CN107803273A - XHV calibration system stop valve protection device - Google Patents
XHV calibration system stop valve protection device Download PDFInfo
- Publication number
- CN107803273A CN107803273A CN201710848027.XA CN201710848027A CN107803273A CN 107803273 A CN107803273 A CN 107803273A CN 201710848027 A CN201710848027 A CN 201710848027A CN 107803273 A CN107803273 A CN 107803273A
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- CN
- China
- Prior art keywords
- electric field
- xhv
- shell
- protection device
- calibration system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/41—Ionising-electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/45—Collecting-electrodes
- B03C3/47—Collecting-electrodes flat, e.g. plates, discs, gratings
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses a kind of XHV calibration system stop valve protection device, and before XHV calibration system stop valve air inlet, the device includes：The upper and lower electrode of adpting flange, shell, electrostatic generator, deflecting electric field, stem flange, stop electric field upper/lower electrode and electric-control system；Electrostatic generator is responsible for producing electrostatic, makes the pollutant into shell powered；The upper and lower electrode of deflecting electric field is arranged in shell, is responsible for producing radial electric field, and powered pollutant deflection is deposited on deflecting electric field bottom electrode；The upper and lower electrode of electric field is stopped to be arranged in shell; it is responsible for producing radial and axial compound obstruction electric field; for preventing gas outlet of the deflecting electric field without the pollutant deposited by this protection device, and deflecting electric field bottom electrode is deposited to again and is stopped on electric field bottom electrode.The present invention solves XHV calibration system after exposure air, because the problem of may be caused XHV stop valve hydraulic performance decline by atmosphere pollution or even fail.
Description
Technical field
The present invention relates to it is a kind of applied in XHV system be used for protect XHV stop valve sealing property
Protection device.
Background technology
The stop valve that XHV system uses for it has very high leak rate performance requirement, applied to XHV system
Its sealing means of the stop valve of system use metal sealing mode more, and this, which results in its cleanliness factor to sealing surface, very high want
Ask, its sealing surface is once polluted by exogenous impurity, will directly affect sealing effectiveness (the i.e. leakage of shutoff valve behind the door of stop valve
Rate), usual XHV system is installed in clean room, system will not be exposed into air with antifouling again as installation is latter
Dye.
But with the development of current collimation technique, some XHV systems will also put into daily calibration and use, this is just not
It is evitable to need the exposure of XHV calibration system in an atmosphere, to mount and dismount by calibration equipment.Although with skill
The development of art, XHV calibration system still can reach required working vacuum degree, but XHV after exposing air
Stop valve in calibration system but may be because that exposed air is contaminated (especially sealing surface has impurity attachment) and influences it
Sealing effectiveness, or even the stop valve for resulting in the need for more renewing can not be used.
The content of the invention
In view of this, the invention provides a kind of XHV calibration system stop valve protection device, solves XHV
Calibration system is after exposure air, because may be caused what XHV stop valve hydraulic performance decline even failed by atmosphere pollution
Problem.
The present invention technical solution be：Then impurity ionization in air is passed through electric field action by the protection device
By the impurity sedimentation after ionization, so as to avoid XHV calibration system from being polluted by impurity, performance is influenceed.
Concrete scheme is：A kind of XHV calibration system stop valve protection device, installed in XHV calibration system
Before stop valve air inlet, including：The upper and lower electrode of adpting flange, shell, electrostatic generator, deflecting electric field, stem flange, resistance
Block the upper and lower electrode of electric field and electric-control system；
The cross-section center for defining shell is O, and cross section is XOY plane, the vertical XOY plane of Z axis；
Adpting flange is arranged on shell left and right ends, is responsible for this protection device being connected to XHV calibration system；Its
In, right-hand member is air inlet, and left end is gas outlet；
Electrostatic generator is responsible for producing electrostatic, makes the pollutant into shell powered；
The upper and lower electrode of deflecting electric field is arranged in shell, is responsible for producing radial electric field, and powered pollutant is deflected into deposition
Onto deflecting electric field bottom electrode；
Stop the upper and lower electrode of electric field to be arranged in shell, be responsible for producing radial and axial compound obstruction electric field, for hindering
Only deflecting electric field without the pollutant of deposition by the gas outlet of this protection device, and deposit to again deflecting electric field bottom electrode and
Stop on electric field bottom electrode；The radial direction refers to the direction parallel with XOY plane, axially refers to the direction parallel with Z axis；
Stem flange is arranged on shell wall；Electric-control system by stem flange connect electrostatic generator, on deflecting electric field,
Bottom electrode and the obstruction upper and lower electrode of electric field.
