CN107831182A - A kind of method for matching ensaying image and scanning electron microscope image - Google Patents

A kind of method for matching ensaying image and scanning electron microscope image Download PDF

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Publication number
CN107831182A
CN107831182A CN201610825393.9A CN201610825393A CN107831182A CN 107831182 A CN107831182 A CN 107831182A CN 201610825393 A CN201610825393 A CN 201610825393A CN 107831182 A CN107831182 A CN 107831182A
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image
ensaying
electron microscope
scanning electron
matching
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CN201610825393.9A
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Inventor
蒲军
周宇
徐婷
秦学杰
曹立迎
马翠玉
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China Petroleum and Chemical Corp
Sinopec Exploration and Production Research Institute
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China Petroleum and Chemical Corp
Sinopec Exploration and Production Research Institute
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Priority to CN201610825393.9A priority Critical patent/CN107831182A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203Measuring back scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/05Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/053Investigating materials by wave or particle radiation by diffraction, scatter or reflection back scatter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/401Imaging image processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/616Specific applications or type of materials earth materials

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention discloses a kind of method for matching ensaying image and scanning electron microscope image, methods described includes:Search the ensaying image and the similar holes in the scanning electron microscope image;Adjust the ensaying image and the scanning electron microscope image so that the similar holes Corresponding matching, so as to realize the matching of the ensaying image and the scanning electron microscope image.Compared with prior art, the method according to the invention matching accuracy is high, matching is rapid.Further, the method according to the invention can realize the matching of ensaying image and scanning electron microscope image automatically, greatly reduce the workload of researcher.

