CN107819409B - Mix the PDMS composite membrane and preparation method thereof of conductive material - Google Patents
Mix the PDMS composite membrane and preparation method thereof of conductive material Download PDFInfo
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- CN107819409B CN107819409B CN201711265572.2A CN201711265572A CN107819409B CN 107819409 B CN107819409 B CN 107819409B CN 201711265572 A CN201711265572 A CN 201711265572A CN 107819409 B CN107819409 B CN 107819409B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/04—Friction generators
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
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Abstract
The invention discloses a kind of PDMS composite membranes and preparation method thereof mixed conductive material and improve nano generator frictional layer longitudinal direction charge density, include the following steps: 1) to take substrate, take aluminium foil viscous on substrate；2) the spin coating PDMS solution on aluminium foil, spin coating is complete to be vacuumized in the vacuum chamber, is then heating and curing；3) with magnetically controlled sputter method in the surface PDMS metal spraying；4) corona treatment, spin coating PDMS solution are carried out；5) it vacuumizes, is heating and curing in vacuum chamber；6) step 3) is repeated to step 5), obtains the PDMS gold composite membrane of different layer gold numbers.The present invention, which has successfully been made a kind of, high transfer charge density, and there is the G-TENG of biocompatibility and low impedance characteristic simultaneously, increase internal electron region and the near surface in rubbing surface goes out to bury layer gold to increase the output of TENG, layer gold is conducive to electronics and drifts about inside frictional layer and play the role of capturing electronics.
Description
Technical field
The present invention relates to friction nanometer generating technical fields, and in particular to one kind mixes conductive material raising nano generator and rubs
Wipe the PDMS composite membrane and preparation method thereof of layer longitudinal direction charge density.
Background technique
In recent years, the friction nanometer power generator (TENG) of the coupling based on electrostatic induction effect and triboelectrification effect is got over
Come more for collecting ambient enviroment machinery.Because TENG can directly convert mechanical energy into electric energy, and immediately to small-sized
Electronics, many studies have shown that TENG can be effectively by the movement of such as human body, wave, wind etc. is present in us
Mechanical energy collection in ambient enviroment gets up.With such as bases such as biomedical sensor, electronic skin and human-computer interaction sensor
In the development of the sensing equipment of TENG technology, just more expectation can have the friction of TENG with biological friendly a kind of to people
Material, enlarged surface charge density expand its application surface.With the theoretical basis gradual perfection of TENG, we can pass through
Theory analysis process fundamentally improves the output performance of TENG.
Polymerization dimethyl siloxane (PDMS, [Si (CH as a member in electret3)2O] n), due to its possess it is plastic
Property, the advantages that transparency, flexibility, high electronegativity and bio-compatibility, often as the preferred material of production TENG.However,
Work before many focuses primarily upon the research of the modification of material surface structure and chemistry, and the space inside frictional layer is tied
Structure rarely has research.
Summary of the invention
In view of the above-mentioned problems, the purpose of the present invention is to provide one kind to improve nanometer generating by mixing conductive material
The PDMS composite membrane and preparation method thereof of machine frictional layer longitudinal direction charge density.
The present invention realizes the technical solution that its purpose uses are as follows:
A kind of preparation method mixed conductive material and improve the PDMS composite membrane of nano generator frictional layer longitudinal direction charge density,
Include the following steps:
1) one piece of nano generator substrate is taken, takes a piece of aluminium foil viscous on substrate；
2) the spin coating PDMS solution on aluminium foil, the speed of spin coating are 100~8000rpm, 5~100s of spin-coating time, spin coating
It is complete to vacuumize in the vacuum chamber 10~120 minutes, then place it in 40~70 degrees Celsius of heating plate heating 0.5~
Solidify within 6.5 hours, obtains PDMS layer；
3) with the method for magnetron sputtering when the surface PDMS carries out a length of 10~80 seconds metal sprayings；
4) the PDMS film after metal spraying is subjected to corona treatment, followed by the spin coating of PDMS solution, spin speed
For 3000~9000rpm, the time is 20~70s；
5) it is vacuumized in the vacuum chamber 30~120 minutes after the complete PDMS solution of spin coating, is subsequently placed in 40~70 degrees Celsius
Heating plate on heat 0.5~6.5 hour solidify, obtain the PDMS gold composite membrane of one layer of layer gold；
6) step 3) is repeated to step 5), obtains the PDMS gold composite membrane of different layer gold numbers.
