CN107885042A - Multispectral light source coupling device - Google Patents
Multispectral light source coupling device Download PDFInfo
- Publication number
- CN107885042A CN107885042A CN201610877653.7A CN201610877653A CN107885042A CN 107885042 A CN107885042 A CN 107885042A CN 201610877653 A CN201610877653 A CN 201610877653A CN 107885042 A CN107885042 A CN 107885042A
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- Prior art keywords
- coupling
- quartz pushrod
- incidence
- light source
- plane
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention provides a kind of multispectral light source coupling device, including at least two light sources, couple quartz pushrod, Transflective component and coupling output quartz pushrod, the incidence end of each coupling quartz pushrod is provided with a light source, the exit end of each coupling quartz pushrod is provided with a Transflective component, two incidence ends of each Transflective component are respectively equipped with the incident coupling quartz pushrod for having different light sources or coupling output quartz pushrod, exit end of each coupling output quartz pushrod located at a Transflective component, energy transmission that two incidence ends are transmitted to by the Transflective component and/or the coupling output quartz pushrod in its exit end is transferred to after reflection.
Description
Technical field
The present invention relates to field of lithography, more particularly to a kind of multispectral light source coupling device.
Background technology
It is that photoetching process is completed by the light energy of light source offer in the manufacturing process of semiconductor.In order to increase
Product competitiveness, the yield of photoetching is improved, reduce cost, one of them important approach is exactly to improve the total energy of light source output
Amount.
With the development of LED light source, it is adapted to the LED light source of field of lithography to occur at present, wherein G lines, H lines, I lines
LED light source has very wide application prospect.Due to the characteristics of luminescence of LED light source, spectrum is all that single tape is wide.Led in the photoetching of three lines
, it is necessary to which the LED light source of the lines of GHI tri- is coupled in domain, the output of the high-energy of the lines of GHI tri- is finally formed in target target surface.
The realization of the line LED light sources of GHI tri- has two ways, and one kind is to be arranged in order three kinds of LED light source particles on request, is formed luminous
Face.But so because the demand of spectrophotometric data limits, the conspicuous amount of drawing of photoetching face demand is a definite value, can cause light source
The luminous energy that the conspicuous amount of drawing of outgoing is big can not be coupled on target target surface, and this mode can not increase the light energy in photoetching face.It is another
Kind mode is individually designed three lines LED light source, and the energy of light source for making three lines by multispectral coupling device is finally coupling in target
On target surface, and meet the demand of the conspicuous amount of drawing in photoetching face.
The multispectral light source coupling device having at present is realized by way of reflecting prism and coupling eyeglass, this mode
Generally have the disadvantage that：
1st, it is more to couple eyeglass, complex designing, it usually needs the eyeglass of more than 5 completes whole coupling；
2nd, for image away from longer, working distance is longer, causes whole coupled system longer；
3rd, for big visual field, the lens design of wide-angle coupling is difficult to be realized, it usually needs is increased more eyeglasses and is realized
Coupling, increase cost.
The content of the invention
Mentioned above in order to solve the problems, such as, the invention provides a kind of multispectral light source coupling device, including at least two
Individual light source, coupling quartz pushrod, Transflective component and coupling output quartz pushrod, the incidence end of each coupling quartz pushrod are set
There is a light source, the exit end of each coupling quartz pushrod is provided with a Transflective component, and each transmission is anti-
Two incidence ends for penetrating component are respectively equipped with the incident coupling quartz pushrod for having different light sources or coupling output quartz pushrod, each described
Coupling output quartz pushrod is located at the exit end of a Transflective component, and the Transflective component passes two incidence ends
The energy transmission passed and/or be transferred to after reflection in its exit end the coupling output quartz pushrod.
Optionally, the cross section of the coupling quartz pushrod and coupling output quartz pushrod is in polygon.
Optionally, the outgoing end face of the coupling quartz pushrod and coupling output quartz pushrod is more than incident end face.
