CN107846083A - Wireless energy supply is in the system of MEMS electric-field sensors, method and respective electric field sensor - Google Patents
Wireless energy supply is in the system of MEMS electric-field sensors, method and respective electric field sensor Download PDFInfo
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- CN107846083A CN107846083A CN201711270560.9A CN201711270560A CN107846083A CN 107846083 A CN107846083 A CN 107846083A CN 201711270560 A CN201711270560 A CN 201711270560A CN 107846083 A CN107846083 A CN 107846083A
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- 230000005684 electric field Effects 0.000 title claims abstract description 91
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- 238000001914 filtration Methods 0.000 claims abstract description 9
- 238000002955 isolation Methods 0.000 claims abstract description 8
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- 238000010168 coupling process Methods 0.000 claims description 11
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- 239000003989 dielectric material Substances 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000000087 stabilizing effect Effects 0.000 claims description 7
- 230000000644 propagated effect Effects 0.000 claims description 4
- 230000003321 amplification Effects 0.000 claims description 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 2
- 239000012774 insulation material Substances 0.000 claims 2
- 238000010304 firing Methods 0.000 abstract description 3
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- 230000007774 longterm Effects 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 3
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- 238000012544 monitoring process Methods 0.000 description 3
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
- H02J50/20—Circuit arrangements or systems for wireless supply or distribution of electric power using microwaves or radio frequency waves
- H02J50/27—Circuit arrangements or systems for wireless supply or distribution of electric power using microwaves or radio frequency waves characterised by the type of receiving antennas, e.g. rectennas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0807—Measuring electromagnetic field characteristics characterised by the application
- G01R29/0814—Field measurements related to measuring influence on or from apparatus, components or humans, e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0878—Sensors; antennas; probes; detectors
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Abstract
A kind of wireless energy supply system of MEMS electric-field sensors, energy supply method and MEMS electric-field sensors.Wireless energy supply system includes signal source, power amplifier, transmitting antenna, reception antenna, back-end circuit；High frequency ac signal caused by signal source amplifies by power amplifier, then frequency electromagnetic waves are converted to by transmitting antenna, reception antenna receives frequency electromagnetic waves and has switched to electric energy, and back-end circuit is to meet the electric energy needed for backend load by a series of rectification, filtering, Voltage to current transducer；Wherein reception antenna, back-end circuit and electric field induction chip, signal processing circuit collectively constitute MEMS electric-field sensors.The electric-field sensor uses wireless energy supply scheme, solves the problems, such as the energy supply of long-term continuous firing, and ensure that potential isolation；Meanwhile integrated sensor volume is small, caused electric field distortion degree is small, and accuracy of measurement is high.
Description
Technical field
The invention belongs to technical field of electric power, is related to electric-field sensor, more particularly to a kind of MEMS electric-field sensors
The MEMS electric-field sensors of wireless energy supply system and wireless energy supply.
Background technology
Ultra-high-tension power transmission line surface em field intensity is to determine circuit minimum to ground level and plans circuit width of corridor
Important evidence.Electromagnetic environment under ultra-high-tension power transmission line receives more and more attention, particularly the electric-field intensity under high-voltage line,
Turn into the problem of very important in environmental protection and technical field of electromagnetic compatibility.Total electric field is ultra-high-tension power transmission line operation shape
The direct reaction of the neighbouring electromagnetic environment of state, transmission line of electricity, for on-line monitoring and the fault diagnosis of transmission line of electricity, Lightning Warning,
There is huge application value in the fields such as the insulating Design of power system device.Accurate measurement obtains the electricity in space near transmission line of electricity
Field value, it is to understand work transmission line limitation, the basic tool of monitoring Research Work of Power Transmission Line state, and assessment transmission system electricity
The important method of magnetic environment.
Power transmission line nearby electric field measurement method it is conventional mainly have rotational electrometer, rotating field mill instrument, column electric-field probe,
Photoelectric sensor, MEMS electric-field sensor etc..The most volume of these sensors is larger, causes the larger distortion of electric field, electricity
Position is not independent, and the object of measurement is ground formate field intensity, limitation be present for the measurement demand in the whole audience domain of space.Rotating field
Mill instrument is mainly made up of movable masking blade and the induction blade below masking blade, masking blade cyclic rotation,
Induction blade produces the amplitude sinusoidal signal directly proportional to electric-field intensity to be measured.Because ion implanting electric current and induced-current are present
Phase difference, total electric field of the ground containing ion stream can be measured by rear end filtering technique.Column electric-field probe is according to rotation
The principle of field mill instrument develops, and causes the electric field after distortion to be equal to former space electric field using the probe of certain altitude, realizes
The measurement of space electric field, but it is only used for the electric field measurement of certain height.Photoelectric integrated sensor make use of bubble Er Kesi effects
Should, i.e., try to achieve extra electric field using refraction of the crystal under electric field action.But photoelectric integrated sensor needs to coordinate optical fiber to make
With, it is impossible to accomplish that current potential is completely independent, it is difficult to realize the measurement of space electric field.MEMS sensor has small volume, work(
Consume the advantages that low, integrated level is high, spatial resolution is high.
