CN107739795A - One kind is used for multi-disc superconducting thin film heat-treating apparatus - Google Patents
One kind is used for multi-disc superconducting thin film heat-treating apparatus Download PDFInfo
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- CN107739795A CN107739795A CN201711002715.0A CN201711002715A CN107739795A CN 107739795 A CN107739795 A CN 107739795A CN 201711002715 A CN201711002715 A CN 201711002715A CN 107739795 A CN107739795 A CN 107739795A
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- heater
- thin film
- superconducting thin
- disc
- treating apparatus
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/76—Adjusting the composition of the atmosphere
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D11/00—Process control or regulation for heat treatments
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0068—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for particular articles not mentioned below
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0016—Apparatus or processes specially adapted for manufacturing conductors or cables for heat treatment
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
The invention discloses one kind to be used for multi-disc superconducting thin film heat-treating apparatus, including body of heater；The workbench being electrically connected with body of heater；The flowmeter of installation on the table；It is arranged on the temp controlled meter of flowmeter one end；It is vertically mounted on the outlet disk of body of heater middle position；The air inlet pipe being connected with outlet disk one end；The gas flow valve and humidification device being connected successively with air inlet pipe；Sealing flange is provided with the both ends open of body of heater；Guide rod and guide groove；Motor；The universal drive shaft and quartz ampoule being connected with driving motor output shaft；Dress sample fixture is connected with one end of quartz ampoule；Device for sealing magnetic fluid on sealing flange；Automatic humidifying apparatus and automatic air interchanger on body of heater lateral wall.The substrate fixture that the present invention fires film is the fixture for firing multi-disc simultaneously, not only reduces cost consumption, and can realize the industrialization production of high-temperature superconducting thin film, improves operating efficiency.
Description
Technical field
The present invention relates to superconducting thin film technical field of heat treatment, more particularly to one kind is used for multi-disc superconducting thin film
Heat-treating apparatus.
Background technology
High quality large area superconducting film is the essential basic raw material of microwave electronic device field.High-temperature superconductor is thin
Membrane material has extremely low microwave surface resistance, and it is more than its microwave surface resistance two orders of magnitude lower than common metal, therefore should
The Superconducting Microwave device made of superconductor has the good characteristic of extremely low loss and extremely low noise.The initial stage nineties, the U.S.,
The states such as Japan, Britain, Germany, Russia put into huge fund, have carried out the research and development of high-temperature superconducting thin film material.Mainly use magnetic
Control sputtering, laser evaporation and the vacuum method preparation such as (heat) evaporation altogether, equipment investment scale is big, operation expense is high, adds
Various expenses needed for import so that product price is costly, it is often more important that delivery date can not ensure, in addition with linguistic
Obstacle and the market competitiveness for exchanging inconvenience and all having seriously undermined external producer caused by geographic distance.Therefore, find
The film preparing technology of low-cost and high-quality, which is developed and broken up monopoly to the large-scale application of large area high temperature superconductive film, to be had
Important realistic meaning.
Current superconducting thin film annealing device majority can only disposably fire 1~3 large area superconductive film, in order to enter one
Step reduces cost, improves production efficiency, equipment is transformed, achieves disposable multi-disc large area high temperature superconductive film
Firing has very important realistic meaning, and one kind is we provided for this and is used for multi-disc superconducting thin film heat-treating apparatus.
The content of the invention
In view of this, the invention aims to solve shortcoming present in prior art, and the one kind provided is used for
Multi-disc superconducting thin film heat-treating apparatus, cost consumption is not only reduced, and the industrialization of high-temperature superconducting thin film can be realized
Production, improves operating efficiency.
