CN107741752B - Anti-condensation heating device for medium-frequency plasma power supply - Google Patents
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Abstract
The invention discloses an anti-condensation heating device for an intermediate frequency plasma power supply, which comprises a signal acquisition and control unit, a wireless communication module, a temperature and humidity sensor module, a temperature sensor module and a heating module, wherein the temperature and humidity sensor module is used for measuring the internal environment temperature and humidity of a case, and the temperature sensor module is used for measuring the temperature at a cooling water inlet; the temperature and humidity sensor module and the temperature sensor module transmit acquired data to the signal acquisition and control unit, and the signal acquisition and control unit starts or closes the heating module by judging the running condition; the signal acquisition and control unit uploads alarm information through the wireless communication module. According to the invention, the temperature and the humidity are acquired in real time by adopting the sensor, and the heating module is started before the temperature and the humidity reach the saturation state according to the relation between condensation and the temperature and the humidity, so that the condition that the temperature and the humidity reach the condensation in real time is destroyed, and the condensation is prevented.
Description
Technical Field
The invention relates to the field of medium-frequency plasma power supplies, in particular to an anti-condensation heating device for a medium-frequency plasma power supply.
Background
At present, in the medium-frequency plasma power supply, most of the medium-frequency plasma power supply adopts air cooling and water cooling or the combination of the air cooling and the water cooling to reduce the temperature in the case, thereby ensuring that all parts of the power supply work normally in a safe temperature range. The purpose of the air cooling device or the water cooling device is to reduce the temperature in the case, and the humidity in the case is not considered when the temperature is reduced. Particularly, when the water pipes of the cooling water are connected in series, the internal temperature of the power supplies is low because the internal heat generation and temperature increase conditions are not generated due to the fact that part of the power supplies are not electrified. It is known that the air inevitably contains water vapor. When the water vapor reaches the saturation degree in the air, the water vapor is condensed on objects with relatively low temperature to form water drops, namely a condensation phenomenon. The higher the temperature, the more moisture that can be contained in the air; conversely, the lower the temperature, the less moisture that can be contained in the air. Therefore, if the temperature is lowered only in a high humidity environment, the condensation phenomenon is liable to occur without considering the saturation concentration of moisture. The occurrence of condensation at the chassis and the insulating material can reduce the insulation grade of the chassis and the insulating material, and the accidents such as creepage, flashover and the like are easy to occur. When condensation occurs at electronic devices, particularly integrated circuit modules, the modules may be subject to thermal expansion and contraction and cracking, damaging the devices, resulting in significant loss of personnel or equipment.
Therefore, those skilled in the art have been working to develop an anti-condensation heating apparatus for an intermediate frequency plasma power supply, which uses a sensor to collect temperature and humidity in real time, and starts a heating module before the temperature and humidity reach a saturated state according to the relationship between condensation and temperature and humidity, and damages the condition that the real-time temperature and humidity reach condensation, thereby preventing the occurrence of condensation.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention aims to develop an anti-condensation heating device for an intermediate frequency plasma power supply, which uses a sensor to collect temperature and humidity in real time, and starts a heating module before the temperature and humidity reach a saturated state according to the relationship between condensation and temperature and humidity, so as to destroy the condition that the temperature and humidity reach condensation in real time, thereby preventing condensation.
In order to achieve the aim, the invention provides an anti-condensation heating device for an intermediate frequency plasma power supply, which comprises a signal acquisition and control unit, a wireless communication module, a temperature and humidity sensor module, a temperature sensor module and a heating module,
the temperature and humidity sensor module is used for measuring the temperature and humidity of the environment inside the case, and the temperature sensor module is used for measuring the temperature at the cooling water inlet;
the temperature and humidity sensor module and the temperature sensor module transmit acquired data to the signal acquisition and control unit, and the signal acquisition and control unit starts or closes the heating module by judging the running condition;
the signal acquisition and control unit uploads alarm information through the wireless communication module.
Further, the temperature and humidity sensor module comprises a first temperature sensor, a second temperature sensor and a humidity sensor, wherein the first temperature sensor is used for measuring the ambient temperature in the case, the second temperature sensor is used for measuring the temperature at the cooling water inlet, and the humidity sensor is used for measuring the ambient humidity in the case.
