CN107628811A - Large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target - Google Patents
Large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target Download PDFInfo
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- CN107628811A CN107628811A CN201710684249.2A CN201710684249A CN107628811A CN 107628811 A CN107628811 A CN 107628811A CN 201710684249 A CN201710684249 A CN 201710684249A CN 107628811 A CN107628811 A CN 107628811A
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Abstract
The invention discloses a kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target.Purity is more than 99.99%, the Ga that 0.03 1 microns of average grain diameter2O3Powder, the Y of 99.99% 0.03 1 microns of average grain diameter2O3The Zinc oxide powder ball milling of 0.2 0.5 microns of powder and 99.99% average grain diameter, mixed powder is passed through into the near net-shape direct in-situ curing molding in aqueous solvent, few organic matter is not added or added, produces density height, intensity is high, uniformity is good, the unrestricted green compact of shape.The method that the present invention uses has hardening time short, green strength is high, it is not easy to crack, high yield rate, composition is uniform, especially suitable for the preparation of high density target, earthenware target is tied in stainless steel penstock using indium metal and forms large scale magnetron sputtering rotation pipe target, fitting rate is up to more than 95%.
Description
Technical field
The present invention relates to belonging to ceramic field, more particularly to a kind of composition uniformly, high-purity, high density, high stability
Large scale binding formula gallium and yttrium codope zinc oxide (GZO-Y) rotary ceramic pipe target and preparation method thereof.
Background technology
Transparent conductive oxide (TCO) target be widely used in transparent conductive film, semiconductor display, touch-screen, thoroughly
Bright heater, electrochromism and thin-film solar cells etc..High density, high-purity, the TCO targets of high stability are always user
With the focus of research and development structure concern.Further, since the fast development of filming equipment, the shape of target is from traditional flat blocks
Shape develops to Rotational Coronary, because the utilization rate (25% or so) of planar targets lags far behind the profit of Rotational Coronary target
With rate (85-90%), it is worth mentioning at this point that, with making rapid progress for electronic information, the composition of target is also from traditional list
One composition develops to multi-component；Such as GZO rotary target materials, conventional is that Ga doping ZnO forms GZO transparent conductive oxides, but
It is powerful to be that its function can not show a candle to Ga and Y codope zinc oxide.Nevertheless, the doping of multielement compared with single element doping still
It is a huge challenge；It is not this due to greatest differences in shape from planar targets to the development of Rotational Coronary target
The colleague of specialty with the thinking of conventional analogy it is conceivable that.Equally, with display screen to large scale develop, the size of target
It is it is required that increasing.The current method for preparing TCO targets can be summarized as：Hot pressed sintering, high temperature insostatic pressing (HIP), isostatic cool pressing add sintering and
Traditional filling forming method.High temperature insostatic pressing (HIP), isostatic cool pressing cost are high, uneven components and product purity is easily impacted,
Injection forming (slip casting) yields poorly although cost is low and be suitable for multi-element doping but green compact easily ftracture, by
In there is additive product purity not high.Real magnetron sputtering rotary target material is formed, prepared ceramic target pipe must be bound
Onto stainless steel penstock, ceramics do not melt mutually with stainless steel, therefore the binding of ceramics and metal is equally a kind of challenge.This hair
A kind of bright direct in-situ clotting method using near net-shape, few organic matter is not added or added, it is high, uniform to produce density
Good, the unrestricted green compact of shape of property.Green strength is high.Ceramic target purity after sinter molding is more than 99.95%, and density is big
In 98%, 99.6% can reach.Earthenware target is tied into formation large scale magnetic control in stainless steel penstock using indium metal to splash
Penetrate rotation pipe target.
The content of the invention
Based on this, it is necessary to provide a kind of composition uniformly, the large scale binding formula gallium of high-purity, high density, low cost and
Yttrium codope zinc oxide (GZO-Y) rotary ceramic pipe target, the percentile content of each component are respectively：
Zinc oxide 95-98.9%, gallium oxide 1-5%；Yittrium oxide：0.1-0.3%；
Its preparation method comprises the following steps：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 0.03-1 microns, average grain diameter are
The gallium oxide powder of 0.02-1 microns, average grain diameter are 0.2 micron of Zinc oxide powder.
