to be formed that silicon-containing precursor compounds can be used Particle.A kind of exemplary silicon-containing precursor compounds are octamethylcy-clotetrasiloxane (OMCTS).Can be by OMCTS and H₂、O₂、CH₄ Or other fuel are concomitantly introduced into burner or burner array, OMCTS is aoxidized with life during flame combustion wherein Into silica soot particles.Other silicon precursors include SiCl₄。

For example, a kind of exemplary burner in the production for passing through the silica glass of flame hydrolysis includes hole, pass through Silicon-containing precursor compounds as such as OMCTS (octamethylcy-clotetrasiloxane) are introduced H by this some holes₂、CH₄Or other fuel In flame.OMCTS is generated the fine silica soot for being transported to dense glass base material deposited surface in flame by oxidation Particle.

The soot particles just provided can be mainly made of single oxide, such as produce undoped silica glass In the case of.Alternatively, when using soot generating means to produce soot particles, these soot particles can be through overdoping 's.When soot generating means include the burner being used for using flame hydrolysis or flame combustion processing generation soot, can pass through The precursor comprising dopant is completed to adulterate in flame.Doping precursor can be replenished to the unitary part of soot generating means, Or it is replenished to soot generating means as the mixture with silica or other substrate glasses precursors.When soot generating means During comprising plasma heating soot sprayer, from sprayer spraying pre-formed soot particles can be by pre-doping, Or the soot particles of spraying can be placed in the atmosphere containing dopant, so that soot particles are gradually incorporated in the plasma It is miscellaneous.In some embodiments, the soot particles provided advantageously have substantially homogeneous compositional.In certain embodiments In, soot particles can have different compositions.For example, the soot of main glass ingredient can be provided using a kind of soot generating means Grain, and provide the soot particles of dopant using single soot generating means.In another example, can before sintering or Dopant is incorporated into existing soot layers in sintering process.

The example of dopant includes IA, IB, IIA, IIB, IIIA, IIIB, IVA, IVB, VA, VB in the periodic table of elements The element of race, halide and Rare Earth.Doping precursor includes halide, hydride and the organo-metallic compound of dopant. The compound of the alkoxide cpd of organo-metallic compound including dopant and dopant with various ligands or they Combination, including：Alkyl compound, alkenyl compound, amine, chelatingligand, ethylenediamine, acac (acetylacetonate), FOD (the fluoro- 2,2- dimethyl -3,5- octanediones compounds of 6,6,7,7,8,8,8- seven), acetate, 2,4- pentanedionates, 3,5- Heptane diketonate, 2,2,6,6- tetramethyl -3,5- heptane diketonate, isopropoxide, butylate, methoxide and ethylate. May in some embodiments, soot particles can be mixed with each other and form the composite material granular with various compositions.May be used also Can in some embodiments, soot particles substantially avoid depending on each other and mixing are formed before deposition surface is deposited to Particle.

In some embodiments, dopant is rare earth element ion (such as Yb³⁺、Er³⁺、Nd³⁺、Tm³⁺、Pr³⁺、Ho³⁺)。 There is high index of refraction doped with the silica based glasses of rare earth element, and can be used as being layered the core layer of glass structure.It is known Rare earth dopant has limited dissolubility in silica based glasses.In order to improve dissolubility, be preferably minimized phase separation And increase concentration of the rare earth dopant in silica glass, preferably Al is included in glass composition₂O₃、GeO₂、Ga₂O₃Or its Oxide (such as the TiO of its high charge density metal ion₂).High charge density metal oxide and rare earth in glass composition The ratio between dopant oxygen compound can be more than 1.0 more than 1.5 or more than 2.0 or more than 3.0 or more than 4.0 or 1.0 to In the range of 5.0 or in the range of 1.5 to 4.0.

Formed and deposit soot particle during, soot maker can remains stationary, or can be relative to deposition table Face movement (such as vibration or translation) soot maker.Dense glass base material can move each other with soot maker, to permit Perhaps continuous soot deposit is carried out on the surface of dense glass base material.Relative motion can be by dense glass base material movement, cigarette The movement of soot maker or the movement of dense glass base material and soot maker are realized.In one embodiment, fine and close glass The movement of glass base material and/or soot maker can be unidirectional.The one-way movement can be translational motion.Implement in another kind In mode, the movement of dense glass base material and/or soot maker can be two-way.The bidirectional-movement can be moved back and forth (such as rearwardly and a forwardly moving).Can be in the scope of about 20mm to 100mm to the distance of deposition surface from burner output surface Interior (such as 20,25,30,35,40,45,50,55,60,65,70,75,80,85,90,95 or 100mm).Generated and filled by soot Put the relative motion with dense glass base material, the covering of the soot particles of the Soot Formation device that width is fixed to deposition surface Linear velocity can be in the range of 0.1 mm/second to 10 meter per seconds.For with multiple burners (such as burner array) Soot generating means, region overlay are given by the covering linear velocity of soot generating means and the product of cover width.

The average soot density of the silica based glasses of 90% silica is comprised more than usually 0.30 to 1.50g/ cm³In the range of or 0.80 to 1.25g/cm³In the range of or 0.40 to 0.70g/cm³In the range of.

