CN107607197A - Spectrometer and preparation method thereof - Google Patents
Spectrometer and preparation method thereof Download PDFInfo
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- CN107607197A CN107607197A CN201610546301.3A CN201610546301A CN107607197A CN 107607197 A CN107607197 A CN 107607197A CN 201610546301 A CN201610546301 A CN 201610546301A CN 107607197 A CN107607197 A CN 107607197A
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Abstract
The invention discloses a kind of spectrometer, including an input unit, a diffraction grating, a CIS and a waveguide assembly.Input unit is receiving an optical signal.Diffraction grating by optical signal being separated into multiple spectral components.CIS is configured on the bang path of these at least part of spectral components.Waveguide assembly includes one first reflecting surface and one second reflecting surface.A waveguide space is formed between first reflecting surface and the second reflecting surface, optical signal is transferred to diffraction grating from input unit via waveguide space.These at least part of spectral components are transferred to CIS from waveguide space.Formed with least one opening on waveguide assembly, it is open substantially parallel at least one of the first reflecting surface and the second reflecting surface.A kind of preparation method of spectrometer is also suggested.
Description
Technical field
The present invention relates to a kind of Optical devices and preparation method thereof, more particularly to a kind of spectrometer and preparation method thereof.
Background technology
Spectrometer is a kind of nondestructive detecting instrument, its composition composition that for example can be applied to recognize material and spy
Property.After light is got on material, using composition structure in light reflection or the principle penetrated, and material to the different frequencies of light
The reflection of section, the difference for absorbing or penetrating, after spectrometer receives the light reflected from this material or the light for penetrating this material,
The spectrum of correspondence can be presented.Because different material can show the spectrum of Individual features, composition that is such and then being able to recognize material
Composition and characteristic.
In order to reduce light losing, spectrometer generally comprises waveguide assembly and internally advanced to guide light in passage, with
The CIS of spectrometer is allowed to sense spectrum caused by diffraction grating.Traditional design method, all it is by image
Sensor is close to waveguide assembly, so can most reduce light losing.However, inventor has found, CIS is close to
The reduction of spectrum resolution degree can be caused due to smearing by the design of waveguide assembly, or even cause measured spectroscopic data
(such as intensity and wavelength) is incorrect.
This case is so-called " smearing ", is produced because of " astigmatism (Astigmatism) " caused by grating.This is existing
As in diffraction grating handbook (Diffraction Grating Handbook) sixth version (author Newport
Corporation Christopher Palmer, the author of the first edition is Erwin Loewen) the first paragraph of page 90 and
The 3rd section of page Fig. 7-3 and the 111st of page 94 and Fig. 8-the 1b of page 112 and its explanation mention.Specifically, when the concave grating of use
Belong to " cylinder " grating, it can only make sagittal plane (Tangential plane, as meridian plane, being essentially horizontal plane) glazing
The focusing of beam, light beam can not focus on vertical plane (Sagittal plane, i.e. sagittal surface).Add, when light oblique incidence in
" bent moon " shape can be presented in grating, the meridian image projected from waveguide (Tangential focus).This meniscus shaped image
Phenomenon, be above-mentioned " smearing ".Because meniscus shaped image is not a point-like focus, therefore spectrum resolution can be caused
The reduction of degree.Further, since meniscus shaped image can be by other pixels around the pixel of the CIS corresponding to its wavelength
Sense, so it is incorrect to also result in measured spectroscopic data (such as intensity and wavelength).
The content of the invention
The present invention provides a kind of spectrometer, and it can improve the low-res caused by astigmatism caused by diffraction grating.
The present invention provides a kind of preparation method of spectrometer, and it can make above-mentioned spectrometer.
One embodiment of the invention proposes a kind of spectrometer, including an input unit, a diffraction grating, a CIS and
One waveguide assembly.Input unit is receiving an optical signal.Diffraction grating is configured at the transmission of the optical signal from input unit
On path, and optical signal is separated into multiple spectral components.CIS is configured at these at least part of spectrum
On the bang path of component.Waveguide assembly includes one first reflecting surface and one second reflecting surface.First reflecting surface and the second reflection
A waveguide space is formed between face, optical signal is transferred to diffraction grating from input unit via waveguide space.It is at least part of this
A little spectral components are transferred to CIS via waveguide space.It is real formed with least one opening, above-mentioned opening on waveguide assembly
Parallel at least one of the first reflecting surface and the second reflecting surface in matter, and the spectral components and optics in these sagitta of arc directions
At least one of signal has part to be dissipated into from opening outside waveguide space without injecting CIS.
One embodiment of the invention proposes a kind of preparation method of spectrometer, including：A light is determined using a simulation program
One input unit of spectrometer, a diffraction grating, the multiple parameters of a CIS and a waveguide assembly；And according to these parameters
Configure input unit, diffraction grating, waveguide assembly and CIS.Input unit to receive an optical signal, match somebody with somebody by diffraction grating
It is placed on the bang path of the optical signal from input unit, and optical signal is separated into multiple spectral components.Image
Sensor configurations are on the bang path of these at least part of spectral components.Waveguide assembly includes one first reflecting surface and one the
Two reflectings surface, form a waveguide space between the first reflecting surface and the second reflecting surface, optical signal is empty via waveguide from input unit
Between be transferred to diffraction grating.These at least part of spectral components are transferred to CIS via waveguide space.Waveguide assembly
On formed with least one opening, above-mentioned opening substantially parallel at least one of the first reflecting surface and the second reflecting surface,
At least one of these spectral components and optical signal have part to be dissipated into from opening outside waveguide space without injecting shadow
As sensor.Wherein, these parameters that simulation program is determined include above-mentioned opening the width on the direction that light wave conducts.