MEMS electric-field sensors are the novel sensors manufactured using microelectronics and micromachining technology.With body
Product is small, in light weight, cost is low, low in energy consumption, reliability is high, suitable for mass production, be easily integrated and realize intelligentized feature.
Meanwhile the characteristic size of micron dimension allows it to complete the irrealizable function of some tradition machinery sensor institutes.China
Chinese Academy of Sciences electron institute has worked out the surface air electric-field sensor based on MEMS technology, sounding atmospheric electric field sensing
Device, three-dimensional electric field sensor and intelligent grid application electric-field sensor.But these MEMS electric-field sensors are all electricity consumptions at present
Pond energizes, and exists and changes the security hidden trouble that battery is brought, it is impossible to realizes the on-line real time monitoring of electric field.
The content of the invention
Solve the defects of prior art and deficiency, the present invention proposes a kind of wireless energy supply system of MEMS electric-field sensors
System, using wireless energy supply mode, meet being wirelessly transferred for remote lower energy so that sensor current potential is completely independent, and is easy to
The measurement of blended space electric field；Designed using IOS Integrated Solutions, overall sensor size as low as 1cm3, draw in total electric field
The aberration problems risen can be ignored, and realize the accurate measurement of electric field.
The technical scheme of the wireless energy supply system of the MEMS electric-field sensors of the present invention is as follows：System includes signal source, work(
Rate amplifier, transmitting antenna, reception antenna, power supply back-end processing circuit and load；Wherein, the high-frequency ac letter that signal source occurs
Number by power amplifier amplify, then send frequency electromagnetic waves by transmitting antenna, frequency electromagnetic waves pass in free space
Broadcast, reception antenna receives RF energy and switchs to electric energy, by a series of rectification of power supply back-end processing circuit, filtering, voltage
Curent change exports for voltage stabilizing after the form of energy of the voltage x current needed for satisfaction load.
The technical scheme of the wireless system energy supply method of the MEMS electric-field sensors of the present invention is as follows：Wireless system includes letter
Number source, power amplifier, transmitting antenna, reception antenna, power supply back-end processing circuit and load；Method includes：1), signal source is sent out
Raw high frequency ac signal amplifies by power amplifier；2), amplified signal sends frequency electromagnetic waves by transmitting antenna, high
Frequency electromagnetic waves are propagated in free space；3), reception antenna receives the RF energy of high frequency electromagnetic wave signal and switchs to electric energy；
4), reception signal is become and turned to needed for satisfaction load by power supply back-end processing circuit by a series of rectification, filtering, voltage x current
Voltage x current form of energy after voltage stabilizing export.
The present invention proposes a kind of MEMS electric-field sensors, and the sensor includes shell；The cuboid upper surface of shell is with
Surface is metallic plate, for the electric charge in accumulated ions stream；It is insulating materials on the inside of metallic plate；Surrounding is antenna part, is utilized
The insulating materials is by metallic plate and antenna part electrical isolation.
Wherein, reception antenna employs the rectangular microband paste antenna of high-k.The antenna bottom is a metal
Plate, reflex is played, surface is a metal patch, and centre is dielectric material.The microstrip antenna formed has radiation and connect
Radio wave is received, realizes the function of mutually being changed between electric current and electromagnetic wave.
The wireless energy supply system of the present invention can be not only used for MEMS electric-field sensors, and can be used for other functions
Sensor or other small electronic products.
Using above-mentioned technical proposal, the beneficial effects of the present invention are：
1), solve the problems, such as long-term continuous firing using wireless energy supply technical scheme, and ensure that potential isolation；
2), integrated sensor volume is small, and caused electric field distortion degree is small, and accuracy of measurement is high.
Brief description of the drawings
Fig. 1 is present system structure chart.
Fig. 2 a are the top views of the topology diagram of reception antenna one embodiment of MEMS electric-field sensors of the present invention.
Fig. 2 b are the front views of the topology diagram of reception antenna one embodiment of MEMS electric-field sensors of the present invention.
