CN107727233A - A kind of spectrograph - Google Patents

A kind of spectrograph Download PDF

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Publication number
CN107727233A
CN107727233A CN201711025176.2A CN201711025176A CN107727233A CN 107727233 A CN107727233 A CN 107727233A CN 201711025176 A CN201711025176 A CN 201711025176A CN 107727233 A CN107727233 A CN 107727233A
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CN
China
Prior art keywords
grating
concave mirror
ccd
dichroscope
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711025176.2A
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Chinese (zh)
Inventor
康建梅
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BEIJING ZOLIX INSTRUMENT Co Ltd
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BEIJING ZOLIX INSTRUMENT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING ZOLIX INSTRUMENT Co Ltd filed Critical BEIJING ZOLIX INSTRUMENT Co Ltd
Priority to CN201711025176.2A priority Critical patent/CN107727233A/en
Publication of CN107727233A publication Critical patent/CN107727233A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/40Measuring the intensity of spectral lines by determining density of a photograph of the spectrum; Spectrography

Abstract

The invention provides a kind of spectrograph, it is related to field of spectral analysis technology.The spectrograph includes the first concave mirror, plane mirror, dichroscope, the first grating, the second concave mirror, the first CCD, the second grating, the 3rd concave mirror and the 2nd CCD;Incident light reflexes to the dichroscope after first concave mirror carries out collimation processing, by the plane mirror;The short infrared wave band light for reaching the dichroscope passes through the dichroscope, projects at the first grating, after the first optical grating diffraction, reaches second concave mirror, and reflex to the first CCD by second concave mirror;The UV, visible light near infrared band light for reaching the dichroscope is reflexed at second grating by the dichroscope, after the second optical grating diffraction, reaches the 3rd concave mirror, and reflex to the 2nd CCD by the 3rd concave mirror.