Optionally, the section of the coupling quartz pushrod is more than the output face of the corresponding light source.
Optionally, the light source and coupling quartz pushrod quantity be two, it is corresponding, it is described coupling output quartz pushrod and
The quantity of Transflective component is one.
Optionally, the quantity of the light source and coupling quartz pushrod is three, and the coupling output quartz pushrod and transmission are anti-
The quantity for penetrating component is two；
Wherein, the first coupling quartz pushrod couples two incidence ends of the quartz pushrod located at the first Transflective component with second,
The first coupling output quartz pushrod is located at the exit end of the first Transflective component, the first coupling output quartz pushrod
Two incidence ends of the second Transflective component are located at the 3rd coupling quartz pushrod, the second coupling output quartz pushrod is located at institute
State the exit end of the second Transflective component.
Optionally, the first coupling quartz pushrod is that I lines couple quartz pushrod, and its incidence end is correspondingly provided with I line sources；It is described
Second coupling quartz pushrod is that H lines couple quartz pushrod, and its incidence end is correspondingly provided with H line sources；The 3rd coupling quartz pushrod is G lines
Quartz pushrod is coupled, its incidence end is correspondingly provided with G line sources.
Optionally, the exit facet of the Transflective component is relative with first plane of incidence, the Transflective component
Further transmiting the incident energy of the first incidence end to exit end, the energy of the second incidence end is reflected to exit end.
Optionally, the Transflective component includes band logical speculum and three speculums, the band logical speculum, three
First plane of incidence of speculum and Transflective component encloses form right angle triangular prism structure, and the band logical speculum is in three
The inclined-plane of prism structure, a speculum and first plane of incidence are in two right-angle surfaces, and speculum described in another two is in
Two other side；
The band logical speculum is configured to be transmissive to the incident energy of first plane of incidence to exit facet,
The energy of second plane of incidence is reflected to exit facet.
Optionally, the Transflective component includes triangular prism and three speculums, and one of the triangular prism is straight
Edged surface is second plane of incidence of the Transflective component, and another right-angle surface of the triangular prism is the Transflective group
Part exit facet, the inclined-plane of the triangular prism, three speculums, and first plane of incidence of the Transflective component enclose structure
Triangular prism structure at a right angle, the inclined-plane of the triangular prism are in the inclined-plane of triangular prism structure, a speculum and first
The plane of incidence is in two right-angle surfaces, and speculum is in two other side described in another two；
The inclined-plane of the triangular prism is further provided with being transmissive to the incident energy of first plane of incidence to exit facet
High transmittance film layer, and reflection second plane of incidence energy to the high-reflecting film layer of exit facet, go out as the Transflective component
The right-angle surface for penetrating the triangular prism in face is provided with high transmittance film layer with the energy match of corresponding incidence, on three speculums
Provided with the high-reflecting film layer that can reflect the incident energy of first plane of incidence.
The present invention can realize the coupling of multispectral LED light source, and have following characteristic by basic optical element：
1st, it is simple in construction：Complete to couple using components such as simple quartz pushrod, speculums；
2nd, image is substantially reduced away from more compact structure；
3rd, coupling efficiency is high：Different to the coupling efficiency of the different angles of divergence, the angle of divergence is smaller, and coupling efficiency is higher；
4th, using taper quartz pushrod, NA can accurately be modulated；
5th, NA is coupled, visual field is unrestricted, and all NA, visual field can be completely covered；
6th, processing technology is ripe, reliable high.
Brief description of the drawings
Fig. 1 is the schematic diagram of multispectral light source coupling device in the embodiment of the present invention 1；
In figure, 101,102- light sources；201st, 202- couples quartz pushrod；300- reflection subassemblies；400- coupling output quartz pushrods；
Fig. 2 and Fig. 3 is the schematic diagram of Transflective component in two alternative embodiments of the invention；
In figure, 301- band logical speculums；302nd, 303,304- speculums；
310- triangular prisms；320th, 330,340- speculums；
Fig. 4 is the schematic diagram of multispectral light source coupling device in the embodiment of the present invention 2；
In figure, 101,102,103- light sources；201- first couples quartz pushrod；202- second couples quartz pushrod；203- the 3rd
Couple quartz pushrod；The reflection subassemblies of 301- first；The reflection subassemblies of 302- second；The coupling output quartz pushrods of 401- first；402- second
Coupling output quartz pushrod.