To achieve these goals, the present invention adopts the following technical scheme that：
One kind is used for multi-disc superconducting thin film heat-treating apparatus, includes the body of heater of both ends open；Electrically connect with the body of heater
Connect, and control the workbench of the body of heater running；Flowmeter on the workbench；It is arranged on described flowmeter one end
Temp controlled meter；Also include：It is vertically mounted on the outlet disk of the body of heater middle position；The air inlet being connected with described outlet disk one end
Pipe；It is connected successively with the air inlet pipe, and the gas flow valve and humidification device being arranged on the body of heater lateral wall；Described
Sealing flange is provided with the both ends open of body of heater；The sealing flange is welded with two close to the side wall both ends of the body of heater
Individual horizontally disposed guide rod；It is arranged in the side wall of the furnace interior both sides, and leading for connection is matched with the guide rod
To groove；The sealing flange is provided with support in the side side wall away from the body of heater；Motor on the support；
The universal drive shaft and quartz ampoule being connected successively with the driving motor output shaft；The quartz ampoule is rotatably connected on the interior of the body of heater
Portion, and dress sample fixture is connected with one end of the quartz ampoule；Positioned at the junction of the universal drive shaft and the sealing flange,
And the device for sealing magnetic fluid on the sealing flange；Automatic air interchanger on the body of heater lateral wall；
The automatic air interchanger is moved certainly including the automatic air-exchanging control button on the workbench, with described
Gas control button be electrically connected with control circuit two, one end extend into the furnace interior oxygen concentration detection alarm head, according to
The secondary air intake blower fan being arranged in the control circuit two and outlet passageway switch.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, in the other end of the air inlet pipe
It is connected with oxygen generator；The oxygen generator includes oxygen generator, oxygen tank.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, screw thread connects on the sealing flange
Multiple screws are connected to, the threaded one end of the screw is connected on the body of heater.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, the dress sample fixture is to burn simultaneously
Make the fixture of 8 superconducting thin films.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, described in the sealing flange drive
Guide rod is slided in the guide groove, and the sealing flange is fixedly connected on the body of heater by the screw.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, the body of heater is provided with heating chamber；
Heat-transfer device inside the heating chamber；Uniform copper pipe of the disk cloth inside the heating chamber.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, pacifies in the inside of the heating chamber
Equipped with the thermocouple being electrically connected with the temp controlled meter.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, the outlet disk is hollow structure,
Venthole of the array arrangement in the outlet disk both sides side wall.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, is switched and controlled by the outlet passageway
System, and the outlet passageway on the body of heater；And the air intake blower fan is arranged in the side wall of the body of heater.
Preferably, it is used in above-mentioned one kind in multi-disc superconducting thin film heat-treating apparatus, on the workbench
Automatic humidification control button；The automatic humidification control button is electrically connected with the humidification device.
Understand via above-mentioned technical scheme, compared with prior art, surpass the present disclosure provides one kind for multi-disc
Lead film heat-treating apparatus, on the one hand, temperature stability is controllable, and Magneticfluid Seal Technique is used at output shaft, ensure that and set
Standby long-life, high-adaptability；In addition, heat-treatment furnace, which is bilateral, enters piece simultaneously, Two-way side is blown, automatic air-exchanging so that at heat
It is uniform and stable on a large scale to manage furnace temperature, ensure that the high-performance of film；On the other hand, the substrate fixture for firing film is can be simultaneously
The fixture of multi-disc is fired, not only reduces cost consumption, and the industrialization production of high-temperature superconducting thin film can be realized, is improved
Operating efficiency.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing of offer obtains other accompanying drawings.
Fig. 1 accompanying drawings are structural representation of the invention.
Fig. 2 accompanying drawings are the local structural representation of the present invention.
Fig. 3 accompanying drawings are the structural representation of outlet disk of the present invention.
Fig. 4 accompanying drawings are the structural framing schematic diagram of automatic air interchanger of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
The embodiment of the invention discloses one kind to be used for multi-disc superconducting thin film heat-treating apparatus, not only reduces cost and disappears
Consumption, and the industrialization production of high-temperature superconducting thin film can be realized, improve operating efficiency, great market application and promotion price
Value.
