CN107626686A - A kind of cleaning device for being used to clean dry ecthing board lower electrode surface - Google Patents
A kind of cleaning device for being used to clean dry ecthing board lower electrode surface Download PDFInfo
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- CN107626686A CN107626686A CN201710910815.7A CN201710910815A CN107626686A CN 107626686 A CN107626686 A CN 107626686A CN 201710910815 A CN201710910815 A CN 201710910815A CN 107626686 A CN107626686 A CN 107626686A
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- cleaning device
- main body
- poroid
- holding rod
- absorption main
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Abstract
The present invention provides a kind of cleaning device for being used to clean dry ecthing board lower electrode surface, including holding rod and absorption main body, one end of the holding rod is fixedly connected with absorption main body, the holding rod is in be provided with a plurality of separate gas channel, the absorption body interior is provided with the pipeline being connected with the gas channel, the absorption main body is further opened with some through holes, and some through holes are connected by pipeline with the gas channel in holding rod.The cleaning device of the present invention cleans cleaner, raising operating efficiency when cleaning dry ecthing board lower surface, and dry ecthing equipment has extraordinary effect in the absorption cleaning for carrying out particulate matter caused by dry ecthing procedure.
Description
Technical field
The invention belongs to cleaning dust remover field, and in particular to a kind of to be used to clean dry ecthing board lower electrode surface
Cleaning device.
Background technology
Dry ecthing, i.e., specific gas such as helium are placed under low-pressure state and impose voltage, plasma-based is excited into, to specific
Film layer is chemically etched or Ions Bombardment, reaches a kind of etching mode for removing film layer.Dry ecthing equipment processing procedure chamber cavity of resorption
There is bottom electrode, for launching hf electric arc.Because product occurs when exception checks that cavity has product or maintenance, it is necessary to begin to speak to carry out
Electrode surface is cleaned, when especially striking off the product of electrode edge, electrode surface has particulate matter, dust drops.Current side
Method is：Common binding dust roller is taken to be rolled manually along short side in electrode surface and stick out particulate matter, dust, afterwards by focusing ring surrounding
With roller binding dust, bright light torch confirms whether electrode surface has visible particle thing, dust, after dust sticky paper's cleaning roller, continues
Rolling operation, until on roller, electrode surface particulate matter, dust it is invisible.
It is not easy to clean clean when being operated with roller due to electrode surface helium hole and pad hole, and easily cause rolling
Particulate matter, dust secondary pollution electrode surface on wheel, while time-consuming for manually operated roller, influences the activity duration；Roller binding dust
Effect is big by artifical influence factor, easily causes binding dust not to the utmost, helium flow abnormalities, secondary risk of beginning to speak.
The content of the invention
To solve, prior art is not easy to clean to lower electrode surface and the sordid problem of cleaning, the present invention provide a kind of use
In the cleaning device of cleaning dry ecthing board lower electrode surface.The cleaning device includes holding rod and absorption main body, described hand-held
One end of bar is fixedly connected with absorption main body；
A plurality of separate gas channel is provided with the holding rod；
The absorption body interior is provided with the pipeline being connected with the gas channel, if the absorption main body is further opened with
Dry through hole, some through holes are connected by pipeline with the gas channel in holding rod.
Preferably, the absorption main body is provided with least two first poroid portions and is arranged at least two first poroid portion
Between the second poroid portion, some through holes are opened at least two first poroid portions and the second poroid portion.
Preferably, at least two first poroid portion is symmetrical set and is uniformly distributed, and the second poroid portion is located at
Adsorb among main body and be right against one end of holding rod.
Preferably, relatively described second poroid portion of at least two first poroid portion is axisymmetricly distributed.
Preferably, the through hole in the described second poroid portion is uniformly distributed and generally around absorption main body one week.
Preferably, width of the described second poroid portion along absorption main body direction of both ends is 0.5-2cm.
Preferably, the density of the through hole is 2000-4000 holes/mm2。
Preferably, the described first poroid portion is shaped as circle, a diameter of 1-3cm.
It is furthermore preferred that circular a diameter of 2cm.
Preferably, the gas channel is tracheae, a diameter of 1-3cm of the tracheae.
Preferably, poroid portion is covered with one layer of binding dust material in non-through bore region in the absorption main body.
Preferably, the shape in the described first poroid portion is included in circle, square, length direction, rhombus, irregular figure
It is one or more kinds of.