Preferably, stop in the upper and lower electrode of electric field, stop electric field Top electrode and be arranged at the gas outlet of protection device, and
The vertical inner side for being placed on gas outlet side adpting flange；Stop the polarity phase of the powered polarity of electric field Top electrode and charged contaminants
Together；Electric field bottom electrode is stopped to be located between the upper and lower electrode of deflecting electric field and the adpting flange of protection device air inlet side, and water
Placing flat is on the internal face of outer casing underpart.
Preferably, the obstruction electric field bottom electrode is arranged on shell wall by flange；Resistance is changed by dismounting flange
Block electric field bottom electrode.
Preferably, the obstruction electric field Top electrode is network structure.
Preferably, the connected mode of the adpting flange is tightly connected for the metal edge of a knife.
Preferably, the material of the shell is stainless steel, is shaped as cylinder, and internal diameter size is to ensure this protection device stream
It is lower limit to lead not less than XHV calibration system connecting pipe conductance.
Preferably, the electrostatic generator includes the electrostatic generator being integrated in electric-control system, and installed in outer
Circular stainless steel wire mesh in shell, wire netting mesh size are 0.01mm2, and it is fixed on outer casing inner wall by ceramics.
Preferably, the upper and lower electrode of described deflecting electric field is connected by ceramics with the inwall of shell；Deflecting electric field Top electrode
Determined with the width and electrode spacing of deflecting electric field bottom electrode according to shell sizes, it is electric under deflecting electric field Top electrode and deflecting electric field
The length of pole determines that final vacuum is higher, and electrode is longer according to the XHV calibration system final vacuum applied；Electricity
The voltage of interpolar is by electric control system controls.
Preferably, described stem flange is made up of metal outer shroud, ceramics, metal mandril.
Preferably, the described connected mode for stopping electric field bottom electrode and shell is tightly connected for the metal edge of a knife.
The present invention having the beneficial effect that compared with prior art：
(1) present invention adds protection device before XHV calibration system stop valve, by making pollutant powered
And the principle adsorbed, the pollutant of the overwhelming majority is removed, can solve the problem that XHV system exposure air is contaminated possible shadow
The problem of ringing performance.
(2) ion for speed quickly, inadequate only with deflecting electric field contaminant deposition, the present invention is also using obstruction
Electric field carries out further reduction of speed, deflection and deposition to pollutant of the deflecting electric field without deposition, so as to improve going for pollutant
Except efficiency, XHV calibration system can be effectively protected.
(3) the obstruction electric field bottom electrode that the present invention is connected using flange, it is possible to achieve convenient dismounting and cleaning, so as to prolong
The service life of long protection device, reduce use cost.
(4) it be network structure to stop electric field Top electrode, thus be could be arranged to adpting flange etc. greatly, so as to strengthen it
Area coverage, it is ensured that pollutant does not enter XHV calibration system.
Brief description of the drawings
Fig. 1 is side view of the present invention；
Fig. 2 is electric field profile figure of the present invention；
In figure：1- adpting flanges, 2- shells, 3- electrostatic generators, the upper and lower electrode of 4- deflecting electric fields, 5- stem methods
Blue, 6- stops electric field Top electrode, 7- flange forms stop electric field bottom electrode.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
It may be because that exposed air is contaminated for the stop valve in XHV calibration system, and then influence sealing effect
The problem of fruit, the invention provides a kind of stop valve protection device, the protection device is arranged on stop valve inlet end.
As shown in figure 1, the protection device of the present invention is upper and lower by adpting flange 1, shell 2, electrostatic generator 3, deflecting electric field
Electrode 4, stem flange 5, the upper and lower electrode of obstruction electric field and electric-control system 8 form.Wherein electric-control system 8 can be integrated in this
In the electric-control system of the applied XHV calibration system of invention.
