CN107864439A - A kind of vibrating diaphragm and MEMS microphone - Google Patents
A kind of vibrating diaphragm and MEMS microphone Download PDFInfo
- Publication number
- CN107864439A CN107864439A CN201711390897.3A CN201711390897A CN107864439A CN 107864439 A CN107864439 A CN 107864439A CN 201711390897 A CN201711390897 A CN 201711390897A CN 107864439 A CN107864439 A CN 107864439A
- Authority
- CN
- China
- Prior art keywords
- stomata
- vibrating diaphragm
- block plate
- film bulk
- arc block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/12—Non-planar diaphragms or cones
- H04R7/127—Non-planar diaphragms or cones dome-shaped
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
The invention discloses a kind of vibrating diaphragm and MEMS microphone, belong to technical field of electronic equipment.Vibrating diaphragm provided by the present invention includes film bulk and connecting portion, and multiple first stomatas and the second stomata are provided with film bulk, and one first arc block plate is provided with every one first stomata, one second arc block plate is provided with every one second stomata.The vibrating diaphragm can be effectively reduced vibrating diaphragm hardness by setting the first stomata and the second stomata on film bulk, improve the sensitivity of vibrating diaphragm, reduce influence of the thermal stress to vibrating diaphragm in production process, and improve anti-the hyperbar impact capacity and drop resistant ability of vibrating diaphragm.By being provided with the first arc block plate in every one first stomata, one second arc block plate is provided with every one second stomata, can effectively improve the LF-response characteristic of the vibrating diaphragm.Present invention also offers a kind of MEMS microphone for including above-mentioned vibrating diaphragm.
Description
Technical field
The present invention relates to technical field of electronic equipment, more particularly to a kind of vibrating diaphragm and the MEMS microphone using the vibrating diaphragm.
Background technology
MEMS (numeral) microphone is the microphone based on the manufacture of MEMS manufacturing technologies, and MEMS is the contracting of MEMS
Write.MEMS microphone is commonly used for being used to pick up voice signal in various mobile devices, and voice signal is changed into electric signal
It is transmitted, MEMS microphone is typically by MEMS tiny currents, the micro- electric capacity cartridges of MEMS, micro- integrated converting circuit, the operatic tunes
Formed with FR anti-jamming circuits, the micro- electric capacity cartridges of MEMS include vibrating diaphragm, and vibrating diaphragm can directly receive audio signal, by MEMS
Tiny current is transferred to micro- integrated converting circuit, and high frequency electrical signal is changed and zooms into low-resistance by micro- integrated converting circuit
Electric signal, while filtered through FR anti-jamming circuits, exports the electric signal that is matched with front end circuit, by the reading to electric signal from
And realize the identification to sound.Compared to traditional ECM microphones, MEMS microphone have stability strong, small volume, light weight,
Heat resistance is good, manufacture craft is simple and the advantages of can effectively suppressing the fluctuation of supply voltage.
However, the LF-response characteristic of existing MEMS microphone is poor, anti-hyperbar impact capacity and drop resistant poor ability,
Once imprudence falls the electronic equipment comprising MEMS microphone on the ground, the vibrating diaphragm in MEMS microphone will be easy to occur to break
Damage or rupture, so that the voice signal distortion that MEMS microphone receives, the conversion for influenceing voice signal and electric signal is smart
Degree, or voice signal can not be just received again at all, have a strong impact on the normal use of electronic equipment and the experience of user.
The content of the invention
It is an object of the present invention to provide a kind of vibrating diaphragm, the not only LF-response characteristic of the vibrating diaphragm is good, high sensitivity,
Anti- hyperbar impact capacity is good, also with good drop resistant ability and thermal stress resistance performance, can be effectively reduced vibrating diaphragm rupture
Risk.
It is another object of the present invention to provide a kind of MEMS microphone using above-mentioned vibrating diaphragm, the MEMS microphone resists
Fall that ability is good, service life is long, LF-response characteristic is good, tonequality reduction degree is high.
