CN107740064B - A kind of sealing device and its method for dismounting cooling down equipment for sealing vacuum chamber - Google Patents
A kind of sealing device and its method for dismounting cooling down equipment for sealing vacuum chamber Download PDFInfo
- Publication number
- CN107740064B CN107740064B CN201710898438.XA CN201710898438A CN107740064B CN 107740064 B CN107740064 B CN 107740064B CN 201710898438 A CN201710898438 A CN 201710898438A CN 107740064 B CN107740064 B CN 107740064B
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- edge
- sealing
- sleeve
- knife
- vacuum chamber
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- 238000007789 sealing Methods 0.000 title claims abstract description 91
- 238000001816 cooling Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000498 cooling water Substances 0.000 claims abstract description 47
- 238000003466 welding Methods 0.000 claims description 3
- 241000233855 Orchidaceae Species 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 11
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001351 cycling effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Abstract
The invention belongs to vacuum coating equipment field more particularly to a kind of sealing devices and its method for dismounting that equipment is cooled down for sealing vacuum chamber.The device includes two sealing structures and a cooling equipment；Sealing structure includes edge of a knife flange assembly, sleeve and the gasket component in sleeve, and the first end face seamless connection of edge of a knife flange assembly is seamlessly connected in the lateral wall of vacuum chamber, the second end face of edge of a knife flange assembly and the first port edge of sleeve；Edge of a knife flange assembly includes multiple edge of a knife flanges being detachably connected；Cooling equipment includes cooling water pipe, and cooling water pipe sequentially passes through two sealing structures.The method for dismounting is to dismantle the junction between two neighboring edge of a knife flange, can remove sleeve and seal ring assembly from vacuum chamber.Sealing structure of the invention is set to outside vacuum chamber, and sealing structure and cooling equipment are independent of one another, can be individually operated when any one need to dismount maintenance, and flexibly and easily, there is no interference to each other.
Description
Technical field
The invention belongs to vacuum coating equipment fields, are related to a kind of technology of cooling water channel disengaging vacuum chamber, especially relate to
And it is a kind of for sealing the sealing device and its method for dismounting of the cooling equipment of vacuum chamber.
Background technique
In existing vacuum coating equipment, the mode of water route disengaging vacuum chamber is will to pass in and out the pipeline of chamber portion and have
The blank flange of the edge of a knife is welded as a whole, and blank flange is connected with the edge of a knife flange on chamber, realizes sealing.In
Chamber interior, the pipeline for passing in and out chamber can be connected by forms such as ferrule fitting, VCR connectors with water-cooled plate or other pipelines
It connects.Since chamber interior waterway seal reliability requirement is high, at the ferrule fitting of chamber interior or VCR connector etc. zero
Part it has to be ensured that good leakproofness, once otherwise installation maintenance occur slipping or components failure be likely to cause it is close
Envelope failure so that cooling water leakage and enter vacuum chamber, easily cause machine halt trouble in this way.General Proper chamber interior needs
Many places waterway connector is wanted, if there is the case where micro- infiltration, failure is not easy to check, it is difficult to accurately determine leak position.
Meanwhile in order to guarantee that the leakproofness in chamber interior water route is safe and reliable, need periodically to meet the VCR of chamber interior
The components such as head, ferrule fitting carry out regularly maintenance replacement, and each water route dismounting maintenance requires the sealing element more renewed, and
Carry out leak detection test, heavy workload.When maintenance, disassembly water route, need to open entire cavity, first in the cavity portion by water route
Connecting portion is removed, and then again removes the flange of exterior thereto.Vacuum chamber internal structure is compact, needs enough operations empty
Between could carry out dismounting maintenance to waterway connector.And edge of a knife flange, ferrule fitting or VCR connector either component damage
When needing replacing, entire water route need to be passed in and out to chamber portion and dismantled, replaced, maintenance cost is high.