Description

A kind of method for matching ensaying image and scanning electron microscope image
Technical field
The present invention relates to geologic development field, in particulars relate to a kind of matching ensaying image and scanning electron microscope image Method.
Background technology
In current geologic development field, mineral ESEM and backscattered electron ESEM are two kinds of conventional figures Obtain equipment.
Backscattered electron ESEM be mainly used in generate scanning electron microscope image, its can be used for distinguish rock matrix, hole, Venturi, assaying composition simultaneously carry out mineral classification etc..The characteristics of this ESEM is pixel height, high resolution, is imaged model Enclose big.
Mineral ESEM is mainly used in generating Quem-scan ensaying images.It can obtain point of rock forming mineral Cloth form, the quantitative distribution of mineral, the quantitative distribution of element.Compared with back scattering ESEM, the pixel of mineral scanning figure is low, Up to 0.25 micron, the mineral in scanning figure are identified each pixel with different colours.
Currently, in actual use, scanning electron microscope image need to be compareed when studying mineral with ensaying image and made With.That is, for same research object respectively using mineral ESEM and backscattered electron ESEM generation ore deposit Thing analyzes image and scanning electron microscope image.This allows for needing the ensaying image to same research object in research process Matched with scanning electron microscope image.In the matching process, because two kinds of figures are the different modes imagings to same thing, match Difficulty is big, can only observe by the naked eye the correspondence position for finding out mineral grain, waste time and energy, and causes manpower and the wave of time Take, and be difficult to be aligned.
The content of the invention
The invention provides a kind of method for matching ensaying image and scanning electron microscope image, methods described includes:
Search the ensaying image and the similar holes in the scanning electron microscope image;
Adjust the ensaying image and the scanning electron microscope image so that the similar holes Corresponding matching, so as to real The matching of the existing ensaying image and the scanning electron microscope image.
In one embodiment, the ensaying image and the similar holes in the scanning electron microscope image are searched, wherein:
The external convex polygon in hole is calculated in the ensaying image and the scanning electron microscope image respectively;
Similar external convex polygon is searched so that it is determined that the similar holes.
In one embodiment, respectively in the ensaying image with calculating the external of hole in the scanning electron microscope image Convex polygon, wherein, the external convex polygon to portal is calculated using algorithm of convex hull.
In one embodiment, similar external convex polygon is searched so that it is determined that the similar holes, wherein, contrast two figures The side number and angle of the external convex polygon of mesopore, two external convex polygon phases when the side number and consistent angle Seemingly.
In one embodiment, the side number of the external convex polygon of two figure mesopores, the consistent basis of number on side are contrasted first On, then contrast the angle of the external convex polygon of two figure mesopores.
In one embodiment, the ensaying image and the scanning electron microscope image are adjusted so that the similar holes With corresponding, wherein, adjust the engineer's scale of the ensaying image and the scanning electron microscope image so that the similar holes size Unanimously.
In one embodiment, the ensaying image and the scanning electron microscope image are adjusted so that the similar holes With corresponding, wherein, adjust the angle of the ensaying image and the scanning electron microscope image so that each side of similar holes Direction is consistent.
In one embodiment, methods described also includes:
The ensaying image of matching is folded with the scanning electron microscope image according to the Corresponding matching relation of similar holes Close.
In one embodiment, the ensaying image of matching is swept with described according to the Corresponding matching relation of similar holes Sem image overlapping is retouched, wherein:
Position the ensaying image adjusted and the similar holes in the scanning electron microscope image;
Overlap the ensaying image adjusted and the scanning electron microscope image so that the position of the similar holes is complete Full weight is folded.
In one embodiment, shape size feature the most clearly a pair of similar holes, base are filtered out from multipair similar holes The ensaying image and the scanning electron microscope image are adjusted in the similar holes filtered out.
Compared with prior art, the method according to the invention matching accuracy is high, matching is rapid.Further, according to this The method of invention can realize the matching of ensaying image and scanning electron microscope image automatically, greatly reduce the work of researcher Measure.
The further feature or advantage of the present invention will illustrate in the following description.Also, the present invention Partial Feature or Advantage will be become apparent by specification, or be appreciated that by implementing the present invention.The purpose of the present invention and part Advantage can be realized or obtained by specifically noted step in specification, claims and accompanying drawing.
Brief description of the drawings
Accompanying drawing is used for providing a further understanding of the present invention, and a part for constitution instruction, the reality with the present invention Apply example to be provided commonly for explaining the present invention, be not construed as limiting the invention.In the accompanying drawings:
Fig. 1 and Fig. 2 is the method flow diagram according to different embodiments of the invention respectively;
Fig. 3 is scanning electron microscope image according to an embodiment of the invention;
Fig. 4 is ensaying image according to an embodiment of the invention;
Fig. 5 is matching overlapping image according to an embodiment of the invention.
Embodiment
Embodiments of the present invention are described in detail below with reference to drawings and Examples, whereby implementation personnel of the invention Can fully understand how application technology means solve technical problem to the present invention, and reach the implementation process of technique effect and according to The present invention is embodied according to above-mentioned implementation process.If it should be noted that do not form conflict, each embodiment in the present invention And each feature in each embodiment can be combined with each other, the technical scheme formed protection scope of the present invention it It is interior.
Currently, in actual use, scanning electron microscope image need to be compareed when studying mineral with ensaying image and made With.That is, for same research object respectively using mineral ESEM and backscattered electron ESEM generation ore deposit Thing analyzes image and scanning electron microscope image.This allows for needing the ensaying image to same research object in research process Matched with scanning electron microscope image.In the matching process, because two kinds of figures are the different modes imagings to same thing, match Difficulty is big, can only observe by the naked eye the correspondence position for finding out mineral grain, waste time and energy, and causes manpower and the wave of time Take, and be difficult to be aligned.
In order to simply and easily realize the matching of ensaying image and scanning electron microscope image, the present invention proposes a kind of Method with ensaying image and scanning electron microscope image.
Inventor analyzes difficult point existing for existing matching link first:
(1) because sample is mobile or equipment replacement causes two figure Minerals particle positions not know;
(2) because sample is mobile or equipment replacement causes two figures Rotation to be present, angle is difficult consistent, difference be present It is different;
(3) because scanning accuracy is different, the engineer's scale of two figures is generally inconsistent.
Based on above-mentioned analysis, it is desirable to which realizing the matching of ensaying image and scanning electron microscope image needs to look between two kinds of figures To a kind of shared, easy to identify contrast object of reference.Therefore inventor continues the details performance of two kinds of imaging modes of analysis.