The substrate be acrylic board or PVC or timber or glass or resin plate or polyimide plate or
PET sheet or nylon sheet or PP plate or PMMA plate or PTFE plate.
Metal spraying uses ion sputtering instrument in the step 3), and the vacuum degree that instrument is arranged is 5 × 10-2Pa, current strength are
15mA。
A kind of PDMS composite membrane mixed conductive material and improve nano generator frictional layer longitudinal direction charge density, the PDMS are multiple
It closes film and is disposed with substrate, aluminium foil layer, the first PDMS layer, at least one layer Au-PDMS composite layer, the Au- from the bottom up
PDMS composite layer includes layer gold and the second PDMS layer above layer gold.
The number of plies of the Au-PDMS composite layer is 1~6 layer.
Above-mentioned PDMS composite membrane is made by method above-mentioned.
The beneficial effects of the present invention are: being successfully made a kind of has high transfer charge density, and there is biofacies simultaneously
The G-TENG of capacitive and low impedance characteristic.The present invention is by increasing internal electron area and the near surface of rubbing surface goes out and buries layer gold
To increase the output of TENG, layer gold is conducive to electronics and drifts about inside frictional layer and play the role of capturing electronics in domain.Experiment
The results show that the transfer charge density of G-TENG can reach 168 μ C m-2, four times of almost pure PDMS-TENG output；
As a result confirm the adaptability of theoretical model, the present invention helps to develop and build the theoretical system of TENG, provide it is simple and
Novel mode realizes high charge density by internal structure and new theoretical model.
Figure of description
Fig. 1 is the preparation flow figure of PDMS composite membrane of the invention.
Fig. 2 is the structural schematic diagram of GPCF, wherein a is the structural schematic diagram of GPCF, and b, c are corona treatment respectively
Field emission scanning electron microscope (FE-SEM) photo of the cross section of layer gold and GPCF afterwards, d are to show GPCF flexibility and transparency
Pictorial diagram.
Fig. 3 is the transfer charge Density Detection result figure of the G-TENGs of different layer gold, wherein a is the G- of different layer gold numbers
The transfer charge density of TENG, b are transfer charge density of the G-TENG in different continuous working periods of different layer gold numbers.
Fig. 4 is the performance test figure of 4 layers of golden G-TENG, wherein a is 4 layers of golden G-TENG in different applied load feelings
Electric current output density and output voltage under condition, b are output power of the 4 layers of golden G-TENG in different applied loads, c
The V-T to charge for 4 layers of golden G-TENG to commercial capacitor schemes, and d is that self-powered is started the operation schematic diagram and circuit diagram of table.
Fig. 5 is the structural schematic diagram of PDMS composite membrane of the invention.
Specific embodiment
Below with reference to embodiment, the invention will be further described, but not thereby limiting the invention.
The assembling of 1 gold medal composite membrane nano generator (G-TENG) of embodiment
It prepares conductive material of mixing of the invention and improves the PDMS composite membrane of nano generator frictional layer longitudinal direction charge density (i.e.
The negative friction layer of G-TENG), operate (process is as shown in Figure 1) in accordance with the following steps:
1) take square acrylic board that one piece of side length is 4 centimeter lengths (also can be selected PVC or timber or glass or
Resin plate or polyimide plate or PET sheet or nylon sheet or PP plate or PMMA plate or PTFE plate) it is used as substrate,
A piece of an equal amount of aluminium foil is sticked on acrylic board with two-sided Kapton Tape.
2) spin coating PDMS solution (silicone resin 184, the Dow Corning) on aluminium foil, the speed of spin coating is 100~
8000rpm, 5~100s of spin-coating time, spin coating is complete to be vacuumized 10~120 minutes in the vacuum chamber, then place it in 40~
It heats 0.5~6.5 hour and solidifies in 70 degrees Celsius of heating plate, obtain PDMS layer.
