CN107799673A - A kind of organic electroluminescence device and preparation method, display device - Google Patents
A kind of organic electroluminescence device and preparation method, display device Download PDFInfo
- Publication number
- CN107799673A CN107799673A CN201711049030.1A CN201711049030A CN107799673A CN 107799673 A CN107799673 A CN 107799673A CN 201711049030 A CN201711049030 A CN 201711049030A CN 107799673 A CN107799673 A CN 107799673A
- Authority
- CN
- China
- Prior art keywords
- anode layer
- layer
- center
- external zones
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention provides a kind of organic electroluminescence device and preparation method, display device, to suppress coffee toroidal effect, the performance using the OLED prepared by inkjet printing mode is influenceed so as to reduce due to coffee toroidal effect, a kind of preparation method of organic electroluminescence device provided by the invention, including：Anode layer is formed on underlay substrate；The anode layer is pre-processed so that be used for surface energy of the surface energy more than the external zones for surrounding the center for forming the center in the region of organic function layer in the anode layer；Organic function layer is formed on the anode layer for having been subjected to pretreatment using inkjet printing mode；Cathode layer is formed on the underlay substrate formed with the organic function layer.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of organic electroluminescence device and preparation method, display
Device.
Background technology
Organic electroluminescence device (OLED) is with self-luminous, luminous efficiency is high, low in energy consumption, reaction is fast, visual angle is wide, brightness
High, the advantages that color is gorgeous, frivolous, it is considered as having broad application prospects in illumination and display device in the market, receives state
Border photoelectricity academia and the great attention of industrial circle.
The thin film-forming method of OLED organic function layer mainly has evaporation processing procedure and solution process at present, and solution process includes spray
Black printing, nozzle application, spin coating, silk-screen printing etc., wherein inkjet technology are because its stock utilization is higher, product cost
It is low, and can realize in large size, it is considered to be large scale OLED realizes the important way of volume production.
But at present there is a thorny problem in inkjet printing：Ink droplet easily forms edge thickness after drying, and intermediate thin is not
Uniform film, namely coffee toroidal effect.The coffee toroidal effect influences the deposition morphology of organic function layer, and organic function layer is heavy
Product pattern directly affects the performance (such as causing the brightness disproportionation of OLED) of prepared OLED.
The content of the invention
The embodiments of the invention provide a kind of organic electroluminescence device and preparation method, display device, to suppress coffee
Coffee toroidal effect, influence the performance using the OLED prepared by inkjet printing mode so as to reduce due to coffee toroidal effect.
A kind of preparation method of organic electroluminescence device provided in an embodiment of the present invention, including：
Anode layer is formed on underlay substrate；
The anode layer is pre-processed so that be used for the center for forming the region of organic function layer in the anode layer
The surface energy in area is more than the surface energy for the external zones for surrounding the center；
Organic function layer is formed on the anode layer for having been subjected to pretreatment using inkjet printing mode；
Cathode layer is formed on the underlay substrate formed with the organic function layer.
With it, before organic function layer is formed on the anode layer using inkjet printing mode, to the anode layer
Pre-processed so that the surface energy for being used to be formed the center in the region of organic function layer in anode layer is more than the encirclement center
The surface energy of the external zones in area, so when forming organic function layer using inkjet printing mode, can suppresses coffee ring effect
Should so that the organic function layer of formation influences to use inkjet printing mode than more uniform so as to reduce due to coffee toroidal effect
The performance of prepared OLED.
It is preferred that described pre-process to the anode layer so that is used to form organic function layer in the anode layer
Region center surface energy be more than surround the center external zones surface energy, specifically include：
The periphery of center and the encirclement center will be divided into the anode layer for forming the region of organic function layer
Area；
Self assembled monolayer, and/or the anode in the center are formed on the surface of the anode layer of the external zones
The surface of layer forms hydroxyl so that the surface energy of the anode layer of the center is more than the surface of the anode layer of the external zones
Energy.