Fig. 3 is the overall package structure chart of MEMS electric-field sensors of the present invention.
Embodiment
The specific embodiment of the present invention is further discussed below with reference to technical scheme and accompanying drawing.
The wireless energy supply system of the MEMS electric-field sensors of the present invention, as shown in figure 1, mainly including signal source 1, power is put
Big device 2, transmitting antenna 3, reception antenna 4, power supply back-end processing circuit 5 and load 6.Wherein, the high-frequency ac that signal source 1 occurs
Signal amplifies by power amplifier 2, forms high frequency ac signal after amplification；Then high-frequency electromagnetic is sent by transmitting antenna 3
Ripple, the frequency electromagnetic waves are propagated in free space；Reception antenna 4 receives the RF energy of frequency electromagnetic waves and has switched to phase
Answer electric energy；Electric energy that power supply back-end processing circuit 5 is transmitted to reception antenna 4 carries out a series of rectification, filtering, by the electric energy
After voltage, curent change is the voltage needed for satisfaction load 6, the electrical energy forms of electric current, voltage stabilizing output, with the energy of supply load 6
Needed for amount.
The wireless energy supply method of the wireless energy supply system of MEMS electric-field sensors is：1), the high-frequency ac that signal source 1 occurs
Signal amplifies by power amplifier 2；2), amplified signal sends frequency electromagnetic waves by the conversion of transmitting antenna 3, this high-frequency electrical
Magnetic wave is propagated in free space；3), reception antenna 4 receives frequency electromagnetic waves RF energy and has switched to corresponding electric energy；4) it is, electric
The electric energy of reception by a series of rectification, filtering, the voltage x current of the electric energy is become and turns to satisfaction by source back-end processing circuit 5
Voltage stabilizing exports after the form of energy of voltage x current needed for load.
Wherein, the power that transmitting antenna is sent is Pt, it can be seen from FRIIS formula, the power received by reception antenna
ForWherein Gt、GrThe gain of transmitting antenna and the gain of reception antenna are represented respectively, and R is receipts
The distance between antenna is sent out, λ is the wavelength for the frequency electromagnetic waves that antenna is sent.As can be seen that receiving work(from above-mentioned formula (1)
The size and transmission power of rate, the gain of transmitting antenna, the gain of reception antenna are directly proportional.Signal source, power amplifier and hair
It is all unrestricted in source, its size to penetrate antenna.And receiving terminal is limited by application scenario, it should realize and meet backend load
While power demand, overall dimensions are as small as possible.Therefore, the design of reception antenna is most important：
1st, the size of reception antenna should be as small as possible；
2nd, the gain of reception antenna is as big as possible, meets the needs of backend load power, reduces to front end power
Demand.
It follows that most critical part is reception antenna in MEMS electric-field sensor wireless energy supply systems.The present invention one
In embodiment reception antenna use high-k rectangular microband paste antenna, overall structure such as Fig. 2 a, shown in 2b, wherein,
Fig. 2 a are the top view of reception antenna, and Fig. 2 b are the front view of reception antenna.The reception antenna forms microstrip antenna, has radiation
With reception radio wave, the function of mutually being changed between electric current and electromagnetic wave is realized.The reception antenna includes the gold positioned at bottom
Belong to plate 24, play reflex, surface is metal patch 21, and centre is dielectric material 22, is stretched out feeder line by metal patch 21
23.In order to reduce the size of antenna as far as possible, the Antenna Operation uses Gao Jie in higher frequency band, such as 5.8GHz
The dielectric material of electric constant, for example, permittivity εrThe Rogers RT/ of=10.2, dielectric loss angle tangent tan δ=0.0023
The materials of duroid 6010, further reduce the volume of antenna.
The specific size of antenna is as shown in the table：
In one embodiment, the MEMS electric-field sensors in radio function system, (MEMS electric field sensings as shown in Figure 3
The overall package structure chart of device), including upper and lower a, shell for left and right full symmetric cuboid, wherein, cuboid it is upper
Surface and lower surface are metallic plate 31, and the material of further metallic plate 31 can be Ni metal, for the electricity in accumulated ions stream
Lotus；The interior side of upper and lower metallic plate 31 is insulating materials 32；Surrounding is reception antenna 33, using insulating materials 32 by metallic plate
31 and the electrical isolation of reception antenna 33；The MEMS electric field measurements chip 34 of MEMS electric-field sensors is set in shell, for realizing
Every measurement function of sensor.As the load of electric-field sensor, based on the wireless energy supply system of the present invention, for other
The sensor of function or other small electronic products, or the small device load of other power；Also set up in shell
Power supply back-end processing circuit 35, with the electric property coupling of reception antenna 33, the signal energy for reception antenna 33 to be received converts
For the voltage required for the MEMS electric field measurements chip 34, current forms；The signal processing circuit 36 set in shell, with institute
State MEMS electric field measurements chip 34, the electric property coupling of power supply back-end processing circuit 35, for by the MEMS electric field measurements chip 34
Measurement result be amplified, filter and then exported.