Step 2, that the part by weight of deionized water, ammonium polyacrylate dispersant is fully dissolved by 0.6-1.0% into composition is pre-
Solution processed, add Zinc oxide powder, gallium oxide powder, the former powder of yttrium oxide powder and zirconium oxide or alumina balls are used in ball mill
Ball milling 8-12 hours are carried out, dispersant adsorption is prepared into the slurry of low viscosity high solid loading high fluidity on the surface of slurry,
The volume of slurry Central Plains powder is than being adsorbed for 55%-70%, ammonium polyacrylate dispersant on the surface of slurry；
Step 3, in the slurry add 0.1-1.0wt% curing agent MgO, Mg ions caused by curing agent MgO situs with
The ammonium polyacrylate dispersant adsorbed in pulp surface occurs chemical reaction and produces magnesium polyacrylate, removes the scattered of pulp surface
Agent, slurry unstability is caused slurry curing, by slurry cast into stainless steel mould, stand 12-16 hours；
Step 4, the wet base demoulding by solidification, solidify 15-300 minutes, or heat 5-90 in 60 DEG C of baking ovens at normal temperatures
Minute, obtain dry green compact；
Step 5, green compact are warming up to 400-600 DEG C in air atmosphere push pedal sintering furnace, are incubated 0.5-1 hours, then
1300-1550 DEG C of insulation 5-8 hour of heating sinters ceramic of compact into, machining to obtain gallium and yttrium codope zinc oxide tubulose
Target, target material composition is uniform, and average crystal grain is 12-50 microns, and purity is high, and density is more than 98%.Target length of tube is in 200-400 millis
Rice.
Step 6, earthenware target is tied in stainless steel penstock with indium metal, the gallium and yttrium for forming large scale rotation are total to
Doping zinc-oxide pipe target, for magnetron sputtering plating, length reaches 4000 millimeters.
Further, the yttrium oxide powder is Y2O3Powder, the gallium oxide powder are Ga2O3Powder.
Further, near net-shape in-situ solidifying, the powder of the zinc oxide and gallium oxide is mixed-powder, and purity is more than
99.97%, chemically prepared by coprecipitation or two kinds of powder pass through ball-milling medium ball milling mixing.
Further, the slurry is ball milling or is what high-speed stirred was formed.
Further, the curing agent is magnesia.
Further, the ball-milling medium is zirconium oxide or gallium oxide Ceramic Balls.
Further, the mould is plastics, glass or the metal material that no hole does not absorb water.
A kind of composition of present invention offer is uniform, the large scale binding formula gallium and yttrium codope of high-purity, high density, low cost
Zinc oxide (GZO-Y) rotary ceramic pipe target and preparation method thereof, by mixed powder by aqueous solvent near net-shape it is direct
In-situ solidifying is molded, and does not add or add few organic matter, generation density is high, uniformity is good, the unrestricted green compact of shape.
Green strength is high.Ceramic target purity after sinter molding is more than 99.95%, and density is more than 98%, can reach 99.6%.This hair
It is bright to use ammonium polyacrylate as dispersant, by zinc oxide, gallium oxide and yttrium oxide powder, distilled water and dispersant in ball mill
It is middle carry out ball milling with zirconium oxide or alumina balls after add the life that appropriate curing agent ultimately forms sufficient intensity and reliability
Base.The target of sintering is machined, is tied to by indium metal in stainless steel penstock and forms size up to 4 meters of long magnetron sputterings
Target.
Brief description of the drawings
Fig. 1 is the high intensity GZO-Y green compact of large scale binding formula gallium of the present invention and yttrium codope zinc oxide rotary ceramic pipe target
Schematic diagram；
Fig. 2 is the target binding of the example 2 of large scale binding formula gallium of the present invention and yttrium codope zinc oxide rotary ceramic pipe target
C-SCAN schemes.
Embodiment
Presently preferred embodiments of the present invention is described in detail below so that advantages and features of the invention can be easier to by
It will be appreciated by those skilled in the art that apparent clearly defined so as to be made to protection scope of the present invention.
Embodiment 1
A kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target, its preparation method include following step
Suddenly：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 0.03 micron 99.99%, average grain
Footpath is 0.03 micron 99.99% of gallium oxide powder, and average grain diameter is 0.2 micron 99.99% of Zinc oxide powder.