By reciprocal relative motion, the thickness of the soot layers of deposition can be increased.The required thickness of soot layers can be by consolidating The final use of the layering glass structure formed afterwards determines.Following article is more complete described, and the layering glass structure of consolidation can use Make the prefabricated component in drawing processing, with the effectively different layer of thinning in a controlled manner, so as to fulfill with target size Waveguide.Therefore, method described herein is capable of providing advantage relative to other technologies (such as LOC), because can be in rear deposition Thick soot layers are deposited and adjusted in processing, to meet thickness requirement.When multiple soot layers of the deposition with different compositions are to form During multi-layer compound structure, the relative thickness of different layers can be determined by the final use of the layering glass structure formed after consolidating.Can The thickness of soot layers is controlled using the sedimentation rate and sedimentation time of the soot from soot generating means.Soot generating means Operation each time on dense glass base material passes through the thickness that can all increase soot layers.Soot generating means are in dense glass base Run on material the number passed through be smaller than 200 less than 100 or less than 50 or less than 25 or less than 10 or 1 to 200 it Between or between 1 to 100 or between 1 to 50 or between 1 to 25.

The thickness of soot layers is at least 10 μm or at least 25 μm or at least 50 μm or at least 100 μm or at least For 250 μm or at least 500 μm or at least 1mm or at least 2mm or at least 5mm or at least 10mm or at least For 15mm or at least 20mm or in the range of 10 μm to 50mm or in the range of 25 μm to 40mm or at 50 μm extremely In the range of 30mm or in the range of 100 μm to 25mm or in the range of 150 μm to 25mm or at 200 μm to 25mm In the range of or in the range of 250 μm to 25mm or in the range of 500 μm to 25mm.

In some embodiments, it is desirable to which the soot layers of deposition change with low local soot density.In some embodiment party In formula, for obtaining forming substantially uniform final sintered glass layer, low local soot density change is important.Remove Beyond other factors, following factor can influence the local soot density change of soot layers：(i) burner or the life of other soots Design and position into device；(ii) burner relative to deposition surface movement；(iii) burner or other soots generation dress The temperature change of provided particle is provided；And the temperature change on (iv) dense glass base material deposited surface.It is advantageously used With the soot generating means of the burner array comprising multiple burners come obtain chemical composition substantially uniformly and thickness base Uniform soot deposited layer in sheet." thickness is uniform " refers to that the thickness change of soot layers is less than or equal to soot layers average thickness 20%.In some embodiments, it is desirable to which the thickness change of soot layers is less than or equal to the 10% of soot layers average thickness.At certain In a little embodiments, burner can be adjusted relative to the movement of deposition surface, it is substantially uniform with auxiliary generation thickness Soot layers.In some embodiments, burner is made to be vibrated from the side of deposition surface to opposite side, it is basic with deposit thickness Upper uniform soot layers.In some embodiments, for uniform local soot density is obtained in soot layers, firing It is important to have substantially uniform temperature before burner direct flame contact deposition surface across the deposition surface.

In the state of firm deposition, soot layers are porous layers.In subsequent processing, soot layers are made to sinter and consolidate, with shape Into dense glass layer.In sintering processes, soot layers are heated to sintering temperature, so that the soot particles in porous soot layers cause Densification, so as to form the glassy layer of consolidation.Consolidation can occur in continuous or batch processing.In order to make soot consolidation, by soot Layer is heated to sufficiently high temperature and for a sufficiently long time, so that soot changes into the glass of densification.Except it Beyond its factor, those skilled in the art can according to the forming of glass, the required quality and process yields of final glass come Determine suitable sintering temperature and sintering time.For example, in order to be sintered to the soot of high-purity silicon dioxide, it is usually uncommon It is 1000 DEG C to 2000 DEG C to hope sintering temperature, is in some embodiments 1400 DEG C to 1600 DEG C.Those skilled in the art one As know, during sintering stage, it is allowed to which the soot particles for forming soot layers form more chemical bonds in grain boundaries, to obtain Continuous and densification the glass network of bigger.In some embodiments, it is desirable to which the sintered product in glass material is substantially not Containing cavity and bubble.

The thickness of the soot layers of consolidation be at least 10 μm or at least 25 μm or at least 50 μm or at least 100 μm, At least 200 μm or at least 300 μm or at least 500 μm or at least 1mm or at least 2mm or be at least 5mm or at least 10mm or at least 15mm or at least 20mm or in the range of 1 μm to 25mm or at 5 μm extremely In the range of 20mm or in the range of 10 μm to 15mm or in the range of 10 μm to 10mm or in 10 μm to 5mm of model In enclosing or in the range of 25 μm to 1mm or in the range of 50 μm to 500 μm or in the range of 50 μm to 250 μm or In the range of 50 μm to 125 μm.

In some embodiments, it is desirable to by sintering and consolidating soot layers and at least big in the dense glass layer that is formed Part has high surface quality：Low external waviness；Low surface roughness；And substantially free of cut.Several side can be used Method obtains high quality surface.For example, preventing that the exposed surface of soot layers is (straight not with dense glass base material or lower section glassy layer The surface of contact) it is sintered while contacted with solid body.Think avoiding exposed surface from connecing with solid body Soot layers are sintered in gas or vacuum environment and surface defect can be preferably minimized while touching, and are promoted by having The soot layers for having high quality surface form dense glass layer.In addition, the surface quality of the glass after sintering can be led to soot The influence of pollutant (such as surrounding environment particle) on layer exposed surface.Therefore, in clean environment as such as dust free room In be sintered can help improve sintering after glassy layer surface quality.