To use following technical scheme up to this purpose, the present invention：
A kind of vibrating diaphragm is provided, including：
Film bulk, it is in plane, and the edge of the film bulk is provided with the first arcuate socket group and the second arc
Kong Qun, endless belt-shaped region, the first arcuate socket group bag are formed between the first arcuate socket group and second arcuate socket
Multiple first stomatas are included, one first arc block plate is provided with each first stomata, the second arcuate socket group includes
Multiple second stomatas, are provided with one second arc block plate in each second stomata, multiple first stomatas and multiple
The rounded array arrangement of second stomata, and using the central shaft of the film bulk as array center；
Connecting portion, the connecting portion are stretched out by the edge of the film bulk, and the film bulk can be with institute
Plane where stating connecting portion is that equilbrium position progress is of reciprocating vibration.
Preferably, described first arc block plate one end is fixedly connected with the film bulk, first arc block plate
Inside from the other end to first stomata extend, between first arc block plate and first stomata formed the 3rd gas
Hole, the 3rd stomata is in crescent shape, and the arc-shaped side of the 3rd stomata is bent towards the direction at the film bulk center
It is raised.
Preferably, described second arc block plate one end is fixedly connected with the film bulk, second arc block plate
Inside from the other end to second stomata extend, between second arc block plate and second stomata formed the 4th gas
Hole, the 4th stomata is in crescent shape, and the arc-shaped side of the 4th stomata is towards away from the direction bending at the film bulk center
It is raised.
Preferably, first stomata is staggered with second stomata, first stomata is apart from the film
Ultimate range at body edges is less than minimum range of second stomata apart from the film bulk edge.
Preferably, first stomata is equal with the quantity of second stomata.
Preferably, first stomata is slotted eye.
Preferably, the major axis of multiple first stomatas is tangent with same circumference.
Preferably, second stomata is slotted eye.
Preferably, the major axis of multiple second stomatas is tangent with another circumference.
A kind of MEMS microphone, include the vibrating diaphragm described in upper item.
Beneficial effects of the present invention：
Vibrating diaphragm provided by the present invention, can by setting the first arcuate socket group and the second arcuate socket group on film bulk
Vibrating diaphragm hardness is effectively reduced, improves the sensitivity of vibrating diaphragm, the annular formed between the first arcuate socket group and the second arcuate socket group
Belt-like zone, influence of the thermal stress to vibrating diaphragm in production process can not only be effectively reduced, additionally it is possible to improve the anti-height of vibrating diaphragm
Air pressure impact capacity and drop resistant ability.By being provided with the first arc block plate in every one first stomata, in every one second gas
One second arc block plate is provided with hole, good drop resistant ability, anti-air pressure impact capacity and thermal stress resistance can ensured
On the premise of ability, effectively improve LF-response characteristic, improve the tonequality of electronic product.And connected by being set on vibrating diaphragm
Portion, be advantageous to vibrating diaphragm being fixed in other elements, film bulk carries out vibrational energy by equilbrium position of plane where connecting portion
Enough improve the stability of film bulk vibration.
Brief description of the drawings
Fig. 1 is the top view of vibrating diaphragm provided by the present invention；
Fig. 2 is that vibrating diaphragm provided by the present invention removes the top view after the first arc block plate and the second arc block plate.
In figure：1st, film bulk；2nd, connecting portion；3rd, the first stomata；4th, the second stomata；5th, the first arc block plate；6th, second
Arc block plate；7th, the 3rd stomata；8th, the 4th stomata.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
As depicted in figs. 1 and 2, vibrating diaphragm includes film bulk 1 and connecting portion 2, and film bulk 1 is in plane, connecting portion 2 by
The edge of film bulk 1 stretches out, and film bulk 1 can carry out past using the place plane of connecting portion 2 as equilbrium position
Multiplex vibration, the edge of film bulk 1 are provided with the first arcuate socket group and the second arcuate socket group, the first arcuate socket group and the second arc
Endless belt-shaped region is formed between shape hole, the first arcuate socket group is made up of multiple first stomatas 3, in each first stomata 3
One first arc block plate 5 is provided with, the second arcuate socket group is made up of multiple second stomatas 4, in each second stomata 4
One second arc block plate 6, multiple first stomatas 3 and the rounded array arrangement of multiple second stomatas 4 are provided with, and with film
The central shaft of body 1 is array center.
When vibrating diaphragm receives voice signal, vibrating diaphragm is fixed in other elements using the connecting portion 2 of vibrating diaphragm so that film
Body 1 is hanging, so that film bulk 1 can be of reciprocating vibration as equilbrium position progress using the place plane of connecting portion 2, in film sheet
The edge of body 1 sets connecting portion 2 to reduce the difficulty that vibrating diaphragm is connected with other elements, is easy to vibrating diaphragm being fixed on other elements
On, effectively fixed so as to be provided when film bulk 1 does of reciprocating vibration for vibrating diaphragm, prevent vibrating diaphragm from coming off, improve film sheet
The stability that body 1 vibrates.
