CN107805067A - A kind of dielectric constant microwave ceramic medium of zero frequency temperature coefficient and ultra-low loss and preparation method thereof - Google Patents
A kind of dielectric constant microwave ceramic medium of zero frequency temperature coefficient and ultra-low loss and preparation method thereof Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 42
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- 229910052839 forsterite Inorganic materials 0.000 claims abstract description 26
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 claims abstract description 8
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims abstract description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 4
- LJCFOYOSGPHIOO-UHFFFAOYSA-N antimony pentoxide Inorganic materials O=[Sb](=O)O[Sb](=O)=O LJCFOYOSGPHIOO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 4
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 4
- 239000000843 powder Substances 0.000 claims description 25
- 239000011230 binding agent Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052681 coesite Inorganic materials 0.000 claims description 10
- 229910052906 cristobalite Inorganic materials 0.000 claims description 10
- 239000011812 mixed powder Substances 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 229910052682 stishovite Inorganic materials 0.000 claims description 10
- 229910052905 tridymite Inorganic materials 0.000 claims description 10
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 7
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 6
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 239000001768 carboxy methyl cellulose Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 229920002134 Carboxymethyl cellulose Polymers 0.000 claims description 3
- DPXJVFZANSGRMM-UHFFFAOYSA-N acetic acid;2,3,4,5,6-pentahydroxyhexanal;sodium Chemical compound [Na].CC(O)=O.OCC(O)C(O)C(O)C(O)C=O DPXJVFZANSGRMM-UHFFFAOYSA-N 0.000 claims description 3
- 235000010948 carboxy methyl cellulose Nutrition 0.000 claims description 3
- 230000003179 granulation Effects 0.000 claims description 3
- 238000005469 granulation Methods 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims description 3
- 235000019812 sodium carboxymethyl cellulose Nutrition 0.000 claims description 3
- 229920001027 sodium carboxymethylcellulose Polymers 0.000 claims description 3
- 238000001354 calcination Methods 0.000 claims 2
- 239000004698 Polyethylene Substances 0.000 claims 1
- -1 polyethylene Polymers 0.000 claims 1
- 229920000573 polyethylene Polymers 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 11
- 238000012360 testing method Methods 0.000 description 6
- 239000004372 Polyvinyl alcohol Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 5
- 238000000498 ball milling Methods 0.000 description 4
- 229910052909 inorganic silicate Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000012956 testing procedure Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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Abstract
The present invention relates to dielectric constant microwave ceramic medium of a kind of zero frequency temperature coefficient and ultra-low loss and preparation method thereof, the chemical general formula of the microwave-medium ceramics is xMg2SiO4‑(1‑x)MgTa2O6+ y wt%B, the B are ZnO, CuO, Al2O3、Ga2O3、TiO2、ZrO2、SnO2、MnO2、Nb2O5、Sb2O5And WO3At least one of, wherein x represents Mg2SiO4Account for Mg2SiO4And MgTa2O6The percentage of integral molar quantity, 0 ＜ x ＜ 1；Y represents B and accounts for Mg2SiO4And MgTa2O6Gross mass percentage, 0≤y≤5.
Description
Technical field
The invention belongs to microwave-medium ceramics technical field, and in particular to a kind of low-k, ultralow dielectric loss, frequency
Microwave-medium ceramics of rate temperature coefficient nearly zero and preparation method thereof.
Background technology
In recent years, with 5G mechanicss of communication, global-positioning technology fast development, as microwave filter, resonator and shake
It is increasing to swing the high performance microwave media ceramic demand of the wireless communications devices such as device, especially ultralow microwave dielectric loss
With the ceramics of near-zero frequency temperature coefficient.This ceramics can both meet to realize the mobility of microwave telecommunication devices, portability,
Miniaturization, the requirement of miniaturization, can meet there is high-performance, high reliability, Large Copacity information transfer etc. in microwave range again
Working characteristics requirement, obtains extensive concern.