This method forms self assembled monolayer, and/or the sun in center by the surface of the anode layer in external zones
The surface of pole layer forms the mode of hydroxyl so that is used for the surface energy for forming the center in the region of organic function layer in anode layer
More than the surface energy for the external zones for surrounding the center, the can so when forming organic function layer using inkjet printing mode
Suppress coffee toroidal effect so that the organic function layer of formation influences to use than more uniform so as to reduce due to coffee toroidal effect
The performance of OLED prepared by inkjet printing mode.
It is preferred that the surface of the anode layer in the external zones forms self assembled monolayer, specifically include：
The coating photoresist on the anode layer；
The photoresist is exposed using the first mask plate, then developed again so that the anode layer of the external zones
Surface exposure, the surface of the anode layer in remaining region is covered with the photoresist；
Underlay substrate formed with the photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Middle progress atmosphere cleaning, to form one layer of hydroxyl on the surface of the anode layer of the external zones；
Underlay substrate of the surface of the anode layer of the external zones formed with hydroxyl is placed in be pumped through in vacuum and chamber and put
It is placed with the chamber of liquid silane organic matter, anode with the external zones after the silane organic matter volatilizees in a vacuum
The hydroxyl on the surface of layer is chemically reacted, and one layer of self assembled monolayer is formed on the surface of the anode layer of the external zones；
Peel off the photoresist on the surface of the anode layer in remaining region of covering.
It is preferred that species and/or the lining of the surface energy of the anode layer of the external zones by the silane organic matter
Processing time of the substrate in storing has the chamber of liquid silane organic matter controls.
It is preferred that the silane organic matter is octadecyl trichlorosilane alkane or HMDS.
It is preferred that the compactness of the self assembled monolayer has liquid silane to have with the underlay substrate in storing
Processing time in the chamber of machine thing is directly proportional.
It is preferred that the surface of the anode layer in the center forms hydroxyl, specifically include：
The coating photoresist on the anode layer；
The photoresist is exposed using the second mask plate, then developed again so that the anode layer of the center
Surface exposure, the surface of the anode layer in remaining region is covered with the photoresist；
Underlay substrate formed with the photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Middle progress atmosphere cleaning, to form one layer of hydroxyl on the surface of the anode layer of the center.
It is preferred that the compactness of the hydroxyl and the underlay substrate are in ultraviolet-ozone cleaning machine or oxygen plasma
Processing time in body cleaning machine is directly proportional.
The embodiment of the present invention additionally provides a kind of organic electroluminescence device, and the organic electroluminescence device is using this hair
The organic electroluminescence device that the preparation method for the organic electroluminescence device that bright any embodiment provides is prepared.
Because organic electroluminescence device provided in an embodiment of the present invention uses the preparation of above-mentioned organic electroluminescence device
Method is prepared, and the preparation method of above-mentioned organic electroluminescence device is formed certainly by the surface of the anode layer in external zones
Assemble monolayer, and/or center anode layer surface formed hydroxyl mode so that in anode layer be used for formed with
The surface energy of the center in the region of machine functional layer is more than the surface energy for the external zones for surrounding the center, so using ink-jet
Printing type formed organic function layer when can suppress coffee toroidal effect so that the organic function layer of formation than more uniform, from
And reduce the performance influenceed due to coffee toroidal effect using the OLED prepared by inkjet printing mode.
The embodiment of the present invention additionally provides a kind of display device, including the organic electroluminescence hair that any embodiment of the present invention provides
Optical device.
Because display device provided in an embodiment of the present invention uses above-mentioned organic electroluminescence device, and organic electroluminescent
Device is prepared using the preparation method of above-mentioned organic electroluminescence device, and the preparation side of above-mentioned organic electroluminescence device
Method forms self assembled monolayer, and/or the surface shape of the anode layer in center by the surface of the anode layer in external zones
Into the mode of hydroxyl so that the surface energy in anode layer for the center in the region for forming organic function layer, which is more than, surrounds in this
The surface energy of the external zones of heart district, so when forming organic function layer using inkjet printing mode, can suppresses coffee ring effect
Should so that the organic function layer of formation influences to use inkjet printing mode than more uniform so as to reduce due to coffee toroidal effect
The performance of prepared OLED.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the preparation method of OLED provided in an embodiment of the present invention；
What Fig. 2 was used when being pre-processed for anode layer in the preparation method of OLED provided in an embodiment of the present invention
A kind of structural representation of mask plate；
What Fig. 3 was used when being pre-processed for anode layer in the preparation method of OLED provided in an embodiment of the present invention
Another structural representation of mask plate.