Step 2, ammonium polyacrylate dispersant and deionized water pressed 0.6:99.4 ratio is well mixed；Then step is added
The Zinc oxide powder of 1 0.2 micron 99.99% of the average grain diameter prepared, the gallium oxide peace of 0.03 micron 99.99% of average grain diameter
The yttrium oxide powder of equal 0.03 micron 99.99% of particle diameter, wherein ZnO:Ga2O3:Y2O3Weight ratio is 98.9:1:0.1.In slurry
The volume of former powder is than for 55%；Above-mentioned slurry is put into ball mill and carries out ball milling 8 hours with zirconia ball, is prepared into low
Viscosity high fluidity slurry.
Step 3,0.6wt% curing agent MgO are added in the slurry, carry out mechanical agitation 10 minutes, be poured into stainless steel mold
In tool, 12 hours are stood.
Step 4, the wet base demoulding by solidification, solidify 300 minutes, obtain dry green compact at normal temperatures.
Step 5, green compact are warming up to 400 DEG C in air atmosphere push pedal sintering furnace, are incubated 1 hour, then heat up 1350
DEG C insulation sinters gallium doped yttrium zinc oxide ceramic of compact for 5 hours into, machining to obtain required gallium and yttrium codope oxygen
Change zinc pipe target, 200 millimeters of pipe target length, with metallographic microscope, Archimedes density measuring instrument, four probe resistance measuring instruments pair
Crystallite dimension, density, electric conductivity are characterized.
Step 6, the earthenware target of 200 millimeters of more piece is tied in stainless steel penstock with indium metal, forms length
1000 millimeters of gallium and yttrium codope zinc oxide rotation pipe target, earthenware target and the patch of stainless steel penstock are detected with C-Scan
Conjunction rate is 99%.
Table 1：The testing result of the GZO-Y of example one binding rotation pipe targets
Embodiment 2
A kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target, its preparation method include following step
Suddenly：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 0.03 micron 99.99%, average grain
Footpath is 0.03 micron 99.99% of gallium oxide powder, and average grain diameter is 0.2 micron 99.99% of Zinc oxide powder.
Step 2, polyacrylic acid dispersant ammonium and deionized water pressed 0.7:99.3 ratio is well mixed；Then step is added
The yttrium oxide powder that 1 average grain diameter prepared is 0.03 micron 99.99%, average grain diameter are 0.03 micron 99.99% of oxidation
Gallium powder, average grain diameter are 0.2 micron 99.99% of Zinc oxide powder, wherein ZnO:Ga2O3:Y2O3Weight ratio is 94.85：
5.0：0.15, the volume of slurry Central Plains powder is than for 55%；Above-mentioned slurry is put into ball mill and carries out ball with alumina balls
Mill 10 hours, is prepared into low-viscosity high-fluidity slurry.
Step 3,0.8wt%MgO curing agent is added in the slurry, carry out mechanical agitation 10 minutes, be poured into stainless steel mold
In tool, 12 hours are stood.
Step 4, the wet base demoulding by solidification, solidify 90 minutes at 60 DEG C, obtain dry green compact.
Step 5, green compact are warming up to 600 DEG C in air atmosphere push pedal sintering furnace, are incubated 1 hour, then heat up 1400
DEG C, insulation sinters gallium and yttrium codope zinc oxide dense ceramic tube target for 6 hours into, it is machining obtain required for gallium and
260 millimeters of yttrium codope oxidation zinc pipe target length, is measured with metallographic microscope, Archimedes density measuring instrument, four probe resistances
Crystallite dimension, density, the electric conductivity of instrument are characterized.
Step 6, the earthenware target of 260 millimeters of more piece is tied in stainless steel penstock with indium metal, forms length
2000 millimeters of gallium and yttrium codope zinc oxide rotation pipe target, earthenware target and the patch of stainless steel penstock are detected with C-Scan
Conjunction rate is 97%.
Table 2：The testing result of the GZO-Y of example two binding rotation pipe targets
Embodiment 3
A kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target, its preparation method include following step
Suddenly：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 0.03 micron 99.99%, average grain
Footpath is 0.03 micron 99.99% of gallium oxide powder, and average grain diameter is 0.2 micron 99.99% of Zinc oxide powder.