In spectrometer of embodiments of the invention and preparation method thereof, due to being opened on waveguide assembly formed with least one
Mouthful so that the part with the big angle of divergence is dissipated into image sense from opening at least one of spectral components and optical signal
Outside of device is surveyed, therefore the part of smearing can be caused less likely to be transferred to image sense from opening is past in spectral components
Survey the directional divergence of device.Consequently, it is possible to can be so that the spectrum that is sensed of spectrometer be more correct and spectrum resolution degree is higher.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow the above and other objects, features and advantages of the present invention can
Become apparent, below especially exemplified by embodiment, and coordinate accompanying drawing, describe in detail as follows.
Brief description of the drawings
Top view of Fig. 1 displays according to the spectrometer of embodiments of the present invention.
Stereogram of Fig. 2A displays according to the spectrometer of the embodiment of the present invention.
Fig. 2 B are the top view of the waveguide assembly and CIS in Fig. 2A.
Fig. 2 C and 2D show entering light and going out the profile of light state for the spectrometer according to the embodiment of the present invention respectively.
Fig. 3 A to Fig. 3 C are shown in the distribution of the diffraction image of the simulation in the sensing face on sensor.
Fig. 4 A to Fig. 4 D illustrate other four kinds changes of Fig. 2 B opening.
Fig. 5 is the profile for entering light state of the spectrometer of another embodiment of the present invention.
Fig. 6 is the flow chart of one of the present invention preparation method of the spectrometer of embodiment.
Embodiment
Top view of Fig. 1 displays according to the spectrometer of embodiments of the present invention, and Fig. 2A displays are real according to one of present invention
Apply the stereogram of the spectrometer 1 of example.Fig. 1 and Fig. 2A are refer to, spectrometer 1 includes an input unit 20, a diffraction grating 30, a shadow
As the waveguide assembly 50 of sensor 40 and one.
In the present embodiment, input unit 20, diffraction grating 30, CIS 40 and waveguide assembly 50 are all configured at one
In body 10, and input unit 20, diffraction grating 30 and CIS 40 are configured on Rowland circle RC, as shown in Figure 1.Body 10
The housing (housing) of spectrometer 1 in this way, or for install input unit 20, diffraction grating 30, CIS 40 and
The support body (frame) of waveguide assembly 50.
Diffraction grating 30 has two ends F and H, and the Wavelength distribution plane of diffraction grating 30 is defined as meridian plane
(tangential plane)MP.Input unit 20 positioned at point A and the system of CIS 40 positioned at point B are generally aligned in the same plane MP
On.The face of cylinder of shape one (cylindrical surface) of the concave surface of diffraction grating 30, and indentation (grooves) is then distributed in
Foregoing concave surface.For Rowland circle RC diameter, the radius of curvature of the concave surface of diffraction grating 30 is also equal to.Point O and point N also is located at Rowland circle
On RC, and it is the horizontal divergence angle of incident beam.
Input unit 20 generally comprises a slit (slit), and is installed in body 10.Input unit 20 is interrogated to receive an optics
Number S1.It is S2 that optical signal S1 is marked after the slit by input unit 20, and optical signal S2 is along one first
Light path OP1 advances.Optical signal S1 is for example from optical fiber, external environment condition, is reflected by determinand or penetrate determinand
Light.
Diffraction grating 30 with height hh is installed in body 10, and is configured at the optical signal S2's from input unit 20
On bang path.Optical signal S2 is separated into multiple spectral components S3 by diffraction grating 30 to receive optical signal S2.Shadow
It is configured at as sensor 40 at least part of these spectral components S3 bang path.In the present embodiment, these spectrum point
Amount S3 includes an at least special spectrum component, and is advanced respectively along a plurality of second light path OP2.In the present embodiment, diffraction light
Grid 30 are a reflective concave grating, and above-mentioned at least part of these spectral components S3 is focused on to the sense of CIS 40
Survey face 40S (as depicted in Fig. 2 B).
The spectral components S3 that CIS 40 is detected in these the present embodiment is, for example, the diffraction for belonging to minus three rank
Light, but the present invention is not limited.In other embodiments, the spectral components that CIS 40 is detected can also be category
In the diffraction light of other ranks.
Please arrange in pairs or groups reference picture 2B to Fig. 2 D again, and waveguide assembly 50 is installed in body 10, and with two facing with each other the
One reflecting surface 52 and the second reflecting surface 57.First light path OP1 and the second light path OP2 can be limited to the first reflection by waveguide assembly 50
Between the reflecting surface 57 of face 52 and second, with directing optical signal S2 and spectral components S3.First reflecting surface 52 and the second reflecting surface
A waveguide space S is formed between 57, optical signal S2 is transferred to diffraction grating 30 from input unit 20 via waveguide space S.At least
One special spectrum component S3 is transferred to CIS 40 via waveguide space S.In the present embodiment, an at least special spectrum point
Amount S3 is transferred to a waveguide space S end E1 via waveguide space S, and is emitted from end E1.