Embodiment
The embodiments of the invention provide a kind of organic electroluminescence device and preparation method, display device, to suppress coffee
Coffee toroidal effect, influence the performance using the OLED prepared by inkjet printing mode so as to reduce due to coffee toroidal effect.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
It should be noted that the thickness of each layer and shape do not reflect actual proportions in accompanying drawing of the present invention, purpose is simply illustrated
Illustrate present invention.
Referring to Fig. 1, a kind of preparation method of organic electroluminescence device provided in an embodiment of the present invention, including following step
Suddenly：
S101, anode layer is formed on underlay substrate；
Wherein, the material of anode layer is such as can be ITO, IZO, AZO, FTO.
S102, the anode layer is pre-processed so that be used for the region for forming organic function layer in the anode layer
Center surface energy be more than surround the center external zones surface energy；
S103, organic function layer formed on the anode layer for having been subjected to pretreatment using inkjet printing mode；
Wherein, organic function layer for example can be organic small molecule material.
S104, form cathode layer on the underlay substrate formed with the organic function layer.
Wherein, cathode layer can use non-transparent metals material to prepare, such as aluminium, nickel or gold, and can also use has Jie
Prepared by the transparent material of matter layer/metal level/medium Rotating fields, such as ITO/Ag/ITO, ZnS/Ag/ZnS, the embodiment of the present invention pair
This is not defined.
The above method, before organic function layer is formed on the anode layer using inkjet printing mode, the anode layer is entered
Row pretreatment so that the surface energy for being used to be formed the center in the region of organic function layer in anode layer is more than the encirclement center
External zones surface energy, so using inkjet printing mode form organic function layer when can suppress coffee toroidal effect,
So that the organic function layer formed than more uniform, influences made using inkjet printing mode so as to reduce due to coffee toroidal effect
The performance of standby OLED.
In a better embodiment, the anode layer is pre-processed in step S102 so that in the anode layer
Surface energy for the center in the region for forming organic function layer is more than the surface energy for the external zones for surrounding the center, specifically
It can include：
The periphery of center and the encirclement center will be divided into the anode layer for forming the region of organic function layer
Area；
Self assembled monolayer is formed on the surface of the anode layer of the external zones so that the anode layer of the center
Surface energy is more than the surface energy of the anode layer of the external zones.
In a better embodiment, the anode layer is pre-processed in step S102 so that in the anode layer
Surface energy for the center in the region for forming organic function layer is more than the surface energy for the external zones for surrounding the center, specifically
It can include：
The periphery of center and the encirclement center will be divided into the anode layer for forming the region of organic function layer
Area；
Hydroxyl is formed on the surface of the anode layer of the center so that the surface energy of the anode layer of the center is more than
The surface energy of the anode layer of the external zones.
In a better embodiment, the anode layer is pre-processed in step S102 so that in the anode layer
Surface energy for the center in the region for forming organic function layer is more than the surface energy for the external zones for surrounding the center, specifically
It can include：
The periphery of center and the encirclement center will be divided into the anode layer for forming the region of organic function layer
Area；
Self assembled monolayer, and the anode layer in the center are formed on the surface of the anode layer of the external zones
Surface forms hydroxyl so that the surface energy of the anode layer of the center is more than the surface energy of the anode layer of the external zones.
Wherein, the structural representation of anode layer is used for the area for forming organic function layer as shown in Figure 2 and Figure 3, in anode layer 1
Domain 2 is divided into center A (as shown in square frame in Fig. 2, Fig. 3) and surrounds center A external zones B.