MgTa2O6With higher quality factor q f values, middle low-k εrWith positive temperature coefficient of resonance frequency τf
(Qf=60000GHz, εr=30, τf=30ppm/ DEG C) it is impossible to meet being actually needed, and Mg2SiO4Equally also have excellent
Microwave dielectric property (Qf=270000GHz, εr=6.8, τf=-67ppm/ DEG C), application demand can not be met.
The content of the invention
In view of the above-mentioned problems, it is an object of the invention to provide a kind of low-k, ultralow dielectric loss, frequency temperature
Microwave-medium ceramics of coefficient nearly zero and preparation method thereof.
On the one hand, the invention provides a kind of low-k, the microwave-medium ceramics of ultralow dielectric loss, the microwave
The chemical general formula of media ceramic is xMg2SiO4-(1-x)MgTa2O6+ y wt%B, the B are ZnO, CuO, Al2O3、Ga2O3、
TiO2、ZrO2、SnO2、MnO2、Nb2O5、Sb2O5And WO3At least one of, wherein x represents Mg2SiO4Account for Mg2SiO4With
MgTa2O6The percentage of integral molar quantity, 0 ＜ x ＜ 1；Y represents B and accounts for Mg2SiO4And MgTa2O6Gross mass percentage, 0≤y≤
5。
The dielectric properties of media ceramic are adjusted using media ceramic complex technique by the present invention, to meet to apply need
Ask, its mechanism is：Utilize two kinds of opposite matrix material (MgTa of frequency-temperature coefficient2O6With positive temperature coefficient of resonance frequency
τf=30ppm/ DEG C, and Mg2SiO4With negative frequency-temperature coefficient τf=-67ppm/ DEG C), by controlling two-phase relative components
Content (i.e. mol ratio x：(1-x), 0 ＜ x ＜ 1), the result of acquisition frequency-temperature coefficient nearly zero.In addition in two kinds of matrix materials
Add appropriate B substance (B and Mg2SiO4And MgTa2O6Gross mass than y wt%, 0≤y≤5), the sintering for improving material is special
Property, the dielectric properties of stabilizing material.
It is preferred that the dielectric constant of the microwave-medium ceramics is 6.9~28.3, quality factor q f values for 60000~
275000GHz, temperature coefficient of resonance frequency are -70~55ppm/ DEG C.
It is preferred that 0.5≤x≤0.7 or/and 1≤y≤3.
Also, it is preferred that as 0.5≤x≤0.7 and 1≤y≤3, the dielectric constants of the microwave-medium ceramics for 12.1~
15.2, preferably 13~15, quality factor q f values are 120000~152000GHz, preferably 125000~140000GHz, humorous
Vibration frequency temperature coefficient is -11~18ppm/ DEG C, preferably 0~4ppm/ DEG C.
On the other hand, the invention provides a kind of preparation method of microwave-medium ceramics described above, including：
By Mg2SiO4Powder and MgTa2O6Powder presses xMg2SiO4-(1-x)MgTa2O6Stoichiometric composition is weighed and mixed, and is obtained
To mixed powder；
B and binding agent are added in gained mixed powder, through broken, after granulation and shaping, obtains base substrate；
Gained base substrate is sintered into 4~16h at 1300~1450 DEG C, obtains the microwave-medium ceramics.
It is preferred that with MgO, Ta2O5、SiO2For raw material, the pre-synthesis Mg of difference2SiO4Powder and MgTa2O6Powder.
Also, it is preferred that by MgO and SiO2After mixing, 4~12h is calcined at 1000~1250 DEG C, obtains Mg2SiO4。
Also, it is preferred that by MgO and Ta2O5After mixing, 4~12h is calcined at 1000~1250 DEG C, obtains MgTa2O6Powder
Body.
It is preferred that the quality of the B is the 0~5wt%, preferably 1~3wt% of mixed powder quality.
It is preferred that the binding agent is in PVAC polyvinylalcohol, polyvinyl butyral resin PVB and sodium carboxymethylcellulose CMC
At least one, the dosage of the binding agent is 2~4wt% of mixed powder quality.