Step 2, ammonium polyacrylate dispersant and deionized water pressed 1:99 ratios are well mixed；Then it is accurate to add step 1
The Zinc oxide powder of 0.2 micron 99.99% standby of average grain diameter, the gallium oxide of 0.03 micron 99.99% of average grain diameter and average
The yttrium oxide powder that 0.03 micron 99.99% of particle diameter, wherein ZnO:Ga2O3:Y2O3Weight ratio is 97.7:2:0.3, slurry Central Plains
The volume of powder is than for 60%；Above-mentioned slurry is put into ball mill and carries out ball milling 12 hours with alumina balls, is prepared into low
Viscosity high fluidity slurry.
Step 3,1.0wt%MgO curing agent is added in the slurry, carry out mechanical agitation 10 minutes, be poured into stainless steel mold
In tool, 12 hours are stood.
Step 4, the wet base demoulding by solidification, solidify 5 minutes at 60 DEG C, obtain dry green compact.
Step 5, green compact are warming up to 500 DEG C in air atmosphere push pedal sintering furnace, are incubated 0.5 hour, then heat up
1300 DEG C, insulation sinters gallium and yttrium codope zinc oxide dense ceramic tube target for 7 hours into, it is machining obtain required for
300 millimeters of gallium and yttrium codope oxidation zinc pipe target length, with metallographic microscope, Archimedes density measuring instrument, four probe resistances
Crystallite dimension, density, the electric conductivity of measuring instrument are characterized.
Step 6, the earthenware target of 300 millimeters of more piece is tied in stainless steel penstock with indium metal, forms length
2897 millimeters of gallium and yttrium codope zinc oxide rotation pipe target, earthenware target and the patch of stainless steel penstock are detected with C-Scan
Conjunction rate is 97%.
Table 3：The testing result of the GZO-Y of example three binding rotation pipe targets
Embodiment 4
A kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target, its preparation method include following step
Suddenly：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 1.0 micron 99.99%, average grain
Footpath is 1.0 micron 99.99% of gallium oxide powder, and average grain diameter is 0.5 micron 99.99% of Zinc oxide powder.
Step 2, ammonium polyacrylate dispersant and deionized water pressed 0.8:99.2 ratio is well mixed；Then add average
Zinc oxide powder, the gallium oxide of 1.0 micron 99.99% of average grain diameter and the average grain diameter 1.0 that 0.5 micron 99.99% of particle diameter are micro-
The yttrium oxide powder of rice 99.99%, wherein ZnO:Ga2O3:Y2O3Weight ratio is 95.85:4：0.15, the body of slurry Central Plains powder
Product is than for 70%；Above-mentioned slurry is put into ball mill and carries out ball milling 11 hours with zirconia ball, is prepared into the high stream of low viscosity
Dynamic property slurry.
Step 3,0.6wt%MgO curing agent is added in the slurry, carry out mechanical agitation 15 minutes, be poured into stainless steel mold
In tool, 10 hours are stood.
Step 4, the wet base demoulding by solidification, solidify 15 minutes, obtain dry green compact at normal temperatures.
Step 5, green compact are warming up to 550 DEG C in air atmosphere push pedal sintering furnace, are incubated 40 minutes, then heat up
1450 DEG C, insulation sinters gallium and yttrium codope zinc oxide dense ceramic tube target for 8 hours into, it is machining obtain required for
350 millimeters of gallium and yttrium codope oxidation zinc pipe target length, with metallographic microscope, Archimedes density measuring instrument, four probe resistances
Crystallite dimension, density, the electric conductivity of measuring instrument are characterized.
Step 6, the earthenware target of 350 millimeters of more piece is tied in stainless steel penstock with indium metal, forms length
3500 microns of gallium and yttrium codope zinc oxide rotation pipe target, earthenware target and the patch of stainless steel penstock are detected with C-Scan
Conjunction rate is 96%.
Table 4：The testing result of the GZO-Y of example four binding rotation pipe targets
Embodiment 5
A kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target, its preparation method include following step
Suddenly：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 0.03 micron 99.99%, average grain
Footpath is 0.03 micron 99.99% of gallium oxide powder, and average grain diameter is 0.2 micron 99.99% of Zinc oxide powder.
