CN107689292B - A kind of preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base - Google Patents

A kind of preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base Download PDF

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CN107689292B
CN107689292B CN201711055269.XA CN201711055269A CN107689292B CN 107689292 B CN107689292 B CN 107689292B CN 201711055269 A CN201711055269 A CN 201711055269A CN 107689292 B CN107689292 B CN 107689292B
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ceco
main phase
permanent magnets
multilayer composite
base
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CN107689292A (en
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泮敏翔
吴琼
张朋越
葛洪良
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China Jiliang University
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/005—Ferrous alloys, e.g. steel alloys containing rare earths, i.e. Sc, Y, Lanthanides
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/12—Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/14—Ferrous alloys, e.g. steel alloys containing titanium or zirconium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/183—Sputtering targets therefor

Abstract

The invention discloses a kind of preparation methods of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base, belong to technical field of magnetic materials.The preparation method includes: 1) to weigh each raw material according to CeFeB alloying component and mixed, and mixed raw material is carried out vacuum melting, then fast quenching gets rid of band and alloy thin band is made；2) each raw material is weighed according to CeCo alloying component and mixed, mixed raw material is subjected to vacuum melting, poured into magnetic control spattering target mold after then melting melted CeCo alloy pig, polish, cutting after cooling, obtain CeCo target；3) make to sequentially form CeCo layers on the scope of freedom of CeFeB strip made from step 1) of CeCo target made from step (2) and chilling face using magnetron sputtering technique；4) the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base made from step (3) are subjected to vacuum heat treatment, the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base for being made of the invention.The preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base of the present invention not only improves the temperature stability of magnet, but also guarantees higher magnetic property, realizes the matched well of temperature stability and magnetic property.