Embodiment
Multispectral light source coupling device provided by the invention is described in detail below with reference to Fig. 1 to Fig. 4, it is
Optional embodiment of the present invention, it is believed that those skilled in the art are not in the range of spirit and content of the invention is changed, energy
It is enough that it is modified and polished.
Comprehensive reference Fig. 1 to Fig. 4, the invention provides a kind of multispectral light source coupling device, including at least two light sources,
Quartz pushrod, Transflective component and coupling output quartz pushrod are coupled, the incidence end of each coupling quartz pushrod is provided with one
The light source, the exit end of each coupling quartz pushrod are provided with a Transflective component, each Transflective component
Two incidence ends be respectively equipped with the incident coupling quartz pushrod for having different light sources or coupling output quartz pushrod, each coupling is defeated
Go out exit end of the quartz pushrod located at a Transflective component, two incidence ends are transmitted to by the Transflective component
Energy transmission and/or reflection after be transferred in its exit end the coupling output quartz pushrod.
About coupling quartz pushrod and coupling output quartz pushrod, the cross section of the coupling quartz pushrod and coupling output quartz pushrod
In polygon, for example can be quadrangle, hexagon, octagon etc..Incident end face and outgoing end face can as needed according to
Certain proportion is adjusted, and outgoing end face must be bigger than incident end face, i.e., described coupling quartz pushrod and coupling output quartz pushrod
Outgoing end face is more than incident end face.The section of the coupling quartz pushrod is more than the output face of the corresponding light source.
Wherein, light source can use LED light source, LED light source be with couple quartz pushrod before, apart from the smaller the better, be less than
0.1mm, coupling quartz pushrod can be cuboid, and cross-sectional sizes are determined by the size of LED light source, it is necessary to cutting more than LED light source
Face, so more luminous energy can be made to be transmitted backward by coupling quartz pushrod.The length of LED light source needs to be more than coupling quartz pushrod
The long side in section, so it is to place the coupling quartz pushrod of another LED light source.Couple incident end face and the outgoing of quartz pushrod
End face is required for plating anti-reflection film, increases the transmitance of corresponding LED light source luminous energy.
Embodiment 1
Refer to Fig. 1, the quantity of the light source and coupling quartz pushrod is two, i.e. light source 101 and light source 102, and
Quartz pushrod 201 and coupling quartz pushrod 202 are coupled, it is corresponding, the coupling output quartz pushrod 400 and Transflective component 300
Quantity is one.Which show a kind of basic cell structure of multispectral light source coupling device.Other elementary cells can be used as
The coupling quartz pushrod of structure uses, and can thus realize the coupling of more multispectral LED light source luminous energy, one of citing
The as scheme of embodiment 2, but protection scope of the present invention is also not necessarily limited to this.
Relevant Transflective component, following present two kinds of alternatives, be applicable to the present embodiment with it is mentioned below
Embodiment 2.The exit facet of the Transflective component is relative with first plane of incidence, and the Transflective component is further used
To transmit the incident energy of the first incidence end to exit end, the energy of the second incidence end is reflected to exit end.
Wherein, first plane of incidence can be understood as the face of face coupling quartz pushrod 201, and second plane of incidence is that face couples stone
The face of English rod 202, exit facet are the face of face coupling output quartz pushrod 400；
In one of them optional scheme, Fig. 2 is refer to, the Transflective component includes band logical speculum 301 and three
Individual speculum 302,303,304, described 301, three speculums 302,303 and 304 of band logical speculum and Transflective component
First plane of incidence enclose form right angle triangular prism structure, certainly, first plane of incidence designated herein can be with physical components
The face of formation, can also not have the face of physical components, the band logical speculum 301 is in the inclined-plane of triangular prism structure, one
The plane of incidence of speculum 302 and first is in two right-angle surfaces, and speculum 303 and 304 is in two other described in another two
Side, Fig. 2 is specifically may refer to understand；The band logical speculum 301 is configured to be transmissive to described first to enter
The incident energy in face is penetrated to exit facet, reflects the energy of second plane of incidence to exit facet.
