CN107621757A - A kind of intersection transmission function quick decomposition method based on indicator function - Google Patents
A kind of intersection transmission function quick decomposition method based on indicator function Download PDFInfo
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Abstract
The invention discloses a kind of intersection transmission function quick decomposition method based on indicator function, it includes：1) the light source function J (f, g) of imaging system is obtained；2) the region Ω for describing light source is divided to obtain one group of orthogonal subregion Ωij, and with the indicator function I on orthogonal subregionij(f, g) describes the light source function J (f, g)；3) the indicator function I is calculatedijThe inverse Fourier transform of (f, g), obtain the basic function L of space co-domainij(x, y), and by the light source interaural crosscorrelation function in spatial domainProject to one group of basic functionOn, obtain to light source interaural crosscorrelation functionDecomposition；4) the intersection transmission function established in spatial domainKernel function c；5) kernel function is calculatedWith mask plate figureConvolution, obtain image plane on exposing patternsThe present invention utilizes the indicator function I in orthogonal areaij(f, g) states light source function, and light source interaural crosscorrelation function is directly obtained using the projection coefficient of the orthogonality relation of indicator function, and light sourceDecomposition, be readily available intersection transmission functionKernel functionSo that light distribution calculating is quick and efficient.
Description
【Technical field】
Photoetching resolution in being emulated the invention belongs to semiconductor device technology strengthens technical field, more particularly to one kind
The intersection transmission function quick decomposition method based on indicator function established in Hopkins image-forming principles.
【Background technology】
Photoetching process is the Main Means of pattern transfer technology in semiconductor devices production process, have production efficiency it is high,
The advantages such as relative cost is low.Photoetching process is based on diffraction optics, and the light distribution of specific pattern, i.e. optics are obtained in imaging plane
Imaging.With the development of semiconductor technology, the size of semiconductor devices is less and less, when the close even less than photoetching of characteristic size
During optical wavelength used in technique, optical diffraction will cause formed exposure figure and used mask plate figure on silicon chip
Shape is compared to there is certain distortion, and as characteristic size further reduces, the difference of this figure will aggravate.This phenomenon causes photoetching
The transfer distortions of figure, the final yield rate for influenceing product.To suppress the negative effect that optical diffraction produces to semiconductor devices,
The quick calculating of image plane light distribution is used for the process simulation of photoetching technique.In order to adapt to the diversity of design, complexity,
Optical imagery based on model is more and more to be used.
Increasing with the scale of integrated circuit, the device integrated on single semiconductor chip is more and more, accordingly
The mask plate exposure figure that photoetching process needs becomes increasingly complex, and this requires that the calculating of optical patterning model must be quick height
Effect, so that whole optical near-correction process circulation time is reduced, production efficiency is improved, reduces production cost.
Etching system can be reduced to an imaging system, including lighting source, mask plate, projection objective and silicon chip
Four fundamentals of photoresist of imaging surface.There are document (A.K.-K.Wong, Resolution in the prior art
Enhancement techniques in optical lithography, vol.47.SPIE press, 2001.) disclose
A kind of photoetching resolution strengthens technology, its using Hopkins image-forming principles establish it is four-dimensional intersect transmission function (abbreviation TCC,
Transmission Cross Coefficient) characterize the optical parametric of imaging system (light source, numerical aperture, difference, mistake
Jiao etc.), for the imaging system of identical optical parameter, TCC only needs to calculate once, and can be recycled.Other existing skill
There are document (N.B.Cobb, Fast Optical and Process Proximity Correction Algorithms in art
For Integrated Circuit Manufacturing, Ph.D.dissertation, University of
California, Berkeley, 1998.) fast optical and technique near-correction algorithm of a kind of IC manufacturing are proposed,
Using Eigenvalues analysis method, extract TCC characteristic value and characteristic vector, by retain the characteristic value larger to Imaging and
Characteristic vector, then it can greatly reduce the number for calculating the Fourier transform needed for light distribution so as to realizing quick calculating.But root
It is theoretical according to Hopkins optical imageries, four-dimensional intersection transmission function TCC is established, it intersects transmission function TCC calculating and is related to quadruple
Integral operation, it is quite time-consuming.If respective optical parameter changes, if it has to recalculates TCC, it is calculated according to normal
Method calculates the efficiency that TCC will have a strong impact on light distribution calculating, so as to influence the design efficiency of photoetching process.