Embodiments of the invention use wireless energy supply mode, solve the problems, such as the energy supply of the long-term continuous firing of electric-field sensor,
And it ensure that potential isolation；Integrated sensor volume is small, and caused electric field distortion degree is small, and accuracy of measurement is high.
Meanwhile wireless energy supply scheme of the invention is applicable not only to MEMS electric-field sensors, and it is applied to other functions
Sensor or other small electronic products.
Although according to above embodiment described the present invention, person of ordinary skill in the field is it should be understood that can be with
In the spirit and scope of the appended claims the present invention is realized by changing.All such changes and modifications, which are intended to, falls into institute
In the range of attached claim.Therefore, example and accompanying drawing are considered to be illustrative rather than restrictive.
Claims (15)
1. a kind of wireless energy supply system of MEMS electric-field sensors, including signal source, power amplifier, transmitting antenna and MEMS electricity
Field sensor；Wherein：
The signal source, for providing energy signal；
The power amplifier, for by the energy signal power amplification from signal source；
The transmitting antenna, for energy to be sent in a manner of wireless signal；
It is characterized in that：
The MEMS electric-field sensors include reception antenna, power supply back-end processing circuit and load；
The reception antenna is used to receive the wireless signal and is converted to corresponding electric energy；
The power supply back-end processing circuit carries out a series of rectification, filtering to the corresponding electric energy, to will be described accordingly electric
Can voltage, after electric current is converted to the electrical energy form for meeting voltage needed for the load, electric current, voltage stabilizing output, described in supply
The energy demand of load.
2. wireless energy supply system as claimed in claim 1, wherein, the MEMS electric-field sensors further comprise shell, institute
The upper and lower surface for stating shell is metallic plate, for the electric charge in accumulated ions stream；It is insulation material on the inside of the metallic plate
Material；Surrounding is the reception antenna, using the insulating materials by the metallic plate and the reception antenna electrical isolation；It is described
Enclosure sets the power supply back-end processing circuit, the power supply back-end processing circuit and the reception antenna electric property coupling,
Signal energy for the reception antenna to be received be converted into enclosure setting load required for voltage, electric current shape
Formula.
3. wireless energy supply system as claimed in claim 2, wherein the load is included at MEMS electric field measurements chip and signal
Circuit, the MEMS electric field measurements chip and the power supply back-end processing circuit electric property coupling are managed, for realizing electric-field intensity
Measurement；The signal processing circuit and the MEMS electric field measurements chip, the power supply back-end processing circuit electric property coupling, are used for
The measurement result of the MEMS electric field measurements chip is amplified, filters and then exported.
4. wireless energy supply system as claimed in claim 1, wherein the reception antenna pastes for the rectangular microstrip of high-k
Chip antenna, include the metallic plate of bottom, the metal patch on surface, and the dielectric material positioned at centre.
5. wireless energy supply system as claimed in claim 4, wherein the reception antenna is operated in higher frequency band, given an account of
Material is the dielectric material of high-k.
6. a kind of wireless energy supply method of the wireless energy supply system of MEMS electric-field sensors, the wireless energy supply system include signal
Source, power amplifier, transmitting antenna and MEMS electric-field sensors；It is characterized in that：
The MEMS electric-field sensors include reception antenna, power supply back-end processing circuit and load；
Method and step includes：
1), the signal source produces energy signal, and the energy signal amplifies by power amplifier；
2) signal after, amplifying is converted to frequency electromagnetic waves by the transmitting antenna and sent, and the frequency electromagnetic waves are in freedom
Propagated in space；
3), the reception antenna of the MEMS electric-field sensors receives the frequency electromagnetic waves, and has switched to corresponding electric energy；
4), the power supply back-end processing circuit by the corresponding electric energy of reception by a series of rectification, filtering, to by institute
State the voltage of corresponding electric energy, after electric current is converted to the electrical energy form for meeting voltage needed for the load, electric current, voltage stabilizing output,
Supply the energy demand of the load.