Description

A kind of preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base
Technical field
The present invention relates to a kind of preparation methods of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base, and in particular to a kind of CeFeB/ The preparation method of CeCo composite nanocrystalline magnet, belongs to technical field of magnetic materials.
Background technique
As the yield and sales volume of third generation neodymium iron boron magnetic body are increased sharply, causes industry to sharp rise Nd demand, seek Metal Nd substitution metal explores one of the project that magnet of new generation has become the solution of neodymium iron boron industry.Therefore, researcher Also it is always trying to replace Nd element using Rare-Earth Ce, and is carrying out a large amount of research work.In 1985, many scholars were Through the research for starting Ce system rare earth permanent-magnetic material.In recent years, especially after the appearance of rare earth treaty, rare earth price rises violently into one Walk the attention for having pushed domestic and foreign scholars to develop Ce system rare earth permanent-magnetic material.Meanwhile domestic and international research hotspot mainly passes through Ce replaces Nd element completely, prepares the Ce-Fe-B alloy with Ce2Fe14B for unique main phase.Especially in Ce-Fe-B Ji Na In the brilliant magnet of rice, magnetic property is preferably developed, however, the development in terms of its temperature stability is but relatively more slow always Slowly.And Ce-Co base magnet has higher temperature stability and Curie point, but its intrinsic magnetic characteristic is relatively low.Therefore, Two kinds of permanent magnets with performance complement feature, which are combined with each other, becomes preparation high-performance high temperature resistant NEW TYPE OF COMPOSITE permanent magnetism at present The new way of body.But composite permanent magnet is due to the interface microstructure between each magnet, the effect between hard magnetic phase, preparation Technology controlling and process etc., which can not achieve, preferably to be recognized and controls, and is made its comprehensive performance and is not up to required.
In view of the above-mentioned problems, the present invention is combined using quick quenching technique-magnetron sputtering technique-laser heating heat treatment, effectively Compound Ce-Fe-B base and Ce-Co base nanometer crystal magnet, by realizing to its magnet thickness, Interface Microstructure and the control of phase composition The preparation of the nanocrystalline permanent magnet of the double main phase MULTILAYER COMPOSITEs of Ce base of high-temperature characteristic and high magnetic characteristics.
Summary of the invention
The purpose of the present invention is in order to overcome the deficiencies of the prior art, provide a kind of magnetic for effectively improving nanocrystalline composite The preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base of performance and temperature characterisitic.
The preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base of the invention, includes the following steps:
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；
2) each raw material is weighed according to CeCo alloying component and mixed, mixed raw material is subjected to vacuum melting, then will It is poured into magnetic control spattering target mold after melted CeCo alloy pig fusing, polishes after cooling, cutting, obtain CeCo target；
3) using magnetron sputtering technique make the CeFeB strip made from step 1) of CeCo target made from step (2) from By sequentially forming CeCo layers on face and chilling face；
4) the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base made from step (3) are subjected to vacuum heat treatment, are made of the invention The double main phase MULTILAYER COMPOSITE permanent magnets of Ce base.
Further, the constituent and mass percent of the CeFeB alloy are as follows: Ce:32.2 ~ 38.2%, Fe:60.5 ~ 72.5%, B:0.8 ~ 1.6%, Mo:0.1 ~ 0.6%, Zr:0.1 ~ 0.8%, Co:0.1 ~ 0.5%.
Further, the FFR'S fuel assembly that fast quenching gets rid of band in step (1) is 15 ~ 40m/s.
Further, the CeCo alloy is CeCo5Or CeCo7Type magnet.
Further, magnetron sputtering deposits CeCo layers of process conditions in step 3) are as follows: vacuum chamber vacuum in sputtering process Degree is 8 × 10-3Pa~3×10-2Pa, magnetron sputtering electric current are 15 ~ 25A, the scope of freedom of strip and the sputtering time phase in chilling face Together, the magnetron sputtering time is 15 ~ 45min.
Further, the vacuum heat treatment process parameter are as follows: 40 ~ 110 DEG C/s of heating rate, annealing temperature 450 ~ 850 DEG C, 15 ~ 60min of annealing time.
Compared with prior art, the invention has the advantages that and the utility model has the advantages that passing through quick quenching technique-magnetron sputtering skill Art-laser heating heat treatment technics combines the double main phase MULTILAYER COMPOSITE permanent magnets of preparation Ce base, more by adjusting CeFeB and CeCo The thickness of layer magnet, crystallite dimension, make Ce2Fe14B phase and CeCo5Or CeCo7Exchange-coupling interaction occurs for two hard magnetic phases of phase, has Effect realizes the synchronous reversion of magnetic domain of double hard magnetic phases, promotes the magnetic property of the double main phase nanocrystalline magnets of Ce base；Meanwhile passing through magnetic control CeCo magnet is added in sputtering, effectively improves the high-temperature stability of the double main phase nanocrystalline magnets of Ce base.
Specific embodiment
With reference to embodiment and comparative example the present invention is further elaborated.
Embodiment 1
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；The constituent and mass percent of the CeFeB alloy are as follows: Ce:35.4%, Fe:62.9%, B:1.1%, Mo:0.2%, Zr:0.3%, Co:0.1%；The FFR'S fuel assembly that the fast quenching gets rid of band is 25m/s；
2) each raw material is weighed according to CeCo alloying component and mixed, mixed raw material is subjected to vacuum melting, then will It is poured into magnetic control spattering target mold after melted CeCo alloy pig fusing, polishes after cooling, cutting, obtain CeCo target； The CeCo alloy is CeCo5Type magnet；
3) make CeCo using magnetron sputtering technique5Target sequentially forms on the scope of freedom and chilling face of CeFeB strip CeCo5Layer；The magnetron sputtering deposits CeCo5The process conditions of layer are as follows: vacuum degree in vacuum chamber is 9 × 10 in sputtering process- 3Pa, magnetron sputtering electric current are 20A, and the scope of freedom of strip and the sputtering time in chilling face are 20min；