Various heat sources can be used to be heated to sintering by soot layers and consolidate required temperature.Can use such as resistance heating, Sensing heating and laser heating.Fig. 2 is exemplified with the sintering and consolidation using laser heat source.Composite construction 40 includes dense glass base Material and one or more soot layers.Transport composite construction 40 and make it under sintering laser 45, to be formed by not Sinter the sintering region 50 that region 55 surrounds.Can be by sintering the movement or positioning or by including in systems of laser 45 Multiple sintering lasers sinter the width in region 50 to control.Illustrated embodiment shows 40 phase of composite construction in Fig. 2 Movement for sintering laser 45.In other embodiments, sintering laser 45 is moved relative to composite construction 40.It is multiple Close structure 40 and sintering laser 45 can in opposite direction, different directions or moved in same direction with different rates.

It is laser sintered improve between base material and adjacent consolidation soot layers or in sandwich construction it is viscous between continuous soot layers Conjunction property.Sintering can also by eliminate bubble and/or provide for add soot deposit smooth surface come improve base material with The interface between interface or adjacent soot layers between adjacent consolidation soot layers.Surface smoothness can be by arithmetic mean roughness R_a To quantify.Roughness R_aIt is count inequality of the roughness component from the fluctuating (peak height and Gu Shen) of surface mean place.It is available Talysurf known in the art measures roughness R_a, and the average value along surface linear or region part can be denoted as.Profit With the roughness R on the surface of laser sintered offer_aIt is smaller than 1.0nm or less than 0.75nm or less than 0.50nm or is less than 0.35nm or less than 0.25nm or less than 0.15nm or less than 0.10nm or in the range of 0.05nm~1.0nm or In the range of 0.05nm~0.75nm or in the range of 0.05nm~0.50nm or in the range of 0.05nm~0.25nm.

Realize the area of surface roughness as described herein and the area phase covered during laser sintered by laser Symbol is substantially consistent.As described above, multiple lasers can be used to increase laser sintered area coverage.Alternatively, can profit Single laser or multiple lasers or the surface for making single laser or the inswept sandwich construction of multiple lasers are handled with grating, To increase sintering area, so as to expand the area of the smooth surface with roughness as described herein.With table as described herein The area of surface roughness can be at least 0.02mm²Or at least 0.05mm²Or at least 0.10mm²Or at least 0.25mm²、 Or at least 0.50mm²Or at least 1mm²Or at least 5mm²Or at least 10mm²。

Individually and independently the surrounding ambient atmosphere in sintering and consolidation process can be adjusted, to meet various glass The production of material needs.Thermal history of the soot layers in sintering process can influence the thickness of the dense glass layer formed by the soot layers Degree, composition, composition homogeneity, the uniformity of physical property (such as refractive index, birefringence etc.) and physical property.Therefore, exist In the case of needing dense glass layer with uniform composition and/or property, it is desirable to soot layers is undergone base in sintering process Uniform sintering temperature in sheet.It is substantially uniform to obtain that sensing heating, resistance heating or laser heating is advantageously used Sintering temperature.

Heat source can be in the range of 0.5mm to 50mm or in 1mm apart from the distance of soot layers exposed surface in sintering process Model in the range of to 45mm or in the range of 2mm to 40mm or in the range of 3mm to 35mm or in 5mm to 30mm In enclosing.It can be completed by the way that a branch of or more beam laser beam from one or more lasers to be oriented to the surface of soot layers Laser heats.Multiple lasers can be used and they are arranged in array or laser storehouse, to realize for example broad soot layers Region overlay, so as to sinter the multiple regions of soot layers at the same time.Alternatively, one or more laser can be handled by using grating Device come realize broadness region overlay.One or more lasers can be moved in a controlled manner, with (complete or partial) The surface of inswept soot layers, so as to effectively be sintered and consolidated in desired zone.The laser of different wave length can be used, its In, the wavelength of each laser is optimized for specific soot composition.Laser can be focused on or do not focused on.Multiple layers of soot can Sequentially or simultaneously sinter.The wavelength or depth of focus of laser can be adjusted, be sintered with the sub-surface region to soot layers or In the stacking that person's intervention is made of two or more soot layers positioned at dense glass base material and apart from dense glass base material most Soot layers between remote soot layers.

In some embodiments, the heating chamber being sintered is filled with inert gas (such as N₂, Ar, Ne, they Mixture etc.) to improve heat transfer, and prevent apparatus assembly, soot layers, the cause formed by soot layers and/or dense glass base material The oxidation of close glassy layer.

Composite construction can be formed by the way that one or more soot layers are deposited on dense glass base material.One or more Multiple soot layers can have identical or different composition.The composition of one or more soot layers can be with the group of dense glass base material Into identical or different.In one embodiment, the composition of dense glass base material has the composition higher than soot layers Refractive index.For example, dense glass base material can have the composition of waveguide cores layer, and soot layers can have the composition of waveguide covering. In another embodiment, the composition of dense glass base material has the refractive index lower than the composition of soot layers.For example, Dense glass base material can have the composition of waveguide covering, and soot layers can have the composition of waveguide cores layer.

Composite glass structure can include two or more soot layers.Can be on the same side of dense glass base material by two Or more soot layers be sequentially depositing on top of each other, to be formed with the sandwich construction for forming identical or different soot layers. For example, dense glass base material can have the composition of waveguide covering, the soot layers with waveguide cores layer composition can be deposited over cause On close glass baseplate, and the soot layers with waveguide covering composition can be deposited over the soot layers with waveguide cores layer composition On.In this composite construction, the soot layers with core layer composition are with than dense glass base material or with covering composition The refractive index of soot layers higher.

