CN107677573A - A kind of multi-peak particle swarm particle diameter distribution detection method - Google Patents
A kind of multi-peak particle swarm particle diameter distribution detection method Download PDFInfo
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- 239000002245 particle Substances 0.000 title claims abstract description 111
- 238000001514 detection method Methods 0.000 title claims abstract description 27
- 238000005311 autocorrelation function Methods 0.000 claims abstract description 30
- 239000012530 fluid Substances 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims abstract description 4
- 238000005315 distribution function Methods 0.000 claims abstract 2
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- 230000003287 optical effect Effects 0.000 abstract description 3
- 238000002296 dynamic light scattering Methods 0.000 description 8
- 239000000725 suspension Substances 0.000 description 6
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- 238000007405 data analysis Methods 0.000 description 3
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- -1 Methylsiloxane Chemical class 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000002902 bimodal effect Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000005314 correlation function Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
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- 239000002105 nanoparticle Substances 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
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- 230000001537 neural effect Effects 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
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Abstract
The invention discloses a kind of multi-peak particle swarm particle diameter distribution detection method, belong to field of optical measurements, it comprises the following steps：S1 produces the working fluid of the stability of flow comprising candidate particles group using miniflow pump, is sent into micro-fluidic chip, sample cell of the microchannel as candidate particles group；The light that S2 lasers are sent is transferred to the sample cell of micro-fluidic chip after first group of condenser lens, and candidate particles group's liquid sends scattering light；S3 scattering light is focused on photodetector target surface by second group of condenser lens, and photodetector produces photoelectric current；S4 photoelectric currents enter digital correlator, obtain the light intensity auto-correlation function at multiple scattering angles；S5 light intensity auto-correlation functions are performed data processing, calculate the average particle size distribution function for obtaining candidate particles group.The inventive method can realize in site measurement and the dynamic scattering light to multiple angles measures simultaneously, can obtain more accurately multi-peak particle swarm particle diameter distribution.
Description
Technical field
The invention belongs to field of optical measurements, more particularly, to a kind of multi-peak particle swarm based on micro-fluidic chip
Particle diameter distribution detection method.
Background technology
In fields such as chemistry, food industry, biology and marine ecologies, for the particle diameter distribution of submicron particles group
Research is extremely important.At present, conventional particle size measuring techniques mainly have sedimentation, micro-image method, electric-resistivity method,
Sieve method and dynamic light scattering method etc., but limited by operation principle, except the photon phase in microscopic method and dynamic light scattering method
Close outside spectroscopic methodology, other methods are generally unsuitable for the measurement to the particle below micron.
Dynamic light scattering technique is the effective ways for measuring sub-micron and nano particle, and it passes through the auto-correlation of scattered light intensity
Function obtains grain graininess and its distribution.And the granularity and distribution of sub-micron and nano particle are to characterize the main ginseng of its performance
Number, therefore the measurement to these parameters is significant.
The granular system that the dynamic light scattering technique of single angle is distributed to unimodal or narrow peak, which can provide, more accurately to be surveyed
Measure result.However, for the granular system of wide distribution, bimodal distribution and multi-modal, single scattering angle dynamic light scattering
The grain diameter information that data are included is imperfect, so as to cause the failure of grain diameter inverting.
Therefore, it is necessary to develop a kind of new measuring method or detection method suitable for multi-peak particle swarm particle diameter or
Person's device.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of multi-peak particle swarm particle diameter distribution
Detection method, it is intended that by together with photoelectric detector and micro-fluidic chip ingehious design, using micro-fluidic micro- logical
Road is uncomfortable as sample cell, the particle diameter of measurement multi-peak particle swarm colony, the dynamic light scattering technique for thus solving single angle
With the technical problem of the granular system grain diameter measurement of wide distribution, bimodal distribution and multi-modal.