Step 2, ammonium polyacrylate dispersant and deionized water pressed 0.6:99.4 ratio is well mixed；Then step is added
The Zinc oxide powder of 1 0.2 micron 99.99% of the average grain diameter prepared, the gallium oxide peace of 0.03 micron 99.99% of average grain diameter
The yttrium oxide powder of equal 0.03 micron 99.99% of particle diameter, wherein ZnO:Ga2O3:Y2O3Weight ratio is 98.4:1.5:0.1, slurry
The volume of Central Plains powder is than for 65%；Above-mentioned slurry is put into ball mill and carries out ball milling 12 hours with alumina balls, is prepared
Into low-viscosity high-fluidity slurry.
Step 3,1.0wt%MgO curing agent is added in the slurry, carry out mechanical agitation 10 minutes, be poured into plastic mould
In, stand 16 hours.
Step 4, the wet base demoulding by solidification, solidify 80 minutes at 60 DEG C, obtain dry green compact.
Step 5, green compact are warming up to 500 DEG C in air atmosphere push pedal sintering furnace, are incubated 70 minutes, then heat up
1550 DEG C, insulation sinters gallium and yttrium codope zinc oxide dense ceramic tube target for 6 hours into, machining to obtain required gallium
400 millimeters of zinc pipe target length is aoxidized with yttrium codope, with metallographic microscope, Archimedes density measuring instrument, four probe resistances
Crystallite dimension, density, the electric conductivity of measuring instrument are characterized.
Step 6, the earthenware target of 400 millimeters of more piece is tied in stainless steel penstock with indium metal, forms length
4000 millimeters of gallium and yttrium codope zinc oxide rotation pipe target, earthenware target and the patch of stainless steel penstock are detected with C-Scan
Conjunction rate is 95.5%.
Table 5：The testing result of the GZO-Y of example five binding rotation pipe targets
The invention provides a kind of large scale gallium and yttrium codope zinc oxide rotary ceramic pipe target and preparation method thereof.Will
Purity is more than 99.99%, the Ga of average grain diameter 0.03-1 microns2O3Powder, the Y of 99.99% average grain diameter 0.03-1 microns2O3
The Zinc oxide powder ball milling of powder and 99.99% average grain diameter 0.2-0.5 microns, passes through the near net in aqueous solvent by mixed powder
Size direct in-situ curing molding, few organic matter is not added or added, produce density height, uniformity is good, shape is unrestricted
The green compact of system, green strength height (Fig. 1).In-situ solidifying forming method in the present invention is exactly to be reacted using enzyme or autocatalysis,
Make to occur inside slurry chemical reaction to increase the acid base concentration in salt ionic concentration or regulation slurry in slurry to isoelectric point,
So as to realize the solidification of slurry.The preparation of suspension and the control of solidification process are the keys of forming technique.By green compact in push pedal
It is sintered in sintering furnace at 1300-1550 DEG C and is incubated 5-8 hours, is made that cost is low, and composition is uniform, crystal grain is small, and purity is high,
The gallium and yttrium codope zinc oxide target of all kinds of shapes of the density more than 98%.The method that the present invention uses has hardening time
Short, green strength is high, it is not easy to cracks, high yield rate, composition is uniform, the preparation especially suitable for high density target.Adopt
Earthenware target is tied in stainless steel penstock with indium metal and forms large scale magnetron sputtering rotation pipe target.
The preferred embodiment of the present invention described in detail above, still, the present invention are not limited in above-mentioned embodiment
Detail, in the range of the technology design of the present invention, a variety of equivalents can be carried out to technical scheme, this
A little equivalents belong to protection scope of the present invention.It is further to note that described in above-mentioned embodiment
Each particular technique feature, in the case of reconcilable, can be combined by any suitable means.In order to avoid not
Necessary repetition, the present invention no longer separately illustrate to various combinations of possible ways.In addition, a variety of implementations of the present invention
It can also be combined between mode, as long as it without prejudice to the thought of the present invention, it is public that it should equally be considered as institute of the invention
The content opened.
Claims (7)
1. a kind of large scale binding formula gallium and yttrium codope zinc oxide rotary ceramic pipe target, it is characterised in that each component presses hundred
The content of point ratio is respectively：
Zinc oxide 95-98.9%, gallium oxide 1-5%；Yittrium oxide：0.1-0.3%；
Its preparation method comprises the following steps：
Step 1, powder stock is got out, including the yttrium oxide powder that average grain diameter is 0.03-1 microns, average grain diameter 0.03-
1 micron of gallium oxide powder, average grain diameter are the Zinc oxide powder of 0.2-0.5 microns.