Preferably, air pipe, the air pipe and holding rod are provided with one end away from absorption main body in the holding rod
In tracheae connection, i.e. the evacuation passageway of tracheae converged in air pipe.
Preferably, the quantity of the tracheae is 10-20 bars.
Preferably, the holding rod is provided with arrangements for speed regulation, and it is clear that the arrangements for speed regulation are used for control when cleaning device works
The speed of exhaust of clean device.
Preferably, poroid portion is covered with one layer of binding dust material in non-through bore region in the absorption main body.The binding dust material
It can be polyacrylate adhesive.
One end connection drive device of the holding rod away from absorption main body, the drive device are used to control cleaning device
Work.
Beneficial effects of the present invention：The present invention cleaning device cleaned when cleaning dry ecthing board lower surface it is cleaner,
Improve operating efficiency.
Brief description of the drawings
More clearly to illustrate the construction feature and effect of the present invention, it is entered with specific embodiment below in conjunction with the accompanying drawings
Row describes in detail.
Fig. 1 is the cleaning device schematic diagram that the present invention is used to clean dry ecthing board lower electrode surface.
Fig. 2 is the tracheae and air pipe schematic diagram in holding rod.
Fig. 3 is the partial enlarged drawing in the first poroid portion at 310 in Fig. 1.
Fig. 4 is the partial enlarged drawing in the second poroid portion at 320 in Fig. 1.
Fig. 5 is particulate matter in the absorbed schematic diagram of working condition.
Fig. 6 is the partial enlarged drawing that particulate matter rolls at C in Fig. 5.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is purged, be complete
Site preparation describes.The part of the embodiment that described embodiment is only invented, rather than whole embodiments.Based in the present invention
Embodiment, the other embodiment that those skilled in the art are obtained on the premise of creative work is not made, belong to
The scope of protection of the invention.
Fig. 1 and Fig. 2 are referred to, the embodiment of the present invention provides a kind of cleaning for being used to clean dry ecthing board lower electrode surface
Device 100.The cleaning device 100 includes holding rod 10 and absorption main body 20.One end of the holding rod 10 and absorption main body
20 intermediate verticals are fixedly connected.The holding rod 10 is in hollow setting, and is provided with a plurality of separate gas channel 101.
In the present embodiment, a plurality of hollow tracheae 11 is accommodated in 10 hollow inside of holding rod.It is independent that each tracheae 11 forms one
Gas channel 101.In other embodiments, the gas channel 101 is integrally formed in the holding rod 10.
Pipeline 14 is offered inside the absorption main body 20.The pipeline 14 and the phase of gas channel 101 in holding rod 10
Connection.In the present embodiment, pipeline 14 is tightly connected to ensure the negative pressure state inside pipeline 14 with gas channel 101.,
The absorption main body 20 has adsorption plane 201, electric for being attached at when cleaning device works under dry ecthing board
Pole surface.Adsorption plane 201 is provided with least two first poroid portions 31.As shown in figure 1, in the present embodiment, adsorption plane 201
Simultaneously it is provided with 8 the first poroid portions 31.This 8 the first poroid portions 31 are symmetrical set and are uniformly distributed on adsorption plane 201.
First poroid portion 31 offers the through hole 311A of some connecting pipes 14.Refering to Fig. 3 and Fig. 4, it may be preferable that through hole 311A is in this reality
Apply in example and be uniformly distributed.Because through hole 311A is uniformly distributed and the first poroid portion 31 is uniformly arranged on adsorption plane 201, so as to
Ensure cleaning device 100 by lower electrode surface when can be multi-faceted absorption particulate matter, to improve cleaning efficiency, avoid biography
The problem of system burnisher causes dedusting not to the utmost under artificial multi-pass operation.The particulate matter is dry ecthing equipment in dry ecthing
Caused molecule, atom, cation and the dust or other trickle materials that adsorb above-mentioned particle in technical process, this
The grain easy clusters of thing.
The absorption main body 20 is additionally provided with the second poroid portion 32.Second poroid portion 32 is among absorption main body 20 and just
For one end of holding rod 10.The first poroid portion 32 is axisymmetricly distributed with respect to the second poroid portion 32.Described second is poroid
Portion 32 offers some through hole 311B.The through hole 311B is uniformly distributed and generally around absorption main body 20 1 weeks.Due to absorption
The hollow pipeline 14 of main body 20 and the joint of holding rod 10 is with being absorbed behind the second poroid portion 32 through the multiple first poroid portions 31
The collection region for the particulate matter come in, it is more to collect comparison in the regions particulate thing, easily cause aggregation and block, so above-mentioned adsorbing
Particulate matter 13 can be prevented around the absorption main body through hole 311A of 20 1 weeks with the entrance of intensified negative pressure air-flow by being set among main body 20
It is gathered in the position and blocks gas channel 101, keeps gas channel 101 unobstructed, accelerate cleaning speed.