4) the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base obtained above are put into laser heating anneal furnace, control laser adds Thermal annealing furnace heating rate is 90 DEG C/s, is warming up to 600 DEG C and insulation annealing 30min and carries out vacuum heat treatment, the present invention is made The double main phase MULTILAYER COMPOSITE permanent magnets of Ce base.
Comparative example
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；The constituent and mass percent of the CeFeB alloy are as follows: Ce:35.4%, Fe:62.9%, B: 1.1%, Mo:0.2%, Zr:0.3%, Co:0.1%；The FFR'S fuel assembly that the fast quenching gets rid of band is 25m/s；
2) CeFeB alloy thin strip magnet obtained above is put into laser heating anneal furnace, controls laser heating anneal Furnace heating rate is 90 DEG C/s, is warming up to 600 DEG C and insulation annealing 30min and carries out vacuum heat treatment, Ce base list main phase is made forever Magnet.
Test remanent magnetism, coercivity, magnetic energy product and the Curie temperature of above-mentioned two sample respectively by vibrating specimen magnetometer, it is right Than result as shown in table 1.
Table 1
Seen from table 1, compared with Ce base list main phase permanent magnet, the double main phase MULTILAYER COMPOSITE permanent magnetism of Ce base prepared by the present invention Body, magnetic energy product improve 20.9%, and Curie temperature improves 15.7%.
Embodiment 2
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；The constituent and mass percent of the CeFeB alloy are as follows: Ce:36.1 %, Fe:61.7%, B:1.2%, Mo:0.3%, Zr:0.5%, Co:0.2%；The FFR'S fuel assembly that the fast quenching gets rid of band is 32m/s；
2) each raw material is weighed according to CeCo alloying component and mixed, mixed raw material is subjected to vacuum melting, then will It is poured into magnetic control spattering target mold after melted CeCo alloy pig fusing, polishes after cooling, cutting, obtain CeCo target； The CeCo alloy is CeCo5Type magnet；
3) make CeCo using magnetron sputtering technique5Target sequentially forms on the scope of freedom and chilling face of CeFeB strip CeCo5Layer；The magnetron sputtering deposits CeCo5The process conditions of layer are as follows: vacuum degree in vacuum chamber is 9 × 10 in sputtering process- 3Pa, magnetron sputtering electric current are 20A, and the scope of freedom of strip and the sputtering time in chilling face are 30min；
4) the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base obtained above are put into laser heating anneal furnace, control laser adds Thermal annealing furnace heating rate is 90 DEG C/s, is warming up to 625 DEG C and insulation annealing 30min and carries out vacuum heat treatment, the present invention is made The double main phase MULTILAYER COMPOSITE permanent magnets of Ce base.
Comparative example
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；The constituent and mass percent of the CeFeB alloy are as follows: Ce:36.1 %, Fe:61.7%, B:1.2%, Mo:0.3%, Zr:0.5%, Co:0.2%；The FFR'S fuel assembly that the fast quenching gets rid of band is 32m/s；
2) CeFeB alloy thin strip magnet obtained above is put into laser heating anneal furnace, controls laser heating anneal Furnace heating rate is 90 DEG C/s, is warming up to 625 DEG C and insulation annealing 30min and carries out vacuum heat treatment, Ce base list main phase is made forever Magnet.
Test remanent magnetism, coercivity, magnetic energy product and the Curie temperature of above-mentioned two sample respectively by vibrating specimen magnetometer, it is right Than the results are shown in Table 2.
Table 2
As can be seen from Table 2, compared with Ce base list main phase permanent magnet, the double main phase MULTILAYER COMPOSITE permanent magnetism of Ce base prepared by the present invention Body, magnetic energy product improve 36.6%, and Curie temperature improves 15.0%.
Embodiment 3
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；The constituent and mass percent of the CeFeB alloy are as follows: Ce:37.8 %, Fe:59.2%, B:1.5%, Mo:0.4%, Zr:0.7%, Co:0.4%；The FFR'S fuel assembly that the fast quenching gets rid of band is 35m/s；
2) each raw material is weighed according to CeCo alloying component and mixed, mixed raw material is subjected to vacuum melting, then will It is poured into magnetic control spattering target mold after melted CeCo alloy pig fusing, polishes after cooling, cutting, obtain CeCo target； The CeCo alloy is CeCo5Type magnet；
3) make CeCo using magnetron sputtering technique5Target sequentially forms on the scope of freedom and chilling face of CeFeB strip CeCo5Layer；The magnetron sputtering deposits CeCo5The process conditions of layer are as follows: vacuum degree in vacuum chamber is 9 × 10 in sputtering process- 3Pa, magnetron sputtering electric current are 20A, and the scope of freedom of strip and the sputtering time in chilling face are 40min；
4) the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base obtained above are put into laser heating anneal furnace, control laser adds Thermal annealing furnace heating rate is 90 DEG C/s, is warming up to 660 DEG C and insulation annealing 30min and carries out vacuum heat treatment, the present invention is made The double main phase MULTILAYER COMPOSITE permanent magnets of Ce base.
Comparative example
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fastly It quenches and gets rid of band alloy thin band is made；The constituent and mass percent of the CeFeB alloy are as follows: Ce:37.8 %, Fe:59.2%, B:1.5%, Mo:0.4%, Zr:0.7%, Co:0.4%；The FFR'S fuel assembly that the fast quenching gets rid of band is 35m/s；
2) CeFeB alloy thin strip magnet obtained above is put into laser heating anneal furnace, controls laser heating anneal Furnace heating rate is 90 DEG C/s, is warming up to 660 DEG C and insulation annealing 30min and carries out vacuum heat treatment, Ce base list main phase is made forever Magnet.
Test remanent magnetism, coercivity, magnetic energy product and the Curie temperature of above-mentioned two sample respectively by vibrating specimen magnetometer, it is right Than the results are shown in Table 2.
Table 3
Seen from table 3, compared with Ce base list main phase permanent magnet, the double main phase MULTILAYER COMPOSITE permanent magnetism of Ce base prepared by the present invention Body, magnetic energy product improve 31.9%, and Curie temperature improves 17.1%.