In ensaying image and scanning electron microscope image, mineralogical composition has different face in different imaging modes The forms of expression such as color, shading value, even identical research object, the figure effect finally presented also will not be identical.But It is empty then different in mineral structure, due to being cavity, therefore in ensaying image and scanning electron microscope image, identical hole It is basically identical to be ultimately imaged result, and especially, in different imaging modes, the shape in hole and the identification of position are relative Readily.
Therefore, the present invention chooses the hole object of reference as a comparison in mineral structure.Next this is described in detail with reference to accompanying drawing The implementation process of the method for the embodiment of invention.The step of being shown in the flow chart of accompanying drawing can include such as one group of computer Performed in the computer system of executable instruction.Although the logical order of each step is shown in flow charts, some In the case of, can be with the step shown or described by being performed different from order herein.
As shown in figure 1, in an embodiment of the present invention, first look for ensaying image and the phase in scanning electron microscope image Like hole (step S110);Then ensaying image and scanning electron microscope image (step S120) are adjusted so that corresponding of similar holes Match somebody with somebody, so as to realize the matching of ensaying image and scanning electron microscope image.
Specifically, in an embodiment of the present invention, in step s 110, pass through the identification meter of the external convex polygon of device to hole Calculate to search similar holes.Calculate the external convex polygon in hole in ensaying image and scanning electron microscope image respectively first; Then similar external convex polygon is searched so that it is determined that similar holes.
During similar external convex polygon is searched, contrast two figure mesopores external convex polygon side number with And angle, when side number and consistent angle, two external convex polygons are similar.Further, in order to reduce side number and angle Amount of calculation during contrast, the side number of the external convex polygon of two figure mesopores is contrasted first, on the basis of side number is consistent, then it is right Than the angle of the external convex polygon of two figure mesopores.
In an embodiment of the present invention, the external convex polygon to portal is calculated using convex closure (Graham) algorithm.The algorithm Comprise the following steps that:
(1) each point is sorted, to ensure to form circle, first point P0The afterbody of a table is placed on again;
(2) storehouse is prepared:Storehouse S is established, stack pointer is set to t, and 0,1,2 three point is pressed into storehouse S;
(3) for next point i, as long as S [t-1], S [t], i are popped off repeatedly without doing;By i press-in storehouses S;
(4) point in storehouse is required convex closure.
Can adjustment ensaying image and scanning electron microscope image after similar holes determines so that similar holes matching is corresponding (step S120).Specifically, in an embodiment of the present invention, the engineer's scale of ensaying image and scanning electron microscope image is adjusted, So that similar holes is in the same size.Adjust the engineer's scale of ensaying image and scanning electron microscope image so that similar holes it is external Convex polygon corresponding sides length is identical.
Further, the angle of ensaying image and scanning electron microscope image is also adjusted so that each edge direction of similar holes Unanimously.Rotate ensaying image and/or scanning electron microscope image so that the direction of the external convex polygon corresponding sides of similar holes It is identical.
Further, in an embodiment of the present invention, after ensaying image and scanning electron microscope image adjustment is completed, also The ensaying image of matching and scanning electron microscope image are overlapped according to the Corresponding matching relation of similar holes, it is more straight so as to obtain The matching result of sight.Specifically, the ensaying image adjusted and the similar holes in scanning electron microscope image are positioned first;Then Overlap the ensaying image and scanning electron microscope image adjusted so that the position of similar holes is completely overlapped.
Further, in actual applications, for same research object, ensaying image and meeting in scanning electron microscope image Multiple holes be present.That is, multipair similar holes result can be obtained when searching similar holes.In order to reduce amount of calculation, in this hair In a bright embodiment, shape size feature the most clearly a pair of similar holes are filtered out from multipair similar holes, based on filtering out Similar holes adjustment ensaying image and scanning electron microscope image.Further, it is electric with scanning in order to improve ensaying image The degree of accuracy of mirror images match result, in other embodiments of the present invention, the adjustment ensaying of multipair similar holes can also be based on Image and scanning electron microscope image.
Summary flow, the method flow of one embodiment of the invention are as shown in Figure 2.First calculate ensaying image with The external convex polygon (step S210) of scanning electron microscope image mesopore;Then side is determined from the external convex polygon for calculating acquisition The consistent external convex polygon (step S220) of number;Then consistent outer of angle is determined from the consistent external convex polygon of side number Convex polygon is connect so that it is determined that similar external convex polygon (similar holes) (step S230).
Engineer's scale based on similar external convex polygon adjustment ensaying image and/or scanning electron microscope image so that phase The length of side like external convex polygon corresponding sides is consistent (step S240);Ensaying image and/or scanning electron microscope image are rotated, is made The direction for obtaining similar external convex polygon corresponding sides is consistent (step S250);Fold the position for being finally based on similar external convex polygon Close image so that similar external convex polygon is completely overlapped (step S260).
Compared with prior art, the method according to the invention matching accuracy is high, matching is rapid.Further, according to this The method of invention can realize the matching of ensaying image and scanning electron microscope image automatically, greatly reduce the work of researcher Measure.
Next the implementation result of one embodiment of the invention is described in detail based on a concrete application example.For certain reservoir Scanning electron microscope image as shown in Figure 3 (pixel is 10nm), it is as shown in Figure 4 for the ensaying image of same target (1 pixel is 1um).
The external convex polygon in hole is calculated in scanning electron microscope image (Fig. 3) and ensaying image (Fig. 4) respectively.Its In, Fig. 3 includes the external convex polygon (A and B) in two holes;Fig. 4 includes the external convex polygon (C and D) in two holes.
The side number of the external convex polygon of two image mesopores is contrasted, such as in Fig. 3, the side of two convex polygons (A and B) Number is all in 5, Fig. 4, and the side number of two convex polygons (C and D) is also all 5.
On the basis of the external convex polygon side number in hole is consistent, the folder of the external convex polygon of two image mesopores is contrasted Angle, angle need to be equal successively in order, and each angles of convex polygon A are followed successively by 128 °, 108 °, 99 °, 141 °, 64 ° in Fig. 3, with Convex polygon C angle is consistent successively in Fig. 4.Therefore, A is similar external convex polygon to C.It is similar external convex more by searching Side shape, it is possible to the position of corresponding aperture in image can be positioned.
Image scale is adjusted, makes similar external convex polygon (A and C) corresponding sides length identical;Image angle is rotated, is made The corresponding edge direction of similar external convex polygon (A and C) is identical.Finally by the scanning electron microscope image adjusted and ensaying figure As overlapping, final overlapping result is as shown in Figure 5 in schemed.As seen from Figure 5, final scanning electron microscope image and ensaying figure The matching result of picture meets demand.
While it is disclosed that embodiment as above, but described content only to facilitate understand the present invention and adopt Embodiment, it is not limited to the present invention.Method of the present invention can also have other various embodiments.Without departing substantially from In the case of essence of the present invention, those skilled in the art, which work as, can make various corresponding changes or become according to the present invention Shape, but these corresponding changes or deformation should all belong to the scope of the claims of the present invention.

