CN107598749A - A kind of high-accuracy twin shaft scribing machine control device - Google Patents
A kind of high-accuracy twin shaft scribing machine control device Download PDFInfo
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- CN107598749A CN107598749A CN201710846649.9A CN201710846649A CN107598749A CN 107598749 A CN107598749 A CN 107598749A CN 201710846649 A CN201710846649 A CN 201710846649A CN 107598749 A CN107598749 A CN 107598749A
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- control device
- machine control
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- scribing machine
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Abstract
The present invention discloses a kind of high-accuracy twin shaft scribing machine control device, including motion controller, marble bearing, A axles, B axle, the A axles connect rail plate with the side of B axle by the chute opened up, A axles are by being vertically moved up or down band connection the first Z-direction lifting shaft, B axle is by being vertically moved up or down band connection the second Z-direction lifting shaft, the side of first Z-direction lifting shaft is provided with camera, first Z-direction lifting shaft and the second Z-direction lifting shaft connect the main shaft of cutting operation respectively, the surface of main shaft is provided with wear-resisting cutting blade, the surface of marble bearing is provided with workbench, the surface distributed of workbench has X-axis, the bottom of workbench is provided with C rotary shafts.The material for realizing high-efficiency high-accuracy by high-precision full closed loop control, high resolution camera is processed.
Description
Technical field
The present invention relates to dicing saw art field, more particularly to a kind of high-accuracy twin shaft scribing machine control device.
Background technology
Scribing machine is the key equipment of semicon industry in blade cutting industry at home at present, is mainly used in the integrated electricity of silicon
Road, light emitting diode, lithium niobate, piezoelectric ceramics, GaAs, sapphire, aluminum oxide, iron oxide, quartz, glass, ceramics, the sun
The stroke cutting processing of the materials such as energy cell piece.
Scribing machine control system program mainly realizes that processing platform breadth is smaller with traditional PLC system, mostly also
It is the mode of single blade cutting.To ensure the planarity requirements of work microscope carrier, the size of work microscope carrier is only reduced as far as possible, typically
For 6 inches or 8 inches of disk or square plate, the tablet quantity for causing work microscope carrier once to accommodate is considerably less, plus single knife
The design of piece cutting, the strong influence processing efficiency of product, there is deficiency, it is impossible to meet the needs of actual production.
In summary, for prior art the defects of, it is accordingly required in particular to a kind of high-accuracy twin shaft scribing machine control device, with solution
Certainly the deficiencies in the prior art.
The content of the invention
For deficiency present in existing technology, use in practice is influenceed, the present invention proposes a kind of high-accuracy twin shaft
Scribing machine control device, novel in design, by high-precision full closed loop control, high resolution camera, the double air spindles of high-performance are high
Precision surveys knife up module and optimizes cutting efficiency and quality.
To achieve these goals, technical scheme is as follows：
A kind of high-accuracy twin shaft scribing machine control device, including core processing is used as using DSP and FPGA based on PC buses
The motion controller of device, marble bearing, the A axles for being mounted with high-speed revolving blade, B axle, control system include Spindle control
The side of plate, motion control board, real-time measure and control plate, product processing technique control panel, machine vision location-plate, A axles and B axle
Rail plate is connected by the chute opened up, A axles are by being vertically moved up or down band connection the first Z-direction lifting shaft, and B axle is by vertically rising
Band connection the second Z-direction lifting shaft drops, and the side of the first Z-direction lifting shaft is provided with camera, the first Z-direction lifting shaft and the second Z-direction liter
Drop axle connects the main shaft of cutting operation respectively, and for main shaft using double high-speed air main shafts, the surface of main shaft is provided with wear-resisting cutting
Blade, the surface of marble bearing are provided with workbench, and workbench uses ceramic platform, and the surface distributed of workbench has
X-axis, the bottom of workbench are provided with C rotary shafts.
Further, described C rotary shafts use rotation motor.
It is less than 0.02mm in the flatness of workbench of the present invention, the size of workbench is more than 12 cun.
Further, described camera bag contains high magnification and low range positioning camera.
Further, described maximum speed of spindle is 60000rps.
Further, the motion controller includes Spindle control plate, motion control board, real-time measure and control plate, product
Control process plate, machine vision location-plate.
Further, the main shaft is using double high-speed air main shafts.
Further, the workbench uses ceramic platform.
Further, the motion controller is made using PC as the information processing platform based on PC buses with DSP and FPGA
For the motion controller of core processor.