3) method for using magnetron sputtering (is small ion sputter SBC-12) when the surface PDMS carries out using instrument
A length of 10~80 seconds metal sprayings, the vacuum degree that instrument is arranged is 5 × 10-2Pa, current strength 15mA.
4) the PDMS film after metal spraying is subjected to corona treatment, followed by the spin coating of PDMS solution, spin speed
For 3000~9000rpm, the time is 20~70s.
5) it is vacuumized in the vacuum chamber 30~120 minutes after the complete PDMS solution of spin coating, is subsequently placed in 40~70 degrees Celsius
Heating plate on heat 0.5~6.5 hour solidify, obtain the PDMS gold composite membrane (GPCF) of one layer of layer gold.
6) step 3) is repeated to step 5), finally obtains the negative friction layer of the G-TENG of different layer gold numbers.
The negative friction layer of 1,2,3,4 layer of golden G-TENG has been made in the present embodiment respectively according to above-mentioned steps, has prepared
When the negative friction layer of this 4 kinds of G-TENG, each technical parameter in step 2)~step 5) is as shown in table 1 below:
Table 1 prepares the particular technique parameter used when the negative friction layer of the G-TENG of different layer gold numbers
It in the above process, vacuumizes in the vacuum chamber, improves the skin effect of PDMS and aluminium electrode, gold and PDMS.
The schematic diagram of GPCF is as shown in Figure 2 a, the Flied emission scanning of the cross section of layer gold and GPCF after corona treatment
Electronic Speculum (FE-SEM) photo is respectively as shown in Fig. 2 b and Fig. 2 c.Fig. 2 d is the photo of GPCF, which show the flexibility of GPCF and thoroughly
Lightness.
Different G-TENGs is produced with the GPCF of the different layer gold of above-mentioned preparation, their transfer charge density is as schemed
Shown in 3a, FE-SEM figure clearly demonstrates their layer gold number from 4 to 0.Their charge density is 16.8nC cm-2,
16.7nC cm-2,14.5nC cm-2,9.7nC cm-2and 5.3nC cm-2, as the number of plies increases, their transfer charge density
It gradually increases and gradually stable in 16.8nC cm-2.The friction potential distribution of G-TENGs is calculated using COMSOLFEA simulation,
In simulation process, it will be assumed that layer gold has the charge for having identical quantity with friction surface, and such as Fig. 3 b, FEA simulation is accorded with test
It closes fine, it was demonstrated that there are charges for layer gold.
Fig. 4 a shows 4 layers of golden G-TENG output voltage during ohmic load changes to 200M Ω from 0 Ω
With electric current.As load resistance increases, output voltage increases, and exports electric current reduction.The load resistance of working as of 4 layers of G-TENG is 8M
When Ω, output power, which reaches, is up to 1Wm-2(Fig. 4 (b)) means lower impedance compared with low resistance, it is meant that G-TENG has
Wide application.The voltage that 4 layers of golden G-TENG can charge for commercial capacitor changes with time as illustrated in fig. 4 c.
As shown in figure 4d, we assemble 4 layers of golden G-TENG with electronic watch, finally obtain an electronic watch from driving, it
Electric energy is converted by the mechanical energy of human motion and electronic watch is driven to work, and the illustration in Fig. 4 d is that self-powered is started the circuitron of table
Reason figure.In addition, the electric energy that 4 layers of golden G-TENG are generated can also be used directly to light more commercialization LED.
The application, which has successfully been made a kind of, high transfer charge density, and has biocompatibility and Low ESR special simultaneously
Property G-TENG, increase internal electron region and bury layer gold at the near surface in rubbing surface to increase the defeated of TENG
Out.By theory analysis, layer gold is conducive to electronics and drifts about inside frictional layer and play the role of capturing electronics.Experimental result is aobvious
Show, the transfer charge density of G-TENG can reach 168 μ C m-2, four times of almost pure PDMS-TENG output.As a result it demonstrate,proves
The real adaptability of theoretical model, the application help to develop and build the theoretical system of TENG, provide simple and novel
Mode: high charge density is realized by internal structure and new theoretical model.