CIS 40 is installed in body 10, and to receive spectral components S3.CIS 40 includes at least one
Sensing 44, sensing 44 have sensing face 40S.The sensing 44 of CIS 40 can be configured at these spectral components S3's
On at least one of focal position, and spectral components S3 (i.e. special spectrum component) is sensed, so that sensing 44 will can connect
The special spectrum component received passes to computer or processor is handled.In addition, CIS 40 is configurable as a circuit
On plate 60, and it is electrically connected with circuit board 60.
In the present embodiment, formed with least one opening 501 on waveguide assembly 50, opening 501 is substantially parallel to first
At least one of the reflecting surface 57 of reflecting surface 52 and second, and these spectral components S3 and optical signal S2 at least within it
One (being, for example, spectral components S3 in the present embodiment) has part to be dissipated into from opening 501 between Waveguide outside S without injecting shadow
As sensor 40.In the present embodiment, it (is with two extensions in fig. 2b that waveguide assembly 50, which further includes an at least extension 54,
Exemplified by 54).Extension 54 extends from waveguide space S end E1 toward CIS 40, is located at end E1 and shadow to define
As the opening 501 between sensor 40.In the present embodiment, extension 54 extends to CIS 40, and against image sense
Device 40 is surveyed, and opening 501 is a breach, and 501 width Gs on the direction of light wave conduction that are open are end in the present embodiment
The distance kept between E1 and CIS 40.When opening 501 is between diffraction grating 30 and CIS 40, on
It is the direction that spectral components S3 light wave conducts in waveguide space S to state " direction of light wave conduction ", and is defined as diffraction light
The direction at the center of grid 30 to the center of CIS 40；When opening 501 is between input unit 20 and diffraction grating 50,
It is above-mentioned that " direction of light wave conduction is conduction orientation of the optical signal S2 light wave in waveguide space S, and is defined as input unit
The direction at 20 center to the center of diffraction grating 50.In another embodiment, extension 54 can also against with image sensing
The connected element of device 40, so as to form opening 501 between end E1 and CIS 40, wherein this element can be and image
Sensor 40 connected pedestal, pad, body 10 or circuit board 60.
In the present embodiment, waveguide assembly 50 includes one first speculum 51 and one second speculum 56.First speculum
51 include waveguide section 55 and extension 54, and wherein extension 54 connects waveguide section 55.Waveguide section 55 has light extraction end E55, and goes out
Light end E55 extends towards sensing face 40S, and defines waveguide space S end E1.First speculum 51 has the first reflecting surface
52, and the second speculum 56 has the second reflecting surface 57, wherein the first reflecting surface 52 faces each other with the second reflecting surface 57
(face to face)。
Fig. 2 C and 2D show entering light and going out the profile of light state for the spectrometer according to the embodiment of the present invention respectively.It please join
See Fig. 2 C to Fig. 2 D, when the number of sensing 44 is multiple, these sensings 44 can be along the side of the paper perpendicular to Fig. 2 D
To (i.e. along Fig. 2 B horizontal direction) aligning (line), or line up array (array).When these sensings 44 are lined up
During one straight line, can mutually it be arranged in pairs or groups with free form surface diffraction grating, because free form surface diffraction grating can focus on spectral components S3
In a straight line.In other embodiments, diffraction grating 50 can also be the light disclosed by U.S. Patent No. 9,146,155
Grid.
In addition, please see Figure 2D, 501 width G of being open can be relevant with sensing face 40S width h, and wherein width h can be real
Perpendicular to the first reflecting surface 52 and the second reflecting surface 57 in matter.
The size of above-mentioned width G can be derived and/or obtained by software simulation using theory.It will illustrate below
The bright size that width G how is determined using software simulation.
Flat waveguide microgratings (Slab-Waveguide is simulated by using ray tracing software TracePro
Micro-Grating, SWMG) system ray tracing, software TracePro can be located using the diffraction efficiency of user's offer
The light beam of Ricoh's grid diffraction.The strict diffraction efficiency of grating is calculated and can performed by using software PCGrate.
The sensing face 40S systems of CIS 40 are placed into the diffraction light that it can be made to be centrally located on Rowland circle RC and focused on
Point, and its surface system is perpendicular to the main beam from point O, as shown in Figure 1.That is, the sensing face 40S systems position of CIS 40
In on focal plane.In the present embodiment, simulated using 1.50mm (horizontal size) * 0.90mm (vertical dimension) sensor.
Especially, when being simulated using software, width G can be changed, and incident beam is vertical (in Fig. 2A sagittal surface
On (sagittal plane) SP) divergence half-angle can also change, but the position of CIS 40 is to immobilize.All
In simulation, (on meridian plane) divergence half-angle of the level of incident beam is maintained at 12 °.
