CN107799253A - The manufacture method of rare earth metal rotary target material - Google Patents
The manufacture method of rare earth metal rotary target material Download PDFInfo
- Publication number
- CN107799253A CN107799253A CN201711024430.7A CN201711024430A CN107799253A CN 107799253 A CN107799253 A CN 107799253A CN 201711024430 A CN201711024430 A CN 201711024430A CN 107799253 A CN107799253 A CN 107799253A
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- CN
- China
- Prior art keywords
- rare earth
- earth metal
- target material
- manufacture method
- rotary target
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
- H01F1/047—Alloys characterised by their composition
- H01F1/053—Alloys characterised by their composition containing rare earth metals
- H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
- H01F1/057—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Powder Metallurgy (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Abstract
The invention discloses a kind of manufacture method of rare earth metal rotary target material, including：Average grain diameter D is prepared using HDH method crush method50For 40~70 μm of rare earth metal metal powder material；Rare earth metal metal powder material is fitted into the graphite jig of vacuum sintering funace, it is hot-forming to obtain rare earth metal target blank, 900~1130 DEG C, 19~30MPa of briquetting pressure of hot pressing temperature, heat-insulation pressure keeping 1~2 hour under vacuum environment or argon atmosphere；Rare earth metal target blank is machined out, rare earth metal rotary target material is obtained after welding copper or stainless steel back target.The present invention can greatly improve utilization rate of the rare earth metal in neodymium iron boron plated film oozes Dy, Dy/Tb or Tb technique, reduce production cost, improve neodymium iron boron coercivity.
Description
Technical field
The present invention relates to a kind of manufacture method of target, specifically, is related to a kind of manufacturer of rare earth metal rotary target material
Method.
Background technology
Modern science and technology and information industry forward direction are integrated, lightweight, intelligent direction develop, new energy and energy-saving ring
Performance requirement more and more higher of the industries such as guarantor to NdFeB permanent-magnet materials.In order to improve the coercivity of NdFeB permanent-magnet materials and high temperature
Usability, commonly used approach are using heavy rare earth element Dy, Dy/Tb, Tb substitution magnet Nd2Fe14Nd in B, improve
NdFeB magnet coercivitys.But these heavy rare earth element scarcity of resources of Dy, Dy/Tb, Tb and expensive.
At present, the method for reducing heavy rare earth usage amount mainly includes pairing gold process and grain boundary decision heavy rare earth element work
Skill.Pairing gold process is melting master alloying and the auxiliary alloy comprising heavy rare earth element respectively, crushes powder processed, by master alloying fine powder and
Auxiliary alloyed powder is mixed by proportioning, orientation compacting, sintering, and heavy rare earth element usage amount is still higher in the technique.Grain boundary decision weight is dilute
Earth elements technique is to be covered by soaking the modes such as coating, thermal spraying, sputtering and deposition in neodymium iron boron surface formation heavy rare earth element
Cap rock, heavy rare earth element is diffused to inside magnet through temperature grain diffusion and improves magnet coercivity, on a small quantity using weight to reach
The purpose of rare earth.
The content of the invention
Technical problem solved by the invention is to provide a kind of manufacture method of rare earth metal rotary target material, can significantly carry
Utilization rate of the high rare earth metal in neodymium iron boron plated film oozes Dy, Dy/Tb or Tb technique, production cost is reduced, improve neodymium iron boron
Coercivity.
Technical scheme is as follows：
A kind of manufacture method of rare earth metal rotary target material, including：
Average grain diameter D is prepared using HDH method-crush method50For 40~70 μm of rare earth metal metal powder material；
Rare earth metal metal powder material is fitted into the graphite jig of vacuum sintering funace, protected in vacuum environment or argon gas
It is hot-forming to obtain rare earth metal target blank under atmosphere, 900~1130 DEG C, 19~30MPa of briquetting pressure of hot pressing temperature, protect
Warm pressurize 1~2 hour；
Rare earth metal target blank is machined out, rare earth metal rotary target is obtained after welding copper or stainless steel back target
Material.
Further：Rare earth element is selected one or two kinds of in Dy, Tb.
Further：Vacuum in vacuum sintering funace is higher than 1 × 10-2Pa。
Further：Graphite jig is circular cylindrical.