Claims (10)

  1. A kind of 1. method for matching ensaying image and scanning electron microscope image, it is characterised in that methods described includes:
    Search the ensaying image and the similar holes in the scanning electron microscope image;
    Adjust the ensaying image and the scanning electron microscope image so that the similar holes Corresponding matching, so as to realize State the matching of ensaying image and the scanning electron microscope image.
  2. 2. according to the method for claim 1, it is characterised in that search the ensaying image and the scanning electron microscope (SEM) photograph Similar holes as in, wherein:
    The external convex polygon in hole is calculated in the ensaying image and the scanning electron microscope image respectively;
    Similar external convex polygon is searched so that it is determined that the similar holes.
  3. 3. according to the method for claim 2, it is characterised in that respectively in the ensaying image and the ESEM The external convex polygon in hole is calculated in image, wherein, the external convex polygon to portal is calculated using algorithm of convex hull.
  4. 4. according to the method in claim 2 or 3, it is characterised in that search similar external convex polygon so that it is determined that institute Similar holes is stated, wherein, the side number and angle of the external convex polygon of two figure mesopores of contrast, when the side number and angle one Two external convex polygons are similar during cause.
  5. 5. according to the method for claim 4, it is characterised in that contrast the side of the external convex polygon of two figure mesopores first Number, on the basis of side number is consistent, then contrasts the angle of the external convex polygon of two figure mesopores.
  6. 6. according to the method any one of claim 1-5, it is characterised in that adjust the ensaying image with it is described Scanning electron microscope image so that the similar holes matching is corresponding, wherein, adjust the ensaying image and the scanning electron microscope (SEM) photograph The engineer's scale of picture so that the similar holes is in the same size.
  7. 7. according to the method any one of claim 1-6, it is characterised in that adjust the ensaying image with it is described Scanning electron microscope image so that the similar holes matching is corresponding, wherein, adjust the ensaying image and the scanning electron microscope (SEM) photograph The angle of picture so that each edge direction of similar holes is consistent.
  8. 8. according to the method any one of claim 1-7, it is characterised in that methods described also includes:
    The ensaying image of matching and the scanning electron microscope image are overlapped according to the Corresponding matching relation of similar holes.
  9. 9. according to the method for claim 8, it is characterised in that according to the Corresponding matching relation of similar holes by matching Ensaying image overlaps with the scanning electron microscope image, wherein:
    Position the ensaying image adjusted and the similar holes in the scanning electron microscope image;
    Overlap the ensaying image adjusted and the scanning electron microscope image so that the position of the similar holes is completely heavy It is folded.
  10. 10. according to the method any one of claim 1-9, it is characterised in that filter out shape from multipair similar holes Size characteristic the most clearly a pair of similar holes, the ensaying image and the scanning are adjusted based on the similar holes filtered out Sem image.
CN201610825393.9A 2016-09-14 2016-09-14 A kind of method for matching ensaying image and scanning electron microscope image Pending CN107831182A (en)

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CN108872284A (en) * 2018-04-10 2018-11-23 中国石油大学(北京) The detection method and device of the micro-nano matrix group structure mechanical attribute of shale
CN110197476A (en) * 2019-04-24 2019-09-03 武汉科技大学 A kind of analysis method of the three-dimensional micro- mine phase of the complicated sinter based on Fusion Features

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