To achieve the above object, the invention provides a kind of multi-peak particle swarm particle diameter distribution detection method, it is included such as
Lower step：
S1：The working fluid of the stability of flow comprising candidate particles group is produced using miniflow pump, is sent into micro-fluidic chip, it is micro-
Sample cell of the circulation road as candidate particles group；
S2：The light that laser is sent is transferred to the sample cell of micro-fluidic chip, candidate particles after first group of condenser lens
Group's liquid sends scattering light；
S3：Scattering light is focused on photodetector target surface by second group of condenser lens, and photodetector produces photoelectricity
Stream；
S4：Photoelectric current enters digital correlator, obtains the light intensity auto-correlation function at multiple scattering angles；
S5：Light intensity auto-correlation function is performed data processing, calculates the average grain diameter particle diameter distribution for obtaining candidate particles group
Function.
Further, in step S4, the light intensity auto-correlation function at least three scattering angles is obtained.
Further, rotate micro-fluidic chip or rotate photodetector, to obtain the light intensity at multiple scattering angles
Auto-correlation function.
Further, in step S4, the normalized format of light intensity auto-correlation function is：
In formula：
Wherein, j=1,2,3 ... M, β are the spatial coherence factor, θjFor the angle of scattering of j passages, n is the refraction of decentralized medium
Rate, λ0For the wavelength of incident light in a vacuum, KBFor Boltzmann constant, T is absolute temperature, and η is the viscosity of decentralized medium, and D is
Peak diameter, τjFor the time delay of j passages, M is port number, DTIt is peak diameter under absolute temperature T.
Further, in step S5, the peak detection algorithm based on Phillips-Twomey, inverting has multiple particle diameters
The particle swarm particle diameter distribution of peak value.The related introduction of Phillips-Twomey peak detection algorithm can be found in document《Multi-angle
The non-negative Phillips-Twomey algorithms of dynamic light scattering particle size distribution recurrence》Document.
To achieve the above object, according to another aspect of the present invention, a kind of multi-peak particle swarm particle diameter point is additionally provided
Cloth detection means, it includes micro-fluidic chip, miniflow pump, laser, the first focus lens group, the second focus lens group, disk
Adjustment frame, photodetector, digital correlator and computer, wherein, micro-fluidic chip is arranged in disk adjustment frame, described
The flat fluid channel as sample cell is provided with micro-fluidic chip, flat fluid channel connection miniflow pump, miniflow pump is used
In the sample of grain diameter to be measured is pumped into flat fluid channel, photodetector is arranged in disk adjustment frame or set
Put and be arranged in disk adjustment frame periphery, the first focus lens group on laser emitting light direction, for by the outgoing of laser
Light is collimated and focused on, and is incident in the sample cell of micro-fluidic chip, is passed through from the laser facula of the first focus lens group outgoing
Particle in sample cell scatters, and the second focus lens group is used to the scattering light being emitted from sample cell converging to photodetection
Device, the photodetector are arranged on the outgoing light direction of the second focus lens group, for the institute in recruiting unit's time
The number of photons of light is scattered at measuring angle, the digital correlator is used for according to the light intensity at discrete light subnumber acquisition institute measuring angle certainly
Correlation function, the computer are used for the particle diameter that sample is obtained according to the inverting of light intensity auto-correlation function.
Further, the disk adjustment frame includes outer disc, inner disk and disk rotary rotating shaft, wherein, it is outer disc, interior
Disk is coaxially disposed, and disk rotary rotating shaft is arranged at the common axle center of outer disc and inner disk, outer disc and disk rotary rotating shaft
It can be rotated along common axle center, inner disk is fixed.
Further, photodetector has multiple, and micro-fluidic chip is arranged on fixed inner disk axle center and gone out, more
Individual photodetector is arranged on the edge of outer disc, can receive the scattering light of multiple angles.
Further, photodetector has three, solid respectively in the outer disc relevant position corresponding to three angle of scatterings
Determine photodetector, while measure the dynamic scattering light corresponding to one group of angle of scattering, photodetector output light electric current access three
The digital correlator of passage, during work, outer disc is rotated, so that the dynamic scattering light of a variety of different angles can be obtained.