In a better embodiment, the surface of the above-mentioned anode layer in the external zones forms self assembled monolayer,
It can specifically include：
The coating photoresist on the anode layer；
The photoresist is exposed using the first mask plate, then developed again so that the anode layer of the external zones
Surface exposure, the surface of the anode layer in remaining region is covered with the photoresist；
Underlay substrate formed with the photoresist is placed in ultraviolet-ozone (UV/O3) cleaning machine or oxygen plasma
Atmosphere cleaning is carried out in body cleaning machine, to form one layer of hydroxyl (- OH) on the surface of the anode layer of the external zones；
Underlay substrate of the surface of the anode layer of the external zones formed with hydroxyl is placed in be pumped through in vacuum and chamber and put
It is placed with the chamber of liquid silane organic matter, anode with the external zones after the silane organic matter volatilizees in a vacuum
The hydroxyl on the surface of layer is chemically reacted, and one layer of self assembled monolayer is formed on the surface of the anode layer of the external zones
(Self-assembled Momolayer,SAM)；
Peel off the photoresist on the surface of the anode layer in remaining region of covering.
Wherein, the principle of the surface formation hydroxyl of anode layer is as follows：
The exposed surface in air of anode layer can adsorb the organic matter in air, and ultraviolet-ozone cleaning machine or
Oxygen plasma cleaning machine can produce active oxygen atom O, and active oxygen atom O has very strong oxidisability, can rapid oxidation anode
The organic matter of layer surface, generate CO2、NO2Hydroxyl is formed Deng gas, and in exposed anode layer surface.
The pattern (Pattern) of first mask plate (Mask) for example can be with as shown in Fig. 2 region corresponding to center A
Light tight, the region corresponding to external zones B is hollow out.
In a better embodiment, the surface energy of the anode layer of external zones can be controlled by the species of silane organic matter
System, it can also be controlled by processing time of the underlay substrate in storing has the chamber of liquid silane organic matter, may be used also
To put the processing time in having the chamber of liquid silane organic matter by the species of silane organic matter and underlay substrate
To control, the embodiment of the present invention is not defined to this.
In a better embodiment, above-mentioned silane organic matter for example can be octadecyl trichlorosilane alkane (OTDS), six
Methyl disilazane (HMDS) etc..
In a better embodiment, the compactness of the self assembled monolayer has liquid with the underlay substrate in storing
Processing time in the chamber of the silane organic matter of body shape is directly proportional.Such as：Underlay substrate has liquid silane to have in storing
Processing time in the chamber of machine thing is longer, then the SAM layer formed is finer and close, and lyophobicity is stronger, and surface energy is smaller.
In the specific implementation, can be by controlling the compactness of SAM layer so that formed using inkjet printing mode organic
Functional layer is influenceed using the OLED prepared by inkjet printing mode than more uniform so as to reduce due to coffee toroidal effect
Performance.
In a better embodiment, the surface of the above-mentioned anode layer in the center forms hydroxyl, can specifically wrap
Include：
The coating photoresist on the anode layer；
The photoresist is exposed using the second mask plate, then developed again so that the anode layer of the center
Surface exposure, the surface of the anode layer in remaining region is covered with the photoresist；
Underlay substrate formed with the photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Middle progress atmosphere cleaning, to form one layer of hydroxyl on the surface of the anode layer of the center.
Wherein, the pattern (Pattern) of the second mask plate for example can using as shown in figure 3, corresponding to center A region as
Hollow out, it is light tight corresponding to external zones B region.
In a better embodiment, the compactness of the hydroxyl is with the underlay substrate in ultraviolet-ozone cleaning machine
Or the processing time in oxygen plasma cleaning machine is directly proportional.Such as：Underlay substrate is in ultraviolet-ozone cleaning machine or oxygen
Processing time in plasma washing machine is longer, then the hydroxyl formed is finer and close, and lyophily is stronger, and surface energy is bigger.
In the specific implementation, can be by controlling the compactness of hydroxyl so that formed using inkjet printing mode organic
Functional layer is influenceed using the OLED prepared by inkjet printing mode than more uniform so as to reduce due to coffee toroidal effect
Performance.
In the specific implementation, coffee ring can also effectively be suppressed by adjusting center A and external zones B surface energy
Effect so that the organic function layer of formation influences to use inkjet printing side than more uniform so as to reduce due to coffee toroidal effect
The performance of OLED prepared by formula.