Description

A kind of spectrograph
Technical field
The present invention relates to field of spectral analysis technology, more particularly to a kind of spectrograph.
Background technology
Spectrograph is in Atomic Emission Spectral Analysis, and the complex light of light source is decomposed into different ripples by sample after exciting through dispersion Long spectrum line, and the device recorded with photographic plate.In optics field, spectrograph is widely used.Existing market On have the small focal length spectrographs of many original equipment manufacturer (abbreviation OEM) versions, its wavelength band has UV, visible light (abbreviation UV- VIS) wave band and visible near-infrared (abbreviation VIS-NIR) wave band, but take the photograph spectral limit and cover ultraviolet short-wave infrared (abbreviation UV- SWIR) spectrometer of wave band is also relatively difficult to achieve.Although there is producer to release UV-SWIR spectrographs successively in recent years, in scheme The optical element difficulty of processing coefficient of use is high, and cost is high, is unable to reach the effect of volume production.
For example, as shown in figure 1, the UV-SWIR spectrographs released on the market at present, its incident light 101 pass through slit part 102 reach sphere collimating mirror 103;After the collimation projection of sphere collimating mirror 103, by the backside reflection of slit part 102 to two To at Look mirror 104;At dichroscope 104, the light 105 of short-wave infrared is through dichroscope 104, the and of short-wave infrared grating 106 After one group of first refractive lens group 107, it is focused on short-wave infrared focus planar detector 108;And at dichroscope 104, closely The infrared and light of visible waveband 109 reflects by dichroscope 104, is reflected by visible near-infrared grating 110 and one group second After lens group 111, it is focused on visible near-infrared focus planar detector 112.And there is many lack in the spectrograph scheme shown in Fig. 1 Point, such as:1. slit part 102 needs to punch in center, and needs overleaf to plate highly reflecting films, difficulty of processing is larger, and Cost is higher;2. short-wave infrared grating 106 and visible near-infrared grating 110 are generally adopted by the mode of transmission grating, and saturating The difficulty of processing for penetrating grating is larger;3. the structure of the spectrograph shown in Fig. 1 using transmitted light path structure, spectrum input compared with Width, aberration is larger, it is necessary to using achromatic lens group as the refractor group 111 of first refractive lens group 107 and second, carries The high cost of component.
It can be seen that UV-SWIR spectrographs of the prior art realization, it is necessary to processing technology difficulty it is larger, and cost compared with It is high.
The content of the invention
Embodiments of the invention provide a kind of spectrograph, to solve the realization of UV-SWIR spectrographs of the prior art, need The problem of processing technology difficulty wanted is larger, and cost is higher.
To reach above-mentioned purpose, the present invention adopts the following technical scheme that:
A kind of spectrograph, including the first concave mirror, plane mirror, dichroscope, the first grating, the second concave surface are anti- Penetrate mirror, the first CCD, the second grating, the 3rd concave mirror and the 2nd CCD;
Incident light reflexes to institute after first concave mirror carries out collimation processing, by the plane mirror State dichroscope;
The short infrared wave band light for reaching the dichroscope passes through the dichroscope, projects at the first grating, warp After crossing the first optical grating diffraction, second concave mirror is reached, and described first is reflexed to by second concave mirror At CCD;
The UV, visible light near infrared band light for reaching the dichroscope reflexes to described second by the dichroscope At grating, after the second optical grating diffraction, the 3rd concave mirror is reached, and reflexed to by the 3rd concave mirror At 2nd CCD.
Specifically, first grating and the second grating are plane reflection grating.
Specifically, the first CCD and the 2nd CCD is scientific research level refrigeration type CCD.
Specifically, first concave mirror, plane mirror, dichroscope, the first grating, the second concave reflection Mirror, the first CCD, the second grating, the 3rd concave mirror and the 2nd CCD are packaged in a complete machine encapsulating structure.
Spectrograph provided in an embodiment of the present invention, using classical reflection-type C-T structures, i.e. the first concave mirror and second Concave mirror is respectively as collimating mirror and imaging lens, and the first grating is as dispersion element, the first concave mirror and the 3rd recessed Face speculum is deleted as dispersion element respectively as collimating mirror and imaging lens, the second light so that the structure of spectrograph is simple, cost It can be controlled effectively, on the other hand reduce the difficulty of processing of optical element, avoid eliminating color using achromatic lens group The problem of cost that the scheme of difference is brought is higher.Meanwhile combined using the first grating, the second concave mirror, the first CCD and the Two gratings, the 3rd concave mirror, the 2nd CCD are combined, and form both sides identical spectrometer architecture, and collocation dichroscope is divided, First grating and the second light of two wave bands of collocation are deleted, and can realize that wide spectrum takes the photograph spectrum in the case where not changing resolution ratio.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also To obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is the structural representation of UV-SWIR spectrographs of the prior art;