Further, photodetector has one, and a photodetector is arranged on disk adjustment frame upper periphery simultaneously
And it is fixed, micro-fluidic chip is arranged in rotatable disk rotary rotating shaft, and during work, rotating circular disc rotary shaft is micro- to rotate
Fluidic chip, so as to make photodetector obtain the scattering light of multiple angles.
Further, photodetector has one, and a photodetector is arranged at the maximum annulus of outer disc,
Micro-fluidic chip is arranged at the axle center of inner disk and fixed, during work, outer disc is rotated, to adjust photodetector
Direction, so as to make photodetector obtain the dynamic scattering light of multiple angles.
Further, the photodetector is photomultiplier or photon counter.
Further, the photon counter is single photon counter, small-signal can be identified and extracted, from
Improve the accuracy of Monitoring Data.
The invention discloses the multi-peak particle swarm particle diameter distribution of a kind of combination micro-fluidic chip and dynamic light scattering technique
Detection means and method, main, the beam of coherent light from laser is irradiated to equipped with the micro- of polymeric particles suspension
In fluidic chip, the polymeric particles suspension in irradiation fluid channel.The scattering light of multiple angles is received by a photoelectric detector, and
Into digital correlator, the light intensity auto-correlation function at institute's measuring angle is obtained, is obtained using computer by suitable inversion algorithm
The minimum weight coefficient ratio of error is obtained, the size distribution and theoretical value that inverting obtains are closest.
The present invention combines advantage of the micro-fluidic chip to the accurate control of tested sample, proposes that one kind is easily achieved, consumes sample amount
Low, achievable in site measurement and the method that the dynamic scattering light to multiple angles measures simultaneously, the angle of measurement can be increased
More information, the accuracy and robustness of lifting Size analysis are provided for Size analysis.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it is following by that can obtain
Beneficial effect：
1st, in the inventive method, the microchannel on micro-fluidic chip is designed to sample cell, scattering object is dramatically reduced
Product, its scattering volume be on the yardstick of micron level, it is such ingenious by the use of micro-fluidic chip as sample cell, significantly contract
Short light path, eliminates multiple scattering from scattering mechanism, moreover, by by the light intensity that multiple different scattering angles measure from phase
Close function to be attached in a data analysis, avoid the incorrect property selected the scattering angle of a unknown sample, can obtain
Varigrained particle is taken in the scattering properties of different scattering angles, obtains more metrical informations, so obtain it is more accurate
Particle size distribution.
2nd, the position of photodetector or micro-fluidic chip is rotated, you can easily realize multimetering.
3rd, the peak detection algorithm based on Phillips-Twomey, inverting have the particle swarm particle diameter of multiple particle diameter peak values
Distribution, can improve multi-peak particle swarm particle diameter distribution measurement accuracy.
Brief description of the drawings
Fig. 1 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention；
Fig. 2 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention 1, wherein, light
Electric explorer 8 has one, and photodetector 8 is arranged at the maximum annulus of outer disc, and micro-fluidic chip 7 is arranged on inner disk
Axle center at and it is fixed；
Fig. 3 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention 2, wherein, light
Electric explorer 8 has one, and photodetector 8 is arranged on disk adjustment frame periphery and fixed, and micro-fluidic chip 7 is set
Can rotate in rotatable disk rotary rotating shaft；
Fig. 4 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention 3, wherein, light
Electric explorer 8 has three, and micro-fluidic chip 7 is arranged on the fixed axle center of inner disk 5 and gone out, and multiple photodetectors 8 are set
Put in the edge of outer disc, so that the scattering light of multiple angles can be received.
Fig. 5 is the light intensity auto-correlation function curve under 30 °, 45 °, 60 ° of scattering angles in the embodiment of the present invention.
The grain graininess point that Fig. 6 goes out for the light intensity auto-correlation function log inversion under the scattering angle after comprehensive multiple angles
Cloth curve map and real particle size distribution curve map.