Further, the signal acquisition and control unit starts or shuts down the heating module by judging the operation condition, specifically: setting an upper limit of condensation temperature of cooling water and a safety area, and starting a heating module when the operation condition reaches the upper limit; when the operating conditions are in the safe region, the heating module is turned off.
Further, the upper limit is set to a range of 20 ℃ to 50 ℃ and the safety region is set to a range of 20 ℃ to 40 ℃.
Further, the upper limit is set to 50 ℃.
Further, the temperature and humidity sensor module is arranged as a digital temperature and humidity sensor and comprises a resistance type humidity sensing element and a temperature measuring element, and is connected with a high-performance 8-bit singlechip, so that the temperature and humidity sensor module has the advantages of extremely high reliability, excellent long-term stability, excellent quality, ultra-fast response, strong anti-interference capability, extremely high cost performance, extremely small volume, extremely low power consumption and the like.
Further, the temperature sensor module is arranged as a digital temperature sensor, so that the measurement accuracy is extremely high and the communication speed is very high.
Further, the heating module is arranged to be an aluminum alloy heater using a belt wheel flow fan, has the advantages of small volume, low power consumption and rapid temperature rise, and is matched with the use of the belt wheel flow fan, so that the local temperature rise is rapidly converted into the temperature rise of the whole chassis environment, and the condensation of any point in the whole chassis is effectively prevented.
Further, the wireless communication module is set to adopt the technology of the narrow-band internet of things, and has the advantages of wide coverage, capability of supporting mass connection, low power consumption, low cost and the like.
Technical effects
1. According to the anti-condensation heating device for the medium-frequency plasma power supply, the temperature and the humidity are collected in real time by adopting the sensor, and the heating module is started before the temperature and the humidity reach a saturated state according to the relation between condensation and the temperature and the humidity, so that the condition that the real-time temperature and the humidity reach the condensation is destroyed, and the condensation is prevented.
2. The condensing-proof heating device for the medium-frequency plasma power supply effectively solves the problem that electronic devices, particularly modules at integrated circuit modules, are damaged due to the fact that the modules expand with heat and contract with cold and burst due to condensation, and personnel or equipment are damaged. On the other hand, the condensing and heating device also effectively prevents condensation from occurring at the positions of the chassis and the insulating material, thereby ensuring that the insulation grade of the chassis and the insulating material meets the original design parameters and avoiding personnel and equipment loss caused by the accidents of creepage, flashover and the like.
The conception, specific structure, and technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, features, and effects of the present invention.
Drawings
Fig. 1 is a system frame diagram of an anti-condensing heating device for an intermediate frequency plasma power supply according to a preferred embodiment of the present invention.
FIG. 2 is a schematic diagram of the relationship between ambient temperature, condensing temperature and relative humidity.
Fig. 3 is a schematic diagram of the safe operating area for condensation.
Detailed Description
As shown in fig. 1, a preferred embodiment of the present invention provides an anti-condensation heating apparatus for an intermediate frequency plasma power supply, which comprises a signal acquisition and control unit 4, a wireless communication module 5, a temperature and humidity sensor module 1, a temperature sensor module 2 and a heating module 3,
wherein the temperature and humidity sensor module 1 is arranged for measuring the temperature and humidity of the environment inside the cabinet, and the temperature sensor module 2 is arranged for measuring the temperature at the cooling water inlet;
the temperature and humidity sensor module 1 and the temperature sensor module 2 transmit acquired data to the signal acquisition and control unit 4, and the signal acquisition and control unit 4 starts or shuts down the heating module 3 by judging the running condition;
the signal acquisition and control unit 4 uploads alarm information through the wireless communication module 5.
The temperature and humidity sensor module 1 comprises a first temperature sensor, a second temperature sensor and a humidity sensor, wherein the first temperature sensor is used for measuring the ambient temperature in the case, the second temperature sensor is used for measuring the temperature at the cooling water inlet, and the humidity sensor is used for measuring the ambient humidity in the case.