Therefore, it is necessary to a kind of new intersection transmission function quick decomposition method based on indicator function is provided to solve
State problem.
【The content of the invention】
It is a primary object of the present invention to provide a kind of intersection transmission based on indicator function based on Hopkins image-forming principles
Function quick decomposition method, the method that quickly can accurately obtain kernel function so that light distribution calculating is quick and efficient, so as to
Meet actual photoetching process design requirement.
The present invention is achieved through the following technical solutions above-mentioned purpose：A kind of intersection transmission function based on indicator function is quick
Decomposition method, it comprises the following steps,
Step S101：Obtain the light source function J (f, g) of imaging system；
Step S102：The region Ω for describing light source is divided to obtain one group of orthogonal subregion Ωij, and with orthogonal sub-district
Indicator function I on domainij(f, g) describes the light source function J (f, g)；
Step S103：Calculate the indicator function IijThe inverse Fourier transform of (f, g), obtain the basic function of space co-domain
Lij(x, y), and by the light source interaural crosscorrelation function in spatial domainProject to one group of basic functionOn,
Obtain to light source interaural crosscorrelation functionDecomposition；
Step S104：The intersection transmission function established in spatial domainKernel function
Step S105：Calculate kernel functionWith mask plate figureConvolution, obtain image plane on exposure diagram
Case
Further, the region of light source is Ω={ (f, g) described in the step S102:|f|≤1,|g|≤1}.
Further, be to the methods that are divided of region Ω for describing light source in the step S102 by f, g according toEquidistant division obtains orthogonal subregion and is
Further, the orthogonal subregion Ω selected in the step S102ijOn indicator function Iij(f, g) meets
Further, in the step S102 by the light source function J (f, g) with the indicator function IijThe line of (f, g)
Property combination be described as
Wherein γijIt is light source function J (f, g) in indicator function Iij(f, g) describes region ΩijCorresponding functional value.
Further, indicator function I described in the step S103ijThe base letter obtained after the inverse Fourier transform of (f, g)
Number Lij(x, y) is
Further, the light source interaural crosscorrelation function obtained in the step S103Be decomposed into
Further, the kernel function in the step S104WhereinFor the space domain representation of pupil function.
Compared with prior art, a kind of intersection transmission function quick decomposition method based on indicator function of the present invention is beneficial
Effect is：Utilize the indicator function I in orthogonal areaij(f, g) statement light source function J (f, g), utilizes the orthogonal of indicator function
The projection coefficient of relation and light source directly obtains light source interaural crosscorrelation functionDecomposition, easier obtained so as to very fast
Intersect transmission functionKernel functionSo that light distribution calculating is quick and efficient, it is actual so as to meet
Photoetching process design requirement.
【Brief description of the drawings】
Fig. 1 is the calculation process schematic diagram of the embodiment of the present invention；
Fig. 2 is the calculation process schematic diagram of light distribution of the embodiment of the present invention；
Fig. 3 is the quadrupole sector light source schematic diagram of light source function J (f, g) in the embodiment of the present invention；
Fig. 4 is that light source function J (f, g) passes through one group of indicator function I in the embodiment of the present inventionijThe schematic diagram of (f, g) description；
Fig. 5 is light source interaural crosscorrelation function in the embodiment of the present inventionSignal of the decomposition method in spatial sampling
Figure；
Fig. 6,7 be the embodiment of the present invention in mask pattern light distribution schematic diagram；
Fig. 8 is the actual light intensity distribution schematic diagram on the imaging plane of a variety of mask patterns in the embodiment of the present invention.