The beneficial effects of the invention are as follows：It is simple in construction, by large scale platform plane degree correction program, product cutting road
The free allocation algorithm in footpath, a variety of cutting technique flow scheduling algorithms, realized using twin shaft blade to various material and manufacturing process
The cutting of the various flitch such as ceramics, EMC, optimizing incision efficiency and cutting quality, automaticity is excellent, novel in design, is a kind of
Good innovation scheme.
Brief description of the drawings
Describe the present invention in detail with reference to the accompanying drawings and detailed description：
Fig. 1 is the hardware structure diagram of the present invention；
Fig. 2 is the control unit module map of the present invention；
The platform plane degree that Fig. 3 is the present invention corrects schematic diagram.
Fig. 4 is the tablet positioning method figure of the present invention.
The machining locus that Fig. 5 is the present invention distributes schematic diagram.
Fig. 6 is the coordinates measurement flow chart of the present invention.
100-A axles in figure, 110-B axles, 120- the first Z-direction lifting shafts, 130- rail plates, 140- cameras, 150- cuttings
Blade, 160- main shafts, 170- workbenches, 180-C rotary shafts, 190- the first Z-direction lifting shafts.
Embodiment
In order that the technical means, the inventive features, the objects and the advantages of the present invention are easy to understand, tie below
Conjunction is specifically illustrating, and the present invention is expanded on further.
Referring to Fig. 1, a kind of high-accuracy twin shaft scribing machine control device, including based on PC buses using DSP and FPGA as
The motion controller of core processor, marble bearing, A axles 100, B axle 110, control system include Spindle control plate, motion
The side of control panel, real-time measure and control plate, product processing technique control panel, machine vision location-plate, A axles 100 and B axle 110
Rail plate 130 is connected by the chute opened up, A axles 100 are by being vertically moved up or down the first Z-direction of band connection lifting shaft 120, B axle
110 by being vertically moved up or down the second Z-direction of band connection lifting shaft 190, and the side of the first Z-direction lifting shaft 120 is provided with camera 140, the
One Z-direction lifting shaft 120 and the second Z-direction lifting shaft 190 connect the main shaft 160 of cutting operation respectively, and main shaft 160 is using double empty at a high speed
Gas main shaft, the surface of main shaft 160 are provided with wear-resisting cutting blade 150, and the surface of marble bearing is provided with workbench
170, workbench 170 uses ceramic platform, and the surface distributed of workbench 170 has X-axis, and the bottom of workbench 170 is set
There are C rotary shafts 180.Wherein 6 axle full closed loop controls, the displacement measured can be fed back to the comparison of numerical control device at any time
Device, compared with input instruction, moving component is controlled with difference, make the strict displacement fortune according to actual needs of moving component
It is dynamic.Double high-speed air main shafts use air as the sliding bearing of lubricant, there is provided high radial and axial running accuracy.By
In no Mechanical Contact, the degree of wear falls below minimum, so that it is guaranteed that precision remains stable, maximum speed is reachable
60000rps。
Further, for described motion controller using PC as the information processing platform, motion controller is embedding in the form of plug-in card
Enter the pattern of PC, i.e. " PC+ motion controllers ".So by the information processing capability of PC and it is open the characteristics of with motion control
The movement locus control ability of device processed organically combines, with information processing capability is strong, degree of opening is high, movement locus control
The characteristics of system is accurate, versatility is good.This quasi-controller takes full advantage of DSP high-speed data disposal ability and the superpower of FPGA is patrolled
Disposal ability is collected, is easy to design perfect in shape and function, the motion controller of superior performance.This kind of motion controller can generally provide
Multi-axis coordinated motion control and complicated Motion trajectory, interpolation operation, error compensation, servo filter calculation in real time on plate
Method, closed-loop control can be realized, high-precision servo-positioning is provided for system.
C rotary shafts 180 use rotation motor.The flatness of workbench 170 is less than 0.02mm, the chi of workbench 170
It is very little to be more than 12 cun.Camera 140 includes high magnification and low range positioning camera.The maximum speed of main shaft 160 is 60000rps.
According to the features such as the material, size, manufacturing process of supplied materials tablet, required precision, anchor point shape, slave unit system
Upper importing cutting mode, realize the high-speed, high precision cutting to supplied materials.
By stage+module in place after, by laterally and many to N number of point (N is bigger, and precision is higher) is respectively taken, antenna height rule take
Height difference to these relative to Platform center position, using three-dimensional planar Algorithm for Surface Fitting, in automatic calculating platform
Arbitrfary point position relative to Platform center position difference in height, you can realize to the automatic straightening of optional position cutting track.