Further, the temperature and humidity sensor module 1 is arranged as a digital temperature and humidity sensor and comprises a resistance type humidity sensing element and a temperature measuring element, and is connected with a high-performance 8-bit singlechip, so that the temperature and humidity sensor module is ensured to have extremely high reliability and excellent long-term stability, and has the advantages of excellent quality, ultra-fast response, strong anti-interference capability, extremely high cost performance, extremely small volume, extremely low power consumption and the like. The temperature and humidity sensor module of the invention preferably adopts a temperature and humidity composite sensor with calibrated digital signal output, and a special digital module acquisition technology and a temperature and humidity sensing technology are applied.
Further, the temperature sensor module 2 is arranged as a digital temperature sensor, the measurement accuracy can reach +/-0.3 ℃ within the temperature range of 0 ℃ to 65 ℃, the measurement accuracy is extremely high, and the communication speed is very high. In addition, the temperature sensor module also includes enhanced signal processing, two user selectable I 2 The C address and the communication speed up to 1MHz greatly improve the communication speed, and have higher reliability and long-term stability.
Further, the heating module 3 is arranged as an aluminum alloy heater using a belt wheel flow fan, has the advantages of small volume, low power consumption and rapid temperature rise, and is matched with the use of the belt wheel flow fan, so that the local temperature rise is rapidly converted into the temperature rise of the whole chassis environment, and the condensation of any point in the whole chassis is effectively prevented.
Further, the wireless communication module 5 is set to adopt the technology of the narrowband internet of things, and has the advantages of wide coverage, capability of supporting mass connection, low power consumption, low cost and the like. The narrowband internet of things technology has wide coverage, improved indoor coverage is provided, and under the same frequency band, the narrowband internet of things technology has 20dB higher gain than the existing network, which is equivalent to improving the capability of 100 times of coverage area; the system has the capability of supporting mass connection, one sector of the narrowband internet of things technology can support 10 ten thousand connections, and supports low-delay sensitivity, ultra-low equipment cost, low equipment power consumption and an optimized network architecture; the power consumption is low, and the standby time of the terminal module of the narrowband internet of things technology can be as long as 10 years; at a lower cost, the enterprise expects no more than $ 5 for a single consecutive module. The application of the narrowband internet of things technology in the industry of medium-frequency plasma power supplies is the first time.
Furthermore, the signal acquisition and control unit 4 adopts CPLD programmable devices to be matched with devices such as an 8-bit bus transceiver with 3-state output, an inverter, an inverted Schmitt trigger, an operational amplifier and the like, so as to realize acquisition, processing and control signal output of temperature and humidity signals.
The signal acquisition and control unit 4 starts or shuts down the heating module 3 by judging the operation conditions, specifically: setting an upper limit of the condensation temperature of the cooling water and a safety zone, as shown in fig. 2 and 3, when the operating conditions reach the upper limit, the heating module 3 is turned on; when the operating conditions are in the safe region, the heating module 3 is then switched off. As shown in fig. 2, the higher the relative humidity in the air, the closer the condensation temperature is to the ambient temperature, but the temperature at which condensation forms is always below the ambient temperature, regardless of the temperature in the air. From the mechanism of condensation occurrence and fig. 2 we can conclude that: to prevent the occurrence of condensation, it is necessary to make the surface temperature of the portion where condensation is not allowed to occur always higher than the ambient temperature around it, and therefore the upper limit is set to 20 ℃ to 50 ℃, preferably 50 ℃. Illustrating: when the temperature of the cooling water is 25 ℃, the ambient humidity is 60 ℃, and the ambient temperature reaches 34 ℃, the critical point of condensation is reached, and at the moment, the medium-frequency plasma power supply heating device can be started to improve the temperature of a cooling water flowing region, destroy the condition of condensation and protect the region from condensation.
As shown in fig. 3, in the application of the medium frequency plasma power supply, because the overall temperature inside the cabinet is reduced by adopting a water cooling mode, the condensation point is directly affected by the temperature of cooling water. Therefore, temperature and humidity condensation curves at different cooling water temperatures are redrawn under the power cabinet environment and are used as a judging basis for judging whether the anti-condensation heating device starts the heating unit. The safety zone of the present invention is set to a range of 20-40 c when the operating conditions are safe below the respective curves.