In one embodiment, the soot layers with core layer composition are deposited on dense glass base material, and are had The soot layers of covering composition are deposited in the soot layers with core layer composition.In another embodiment, there is covering The soot layers of composition are deposited on dense glass base material, and the soot layers with core layer composition are deposited over to be formed with covering Soot layers on, and with covering composition soot layers be deposited over core layer composition soot layers on.With covering group Into soot layers can be thicker than with core composition soot layers.Soot layers with covering composition are than the cigarette with core composition At least 5 times of soot thickness or thick at least 10 times or thick at least 25 times or thick at least 50 times or thick at least 100 times or thickness 5 to 100 It is again or 10 to 100 times or 10 to 90 times or 25 to 75 times thick thick thick.

Alternatively, two or more soot layers can be deposited on the different surfaces of dense glass base material.The difference table Face can be opposite surface or nonoverlapping surface.For example, dense glass base material there can be the composition of waveguide cores layer, have First soot layers of waveguide covering composition can be deposited on the first surface of dense glass base material, and with waveguide covering composition The second soot layers can be deposited on the second surface of dense glass base material, wherein, second surface is located at dense glass base material On the side opposite with first surface, so that dense glass base material is between the first soot layers and the second soot layers.This In composite construction, dense glass base material has the refractive index of soot layers higher more peripheral than two.Two or more soot layers can It is deposited in each in two or more surfaces of dense glass base material.

When deposited two or more soot layers, the deposition of all soot layers can occur before sintering and consolidating, and All soot layers can be made to undergo sintering and consolidation condition at the same time.Alternatively, the deposition and sintering and consolidation of soot layers can replace Carry out.For example, soot layers can be formed on dense glass base material, it is sintered and consolidates to form dense glass layer, and can One or more additional soot layers are deposited on dense glass layer.Then, it is sinterable and consolidate one or more Additional soot layers, and can redeposited additional one or more soot layers.

(glass can be also referred to as layered herein to the densification hierarchy formed after the sintering of composite construction and consolidation Glass structure) it is further processed.Additional processing may include dried soot layer (such as using Cl₂)；Adulterate soot layers；Machinery Process to form required shape；Polishing；Annealing；Cutting etc..Additional processing may also include drawing.In drawing processing, it will cause Densification hierarchy is heated to softening, and then makes its thinning by being drawn along selected draw direction.In pulling process, Densification hierarchy is stretched, and is cured again by cooling.Can be by pulling the densification hierarchy or right softened It applies active force or thinning is completed to draw under gravity by making the densification hierarchy of softening.

As densification hierarchy is stretched, its is thinning, and dense glass base material and formed by soot one or One or more linear dimensions (such as thickness, length, height) of more dense glass layers reduce.In a kind of embodiment In, in the relative thickness (or other corresponding linear dimensions) of dense glass base material and one or more dense glass layers The relative thickness (or other corresponding linear dimensions) of each is kept constant.That is, dense glass base material relative thickness (or its Its corresponding linear size) with the relative thickness of each (or other corresponding linear rulers in one or more dense glass layers It is very little) between proportionate relationship with densification hierarchy after drawing it is thinning keep it is identical.In one embodiment, draw The proportionate relationship (for example, height and the width, wherein height can be equivalent to thickness) of latter two linear dimension remains unchanged.

Fig. 3 is schematically illustrated by densification hierarchy draw plane waveguide.Densification hierarchy 60 includes core Body layer 65, covering 70 and covering 75.Densification hierarchy 60 is placed in draw machines, is heated to softening, and in gravity Effect is lower and/or final size is drawn into tension force aid in treatment, to form the hierarchy 80 drawn.

Drawing processing allows to be controlled the thickness (or other linear dimensions) for being layered glass structure.For example, it can pass through Draw the thickness (or other linear dimensions) of processing control waveguide core layer and covering.It is layered the thickness of a layer in glass structure (or other linear dimensions) can be that the thickness (or other linear dimensions) of a layer in the layering glass structure exists after drawing Before drawing at least 0.1% or at least 1% or at least 2% or at least 5% or at least 10% or at least 20% or at least 40% or at least 50% or at least 60% or at least 75%.It is layered thickness (or other linear rulers of a layer in glass structure It is very little) after drawing can in the layering glass structure layer thickness (or other linear dimensions) before drawing 0.01% to In the range of 99% or in the range of 1% to 95% or in the range of 2% to 90% or 5% to 85% scope It is interior or in the range of 10% to 80% or in the range of 20% to 70% or in the range of 30% to 60%.

In one embodiment, be densified hierarchy has linear dimension along draw direction, and drawing processing makes this Linear dimension adds at least 5% or adds at least 10% or add at least 25% or add at least 50% or increase Added at least 100% or add at least 250% or add at least 500% or increasing degree 10%~500% it Between or increasing degree between 50%~250%, with formed draw densification hierarchy.The densification layering knot of drawing The linear dimension of structure in the drawing direction can be equivalent to the length of the densification hierarchy of drawing.The densification layering knot of drawing The length of structure can be more than 0.1m or more than 0.3m or more than 0.5m or more than 1.0m or more than 2.0m or in 0.1m~5.0m In the range of or the scope in the range of 0.2m~4.0m or in the range of 0.5m~3.5m or in 1.0m~3.0m It is interior.The densification hierarchy of drawing also has the linear dimension transverse to draw direction.Draw direction can be equivalent to drawing The length of hierarchy is densified, and can be equivalent to the width of the densification hierarchy of drawing transverse to the direction of draw direction Degree.Drawing processing can make the linear dimension of densification hierarchy in the drawing direction relative to the densification hierarchy in horizontal stroke To in the linear dimension increase on the direction of draw direction.The linear dimension of the densification hierarchy of drawing in the drawing direction With the ratio between the linear dimension of the densification hierarchy of the drawing on the direction transverse to draw direction can be at least 2.0 or At least 3.0 or at least 5.0 or at least 10 or at least 15 or at least 20 or at least 25.