【Embodiment】
Embodiment：
It is as follows based on the imaging theory of Hopkins diffraction optics, imaging intensity distribution function formula：
Wherein, i is imaginary unit, and M (f, g)=F [m (x, y)] is the two-dimension fourier transform of mask plate spatial distribution
(FFT, Fast Fourier Transform), TCC are corresponding four-dimensional intersection transmission function, and it is defined as：
TCC(f1,g1；f2,g2)=∫ ∫ J (f, g) P (f+f1,g+g1)·P*(f+f2,g+g2)dfdg (2)
Wherein, J (f, g) is light source function, and P (f, g) is the pupil function of imaging system, P*(f, g) is the P of pupil function
The complex conjugate of (f, g), state the optical parametric of optical imaging system.According to Cobb decomposition algorithm, then TCC singular value be present
Decompose as follows：
Wherein, Keri(f, g) is TCC kernel function, then the light distribution that can quickly calculate imaging system is as follows：
Fig. 1 is refer to, the present embodiment is that the intersection based on indicator function established based on Hopkins image-forming principles transmits letter
Number quick decomposition method, i.e., carry out fast decoupled calculating, it comprises the following steps to formula (2)：
Step S101：Obtain the optical parametric of imaging system, specially light source function J (f, g).System is imaged in the present embodiment
Optical parametric in system includes：Quadrupole sector light source σin=0.4, σout=0.8, λ=248nm, NA=0.53, its quadrupole are fan-shaped
Light source J (f, g) schematic diagram is as shown in Figure 3.
Step S102：The region Ω for describing light source is divided to obtain one group of orthogonal subregion Ωij, and with orthogonal sub-district
Indicator function I on domainij(f, g) description light source function J (f, g).
Specifically, comprise the following steps：
1) in normalized frequency spatially fmax=gmax=1, the region for describing light source is
Ω={ (f, g):|f|≤1,|g|≤1}
2) f, g are equidistantly dividedObtain orthogonal subregion ΩijFor
3) orthogonal subregion Ω is selectedijOn an indicator function Iij(f, g), indicator function Iij(f, g) meets
Apparent Iij(f, g) is one group of orthogonal function.
4) by light source function J (f, g) indicator function IijThe linear combination of (f, g) describes to obtain：
Wherein γijIt is light source function J (f, g) in indicator function Iij(f, g) describes region ΩijCorresponding functional value.
Light source function J (f, g) indicator function IijIt is as shown in Figure 4 that the linear combination of (f, g) describes reference chart.
Step S103：Calculate indicator function IijThe inverse Fourier transform of (f, g), obtain the basic function L of space co-domainij(x,
Y), and by the light source interaural crosscorrelation function in spatial domainProject to one group of basic functionOn, realize light
The decomposition of source interaural crosscorrelation function.Using the kernel function after decomposition, real light source interaural crosscorrelation function, the function such as Fig. 5 institutes are described
Show.
Specifically, comprise the following steps：
1) indicator function I is calculatedijThe inverse Fourier transform of (f, g)：
2) by the light source interaural crosscorrelation function in spatial domainProject to one group of basic functionUpper
Arrive
Wherein, αpq,mnFor corresponding basic functionProjection coefficient, can be calculated by following formula：
Wherein N is basic functionMould, due to indicator function IijThe property of orthogonality and I of (f, g)ij(f,
g)×Iij(f, g)=Iij(f, g), then αpq,mn≠ 0 and if only if that pq=mn=ij is
αij,ij=γij/n2 (9)
So as to which formula (7) can further simplify, the decomposition for obtaining light source interaural crosscorrelation function is as follows：
Step S104：The intersection transmission function established in spatial domainKernel function
Specifically, the four-dimensional transmission function TCC that intersects described in formula (2) is obtained in spatial domain by Fourier transform
Corresponding intersection transmission functionIts expression formula is as follows：
Wherein,Reached for the vector table in spatial domain,For pupil function P (f, g) inverse Fourier transform.
