CN107841722A - A kind of optical coating directly monitors the protector of control evaporation - Google Patents
A kind of optical coating directly monitors the protector of control evaporation Download PDFInfo
- Publication number
- CN107841722A CN107841722A CN201711129843.1A CN201711129843A CN107841722A CN 107841722 A CN107841722 A CN 107841722A CN 201711129843 A CN201711129843 A CN 201711129843A CN 107841722 A CN107841722 A CN 107841722A
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- CN
- China
- Prior art keywords
- protector
- pedestal
- optical coating
- fixed
- display screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
Abstract
The protector of control evaporation is directly monitored the invention discloses a kind of optical coating, coating chamber, outer display, pedestal is provided with the coating chamber side wall, internal fixation plate is provided with the inside of the base outer wall, rubber sealing boot is provided with the outside of the base outer wall, the outer display is provided with the outside of the pedestal, display screen is provided with the outer display, status indicator lamp is provided with above the display screen, control keyboard is provided with beside the display screen, side is provided with data export jack below the control keyboard, hydraulic stem is provided with the inside of the pedestal, fold set is provided with the outside of the hydraulic stem, the hydraulic stem front end is provided with front shoe, the front shoe center is provided with center and is provided with camera, the camera surrounding is provided with illuminating lamp.Beneficial effect is：Can random adjustment angle, filming parameter during accurate detection evaporation is easy to use, avoids plating material and leaks, improves plated film precision.
Description
Technical field
The present invention relates to technical field of optical coating, and the anti-of control evaporation is directly monitored more particularly to a kind of optical coating
Protection unit.
Background technology
In vacuum environment, material is heated and is plated on substrate referred to as vacuum evaporation, or cries vacuum coating.Evaporation be by
Material to be filmed, which is placed in vacuum, to be evaporated or distils, and is allowed to the process in workpiece or substrate surface precipitation.Plated in optics
Film field, in order that plated film meets the requirements, it is necessary to monitor optically coated parameter.During to optical coating parameter monitoring, material is deposited
Material easily enters inside coating machine with monitoring holes, is finally deposited on inside machine, and cleaning difficulty is big, easily causes the damage of equipment
It is bad.The Chinese patent of Application No. 201520023708.9, disclose the protection that a kind of optical coating directly monitors control evaporation
Device, including DOME, support and aluminium foil package structure, the support include three supports, and the DOME is installed on support,
Ensure that the position of through hole is aligned with any one in three supports, sight passes through this root support, it is ensured that the position of this root support
In the centre of through hole；In vertical direction, the position that through hole is arranged on that root support of alignment, the aluminium foil package structure are found
To be defined by through hole center, the area of 2 times of through holes is wrapped up with aluminium foil in alignment bracket.Above-mentioned patent structure is simple, right
The monitoring of evaporation is inconvenient, and very inconvenient during use.
The content of the invention
The purpose of the present invention is that to solve the above problems and provides a kind of optical coating and directly monitor control evaporation
Protector.
The present invention is achieved through the following technical solutions above-mentioned purpose：
A kind of optical coating directly monitors the protector of control evaporation, coating chamber, outer display, the coating chamber side wall
On be provided with pedestal, internal fixation plate is provided with the inside of the base outer wall, rubber sealing boot is provided with the outside of the base outer wall,
The outer display is provided with the outside of the pedestal, display screen is provided with the outer display, is set above the display screen
Stateful indicator lamp, the display screen side are provided with control keyboard, and side is provided with data export below the control keyboard
Jack, the pedestal inner side are provided with hydraulic stem, are provided with fold set on the outside of the hydraulic stem, the hydraulic stem front end is provided with
Front shoe, the front shoe center are provided with center and are provided with camera, and the camera surrounding is provided with illuminating lamp, institute
State camera rear and be provided with image processor, described image processor rear is provided with video memory, described image processing
The above-mentioned cooperation of device outer wall has fixing-line device, and fixed mount is provided with the front shoe outer wall, preceding shield is provided with the fixed mount
Cover, the front protection cover center is provided with window, disposable diaphragm, the front protection cover and institute is provided with outside the window
State plated film chamber interior walls contact position and be provided with sealing strip.