Fig. 2 is the structural representation of spectrograph provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made Embodiment, belong to the scope of protection of the invention.
As shown in Fig. 2 the embodiment of the present invention provides a kind of spectrograph 20, including the first concave mirror 201, plane reflection Mirror 202, dichroscope 203, the first grating 204, the second concave mirror 205, the first CCD206, the second grating the 207, the 3rd are recessed The CCD209 of face speculum 208 and the 2nd.Wherein, CCD (Charge-Coupled Device) is detecting element, or is electricity Lotus coupling element.
As shown in Fig. 2 incident light 30 (its wavelength band is 300nm to 1700nm) passes through first concave mirror After 201 carry out collimation processing, the dichroscope 203 is reflexed to by the plane mirror 202.
Incident light 30 can be divided into short infrared wave band light (i.e. UV-SWIR, wavelength band are 1050nm to 1700nm) and purple Outer visible near-infrared band of light (i.e. UV-VIS and VIS-NIR, wavelength band are 300nm to 1050nm).
So, the short infrared wave band light for reaching the dichroscope passes through the dichroscope 203, projects the first light At grid 204, after the diffraction of the first grating 204, second concave mirror 205 is reached, and by second concave reflection Mirror 205 is reflexed at the first CCD206.
The UV, visible light near infrared band light for reaching the dichroscope reflexes to described by the dichroscope 203 At two gratings 207, after the diffraction of the second grating 207, the 3rd concave mirror 208 is reached, and by the 3rd concave surface Speculum 208 is reflexed at the 2nd CCD209.
So, the signal obtained by the first CCD206 and the 2nd CCD209 carries out data processing, and two CCD are obtained Signal is combined, you can realizes that wide spectrum is tested, its detailed process does not repeat here.
What deserves to be explained is dichroscope 203 in the embodiment of the present invention is 1050nm to wavelength band to 1700nm's The transmissivity of light is up to 90%, and to the reflectivity of light that wavelength band is 300nm to 1050nm up to 90%, the dichroscope 203 can lift the thang-kng amount of all band spectrum.
Specifically, the grating 207 of the first grating 204 and second is plane reflection grating.So that the first concave surface Speculum and the second concave mirror are formed classical anti-respectively as collimating mirror and imaging lens, the first grating as dispersion element Emitting C-T structures (Czerny-Turner, Cheney-Tener light channel structure).So that the first concave mirror and the 3rd concave reflection Mirror is deleted as dispersion element respectively as collimating mirror and imaging lens, the second light, forms classical reflection-type C-T structures so that take the photograph spectrum The structure of instrument is simple, and cost can be controlled effectively, and improves the signal to noise ratio of spectrograph.
Specifically, the first CCD206 and the 2nd CCD209 is scientific research level refrigeration type CCD.Scientific research level refrigeration type CCD CCD chip temperature can be reduced, so as to be especially suitable for the collection of atomic low light image, improves the overall signal to noise ratio of spectrograph.
Specifically, as shown in Fig. 2 first concave mirror 201, plane mirror 202, dichroscope 203, first Grating 204, the second concave mirror 205, the first CCD206, the second grating 207, the 3rd concave mirror 208 and second CCD209 is packaged in a complete machine encapsulating structure 210.By complete machine encapsulating structure 210, the first CCD206 and second can be avoided CCD209 respectively belonging to two relatively independent spectrometers it is individually separated, it is more not convenient when in use the problem of.
Spectrograph provided in an embodiment of the present invention, using classical reflection-type C-T structures, i.e. the first concave mirror and second Concave mirror is respectively as collimating mirror and imaging lens, and the first grating is as dispersion element, the first concave mirror and the 3rd recessed Face speculum is deleted as dispersion element respectively as collimating mirror and imaging lens, the second light so that the structure of spectrograph is simple, cost It can be controlled effectively, on the other hand reduce the difficulty of processing of optical element, avoid eliminating color using achromatic lens group The problem of cost that the scheme of difference is brought is higher.Meanwhile combined using the first grating, the second concave mirror, the first CCD and the Two gratings, the 3rd concave mirror, the 2nd CCD are combined, and form both sides identical spectrometer architecture, and collocation dichroscope is divided, First grating and the second light of two wave bands of collocation are deleted, and can realize that wide spectrum takes the photograph spectrum in the case where not changing resolution ratio.This Sample, the embodiment of the present invention can realize a compact high-resolution wide spectrum spectrograph.
Apply specific embodiment in the present invention to be set forth the principle and embodiment of the present invention, above example Explanation be only intended to help understand the present invention method and its core concept;Meanwhile for those of ordinary skill in the art, According to the thought of the present invention, there will be changes in specific embodiments and applications, in summary, in this specification Appearance should not be construed as limiting the invention.

