CN107589847B - Ultrasonic tactile feedback display device, manufacturing method and display system - Google Patents
Ultrasonic tactile feedback display device, manufacturing method and display system Download PDFInfo
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Abstract
The application discloses ultrasonic wave touch display device, manufacturing method and display system, display device include the TFT layer, the TFT layer includes a plurality of ultrasonic drive TFT, TFT layer top is equipped with the pixel and cuts apart the layer, be equipped with a plurality of ultrasonic sensor on the pixel cuts apart the layer, every ultrasonic sensor corresponds one ultrasonic drive TFT. According to the technical scheme provided by the embodiment of the application, the capacitive micro-machined ultrasonic sensor and the driving circuit thereof are manufactured on the OLED backboard of the display device, the ultrasonic touch feedback device and the display device are fused, the sizes of the sensor and the driving circuit are greatly reduced, and the adjustable range of the touch feedback force and the touch experience are greatly improved by manufacturing the ultrasonic sensors with the number of pixels on the display device.
Description
Technical Field
The present disclosure relates generally to display devices, and more particularly to ultrasonic haptic feedback display devices, methods of manufacture, and display systems.
Background
As a latest computer input device, the touch screen is the simplest, convenient and natural man-machine interaction mode at present, gives a brand-new appearance to multimedia, and is a brand-new multimedia interaction device with great attraction. Although the touch screen of the intelligent device brings a great number of brand-new experiences for the user, the user loses the experience of pressing the physical keyboard while the touch screen is convenient and fast. Meanwhile, the experience demand of people for touch is also very vigorous. For example, the experience of touching a real object is felt when the screen is touched; when an angry bird game is played on the touch screen, the elastic force of the rubber band is felt by elongating the slingshot, and the like.
The advent of ultrasonic tactile feedback technology enables people to feel a real tactile experience when touching a screen. However, in order to obtain a more real tactile experience, the existing ultrasonic tactile feedback technology uses three to four hundred ultrasonic transducers to form an ultrasonic array to jointly act on a focus point to apply force. A typical size for a single ultrasonic transducer is 1cm2And each ultrasonic transducer is separately and independently controlled, which makes the driving circuit particularly bulky and difficult to integrate with the display. Existing haptic feedback devices either use a projected display or place the ultrasound device behind the display to project downward and do not really integrate with the display.
Disclosure of Invention
In view of the above-mentioned drawbacks or deficiencies in the prior art, it is desirable to provide an ultrasonic tactile display device, a method of manufacturing, and a display system.
In a first aspect, an ultrasonic tactile feedback display device is provided, which comprises a TFT layer, wherein the TFT layer comprises a plurality of ultrasonic driving TFTs (Thin Film transistors), a pixel division layer is arranged above the TFT layer, a plurality of ultrasonic sensors are arranged on the pixel division layer, and each ultrasonic sensor corresponds to one ultrasonic driving TFT.
In a second aspect, a method for manufacturing an ultrasonic tactile feedback display device is provided, which includes the steps of:
s1: depositing and etching a TFT layer on a substrate, wherein the TFT layer comprises a plurality of ultrasonic driving TFTs;
s2: depositing a pixel segmentation layer above the TFT layer, forming a plurality of first through holes on the pixel segmentation layer, arranging ultrasonic sensors in the first through holes, and enabling each ultrasonic drive TFT to correspond to one ultrasonic sensor.
In a third aspect, there is provided an ultrasonic tactile feedback display system comprising the above
An ultrasonic tactile feedback display device, a gesture capture device and a driving module,
the gesture capturing device is used for acquiring gesture coordinates and sending the gesture coordinates to the driving module;
the driving module is used for receiving the gesture coordinates, analyzing object attributes of the picture corresponding to the coordinate position, calculating parameters of each force focus point according to the object attributes and transmitting the parameters to the ultrasonic tactile feedback display device;
the ultrasonic tactile feedback display device is used for generating an acoustic focusing point at a corresponding position.