In order to keep installation maintenance more convenient, inevitably need to extend water route in the length of chamber interior, so that chamber
Chamber interior is more crowded.The workload and difficulty of vacuum chamber assembly are all very big, and dismounting requires to carry out vacuum inspection every time
It surveys, to ensure sealed reliable.Chamber is opened to need to carry out operation using crane or other suspenders, it is very heavy.And equipment is solid
It is moved again after fixed, it is difficult to guarantee the stabilization of device structure parameter.
Summary of the invention
(1) technical problems to be solved
The present invention is to solve the technical problem of sealing and cooling device dismounting maintenance inconvenience in existing vacuum chamber.
(2) technical solution
In order to solve the above-mentioned technical problems, the present invention provides a kind of for sealing the sealing dress of the cooling equipment of vacuum chamber
It sets, the cooling equipment includes cooling water pipe, and the sealing device includes:
Two sealing structures, the sealing structure include edge of a knife flange assembly, sleeve and close in the sleeve
The first end face of packing coil assembly, the edge of a knife flange assembly is seamlessly connected in the lateral wall of vacuum chamber, the edge of a knife flange
The first port edge of the second end face of component and the sleeve is seamlessly connected；The edge of a knife flange assembly includes multiple knife-edge methods
Orchid, it is detachably connected between the end face of the two neighboring edge of a knife flange；
The cooling water pipe sequentially passes through the gasket component of a sealing structure, edge of a knife flange assembly enters very
Chamber interior then passes through the edge of a knife flange assembly and gasket component of another sealing structure；It thus forms
Cooling water is cycling in and out vacuum chamber is indoor.
Further, the sealing structure further includes bellows, and the open at both ends of the bellows is for the cooling water
Pipe passes through, and the second end face of the edge of a knife flange assembly and the first port edge of the bellows are seamlessly connected, the ripple
The second port edge of pipe and the first port edge of the sleeve are seamlessly connected.
Preferably, the edge of a knife flange assembly, bellows and sleeve coaxial arrangement.
Further, the first port bore of the sleeve be less than sleeve second port bore, the second of the sleeve
Port edge is detachably connected with for providing the supported flange of pressure to gasket component.
Preferably, the supported flange is connected by the second port edge of bolt and sleeve.Pretension bolt, supported flange
It is pressed down against gasket component, is deformed the gasket component effect of being squeezed, and then fills full sleeve and cooling water
Gap between pipe, to enhance sealing effect.
Further, the gasket component includes from sleeve second end mouth to sleeve first end mouth successively along quill
To the first gasket, seal ring assembly and the second gasket of setting.
Preferably, the seal ring assembly includes the first sealing ring and the second sealing ring being axially arranged along sleeve, described
Retaining ring is equipped between first sealing ring and the second sealing ring, to prevent the first sealing ring and the second sealing ring from axially altering along sleeve
It is dynamic.
Further, the edge of a knife flange assembly includes two edge of a knife flanges, passes through spiral shell between two edge of a knife flanges
Bolt is attached, and gasket is equipped between two edge of a knife flanges, to enhance sealing effect.
Further, the cooling equipment further includes the water-cooled plate inside vacuum chamber, is opened up in the water-cooled plate
There is water channel, the cooling water pipe passes through the water channel, and is seamlessly connected with the inner wall of the water channel, i.e., outside the described cooling water pipe
The inner wall of wall and the water channel is seamlessly connected.
Further, through-hole, the first end face of the edge of a knife flange assembly are offered on the lateral wall of the vacuum chamber
It is seamlessly connected with the through-hole edge.It is apparent that since the present invention has two sets of sealing structures, on the lateral wall of vacuum chamber in total
Two through-holes need to be opened up, the first end face of each edge of a knife flange assembly is seamlessly connected with corresponding through-hole edge respectively.
Further, the mode of the seamless connection is welding.
Preferably, the bellows is metal bellows.
The present invention also provides a kind of method for dismounting of sealing device, that is, will be between two neighboring edge of a knife flange
Junction is dismantled, and can remove the sleeve and seal ring assembly from the vacuum chamber.