It is an advantage of the invention that：xMg2SiO4-(1-x)MgTa2O6+ y wt%B composite microwave medium ceramic material dielectrics are normal
The low and adjustable extents of number widely 6.9~28.3, the high 60000~275000GHz of quality factor, temperature coefficient of resonance frequency are continuous
It is adjustable, communication need of new generation can be met.
Embodiment
The present invention is further illustrated below by way of following embodiments, it should be appreciated that following embodiments are merely to illustrate this
Invention, is not intended to limit the present invention.
In the present invention, the low-k, high quality factor, the composite microwave medium pottery of near-zero frequency temperature coefficient
Porcelain, the chemical formula of the microwave-medium ceramics are represented by xMg2SiO4-(1-x)MgTa2O6+ y wt%B.Wherein B can be ZnO,
CuO、Al2O3、Ga2O3、TiO2、ZrO2、SnO2、MnO2、Nb2O5、Sb2O5And WO3At least one of.Wherein x represents Mg2SiO4
Account for Mg2SiO4And MgTa2O6The percentage of integral molar quantity, 0 ＜ x ＜ 1 (being preferably 0.5≤x≤0.7)；Y represents B and accounts for Mg2SiO4With
MgTa2O6Gross mass percentage, 0≤y≤5 (be preferably 1≤y≤3).If B addition will generate newly more than 5wt%
Compound, the properties of the microwave-medium ceramics will deviate from predicted value.
In the present invention, the dielectric constants of the microwave-medium ceramics is 6.9~28.3, quality factor q f values for 60000~
275000GHz, temperature coefficient of resonance frequency are -70~55ppm/ DEG C.As 0.5≤x≤0.7, during 1≤y≤3, within this range,
Composite microwave medium ceramic dielectric properties are stable, favorable repeatability, the dielectric constants of the microwave-medium ceramics for 12.1~
15.2, preferably 13~15, quality factor q f values are 120000~152000GHz, preferably 125000~140000GHz, humorous
Vibration frequency temperature coefficient is -11~18ppm/ DEG C, preferably 0~4ppm/ DEG C.
The microwave-medium ceramics of the present invention, preparation technology is simple, and repeatability is good, and microwave dielectric property is excellent.Below
Exemplarily illustrate middle low-k provided by the invention, extremely low dielectric loss, the microwave-medium of frequency-temperature coefficient nearly zero
The preparation method of ceramics.
Mg2SiO4Powder and MgTa2O6The preparation of powder.Specifically, with MgO, Ta2O5、SiO2It is advance respectively for raw material
Synthesize Mg2SiO4Powder and MgTa2O6Powder.By MgO and SiO2Or MgO and Ta2O5After mixing, calcined at 1000~1250 DEG C
4~12h, obtain Mg2SiO4Or MgTa2O6Powder.The mode of above-mentioned mixing can be ball milling mixing etc..It should be noted that in the present invention
Mg2SiO4Powder and MgTa2O6The preparation of powder is not limited in above-mentioned preparation method.Mg prepared by other method2SiO4Powder
And MgTa2O6Powder can also be used for the preparation of this microwave-medium ceramics.
By Mg2SiO4Powder and MgTa2O6Powder presses xMg2SiO4-(1-x)MgTa2O6Stoichiometric composition weighs, and mixed
Close and B and binding agent are added in powder, through broken, after granulation and shaping, obtain required base substrate.The quality of the B is mixed powder
0~5wt% of quality, preferably 1~3wt%.The binding agent can be polyvinyl alcohol (PVA), polyvinyl butyral resin (PVB)
At least one of with sodium carboxymethylcellulose (CMC) etc..The dosage of the binding agent can be mixed powder quality 2~
4wt%.The molding mode can be dry-pressing formed, cold isostatic compaction etc..
Gained base substrate is sintered into 4~16h at 1300 DEG C~1450 DEG C, obtains the dielectric constant microwave ceramic medium.