Fig. 3 A to Fig. 3 C are shown in the distribution of the diffraction image of the simulation in the sensing face on CIS, and it is right respectively
Should be to width G=1,3 and 5mm.Fig. 3 A to Fig. 3 C are referred to, diffraction shadow image distortion is partitioned into two afterbodys, and forms one
Falcate is distributed.On most wide width (G=5mm) in simulations, the intensity distribution system in y directions, which is actually greater than, simulates
Sensing face 40S width h.Therefore, the distribution for being shown in Fig. 3 C ties up to y directions and is truncated, without completely such as Fig. 3 A and 3B
Shown be subtracted is entered in CIS 40.From Fig. 3 A to Fig. 3 C, when width G is bigger, bent moon imaging is not more curved
Song, and CIS 40 more can be made not detect two afterbodys of bent moon imaging, and then detected CIS 40
Spectrum less influenceed by smearing (i.e. effect caused by astigmatism).However, when width G is bigger, bent moon is imaged more not
Bending, thus enter the light energy in sensing face 40S (i.e. in the range of h) it is fewer (from Fig. 3 A and Fig. 3 C comparison can it is obvious must
Know), spectrum signal can be caused weaker.Therefore, the value of appropriate width G can be selected in response to actual use demand.
(i.e. sensing face 40S width h), it is, for example, 200 μ to the vertical pixel dimension represented in Fig. 3 A to Fig. 3 C with h
M, its for commercial commercially available CIS 40 sensing face 40S width h, other commercial commercially available CISs
40 vertical pixel dimension still has 50 μm, 500 μm or other sizes.In order in collecting more light on linear CIS 40
Signal, larger vertical pixel dimension can be used.However, larger vertical pixel dimension includes the falcate image of more parts
Afterbody (referring to Fig. 3 A to Fig. 3 C), and cause incorrect wavelength readings.It follows that except can be selected in response to actual demand
Outside the value of appropriate width G, can also arrange in pairs or groups the appropriate width h values of selection.
In embodiments of the invention, a kind of journey to the removal smearing from spectroscopic data has dexterously been designed
Sequence, the mode taken are：(1) first simulated using software using caused result during different width Gs；And (2) choosing
Select appropriate vertical pixel dimension (the i.e. width h) of linear CIS.By allowing in sensor plane and waveguide side
Some gap between edge, the focus pattern of synthesis expand into falcate distribution (referring to Fig. 3 A to figure in detector plane
3C).With vertical pixel height, (i.e. width h) is placed in y=0 (referring to Fig. 3 A to Fig. 3 C), and linear CIS only captures
The middle body of falcate image distribution.Using such a G-h Regulation mechanisms, embodiments of the invention can be fully solved hangover effect
The problem answered.
Thereby, designer can obtain or adjust above-mentioned width G according to the parameter of CIS easily, effectively to disappear
Except the harmful effect caused by smearing.The design specification of conventional spectrometers be in order to reduce light loss, must be by plane wave
Lead and abut CIS.The design specification that embodiments of the present invention are then complete escape conventional spectrometers is reviewed, uses allowing shadow
As sensor can obtain good spectroscopic data.
Although it is worth noting that, it is with for the diffraction grating of Rowland circle and fixed knot away from d in embodiments of the invention
It is bright, but because the diffraction grating of Rowland circle and fixed knot away from d is the basis of diffraction theory, embodiments of the invention are also same
When suitable for non-Rowland circle and the diffraction grating of on-fixed pitch, and the profile of diffraction grating can include straight line, circular arc or its
His curved surface, so may not necessarily be located on input unit 20 and CIS 40 on Rowland circle RC.
In the spectrometer 1 of the present embodiment, due to opening 501, therefore spectrum between end E1 and CIS 40 be present
It can cause the part (the larger part of the angle of divergence) of smearing can be from waveguide space S end E1 toward less likely in component S3
It is transferred to sensing face 40S directional divergence.Consequently, it is possible to can be so that the spectrum that spectrometer 1 is sensed less be trailed
The influence of effect.
In the present embodiment, the opening 501 formed by extension 54 and light extraction end E55 dissipates breach for a light, and is open
501 prolonging positioned at the first reflecting surface 52 of light bang path (such as Fig. 1 second light path OP2) orthographic projection to the first speculum 51
Stretch the position in face.In fig. 2b, the quantity of extension 54 is exemplified by two.However, in other embodiments, if width G can
To maintain, extension 54 can also only have one, such as the only extension 54 of Fig. 2 B rights.
In the present embodiment, 501 width G of being open can influence above-mentioned at least part of these spectral components S3 falcate
Distribution, sensing face 40S can influence the product of CIS 40 in the width h on the direction of the normal parallel to the first reflecting surface 52
Divide scope, waveguide space S optical signal S2 is injected in the direction of the normal parallel to the first reflecting surface 52 by input unit 20
Divergence half-angle (divergence half-angle of light beam on sagittal surface) can influence the expansion of falcate.Above-mentioned simulation program is existed by opening 501
Width G, above-mentioned divergence half-angle on the direction of light wave conduction are with sensing face 40S in the side of the normal parallel to the first reflecting surface 52
Upward width h is engaged, and 501 width G of being open allows these spectral components to have part along parallel to the first reflecting surface 52
The directional divergence of normal, make two afterbodys that falcate derived from divergence half-angle is distributed generally without falling into CIS 40
In limit of integration.