Preferably, the junction between the supported flange and the second port edge of sleeve is dismantled, it can will be described
Seal ring assembly is separated out of sleeve.
(3) beneficial effect
Above-mentioned technical proposal of the invention has the advantages that
1, sealing structure of the invention be set to vacuum chamber outside, sealing structure with cool down equipment it is independent of one another, the two it
Between be not present on-mechanical connection type, any of them one need dismount and safeguard when, can be individually operated, flexibly and easily,
There is no interference from each other.
Specifically, since sealing structure is set to outside vacuum chamber, and it is detachably connected between each edge of a knife flange,
Therefore when needing to remove and safeguarding sealing structure, the connector (preferably bolt) between each edge of a knife flange need to only be torn open
Remove, entire sealing structure can be removed from cooling water pipe and vacuum chamber side wall, without first dismantling cooling water pipe, also without
Entire vacuum chamber need to be opened and carry out any operation in chamber interior, to also reduce manual labor's intensity.
When needing to remove cooling equipment, the cover board of vacuum chamber also need to be only opened, it can be by cooling water pipe (and water cooling
Plate) it removes, without removing entire sealing structure from vacuum chamber side wall, make any operation without to chamber interior,
Therefore operation is simplified, greatly reduces labor intensity.Even the case where the second port of sleeve is connected with supported flange
Under, also supported flange need to only be removed outside chamber.
2, cooling water pipe of the invention at gasket component and edge of a knife flange two by sealing, by atmospheric environment and vacuum
The indoor vacuum environment realization of chamber is completely isolated, and cooling water pipe directly passes in and out vacuum chamber, cooling water pipe and vacuum chamber
Between there is no any transition connecting apparatus, ensure that cooling water is isolated with the indoor vacuum environment of vacuum chamber completely,
Reliability is improved, a possibility that leaking inside vacuum chamber is greatly reduced, equipment is avoided and occurs because cooling water is let out
Machine halt trouble caused by leakage.
3, it is also not provided with any connector between the side wall of vacuum chamber, water-cooled plate and cooling water pipe three, so being not required to
Length of pipe can be shortened as far as possible, pipeline passes in and out vacuum chamber in the installation maintenance space of the reserved cooling equipment of chamber interior
The form of room more direct convenience saves cavity space to improve the compactedness of chamber structure, reduces chamber manufacture
Cost and use cost.
Detailed description of the invention
Fig. 1 is the cross-sectional view of the sealing and cooling device of vacuum chamber described in the embodiment of the present invention；
Wherein, 1, cooling water pipe；2, supported flange；3, sleeve；4, the first gasket；5, the first sealing ring；6, retaining ring；7,
Two sealing rings；8, the second gasket；9, bellows；10, the first edge of a knife flange；11, the second edge of a knife flange；12, vacuum chamber side wall；
13, water-cooled plate；14, through-hole；A, the atmospheric environment outside vacuum chamber；B, vacuum chamber.
Specific embodiment
Embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples.Following embodiment is used for
Illustrate the present invention, but cannot be used to limit the scope of the invention.
In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more；Term " the
One ", " second ", " third " etc. are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
It, can also be indirectly connected through an intermediary to be to be connected directly.For the ordinary skill in the art, tool can be regarded
Body situation understands the concrete meaning of above-mentioned term in the present invention.
As shown in Figure 1, present embodiments providing a kind of sealing and cooling device of vacuum chamber comprising: two sets of sealing knots
Structure and a set of cooling equipment.It should be noted that for the sake of simplicity, attached drawing 1 illustrate only cooling water pipe 1 and a set of sealing structure it
Between fit system, due to cooling water pipe 1 on vacuum chamber side wall 12 no matter into go out, cooling water pipe 1 and every set sealing tie
The fit system of structure is all the same, so it will be appreciated by those skilled in the art that cooling water pipe 1 on vacuum chamber side wall 12 into
Mode is as shown in Figure 1 out.