By setting the first arcuate socket group and the second arcuate socket group in the edge of film bulk 1, it can be effectively reduced and shake
The hardness of film, the sensitivity of vibrating diaphragm is improved, and because the arc-shaped side of the first arcuate socket group and the arcuate socket of the second arcuate socket group are
Smoothed curve, when vibrating diaphragm is impacted by hyperbar, or falling moment for contacting to earth, because machinery should caused by vibrating diaphragm deformation
Power can be distributed in the edge of arcuate socket, and the radius of curvature of the certain point on the edge of arcuate socket is bigger, the machine at this
Tool stress is with regard to smaller, and due in smoothing junction everywhere on the arcuate socket, without any flex point, radius of curvature is relatively large, therefore vibrating diaphragm
When receiving impacting with high pressure or huge vibrations, the endless belt-shaped region between the first arcuate socket group and the second arcuate socket group can
Effectively buffering is provided, so as to avoid stress concentration, reduces the possibility of vibrating diaphragm rupture, improves the anti-hyperbar punching of vibrating diaphragm
Hit ability and drop resistant ability.And the endless belt-shaped region can discharge part thermal stress in the production process of vibrating diaphragm, avoid
Thermal stress is concentrated during manufacture, is ruptured so as to prevent vibrating diaphragm because thermal stress is concentrated.Improving drop resistant performance, thermal stress resistance
While performance and impact resistance, by being provided with the first arc block plate 5 in the first stomata 3, set in the second stomata 4
There is the second arc block plate 6, the air-flow passed through out of the first stomata 3 and the second stomata 4 can be efficiently reduced, improve microphone
Low-frequency phase should.
Specifically, the one end of the first arc block plate 5 is fixedly connected with film bulk 1, the other end of the first arc block plate 5 is to
The inside extension of one stomata 3, forms the 3rd stomata 7, the 3rd stomata 7 is in crescent moon between the first arc block plate 5 and the first stomata 3
Shape, and the arc-shaped side of the 3rd stomata 7 bends protrusion towards the direction at the center of film bulk 1.The one end of second arc block plate 6 and film
Body 1 is fixedly connected, and the other end of the second arc block plate 6 extends to the inside of the second stomata 4, the second arc block plate 6 and second
The 4th stomata 8 is formed between stomata 4, the 4th stomata 8 bends protrusion towards away from the direction at the center of film bulk 1.
When vibrating diaphragm is moving reciprocatingly, air-flow can quickly from the 3rd stomata 7 and the 4th stomata 8 by, although first
Arcuate socket group and the second arcuate socket group energy enough effectively improve the thermal stress resistance ability, anti-hyperbar impact capacity and drop resistant of vibrating diaphragm
Ability, but the Mike that air-flow carries the vibrating diaphragm from the first arcuate socket group and the second arcuate socket group quickly through that can have a strong impact on
The LF-response characteristic of wind.In the present embodiment, by being provided with the first arc block plate 5 in the first stomata 3, in the second stomata
The second arc block plate 6 is provided with 4, and the bearing of trend of the first arc block plate 5 and the second arc block plate 6 is oppositely arranged, energy
Enough on the basis of ensureing not influenceing the first arcuate socket group and the second arcuate socket group intermediate region shape, reduce gas leakage to vibrating diaphragm
Influence, improve the LF-response characteristic of the microphone.
In order to increase effective cushion area in endless belt-shaped region, buffering effect is improved, in the present embodiment by the first gas
The stomata 4 of hole 3 and second is staggered, and ultimate range of first stomata 3 apart from the edge of film bulk 1 is less than the second stomata 4
Minimum range apart from the edge of film bulk 1.Effective cushion area is that the first stomata 3 and the second stomata 4 intersect herein
Partial area, if the first stomata 3 and the face of the second stomata 4 are set, effective cushion area is only the first stomata 3 and second
The region faced between stomata 4, between the region or two adjacent second stomatas 4 between two adjacent first stomatas 3
Region is not effective buffer area.