Step S103 formula (10) is to light source interaural crosscorrelation functionDecomposition, then can obtain intersection transmission functionKernel functionSo as to realize that the fast decoupled for intersecting transmission function is as follows：
Wherein
Step S105：Calculate kernel functionWith mask plate figureConvolution, obtain image plane on exposure diagram
CaseSpecifically,
According to the kernel function obtained by step S104, the relation of consideration convolution algorithm and Fourier transformation, according to formula (4) just
It can obtain the imaging light distribution of imaging system：
Fig. 2 is refer to, step S105 specifically includes following steps：
Step S201：Input in the spatial domain of imaging system and intersect the kernel function ker of transmission functionij(x, y) and mask figure
The spatial distribution m (x, y) of shape；
Step S202：Using FFT methods, calculate to intersect on frequency domain and transmit kernel function Kerij(f, g)=F [kerij(x,y)]
And performance M (f, g)=F [m (x, y)] of the mask pattern on frequency domain；
Step S203：Calculate light distribution I (x, y)=∑ of imaging planeij|F-1[Kerij(f,g)·M(f,g)]|2。
The content of the invention of the present embodiment is mainly to intersect the rapid build of transmission function, for changing band for technological parameter
The quick calculating of the mask pattern change come, to meet photoetching process design requirement.Fig. 1 is refer to, it is quick according to the present embodiment
The kernel function for the intersection transmission function being calculatedThe light of imaging plane can be quickly calculated by Fourier transform again
Strong distribution.The spatial distribution m (x, y) of mask pattern is spatial sampling, and the mask pattern of part is as shown in Figure 6.In step S105,
According to formula (4), the light distribution of imaging plane is calculated, as shown in Figure 7.Fig. 8 illustrates the fast decoupled side based on the present invention
Method, to the light distribution on the imaging plane of the mask plate of an a variety of mask patterns.It was found from from Fig. 6, Fig. 7, Fig. 8, this reality
The light distribution of mask pattern can quickly be calculated by applying the fast algorithm of example proposition.
A kind of beneficial effect of the quick decomposition method of intersection transmission function of the present embodiment based on Hopkins image-forming principles
It is：Utilize the indicator function I in orthogonal areaij(f, g) states light source function J (f, g), utilizes the orthogonal pass of indicator function
The projection coefficient of system and light source directly obtains light source interaural crosscorrelation functionDecomposition, so as to comparatively fast easier being handed over
Pitch transmission functionKernel functionSo that light distribution calculating is quick and efficient, so as to meet actual light
Carving technology design requirement.
Above-described is only some embodiments of the present invention.For the person of ordinary skill of the art, not
On the premise of departing from the invention design, various modifications and improvements can be made, these belong to the protection model of the present invention
Enclose.
Claims (8)
- A kind of 1. intersection transmission function quick decomposition method based on indicator function, it is characterised in that：It comprises the following steps,Step S101：Obtain the light source function J (f, g) of imaging system；Step S102：The region Ω for describing light source is divided to obtain one group of orthogonal subregion Ωij, and with orthogonal subregion Indicator function Iij(f, g) describes the light source function J (f, g)；Step S103：Calculate the indicator function IijThe inverse Fourier transform of (f, g), obtain the basic function L of space co-domainij(x, Y), and by the light source interaural crosscorrelation function in spatial domainProject to one group of basic functionOn, acquisition pair Light source interaural crosscorrelation functionDecomposition；Step S104：The intersection transmission function established in spatial domainKernel functionStep S105：Calculate kernel functionWith mask plate figureConvolution, obtain image plane on exposing patterns
- 2. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 1, it is characterised in that：It is described The region of light source is Ω={ (f, g) described in step S102:|f|≤1,|g|≤1}.