Sealing structure includes the edge of a knife flange assembly of coaxial arrangement, bellows 9, sleeve 3, and close in sleeve 3
Packing coil assembly, the open at both ends of bellows 9 pass through for cooling water pipe 1, and the first end face of edge of a knife flange assembly is welded in very
The first port edge of the lateral wall of plenum chamber B, the second end face of edge of a knife flange assembly and bellows 9 welds, and the of bellows 9
It welds at the first port edge of Two-port netwerk edge and sleeve 3；Edge of a knife flange assembly includes the first edge of a knife flange 10 and second edge of a knife
Flange 11 is attached between first edge of a knife flange 10 and the second edge of a knife flange 11 by bolt, the first edge of a knife flange 10 and
Gasket (not shown) is equipped between two edge of a knife flanges 11 to enhance sealing effect.It is offered on the lateral wall of vacuum chamber B
Through-hole 14, the first end face and 14 edge of through-hole of edge of a knife flange assembly are welded.It is apparent that since embodiment has two sets of sealing knots
Structure, needs to open up two through-holes 14 on the lateral wall of vacuum chamber B in total, the first end face of each edge of a knife flange assembly respectively with phase
Corresponding 14 edge of through-hole welding.
Specifically, gasket component includes successively axial along sleeve 3 from 3 second port of sleeve to 3 first port of sleeve
The first gasket 4, seal ring assembly and the second gasket 8 being arranged；Seal ring assembly includes the first sealing being axially arranged along sleeve 3
Circle 5 and second sealing ring 7 are equipped with retaining ring 6 between first sealing ring 5 and the second sealing ring 7, to prevent the first sealing ring 5 and the
Two sealing rings 7 are along 3 axial float of sleeve.
Cooling equipment includes cooling water pipe 1 and the water-cooled plate 13 inside vacuum chamber B, and cooling water pipe 1 sequentially passes through
Gasket component, bellows 9, the edge of a knife flange assembly of a set of sealing structure enter inside vacuum chamber B, then pass through water cooling
Plate 13, then sequentially pass through the edge of a knife flange assembly, bellows 9 and gasket component of another set of sealing structure；It thus forms
Cooling water being cycling in and out in vacuum chamber B.Specifically, offering water channel in water-cooled plate 13, cooling water pipe 1 passes through water channel,
And welded with the inner wall of water channel, i.e., the inner wall of the outer wall of cooling water pipe 1 and water channel welds.
Further, the first port bore of sleeve 3 is less than the second port bore of sleeve 3, the second port side of sleeve 3
Edge is bolted for providing the supported flange 2 of pressure to gasket component.Pretension bolt, supported flange 2 are downward
Gasket component is squeezed, the gasket component effect of being squeezed is deformed, and then fills full sleeve 3 and cooling water pipe 1
Between gap, to enhance sealing effect.
In the present embodiment, bellows 9 is metal bellows 9；Due to the presence of error in manufacturing process, edge of a knife flange with
One section of bellows 9 is welded between sleeve 3, the position of sleeve 3 can carry out Local uniqueness in longitudinal direction and horizontal direction, reduce cold
But the bending deformation of water pipe 1.First sealing ring 5 and the second sealing ring 7 are O-ring.Atmospheric environment outside vacuum chamber B
In A, cooling water pipe 1, which can be facilitated with ferrule fitting, VCR connector or pagoda type joint with cooling water source or discharge pipe line, to be connect.
The present embodiment additionally provides a kind of method for dismounting of sealing device, that is, by the first edge of a knife flange 10 and second
Bolt between edge of a knife flange 11 is dismantled, and can remove sleeve 3 and seal ring assembly from vacuum chamber side wall 12.It will compress
Bolt between flange 2 and the second port edge of sleeve 3 is dismantled, and can be separated seal ring assembly out of sleeve 3, and then right
Seal ring assembly carries out attended operation.