In all of the figs, identical reference is used for representing identical element or structure, wherein：
1st, laser 2, the first focus lens group 3, disk adjustment frame
4th, outer disc 5, inner disk 6, miniflow pump
7th, micro flow chip 8, photodetector 9, digital correlator
10th, computer 11, suspension 12, particle
13rd, the second focus lens group
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
The invention provides a kind of multi-peak particle swarm particle diameter distribution detection method, it comprises the following steps：
S1：The working fluid of the stability of flow comprising candidate particles group is produced using miniflow pump, is sent into micro-fluidic chip, it is micro-
Sample cell of the circulation road as candidate particles group；
S2：The light that laser is sent is transferred to the sample cell of micro-fluidic chip, candidate particles after first group of condenser lens
Group's liquid sends scattering light；
S3：Scattering light is focused on photodetector target surface by second group of condenser lens, and photodetector produces photoelectricity
Stream；
S4：Photoelectric current enters digital correlator, obtains the light intensity auto-correlation function at multiple scattering angles；
S5：Light intensity auto-correlation function is performed data processing, calculates the average grain diameter particle diameter distribution for obtaining candidate particles group
Function.
In the embodiment of above method, in step S4, the light intensity auto-correlation function at least three scattering angles is obtained.
Rotatable micro-fluidic chip rotates photodetector, to obtain the light intensity auto-correlation function at multiple scattering angles.Light intensity
The normalized format of auto-correlation function is：
In formula：
Wherein, j=1,2,3 ... M, β are the spatial coherence factor, θjFor the angle of scattering of j passages, n is the refraction of decentralized medium
Rate, λ0For the wavelength of incident light in a vacuum, KBFor Boltzmann constant, T is absolute temperature, and η is the viscosity of decentralized medium, and D is
Peak diameter, τjFor the time delay of j passages, M is port number, DTIt is peak diameter under absolute temperature T.
In step S5, the peak detection algorithm based on Phillips-Twomey, inverting has the particle of multiple particle diameter peak values
Group's particle diameter distribution.Phillips-Twomey algorithms are one of numerous algorithms that inverting obtains particle diameter distribution, can also be used such as
Recurrent least square method, CONTIN algorithms and Tikhonov regularization algorithms obtain particle swarm particle diameter distribution.In algorithm design,
Need accurately to set the weight coefficient of each angle of scattering, so as to improve multi-peak particle swarm particle size distribution inversion accuracy.Can be with
Realize that weight coefficient adaptively adjusts by the methods of iterative algorithm, neural metwork training.
The device of above method is realized as shown in figure 1, Fig. 1 is that multi-peak particle swarm particle diameter distribution is examined in the embodiment of the present invention
The structural representation of device is surveyed, as seen from the figure, it includes micro-fluidic chip 7, miniflow pump 6, laser 1, the first focus lens group
2nd, the second focus lens group 13, disk adjustment frame 3, photodetector 8, digital correlator 9 and computer 10, wherein,
Micro-fluidic chip 7 is arranged in disk adjustment frame 3, is provided with the micro-fluidic chip 7 flat as sample cell
Straight shape fluid channel, flat fluid channel connection miniflow pump 6, miniflow pump 6 is used to the sample of grain diameter to be measured being pumped to
Flat fluid channel, photodetector 8 are arranged in disk adjustment frame or are arranged on disk adjustment frame periphery, and first focuses on thoroughly
Microscope group 2 is arranged on laser 1 and is emitted on light direction, for being collimated and being focused on the emergent light of laser 1, is focused on from first
The laser facula that lens group 2 is emitted is incident in the sample cell of micro-fluidic chip 7, is scattered through the particle in sample cell, the
Two focus lens groups 13 are used to the scattering light being emitted from sample cell converging to photodetector 8, and the photodetector 8 is set
On the outgoing light direction of the second focus lens group 13, for scattering the photon of light at institute's measuring angle in recruiting unit's time
Number, the digital correlator 9 are used for according to the light intensity auto-correlation function at discrete light subnumber acquisition institute measuring angle, the computer
10 are used for the particle diameter according to light intensity auto-correlation function inverting acquisition sample.