Furthermore, it is understood that band logical speculum 301 can realize the energy through light source 101, reflection source 102 by plated film
Energy.Lateral reflector 302,303 and 304 is the material for the energy for being capable of reflecting light source 101 and light source 103.
Wherein, coupling the light output end of quartz pushrod 202 needs to plate band logical film layer, is capable of the energy in high printing opacity source 102, can
The energy of reflection source 101.This reflection subassembly is capable of the energy of efficient coupling light source 101.In alternative, light source 101
It is LED light source with 102.
In another alternative, Fig. 3 is refer to, the Transflective component includes triangular prism 310 and three speculums
320th, 330 and 340, a right-angle surface of the triangular prism 310 is second plane of incidence of the Transflective component, described three
Another right-angle surface of angle prism 310 is the Transflective component exit facet, the inclined-plane of the triangular prism 310, three it is anti-
Mirror 320,330 and 340 is penetrated, and first plane of incidence of the Transflective component encloses form right angle triangular prism structure, it is described
The inclined-plane of triangular prism 310 is in the inclined-plane of triangular prism structure, and the plane of incidence of speculum 320 and first is in two directly
Edged surface, speculum 330 and 340 described in another two are in two other side；
The inclined-plane of the triangular prism 310 is further provided with being transmissive to the incident energy of first plane of incidence to outgoing
The high transmittance film layer in face, and the energy of second plane of incidence is reflected to the high-reflecting film layer of exit facet, as the Transflective component
The right-angle surface of the triangular prism of exit facet is provided with the high transmittance film layer with corresponding incident energy match, three speculums
The high-reflecting film layer of the incident energy of first plane of incidence can be reflected by being provided with.This coupled modes being capable of efficiently coupling light source 103
Energy, realize the coupling efficiency of the light energy more than 95% of LED light source 103.
Embodiment 2
The quantity of the light source and coupling quartz pushrod is three, the coupling output quartz pushrod and Transflective component
Quantity is two；
Wherein, the first coupling quartz pushrod 201 couples quartz pushrod 202 located at the two of the first Transflective component 301 with second
Individual incidence end, the first coupling output quartz pushrod 401 are located at the exit end of the first Transflective component 301, and described the
One coupling output quartz pushrod 401 and the 3rd couples two incidences that quartz pushrod 203 is located at the second Transflective component 302
End, the second coupling output quartz pushrod 402 are located at the exit end of the second Transflective component 302.
In the preferred embodiment of the invention, the first coupling quartz pushrod 201 is that I lines couple quartz pushrod, its incidence end
It is correspondingly provided with I line sources, i.e. light source 101；The second coupling quartz pushrod 202 is that H lines couple quartz pushrod, and its incidence end is correspondingly set
There are H line sources, i.e. light source 102；The 3rd coupling quartz pushrod 203 is that G lines couple quartz pushrod, and its incidence end is correspondingly provided with G lines
Light source, i.e. light source 103.
In further specific embodiment, its actually HI Transflectives component of the first Transflective component 301, it can use
The mode of band logical speculum, i.e., first in previously mentioned two kinds of alternatives, it is preferential ensure I linear lights can transmitance,
Band logical speculum 301 is that I lines are high thoroughly, and H lines are high anti-, and the second coupling quartz pushrod, i.e. H lines coupling quartz pushrod outgoing end face needs to plate I
Line high-reflecting film layer and H line high transmittance film layers.The lateral reflector of first Transflective component 301, i.e. the second Transflective component
302nd, 303 and 303 high anti-H lines, I lines.