Referring to the drawings 1~4, one kind provided by the invention is used for multi-disc superconducting thin film heat-treating apparatus, specifically includes：
The body of heater 1 of both ends open；It is electrically connected with body of heater 1, and the workbench 2 for controlling body of heater 1 to operate；Installed in workbench
Flowmeter 3 on 2；It is arranged on the temp controlled meter 4 of the one end of flowmeter 3；Also include：It is vertically mounted on the outlet of the middle position of body of heater 1
Disk 5；The air inlet pipe 6 being connected with the one end of outlet disk 5；It is connected successively with air inlet pipe 6, and the gas being arranged on the lateral wall of body of heater 1
Flow valve 7 and humidification device 8；Sealing flange 9 is provided with the both ends open of body of heater 1；Sealing flange 9 is close to body of heater 1
Side wall both ends are welded with two horizontally disposed guide rods 10；It is arranged in the side wall of the inside both sides of body of heater 1, and and guide rod
The guide groove 11 of 10 matching connections；Sealing flange 9 is provided with support 12 in the side side wall away from body of heater 1；On support 12
Motor 13；The universal drive shaft 14 and quartz ampoule 15 of axis connection are exported with motor 13 successively；Quartz ampoule 15 is rotatablely connected
In the inside of body of heater 1, and dress sample fixture 16 is connected with one end of quartz ampoule 15；Positioned at universal drive shaft 14 and sealing flange 9
Junction, and the device for sealing magnetic fluid 17 on sealing flange 9；Automatic air-exchanging dress on the lateral wall of body of heater 1
Put 19.
In order to further optimize above-mentioned technical proposal, sealing flange 9 drives guide rod 10 to be slided in guide groove 11, and leads to
Cross screw sealing flange 9 is fixedly connected on body of heater 1.
In order to further optimize above-mentioned technical proposal, body of heater 1 is provided with heating chamber 20；Leading inside heating chamber 20
Thermal；Uniform copper pipe 21 of the disk cloth inside heating chamber 20.
In order to further optimize above-mentioned technical proposal, it is provided with what is be electrically connected with temp controlled meter 4 in the inside of heating chamber 20
Thermocouple.
It should be noted that heated by copper pipe 21 to the heating chamber 20 of body of heater 1, and by heat-transfer device by heat
The inside of heating chamber 20 is evenly transferred to, using the temperature inside thermocouple detection heating chamber 20 and by the temperature inside heating chamber 20
Angle value real-time display is waited to be warming up to 55 DEG C, quartz ampoule 15 and dress sample fixture 16 is filled by magnet fluid sealing on temp controlled meter 4
Put 17 fixations to be put into inside body of heater 1, drive guide rod 10 to be slided in guide groove 11 by sealing flange 9, and will by screw
Sealing flange 9 is fixedly connected on body of heater 1.Start motor 13 to drive universal drive shaft 14 to rotate, and then drive quartz ampoule 15
And dress sample fixture 16 rotates.Oxygen is produced by oxygen generator, is exported from outlet disk 5, realizes Technology for Heating Processing.
Referring to accompanying drawing 1, in order to further optimize above-mentioned technical proposal, the automatic humidification control on workbench 2 is pressed
Button 18；Automatic humidification control button 18 is electrically connected with humidification device 8.
Inside heating chamber 20 in multi-disc superconducting thin film heat treatment process is carried out, if necessary to wet oxygen, then by by
Under the automatic humidification button 18 that is arranged on workbench 2 start humidification device 8 and work, to realize doing heating chamber 20 inside-wet
Conversion.
Referring to accompanying drawing 4, automatic air interchanger 19 is including the automatic air-exchanging control button 191 on workbench 2 and certainly
Move the control circuit 2 192 of the electric connection of gas control button 191, the oxygen concentration detection report that one end is extended into inside body of heater 1
Alert first 193, the air intake blower fan 194 being successively set in control circuit 2 192 and outlet passageway switch 195.