Step 2, by deionized water, ammonium polyacrylate dispersant part by weight by 0.6-1.0% fully dissolve composition it is prefabricated molten
Liquid, add Zinc oxide powder, gallium oxide powder, the former powder of yttrium oxide powder and carried out in ball mill with zirconium oxide or alumina balls
Ball milling 8-12 hours, dispersant adsorption are prepared into the slurry of low viscosity high solid loading high fluidity, slurry on the surface of slurry
The volume of Central Plains powder is than being adsorbed for 55%-70%, ammonium polyacrylate dispersant on the surface of slurry；
Step 3,0.1-1.0wt% curing agent MgO, Mg ions caused by curing agent MgO situs and absorption are added in the slurry
Chemical reaction occurs in the ammonium polyacrylate dispersant of pulp surface and produces magnesium polyacrylate, removes the dispersant of pulp surface,
Slurry unstability is caused slurry curing, by slurry cast into stainless steel mould, stand 12-16 hours；
Step 4, the wet base demoulding by solidification, solidify 15-300 minutes at normal temperatures, or 5-90 minutes are heated in 60 DEG C of baking ovens,
Obtain dry green compact；
Step 5, green compact are warming up to 400-600 DEG C in air atmosphere push pedal sintering furnace, are incubated 0.5-1 hours, then heat up
1300-1550 DEG C of insulation 5-8 hour sinters ceramic of compact into, machining to obtain gallium and yttrium codope zinc oxide tubular target
Material, target material composition is uniform, and average crystal grain is 12-50 microns, and purity is high, and density is more than 98%.Target length of tube is in 200-400 millis
Rice.
Step 6, earthenware target is tied in stainless steel penstock with indium metal, forms the gallium and yttrium codope of large scale rotation
Zinc pipe target is aoxidized, for magnetron sputtering plating, length reaches 4000 millimeters.
2. large scale binding formula gallium according to claim 1 and yttrium codope zinc oxide rotary ceramic pipe target, its feature
It is, the yttrium oxide powder is Y2O3Powder, the gallium oxide powder are Ga2O3Powder.
3. large scale binding formula gallium according to claim 1 and yttrium codope zinc oxide rotary ceramic pipe target, its feature
It is, near net-shape in-situ solidifying, the powder of the zinc oxide and gallium oxide is mixed-powder, and purity is more than 99.97%, can changed
Learn coprecipitation preparation or two kinds of powder pass through ball-milling medium ball milling mixing.
4. large scale binding formula gallium according to claim 1 and yttrium codope zinc oxide rotary ceramic pipe target, its feature
It is, the slurry is ball milling or is what high-speed stirred was formed.
5. large scale binding formula gallium according to claim 1 and yttrium codope zinc oxide rotary ceramic pipe target, its feature
It is, the curing agent is magnesia.
6. large scale binding formula gallium according to claim 3 and yttrium codope zinc oxide rotary ceramic pipe target, its feature
It is, the ball-milling medium is zirconium oxide or gallium oxide Ceramic Balls.
7. large scale binding formula gallium according to claim 1 and yttrium codope zinc oxide rotary ceramic pipe target, its feature
It is, the mould is plastics, glass or the metal material that no hole does not absorb water.
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| CN116751048A (en) * | 2023-06-05 | 2023-09-15 | 洛阳晶联光电材料有限责任公司 | Gallium-aluminum doped zinc oxide target material and preparation method and application thereof |
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| CN105382404A (en) * | 2015-12-24 | 2016-03-09 | 福建阿石创新材料股份有限公司 | Device and method for welding target through stirring friction |
| CN105624619A (en) * | 2016-03-14 | 2016-06-01 | 无锡舒玛天科新能源技术有限公司 | Preparation method of rotary sputtering aluminum rare-earth alloy target for touch screen of flat panel display and target prepared by using preparation method |
| CN106187151A (en) * | 2016-07-20 | 2016-12-07 | 浙江舒玛新材料有限公司 | A kind of aluminum doped yttrium zinc oxide ceramic target and preparation method thereof |
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| CN110436915A (en) * | 2019-08-05 | 2019-11-12 | 北京航大微纳科技有限公司 | A kind of FBAR piezoelectric layer Zinc oxide doped target material and preparation method thereof |
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Application publication date: 20180126 |