Claims (6)

1. a kind of preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base, it is characterised in that include the following steps:
1) each raw material is weighed according to CeFeB alloying component and mixed, mixed raw material is subjected to vacuum melting, then fast quenching is got rid of Alloy thin band is made in band；
2) each raw material is weighed according to CeCo alloying component and mixed, mixed raw material is subjected to vacuum melting, then by melting It is poured into magnetic control spattering target mold after good CeCo alloy pig fusing, polishes after cooling, cutting, obtain CeCo target；
3) make the scope of freedom of CeCo target CeFeB strip made from step 1) made from step (2) using magnetron sputtering technique With CeCo layers are sequentially formed on chilling face；
4) the double main phase MULTILAYER COMPOSITE permanent magnets of Ce base made from step (3) are subjected to vacuum heat treatment, Ce base of the invention is made Double main phase MULTILAYER COMPOSITE permanent magnets.
2. the preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base according to claim 1, it is characterised in that: described The constituent and mass percent of CeFeB alloy are as follows: Ce:32.2 ~ 38.2%, Fe:60.5 ~ 72.5%, B:0.8 ~ 1.6%, Mo: 0.1 ~ 0.6%, Zr:0.1 ~ 0.8%, Co:0.1 ~ 0.5%.
3. the preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base according to claim 1, it is characterised in that: step (1) it is 15 ~ 40m/s that fast quenching, which gets rid of the FFR'S fuel assembly of band, in.
4. the preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base according to claim 1, it is characterised in that: described CeCo alloy be CeCo5Or CeCo7Type magnet.
5. the preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base according to claim 1, it is characterised in that: step (3) magnetron sputtering deposits CeCo layers of process conditions in are as follows: vacuum degree in vacuum chamber is 8 × 10 in sputtering process-3Pa~3×10- 2Pa, magnetron sputtering electric current be 15 ~ 25A, the scope of freedom of strip is identical with the sputtering time in chilling face, the magnetron sputtering time be 15 ~ 45min。
6. the preparation method of the double main phase MULTILAYER COMPOSITE permanent magnets of the Ce base according to claim 1, it is characterised in that: described Vacuum heat treatment process parameter are as follows: 40 ~ 110 DEG C/s of heating rate, 450 ~ 850 DEG C of annealing temperature, annealing time 15 ~ 60min。
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102800454A (en) * 2012-08-30 2012-11-28 钢铁研究总院 Low-cost double-main phase Ce permanent-magnet alloy and preparation method thereof
CN104332262A (en) * 2014-08-27 2015-02-04 安泰科技股份有限公司 Nanometer double-phase composite permanent magnetic material with high magnetic energy product and preparation method thereof
CN104762519A (en) * 2015-03-23 2015-07-08 北京工业大学 A preparing method of a nanocrystal Sm<2>Co<17>/Co double-phase composite permanent magnetic alloy
CN105374485A (en) * 2015-11-26 2016-03-02 宁波科星材料科技有限公司 Multi-layer composite magnet and preparation method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5914977B2 (en) * 2011-03-30 2016-05-11 日立金属株式会社 Bulk magnet and manufacturing method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102800454A (en) * 2012-08-30 2012-11-28 钢铁研究总院 Low-cost double-main phase Ce permanent-magnet alloy and preparation method thereof
CN104332262A (en) * 2014-08-27 2015-02-04 安泰科技股份有限公司 Nanometer double-phase composite permanent magnetic material with high magnetic energy product and preparation method thereof
CN104762519A (en) * 2015-03-23 2015-07-08 北京工业大学 A preparing method of a nanocrystal Sm<2>Co<17>/Co double-phase composite permanent magnetic alloy
CN105374485A (en) * 2015-11-26 2016-03-02 宁波科星材料科技有限公司 Multi-layer composite magnet and preparation method thereof

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