In the present embodiment, be open 501 width G be more than or equal to 1 millimeter.In one embodiment, be open 501 width
G is fallen in the scope from 1 millimeter to 5 millimeters.
In the present embodiment, it is to have by the first speculum 51 against exemplified by the extension 54 of CIS 40, and the
Two-mirror 56 is then not against CIS 40.However, in other embodiments or the second speculum 56 has
Light end (such as light extraction end E55) and the extension (such as extension 54) against CIS 40, and the first speculum 51 is not against
CIS 40 and do not have extension 54.Or in other embodiments or the first speculum 51 and second anti-
Penetrating mirror 56 all each has light extraction end E55 and the extension 54 against CIS 40.In addition, in the present embodiment, be with
First speculum 51 has exemplified by opening 501 and the second speculum 56 do not have an opening 501.However, in other embodiments, also
Can be that there is the second speculum 56 opening 501 and the first speculum 51 have an opening 501, or the first speculum 51 and
Second speculum 56 all has opening 501.
In the present embodiment, spectrometer 1 further includes light benefit and catches structure 12 (as depicted in Fig. 2 D), is configured at waveguide space
Outside S, and to absorb the light dissipated from opening 501.Light benefit, which catches structure 12, can be provided at body 10 (i.e. the housing of spectrometer 1)
On hackly surface structure or other appropriate non-planar surfaces structures, light-absorption layer can be coated with thereon.Dissipated when from opening 501
Light incident light mend when catching structure 12, hackly surface structure constantly can reflect light toward zigzag concave bottom, and per anti-
Penetrate a light-absorption layer and just absorb once light more.Therefore, light benefit is caught structure 12 and effectively can inhaled the light dissipated from opening 501
Receive, become to inject the chance of the veiling glare of CIS 40 effectively to reduce this light.In another embodiment, table in body 10
Face has and can be coated with light-absorption layer, and this light-absorption layer absorbs the light dissipated from opening 501, without catching structure 12 using light benefit come extinction.
Fig. 4 A to Fig. 4 D illustrate other four kinds changes of Fig. 2 B opening.Please also refer to Fig. 4 A, the light extraction end of waveguide section 551
Multiple diverse locations on E551 to CIS 40 distance (be open 501 diverse location width G) incomplete phase
Together.In the present embodiment, light extraction end E551 edge tilts with respect to sensing face 40S, inclined to define relative sensing face 40S
The end E11 of waveguide space.In another embodiment, light extraction end E551 edge can also be unsmooth edge, such as sawtooth
Shape edge, stepped edges or the edge for having segment difference, the present invention are not limited.In addition, also can be according to the light of different wave length
Different focal positions correspond to the width G that design is different at the diverse location of opening 501.
However, in other embodiments, as depicted in Fig. 4 B, the light extraction end E552 of waveguide section 552 edge can be an arc
Shape edge, to define the end E12 of curved waveguide space.End E11 and end E12 design can be in response to Different lightwave
Grow that the caused parsing effect on sensing face 40S is different, and determine to allow and correspond to this wavelength on the E11 of end and be located proximate to feel
Survey face 40S some with promotion feeling luminous intensity, or away from sensing face 40S some to lift resolution.
In general, the resolution of the light of short wavelength is preferable, so the position on the E11 of end corresponding to short wavelength can be set
Count into closer sensing face 40S.Conversely, the position on the E11 of end corresponding to long wavelength can be designed to further away from sensing face
40S.In addition, in other different embodiments, also different width Gs can be designed in response to the difference of the wavelength of required detecting
Value.
Referring again to Fig. 4 C, the first speculum 51 may include multiple openings 501 (such as opening 501a and opening 501b), its
Split shed 501a is open for closing, between diffraction grating 30 and CIS 40.Extension 543 goes out with waveguide section 55
Light end E553 can also form opening 501b, and now, the end E13 of waveguide space is defined by light extraction end E553.In this reality
Apply in example, width Gs 1 and opening 501b width G 2 on direction that light wave conduct of the opening 501a on the direction that light wave conducts
Can be with identical or different.When width G 1, G2 are bigger, the light of the smaller angle of divergence can be made to be dissipated from opening 501.For example,
Width G 2 is more than width G 1, and the angle of divergence is that the light of 70 to 90 degree can dissipate from opening 501a, and the angle of divergence is the light of 60 to 90 degree
It can be dissipated from opening 501b.In other embodiments, can also be that the opening 501a for having multiple closings is arranged in light wave and conducted
On direction.In another embodiment, 501 (such as the 501a that are open) are open parallel to the first reflecting surface 52 and the second reflecting surface 57
At least one of bearing of trend relative to CIS 40 sensing face 40S tilt.
Referring again to Fig. 4 D, compared to Fig. 4 C, in the present embodiment, the first speculum 51 only has the opening 501a closed,
Without the opening 501b of the opening as depicted in Fig. 4 D, now waveguide space S end E13 is determined by light extraction end E553
Justice, and end E13 directly abuts CIS 40.