According to the technical scheme provided by the embodiment of the application, the capacitive micro-machined ultrasonic sensor and the driving circuit thereof are manufactured on the back plate of the display device OLED (Organic Light-Emitting Diode), the ultrasonic tactile feedback device is fused with the display device, and the sizes of the sensor and the driving circuit are greatly reduced.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
FIG. 1 is a schematic structural diagram of an ultrasonic haptic feedback display device in an embodiment of the present application;
FIG. 2 is a schematic diagram of a single ultrasonic sensor in an embodiment of the present application;
FIG. 3 is a flow chart of a method for manufacturing an ultrasonic haptic feedback display device in an embodiment of the present application;
fig. 4 is a flowchart of a method for manufacturing a single ultrasonic sensor according to an embodiment of the present application.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Referring to fig. 1, an embodiment of the present invention provides an ultrasonic tactile feedback display device, including a TFT layer 9, where the TFT layer 9 includes a plurality of ultrasonic driving TFTs 11, a pixel division layer 3 is disposed above the TFT layer 9, a plurality of ultrasonic sensors 5 are disposed on the pixel division layer 3, and each ultrasonic sensor 5 corresponds to one ultrasonic driving TFT 11.
In the application, the ultrasonic sensor and the driving TFT thereof are arranged on the OLED backboard of the display device, and the ultrasonic tactile feedback system is integrated with the display device, so that the sizes of the sensor and the driving circuit are greatly reduced; the ultrasonic sensors can be distributed in an array mode to form an ultrasonic sensor array with the number of pixels, and the adjustable range and the touch experience of the touch feedback force are greatly improved.
Further, the TFT layer 9 further includes a plurality of pixel driving TFTs 10, the pixel dividing layer 3 is provided with a plurality of first through holes and a plurality of second through holes, the first through holes are provided with the ultrasonic sensors 5, the second through holes are provided with the light emitting units 4, and each of the light emitting units 4 corresponds to one of the pixel driving TFTs 10.
The display device in the embodiment of the application comprises ultrasonic sensors and light-emitting units, wherein the ultrasonic sensors and the light-emitting units are respectively distributed in a first through hole and a second through hole which are formed in a pixel division layer in an array mode, the light-emitting units are arranged in the second through holes, the ultrasonic sensors are distributed in the second through holes in an array mode, the number of the first through holes and the number of the ultrasonic sensors are set according to actual requirements, the first through holes and the number of the ultrasonic sensors are driven by different driving circuits, the ultrasonic driving circuits drive the ultrasonic sensors and the pixel TFT drive the light-emitting units, therefore, at least two driving circuits are arranged on a TFT layer to respectively drive the ultrasonic sensors and the light-emitting units, and a switch TFT can be further arranged on the TFT; the light emitting unit in this embodiment may be set differently according to actual requirements, such as but not limited to an EL light emitting sheet (electroluminescence sheet).
Further, a resin layer 6 is arranged between the pixel division layer 3 and the TFT layer 9, a plurality of third through holes and a plurality of fourth through holes are formed on the resin layer 6,
an electrode layer is arranged above the resin layer 6, the electrode layer comprises a lower electrode 8 electrically connected with the ultrasonic sensor 5 and an anode electrode 7 electrically connected with the light-emitting unit 4, the lower electrode 8 is electrically connected with the ultrasonic driving TFT11 through the third through hole, and the anode electrode 7 is electrically connected with the pixel driving TFT10 through the fourth through hole.
The two driving circuits need to be electrified respectively to work, a resin layer is arranged between the pixel segmentation layer and the TFT layer, and an anode electrode and a lower electrode are arranged on the resin layer and are electrically connected with the light-emitting unit, the ultrasonic sensor and the corresponding driving circuit respectively to realize the electrical connection in the display device; the lower electrode and the anode electrode are arranged above the resin layer and are respectively connected with the corresponding driving circuit through the third through hole and the fourth through hole, the lower electrode is connected with the ultrasonic driving TFT and the ultrasonic sensor, and the anode electrode is connected with the pixel driving TFT and the light-emitting unit.