Embodiment 2 prepares PDMS composite membrane of the invention
The PDMS composite membrane for the layer gold that haves three layers is prepared according to the method for embodiment 1, and structural schematic diagram is as shown in figure 5, under
Up successively are as follows: 3, three layers of substrate 1, aluminium foil layer 2, the first PDMS layer Au-PDMS composite layer 4, the Au-PDMS composite layer 4 by
Layer gold 5 and the second PDMS layer 6 composition above layer gold.
Claims (5)
1. a kind of preparation method mixed conductive material and improve the PDMS composite membrane of nano generator frictional layer longitudinal direction charge density,
It is characterized in that, includes the following steps:
1) one piece of nano generator substrate is taken, takes a piece of aluminium foil viscous on substrate；
2) the spin coating PDMS solution on aluminium foil, the speed of spin coating are 100~8000rpm, 5~100s of spin-coating time, and spin coating is complete to be
It vacuumizes in the vacuum chamber 10~120 minutes, it is small then to place it in heating 0.5~6.5 in 40~70 degrees Celsius of heating plate
When solidify, obtain PDMS layer；
3) with the method for magnetron sputtering when the surface PDMS carries out a length of 10~80 seconds metal sprayings；
4) the PDMS film after metal spraying is subjected to corona treatment, followed by the spin coating of PDMS solution, spin speed is
3000~9000rpm, time are 20~70s；
5) after the complete PDMS solution of spin coating i.e. vacuumize in the vacuum chamber 30~120 minutes, be subsequently placed in 40~70 degrees Celsius plus
It heats 0.5~6.5 hour and solidifies on hot plate, obtain the PDMS gold composite membrane of one layer of layer gold；
6) step 3) is repeated to step 5), obtains the PDMS gold composite membrane of different layer gold numbers.
2. the preparation method of PDMS composite membrane as described in claim 1, which is characterized in that the substrate be acrylic board or
PVC or timber or glass or resin plate or polyimide plate or PET sheet or nylon sheet or PP plate or
PMMA plate or PTFE plate.
3. the preparation method of PDMS composite membrane as described in claim 1, which is characterized in that in the step 3) metal spraying use from
Sub- sputter, the vacuum degree that instrument is arranged is 5 × 10-2Pa, current strength 15mA.
4. a kind of PDMS composite membrane mixed conductive material and improve nano generator frictional layer longitudinal direction charge density, which is characterized in that
The PDMS composite membrane is disposed with substrate (1), aluminium foil layer (2), the first PDMS layer (3), at least one layer Au- from the bottom up
PDMS composite layer (4), the Au-PDMS composite layer (4) include layer gold (5) and the second PDMS layer (6) above layer gold, described
PDMS composite membrane is prepared according to the described in any item methods of claims 1 to 3.
5. PDMS composite membrane as claimed in claim 4, which is characterized in that the number of plies of the Au-PDMS composite layer (4) is 1~6
Layer.
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| CN109135288B (en) * | 2018-08-03 | 2021-02-19 | 哈尔滨工业大学（深圳） | PDMS-PTFE transparent film for improving performance of nano friction generator and preparation method thereof |
| CN110501518B (en) * | 2019-08-26 | 2021-09-21 | 大连海事大学 | Multi-medium speed meter based on friction nanometer power generation |
| CN111419207B (en) * | 2020-03-12 | 2021-02-19 | 中山大学 | Heart detection device and manufacturing method thereof |
| CN112751500B (en) * | 2020-12-29 | 2022-03-22 | 北京师范大学 | Friction nanometer generator based on copper phthalocyanine and preparation method and application thereof |
| CN113676075A (en) * | 2021-08-06 | 2021-11-19 | 同济大学 | Spin coating preparation method of magnetic flexible friction nano generator |
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| CN104426416B (en) * | 2013-08-30 | 2016-12-28 | 纳米新能源（唐山）有限责任公司 | The friction generator of application semiconductor composite |
| CN105515437B (en) * | 2014-10-14 | 2018-06-08 | 北京纳米能源与系统研究所 | Friction generator and the method for application friction generator power generation |
| CN106230306A (en) * | 2016-08-09 | 2016-12-14 | 中山市天美能源科技有限公司 | A kind of flexible generating thin film and preparation method thereof |
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