Fig. 5 is the profile for entering light state of the spectrometer of another embodiment of the present invention.Fig. 5 is refer to, in this implementation
In example, for the opening 501 of waveguide assembly 50 between input unit 20 and diffraction grating 30, it can make the optical signal of the big angle of divergence
S2 dissipates from opening 501, so can also make the light of smearing can be caused less likely to be transferred to CIS 40.In this implementation
In example, the first speculum 51 and the second speculum 56 all have opening 501.However, can also be first in other embodiments
One of speculum 56 of speculum 51 and second has opening 501.In addition, can also be waveguide in another embodiment
Device 50 has opening 501 between input unit 20 and diffraction grating 30 and between diffraction grating 30 and CIS 40, and
Opening 501 light wave conduction direction on width Gs allow both optical signal S2 and spectral components S3 have part edge parallel to
The normal direction of first reflecting surface 52 or the second reflecting surface 57 dissipates.Furthermore in other embodiments, opening 501 can also be
Positioned at one end towards input unit 20 of waveguide assembly 50, that is, waveguide assembly 50 in one end towards input unit 20 formed with class
Like Fig. 2 B extension 54, to form open opening 501.
Fig. 6 is the flow chart of one of the present invention preparation method of the spectrometer of embodiment.It refer to Fig. 1, Fig. 2A to Fig. 2 E
And Fig. 6, the preparation method of the spectrometer of the present embodiment can be used to produce above-mentioned Fig. 2A to Fig. 2 E spectrometer 1 or other implementations
The spectrometer of example, and herein by taking the spectrometer 1 for producing Fig. 2A to Fig. 2 E as an example.The preparation method bag of the spectrometer of the present embodiment
Include the following steps.First, step S110 is performed, input unit 20, the diffraction grating of spectrometer 1 are determined using above-mentioned simulation program
30th, the multiple parameters of CIS 40 and waveguide assembly 50.Then, step S120 is performed, is inputted according to these parameter configurations
Portion 20, diffraction grating 30, waveguide assembly 50 and CIS 40, e.g. make input unit 20, diffraction grating 30 and image sense
Device 40 is surveyed directly or indirectly to be bearing on waveguide assembly 50 according to these parameters.Input unit 20, diffraction grating 30, CIS
40 and the adoptable structure of waveguide assembly 50, the relative position on light path, to image caused by light and accessible work(
The details of effect as described above, no longer repeat herein.In addition, when CIS 40 is bearing on waveguide assembly 50 indirectly, can
First it is bearing on using a pad on waveguide assembly 50, CIS 40 is bearing on pad again, and works as waveguide assembly 50 and shadow
Detached after the fixation of sensor 40, then by pad, and make to keep at a distance between CIS 40 and waveguide assembly 50.At other
In embodiment, waveguide assembly 50 is also securable to housing, or CIS 40 is also securable to housing.
In addition, these parameters for being determined of above-mentioned simulation program include opening 501 width on the direction that light wave conducts
G.In one embodiment, these parameters further include the distance of the first reflecting surface 52 and the second reflecting surface 57, when this distance is bigger,
Bent moon image more relaxes and (less bent).
In the present embodiment, input unit 20 is bearing on two positioning side (examples of waveguide assembly 50 with diffraction grating 30 respectively
Two positioning sides of the first speculum 51 in this way), and this two positioning side, opening 501 are, for example, to pass through with above-mentioned extension 54
MEMS technique is formed.MEMS technique can make accurate and small error positioning side, opening 501 and extension
Section 54, it is suitable as small-sized waveguide assembly 50, closing opening can be made to the first speculum 51 and the second speculum 56, and makes
Cost is low.However, in other embodiments, this two positioning side can also be controlled by computer numerical with extension 54
(computer numeric control, CNC) toolroom machine is made to process.
Because MEMS technique can produce the high profile of accuracy, therefore it is accurate and flat to make out position
Sliding above-mentioned two positioning sides and extension 54.Consequently, it is possible to when input unit 20, diffraction grating 30 and CIS 40 against
During waveguide assembly 50, input unit 20, the relative position of diffraction grating 30 Yu CIS 40 this three just can be by accurately
Determine.Consequently, it is possible to it just can effectively lift the optical quality and accuracy of spectrometer.
In the present embodiment, in simulation program, the width of the opening 501 kept between end E1 and CIS 40
Spend G, be in the case that CIS 40 sets and is positioned at focal length, with multiple different width simulated and determine end E1 with
The width G of the opening 501 kept between CIS 40.In other words, it is that the position of CIS 40 is fixed, and passes through
End E1 is inside contracted to produce the width G of different openings 501, or by the first speculum 51 and the second speculum 56 at least
One of them is formed with opening 501 (as depicted in Fig. 4 C, Fig. 4 D and Fig. 5).
In addition, these parameters that simulation program is determined further include sensing face 40S in the method parallel to the first reflecting surface 52
Width h on the direction of line, its be in simulation program, in the case that CIS is set in focal length, with sensing face 40S in
The CIS 40 simulated and determined parallel to multiple different in width on the direction of the normal of the first reflecting surface 52
Width h.That is, by above-mentioned analog form, the collocation of appropriate width G and width h can be determined, its detailed process
It can refer to above-described embodiment.