Further, a cathode electrode layer 2 is disposed on a side of the pixel division layer 3 away from the TFT layer 9, and the cathode electrode layer 2 is electrically connected to the light emitting unit 4 and the ultrasonic sensor 5. In the embodiment of the invention, the cathode electrode layer is arranged on one side of the pixel segmentation layer, which is far away from the TFT layer, namely above the pixel segmentation layer, and the cathode electrode layer is electrically connected with the light-emitting unit and the ultrasonic sensor, so that the light-emitting unit and the ultrasonic sensor are connected to two ends of a power supply and work after being electrically conducted. The ultrasonic sensor itself in this embodiment may be provided with an upper electrode, and the upper electrode of the ultrasonic sensor is electrically connected to the cathode electrode layer, or the ultrasonic sensor itself is not provided with an upper electrode, and shares the cathode electrode layer with the light-emitting unit as the upper electrode, and the two cases do not affect the final result of the display device in this application.
Further, a TFE (Thin Film Encapsulation) Encapsulation layer 1 is encapsulated on a side of the cathode electrode layer 2 away from the pixel division layer 3; a substrate 12 is arranged on one side of the TFT layer 9 far away from the pixel division layer 3. In the present embodiment, a substrate is provided below the TFT layer, and the material of the substrate may be various, such as a glass substrate or a flexible material.
Further, the ultrasonic sensor comprises the lower electrode 8, a vacuum layer 55, a silicon nitride layer 53 and a porous silicon layer 52 are sequentially arranged above the lower electrode 8 from bottom to top,
a vacuum chamber 56 is provided in the vacuum layer 55,
the silicon nitride layer 53 is provided with a plurality of etching holes 54 penetrating through the upper and lower surfaces of the silicon nitride layer 53, and the etching holes 54 are communicated with the vacuum chamber 56.
In the embodiment of the present invention, as shown in fig. 2, a structural diagram of a single ultrasonic sensor is further provided, where a substrate 58 or a resin layer is arranged at the bottom, a layer of polysilicon is deposited upwards, the polysilicon is etched to form a lower electrode layer 57, and then a vacuum layer is formed on the lower electrode layer 57, etc., in the ultrasonic tactile feedback display device, the ultrasonic sensor is arranged in a first through hole formed on a pixel division layer 3, a lower electrode 8 has been formed between the pixel division layer 3 and the resin layer 6, and a vacuum layer 55, a silicon nitride layer 53 and a porous silicon layer 52 are directly arranged above the lower electrode 8 from bottom to top. The upper electrode layer 51 may be formed over the porous silicon layer 52, or may not be formed. The silicon nitride layer and the porous silicon layer jointly form a film, namely a vibrating diaphragm of the ultrasonic sensor, the thickness and the material of the film determine the optimal transmitting frequency of the device, the ultrasonic sensor drive TFT controls the ultrasonic sensor, and the ultrasonic sensor can be controlled to transmit ultrasonic waves with different frequencies by changing the drive voltage.
The vacuum layer is made of SiO2Applying hydrogen fluoride to SiO through pores of porous silicon and etched pores on silicon nitride during processing2And etching to form a vacuum cavity.
The display device in this embodiment encapsulates a TFE encapsulation layer over the cathode electrode layer, which is thin and the ultrasonic sensor disposed thereunder is very close to the surface, which can maximally retain the ultrasonic energy of the ultrasonic sensor.
As shown in fig. 3, an embodiment of the present invention further provides a manufacturing method of an ultrasonic tactile feedback display device, including the steps of:
s1: depositing and etching a TFT layer on a substrate, wherein the TFT layer comprises a plurality of ultrasonic driving TFTs;
s2: depositing a pixel segmentation layer above the TFT layer, forming a plurality of first through holes on the pixel segmentation layer, arranging ultrasonic sensors in the first through holes, and enabling each ultrasonic drive TFT to correspond to one ultrasonic sensor.
According to the embodiment of the application, the deposited pixel segmentation layer is provided with the first through hole, the ultrasonic sensor is arranged in the first through hole, the TFT is driven by ultrasonic waves in the TFT layer, the ultrasonic tactile feedback system is fused with the display device, and the sizes of the sensor and the drive circuit are greatly reduced; the ultrasonic sensors can be distributed in an array mode to form an ultrasonic sensor array with the number of pixels, and the adjustable range and the touch experience of the touch feedback force are greatly improved.