In Fig. 1, disk adjustment frame is not drawn, the disk adjustment frame 3 includes outer disc 4, inner disk 5 and disk
Rotary shaft, wherein, outer disc 4, inner disk 5 are coaxially disposed, and disk rotary rotating shaft is arranged on the common of outer disc 4 and inner disk 5
At axle center, outer disc 4 and disk rotary rotating shaft can rotate along common axle center, and inner disk 5 is fixed.Put into practice in Practical Project
In, in disk adjustment frame, inner disk superposition is arranged on outer disc, and inner disk diameter is less than outer disc diameter, and two disks are same
Axle is set.Disk rotary rotating shaft is arranged at the axle center of two disks, and it can be outside prominent inner disk or including depression
Below disk.When disc rotary aixs cylinder goes out outside lower inner disk, micro-fluidic chip 7 can be arranged on disk rotary in a manner of suspension
In rotating shaft.When disk rotary rotating shaft depression is below inner disk, micro-fluidic chip can be directly anchored at inner disk axle center.
Disk rotary rotating shaft can be arranged to rise to the form that can either shrink, by Design of Mechanical Structure with according to need
Adjust its structure and realize different functions.
Fig. 2 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention 1, wherein, light
Electric explorer 8 has one, and a photodetector 8 is arranged at the maximum annulus of outer disc, and micro-fluidic chip 7 is arranged on
It is at the axle center of inner disk and fixed, during work, outer disc is rotated, to adjust photodetector direction, so as to make light
Electric explorer 8 obtains the dynamic scattering light of multiple angles.
Fig. 3 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention 2, wherein, light
Electric explorer 8 has one, and a photodetector 8 is arranged on disk adjustment frame upper periphery and fixed, micro-fluidic
Chip 7 is arranged in rotatable disk rotary rotating shaft, during work, rotating circular disc rotary shaft to rotate micro-fluidic chip 7, so as to
Photodetector 8 is set to obtain the scattering light of multiple angles.
Fig. 4 is the structural representation of multi-peak particle swarm particle diameter distribution detection means in the embodiment of the present invention 3, wherein, light
Electric explorer 8 have it is multiple, micro-fluidic chip 7 is arranged on the fixed axle center of inner disk 5 and gone out, and multiple photodetectors 8 are set
Put in the edge of outer disc, so that the scattering light of multiple angles can be received.Specifically, photodetector 8 has three, at three
Photodetector is fixed in outer disc relevant position corresponding to angle of scattering respectively, while measures the dynamic corresponding to one group of angle of scattering
Light is scattered, the output light electric current of photodetector 8 accesses the digital correlator of triple channel, during work, outer disc is rotated, that can obtain
The dynamic scattering light of a variety of different angles.
For example, three angle of scatterings are one group, at 30 °, 45 °, 60 ° dispose three photodetectors, photodetector respectively
Signal accesses three-channel digital correlator.By cylindrical 0 ° of disc spins, it can detect and obtain 30 °, 45 °, the dynamic scattering corresponding to 60 °
Light.Outer disc is rotated by 90 °, can measure 120 °, 135 °, the dynamic scattering light corresponding to 150 °.
In the present invention, the photodetector is photomultiplier or photon counter.In order to detect faint light
Signal, the photon counter are single photon counter, small-signal can be identified and extracted, from improving monitoring number
According to accuracy.
In the present invention, can use with good optical characteristic polymeric material PDMS make micro-fluidic chip, i.e., poly- two
Methylsiloxane (Polydimethylsiloxane), required fluid channel is processed by photolithographic exposure technique.
The course of work of apparatus of the present invention is：
Beam of coherent light from laser 2 is irradiated in the micro-fluidic chip 7 equipped with the suspension 11 of particle 12, and irradiation is micro-
Particle suspension liquid in runner.The scattering light of multiple angles is received by photodetector 8, and enters digital correlator 9, obtains institute
Light intensity auto-correlation function at measuring angle, the minimum weight coefficient of error is obtained by suitable inversion algorithm using computer 10
Than the size distribution that inverting obtains is closest in theoretical value.