Claims (4)

  1. A kind of 1. spectrograph, it is characterised in that including the first concave mirror, plane mirror, dichroscope, the first grating, Second concave mirror, the first CCD, the second grating, the 3rd concave mirror and the 2nd CCD;
    Incident light reflexes to described two after first concave mirror carries out collimation processing, by the plane mirror To Look mirror;
    The short infrared wave band light for reaching the dichroscope passes through the dichroscope, projects at the first grating, by After one optical grating diffraction, second concave mirror is reached, and the first CCD is reflexed to by second concave mirror Place;
    The UV, visible light near infrared band light for reaching the dichroscope reflexes to second grating by the dichroscope Place, after the second optical grating diffraction, the 3rd concave mirror is reached, and reflexed to by the 3rd concave mirror described At 2nd CCD.
  2. 2. spectrograph according to claim 1, it is characterised in that first grating and the second grating are plane reflection Grating.
  3. 3. spectrograph according to claim 1, it is characterised in that the first CCD and the 2nd CCD is scientific research level refrigeration Type CCD.
  4. 4. spectrograph according to claim 1, it is characterised in that first concave mirror, plane mirror, two to Look mirror, the first grating, the second concave mirror, the first CCD, the second grating, the 3rd concave mirror and the 2nd CCD are packaged in In one complete machine encapsulating structure.
CN201711025176.2A 2017-10-27 2017-10-27 A kind of spectrograph Pending CN107727233A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111811650A (en) * 2020-07-29 2020-10-23 中国科学院西安光学精密机械研究所 C-T type structure imaging system based on holographic concave grating

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US5394237A (en) * 1992-11-10 1995-02-28 Geophysical & Enviromental Research Corp. Portable multiband imaging spectrometer
US20060038997A1 (en) * 2004-08-19 2006-02-23 Julian Jason P Multi-channel, multi-spectrum imaging spectrometer
US20060268269A1 (en) * 2005-05-27 2006-11-30 Warren Chris P Spectrometer designs
CN101551272A (en) * 2009-05-22 2009-10-07 中国科学院上海技术物理研究所 Double-spectral convex spherical imaging spectrometer
CN103557940A (en) * 2013-10-24 2014-02-05 杭州远方光电信息股份有限公司 Spectrograph
CN104508439A (en) * 2012-07-26 2015-04-08 雷神公司 High efficiency multi-channel spectrometer
CN104501956A (en) * 2014-12-30 2015-04-08 华中科技大学 Ultra wide wave band atlas correlation detecting device and method
KR20160143969A (en) * 2015-06-05 2016-12-15 한국항공우주연구원 Spectroscopic instrument using plane mirror and lens
CN207366081U (en) * 2017-10-27 2018-05-15 北京卓立汉光仪器有限公司 A kind of spectrograph

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5394237A (en) * 1992-11-10 1995-02-28 Geophysical & Enviromental Research Corp. Portable multiband imaging spectrometer
US20060038997A1 (en) * 2004-08-19 2006-02-23 Julian Jason P Multi-channel, multi-spectrum imaging spectrometer
US20060268269A1 (en) * 2005-05-27 2006-11-30 Warren Chris P Spectrometer designs
CN101551272A (en) * 2009-05-22 2009-10-07 中国科学院上海技术物理研究所 Double-spectral convex spherical imaging spectrometer
CN104508439A (en) * 2012-07-26 2015-04-08 雷神公司 High efficiency multi-channel spectrometer
CN103557940A (en) * 2013-10-24 2014-02-05 杭州远方光电信息股份有限公司 Spectrograph
CN104501956A (en) * 2014-12-30 2015-04-08 华中科技大学 Ultra wide wave band atlas correlation detecting device and method
US20160202122A1 (en) * 2014-12-30 2016-07-14 Huazhong University Of Science And Technology Detecting device and method combining images with spectrums in ultra-wide waveband
KR20160143969A (en) * 2015-06-05 2016-12-15 한국항공우주연구원 Spectroscopic instrument using plane mirror and lens
CN207366081U (en) * 2017-10-27 2018-05-15 北京卓立汉光仪器有限公司 A kind of spectrograph

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111811650A (en) * 2020-07-29 2020-10-23 中国科学院西安光学精密机械研究所 C-T type structure imaging system based on holographic concave grating

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