Further, S1 further includes: the deposited etched TFT layer includes a plurality of pixel TFTs. The display device in the embodiment of the application comprises the ultrasonic sensors and the light-emitting units, wherein the ultrasonic sensors and the light-emitting units are respectively arranged in the first through holes and the second through holes formed in the pixel segmentation layer, and the number of the ultrasonic sensors is set according to actual requirements.
Further, S2 further includes: and forming a plurality of second through holes on the pixel division layer, arranging light-emitting units in the second through holes, wherein each light-emitting unit corresponds to one pixel driving TFT, the ultrasonic sensor is electrically connected with the lower electrode, and the light-emitting units are electrically connected with the anode electrode. In the embodiment of the application, the ultrasonic sensor and the light-emitting unit are arranged in the pixel division layer, so that the integration of an ultrasonic tactile feedback system and a display device is realized, and the sizes of the sensor and a driving circuit are greatly reduced.
Further, step S2 is preceded by: depositing a resin layer on the TFT layer, forming a plurality of third through holes and a plurality of fourth through holes on the resin layer, depositing an electrode layer above the resin layer, wherein the electrode layer comprises a lower electrode electrically connected with the ultrasonic sensor and an anode electrode electrically connected with the light-emitting unit, the lower electrode is electrically connected with the ultrasonic drive TFT through the third through hole, and the anode electrode is electrically connected with the pixel drive TFT through the fourth through hole.
The ultrasonic tactile feedback display device is manufactured from bottom to top, a pixel TFT and an ultrasonic drive TFT are etched on a substrate firstly, then a resin layer is deposited upwards, a lower electrode and an anode electrode are formed on the resin layer, then a pixel dividing layer is formed upwards on the resin layer, a pixel area and an ultrasonic sensor area are respectively arranged on the pixel dividing layer, a second through hole and a first through hole are respectively arranged in the areas, and a light-emitting unit and an ultrasonic sensor are arranged in the through holes in the specific areas; the lower electrode and the anode electrode in the embodiment are arranged above the resin layer and are respectively connected with the corresponding driving circuit through the third through hole and the fourth through hole, the lower electrode is connected with the ultrasonic driving TFT and the ultrasonic sensor, and the anode electrode is connected with the pixel driving TFT and the light-emitting unit to realize electric connection.
Further, the method also comprises the step of S3: a cathode electrode layer is arranged above the pixel division layer, and the cathode electrode layer is electrically connected with the light-emitting unit and the ultrasonic sensor;
s4: conducting TFE encapsulation on the cathode electrode layer. A cathode electrode layer, which is a patterned cathode, is formed on the uppermost surface. The TFE encapsulation is carried out above the cathode electrode layer, the TFE encapsulation layer is thin, and the ultrasonic sensor arranged below the TFE encapsulation layer is very close to the surface, so that the ultrasonic energy of the ultrasonic sensor can be reserved to the maximum extent.
Further, "disposing an ultrasonic sensor in the first through hole" specifically includes the steps of:
depositing a layer of SiO over the lower electrode2；
Depositing a silicon nitride layer above the vacuum cavity, etching a plurality of etching holes penetrating through the upper surface and the lower surface of the silicon nitride layer on the silicon nitride layer,
depositing a porous silicon layer over the silicon nitride layer;
etching the SiO through the holes in the porous silicon and the etch holes2To form a vacuum chamber.
FIG. 2 is a schematic structural diagram of a single ultrasonic sensor, and a flow chart of the manufacturing method is shown in FIG. 4, wherein a lower electrode is formed on a resin layer, and a layer of SiO is directly deposited on the formed lower electrode in the manufacturing of the ultrasonic tactile feedback display device2And then, subsequent steps are carried out, the deposited silicon nitride layer and the porous silicon layer jointly form a film, namely a vibrating diaphragm of the ultrasonic sensor, the optimal emission frequency of the device is determined by the thickness and the material selection of the film, the ultrasonic sensor is controlled by the ultrasonic sensor driving TFT, and the ultrasonic sensor can be controlled to emit ultrasonic waves with different frequencies by changing the driving voltage.