Control system is captured per feature locations obvious on block piece by low range camera, is then switched to high power
Rate camera captures the cutting track fixed position on tablet, to obtain the cutting track line position of all tablets, in conjunction with two
The parameter information such as the minimum spacing of blade, maximum spacing, by line of cut dynamic allocation algorithm, all cutting tracks are distributed
To two blades in equipment, top level control system program is loaded into cutting track path, controls position and the blade of kinematic axis
Rotation, realize the cutting processing to all tablets.
According to Platform center and the difference in height for surveying knife up position, high module is surveyed by the way that optical fiber type is non-contact, can be quick
The cutting-height of each tablet on to platform.This kind of method has not only ensured can be in real time according to blade abrasion feelings in cutting process
Condition, cutting-height, and non-contacting survey knife up mode are adjusted in time, abrasion of the blade during height is surveyed is it also avoid, carries
The utilization rate of blade is risen.
Part tablet is due to material, the reason in terms of manufacturing process, causes tablet to exist in terms of design accuracy and making
There is situations such as relatively large deviation etc. in different degrees of flaw, such as warpage, the track of theoretical cutting track and product actual requirement, control
System processed provides five class cutting modes, the product of the at utmost low a variety of different manufacturers of compatibility.
In actual cutting process, by adjusting position of spraying water, size monitors the vacuum in process, and blade is born
Carry, various safety switches, ensure the stable operation of whole equipment system.
Referring to Fig. 2, the control unit of whole system forms, including Spindle control module, motion-control module, in real time detection
Module, machine vision locating module, five class product processing technique modules composition.
Referring to Fig. 3, for large format ceramic platform due to being limited in terms of manufacturing process, cause to be difficult that large format works
The flatness of microscope carrier is accomplished within 0.02mm, and by the antenna height rule on work microscope carrier, the individual position of N*N are obtained on surface
Highly relative to the height difference of Platform center, with reference to cubic surface fitting algorithm program, it can be deduced that any on platform surface
The height value of opening position, so as to realize that the cutting-height to product compensates automatically, avoid the phenomenon for cutting through or not cutting through.
Referring to Fig. 4, according to the material and manufacturing process of tablet, some tablet finished products are caused to exist in some precision
The error in face and the warpage of flitch, according to quantity is pinpointed on tablet, processing efficiency is taken into account, system provides a variety of fixed point alignment modes
(coarse positioning (cross)+fine positioning (track alignment point)), meets user to efficiency and the double requirements of quality.
Referring to Fig. 5, Fig. 6, according on tablet, actual processing Track Pick-up flow, can according to two blade minimum spacings and
The dimensions information of product, all line of cut track datas are distributed into two blades automatically, double-pole is realized while processes, can
Realize 150%~200% improved efficiency.
It is combined using the air spindle (carrying emery wheel blade) of high speed rotation with the high-accuracy closed-loop control system of tradition
To realize to silicon integrated circuit, light emitting diode, lithium niobate, piezoelectric ceramics, GaAs, sapphire, aluminum oxide, iron oxide, stone
The materials such as English, glass, ceramics, solar battery sheet carry out cutting processing.
The beneficial effects of the invention are as follows：It is simple in construction, by large scale platform plane degree correction program, product cutting road
The free allocation algorithm in footpath, a variety of cutting technique flow scheduling algorithms, realized using twin shaft blade to various material and manufacturing process
The cutting of the various flitch such as ceramics, EMC, optimizing incision efficiency and cutting quality, automaticity is excellent, novel in design, is a kind of
Good innovation scheme.
It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, above-described embodiment and explanation
Merely illustrating the principles of the invention described in book, it is of the invention without departing from the spirit and scope of the present invention also to have respectively
Kind changes and improvements, these changes and improvements all fall within the protetion scope of the claimed invention.The claimed scope of the invention by
Appended claims and its equivalent define.
Claims (9)
- A kind of 1. high-accuracy twin shaft scribing machine control device, it is characterised in that：Including motion controller, marble bearing, A axles, B The side of axle, the A axles and B axle connects rail plate by the chute opened up, and A axles are by being vertically moved up or down the Z of band connection the first To lifting shaft, B axle is provided with camera by being vertically moved up or down band connection the second Z-direction lifting shaft, the side of the first Z-direction lifting shaft, the One Z-direction lifting shaft and the second Z-direction lifting shaft connect the main shaft of cutting operation respectively, and the surface of main shaft is provided with wear-resisting cutter Piece, the surface of marble bearing are provided with workbench, and the surface distributed of workbench has X-axis, and the bottom of workbench is set There are C rotary shafts.