Specifically, the line of centres of the center of any one the first stomata 3 and adjacent thereto two the second stomatas 4 is formed
Triangle；The line of centres of the center of any one the second stomata 4 and adjacent thereto two the first stomatas 3 equally constitutes triangle
Shape.In the present embodiment, in order to be further ensured that film strength of shaking, above-mentioned triangle is arranged to equilateral triangle, equilateral three
The distance between angular the first stomata 3 that can ensure that the first stomata 3 is adjacent thereto and the second stomata 4 are equal, so that annular
Intensity is relatively uniform everywhere in belt-like zone, prevents because intensity inequality causes vibrating diaphragm to rupture.
Further, the first stomata 3 is slotted eye, and the major axis of every one first stomata 3 of rounded array arrangement with
Same circumference is tangent, and compared to circular port, on the premise of equal area, the sideline girth of elliptical aperture is longer, so as to
Effective cushion area of the belt-like zone further formed between the first stomata 3 of increase and the second stomata 4, be advantageous to ensureing to shake
Stress is preferably eliminated on the premise of film-strength, therefore in the present embodiment, the first stomata 3 is arranged to slotted eye.Similarly,
Second stomata 4 is arranged to slotted eye, and the major axis of every one second stomata 4 and another circumference is tangent.In addition, pass through
First stomata 3 and the second stomata 4 are arranged to slotted eye, can increase the first stomata 3 and the second stomata 4 intersects part
Radius of curvature, concentrated so as to further reduce mechanical stress and thermal stress, further reduce thermal stress pair in production process
The influence of vibrating diaphragm, additionally it is possible to improve anti-the hyperbar impact capacity and drop resistant ability of vibrating diaphragm.
In order to further improve the acoustical behavior of vibrating diaphragm, it is stable to ensure that vibration of the vibrating diaphragm when receiving voice signal has
Property, is arranged to equal by the quantity of the first stomata 3 and the second stomata 4, and the quantity of arcuate socket can be specific according to the size of vibrating diaphragm
Setting, in the present embodiment, the quantity of the first stomata 3 and the second stomata 4 is 12.For the ease of by vibrating diaphragm and other elements
It is fixedly connected, the central axis upright of the extension plane of connecting portion 2 and film bulk 1 is set.
The present embodiment additionally provides a kind of MEMS microphone using above-mentioned vibrating diaphragm, and the MEMS microphone has drop resistant ability
Well, the advantages that service life is long, LF-response characteristic is good, tonequality reduction degree is high, disclosure satisfy that client is higher to MEMS microphone
Requirement.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating example of the present invention, and it is pair to be not
The restriction of embodiments of the present invention.For those of ordinary skill in the field, may be used also on the basis of the above description
To make other changes in different forms.There is no necessity and possibility to exhaust all the enbodiments.It is all this
All any modification, equivalent and improvement made within the spirit and principle of invention etc., should be included in the claims in the present invention
Protection domain within.
Claims (10)
- A kind of 1. vibrating diaphragm, it is characterised in that including：Film bulk (1), it is in plane, and the edge of the film bulk (1) is provided with the first arcuate socket group and the second arc Shape hole group, endless belt-shaped region, the first arcuate socket group are formed between the first arcuate socket group and second arcuate socket Including multiple first stomatas (3), one first arc block plate (5), second arc are provided with each first stomata (3) Shape hole group includes multiple second stomatas (4), and one second arc block plate (6) is provided with each second stomata (4), multiple First stomata (3) and multiple rounded array arrangements of second stomata (4), and with the film bulk (1) Central shaft is array center；Connecting portion (2), the connecting portion (2) are stretched out by the edge of the film bulk (1), the film bulk (1) It can be carried out using plane where the connecting portion (2) as equilbrium position of reciprocating vibration.
- 2. vibrating diaphragm according to claim 1, it is characterised in that described first arc block plate (5) one end and the film sheet Body (1) is fixedly connected, and the other end of first arc block plate (5) extends to the inside of first stomata (3), and described first The 3rd stomata (7) is formed between arc block plate (5) and first stomata (3), the 3rd stomata (7) is in crescent shape, and institute The arc-shaped side of the 3rd stomata (7) is stated towards the direction bend relief at the film bulk (1) center.
- 3. vibrating diaphragm according to claim 2, it is characterised in that described second arc block plate (6) one end and the film sheet Body (1) is fixedly connected, and the other end of second arc block plate (6) extends to the inside of second stomata (4), and described second The 4th stomata (8) is formed between arc block plate (6) and second stomata (4), the 4th stomata (8) is in crescent shape, and described the The arc-shaped side of four stomatas (8) is towards away from the direction bend relief at the film bulk (1) center.