Further, an upper electrode is formed over the porous silicon layer. The ultrasonic sensor itself in this embodiment may be provided with an upper electrode, and the upper electrode of the ultrasonic sensor is electrically connected to the cathode electrode layer, or the ultrasonic sensor itself is not provided with an upper electrode, and shares the cathode electrode layer with the light-emitting unit as the upper electrode, and the two cases do not affect the final result of the display device in this application.
The embodiment of the invention also provides an ultrasonic tactile feedback display system, which comprises the ultrasonic tactile feedback display device, a gesture capturing device and a driving module,
the gesture capturing device is used for acquiring gesture coordinates and sending the gesture coordinates to the driving module;
the driving module is used for receiving the gesture coordinates, analyzing object attributes of the picture corresponding to the coordinate position, calculating parameters of each force focus point according to the object attributes and transmitting the parameters to the ultrasonic tactile feedback display device;
the ultrasonic tactile feedback display device is used for generating an acoustic focusing point at a corresponding position.
The embodiment further provides an ultrasonic tactile feedback display system, which captures a gesture coordinate through a gesture capture device and feeds the gesture coordinate back to a driving module, wherein the driving module analyzes the image object attribute corresponding to the touch position, for example, the force applied to a hand is small corresponding to the cotton being soft, the force applied to a cup is large corresponding to the cup being hard, the force difference between the adjacent points of a rough object is large, the force difference between the adjacent points of a smooth object is small, and the like; and calculating parameters of each force focusing point and transmitting the parameters to a display device, and controlling the ultrasonic sensor to generate sound focusing points at corresponding positions by the ultrasonic drive touch feedback display device so that hand feeling is subjected to forces with different magnitudes.
The gesture capturing device in this embodiment may be a camera device such as tof (time of flight), structured light, double vision, or the like, or may be a device such as ultrasonic wave, radar, or the like, as long as it can capture gesture information and provide three-dimensional coordinates of a hand.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention as referred to in the present application is not limited to the embodiments with a specific combination of the above-mentioned features, but also covers other embodiments with any combination of the above-mentioned features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (7)
1. An ultrasonic tactile feedback display device is characterized by comprising a TFT layer, wherein the TFT layer comprises a plurality of ultrasonic driving TFTs, a pixel division layer is arranged above the TFT layer, a plurality of ultrasonic sensors are arranged on the pixel division layer, and each ultrasonic sensor corresponds to one ultrasonic driving TFT;
the TFT layer further comprises a plurality of pixel driving TFTs, a plurality of first through holes and a plurality of second through holes are formed in the pixel dividing layer, the ultrasonic sensors are arranged in the first through holes, light emitting units are arranged in the second through holes, and each light emitting unit corresponds to one pixel driving TFT;
the ultrasonic sensor array is distributed in a first through hole on the pixel segmentation layer, and the light emitting unit array is distributed in a second through hole on the pixel segmentation layer;
a resin layer is arranged between the pixel division layer and the TFT layer, a plurality of third through holes and a plurality of fourth through holes are formed on the resin layer,
the resin layer top is equipped with the electrode layer, the electrode layer include with the bottom electrode that the ultrasonic sensor electricity is connected and with the positive electrode that the luminescence unit electricity is connected, the bottom electrode passes through the third through-hole with the ultrasonic drive TFT electricity is connected, the positive electrode passes through the fourth through-hole with the pixel drive TFT electricity is connected, the layer is cut apart to the pixel is kept away from one side on TFT layer is equipped with the cathode electrode layer, the cathode electrode layer with the luminescence unit with the ultrasonic sensor electricity is connected.
2. An ultrasonic tactile feedback display device according to claim 1,
a TFE packaging layer is packaged on one side, far away from the pixel segmentation layer, of the cathode electrode layer; and a substrate is arranged on one side of the TFT layer, which is far away from the pixel segmentation layer.