Second Transflective component 302, its actually GHI Transflectives component, is coupled by the way of reflecting prism, i.e., before
Second in two kinds of alternatives that text is mentioned, wherein HI coupling output quartz pushrods are located at the incident end face of triangular prism 310,
3rd coupling quartz pushrod 203, i.e. G lines coupling quartz pushrod are located on the inclined-plane of triangular prism 310.Second Transflective component 302
Triangular prism incident end face and outgoing end face plating GHI high transmittance film layers, inclined-plane plating G line high transmittance film layers and HI line high-reflecting film layers, side
Face speculum, level speculum 320,330 and 330 plate G line high-reflecting film layers.
Wherein, the first Transflective component 301, i.e. HI Transflectives component can realize I lines coupling efficiency 90%, second
Transflective component 302, i.e. GHI Transflectives component can realize HI coupling efficiencies 95%.
In summary, the present invention can realize the coupling of multispectral LED light source, and have by basic optical element
Following characteristic：
1st, it is simple in construction：Complete to couple using components such as simple quartz pushrod, speculums；
2nd, image is substantially reduced away from more compact structure；
3rd, coupling efficiency is high：Different to the coupling efficiency of the different angles of divergence, the angle of divergence is smaller, and coupling efficiency is higher；
4th, using taper quartz pushrod, NA can accurately be modulated；
5th, NA is coupled, visual field is unrestricted, and all NA, visual field can be completely covered；
6th, processing technology is ripe, reliable high.
Claims (10)
- A kind of 1. multispectral light source coupling device, it is characterised in that：Including at least two light sources, coupling quartz pushrod, Transflective Component and coupling output quartz pushrod, the incidence end of each coupling quartz pushrod are provided with a light source, each coupling The exit end for closing quartz pushrod is provided with a Transflective component, and two incidence ends of each Transflective component are respectively equipped with Incidence has the coupling quartz pushrod or coupling output quartz pushrod of different light sources, and each coupling output quartz pushrod is located at described in one The exit end of Transflective component, the energy transmission and/or reflection that two incidence ends are transmitted to by the Transflective component The coupling output quartz pushrod in its exit end is transferred to afterwards.
- 2. multispectral light source coupling device as claimed in claim 1, it is characterised in that：The coupling quartz pushrod and coupling export The cross section of quartz pushrod is in polygon.
- 3. multispectral light source coupling device as claimed in claim 1, it is characterised in that：The coupling quartz pushrod and coupling export The outgoing end face of quartz pushrod is more than incident end face.
- 4. multispectral light source coupling device as claimed in claim 1, it is characterised in that：The section of the coupling quartz pushrod is more than The output face of the corresponding light source.
- 5. multispectral light source coupling device as claimed in claim 1, it is characterised in that：The number of the light source and coupling quartz pushrod Amount is two, corresponding, and the quantity of the coupling output quartz pushrod and Transflective component is one.
- 6. multispectral light source coupling device as claimed in claim 1, it is characterised in that：The number of the light source and coupling quartz pushrod Amount is three, and the quantity of the coupling output quartz pushrod and Transflective component is two；Wherein, the first coupling quartz pushrod couples two incidence ends of the quartz pushrod located at the first Transflective component with second, described First coupling output quartz pushrod is located at the exit end of the first Transflective component, the first coupling output quartz pushrod and the Three coupling quartz pushrods are located at two incidence ends of the second Transflective component, and the second coupling output quartz pushrod is located at described the The exit end of two Transflective components.
- 7. multispectral light source coupling device as claimed in claim 6, it is characterised in that：The first coupling quartz pushrod is I lines Quartz pushrod is coupled, its incidence end is correspondingly provided with I line sources；The second coupling quartz pushrod is that H lines couple quartz pushrod, its incidence end It is correspondingly provided with H line sources；The 3rd coupling quartz pushrod is that G lines couple quartz pushrod, and its incidence end is correspondingly provided with G line sources.