As the example of the preparation method of a microwave-medium ceramics, with high-purity (purity>99%) MgO, SiO2And Ta2O5
For raw material, 4~12h synthesis Mg is calcined under 1000~1250 DEG C (preferably 1000~1200 DEG C)2SiO4Powder and MgTa2O6Powder
Body, then by xMg2SiO4-(1-x)MgTa2O6Stoichiometric composition weighs, while adds the B that mass fraction is y wt%, crushes
Binding agent is added afterwards to be granulated and be molded, and obtains base substrate；Gained base substrate is sintered into 4~16h at 1350~1450 DEG C, obtained
The microwave-medium ceramics.
The microwave dielectric property of ceramics is made in test.The diameter and thickness of sample use miking.By Agilent
E8363A PNA Network Analyzers, using cavity method measurement prepared by cylindrical ceramic material dielectric constant and dielectric loss,
Test sample is put into the measurement of ESPEC MC-710F type high/low temperatures circulating box progress temperature coefficient of resonance frequency, temperature range
For 20~85 DEG C, test frequency is in the range of 9~16GHz.
Embodiment is enumerated further below to describe the present invention in detail.It will similarly be understood that following examples are served only for this
Invention is further described, it is impossible to is interpreted as limiting the scope of the invention, those skilled in the art is according to this hair
Some nonessential modifications and adaptations that bright the above is made belong to protection scope of the present invention.Following examples are specific
Technological parameter etc. is also only an example in OK range, i.e. those skilled in the art can be done properly by this paper explanation
In the range of select, and do not really want to be defined in the concrete numerical value of hereafter example.
The present invention uses MgO, Ta of high-purity2O5、SiO2It is that raw material carries out preparation xMg with B2SiO4-(1-x)MgTa2O6+
Y wt%B ceramics, specific embodiment are as follows.
Embodiment 1
(1) by MgO, Ta2O5、SiO2Distinguish MgO in molar ratio:Ta2O5=1:1 and MgO:SiO2=2:1 weighs, and adds zirconium oxide
Ball and deionized water.Ball milling 1~2 hour, the raw material after ball milling is dried in drying box 4h synthesis is calcined after 1100 DEG C
MgTa2O6And Mg2SiO4；
(2) by the Mg of synthesis2SiO4And MgTa2O6It is 0.4 according to molar fraction ratio:0.6、0.5:0.5、0.6:0.4、0.7:
0.3、0.8:0.2 weighing, which is put into, to be added in zirconia ball, deionized water ball grinder, 1~2h of ball milling, after drying, is added into powder
Enter the PVA (polyvinyl alcohol) that mass fraction is 3% to be granulated as binding agent, be pressed into cylindric idiosome；
(4) cylindric idiosome is incubated 8h at 1350 DEG C and sinters porcelain into, that is, obtain required composite microwave medium ceramic；
(5) composite microwave medium ceramic microwave dielectric property made from Network Analyzer resonant cavity testing procedure (4) is used.Specifically
The related process parameters of embodiment and the test result of microwave dielectric property refer to table 1.
Table 1 is the experimental result being related in embodiment 1：
Embodiment 2
Embodiment 1 is copied, x=0.6 components are chosen on the basis of embodiment 1, B substance content is added in (2) step is
1wt%, remaining step is same as Example 1, and test result refers to table 2.
Table 2 is the experimental result being related in embodiment 2：
Embodiment 3
Copy embodiment 2, on the basis of embodiment 2, selection B substance is ZnO, changes the addition of B substance, remaining step with
Embodiment 1 is identical, and test result refers to table 3.
Table 3 is the experimental result being related in embodiment 3：
Claims (10)
1. the microwave-medium ceramics of a kind of low-k, ultralow dielectric loss, it is characterised in that the microwave-medium ceramics
Chemical general formula is xMg2SiO4-(1-x)MgTa2O6+ y wt% B, the B are ZnO, CuO, Al2O3、Ga2O3、TiO2、ZrO2、
SnO2、MnO2、Nb2O5、Sb2O5And WO3At least one of, wherein x represents Mg2SiO4Account for Mg2SiO4And MgTa2O6Integral molar quantity
Percentage, 0 ＜ x ＜ 1；Y represents B and accounts for Mg2SiO4And MgTa2O6Gross mass percentage, 0≤y≤5.