The densification hierarchy of drawing can be configured to waveguide.Waveguide includes point that can include one or more plane layers Rotating fields.Waveguiding structure can include two or more plane layers or three or more plane layers.Waveguiding structure can include one Series layer, these layers limit the stacking being made of two or more waveguides, wherein, each waveguide is stacked comprising an insertion Core layer between two coverings.Adjacent waveguide stacks the covering that can be shared between each of which core layer, or can be every One waveguide uses single covering in stacking.Exemplary sequence of layer is included (by putting in order)：Covering-core layer-covering- Core layer-covering ... or covering-core layer-covering-covering-core layer-covering ... or covering-core layer-covering-core Body layer-covering-core layer-covering-covering-core layer-covering etc..

Waveguide as described herein is characterized in that low attenuation loss, especially relative to the plane wave formed by ceramic material For leading.Attenuation loss of the waveguide as described herein in 1000nm~1300nm wave-length coverages is less than 0.5dB/m or is less than 0.3dB/m or less than 0.1dB/m or less than 0.05dB/m or less than 0.01dB/m.

In some embodiments, dense glass base material includes plane surface, and the deposition of soot layers occurs in the flat table On face.Glass can be configured to tablet (such as rectangular or square tablet).Can be by being processed into arbitrary shape comprising flat table Face forms dense glass base material.In one embodiment, by fibre-optical preform by being cut to the fibre-optical preform Or mechanical processing is so that it includes plane surface to form dense glass base material.It is known in the art, fibre-optical preform be by with Made under type：On rod (bait rod) is lured and consolidate soot one or more layers titanium dioxide silicon substrate soot deposit Tie to form fibre-optical preform.In deposition processes, titanium dioxide silicon substrate soot deposit is lured on rod rotating, is had to be formed The porous soot body of layering of general cylindrical shape.For formed porous soot body technology include OVD (Outside Vapor deposition), IVD (inside vapour deposition) and CVD (chemical vapor deposition).The sintering and consolidation for being layered porous soot body can generate densification Vitreum-fibre-optical preform (by fibre-optical preform come drawing optical fiber).Fibre-optical preform can be by silica or titanium dioxide silicon substrate Glass is made, and can include the upper different multiple layers of composition, to provide the refractive index curve guided in a fiber needed for light.

The fibre-optical preform of general cylinder can be cut, to form plane surface.In one embodiment, edge The axially in parallel direction cutting optical fibre prefabricated component with fibre-optical preform to provide plane surface.As described above one or The subsequent deposition of more soot layers can occur on a planar surface.It can carry out being cut to two or more to fibre-optical preform Multiple plane surfaces, and soot deposit can occur on one or more in two or more plane surfaces.Two or Two in more plane surfaces can be parallel.Fibre-optical preform can be carried out being cut to rectangular flat or pros Shape tablet.

The dense glass base material formed by fibre-optical preform can have single plane surface or multiple plane surfaces.By optical fiber The dense glass base material that prefabricated component is formed can have one or more plane surfaces and one or more circular surfaces, its In, soot deposit occurs on one in plane surface.In one embodiment, dense glass base material has two planes Surface and the circular surface extended between described two plane surfaces.Two plane surfaces can be parallel.

Fig. 4~8 form layering glass structure exemplified with by fibre-optical preform base material.Fig. 4 is shown on handle 105 Fibre-optical preform 100.Handle 105 is removed, and it is carried out to be cut to flat table along the axial direction of fibre-optical preform 100 Face.In the embodiment shown in Fig. 5, fibre-optical preform 100 is cut in half, to provide dense glass base material 110 and cause Close glass baseplate 120.Dense glass base material 110 and dense glass base material 120 have deposition surface 115 and 125 respectively, and are equipped with There is handle 130 to be further processed.

In Fig. 6, soot layers are formed on dense glass base material 110.Soot particles 140 are produced by soot generating means 135 And be deposited on deposition surface 115, to form soot layers 145.In the embodiment shown in fig. 6, soot generating means 135 are matched somebody with somebody It is set to the linear array of multiple burners.In the embodiment shown in fig. 6, dense glass base material is in movement, and soot Generating means 135 are static.Dense glass base material can be made to cross soot generating means 135 more than 110 times, with formed have it is required The soot layers of thickness.Soot layers 145 can be further processed.Processing may include dry or adulterate.

Fig. 7 is exemplified with laser sintered.The dense glass base material 110 with soot layers 145 is burnt using laser 155 Knot.Soot layers 145 are changed into sinter layer 150 by laser 155 along the inswept soot layers 145 of arrow direction.Can be by swashing The power of light device 155 controls sintering temperature, by laser 155 passes through cigarette by the speed or laser 155 of soot layers 145 The number of soot layer 145 controls sintering time.Sinter layer 150 is dense glass layer.