The preparation process of OLED provided in an embodiment of the present invention is specifically described below.
Step 1: anode layer is formed on the glass substrate；
Step 2: the region for being used to being formed organic function layer in anode layer is divided into center and surrounds the outer of the center
Enclose area；
Step 3: form self assembled monolayer on the surface of the anode layer of external zones；
Specifically comprise the following steps：
Coating photoresist on the anode layer；
Photoresist is exposed using the first mask plate, then developed again so that the surface of the anode layer of external zones is naked
Dew, the surface of the anode layer in remaining region is covered with photoresist；
Glass substrate formed with photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Promoting the circulation of qi atmosphere cleans, to form one layer of hydroxyl on the surface of the anode layer of external zones；
Glass substrate of the surface of the anode layer of external zones formed with hydroxyl, which is placed in, to be pumped through to put in vacuum and chamber has
In the chamber of liquid silane organic matter, hydroxyl with the surface of the anode layer of external zones after silane organic matter volatilizees in a vacuum
Base is chemically reacted, and one layer of self assembled monolayer is formed on the surface of the anode layer of external zones；
Peel off the photoresist on the surface for the anode layer for covering remaining region.
Step 4: form hydroxyl on the surface of the anode layer of center；
Specifically comprise the following steps：
Coating photoresist on the anode layer；
Photoresist is exposed using the second mask plate, then developed again so that the surface of the anode layer of center is naked
Dew, the surface of the anode layer in remaining region is covered with photoresist；
Glass substrate formed with photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Promoting the circulation of qi atmosphere cleans, to form one layer of hydroxyl on the surface of the anode layer of center.
Wherein, the surface energy of the anode layer of center is more than the surface energy of the anode layer of external zones.
Step 5: organic function layer is formed on the anode layer for have been subjected to pretreatment using inkjet printing mode；
Step 6: cathode layer is formed on the glass substrate formed with organic function layer.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of organic electroluminescence device, the organic electroluminescence
The preparation method of organic electroluminescence device of the luminescent device to be provided using any embodiment of the present invention is prepared organic
Electroluminescent device.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of display device, including the embodiment of the present invention carries
The above-mentioned organic EL display panel supplied.The display device can be：Mobile phone, tablet personal computer, television set, display, pen
Remember any product or part with display function such as this computer, DPF, navigator.
In summary, in technical scheme provided in an embodiment of the present invention, inkjet printing mode shape on the anode layer is being used
Into before organic function layer, the anode layer is pre-processed so that be used for the region for forming organic function layer in anode layer
The surface energy of center is more than the surface energy for the external zones for surrounding the center, is so formed in use inkjet printing mode organic
Can suppresses coffee toroidal effect during functional layer so that the organic function layer of formation is than more uniform, so as to reduce due to coffee ring
Effect and influence the performance using the OLED prepared by inkjet printing mode.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
1. a kind of preparation method of organic electroluminescence device, it is characterised in that this method includes：
Anode layer is formed on underlay substrate；
The anode layer is pre-processed so that be used for the center for forming the region of organic function layer in the anode layer
Surface energy is more than the surface energy for the external zones for surrounding the center；
Organic function layer is formed on the anode layer for having been subjected to pretreatment using inkjet printing mode；
Cathode layer is formed on the underlay substrate formed with the organic function layer.
2. according to the method for claim 1, it is characterised in that described that the anode layer is pre-processed so that described
It is used for table of the surface energy more than the external zones for surrounding the center for forming the center in the region of organic function layer in anode layer
Face energy, is specifically included：
The external zones of center and the encirclement center will be divided into the anode layer for forming the region of organic function layer；
Self assembled monolayer, and/or the anode layer in the center are formed on the surface of the anode layer of the external zones
Surface forms hydroxyl so that the surface energy of the anode layer of the center is more than the surface energy of the anode layer of the external zones.