Adpting flange 1 is arranged on the left and right ends of shell 2, its act on be by protection device of the present invention with it is used high true
Empty calibration system is attached.As shown in figure 1, right-hand member is air inlet, left end is gas outlet.Preferably, adpting flange 1 is using gold
Belong to edge seal mode, internal diameter 40mm, be directly connected close to the one end of electric field Top electrode 6 is stopped with XHV calibration system,
Other end connection is calibrated vacuum instrument.
Shell 2 is cylinder, using stainless steel making, must reduce its vacuum deflation with annealing through high-temperature degassing
Rate, for use in XHV calibration system.The internal diameter size of shell 2 is to ensure that this protection device conductance is not less than XHV
Calibration system connecting pipe conductance is lower limit.
Electrostatic generator 3 is responsible for producing electrostatic, and effect is when XHV calibration system exposes air, will enter shell
Air in impurity (pollutant) it is powered.In the present embodiment, electrostatic generator 3 includes the electrostatic being integrated in electric-control system 8
Generating means, and the circular stainless steel wire mesh in shell 2, wire netting mesh size are 0.01mm2, and pass through pottery
Porcelain is fixed on the inwall of shell 2.Various pollutants in air will take electric charge when passing through wire netting, so as in deflecting electric field
Deflect and be deposited on Electrode.
The upper and lower electrode 4 of deflecting electric field is arranged in shell 2, is responsible for producing radial electric field, by powered air
Impurity movement locus enters horizontal deflection, so as to be deposited on Electrode.If the cross-section center for defining shell 2 is O, cross section
For XOY plane, the vertical XOY plane of Z axis；Then " radial direction " refers to the direction parallel with XOY plane, as long as parallel with XOY, no
Specific direction, such as Fig. 2 are especially limited, because the upper and lower electrode of deflecting electric field is in putting one on the other, therefore " footpath here
To " it is specifically vertical direction." axial direction " hereinafter refers to the direction parallel with Z axis.
As shown in Fig. 2 the core component of the present invention is the upper and lower electrode 4 of deflecting electric field, mainly by Top electrode and bottom electrode group
Into being insulated between electrode and shell by ceramic material, the volume and intensity of electric field are by used XHV calibration system pole
Limit vacuum and determine that final vacuum is higher, then corresponding electric-field intensity is higher；That is, Top electrode and the length of bottom electrode
Degree determines that final vacuum is higher, and electrode is longer according to the XHV calibration system final vacuum applied.Top electrode and
Bottom electrode width and electrode spacing determine that upper and lower interelectrode voltage is controlled by electric-control system 8 according to the size of shell 2.
Stop the upper and lower electrode 4 of electric field to be arranged in shell 2, be responsible for producing radial and axial compound obstruction electric field, be used for
Gas outlet of the deflecting electric field without the pollutant deposited by this protection device is prevented, and deposits to deflecting electric field and obstruction again
On electric field bottom electrode.
In the present embodiment, stop electric field Top electrode 6 and stop the formation obstruction electric field of electric field bottom electrode 7 with flange form, stop electricity
Field Top electrode 6 is arranged at the gas outlet of protection device, and the vertical inner side for being placed on adpting flange 1, stops electric field Top electrode 6
Powered polarity is identical with the polarity of charged contaminants, so that identical charges repel each other with charged contaminants, stops charged contaminants close to going out
Gas port.Electric field bottom electrode 7 is stopped between the upper and lower electrode 4 of deflecting electric field and the adpting flange 1 of air inlet side, and it is horizontal
It is placed on the internal face of outer casing underpart.The opposite polarity of 7 powered polarity and charged contaminants of electric field bottom electrode is stopped, so that with
The charged contaminants same sex is attracting so that charged contaminants, which deposit to, to be stopped on electric field bottom electrode 7.By stopping electric field Top electrode 6
Set with the position for stopping electric field bottom electrode 7, form the deflecting electric field of an arc, the electric field is radial and axial electric field
Compound field, deflecting electric field is set to move and deposit to the direction of flange form obstruction electric field bottom electrode 7 without the charged contaminants of deposition
Stopped in flange form on electric field bottom electrode 7.