- 8. the multispectral light source coupling device as described in claim 1 to 7 is one of any, it is characterised in that：The Transflective The exit facet of component is relative with first plane of incidence, and the Transflective component is further incident to transmit the first incidence end Energy to exit end, reflect the energy of the second incidence end to exit end.
- 9. multispectral light source coupling device as claimed in claim 7, it is characterised in that：The Transflective component includes band logical Speculum and three speculums, first plane of incidence of the band logical speculum, three speculums and Transflective component enclose Form right angle triangular prism structure, the band logical speculum are in the inclined-plane of triangular prism structure, and a speculum and first enter Penetrate face and be in two right-angle surfaces, speculum is in two other side described in another two；The band logical speculum is configured to be transmissive to the incident energy of first plane of incidence to exit facet, reflection The energy of second plane of incidence is to exit facet.
- 10. multispectral light source coupling device as claimed in claim 7, it is characterised in that：The Transflective component includes three Angle prism and three speculums, a right-angle surface of the triangular prism are second plane of incidence of the Transflective component, institute Another right-angle surface for stating triangular prism is the Transflective component exit facet, the inclined-plane of the triangular prism, three reflections Mirror, and first plane of incidence of the Transflective component enclose form right angle triangular prism structure, the inclined-plane of the triangular prism Inclined-plane in triangular prism structure, a speculum and first plane of incidence are in two right-angle surfaces, reflection described in another two Mirror is in two other side；The inclined-plane of the triangular prism is further provided with being transmissive to the incident energy of first plane of incidence to the height of exit facet Permeable membrane layer, and the energy of second plane of incidence is reflected to the high-reflecting film layer of exit facet, as the Transflective component exit facet The right-angle surface of the triangular prism be provided with high transmittance film layer with the energy match of corresponding incidence, three speculums are provided with The high-reflecting film layer of the incident energy of first plane of incidence can be reflected.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610877653.7A CN107885042A (en) | 2016-09-30 | 2016-09-30 | Multispectral light source coupling device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610877653.7A CN107885042A (en) | 2016-09-30 | 2016-09-30 | Multispectral light source coupling device |
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| CN107885042A true CN107885042A (en) | 2018-04-06 |
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| CN201610877653.7A Pending CN107885042A (en) | 2016-09-30 | 2016-09-30 | Multispectral light source coupling device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010000975A1 (en) * | 1998-06-29 | 2001-05-10 | Lsi Logic Corporation | Apparatus for enhancing image contrast using intensity filtration |
| CN101008707A (en) * | 2006-01-24 | 2007-08-01 | 上海飞锐光电科技有限公司 | Combined dodging and color separation lighting method and component thereof |
| TW201237566A (en) * | 2011-02-22 | 2012-09-16 | Canon Kk | Illumination optical system, exposure apparatus, and method of manufacturing device |
| CN103105737A (en) * | 2011-11-10 | 2013-05-15 | 上海微电子装备有限公司 | Photolithography apparatus adopting spliced multiple light sources |
| CN104423174A (en) * | 2013-08-27 | 2015-03-18 | 上海微电子装备有限公司 | Illumination system |
-
2016
- 2016-09-30 CN CN201610877653.7A patent/CN107885042A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010000975A1 (en) * | 1998-06-29 | 2001-05-10 | Lsi Logic Corporation | Apparatus for enhancing image contrast using intensity filtration |
| CN101008707A (en) * | 2006-01-24 | 2007-08-01 | 上海飞锐光电科技有限公司 | Combined dodging and color separation lighting method and component thereof |
| TW201237566A (en) * | 2011-02-22 | 2012-09-16 | Canon Kk | Illumination optical system, exposure apparatus, and method of manufacturing device |
| CN103105737A (en) * | 2011-11-10 | 2013-05-15 | 上海微电子装备有限公司 | Photolithography apparatus adopting spliced multiple light sources |
| CN104423174A (en) * | 2013-08-27 | 2015-03-18 | 上海微电子装备有限公司 | Illumination system |
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