Monitor the oxygen concentration inside heating chamber 20 in real time by oxygen concentration detection alarm first 193, treat its internal oxygen
When gas concentration meets or exceeds setting value, start the automatic air-exchanging control button 191 being arranged on workbench 2, outlet passageway is opened
Close 195 to open, gas in heating chamber 20 is discharged automatically using suction principle；Treat that first 193 monitoring of oxygen concentration detection alarm adds
When oxygen concentration inside hot chamber 20 is less than setting value, starts the automatic air-exchanging control button 191 being arranged on workbench 2, enter
Wind blower fan 194 using pressure difference sense automatically after the filtered purification of outdoor gas be sent into heating chamber inside.
In order to further optimize above-mentioned technical proposal, oxygen generator is connected with the other end of air inlet pipe 6；Oxygen is sent out
Generating apparatus includes oxygen generator, oxygen tank.
In order to further optimize above-mentioned technical proposal, multiple screws, one end spiral shell of screw are threaded with sealing flange 9
Line is connected on body of heater 1.
In order to further optimize above-mentioned technical proposal, dress sample fixture 16 is the fixture for firing 8 superconducting thin films simultaneously.
What deserves to be explained is due to dress sample fixture 16 for that can fire the fixture of 8 superconducting thin films simultaneously, bilateral is carried out simultaneously
16 superconducting thin films can once be fired.Device design not only reduces cost consumption, and can realize high-temperature superconducting thin film
Industrialization production, improve operating efficiency.
In order to further optimize above-mentioned technical proposal, outlet disk 5 is hollow structure, and array arrangement is in the both sides side of outlet disk 5
Venthole 51 on wall.
In order to further optimize above-mentioned technical proposal, by the control of outlet passageway switch 195, and going out on body of heater 1 is arranged on
Gas passage；And air intake blower fan 194 is arranged in the side wall of body of heater 1.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.For device disclosed in embodiment
For, because it is corresponded to the method disclosed in Example, so description is fairly simple, related part is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (10)
1. one kind is used for multi-disc superconducting thin film heat-treating apparatus, including：The body of heater (1) of both ends open；With the body of heater (1) electricity
Property connection, and control the body of heater (1) operate workbench (2)；Flowmeter (3) on the workbench (2)；Set
Temp controlled meter (4) in the flowmeter (3) one end；Characterized in that, also include：It is vertically mounted on the body of heater (1) central position
The outlet disk (5) put；The air inlet pipe (6) being connected with described outlet disk (5) one end；It is connected, and sets with the air inlet pipe (6) successively
Put gas flow valve (7) and humidification device (8) on the body of heater (1) lateral wall；At the both ends open of the body of heater (1)
It is provided with sealing flange (9)；The sealing flange (9) is welded with two levels close to the side wall both ends of the body of heater (1)
The guide rod (10) of setting；It is arranged in the side wall of the internal both sides of the body of heater (1), and connection is matched with the guide rod (10)
Guide groove (11)；The sealing flange (9) is provided with support (12) in the side side wall away from the body of heater (1)；Positioned at institute
State the motor (13) on support (12)；The universal drive shaft (14) and quartz of axis connection are exported with the motor (13) successively
Manage (15)；The quartz ampoule (15) is rotatably connected on the inside of the body of heater (1), and connects in one end of the quartz ampoule (15)
It is connected to dress sample fixture (16)；Positioned at the junction of the universal drive shaft (14) and the sealing flange (9), and it is arranged on the sealing
Device for sealing magnetic fluid (17) on flange (9)；Automatic air interchanger (19) on the body of heater (1) lateral wall；
The automatic air interchanger (19) includes automatic air-exchanging control button (191) and the institute being arranged on the workbench (2)
State the control circuit two (192) of automatic air-exchanging control button (191) electric connection, one end extends into the body of heater (1) inside
Oxygen concentration detection alarm head (193), the air intake blower fan (194) being successively set on the control circuit two (192) and outlet
Channel switch (195).
2. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that it is described enter
The other end of tracheae (6) is connected with oxygen generator；The oxygen generator includes oxygen generator, oxygen tank.
3. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that the sealing
Multiple screws are threaded with flange (9), the threaded one end of the screw is connected on the body of heater (1).
4. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that the dress sample
Fixture (16) is the fixture for firing 8 superconducting thin films simultaneously.
5. one kind according to claim 3 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that the sealing
Flange (9) drives the guide rod (10) to be slided in the guide groove (11), and by the screw by the sealing flange
(9) it is fixedly connected on the body of heater (1).
6. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that the body of heater
(1) it is provided with heating chamber (20)；The heat-transfer device internal installed in the heating chamber (20)；Uniform disk cloth is in the heating chamber
(20) internal copper pipe (21).
7. one kind according to claim 6 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that adds described
The inside of hot chamber (20) is provided with the thermocouple being electrically connected with the temp controlled meter (4).
8. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that the outlet
Disk (5) is hollow structure, venthole (51) of the array arrangement in the side wall of outlet disk (5) both sides.
9. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that by it is described go out
Gas channel switch (195) controls, and the outlet passageway on the body of heater (1)；And air intake blower fan (194) installation
In the side wall of the body of heater (1).
10. one kind according to claim 1 is used for multi-disc superconducting thin film heat-treating apparatus, it is characterised in that is arranged on
Automatic humidification control button (18) on the workbench (2)；The automatic humidification control button (18) and the humidification device
(8) it is electrically connected with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711002715.0A CN107739795A (en) | 2017-10-24 | 2017-10-24 | One kind is used for multi-disc superconducting thin film heat-treating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711002715.0A CN107739795A (en) | 2017-10-24 | 2017-10-24 | One kind is used for multi-disc superconducting thin film heat-treating apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN107739795A true CN107739795A (en) | 2018-02-27 |
Family
ID=61238285
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711002715.0A Pending CN107739795A (en) | 2017-10-24 | 2017-10-24 | One kind is used for multi-disc superconducting thin film heat-treating apparatus |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114854965A (en) * | 2022-05-23 | 2022-08-05 | 西华大学 | Vacuum high-temperature heat treatment device for sealing unidirectional stretching magnetic fluid |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297421A (en) * | 1988-10-03 | 1990-04-10 | Yokogawa Electric Corp | Production of high temperature superconducting thin film |
| US5851955A (en) * | 1997-07-01 | 1998-12-22 | Sandia Corporation | Efficient growth of HTS films with volatile elements |
| CN1688034A (en) * | 2005-03-29 | 2005-10-26 | 清华大学 | Method for making large area uniform film or long superconducting wire and its apparatus |
| CN106835076A (en) * | 2017-02-23 | 2017-06-13 | 北京鼎臣超导科技有限公司 | The heat treatment reactor of multi-disc large area superconducting film |
-
2017
- 2017-10-24 CN CN201711002715.0A patent/CN107739795A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297421A (en) * | 1988-10-03 | 1990-04-10 | Yokogawa Electric Corp | Production of high temperature superconducting thin film |
| US5851955A (en) * | 1997-07-01 | 1998-12-22 | Sandia Corporation | Efficient growth of HTS films with volatile elements |
| CN1688034A (en) * | 2005-03-29 | 2005-10-26 | 清华大学 | Method for making large area uniform film or long superconducting wire and its apparatus |
| CN106835076A (en) * | 2017-02-23 | 2017-06-13 | 北京鼎臣超导科技有限公司 | The heat treatment reactor of multi-disc large area superconducting film |
Non-Patent Citations (1)
| Title |
|---|
| 吴光英 等: "《新型热处理电炉》", 30 June 1993, 北京：国防工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114854965A (en) * | 2022-05-23 | 2022-08-05 | 西华大学 | Vacuum high-temperature heat treatment device for sealing unidirectional stretching magnetic fluid |
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Application publication date: 20180227 |
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