CN107738178A - A kind of slicing single crystal silicon production lapping device - Google Patents
A kind of slicing single crystal silicon production lapping device Download PDFInfo
- Publication number
- CN107738178A CN107738178A CN201710897607.8A CN201710897607A CN107738178A CN 107738178 A CN107738178 A CN 107738178A CN 201710897607 A CN201710897607 A CN 201710897607A CN 107738178 A CN107738178 A CN 107738178A
- Authority
- CN
- China
- Prior art keywords
- welded
- casing
- wall
- inwall
- bolted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000003921 oil Substances 0.000 claims abstract description 25
- 239000012530 fluid Substances 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 18
- 238000010992 reflux Methods 0.000 claims description 10
- 238000010276 construction Methods 0.000 abstract 1
- 238000003801 milling Methods 0.000 abstract 1
- 238000000227 grinding Methods 0.000 description 10
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Abstract
The invention discloses a kind of slicing single crystal silicon production lapping device, including bottom plate, the top of the bottom plate is welded with casing, the bottom inwall of the casing is welded with two oil cylinders being parallel to each other, the side outer wall of the casing is provided with operation window, the extension rod bottom of two oil cylinders is welded with same fixed plate, the bottom outer wall of the fixed plate is welded with lower fixed frame, and the both sides inwall of lower fixed frame has been bolted the second motor, the output shaft of second motor is welded with step, and the top of step has been bolted lower millstone, the side outer wall of the casing is welded with control panel, the top outer wall of the casing is welded with upper holder.The present invention is simple in construction, easily operated, time saving and energy saving, and staff can be allowed to set milling time on demand, and the operation of whole device can be controlled by control panel, it is time saving simultaneously, also improve the operating efficiency of device.
Description
Technical field
The present invention relates to slicing single crystal silicon production technical field, more particularly to a kind of slicing single crystal silicon production grinding dress
Put.
Background technology
Monocrystalline silicon is a kind of active nonmetalloid of comparison, is the important component of crystalline material, slicing single crystal silicon
Grinding, refer to that slicing single crystal silicon can remove the kerf and surface damage layer caused by section and disc sharpener by grinding, be effectively improved
Curvature, flatness and the depth of parallelism of slicing single crystal silicon, specification, at present, slicing single crystal silicon can be handled by reaching a polishing process
Lapping device exist mostly complicated and the shortcomings that lapping degree can not be controlled very well, therefore, need a kind of slicing single crystal silicon badly
Production lapping device.
The content of the invention
The invention aims to solve shortcoming present in prior art, and a kind of slicing single crystal silicon proposed produces
Use lapping device.
To achieve these goals, present invention employs following technical scheme：
A kind of slicing single crystal silicon production lapping device, including bottom plate, the top of the bottom plate are welded with casing, the casing
Bottom inwall is welded with two oil cylinders being parallel to each other, and the side outer wall of the casing is provided with operation window, two oil cylinders
Extension rod bottom is welded with same fixed plate, and the bottom outer wall of the fixed plate is welded with lower fixed frame, and lower fixed frame
Both sides inwall has been bolted the second motor, and the output shaft of second motor is welded with step, and step
Top be bolted lower millstone, the side outer wall of the casing is welded with control panel, the top outer wall of the casing
Upper holder is welded with, and the both sides inwall of upper holder has been bolted the first motor, the output of first motor
Axle is welded with top chock, and the bottom outer wall of the top chock has been bolted upper millstone, and upper millstone is located at casing
Inside, both sides inwall of the casing close to top be welded with fixed strip, and the side outer wall of two fixed strips is opened
There is electronic chute, and two electronic chute inwalls are rabbeted slide, the top inwall of the casing is welded with fluid box, institute
State and fixed seat be welded with the inwall of casing side, and the top outer wall of fixed seat is welded with lower fluid box, the lower fluid box and
Upper fluid box is respectively positioned on the side away from the first motor, and the casing is provided with first through hole, the case close to top side outer wall
Body is provided with the second through hole close to fixed seat side outer wall, and the second through hole and first through hole are respectively positioned on the side away from operation window,
The inwall of the first through hole is welded with the first return duct, and casing side outer wall is welded with fixed mount, the fixed mount
Top has been bolted reflux pump, and the port of export connection of the first return duct one end and reflux pump away from upper fluid box,
The inwall of second through hole is welded with the second return duct, and the second return duct one end and reflux pump away from lower fluid box are entered
The connection of mouth end, the bottom inwall of the casing has been bolted battery, and battery is located remotely from the side of oil cylinder.