Fig. 8 on sinter layer 150 exemplified with depositing additional soot layers.Dense glass base material 110 is set to cross soot generation Device 160, it, which is generated, is used to be deposited on sinter layer 150 to form the soot particles 165 of soot layers 170.Soot layers 170 can have By with sinter layer 150 is identical or different forms.Soot layers 170 can have the group identical or different with dense glass base material 110 Into.In one embodiment, dense glass base material 110 has the composition of waveguide covering, and sinter layer 150 has waveguide cores layer Composition, and soot layers 170 have waveguide covering composition.After deposition, soot layers 170 can be further processed, such as Dry, doping or sintering.After soot layers 170 sinter, product is the layering glass for having dense glass base material and two glassy layers Structure.

Additional treatment steps of the Fig. 9 exemplified with layering glass structure.Layering glass structure is prepared by dense glass base material, institute Dense glass base material is stated by being formed with the fibre-optical preform that covering forms.Core layer through overdoping is positioned at dense glass base On material, and covering is positioned on the core layer through overdoping.Show two processing approach.In an approach, glass will be layered Glass construction machine is processed into the rectangular shape of plane, is then drawn and provides plane wave to adjust the thickness of core and covering Lead.In Article 2 processing approach, dense glass base material is drawn with linear adjustment size, subsequently optionally carry out machinery Processing, to form the waveguide of the rectangular shape with plane.

The waveguide formed by layering glass structure can include one or more plane surfaces or two or more planes Surface or a plane surface and a circular surface.In one embodiment, waveguide includes rectangle core layer and rectangle bag Layer.In another embodiment, waveguide includes rectangle core layer and the covering with circular surface.In another embodiment In, waveguide includes rectangle core layer, rectangle covering and the covering with circular surface.

Other processing can be used to form layering glass structure.In one embodiment, divide as already mentioned above Two or more composite constructions with dense glass base material and one or more soot layers are not prepared, and they are tied It is combined to form layering glass structure.Layering glass structure can be formed in the following manner：In a predefined order to single Composite construction is stacked to form stacked structure, and then the stacked structure is sintered and heated, so that these layers fuse Into an integrated structure.

In Figure 10, make with dense glass base material 210 and the composite construction of soot layers 215 200 and with dense glass base Material 220 and the composite construction of soot layers 225 205 are combined to form stacked structure.Dense glass base material 210, dense glass base material 220th, the composition of any of soot layers 215 and soot layers 225 may be the same or different.With reference to rear, can to stacked structure into Row sinters so that soot layers 215 and soot layers 225 consolidate, and fuse to be formed with dense glass base material 210, dense glass The layer of base material 220 and the layering glass structure 240 of sinter layer 235.Dense glass base material 210 and/or dense glass base material 220 wrap Embodiment containing two or more soot layers is within the scope of this specification.

Heat fused is carried out to be combined together layer to manufacture integrated structure using heating.Heating can occur in stove or In flame.Alternatively, laser can be used to be heated.In one embodiment, heating occurs in a vacuum furnace.Vacuum (or Low pressure) gas of depositing between condition can help to remove gas and will be present in layer is reduced at least.

Figure 11 shows a kind of alternative embodiment, wherein, layering glass structure is combined with composite construction with shape Into stacked structure.Layering glass structure 305 includes dense glass base material 320 and sinter layer 325.Composite construction 300 includes densification Glass baseplate 310 and soot layers 315.Dense glass base material 310, dense glass base material 320, soot layers 315 and sinter layer 325 Any of composition may be the same or different.With reference to rear, stacked structure can be sintered so that soot layers 315 consolidate, and And fuse to form the layering glass structure with dense glass base material 310, the layer of dense glass base material 320 and sinter layer 335 340.Dense glass base material 310 includes the embodiment of two or more soot layers within the scope of this specification, and is layered Glass structure 305 also includes the embodiment of one or more soot layers also in this specification in addition to sinter layer 325 In the range of.

Figure 12 shows another embodiment, wherein, with reference to two layering glass structures to form stacked structure.Layering Glass structure 405 includes dense glass base material 420 and sinter layer 425.Layering glass structure 400 includes dense glass base material 410 With sinter layer 415.Any of dense glass base material 410, dense glass base material 420, sinter layer 415 and sinter layer 425 Composition may be the same or different.After layering glass structure 405 is combined with layering glass structure 400, so that it may to stacked structure Fused to form the layering glass knot with dense glass base material 410, the layer of dense glass base material 420 and sinter layer 435 Structure 440.Dense glass base material 410 and/or dense glass base material 410 also include one in addition to sinter layer 415 or sinter layer 425 The embodiment of a or more soot layers is within the scope of this specification.

In Figure 10~12 illustrated processing may extend to reference to three or more composite constructions, layering glass structure or Combinations thereof.

In other embodiments, layering glass structure is manufactured or provided in the following manner：Make at least one Composite construction or layering glass structure described in text are combined to provide heap with least one glassy layer formed by another processing Stack structure, and the stacked structure is heated to sinter and consolidate any soot layers, and the stacking is fused to form layering glass Glass structure.Independent solution for manufacturing glassy layer includes OVD (Outside Vapor deposition), IVD (inside vapour deposition) and VAD (vapor axial deposition) or directly handle.Directly processing includes the powder of hybrid glass component, heats to sinter and consolidate, and Cool down to form glass.