In conclusion the sealing structure of the present embodiment is set to outside vacuum chamber, sealing structure and cooling equipment are only each other
Vertical, on-mechanical connection type is not present therebetween can be individually operated when any of them one needs to dismount and safeguard,
Flexibly and easily, there is no interference from each other.Specifically, since sealing structure is set to outside vacuum chamber, and each edge of a knife
It is detachably connected between flange, therefore when needing to remove and safeguarding sealing structure, such as need to bellows or sealing
When gasket assembly is maintained or replaced, the bolt at the bolt and supported flange between each edge of a knife flange need to only be torn open
Remove, a whole set of sealing structure can be removed from cooling water pipe and vacuum chamber side wall, without first dismantling cooling water pipe, also without
Entire vacuum chamber need to be opened and carry out any operation in chamber interior, to also reduce manual labor's intensity.When needing to remove
When with safeguarding cooling equipment, also the supported flange of sleeve second end mouth need to only be removed outside chamber, then opening vacuum chamber
Cover board, water-cooled plate and cooling water pipe can be removed, without entire sealing structure is removed from vacuum chamber side wall,
Without making any operation to chamber interior.
The cooling water pipe of the present embodiment at gasket component and edge of a knife flange two by sealing, by atmospheric environment and vacuum
The indoor vacuum environment realization of chamber is completely isolated, and cooling water pipe directly passes in and out vacuum chamber, cooling water pipe and vacuum chamber
Between there is no any transition connecting apparatus, ensure that cooling water is isolated with the indoor vacuum environment of vacuum chamber completely,
Reliability is improved, a possibility that leaking inside vacuum chamber is greatly reduced, equipment is avoided and occurs because cooling water is let out
Machine halt trouble caused by leakage.Any connector, institute are also not provided between the side wall of vacuum chamber, water-cooled plate and cooling water pipe three
Not need that length of pipe, pipeline disengaging can be shortened as far as possible in the installation maintenance space of the reserved cooling equipment of chamber interior
The form of vacuum chamber more direct convenience saves cavity space to improve the compactedness of chamber structure, reduces chamber
Room manufacturing cost and use cost.
The embodiment of the present invention be in order to example and description and provide, and be not exhaustively or by the present invention limit
It can equally be passed in and out using process gas pipeline in the mode of disclosed form, such as disengaging vacuum chamber in water route of the invention
The mode of vacuum chamber.And the edge of a knife flange assembly that be seamlessly connected with vacuum chamber can also to be replaced with O-ring close by the present invention
Sealing assembly；First edge of a knife flange and the second edge of a knife flange can also be replaced with to two flanges for having seal groove, utilize seal groove
Flange is directly seamlessly connected with vacuum chamber side wall.Many modifications and variations are for the ordinary skill in the art
It is obvious.Selection and description embodiment are and to make ability to more preferably illustrate the principle of the present invention and practical application
The those of ordinary skill in domain it will be appreciated that the present invention to design various embodiments suitable for specific applications with various modifications.
Claims (9)
1. a kind of for sealing the sealing device of the cooling equipment of vacuum chamber, the cooling equipment includes cooling water pipe, feature
It is, comprising:
Two sealing structures, the sealing structure include edge of a knife flange assembly, sleeve and the gasket in the sleeve
The first end face of coil assembly, the edge of a knife flange assembly is seamlessly connected in the lateral wall of vacuum chamber, the edge of a knife flange assembly
Second end face and the sleeve first port edge be seamlessly connected；The edge of a knife flange assembly includes multiple edge of a knife flanges,
It is detachably connected between the end face of the two neighboring edge of a knife flange；
The cooling water pipe sequentially passes through the gasket component of a sealing structure, edge of a knife flange assembly enters vacuum chamber
Chamber interior then passes through the edge of a knife flange assembly and gasket component of another sealing structure；
The gasket component includes first be successively axially arranged along sleeve from sleeve second end mouth to sleeve first end mouth
Gasket, seal ring assembly and the second gasket.
2. sealing device according to claim 1, which is characterized in that the sealing structure further includes bellows, the wave
The open at both ends of line pipe passes through for the cooling water pipe, and the of the second end face of the edge of a knife flange assembly and the bellows
The seamless connection of Single port edge, the second port edge of the bellows and the first port edge of the sleeve are seamlessly connected.