- A kind of 2. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：Described C rotary shafts Using rotation motor.
- A kind of 3. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：Described workbench Flatness be less than 0.02mm, the size of workbench is more than 12 cun.
- A kind of 4. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：Described camera bag contains There are high magnification and low range positioning camera.
- A kind of 5. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：Described main shaft highest Rotating speed is 60000rps.
- A kind of 6. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：The motion controller Include Spindle control plate, motion control board, real-time measure and control plate, product processing technique control panel, machine vision location-plate.
- A kind of 7. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：The main shaft is using double High-speed air main shaft.
- A kind of 8. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：The workbench is adopted Use ceramic platform.
- A kind of 9. high-accuracy twin shaft scribing machine control device according to claim 1, it is characterised in that：The motion controller Using PC as the information processing platform, the motion controller using DSP and FPGA as core processor based on PC buses.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710846649.9A CN107598749A (en) | 2017-09-19 | 2017-09-19 | A kind of high-accuracy twin shaft scribing machine control device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710846649.9A CN107598749A (en) | 2017-09-19 | 2017-09-19 | A kind of high-accuracy twin shaft scribing machine control device |
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| CN107598749A true CN107598749A (en) | 2018-01-19 |
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| CN201710846649.9A Pending CN107598749A (en) | 2017-09-19 | 2017-09-19 | A kind of high-accuracy twin shaft scribing machine control device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110211927A (en) * | 2019-06-13 | 2019-09-06 | 成都先进功率半导体股份有限公司 | A kind of chip cutting method |
| CN114406879A (en) * | 2022-01-14 | 2022-04-29 | 深圳特斯特半导体设备有限公司 | Automatic scribing machine suitable for cluster type distribution |
| CN116140712A (en) * | 2022-12-20 | 2023-05-23 | 苏州镁伽科技有限公司 | Cutting position determining method and device, electronic equipment and readable storage medium |
| CN117484703A (en) * | 2024-01-02 | 2024-02-02 | 江苏中科智芯集成科技有限公司 | Wafer high-efficiency dicing device and dicing process thereof |
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| CN104209983A (en) * | 2013-06-03 | 2014-12-17 | 成都浪度家私有限公司 | Double-face cutting machine |
| CN204800873U (en) * | 2015-05-14 | 2015-11-25 | 章结根 | Handheld cutting device of band shift dynamic formula double knives utensil |
| CN105290794A (en) * | 2015-10-28 | 2016-02-03 | 武汉理工大学 | Multi-axis linkage numerical control trimming and burr cleaning-up tool |
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2017
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104209983A (en) * | 2013-06-03 | 2014-12-17 | 成都浪度家私有限公司 | Double-face cutting machine |
| CN204800873U (en) * | 2015-05-14 | 2015-11-25 | 章结根 | Handheld cutting device of band shift dynamic formula double knives utensil |
| CN105290794A (en) * | 2015-10-28 | 2016-02-03 | 武汉理工大学 | Multi-axis linkage numerical control trimming and burr cleaning-up tool |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110211927A (en) * | 2019-06-13 | 2019-09-06 | 成都先进功率半导体股份有限公司 | A kind of chip cutting method |
| CN110211927B (en) * | 2019-06-13 | 2021-08-24 | 成都先进功率半导体股份有限公司 | Chip cutting method |
| CN114406879A (en) * | 2022-01-14 | 2022-04-29 | 深圳特斯特半导体设备有限公司 | Automatic scribing machine suitable for cluster type distribution |
| CN116140712A (en) * | 2022-12-20 | 2023-05-23 | 苏州镁伽科技有限公司 | Cutting position determining method and device, electronic equipment and readable storage medium |
| CN116140712B (en) * | 2022-12-20 | 2024-01-16 | 苏州镁伽科技有限公司 | Cutting position determining method and device, electronic equipment and readable storage medium |
| CN117484703A (en) * | 2024-01-02 | 2024-02-02 | 江苏中科智芯集成科技有限公司 | Wafer high-efficiency dicing device and dicing process thereof |
| CN117484703B (en) * | 2024-01-02 | 2024-03-15 | 江苏中科智芯集成科技有限公司 | Wafer high-efficiency dicing device and dicing process thereof |
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Application publication date: 20180119 |
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