According to the anti-condensation heating device for the medium-frequency plasma power supply, the temperature and the humidity are collected in real time by adopting the sensor, and the heating module is started before the temperature and the humidity reach a saturated state according to the relation between condensation and the temperature and the humidity, so that the condition that the real-time temperature and the humidity reach the condensation is destroyed, and the condensation is prevented. The problem of personnel or equipment loss caused by the damage to the device due to the explosion of the electronic device, especially the module caused by condensation due to thermal expansion and cold contraction at the integrated circuit module is effectively prevented. And effectively prevent to take place the condensation at quick-witted case, insulating material department to guaranteed that the insulation grade of quick-witted case, insulating material satisfies original design parameter, avoided taking place personnel and equipment loss that accidents such as creepage, flashover caused.
The invention combines the application of the temperature sensor and the humidity sensor, and combines the judging conditions of starting or closing the heating module, thereby realizing the condensation prevention heating of the medium-frequency plasma power supply and effectively protecting electronic devices, personnel safety and equipment loss. The narrowband Internet of things technology is firstly applied in the medium-frequency plasma industry, so that the application with low power consumption and low cost is realized, and a new breakthrough is realized in the industrial development.
The foregoing describes in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the invention by one of ordinary skill in the art without undue burden. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the inventive concept shall be within the scope of protection defined by the claims.
Claims (6)
1. The condensing-proof heating device for the medium-frequency plasma power supply is characterized by comprising a signal acquisition and control unit, a wireless communication module, a temperature and humidity sensor module, a temperature sensor module and a heating module,
the temperature and humidity sensor module is used for measuring the temperature and humidity of the environment inside the case, and the temperature sensor module is used for measuring the temperature at the cooling water inlet;
the temperature and humidity sensor module and the temperature sensor module transmit acquired data to the signal acquisition and control unit, and the signal acquisition and control unit starts or closes the heating module by judging the running condition; the signal acquisition and control unit starts or closes the heating module by judging the running condition, and specifically comprises the following steps: setting an upper limit of condensation temperature and a safety area of cooling water, and starting the heating module when the running condition reaches the upper limit; when the operating condition is in a safe area, the heating module is turned off; the upper limit is set to 50 ℃ and the range of the safety zone is set to 20-40 ℃; wherein the upper limit and the range of the safety zone are obtained according to the relationship of the ambient temperature, the condensation temperature and the relative humidity curve;
and the signal acquisition and control unit uploads alarm information through the wireless communication module.
2. The anti-condensation heating apparatus for an intermediate frequency plasma power supply according to claim 1, wherein the temperature and humidity sensor module comprises a first temperature sensor configured to measure an ambient temperature within the cabinet, a second temperature sensor configured to measure a temperature at the cooling water inlet, and a humidity sensor configured to measure an ambient humidity within the cabinet.
3. The condensing-preventing heating device for an intermediate frequency plasma power supply according to claim 1, wherein the temperature and humidity sensor module is configured as a digital temperature and humidity sensor, comprises a resistive type humidity sensing element and a temperature measuring element, and is connected with a high-performance 8-bit single chip microcomputer.
4. An anti-condensing heating device for an intermediate frequency plasma power supply according to claim 1, wherein said temperature sensor module is configured as a digital temperature sensor.
5. An anti-condensing heating device for an intermediate frequency plasma power supply according to claim 1, wherein the heating module is configured as an aluminum alloy heater using a wheeled flow fan.
6. The condensing prevention heating device for an intermediate frequency plasma power supply of claim 1, wherein said wireless communication module is configured to employ narrowband internet of things technology.
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| CN201711107799.4A CN107741752B (en) | 2017-11-10 | 2017-11-10 | Anti-condensation heating device for medium-frequency plasma power supply |
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| CN201711107799.4A CN107741752B (en) | 2017-11-10 | 2017-11-10 | Anti-condensation heating device for medium-frequency plasma power supply |
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| CN107741752B true CN107741752B (en) | 2023-05-05 |
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