Figure 13 shows the formation of the glassy layer independently of composite construction or the formation for being layered glass structure.These glassy layers Formed by OVD methods, wherein, soot preform is formed using conventional treatment (such as flame hydrolysis, flame combustion).Soot The composition of prefabricated component can be identical or different with the composite construction or any layer of layering glass structure being combined with it.Can be to soot Prefabricated component is dehydrated (such as using Cl₂), sintering and consolidate to form blank.It is known in the art, can to OVD (or IVD or VAD) temperature of method is controlled, so as to sinter and occur when being fixedly arranged at soot deposit.Alternatively, temperature when making generation soot deposit Degree keeps below sintering temperature, and can use single sintering step.Blank is cut to form the glass with required size Layer.Figure 14, which is shown, assembles glassy layer and the composite construction according to this specification or layering glass structure, to form tool There is the layering glass structure of three layers.The triplex glass structure is then heated to sinter (if desired) and fuse these layers, from And form waveguide.As shown in figure 14, in one embodiment, the glassy layer formed by independent process can be equivalent to layering glass The covering (illustrated outermost layer in Figure 14) of structure, and composite construction or layering glass structure (illustrated center in Figure 14 Layer) can be equivalent to the core layer of layering glass structure.

Unless otherwise stated, otherwise all it is not intended to and any means as described herein is interpreted as needing to make its step with specific Order carries out.Therefore, when claim to a method is practically without being set fourth as that its step follows certain order or it does not exist Specifically represent that step is limited to specific order with any other modes in claims or specification, be all not intended to imply that this Meaning particular order.

It will be apparent to those skilled in the art can be in the spirit without departing from illustrated embodiment Various modifications and changes are carried out to the present invention with the case of scope.Because those skilled in the art is contemplated that illustrated Various improvement, combination, subitem combination and the change of the fusion of embodiment spirit of the invention and essence, it is considered that present invention bag Include the full content and its equivalents in scope.

Claims

1. a kind of method for manufacturing planar layer glass structure, the described method includes：

Composite construction is formed, the composite construction includes the first soot layers on dense glass base material, first soot Layer has at least 100 μm of thickness；

The layering glass structure is drawn along draw direction, to form the layering glass structure drawn, the layering of the drawing Glass structure in the draw direction with first size and on the direction of the draw direction with the second ruler Very little, the ratio between the first size and second size are at least 3.0, point of the first soot layers of the consolidation in the drawing There is at least 10 μm of thickness in layer glass structure.

2. the method as described in claim 1, it is characterised in that first soot layers have at least 250 μm of thickness.

3. the method as described in claim 1, it is characterised in that first soot layers have at least thickness of 1mm.

4. the method as described in claim 1, it is characterised in that first soot layers have at least thickness of 10mm.

5. the method as described in claim 1, it is characterised in that model of the thickness of first soot layers at 100 μm to 10mm In enclosing.

6. the method as described in claim 1, it is characterised in that scope of the thickness of first soot layers at 150 μm to 4mm It is interior.

7. the method as described in claim 1, it is characterised in that scope of the thickness of first soot layers at 250 μm to 2mm It is interior.

8. the method as described in claim 1, it is characterised in that the dense glass base material is formed by fibre-optical preform.

9. method as claimed in claim 8, it is characterised in that the fibre-optical preform has cylindrical shape.

10. method as claimed in claim 8, it is characterised in that the dense glass base material is by handling the optical fiber prefabricating Part makes that it includes plane surface to be formed.

11. method as claimed in claim 10, it is characterised in that first soot layers are arranged on the plane surface.

12. method as claimed in claim 11, it is characterised in that the fibre-optical preform includes circular surface.

13. the method as described in claim 1, it is characterised in that the dense glass base material includes circular surface and flat table Face, and first soot layers are arranged on the plane surface.

14. the method as described in claim 1, it is characterised in that it is described consolidation include by first soot layers be heated to Temperature 1000 DEG C few.

15. method as claimed in claim 14, it is characterised in that the heating includes making first soot layers exposed to sharp Under light.

16. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing There is at least 100 μm of thickness in glass structure.

17. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing There is at least 500 μm of thickness in glass structure.

18. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing There is at least thickness of 5mm in glass structure.

19. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing There is at least thickness of 15mm in glass structure.

20. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing Thickness in glass structure is in the range of 10 μm to 50mm.

21. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing Thickness in glass structure is in the range of 100 μm to 25mm.

22. the method as described in claim 1, it is characterised in that layering of the first soot layers of the consolidation in the drawing Thickness in glass structure is in the range of 250 μm to 25mm.

23. the method as described in claim 1, it is characterised in that the first soot layers of the consolidation are at least 1mm²Area in With the average surface roughness R less than 0.50nm_a。

24. the method as described in claim 1, it is characterised in that the first soot layers of the consolidation are at least 0.50mm²Face There is the average surface roughness R less than 0.25nm in product_a。

25. the method as described in claim 1, it is characterised in that the first soot layers of the consolidation are at least 0.25mm²Face There is the average surface roughness R less than 0.10nm in product_a。

26. the method as described in claim 1, it is characterised in that the drawing makes the linear dimension of the layering glass structure Add at least 25%.

27. the method as described in claim 1, it is characterised in that the drawing makes the linear dimension of the layering glass structure Add at least 100%.

28. the method as described in claim 1, it is characterised in that the drawing makes the linear dimension of the layering glass structure Add 10%~500%.

29. the method as described in claim 1, it is characterised in that the drawing makes the linear dimension of the layering glass structure Add 50%~250%.

30. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing has at least 0.1m's Length.

31. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing has at least 0.3m's Length.

32. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing has at least 1.0m's Length.

33. the method as described in claim 1, it is characterised in that the drawing layering glass structure length 0.1m~ In the range of 5.0m.

34. the method as described in claim 1, it is characterised in that the drawing layering glass structure length 0.2m~ In the range of 4.0m.