- 3. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 2, it is characterised in that：It is described Be to the methods that are divided of region Ω for describing light source in step S102 by f, g according to Equidistant division obtains orthogonal subregion and is<mrow> <msub> <mi>&Omega;</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <mo>=</mo> <mo>{</mo> <mrow> <mo>(</mo> <mi>f</mi> <mo>,</mo> <mi>g</mi> <mo>)</mo> </mrow> <mo>:</mo> <msub> <mi>f</mi> <mi>i</mi> </msub> <mo>-</mo> <mfrac> <mn>1</mn> <mrow> <mn>2</mn> <mi>n</mi> </mrow> </mfrac> <mo><</mo> <mi>f</mi> <mo>&le;</mo> <msub> <mi>f</mi> <mi>i</mi> </msub> <mo>+</mo> <mfrac> <mn>1</mn> <mrow> <mn>2</mn> <mi>n</mi> </mrow> </mfrac> <mo>,</mo> <msub> <mi>g</mi> <mi>j</mi> </msub> <mo>-</mo> <mfrac> <mn>1</mn> <mrow> <mn>2</mn> <mi>n</mi> </mrow> </mfrac> <mo><</mo> <mi>g</mi> <mo>&le;</mo> <msub> <mi>g</mi> <mi>j</mi> </msub> <mo>+</mo> <mfrac> <mn>1</mn> <mrow> <mn>2</mn> <mi>n</mi> </mrow> </mfrac> <mo>}</mo> <mo>.</mo> </mrow>
- 4. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 3, it is characterised in that：It is described The orthogonal subregion Ω selected in step S102ijOn indicator function Iij(f, g) meets<mrow> <msub> <mi>I</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <mrow> <mo>(</mo> <mi>f</mi> <mo>,</mo> <mi>g</mi> <mo>)</mo> </mrow> <mo>=</mo> <mfenced open = "{" close = ""> <mtable> <mtr> <mtd> <mn>1</mn> </mtd> <mtd> <mrow> <mo>(</mo> <mi>f</mi> <mo>,</mo> <mi>g</mi> <mo>)</mo> <mo>&Element;</mo> <msub> <mi>&Omega;</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mi>E</mi> <mi>l</mi> <mi>s</mi> <mi>e</mi> </mrow> </mtd> </mtr> </mtable> </mfenced> <mo>.</mo> </mrow>
- 5. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 4, it is characterised in that：It is described By the light source function J (f, g) with the indicator function I in step S102ijThe linear combination of (f, g) is described as<mrow> <mi>J</mi> <mrow> <mo>(</mo> <mi>f</mi> <mo>,</mo> <mi>g</mi> <mo>)</mo> </mrow> <mo>=</mo> <munder> <mo>&Sigma;</mo> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </munder> <msub> <mi>&gamma;</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <msub> <mi>I</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <mrow> <mo>(</mo> <mi>f</mi> <mo>,</mo> <mi>g</mi> <mo>)</mo> </mrow> </mrow>Wherein γijIt is light source function J (f, g) in indicator function Iij(f, g) describes region ΩijCorresponding functional value.
- 6. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 5, it is characterised in that：It is described Indicator function I described in step S103ijThe basic function L obtained after the inverse Fourier transform of (f, g)ij(x, y) is<mrow> <mtable> <mtr> <mtd> <mrow> <msub> <mi>L</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> <mo>=</mo> <mo>&Integral;</mo> <msub> <mo>&Integral;</mo> <msub> <mi>&Omega;</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> </msub> <msub> <mi>I</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <mrow> <mo>(</mo> <mi>f</mi> <mo>,</mo> <mi>g</mi> <mo>)</mo> </mrow> <msup> <mi>e</mi> <mrow> <mi>i</mi> <mn>2</mn> <mi>&pi;</mi> <mrow> <mo>(</mo> <mi>f</mi> <mi>x</mi> <mo>+</mo> <mi>g</mi> <mi>y</mi> <mo>)</mo> </mrow> </mrow> </msup> <mi>d</mi> <mi>f</mi> <mi>d</mi> <mi>g</mi> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <mo>=</mo> <msup> <mi>e</mi> <mrow> <mi>i</mi> <mn>2</mn> <mi>&pi;</mi> <mrow> <mo>(</mo> <msub> <mi>f</mi> <mi>i</mi> </msub> <mi>x</mi> <mo>+</mo> <msub> <mi>g</mi> <mi>j</mi> </msub> <mi>y</mi> <mo>)</mo> </mrow> </mrow> </msup> <mi>sin</mi> <mi>c</mi> <mrow> <mo>(</mo> <mfrac> <mrow> <mi>&pi;</mi> <mi>x</mi> </mrow> <mi>n</mi> </mfrac> <mo>)</mo> </mrow> <mi>sin</mi> <mi>c</mi> <mrow> <mo>(</mo> <mfrac> <mrow> <mi>&pi;</mi> <mi>y</mi> </mrow> <mi>n</mi> </mfrac> <mo>)</mo> </mrow> <mfrac> <mn>1</mn> <msup> <mi>n</mi> <mn>2</mn> </msup> </mfrac> </mrow> </mtd> </mtr> </mtable> <mo>.