The parameter that above-mentioned simulation program is determined may also include the relative position such as each element in Fig. 1, grating pattern
Spacing, the relative angle of optical axis or light path, waveguide space S end E1 shape etc..Consequently, it is possible to the spectrum of the present embodiment
The preparation method of instrument, which just can be produced, less to be influenceed by smearing and has the spectrometer of pinpoint accuracy and high optical efficiency.
Fig. 2A to Fig. 2 E is refer again to, the extension 54 of the present embodiment or the extension of other embodiment can utilize microcomputer
Electric system technique makes, therefore can accurately against CIS 40.In addition, the light extraction end E55 of the first speculum 51
It can also be made of MEMS technique, to define the accurate waveguide space S of out position end E1..
In summary, in spectrometer of embodiments of the invention and preparation method thereof, due on waveguide assembly formed with
At least one opening so that the sagittal beam with the big angle of divergence is from opening at least one of spectral components and optical signal
Outside of CIS is dissipated into, therefore can cause the part of smearing can be from opening toward less likely in spectral components
It is transferred to the directional divergence of CIS.In other words, if above-mentioned opening can make the sagitta of arc light of the big angle of divergence with reflecting surface substitution
Beam enters CIS and smearing is become serious.
It is described above, only it is embodiments of the invention, any formal limitation not is made to the present invention, although this
Invention is disclosed above with embodiment, but is not limited to the present invention, any person skilled in the art, is not taking off
In the range of technical solution of the present invention, when method and technology contents using the disclosure above make a little change or are modified to
The equivalent embodiment of equivalent variations, as long as being the content without departing from technical solution of the present invention, the technical spirit pair according to the present invention
Any simple modification, equivalent change and modification that above example is made, in the range of still falling within technical solution of the present invention.
Claims (24)
- A kind of 1. spectrometer, it is characterised in that including：One input unit, to receive an optical signal；One diffraction grating, it is configured on the bang path of the optical signal from the input unit, and to by the optical signal It is separated into multiple spectral components；One CIS, it is configured on the bang path of those at least part of spectral components；AndOne waveguide assembly, including：One first reflecting surface；AndA waveguide space is formed between one second reflecting surface, wherein first reflecting surface and second reflecting surface, the optical signal The diffraction grating is transferred to from the input unit via the waveguide space, those at least part of spectral components are empty via the waveguide Between be transferred to the CIS；Wherein, on the waveguide assembly formed with least one opening, above-mentioned opening substantially parallel to first reflecting surface and this At least one of two reflectings surface, and at least one of those spectral components and the optical signal have part from the opening It is dissipated into outside the waveguide space without injecting the CIS.
- 2. spectrometer as claimed in claim 1, it is characterised in that the waveguide assembly further includes an at least extension, from the ripple The end of guide space extends toward the CIS, above-mentioned is opened with define between the end and the CIS Mouthful.
- 3. spectrometer as claimed in claim 2, it is characterised in that the waveguide assembly includes：One first speculum, there is first reflecting surface, and the above-mentioned extension being connected including a waveguide section and with the waveguide section, The light extraction end of the wherein waveguide section towards the sensing face of the CIS defines the end of the waveguide space；AndOne second speculum, there is second reflecting surface, wherein first reflecting surface is towards second speculum, and this is second anti- Penetrate facing to first speculum.
- 4. spectrometer as claimed in claim 3, it is characterised in that multiple diverse locations on the light extraction end to the image sensing The distance of device is incomplete same.
- 5. spectrometer as claimed in claim 2, it is characterised in that above-mentioned extension is against the CIS, so that the end Above-mentioned opening is formed between end and the CIS.
- 6. spectrometer as claimed in claim 2, it is characterised in that above-mentioned extension is against the member being connected with the CIS Part, so as to form above-mentioned opening between the end and the CIS.
- 7. spectrometer as claimed in claim 1, it is characterised in that the opening is second anti-with this parallel to first reflecting surface At least one of bearing of trend for penetrating face tilts relative to the sensing face of the CIS.
- 8. spectrometer as claimed in claim 1, it is characterised in that the waveguide assembly includes an at least extension, from the waveguide The end in space extends toward the input unit, to define the above-mentioned opening between the end and the input unit.
- 9. spectrometer as claimed in claim 1, it is characterised in that the diffraction grating is a concave grating, and by least portion Those spectral components divided focus on the sensing face of the CIS.
- 10. spectrometer as claimed in claim 1, it is characterised in that width meeting of the above-mentioned opening on the direction that light wave conducts Influence the falcate distribution of those at least part of spectral components, the sensing face of the CIS is in first anti-parallel to this Width on the direction for the normal for penetrating face can influence the limit of integration of the CIS, and the waveguide space is injected by the input unit Divergence half-angle of the optical signal in the direction of the normal parallel to first reflecting surface can influence the expansion of the falcate, lead to The width, the divergence half-angle and the sensing face of above-mentioned opening on the direction that light wave conducts are crossed in parallel to first reflecting surface Normal direction on width be engaged, the width of above-mentioned opening on the direction that light wave conducts allow the optical signal with At least one of those spectral components has directional divergence of the part along the normal parallel to first reflecting surface, makes the diverging Two afterbodys of falcate distribution are generally without falling into the limit of integration of the CIS derived from half-angle.