7. wireless energy supply method as claimed in claim 6, wherein, the MEMS electric-field sensors further comprise shell, institute
The upper and lower surface for stating shell is metallic plate, for the electric charge in accumulated ions stream；It is insulation material on the inside of the metallic plate
Material；Surrounding is the reception antenna, using the insulating materials by the metallic plate and the reception antenna electrical isolation；It is described
Enclosure sets the power supply back-end processing circuit, the power supply back-end processing circuit and the reception antenna electric property coupling,
Signal energy for the reception antenna to be received be converted into enclosure setting load required for voltage, electric current shape
Formula.
8. wireless energy supply method as claimed in claim 7, wherein the load is included at MEMS electric field measurements chip and signal
Circuit, the MEMS electric field measurements chip and the power supply back-end processing circuit electric property coupling are managed, for realizing electric-field intensity
Measurement；The signal processing circuit and the MEMS electric field measurements chip, the power supply back-end processing circuit electric property coupling, are used for
The measurement result of the MEMS electric field measurements chip is amplified, filters and then exported.
9. wireless energy supply method as claimed in claim 6, wherein the reception antenna pastes for the rectangular microstrip of high-k
Chip antenna, include the metallic plate of bottom, the metal patch on surface, and the dielectric material positioned at centre.
10. wireless energy supply method as claimed in claim 9, wherein the reception antenna is operated in higher frequency band, it is described
Dielectric material is the dielectric material of high-k.
A kind of 11. MEMS electric-field sensors, it is characterised in that：Including reception antenna, power supply back-end processing circuit and load；
The reception antenna is used to receive wireless signal and is converted to corresponding electric energy；
The power supply back-end processing circuit carries out a series of rectification, filtering to the corresponding electric energy, to will be described accordingly electric
Can voltage, after electric current is converted to the electrical energy form for meeting voltage needed for the load, electric current, voltage stabilizing output, described in supply
The energy of load.
12. MEMS electric-field sensors as claimed in claim 11, wherein, the MEMS electric-field sensors further comprise outer
Shell, the upper and lower surface of the shell is metallic plate, for the electric charge in accumulated ions stream；It is exhausted on the inside of the metallic plate
Edge material；Surrounding is the reception antenna, using the insulating materials by the metallic plate and the reception antenna electrical isolation；
The enclosure sets the power supply back-end processing circuit, the power supply back-end processing circuit and the electrical coupling of the reception antenna
Connect, the signal energy for the reception antenna to be received is converted into voltage, electricity required for the load of enclosure setting
Manifold formula.
13. MEMS electric-field sensors as claimed in claim 12, wherein the load includes MEMS electric field measurements chip and letter
Number process circuit, the MEMS electric field measurements chip and the power supply back-end processing circuit electric property coupling, for realizing electric-field strength
The measurement of degree；The signal processing circuit and the MEMS electric field measurements chip, the power supply back-end processing circuit electric property coupling,
For the measurement result of the MEMS electric field measurements chip to be amplified, filter and then be exported.
14. MEMS electric-field sensors as claimed in claim 11, wherein the reception antenna is micro- for the rectangle of high-k
Band paster antenna, include the metallic plate of bottom, the metal patch on surface, and the dielectric material positioned at centre.
15. MEMS electric-field sensors as claimed in claim 14, wherein the reception antenna is operated in higher frequency band, institute
Give an account of the dielectric material that material is high-k.
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| CN201711270560.9A CN107846083B (en) | 2017-12-05 | 2017-12-05 | System and method for wireless energy supply to MEMS electric field sensor and corresponding electric field sensor |
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| CN201711270560.9A CN107846083B (en) | 2017-12-05 | 2017-12-05 | System and method for wireless energy supply to MEMS electric field sensor and corresponding electric field sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109510323A (en) * | 2018-12-17 | 2019-03-22 | 广东电网有限责任公司 | A kind of contactless electricity getting device |
| CN110488103A (en) * | 2019-08-28 | 2019-11-22 | 清华大学 | Spatial electronic field measurement system |
| CN114069888A (en) * | 2021-12-02 | 2022-02-18 | 南方电网科学研究院有限责任公司 | Wireless sensing system based on magnetic resonance energy supply and ring main unit |
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| CN206096275U (en) * | 2016-07-27 | 2017-04-12 | 清华大学 | Be used for containing ion flow direct current field measuring sensor device |
| CN107228989A (en) * | 2017-05-31 | 2017-10-03 | 北京中科飞龙传感技术有限责任公司 | A kind of MEMS electric-field sensors of insulation and sealing structure |
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