In apparatus of the present invention, by designing minim channel, reduce scattering volume, shorten light path, eliminated from scattering mechanism
Multiple scattering.Its sample consumption is low, size sensor is small, multimetering can be achieved.
Fig. 5 is the light intensity auto-correlation function curve under 30 °, 45 °, 60 ° of scattering angles in the embodiment of the present invention.In miniflow
The right side in road scattering light to multiple angles can detect simultaneously, and the corresponding photodetector of each angle, can will be more
The light intensity auto-correlation function of individual different scattering angle measurements is attached in a data analysis.As can be seen from Figure 5,30 °, 45 °, 60 °
Light intensity auto-correlation function curve under scattering angle relatively kissed with preferable auto-correlation function curve ratio and, it is known that, apparatus of the present invention
Design is feasible.
The aqueous solution of polystyrene standard spheric granules can be used to examine the accuracy of measuring method.Laser beam injects sample
Product pond, scattering light is received using photodetector, light intensity auto-correlation function is calculated using digital correlator, then by correlation function
It is sent into computer and carries out data inversion, inverting obtains particle size distribution curve map.
The grain graininess point that Fig. 6 goes out for the light intensity auto-correlation function log inversion under the scattering angle after comprehensive multiple angles
Cloth curve map and real particle size distribution curve map.The figure is with actual particle size error as little as 2%, illustrating this hair
Bright apparatus and method are more accurate, truly feasible.
In the method measured using apparatus of the present invention, pass through the light intensity auto-correlation for measuring multiple different scattering angles
Function is attached in a data analysis, is avoided the incorrect property selected the scattering angle of a unknown sample, can be obtained
Varigrained particle obtains more metrical informations, and then obtain more accurately in the scattering properties of different scattering angles
Particle size distribution.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (5)
1. a kind of multi-peak particle swarm particle diameter distribution detection method, it is characterised in that it comprises the following steps：
S1：The working fluid of the stability of flow comprising candidate particles group is produced using miniflow pump, is sent into micro-fluidic chip, miniflow leads to
Sample cell of the road as candidate particles group；
S2：The light that laser is sent is transferred to the sample cell of micro-fluidic chip, candidate particles group's liquid after first group of condenser lens
Body sends scattering light；
S3：Scattering light is focused on photodetector target surface by second group of condenser lens, and photodetector produces photoelectric current；
S4：Photoelectric current enters digital correlator, obtains the light intensity auto-correlation function at multiple scattering angles；
S5：Light intensity auto-correlation function is performed data processing, calculates the average grain diameter particle size distribution function for obtaining candidate particles group.
A kind of 2. multi-peak particle swarm particle diameter distribution detection method as claimed in claim 1, it is characterised in that in step S4,
Obtain the light intensity auto-correlation function at least three scattering angles.
3. a kind of multi-peak particle swarm particle diameter distribution detection method as claimed in claim 2, it is characterised in that rotate micro-fluidic
Chip rotates photodetector, to obtain the light intensity auto-correlation function at multiple scattering angles.
A kind of 4. multi-peak particle swarm particle diameter distribution detection method as claimed in claim 3, it is characterised in that in step S4,
The normalized format of light intensity auto-correlation function is：
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<mi>n</mi>
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<mo>(</mo>
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<mi>sin&theta;</mi>
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Wherein, j=1,2,3 ... M, β are the spatial coherence factor, θjFor the angle of scattering of j passages, n is the refractive index of decentralized medium, λ0
For the wavelength of incident light in a vacuum, KBFor Boltzmann constant, T is absolute temperature, and η is the viscosity of decentralized medium, and D is peak value
Particle diameter, τjFor the time delay of j passages, M is port number, DTIt is peak diameter under absolute temperature T.
A kind of 5. multi-peak particle swarm particle diameter distribution detection method as claimed in claim 4, it is characterised in that in step S5,
Peak detection algorithm based on Phillips-Twomey, inverting have the particle swarm particle diameter distribution of multiple particle diameter peak values.
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