In addition, by having a plurality of gas channel 101 in the inner containment of holding rod 10, lead to when particulate matter 13 is pooled to air-flow
During the entrance in road 101, shunting can be haveed the function that by a plurality of gas channel 101, the dispersiveness of particulate matter 13 for making to collect
From each gas channel 101 by avoiding particulate matter and being agglomerated into bulky grain and block, so as to further speed up dedusting effect
Rate.
Furthermore because particulate matter is easily reunited, multi-through hole is set in poroid portion, the dispersiveness of particulate matter 13 can be made to be sucked into gas
In pipe, avoid causing aggregation to block.
Further embodiment, width of the poroid portion in centre along the absorption direction of both ends of main body 20 is 0.5-2cm.
Preferred embodiment, width of the poroid portion in centre along the absorption direction of both ends of main body 20 is 1cm.
Further embodiment, the density of the through hole is 2000-4000 holes/mm2.Setting of the through hole in this density
Under, it discrete particles thing, reduction particulate matter can effectively reunite, there is beneficial effect for the efficiency for improving absorbing particles thing
Fruit.
Further embodiment, the shape in the first poroid portion 31 include circle, square, length direction, rhombus, not advised
Then more than one or both of figure.The shape in the first poroid portion 31 can be a variety of, but need to be distributed in absorption master
The circumferential surface of body 20, can be with boundry particle outside uniform pickup, so that the efficiency for absorbing extraneous particulate matter is optimal.
Further embodiment, the first poroid portion 31 is shaped as circle, its a diameter of 1-3cm.
Preferred embodiment, the first poroid portion 31 is shaped as circle, a diameter of 2cm.
Further embodiment, referring to Fig. 4, air pipe is provided with one end away from absorption main body 20 in the holding rod 10
12, the air pipe 12 is connected with the tracheae 11 in holding rod 10, i.e. the gas channel of tracheae 11 is converged in air pipe 12.This
Sample sets the process costs that can save tracheae, and tracheae 11 is being used with the connection of roller 20, can the dispersiveness absorption external world
Particulate matter 13, accelerate the rolling of air-flow H and particulate matter 13, when particulate matter 13 is absorbed into the position in holding rod 10, tracheae
11 change air pipe 12 into influences less on the assimilation effect of particulate matter, and it is big for manufacture craft difficulty and cost to change air pipe into
Reduce greatly.
Further embodiment, the quantity of the tracheae 11 is 8-20 bars.
Further embodiment, the tracheae 11 are evenly distributed on the inwall of roller 20, a diameter of 1- of the tracheae 11
3cm。
Preferred embodiment, a diameter of 2cm of the tracheae 11.
Further embodiment, the holding rod 10 are provided with arrangements for speed regulation 40, and the arrangements for speed regulation 40 are used for sanitizer cartridge
Put the speed of exhaust that cleaning device is controlled during work.For the different dye dirt degree of dry ecthing board lower electrode surface, can adjust
Save clean rate, more energy efficient facility.
Further embodiment, it is described absorption main body 20 on poroid portion be covered with one layer of binding dust material in non-through bore region 312.
The binding dust material can be polyacrylate adhesive.Binding dust material can cling particulate matter or dust, reach more preferable
Cleaning effect.
Further embodiment, one end connection drive device 50 of the holding rod 10 away from absorption main body 20, the drive
Dynamic device is used to control cleaning device to work.The drive device 50 can be blower fan, rotary electric machine, to tracheae or big
Pipe forms negative pressure, causes air flow through tracheae or air pipe.
The course of work of cleaning device of the present invention refers to Fig. 5 and Fig. 6, and in working condition, the cleaning device is placed in
Need at the dry ecthing board lower electrode surface of dedusting, because the poroid portion on cleaning device absorption main body 20 surface is in negative pressure
State, the particulate matter 13 at lower electrode surface are sucked into gas channel 101, and particulate matter 13 is by gas channel 101 with air-flow H
Air pipe 12 is brought into, so as to which then deposition or the precipitation equipment by connecting air pipe 12 are collected in air pipe 12.