Preferably, the fix bar outer wall of two oil cylinders has been bolted magnetic valve, and magnetic valve bottom
The oil circuit of oilhole and oil cylinder connects.
Preferably, lapping liquid is respectively arranged with the upper fluid box and lower fluid box, and the bottom outer wall of upper fluid box is with
The top outer wall of fluid box is bolted the regulation liquid flow switch equidistantly distributed.
Preferably, first motor, the second motor, magnetic valve, electronic chute and control panel are respectively connected with controller,
And the model of controller is DATA-7311.
Preferably, the regulation liquid flow switch is connected by wire with battery, and battery is charging accumulator.
Preferably, side outer wall of the casing away from oil cylinder is bolted having time relay, and time relay
Device is connected by wire with battery and regulation liquid flow switch.
Beneficial effects of the present invention are：The device structure is simple, novel in design, the setting for the dynamic chute that is powered, achievable pair
The slicing single crystal silicon of grinding is timed sprinkling lapping liquid, and by the setting of upper and lower mill, the two-sided of slicing single crystal silicon can be achieved
Grinding；The setting of passage time relay and regulation liquid flow switch, it can accurately control the anti-of lapping liquid and slicing single crystal silicon surface
Between seasonable；By the setting of reflux pump, the first return duct and the second return duct, lapping liquid recycling can be saved
Resource；By the setting of operation window, staff can true observation polishing progress；By the setting of control panel, work can be allowed
Make the effect that personnel accurately control grinding；It can be realized by the setting of oil cylinder and the slicing single crystal silicon of a variety of different sizes is carried out
Grinding, improve the adaptability of device.
Brief description of the drawings
Fig. 1 is a kind of structural representation of slicing single crystal silicon production lapping device proposed by the present invention；
Fig. 2 is a kind of cross-sectional view of slicing single crystal silicon production lapping device proposed by the present invention.
In figure：1 upper holder, 2 first motors, 3 casings, 4 fixed strips, 5 control panels, 6 fixed plates, 7 second motors, 8 oil
Cylinder, 9 magnetic valves, 10 bottom plates, 11 electronic chutes, 12 slides, 13 operation windows, 14 lower millstones, fluid box, 16 first backflows on 15
Pipe, 17 reflux pumps, 18 time relays, 19 batteries.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.
Reference picture 1-2, a kind of slicing single crystal silicon production lapping device, including bottom plate 10, the top of bottom plate 10 are welded with
Casing 3, the bottom inwall of casing 3 are welded with two oil cylinders being parallel to each other 8, and the side outer wall of casing 3 is provided with operation window 13, and two
The extension rod bottom of individual oil cylinder 8 is welded with same fixed plate 6, and the bottom outer wall of fixed plate 6 is welded with lower fixed frame, and lower solid
The both sides inwall for determining frame has been bolted the second motor 7, and the output shaft of the second motor 7 is welded with step, and lower axle
The top of bearing has been bolted lower millstone 14, and the side outer wall of casing 3 is welded with control panel 5, the top outer wall of casing 3
Upper holder 1 is welded with, and the both sides inwall of upper holder 1 has been bolted the first motor 2, the output of the first motor 2
Axle is welded with top chock, and the bottom outer wall of top chock has been bolted upper millstone, and upper millstone is located at the interior of casing 3
Portion, both sides inwall of the casing 3 close to top are welded with fixed strip 4, and the side outer wall of two fixed strips 4 is provided with electronic chute
11, and two electronic inwalls of chute 11 are rabbeted slide 12, the top inwall of casing 3 is welded with fluid box 15, casing 3 one
Fixed seat is welded with the inwall of side, and the top outer wall of fixed seat is welded with lower fluid box, lower fluid box and upper fluid box 15 are equal
The side of the first motor 2 is located remotely from, casing 3 is provided with first through hole close to top side outer wall, and casing 3 is close to fixed seat side
Outer wall is provided with the second through hole, and the second through hole and first through hole are respectively positioned on the side away from operation window 13, the inwall of first through hole
The first return duct 16 is welded with, the side outer wall of casing 3 is welded with fixed mount, and the top of fixed mount has been bolted reflux pump
17, and the one end of the first return duct 16 away from upper fluid box 15 is connected with the port of export of reflux pump 17, the inwall weldering of the second through hole
The second return duct is connected to, and the one end of the second return duct away from lower fluid box is connected with the entrance point of reflux pump 10, the bottom of casing 3
End inwall has been bolted battery 19, and battery 19 is located remotely from the side of oil cylinder 8.