</mo> </mrow>
- 7. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 6, it is characterised in that：It is described The light source interaural crosscorrelation function obtained in step S103Be decomposed into<mrow> <mi>j</mi> <mrow> <mo>(</mo> <msub> <mover> <mi>r</mi> <mo>&RightArrow;</mo> </mover> <mn>1</mn> </msub> <mo>-</mo> <msub> <mover> <mi>r</mi> <mo>&RightArrow;</mo> </mover> <mn>2</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <munder> <mo>&Sigma;</mo> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </munder> <mfrac> <msub> <mi>&gamma;</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <msup> <mi>n</mi> <mn>2</mn> </msup> </mfrac> <msub> <mi>L</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> </msub> <mrow> <mo>(</mo> <msub> <mover> <mi>r</mi> <mo>&RightArrow;</mo> </mover> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>&CenterDot;</mo> <msubsup> <mi>L</mi> <mrow> <mi>i</mi> <mi>j</mi> </mrow> <mo>*</mo> </msubsup> <mrow> <mo>(</mo> <msub> <mover> <mi>r</mi> <mo>&RightArrow;</mo> </mover> <mn>2</mn> </msub> <mo>)</mo> </mrow> <mo>.</mo> </mrow>
- 8. the intersection transmission function quick decomposition method based on indicator function as claimed in claim 6, it is characterised in that：It is described The kernel function in step S104WhereinFor the sky of pupil function Between domain representation.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109164683A (en) * | 2018-09-30 | 2019-01-08 | 墨研计算科学（南京）有限公司 | Light distribution fast determination method and device based on mask graph processing |
| CN109212913A (en) * | 2018-09-30 | 2019-01-15 | 墨研计算科学（南京）有限公司 | Light distribution acquisition methods and device based on non-homogeneous calculating |
| CN109270802A (en) * | 2018-09-30 | 2019-01-25 | 墨研计算科学（南京）有限公司 | A kind of fast acquiring method and device of crystal column surface light distribution |
| CN113779928A (en) * | 2021-09-03 | 2021-12-10 | 珠海市睿晶聚源科技有限公司 | Calculation method and system for rapid simulation photoetching process |
-
2017
- 2017-09-13 CN CN201710820278.7A patent/CN107621757A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109164683A (en) * | 2018-09-30 | 2019-01-08 | 墨研计算科学（南京）有限公司 | Light distribution fast determination method and device based on mask graph processing |
| CN109212913A (en) * | 2018-09-30 | 2019-01-15 | 墨研计算科学（南京）有限公司 | Light distribution acquisition methods and device based on non-homogeneous calculating |
| CN109270802A (en) * | 2018-09-30 | 2019-01-25 | 墨研计算科学（南京）有限公司 | A kind of fast acquiring method and device of crystal column surface light distribution |
| CN113779928A (en) * | 2021-09-03 | 2021-12-10 | 珠海市睿晶聚源科技有限公司 | Calculation method and system for rapid simulation photoetching process |
| CN113779928B (en) * | 2021-09-03 | 2022-07-08 | 珠海市睿晶聚源科技有限公司 | Calculation method and system for rapid simulation photoetching process |
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