2. microwave-medium ceramics according to claim 1, it is characterised in that the dielectric constant of the microwave-medium ceramics is
6.9~28.3, quality factorQfIt is worth for 60000~275000 GHz, temperature coefficient of resonance frequency is -70~55 ppm/ DEG C.
3. microwave-medium ceramics according to claim 1 or 2, it is characterised in that 0.5≤x≤0.7 or/and 1≤y≤3.
4. microwave-medium ceramics according to claim 3, it is characterised in that as 0.5≤x≤0.7 and 1≤y≤3, institute
The dielectric constant for stating microwave-medium ceramics is 12.1~15.2, preferably 13~15, quality factorQfBe worth for 120000~
152000 GHz, preferably 125000~140000 GHz, temperature coefficient of resonance frequency are -11~18 ppm/ DEG C, preferably 0
~4 ppm/ DEG C.
A kind of 5. preparation method of microwave-medium ceramics as any one of claim 1-4, it is characterised in that including：
By Mg2SiO4Powder and MgTa2O6Powder presses xMg2SiO4-(1-x)MgTa2O6Stoichiometric composition is weighed and mixed, and is obtained
To mixed powder；
B and binding agent are added in gained mixed powder, through broken, after granulation and shaping, obtains base substrate；
Gained base substrate is sintered into 4~16 h at 1300~1450 DEG C, obtains the microwave-medium ceramics.
6. preparation method according to claim 5, it is characterised in that with MgO, Ta2O5、SiO2For raw material, close in advance respectively
Into Mg2SiO4Powder and MgTa2O6Powder.
7. preparation method according to claim 6, it is characterised in that by MgO and SiO2After mixing, at 1000~1250 DEG C
4~12h of lower calcining, obtains Mg2SiO4。
8. preparation method according to claim 6, it is characterised in that by MgO and Ta2O5After mixing, at 1000~1250 DEG C
4~12h of lower calcining, obtains MgTa2O6Powder.
9. according to the preparation method described in any one of claim 5-8, it is characterised in that the quality of the B is mixed powder
0~5 wt% of weight, preferably 1~3 wt%.
10. according to the preparation method described in any one of claim 5-9, it is characterised in that the binding agent is polyethylene
At least one of alcohol PVA, polyvinyl butyral resin PVB and sodium carboxymethylcellulose CMC, the dosage of preferably described binding agent
For 2~4 wt% of mixed powder quality.
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| CN108439969A (en) * | 2018-06-29 | 2018-08-24 | 无锡鑫圣慧龙纳米陶瓷技术有限公司 | A kind of low-k temperature-stable microwave-medium and preparation method thereof |
| CN109503163A (en) * | 2018-12-20 | 2019-03-22 | 中国科学院上海硅酸盐研究所 | One kind having ultrahigh Q-value tantalic acid magnesium media ceramic and preparation method thereof |
| CN113563061A (en) * | 2021-09-26 | 2021-10-29 | 广东康荣高科新材料股份有限公司 | Low dielectric constant dielectric material for single-cavity filter and preparation method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108439969A (en) * | 2018-06-29 | 2018-08-24 | 无锡鑫圣慧龙纳米陶瓷技术有限公司 | A kind of low-k temperature-stable microwave-medium and preparation method thereof |
| CN109503163A (en) * | 2018-12-20 | 2019-03-22 | 中国科学院上海硅酸盐研究所 | One kind having ultrahigh Q-value tantalic acid magnesium media ceramic and preparation method thereof |
| CN113563061A (en) * | 2021-09-26 | 2021-10-29 | 广东康荣高科新材料股份有限公司 | Low dielectric constant dielectric material for single-cavity filter and preparation method thereof |
| CN113563061B (en) * | 2021-09-26 | 2021-12-21 | 广东康荣高科新材料股份有限公司 | Low dielectric constant dielectric material for single-cavity filter and preparation method thereof |
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