35. the method as described in claim 1, it is characterised in that the drawing layering glass structure length 1.0m~ In the range of 3.0m.

36. the method as described in claim 1, it is characterised in that the ratio between the first size and second size are at least 5.0。

37. the method as described in claim 1, it is characterised in that the ratio between the first size and second size are at least 10。

38. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing 1000nm~ There is the decay less than 0.5dB/m in the wave-length coverage of 1300nm.

39. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing 1000nm~ There is the decay less than 0.1dB/m in the wave-length coverage of 1300nm.

40. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing 1000nm~ There is the decay less than 0.05dB/m in the wave-length coverage of 1300nm.

41. the method as described in claim 1, it is characterised in that the dense glass base material includes silica based glasses.

42. method as claimed in claim 41, it is characterised in that first soot layers include the titanium dioxide containing dopant Silicon-based glass.

43. method as claimed in claim 42, it is characterised in that the dopant includes rare earth element.

44. method as claimed in claim 43, it is characterised in that the silica based glasses containing dopant include Al, Ge or Ti.

45. method as claimed in claim 44, it is characterised in that the dense glass base material includes pure silicon dioxide glass.

46. the method as described in claim 1, it is characterised in that the composite construction also includes straight with first soot layers Second soot layers of contact, second soot layers have at least 100 μm of thickness.

47. method as claimed in claim 46, it is characterised in that second soot layers have at least thickness of 1mm.

48. method as claimed in claim 46, it is characterised in that first soot layers have than second soot layers more High refractive index.

49. method as claimed in claim 48, it is characterised in that first soot layers have than the dense glass base material The refractive index of higher.

50. method as claimed in claim 46, it is characterised in that the preparation, which further includes, consolidates second soot layers.

51. method as claimed in claim 50, it is characterised in that layering of the second soot layers of the consolidation in the drawing There is at least 25 μm of thickness in glass structure.

52. method as claimed in claim 51, it is characterised in that the second soot layers of the consolidation have and the fine and close glass The identical composition of glass base material and the composition different from first soot layers.

53. method as claimed in claim 52, it is characterised in that second soot layers include silica based glasses, and First soot layers include the silica based glasses containing dopant.

54. method as claimed in claim 46, it is characterised in that the composite construction also includes straight with second soot layers 3rd soot layers of contact.

55. method as claimed in claim 54, it is characterised in that second soot layers have than first soot layers and The refractive index of the 3rd soot layers higher.

56. method as claimed in claim 46, it is characterised in that the composite construction is also included and connect with the 3rd soot layers Tactile one or more soot layers.

57. the method as described in claim 1, it is characterised in that the composite construction also includes the second soot layers, and described second Soot layers are arranged on the dense glass base material surface opposite with first soot layers.

58. the method as described in claim 1, it is characterised in that described to prepare the first soot layers for being additionally included in the consolidation The second soot layers of upper formation.

59. method as claimed in claim 58, it is characterised in that the preparation, which further includes, consolidates second soot layers.

60. method as claimed in claim 59, it is characterised in that also include forming the in the second soot layers of the consolidation Three soot layers.

61. method as claimed in claim 58, it is characterised in that also include forming the 3rd soot in second soot layers Layer.

62. the method as described in claim 1, it is characterised in that the layering glass structure of the drawing has plane configuration.

63. a kind of method for manufacturing layering glass structure, the described method includes：

The first composite construction is formed, first composite construction includes the first soot layers on the first dense glass base material, First soot layers have at least 100 μm of thickness；

The second composite construction is formed, second composite construction includes the second soot layers on the second dense glass base material, Second soot layers have at least 100 μm of thickness；

Stacked structure is formed by stacking first composite construction and second composite construction, described stack includes making institute The first soot layers are stated to contact with second soot layers.

64. the method as described in claim 63, it is characterised in that further including consolidates the stacked structure.

65. a kind of method for manufacturing layering glass structure, the described method includes：

Stacked structure is formed by the first composite construction and second composite construction that stack the consolidation, it is described stack bag Including makes the first soot layers of the consolidation be contacted with second soot layers.

66. the method as described in claim 65, it is characterised in that further including consolidates the stacked structure.

67. a kind of method for manufacturing layering glass structure, the described method includes：

Stacked structure is formed by stacking glassy layer in first soot layers.

68. the method as described in claim 67, it is characterised in that further including consolidates the stacked structure.

69. a kind of waveguide, it includes：

First covering；

Core layer on first covering；And

The second covering on the core layer；

Wherein, at least one of first covering, the core layer and described second covering are configured to plane layer, described flat Surface layer has at least length of 0.1m；And

Wherein, the waveguide has the decay less than 0.5dB/m in the wave-length coverage of 1000nm~1300nm.

70. the waveguide as described in claim 69, it is characterised in that the plane layer has at least length of 0.5m.

71. the waveguide as described in claim 69, it is characterised in that the plane layer has at least length of 1.0m.

72. the waveguide as described in claim 69, it is characterised in that scope of the length of the plane layer in 0.1m~5.0m It is interior.

73. the waveguide as described in claim 69, it is characterised in that the waveguide is in the wave-length coverage of 1000nm~1300nm With the decay less than 0.1dB/m.

74. the waveguide as described in claim 69, it is characterised in that the plane layer is the core layer.

75. the waveguide as described in claim 69, it is characterised in that first covering, the core layer and second bag At least two in layer are configured to the plane layer that length is at least 0.1m.