3. according to the method for claim 2, it is characterised in that the surface of the anode layer in the external zones is formed certainly
Monolayer is assembled, is specifically included：
The coating photoresist on the anode layer；
The photoresist is exposed using the first mask plate, then developed again so that the table of the anode layer of the external zones
Face is exposed, and the surface of the anode layer in remaining region is covered with the photoresist；
Underlay substrate formed with the photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Promoting the circulation of qi atmosphere cleans, to form one layer of hydroxyl on the surface of the anode layer of the external zones；
Underlay substrate of the surface of the anode layer of the external zones formed with hydroxyl, which is placed in, to be pumped through to put in vacuum and chamber has
In the chamber of liquid silane organic matter, the silane organic matter volatilize in a vacuum after with the anode layer of the external zones
The hydroxyl on surface is chemically reacted, and one layer of self assembled monolayer is formed on the surface of the anode layer of the external zones；
Peel off the photoresist on the surface of the anode layer in remaining region of covering.
4. according to the method for claim 3, it is characterised in that the surface energy of the anode layer of the external zones passes through the silicon
The processing time of the species of alkane organic matter and/or the underlay substrate in storing has the chamber of liquid silane organic matter comes
Control.
5. according to the method for claim 4, it is characterised in that the silane organic matter is octadecyl trichlorosilane alkane or six
Methyl disilazane.
6. according to the method for claim 4, it is characterised in that the compactness of the self assembled monolayer and the substrate
Substrate has the processing time in the chamber of liquid silane organic matter directly proportional in storing.
7. according to the method for claim 2, it is characterised in that the surface of the anode layer in the center forms hydroxyl
Base, specifically include：
The coating photoresist on the anode layer；
The photoresist is exposed using the second mask plate, then developed again so that the table of the anode layer of the center
Face is exposed, and the surface of the anode layer in remaining region is covered with the photoresist；
Underlay substrate formed with the photoresist is placed in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine
Promoting the circulation of qi atmosphere cleans, to form one layer of hydroxyl on the surface of the anode layer of the center.
8. according to the method described in claim any one of 3-7, it is characterised in that the compactness of the hydroxyl and the substrate base
Processing time of the plate in ultraviolet-ozone cleaning machine or oxygen plasma cleaning machine is directly proportional.
9. a kind of organic electroluminescence device, it is characterised in that the organic electroluminescence device is to be appointed using such as claim 1-8
The organic electroluminescence device that method described in one is prepared.
10. a kind of display device, it is characterised in that including organic electroluminescence device as claimed in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711049030.1A CN107799673A (en) | 2017-10-31 | 2017-10-31 | A kind of organic electroluminescence device and preparation method, display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711049030.1A CN107799673A (en) | 2017-10-31 | 2017-10-31 | A kind of organic electroluminescence device and preparation method, display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107799673A true CN107799673A (en) | 2018-03-13 |
Family
ID=61548549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711049030.1A Pending CN107799673A (en) | 2017-10-31 | 2017-10-31 | A kind of organic electroluminescence device and preparation method, display device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107799673A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110190188A (en) * | 2019-05-23 | 2019-08-30 | 东北师范大学 | A kind of polymer semiconductor thin film preparation method and application |
| CN110534552A (en) * | 2019-09-09 | 2019-12-03 | 合肥京东方卓印科技有限公司 | A kind of display base plate and preparation method thereof, display panel and mask plate |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162703A (en) * | 2006-10-12 | 2008-04-16 | 株式会社半导体能源研究所 | Method for manufacturing display device, and etching apparatus |
| CN101398561A (en) * | 2007-09-29 | 2009-04-01 | 奇美电子股份有限公司 | Colourful optical filter substrates, method for manufacturing same and liquid crystal display panel using the same |