Compared with prior art, the technology of the present invention effect includes：
Preparation technology of the present invention is simple, the cycle is short, energy consumption is small, is easy to large-scale production.
Rare earth metal Dy, Dy/Tb or Tb target relative density produced by the present invention is high, outside flawless, internal imporosity,
Even tissue, high yield rate, improve neodymium iron boron coercivity.
Target produced by the present invention can greatly improve rare earth metal and ooze Dy, Dy/Tb or Tb technique in neodymium iron boron plated film
In utilization rate, so as to be greatly decreased the usage amount of dilute valuable rare earth element, save high performance Nd FeB magnet costs of manufacture.
Embodiment
Technical solution of the present invention is elaborated below with reference to example embodiment.However, example embodiment can
Implement in a variety of forms, and be not understood as limited to embodiment set forth herein；On the contrary, these embodiments are provided so that
The design of example embodiment more comprehensively and completely, and is comprehensively communicated to those skilled in the art by the present invention.
The manufacture method of rare earth metal rotary target material, specifically includes following steps：
Step 1：Average grain diameter D is prepared using HDH method-crush method50For 40~70 μm of rare earth metal metal powder
Material, rare earth element are selected one or two kinds of in Dy, Tb；
Step 2：Rare earth metal metal powder material is fitted into the graphite jig of vacuum sintering funace, in vacuum environment or argon
It is hot-forming to obtain rare earth metal target blank under gas shielded atmosphere, 900~1130 DEG C of hot pressing temperature, briquetting pressure 19~
30MPa, heat-insulation pressure keeping 1~2 hour；
Graphite jig is circular cylindrical.Vacuum in vacuum sintering funace is higher than 1 × 10-2Pa。
Step 2：Rare earth metal target blank is machined out, rare earth gold is obtained after finally welding copper or stainless steel back target
Belong to rotary target material.
Embodiment 1：
Average grain diameter D is prepared using hydrogenation and dehydrogenization-crush method50For 45 μm of Dy metal dusts.Powder is loaded into graphite mo(u)ld
In tool, rare earth metal Dy target blanks are hot pressed under vacuum conditions using vacuum sintering funace, vacuum is higher than 1 × 10- 2Pa, hot pressing temperature are 1000 DEG C, briquetting pressure 28MPa, heat-insulation pressure keeping 1.5 hours, obtain the relative density of Dy target blanks
97.2%.The target blank of shaping is machined out, copper or stainless steel back target is finally welded, obtains rare earth metal Dy rotary targets
Material.
Embodiment 2：
Average grain diameter D is prepared using hydrogenation and dehydrogenization-crush method50For 55 μm of Tb metal dusts.Powder is loaded into graphite mo(u)ld
In tool, rare-earth metal Tb target blank is hot pressed under vacuum conditions using hot-pressed sintering furnace, vacuum is higher than 1 × 10-2Pa, heat
It is 1080 DEG C, briquetting pressure 30MPa to press temperature, heat-insulation pressure keeping 1.5 hours, obtains the relative density 98.7% of Tb target blanks.
The target blank of shaping is machined out, copper or stainless steel back target is finally welded, obtains rare-earth metal Tb rotary target material.
Embodiment 3：
Average grain diameter D is prepared using HDH method-crush method50For 60 μm of metal Dy/Tb powder and microns.Powder is loaded
In graphite jig, rare earth metal Dy/Tb target blanks are hot pressed under vacuum conditions using hot-pressed sintering furnace, vacuum is higher than 1
×10-2Pa, hot pressing temperature are 1100 DEG C, briquetting pressure 30MPa, heat-insulation pressure keeping 2 hours, obtain the relative of Dy/Tb target blanks
Density 98.4%.The target blank of shaping is machined out, copper or stainless steel back target is finally welded, obtains rare earth metal Dy/
Tb rotary target materials.
Term used herein is explanation and exemplary and nonrestrictive term.Because the present invention can be with a variety of
Form specific implementation without departing from the spiritual or substantive of invention, it should therefore be appreciated that above-described embodiment be not limited to it is any foregoing
Details, and should widely being explained in the spirit and scope that appended claims are limited, thus fall into claim or its etc.