- 4. according to the vibrating diaphragm described in claim any one of 1-3, it is characterised in that first stomata (3) and second gas Hole (4) is staggered, and ultimate range of first stomata (3) apart from the film bulk (1) edge is less than described second Minimum range of the stomata (4) apart from the film bulk (1) edge.
- 5. vibrating diaphragm according to claim 4, it is characterised in that the number of first stomata (3) and second stomata (4) Measure equal.
- 6. vibrating diaphragm according to claim 1, it is characterised in that first stomata (3) is slotted eye.
- 7. vibrating diaphragm according to claim 6, it is characterised in that the major axis of multiple first stomatas (3) with it is same Circumference is tangent.
- 8. vibrating diaphragm according to claim 6, it is characterised in that second stomata (4) is slotted eye.
- 9. vibrating diaphragm according to claim 8, it is characterised in that the major axis of multiple second stomatas (4) with another circle Week is tangent.
- 10. a kind of MEMS microphone, it is characterised in that include the vibrating diaphragm described in claim any one of 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711390897.3A CN107864439A (en) | 2017-12-21 | 2017-12-21 | A kind of vibrating diaphragm and MEMS microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711390897.3A CN107864439A (en) | 2017-12-21 | 2017-12-21 | A kind of vibrating diaphragm and MEMS microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107864439A true CN107864439A (en) | 2018-03-30 |
Family
ID=61706688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711390897.3A Pending CN107864439A (en) | 2017-12-21 | 2017-12-21 | A kind of vibrating diaphragm and MEMS microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107864439A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109195075A (en) * | 2018-11-29 | 2019-01-11 | 华景科技无锡有限公司 | A kind of microphone diaphragm and microphone |
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| CN103338427A (en) * | 2013-07-18 | 2013-10-02 | 山东共达电声股份有限公司 | MEMS (micro-electromechanical systems) chip and MEMS microphone |
| CN103347808A (en) * | 2011-12-29 | 2013-10-09 | 歌尔声学股份有限公司 | A silicon based mems microphone, a system and a package with the same |
| CN104540776A (en) * | 2012-08-14 | 2015-04-22 | 埃普科斯股份有限公司 | Mems component and method for the production thereof |
| CN105009604A (en) * | 2012-09-24 | 2015-10-28 | 思睿逻辑国际半导体有限公司 | MEMS device and process |
| CN207573628U (en) * | 2017-12-21 | 2018-07-03 | 上海微联传感科技有限公司 | A kind of vibrating diaphragm and MEMS microphone |
-
2017
- 2017-12-21 CN CN201711390897.3A patent/CN107864439A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103347808A (en) * | 2011-12-29 | 2013-10-09 | 歌尔声学股份有限公司 | A silicon based mems microphone, a system and a package with the same |
| CN104540776A (en) * | 2012-08-14 | 2015-04-22 | 埃普科斯股份有限公司 | Mems component and method for the production thereof |
| CN105009604A (en) * | 2012-09-24 | 2015-10-28 | 思睿逻辑国际半导体有限公司 | MEMS device and process |
| CN103338427A (en) * | 2013-07-18 | 2013-10-02 | 山东共达电声股份有限公司 | MEMS (micro-electromechanical systems) chip and MEMS microphone |
| CN207573628U (en) * | 2017-12-21 | 2018-07-03 | 上海微联传感科技有限公司 | A kind of vibrating diaphragm and MEMS microphone |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109195075A (en) * | 2018-11-29 | 2019-01-11 | 华景科技无锡有限公司 | A kind of microphone diaphragm and microphone |
| CN109195075B (en) * | 2018-11-29 | 2024-04-12 | 华景科技无锡有限公司 | Microphone vibrating diaphragm and microphone |
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Effective date of registration: 20190122 Address after: Room 118, Building 20, No. 83 Lane 1-42, Hongxiang North Road, Wanxiang Town, Pudong New Area, Shanghai, 201318 Applicant after: Maigan Microelectronics (Shanghai) Co., Ltd. Address before: 201203 2, 3 building, 439 Chunchun Road, Pudong New Area, Shanghai. Applicant before: Microlink SensTech Shanghai Co., Ltd. |