In the present invention, the fix bar outer walls of two oil cylinders 8 has been bolted magnetic valve 9, and the bottom of magnetic valve 9
Oilhole is connected with the oil circuit of oil cylinder 8, and lapping liquid is respectively arranged with upper fluid box 15 and lower fluid box, and outside the bottom of upper fluid box 7
The top outer wall of wall and lower fluid box is bolted the regulation liquid flow switch equidistantly distributed, the first motor 2, second
Motor 7, magnetic valve 9, electronic chute 11 and control panel 5 are respectively connected with controller, and the model of controller is DATA-7311,
Regulation liquid flow switch is connected by wire with battery 19, and battery 19 is charging accumulator, casing 3 away from oil cylinder 8 one
Side outer wall is bolted having time relay 18, and the time relay 18 is opened by wire and battery 19 and fluid flow
Connection connects.
Operation principle：In use, slicing single crystal silicon card is placed on slide 12, lapping liquid spray is set in control panel 5
After spilling the time, start the first motor 2 and the second motor 7, now the first motor 2 and the second motor 7 drive upper millstone with respectively
Mill 14 carries out twin grinding to slicing single crystal silicon, and after grinding the stipulated time, slicing single crystal silicon translates under the drive of slide 12
To the gap of upper and lower regulation liquid flow switch, now regulation liquid flow switch, which starts, starts to cut monocrystalline silicon light sprinkling lapping liquid, reaches
To after setting time, slicing single crystal silicon moves to origin-location by slide 12 again and is ground, reciprocal with this, reaches to grinding
It is required that it can terminate.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, technique according to the invention scheme and its
Inventive concept is subject to equivalent substitution or change, should all be included within the scope of the present invention.
Claims (6)
1. a kind of slicing single crystal silicon production lapping device, including bottom plate（10）, it is characterised in that the bottom plate（10）Top
It is welded with casing（3）, the casing（3）Bottom inwall be welded with two oil cylinders being parallel to each other（8）, the casing（3）'s
Side outer wall is provided with operation window（13）, two oil cylinders（8）Extension rod bottom be welded with same fixed plate（6）, it is described
Fixed plate（6）Bottom outer wall be welded with lower fixed frame, and the both sides inwall of lower fixed frame has been bolted the second motor
（7）, second motor（7）Output shaft be welded with step, and the top of step has been bolted lower mill
Disk (14）, the casing（3）Side outer wall be welded with control panel（5）, the casing（3）Top outer wall be welded with fixation
Frame（1）, and upper holder（1）Both sides inwall be bolted the first motor（2）, first motor（2）Output
Axle is welded with top chock, and the bottom outer wall of the top chock has been bolted upper millstone, and upper millstone is located at casing
（3）Inside, the casing（3）Both sides inwall close to top is welded with fixed strip（4）, two fixed strips（4）'s
Side outer wall is provided with electronic chute（11）, and two electronic chutes（11）Inwall, which is rabbeted, slide（12）, the casing（3）
Top inwall be welded with fluid box（15）, the casing（3）Fixed seat, and the top of fixed seat are welded with the inwall of side
Outer wall is welded with lower fluid box, the lower fluid box and upper fluid box（15）It is respectively positioned on away from the first motor（2）Side, it is described
Casing（3）Close to top side, outer wall is provided with first through hole, the casing（3）Close to fixed seat side, it is logical to be provided with second for outer wall
Hole, and the second through hole and first through hole are respectively positioned on away from operation window（13）Side, the inwall of the first through hole is welded with
One return duct（16）, the casing（3）Side outer wall is welded with fixed mount, and the top of the fixed mount has been bolted back
Flow pump（17）, and the first return duct（16）Away from upper fluid box（15）One end and reflux pump（17）The port of export connection, it is described
The inwall of second through hole is welded with the second return duct, and the second return duct one end and reflux pump away from lower fluid box（10）Enter
The connection of mouth end, the casing（3）Bottom inwall be bolted battery（19）, and battery（19）It is located remotely from oil
Cylinder（8）Side.
A kind of 2. slicing single crystal silicon production lapping device according to claim 1, it is characterised in that two oil cylinders
（8）Fix bar outer wall be bolted magnetic valve（9）, and magnetic valve（9）The oilhole and oil cylinder of bottom（8）Oil circuit
Connection.
A kind of 3. slicing single crystal silicon production lapping device according to claim 1, it is characterised in that the upper fluid box
（15）With lapping liquid, and upper fluid box are respectively arranged with lower fluid box（7）Bottom outer wall and lower fluid box top outer wall it is logical
Cross bolt and be fixed with the regulation liquid flow switch equidistantly distributed.