Flange form is stopped electric field bottom electrode 7 and is arranged on using flange on shell wall, and specific connected mode can be gold
Belong to edge seal connected mode, change obstruction electric field bottom electrode 7 by dismounting flange, be easy to disassembly, cleaning in use, will be heavy
Pollutant of the product on its surface is removed in time.
It can be network structure to stop electric field Top electrode 6, thus be could be arranged to adpting flange etc. greatly, so as to strengthen
Its area coverage, it is ensured that pollutant does not enter XHV calibration system.
The effect of electric-control system 8 is to electrostatic generator 3, deflecting electric field upper/lower electrode 4, stops electric field Top electrode 6, flange
Formula stops electric field bottom electrode 7 and is controlled and powers.Stem flange 5 is arranged on shell wall, and its effect is by electric-control system 8
Power supply and control signal wire are connected to electrostatic generator 3 and deflecting electric field upper/lower electrode 4 and stop electric field Top electrode 6, flange
Formula stops electric field bottom electrode 7.In the present embodiment, stem flange 5 is made up of metal outer shroud, ceramics, metal mandril.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., it should be included in the present invention's
Within protection domain.
Claims (10)
1. a kind of XHV calibration system stop valve protection device, installed in XHV calibration system stop valve air inlet it
Before, it is characterised in that including：Adpting flange (1), shell (2), electrostatic generator (3), the upper and lower electrode of deflecting electric field (4), core
Post flange (5), stop the upper and lower electrode of electric field and electric-control system (8)；
The cross-section center for defining shell (2) is O, and cross section is XOY plane, the vertical XOY plane of Z axis；
Adpting flange (1) is arranged on shell (2) left and right ends, is responsible for this protection device being connected to XHV calibration system；
Wherein, right-hand member is air inlet, and left end is gas outlet；
Electrostatic generator (3) is responsible for producing electrostatic, makes the pollutant into shell (2) powered；
The upper and lower electrode of deflecting electric field (4) is arranged in shell (2), is responsible for producing radial electric field, and it is heavy that powered pollutant is deflected
Accumulate onto deflecting electric field bottom electrode；
Stop the upper and lower electrode of electric field to be arranged in shell (2), be responsible for producing radial and axial compound obstruction electric field, for hindering
Only deflecting electric field without the pollutant of deposition by the gas outlet of this protection device, and deposit to again deflecting electric field bottom electrode and
Stop on electric field bottom electrode；The radial direction refers to the direction parallel with XOY plane, axially refers to the direction parallel with Z axis；
Stem flange (5) is arranged on shell wall；Electric-control system (8) by stem flange (5) connect electrostatic generator (3), partially
Turn the upper and lower electrode of electric field (4) and stop the upper and lower electrode of electric field.
2. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that on obstruction electric field,
In bottom electrode, stop electric field Top electrode (6) and be arranged at the gas outlet of protection device, and the vertical gas outlet side that is placed on connects
The inner side of flange (1)；It is identical with the polarity of charged contaminants to stop electric field Top electrode (6) powered polarity；Stop electric field bottom electrode
(7) between the upper and lower electrode of deflecting electric field (4) and the adpting flange (1) of protection device air inlet side, and lie in a horizontal plane in
On the internal face of outer casing underpart.
3. XHV calibration system stop valve protection device as claimed in claim 2, it is characterised in that the obstruction electric field
Bottom electrode (7) is arranged on shell wall by flange；Obstruction electric field bottom electrode (7) is changed by dismounting flange.
4. XHV calibration system stop valve protection device as claimed in claim 2, it is characterised in that the obstruction electric field
Top electrode (6) is network structure.
5. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that：The adpting flange
(1) connected mode is tightly connected for the metal edge of a knife.
6. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that：The shell (2)
Material be stainless steel, be shaped as cylinder, internal diameter size is to ensure this protection device conductance not less than XHV calibration system
Connecting pipe conductance of uniting is lower limit.
7. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that：The electrostatic occurs
Device (3) includes the electrostatic generator being integrated in electric-control system (8), and the circular stainless steel gold in shell (2)
Belong to net, wire netting mesh size is 0.01mm2, and it is fixed on shell (2) inwall by ceramics.
8. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that：Described deflection electricity
The upper and lower electrode (4) in field is connected by ceramics with the inwall of shell (2)；The width of deflecting electric field Top electrode and deflecting electric field bottom electrode
Degree and electrode spacing determine according to shell (2) size, and the length of deflecting electric field Top electrode and deflecting electric field bottom electrode is according to answering
XHV calibration system final vacuum determines that final vacuum is higher, and electrode is longer；Interelectrode voltage is by automatically controlled
System (8) controls.
9. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that：Described stem method
Blue (5) are made up of metal outer shroud, ceramics, metal mandril.
10. XHV calibration system stop valve protection device as claimed in claim 1, it is characterised in that：Described obstruction
The connected mode of electric field bottom electrode (7) and shell (2) is tightly connected for the metal edge of a knife.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710848027.XA CN107803273A (en) | 2017-09-19 | 2017-09-19 | XHV calibration system stop valve protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710848027.XA CN107803273A (en) | 2017-09-19 | 2017-09-19 | XHV calibration system stop valve protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107803273A true CN107803273A (en) | 2018-03-16 |
Family
ID=61592422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710848027.XA Pending CN107803273A (en) | 2017-09-19 | 2017-09-19 | XHV calibration system stop valve protection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107803273A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5368635A (en) * | 1991-12-11 | 1994-11-29 | Yamamoto; Yujiro | Filter for particulate materials in gaseous fluids |
| US6206970B1 (en) * | 1997-09-03 | 2001-03-27 | Micron Technology, Inc. | Semiconductor wafer processor, semiconductor processor gas filtering system and semiconductor processing methods |
| CN2770787Y (en) * | 2004-11-29 | 2006-04-12 | 张辛石 | Double-charge transverse collecting polar plate dust filter |
| CN101130180A (en) * | 2006-08-21 | 2008-02-27 | 包文隆 | Electric dust collector with ultra- low concentration discharge |
| CN101852462A (en) * | 2009-03-30 | 2010-10-06 | 乐金电子(天津)电器有限公司 | Air-conditioning outdoor machine for preventing dust accumulation of condenser |
| CN102006939A (en) * | 2008-02-11 | 2011-04-06 | 亚达帕丽·空达拉·姚 | A vaccum pump suction filter meant for collecting impurities from function |
| CN103447153A (en) * | 2013-07-29 | 2013-12-18 | 武汉龙净环保科技有限公司 | Electronic dust remover |
| CN204911784U (en) * | 2015-08-25 | 2015-12-30 | 张世祺 | Field restraint dust remover |
| CN204933696U (en) * | 2015-08-20 | 2016-01-06 | 武汉工程大学 | A kind of composite static electric cleaner |
-
2017
- 2017-09-19 CN CN201710848027.XA patent/CN107803273A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5368635A (en) * | 1991-12-11 | 1994-11-29 | Yamamoto; Yujiro | Filter for particulate materials in gaseous fluids |
| US6206970B1 (en) * | 1997-09-03 | 2001-03-27 | Micron Technology, Inc. | Semiconductor wafer processor, semiconductor processor gas filtering system and semiconductor processing methods |
| CN2770787Y (en) * | 2004-11-29 | 2006-04-12 | 张辛石 | Double-charge transverse collecting polar plate dust filter |
| CN101130180A (en) * | 2006-08-21 | 2008-02-27 | 包文隆 | Electric dust collector with ultra- low concentration discharge |
| CN102006939A (en) * | 2008-02-11 | 2011-04-06 | 亚达帕丽·空达拉·姚 | A vaccum pump suction filter meant for collecting impurities from function |
| CN101852462A (en) * | 2009-03-30 | 2010-10-06 | 乐金电子(天津)电器有限公司 | Air-conditioning outdoor machine for preventing dust accumulation of condenser |
| CN103447153A (en) * | 2013-07-29 | 2013-12-18 | 武汉龙净环保科技有限公司 | Electronic dust remover |
| CN204933696U (en) * | 2015-08-20 | 2016-01-06 | 武汉工程大学 | A kind of composite static electric cleaner |
| CN204911784U (en) * | 2015-08-25 | 2015-12-30 | 张世祺 | Field restraint dust remover |
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Application publication date: 20180316 |