| CN102163486A (en) * | 2010-12-30 | 2011-08-24 | 陕西科技大学 | Photoethcing self assembly preparation method of patterned BiFeO3 film |
| CN102557478A (en) * | 2011-12-19 | 2012-07-11 | 陕西科技大学 | Method for treating hydrophilic glass substrate by ultraviolet irradiation and phenyltrichlorosilane (PTCS) monolayer treatment technologies |
| CN103066004A (en) * | 2012-11-20 | 2013-04-24 | 京东方科技集团股份有限公司 | Surface treatment method |
| CN104183784A (en) * | 2013-05-23 | 2014-12-03 | 剑桥显示技术有限公司 | electronic device and manufacture method thereof |
-
2017
- 2017-10-31 CN CN201711049030.1A patent/CN107799673A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162703A (en) * | 2006-10-12 | 2008-04-16 | 株式会社半导体能源研究所 | Method for manufacturing display device, and etching apparatus |
| CN101398561A (en) * | 2007-09-29 | 2009-04-01 | 奇美电子股份有限公司 | Colourful optical filter substrates, method for manufacturing same and liquid crystal display panel using the same |
| CN102163486A (en) * | 2010-12-30 | 2011-08-24 | 陕西科技大学 | Photoethcing self assembly preparation method of patterned BiFeO3 film |
| CN102557478A (en) * | 2011-12-19 | 2012-07-11 | 陕西科技大学 | Method for treating hydrophilic glass substrate by ultraviolet irradiation and phenyltrichlorosilane (PTCS) monolayer treatment technologies |
| CN103066004A (en) * | 2012-11-20 | 2013-04-24 | 京东方科技集团股份有限公司 | Surface treatment method |
| CN104183784A (en) * | 2013-05-23 | 2014-12-03 | 剑桥显示技术有限公司 | electronic device and manufacture method thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110190188A (en) * | 2019-05-23 | 2019-08-30 | 东北师范大学 | A kind of polymer semiconductor thin film preparation method and application |
| CN110190188B (en) * | 2019-05-23 | 2022-11-01 | 东北师范大学 | Preparation method and application of polymer semiconductor film |
| CN110534552A (en) * | 2019-09-09 | 2019-12-03 | 合肥京东方卓印科技有限公司 | A kind of display base plate and preparation method thereof, display panel and mask plate |
| US11165023B2 (en) | 2019-09-09 | 2021-11-02 | Hefei Boe Joint Technology Co., Ltd. | Display substrate, method of manufacturing display substrate, display panel, and mask |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104260554B (en) | The preparation method of inkjet printing methods and equipment, display base plate | |
| CN104465671B (en) | A kind of display base plate and preparation method thereof, display device | |
| CN104752490B (en) | A kind of organic LED display panel and preparation method thereof, display unit | |
| CN104409653B (en) | A kind of pixel defining layer, Organic electroluminescent device and display device | |
| CN105185809B (en) | Production method, flexible glass substrate and the flexible display screen of flexible display screen | |
| CN109950292A (en) | Display base plate and its manufacturing method, display device | |
| CN107123752A (en) | Pixel defining layer and its manufacture method, display base plate, display device | |
| CN108428719B (en) | Manufacturing method of pixel defining layer, display substrate and manufacturing method thereof, and display device | |
| CN101714615A (en) | Method of producing electroluminescent element | |
| CN106784402A (en) | A kind of preparation of non-lithographic pixel bank and its typographical display application process | |
| CN102509770A (en) | Mother board structure of light emitting device, light emitting device and manufacturing method thereof | |
| CN107799673A (en) | A kind of organic electroluminescence device and preparation method, display device | |
| CN107359254A (en) | Typographical display device and its preparation method and application | |
| CN110246884A (en) | A kind of preparation method and array substrate, display panel of array substrate | |
| US10153333B1 (en) | Method for manufacturing an OLED backplate and method for manufacturing an OLED panel | |
| CN110635068B (en) | Method for continuously printing OLED flexible display panel in roll-to-roll mode | |
| CN109651882A (en) | A kind of inkjet printing hole injection layer ink and its application in organic light emitting display | |
| CN202585420U (en) | OLED display device | |
| JP2008159565A (en) | Substrate carrier enclosure | |
| CN107732029A (en) | A kind of OLED display panel and preparation method thereof | |
| CN107346776A (en) | Typographical display device and preparation method thereof and application | |
| CN101800166B (en) | Method for manufacturing liquid repellent retaining wall | |
| CN206475657U (en) | A kind of color microstructures grain decorating panel with stealthy form | |
| CN111873648B (en) | Inkjet printing vacuum drying device and inkjet printing method | |
| CN104716162A (en) | Organic light-emitting diode display panel, manufacturing method thereof and display device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180313 |