- 11. spectrometer as claimed in claim 1, it is characterised in that the width of above-mentioned opening on the direction that light wave conducts More than or equal to 1 millimeter.
- 12. spectrometer as claimed in claim 11, it is characterised in that the width of above-mentioned opening on the direction that light wave conducts It is to fall in the scope from 1 millimeter to 5 millimeters.
- 13. spectrometer as claimed in claim 1, it is characterised in that above-mentioned opening includes a closing and is open, positioned at the diffraction light Between grid and the CIS.
- 14. spectrometer as claimed in claim 1, it is characterised in that above-mentioned opening be located at the input unit and the diffraction grating it Between.
- 15. spectrometer as claimed in claim 1, it is characterised in that further include light benefit and catch structure, be configured at the waveguide space Outside, and to absorb the light from opening diverging.
- A kind of 16. preparation method of spectrometer, it is characterised in that including：An input unit, a diffraction grating, a CIS and a waveguide assembly for a spectrometer is determined using a simulation program Multiple parameters；AndAccording to those parameter configurations input units, the diffraction grating, the waveguide assembly and the CIS, the wherein input unit To receive an optical signal, the diffraction grating is configured on the bang path of the optical signal from the input unit, and is used So that the optical signal is separated into multiple spectral components, the CIS is configured at the biography of those at least part of spectral components Pass on path, the waveguide assembly includes one first reflecting surface and one second reflecting surface, first reflecting surface and second reflecting surface Between form a waveguide space, the optical signal is transferred to the diffraction grating from the input unit via the waveguide space, and this is at least Those partial spectral components are transferred to the CIS via the waveguide space, wherein, formed with extremely on the waveguide assembly A few opening, above-mentioned opening is substantially parallel at least one of first reflecting surface and second reflecting surface, those light At least one of spectral component and the optical signal have part to be dissipated into from the opening outside the waveguide space should without injection CIS,Wherein, those parameters that the simulation program is determined include above-mentioned opening the width on the direction that light wave conducts.
- 17. the preparation method of spectrometer as claimed in claim 16, it is characterised in that the input unit is distinguished with the diffraction grating Two positioning sides of the waveguide assembly are bearing on, and the two positioning side and above-mentioned opening are by MEMS technique institute shape Into.
- 18. the preparation method of spectrometer as claimed in claim 16, it is characterised in that the waveguide assembly further includes at least one and prolonged Stretch section, extend from the end of the waveguide space toward the CIS, with define be located at the end and the CIS it Between above-mentioned opening.
- 19. the preparation method of spectrometer as claimed in claim 18, it is characterised in that the waveguide assembly includes one first reflection Mirror and one second speculum, first speculum has first reflecting surface, and is connected including a waveguide section and with the waveguide section Above-mentioned extension, the light extraction end towards the sensing face of the waveguide section defines the end of the waveguide space, and this is second anti- Penetrating mirror has second reflecting surface, and first reflecting surface is towards second speculum, and second reflecting surface is towards first reflection Mirror, and above-mentioned extension is formed by MEMS technique.
- 20. the preparation method of spectrometer as claimed in claim 16, it is characterised in that the diffraction grating is a reflective concave surface Grating, and those at least part of spectral components are focused on to the sensing face of the CIS.
- 21. the preparation method of spectrometer as claimed in claim 16, it is characterised in that in the simulation program, above-mentioned opening The width on the direction of light wave conduction, is in the case that the CIS is set in focal length, with multiple different width Simulated and determine the width of above-mentioned opening on the direction that light wave conducts.
- 22. the preparation method of spectrometer as claimed in claim 16, it is characterised in that those ginsengs that the simulation program is determined Number further includes the sensing face of the CIS in the width on the direction of the normal parallel to first reflecting surface, and it is at this In simulation program, in the case that the CIS is set in focal length, with the sensing face in the method parallel to first reflecting surface The width of the sensing face of the CIS that multiple different in width on the direction of line are simulated and determined.
- 23. the preparation method of spectrometer as claimed in claim 16, it is characterised in that above-mentioned opening is in the direction that light wave conducts On width can influence those at least part of spectral components falcate distribution, the sensing face of the CIS is in parallel The limit of integration of the CIS can be influenceed in the width on the direction of the normal of first reflecting surface, is injected by the input unit Divergence half-angle of the optical signal of the waveguide space in the direction of the normal parallel to first reflecting surface can influence the bent moon The expansion of shape, the width, the divergence half-angle and the sensing of the simulation program by above-mentioned opening on the direction that light wave conducts Face is engaged in the width on the direction of the normal parallel to first reflecting surface, and above-mentioned opening is on the direction that light wave conducts The width allows at least one of the optical signal and those spectral components to have part along parallel to first reflecting surface The directional divergence of normal, make two afterbodys of falcate distribution derived from the divergence half-angle generally without falling into the image sensing In the limit of integration of device.
- 24. the preparation method of spectrometer as claimed in claim 16, it is characterised in that those ginsengs that the simulation program is determined Number further includes the distance of first reflecting surface and second reflecting surface.
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| TWI830584B (en) * | 2022-05-25 | 2024-01-21 | 采鈺科技股份有限公司 | Spectrometer |
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