Whole changes and remodeling in the range of effect all should be appended claims and covered.
Claims (4)
1. a kind of manufacture method of rare earth metal rotary target material, including：
Average grain diameter D is prepared using HDH method-crush method50For 40~70 μm of rare earth metal metal powder material；
Rare earth metal metal powder material is fitted into the graphite jig of vacuum sintering funace, in vacuum environment or argon atmosphere
Under, it is hot-forming to obtain rare earth metal target blank, 900~1130 DEG C, 19~30MPa of briquetting pressure of hot pressing temperature, insulation guarantor
Pressure 1~2 hour；
Rare earth metal target blank is machined out, rare earth metal rotary target material is obtained after welding copper or stainless steel back target.
2. the manufacture method of rare earth metal rotary target material as claimed in claim 1, it is characterised in that：Rare earth element selects Dy, Tb
In it is one or two kinds of.
3. the manufacture method of rare earth metal rotary target material as claimed in claim 1, it is characterised in that：In vacuum sintering funace
Vacuum is higher than 1 × 10-2Pa。
4. the manufacture method of rare earth metal rotary target material as claimed in claim 1, it is characterised in that：Graphite jig is annular cylindrical
Shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711024430.7A CN107799253A (en) | 2017-10-27 | 2017-10-27 | The manufacture method of rare earth metal rotary target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711024430.7A CN107799253A (en) | 2017-10-27 | 2017-10-27 | The manufacture method of rare earth metal rotary target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107799253A true CN107799253A (en) | 2018-03-13 |
Family
ID=61546283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711024430.7A Pending CN107799253A (en) | 2017-10-27 | 2017-10-27 | The manufacture method of rare earth metal rotary target material |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109536909A (en) * | 2019-01-16 | 2019-03-29 | 广州市尤特新材料有限公司 | A kind of rare earth metal rotary target material and its manufacturing method |
| CN110983277A (en) * | 2019-12-30 | 2020-04-10 | 广州市尤特新材料有限公司 | Rotary rare earth target material for neodymium iron boron permanent magnet material, and preparation method and repair method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062131A (en) * | 1992-06-15 | 1994-01-11 | Mitsui Mining & Smelting Co Ltd | Sputtering target for magneto-optical recording medium and its production |
| CN105026607A (en) * | 2013-01-28 | 2015-11-04 | 吉坤日矿日石金属株式会社 | Sputtering target for rare-earth magnet and production method therefor |
| CN105408987A (en) * | 2014-04-25 | 2016-03-16 | 应用材料公司 | Ion assisted deposition top coat of rare-earth oxide |
| CN106244988A (en) * | 2016-07-31 | 2016-12-21 | 包头稀土研究院 | A kind of high resistant target manufacture method |
-
2017
- 2017-10-27 CN CN201711024430.7A patent/CN107799253A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062131A (en) * | 1992-06-15 | 1994-01-11 | Mitsui Mining & Smelting Co Ltd | Sputtering target for magneto-optical recording medium and its production |
| CN105026607A (en) * | 2013-01-28 | 2015-11-04 | 吉坤日矿日石金属株式会社 | Sputtering target for rare-earth magnet and production method therefor |
| CN105408987A (en) * | 2014-04-25 | 2016-03-16 | 应用材料公司 | Ion assisted deposition top coat of rare-earth oxide |
| CN106244988A (en) * | 2016-07-31 | 2016-12-21 | 包头稀土研究院 | A kind of high resistant target manufacture method |
Non-Patent Citations (2)
| Title |
|---|
| 杨邦朝等: "溅射靶材的应用与发展趋势", 《真空》 * |
| 罗俊锋: "粉末冶金靶材的制备与应用", 《中国金属通报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109536909A (en) * | 2019-01-16 | 2019-03-29 | 广州市尤特新材料有限公司 | A kind of rare earth metal rotary target material and its manufacturing method |
| CN110983277A (en) * | 2019-12-30 | 2020-04-10 | 广州市尤特新材料有限公司 | Rotary rare earth target material for neodymium iron boron permanent magnet material, and preparation method and repair method thereof |
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Application publication date: 20180313 |
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