Further, the internal fixation plate welds together with the pedestal, and the pedestal is plugged on the coating chamber side
On wall, the internal fixation plate is fixed by screws on the coating chamber, and the rubber sealing boot is plugged on the pedestal and institute
State in the gap between coating chamber.
Further, the display screen is embedded on the outer display, and the display screen is LED liquid crystal displays, described aobvious
Display screen electrically connects with described image processor.
Further, the hydraulic stem is with there is four, and four hydraulic stems are fixed by screws on the pedestal, institute
Hydraulic rod top is stated by bearing pin with the front shoe to be connected.
Further, four hydraulic stems, which can be adjusted in synchronism, is also individually adjusted.
Further, the camera is fixed by screws in the front shoe center, and the illuminating lamp passes through screw
The front shoe front end face surrounding is fixed on, the illuminating lamp is LED.
Further, the fixing-line device is fixed by screws in described image processor side wall, connects the illuminating lamp
Wire fixed by the fixing-line device.
Further, the fixed mount is fixed by screws on the front shoe, and the front protection cover is consolidated by screw
It is scheduled on the fixed mount, the front protection cover is the arcuate structure of evagination.
Further, the sealing strip is sticked on the contact surface of the front protection cover and the coating chamber, the sealing strip
It is made of cotton-padded covering.
Further, the window is opened in the front protection cover center, and the light transmittance of the window is not less than 90%,
The area of the window is the 1/3-1/2 of the front protection cover area.
The beneficial effects of the present invention are：Can random adjustment angle, filming parameter during accurate detection evaporation, use
It is simple and convenient, avoid plating material from leaking, improve plated film precision.
Brief description of the drawings
Fig. 1 is the structure diagram for the protector that a kind of optical coating of the present invention directly monitors control evaporation；
Fig. 2 is the outer display device structure letter for the protector that a kind of optical coating of the present invention directly monitors control evaporation
Figure；
Fig. 3 is the scheme of installation for the protector that a kind of optical coating of the present invention directly monitors control evaporation；
Fig. 4 is the partial sectional view for the protector that a kind of optical coating of the present invention directly monitors control evaporation.
Description of reference numerals is as follows：
1st, outer display；2nd, pedestal；3rd, sealing strip；4th, front protection cover；5th, coating chamber；6th, disposable diaphragm；7th, window；
8th, fixed mount；9th, fold set；10th, status indicator lamp；11st, display screen；12nd, control keyboard；13rd, data export jack；14th, image
Memory；15th, image processor；16th, camera；17th, illuminating lamp；18th, fixing-line device；19th, hydraulic stem；20th, internal fixation plate；21、
Rubber sealing boot；22nd, front shoe.
Embodiment
With reference to embodiment and accompanying drawing, the invention will be further described：
As Figure 1-Figure 4, a kind of optical coating directly monitors the protector of control evaporation, coating chamber 5, outer display
1, it is provided with pedestal 2 in the side wall of coating chamber 5, the inside outer wall of pedestal 2 is provided with internal fixation plate 20, outside the pedestal 2
Rubber sealing boot 21 is provided with the outside of wall, the outside of pedestal 2 is provided with the outer display 1, set on the outer display 1
There is display screen 11, the top of display screen 11 is provided with status indicator lamp 10, and the side of display screen 11 is provided with control keyboard
12, the lower section side of control keyboard 12 is provided with data export jack 13, and the inner side of pedestal 2 is provided with hydraulic stem 19, institute
State the outside of hydraulic stem 19 and be provided with fold set 9, the front end of hydraulic stem 19 is provided with front shoe 22, in the front shoe 22
Centre is provided with center and is provided with camera 16, and the surrounding of camera 16 is provided with illuminating lamp 17, and the rear of camera 16 is set
Image processor 15 is equipped with, the rear of described image processor 15 is provided with video memory 14, the outer wall of described image processor 15
Above-mentioned cooperation has fixing-line device 18, and fixed mount 8 is provided with the outer wall of front shoe 22, preceding shield is provided with the fixed mount 8
Cover 4, the center of front protection cover 4 is provided with window 7, and disposable diaphragm 6 is provided with outside the window 7, is protected before described
Cover 4 is provided with sealing strip 3 with the inwall contact position of coating chamber 5.