3. sealing device according to claim 1, which is characterized in that the first port bore of the sleeve is less than sleeve
Second port bore, the second port edge of the sleeve are detachably connected with for providing pressure to gasket component
Supported flange.
4. sealing device according to claim 1, which is characterized in that the seal ring assembly includes axially being arranged along sleeve
The first sealing ring and the second sealing ring, between first sealing ring and the second sealing ring be equipped with retaining ring.
5. sealing device according to claim 1, which is characterized in that the edge of a knife flange assembly includes two knife-edge methods
Orchid is attached between two edge of a knife flanges by bolt, and gasket is equipped between two edge of a knife flanges.
6. sealing device according to claim 1, which is characterized in that the cooling equipment further includes being set in vacuum chamber
The water-cooled plate in portion, water channel is offered in the water-cooled plate, and the cooling water pipe passes through the water channel, and the inner wall with the water channel
Seamless connection.
7. sealing device according to claim 1, which is characterized in that offered on the lateral wall of the vacuum chamber logical
Hole, the first end face of the edge of a knife flange assembly and the through-hole edge are seamlessly connected.
8. described in any item sealing devices according to claim 1~7, which is characterized in that the mode of the seamless connection is
Welding.
9. a kind of method for dismounting of any one of claim 1~8 sealing device, which is characterized in that by the two neighboring edge of a knife
Junction between flange is dismantled, and can remove the sleeve and seal ring assembly from the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710898438.XA CN107740064B (en) | 2017-09-28 | 2017-09-28 | A kind of sealing device and its method for dismounting cooling down equipment for sealing vacuum chamber |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710898438.XA CN107740064B (en) | 2017-09-28 | 2017-09-28 | A kind of sealing device and its method for dismounting cooling down equipment for sealing vacuum chamber |
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| Publication Number | Publication Date |
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| CN107740064A CN107740064A (en) | 2018-02-27 |
| CN107740064B true CN107740064B (en) | 2019-11-05 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108194636A (en) * | 2018-03-07 | 2018-06-22 | 核工业理化工程研究院 | Thin wall cylinder air-leakage test sealing device |
| US11469077B2 (en) | 2018-04-24 | 2022-10-11 | FD3M, Inc. | Microwave plasma chemical vapor deposition device and application thereof |
| CN108588821A (en) * | 2018-04-24 | 2018-09-28 | Fd3M公司 | Microwave plasma CVD device and leak source detection method |
| CN108411372A (en) * | 2018-05-04 | 2018-08-17 | 常州比太黑硅科技有限公司 | A kind of vacuum chamber intracavitary elevating mechanism |
| CN108560045A (en) * | 2018-06-11 | 2018-09-21 | 南京大学 | A kind of octahedral ultrahigh vacuum cavity |
| CN111321393B (en) * | 2018-12-13 | 2022-05-10 | 中国电子科技集团公司第四十八研究所 | Microwave sealing structure of PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN112144034B (en) * | 2019-06-27 | 2022-12-30 | 昆山世高新材料科技有限公司 | Cooling back plate |
| CN112481604B (en) * | 2020-12-03 | 2023-09-08 | 无锡邑文电子科技有限公司 | ALD processing equipment and processing method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202913057U (en) * | 2011-11-14 | 2013-05-01 | 昆山彰盛奈米科技有限公司 | New sealing structure of parylene horizontal vacuum deposition system |
| CN103968073A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Connecting device for sealing ultrahigh vacuum high heat load optical element cooling water way |
-
2017
- 2017-09-28 CN CN201710898438.XA patent/CN107740064B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202913057U (en) * | 2011-11-14 | 2013-05-01 | 昆山彰盛奈米科技有限公司 | New sealing structure of parylene horizontal vacuum deposition system |
| CN103968073A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Connecting device for sealing ultrahigh vacuum high heat load optical element cooling water way |
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