A kind of 4. slicing single crystal silicon production lapping device according to claim 1, it is characterised in that first motor
（2）, the second motor（7）, magnetic valve（9）, electronic chute（11）And control panel（5）It is respectively connected with controller, and the type of controller
Number it is DATA-7311.
A kind of 5. slicing single crystal silicon production lapping device according to claim 1, it is characterised in that the fluid flow
Switch passes through wire and battery（19）Connection, and battery（19）For charging accumulator.
A kind of 6. slicing single crystal silicon production lapping device according to claim 1, it is characterised in that the casing（3）
Away from oil cylinder（8）Side outer wall be bolted having time relay（18）, and the time relay（18）By wire with
Battery（19）Connected with regulation liquid flow switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710897607.8A CN107738178A (en) | 2017-09-28 | 2017-09-28 | A kind of slicing single crystal silicon production lapping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710897607.8A CN107738178A (en) | 2017-09-28 | 2017-09-28 | A kind of slicing single crystal silicon production lapping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107738178A true CN107738178A (en) | 2018-02-27 |
Family
ID=61235446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710897607.8A Pending CN107738178A (en) | 2017-09-28 | 2017-09-28 | A kind of slicing single crystal silicon production lapping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107738178A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112847014A (en) * | 2020-12-31 | 2021-05-28 | 福建省腾恒光电有限公司 | Upper and lower disc mechanism of optical element grinding device |
| CN115122169A (en) * | 2022-08-01 | 2022-09-30 | 安徽忠盛新型装饰材料有限公司 | Plane rough grinding device for plate processing and implementation method thereof |
| CN115122169B (en) * | 2022-08-01 | 2024-04-30 | 安徽忠盛新型装饰材料有限公司 | Plane rough grinding device for plate processing and implementation method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08174409A (en) * | 1994-12-20 | 1996-07-09 | River Eretetsuku Kk | Polishing device |
| CN1498724A (en) * | 2002-10-25 | 2004-05-26 | 不二越机械工业株式会社 | Lapping machine and method of grinding workpiece |
| CN101905442A (en) * | 2009-06-03 | 2010-12-08 | 不二越机械工业株式会社 | The carrier of the double-side polishing apparatus of wafer, double-side grinding method and this device |
| CN204450231U (en) * | 2015-01-29 | 2015-07-08 | 新中合光电科技（保靖）有限公司 | A kind of circulation of the dropping liquid for FA end surface grinding and protector |
| CN204819116U (en) * | 2014-07-01 | 2015-12-02 | K.C.科技股份有限公司 | Chemically mechanical polishing device |
| CN106737087A (en) * | 2017-01-12 | 2017-05-31 | 重庆四联特种装备材料有限公司 | Finlling automatically system |
| CN207873940U (en) * | 2017-09-28 | 2018-09-18 | 阜宁浔朋新材料科技有限公司 | A kind of slicing single crystal silicon production grinding device |
-
2017
- 2017-09-28 CN CN201710897607.8A patent/CN107738178A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08174409A (en) * | 1994-12-20 | 1996-07-09 | River Eretetsuku Kk | Polishing device |
| CN1498724A (en) * | 2002-10-25 | 2004-05-26 | 不二越机械工业株式会社 | Lapping machine and method of grinding workpiece |
| CN101905442A (en) * | 2009-06-03 | 2010-12-08 | 不二越机械工业株式会社 | The carrier of the double-side polishing apparatus of wafer, double-side grinding method and this device |
| CN204819116U (en) * | 2014-07-01 | 2015-12-02 | K.C.科技股份有限公司 | Chemically mechanical polishing device |
| CN204450231U (en) * | 2015-01-29 | 2015-07-08 | 新中合光电科技（保靖）有限公司 | A kind of circulation of the dropping liquid for FA end surface grinding and protector |
| CN106737087A (en) * | 2017-01-12 | 2017-05-31 | 重庆四联特种装备材料有限公司 | Finlling automatically system |
| CN207873940U (en) * | 2017-09-28 | 2018-09-18 | 阜宁浔朋新材料科技有限公司 | A kind of slicing single crystal silicon production grinding device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112847014A (en) * | 2020-12-31 | 2021-05-28 | 福建省腾恒光电有限公司 | Upper and lower disc mechanism of optical element grinding device |
| CN115122169A (en) * | 2022-08-01 | 2022-09-30 | 安徽忠盛新型装饰材料有限公司 | Plane rough grinding device for plate processing and implementation method thereof |
| CN115122169B (en) * | 2022-08-01 | 2024-04-30 | 安徽忠盛新型装饰材料有限公司 | Plane rough grinding device for plate processing and implementation method thereof |
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Application publication date: 20180227 |
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