It can avoid cleaning unnet, raising operating efficiency during operation in dust removal process using the cleaning device of the present invention,
Human factor influence is eliminated, is had for dry ecthing equipment in the absorption cleaning for carrying out particulate matter caused by dry ecthing procedure
Extraordinary effect.
Described above is the preferred embodiments of the present invention, it is noted that is come for those skilled in the art
Say, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also for this
The protection domain of invention.
Claims (10)
1. a kind of cleaning device for being used to clean dry ecthing board lower electrode surface, including holding rod and absorption main body, the hand
The one end for holding bar is fixedly connected with absorption main body；It is characterized in that：
A plurality of separate gas channel is provided with the holding rod；
The absorption body interior is provided with the pipeline being connected with the gas channel, and the absorption main body is further opened with some logical
Hole, some through holes are connected by pipeline with the gas channel in holding rod.
2. cleaning device according to claim 1, it is characterised in that it is poroid that the absorption main body is provided with least two first
Portion and the second poroid portion being arranged between at least two first poroid portion, some through holes are opened in described at least two
First poroid portion and the second poroid portion.
3. cleaning device according to claim 2, it is characterised in that at least two first poroid portion is symmetrical set
And be uniformly distributed, the second poroid portion is located at absorption main body centre and is right against one end of holding rod.
4. cleaning device according to claim 2, it is characterised in that at least two first poroid portion relatively described
Two poroid portions are axisymmetricly distributed.
5. according to the cleaning device described in claim 2-4 any one, it is characterised in that the through hole in the second poroid portion is equal
Even distribution and generally around absorption main body one week.
6. cleaning device according to claim 5, it is characterised in that the second poroid portion edge absorption main body direction of both ends
Width be 0.5-2cm.
7. cleaning device according to claim 5, it is characterised in that the density of the through hole is 2000-4000 holes/mm2。
8. cleaning device according to claim 2, it is characterised in that the first poroid portion is shaped as circle, diameter
For 1-3cm.
9. cleaning device according to claim 1, it is characterised in that the gas channel is tracheae, the tracheae it is straight
Footpath is 1-3cm.
10. cleaning device according to claim 2, it is characterised in that poroid portion is in non-through porose area in the absorption main body
Domain is covered with one layer of binding dust material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710910815.7A CN107626686A (en) | 2017-09-29 | 2017-09-29 | A kind of cleaning device for being used to clean dry ecthing board lower electrode surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710910815.7A CN107626686A (en) | 2017-09-29 | 2017-09-29 | A kind of cleaning device for being used to clean dry ecthing board lower electrode surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107626686A true CN107626686A (en) | 2018-01-26 |
Family
ID=61103476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710910815.7A Pending CN107626686A (en) | 2017-09-29 | 2017-09-29 | A kind of cleaning device for being used to clean dry ecthing board lower electrode surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107626686A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2061097U (en) * | 1989-12-30 | 1990-08-29 | 长沙市北光生活用品厂 | Device for blowing, drying, dust-absortion and cleaning inside of electronic instrument |
| CN101380213A (en) * | 2007-09-07 | 2009-03-11 | 深圳富泰宏精密工业有限公司 | Suction head |
| CN205253660U (en) * | 2015-12-30 | 2016-05-25 | 芜湖东旭光电装备技术有限公司 | Suction head and dust catcher |
| CN205549852U (en) * | 2016-01-19 | 2016-09-07 | 苏州加雷斯机电科技有限公司 | A blowback dust cleaning system for cleaning system |
-
2017
- 2017-09-29 CN CN201710910815.7A patent/CN107626686A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2061097U (en) * | 1989-12-30 | 1990-08-29 | 长沙市北光生活用品厂 | Device for blowing, drying, dust-absortion and cleaning inside of electronic instrument |
| CN101380213A (en) * | 2007-09-07 | 2009-03-11 | 深圳富泰宏精密工业有限公司 | Suction head |
| CN205253660U (en) * | 2015-12-30 | 2016-05-25 | 芜湖东旭光电装备技术有限公司 | Suction head and dust catcher |
| CN205549852U (en) * | 2016-01-19 | 2016-09-07 | 苏州加雷斯机电科技有限公司 | A blowback dust cleaning system for cleaning system |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180126 |
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| RJ01 | Rejection of invention patent application after publication |