In the present embodiment, the internal fixation plate 20 welds together with the pedestal 2, and the pedestal 2 is plugged on the plating
In the side wall of film room 5, the internal fixation plate 20 is fixed by screws on the coating chamber 5, and the rubber sealing boot 21 is plugged on
In gap between the pedestal 2 and the coating chamber 5.
In the present embodiment, the display screen 11 is embedded on the outer display 1, and the display screen 11 is LED liquid crystal displays,
The display screen 11 electrically connects with described image processor 15.
In the present embodiment, for the hydraulic stem 19 with there is four, four hydraulic stems 19 are fixed by screws in the base
On seat 2, the top of hydraulic stem 19 is connected by bearing pin with the front shoe 22.
In the present embodiment, four hydraulic stems 19 can be adjusted in synchronism and also individually be adjusted.
In the present embodiment, the camera 16 is fixed by screws in the center of front shoe 22, the illuminating lamp 17
The front end face surrounding of front shoe 22 is fixed by screws in, the illuminating lamp 17 is LED.
In the present embodiment, the fixing-line device 18 is fixed by screws in the side wall of described image processor 15, described in connection
The wire of illuminating lamp 17 is fixed by the fixing-line device 18.
In the present embodiment, the fixed mount 8 is fixed by screws on the front shoe 22, and the front protection cover 4 passes through
Screw is fixed on the fixed mount 8, and the front protection cover 4 is the arcuate structure of evagination.
In the present embodiment, the sealing strip 3 is sticked on the contact surface of the front protection cover 4 and the coating chamber 5, described close
Strip of paper used for sealing 3 is made of cotton-padded covering.
In the present embodiment, the window 7 is opened in the center of front protection cover 4, and the light transmittance of the window 7 is not less than
90%, the area of the window 7 is the 1/3-1/2 of the area of front protection cover 4.
The present invention concrete operating principle be：A new disposable diaphragm 6 sticked on before plated film described
The outside of form 7, when being deposited, the camera 16 shoots the process of plated film and is shown on the display screen 11, passes through institute
State control keyboard 12 and can open the illuminating lamp 17 and be illuminated increase brightness of image, by controlling the micro- of the hydraulic stem 19
Type, which stretches, can adjust the shooting angle of the camera 16, convenient complete convenient detection coating process, by surface after the completion of plated film
The disposable diaphragm 6 that adhesion has Coating Materials, which is taken off, to be re-replaced new, prevents from influenceing observation effect.
The basic principles, principal features and advantages of the present invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, the original for simply illustrating the present invention described in above-described embodiment and specification
Reason, without departing from the spirit and scope of the present invention, various changes and modifications of the present invention are possible, these changes and improvements
It all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its Xiao Wu circle
It is fixed.
Claims (10)
1. a kind of optical coating directly monitors the protector of control evaporation, it is characterised in that：Coating chamber, outer display, it is described
Pedestal is provided with coating chamber side wall, internal fixation plate is provided with the inside of the base outer wall, is provided with the outside of the base outer wall
Rubber sealing boot, the pedestal outside are provided with the outer display, display screen, the display are provided with the outer display
Screen top is provided with status indicator lamp, and control keyboard is provided with beside the display screen, and side is set below the control keyboard
There are data to export jack, hydraulic stem is provided with the inside of the pedestal, fold set, the hydraulic stem are provided with the outside of the hydraulic stem
Front end is provided with front shoe, and the front shoe center is provided with center and is provided with camera, and the camera surrounding is set
There is illuminating lamp, the camera rear is provided with image processor, and described image processor rear is provided with video memory, institute
Stating the above-mentioned cooperation of image processor outer wall has fixing-line device, is provided with fixed mount on the front shoe outer wall, on the fixed mount
Front protection cover is provided with, the front protection cover center is provided with window, and disposable diaphragm is provided with outside the window, described
Front protection cover is provided with sealing strip with the plated film chamber interior walls contact position.
2. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
State internal fixation plate with the pedestal to weld together, the pedestal is plugged in the coating chamber side wall, and the internal fixation plate leads to
Cross screw to be fixed on the coating chamber, the rubber sealing boot is plugged on the gap between the pedestal and the coating chamber
It is interior.
3. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
State display screen to be embedded on the outer display, the display screen is LED liquid crystal displays, the display screen and described image processor
Electrical connection.
4. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
Hydraulic stem is stated with there are four, four hydraulic stems are fixed by screws on the pedestal, and the hydraulic rod top passes through pin
Axle is connected with the front shoe.
5. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Four
Hydraulic stem described in root, which can be adjusted in synchronism, to be also individually adjusted.
6. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
State camera and be fixed by screws in the front shoe center, before the illuminating lamp is fixed by screws in the front shoe
End face surrounding, the illuminating lamp are LED.
7. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
State fixing-line device to be fixed by screws in described image processor side wall, the wire for connecting the illuminating lamp passes through the fixing-line device
It is fixed.
8. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
State fixed mount to be fixed by screws on the front shoe, the front protection cover is fixed by screws on the fixed mount, institute
State the arcuate structure that front protection cover is evagination.
9. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：Institute
State sealing strip to stick on the contact surface of the front protection cover and the coating chamber, the sealing strip is made of cotton-padded covering.
10. a kind of optical coating according to claim 1 directly monitors the protector of control evaporation, it is characterised in that：
The window is opened in the front protection cover center, and the light transmittance of the window is not less than 90%, the area of the window
For the 1/3-1/2 of the front protection cover area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711129843.1A CN107841722A (en) | 2017-11-15 | 2017-11-15 | A kind of optical coating directly monitors the protector of control evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711129843.1A CN107841722A (en) | 2017-11-15 | 2017-11-15 | A kind of optical coating directly monitors the protector of control evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107841722A true CN107841722A (en) | 2018-03-27 |
Family
ID=61679003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711129843.1A Withdrawn CN107841722A (en) | 2017-11-15 | 2017-11-15 | A kind of optical coating directly monitors the protector of control evaporation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107841722A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2472191Y (en) * | 2001-03-20 | 2002-01-16 | 杨树梅 | Membrane thickness monitor with inner reflecting and two optical beams |
| CN1730720A (en) * | 2004-08-06 | 2006-02-08 | 台达电子工业股份有限公司 | Filming system and its film thickness monitoring device |
| CN101161856A (en) * | 2007-02-01 | 2008-04-16 | 河南中光学集团有限公司 | Optical coating film thickness monitoring automatic control system and monitoring method |
| CN101275218A (en) * | 2008-05-21 | 2008-10-01 | 兰州大学 | Film preparation device and observation method for film growth |
| CN202482427U (en) * | 2012-01-06 | 2012-10-10 | 肇庆市振华真空机械有限公司 | Shielding prevention sight glass device of optical coater |
-
2017
- 2017-11-15 CN CN201711129843.1A patent/CN107841722A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2472191Y (en) * | 2001-03-20 | 2002-01-16 | 杨树梅 | Membrane thickness monitor with inner reflecting and two optical beams |
| CN1730720A (en) * | 2004-08-06 | 2006-02-08 | 台达电子工业股份有限公司 | Filming system and its film thickness monitoring device |
| CN101161856A (en) * | 2007-02-01 | 2008-04-16 | 河南中光学集团有限公司 | Optical coating film thickness monitoring automatic control system and monitoring method |
| CN101275218A (en) * | 2008-05-21 | 2008-10-01 | 兰州大学 | Film preparation device and observation method for film growth |
| CN202482427U (en) * | 2012-01-06 | 2012-10-10 | 肇庆市振华真空机械有限公司 | Shielding prevention sight glass device of optical coater |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180327 |