3. An ultrasonic tactile feedback display device according to claim 1, wherein said ultrasonic sensor comprises said lower electrode, and a vacuum layer, a silicon nitride layer and a porous silicon layer are sequentially disposed on said lower electrode from bottom to top,
a vacuum cavity is arranged in the vacuum layer,
the silicon nitride layer is provided with a plurality of etching holes penetrating through the upper surface and the lower surface of the silicon nitride layer, and the etching holes are communicated with the vacuum cavity.
4. A manufacturing method of an ultrasonic tactile feedback display device is characterized by comprising the following steps:
s1: depositing and etching a TFT layer on a substrate, wherein the TFT layer comprises a plurality of ultrasonic drive TFTs, and the deposited and etched TFT layer comprises a plurality of pixel drive TFTs;
depositing a resin layer on the TFT layer, forming a plurality of third through holes and a plurality of fourth through holes on the resin layer, depositing an electrode layer above the resin layer, the electrode layer including a lower electrode electrically connected to the ultrasonic sensor and an anode electrode electrically connected to the light emitting unit, the lower electrode being electrically connected to the ultrasonic driving TFT through the third through hole, the anode electrode being electrically connected to the pixel driving TFT through the fourth through hole
S2: depositing a pixel division layer above the TFT layer, wherein a plurality of first through holes are formed in the pixel division layer, ultrasonic sensors are arranged in the first through holes, each ultrasonic drive TFT corresponds to one ultrasonic sensor, a plurality of second through holes are formed in the pixel division layer, light-emitting units are arranged in the second through holes, each light-emitting unit corresponds to one pixel drive TFT, the ultrasonic sensors are electrically connected with a lower electrode, and the light-emitting units are electrically connected with an anode electrode;
the ultrasonic sensor array is distributed in a first through hole on the pixel segmentation layer, and the light emitting unit array is distributed in a second through hole on the pixel segmentation layer;
s3: and arranging a cathode electrode layer above the pixel division layer, wherein the cathode electrode layer is electrically connected with the light-emitting unit and the ultrasonic sensor.
5. A manufacturing method of an ultrasonic tactile feedback display device according to claim 4, wherein the step of arranging an ultrasonic sensor in the first through hole specifically comprises the steps of:
depositing a layer of SiO over the lower electrode2；
Depositing a silicon nitride layer above the vacuum cavity, etching a plurality of etching holes penetrating through the upper and lower surfaces of the silicon nitride layer on the silicon nitride layer,
depositing a porous silicon layer over the silicon nitride layer;
etching the SiO through the holes in the porous silicon and the etch holes2To form a vacuum chamber.
6. The method for manufacturing an ultrasonic tactile feedback display device according to claim 4, further comprising S4: conducting TFE encapsulation on the cathode electrode layer.
7. An ultrasonic haptic feedback display system comprising the ultrasonic haptic feedback display device of any one of claims 1-3, a gesture capture device, a driving module,
the gesture capturing device is used for acquiring gesture coordinates and sending the gesture coordinates to the driving module;
the driving module is used for receiving the gesture coordinates, analyzing object attributes of the picture corresponding to the coordinate position, calculating parameters of each force focus point according to the object attributes and transmitting the parameters to the ultrasonic tactile feedback display device;
the ultrasonic tactile feedback display device is used for generating an acoustic focusing point at a corresponding position.
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| CN108376686B (en) * | 2018-02-27 | 2021-02-09 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method thereof and display device |
| CN109068245A (en) | 2018-08-01 | 2018-12-21 | 京东方科技集团股份有限公司 | Screen sounding device, singing display screen and its manufacturing method and screen sonification system |
| CN110928472B (en) * | 2018-09-19 | 2023-05-05 | 阿里巴巴集团控股有限公司 | Article processing method and device and electronic equipment |
| CN110046556B (en) * | 2019-03-27 | 2021-06-01 | 武汉华星光电技术有限公司 | Display panel and terminal device thereof |
| CN110008929A (en) * | 2019-04-16 | 2019-07-12 | 京东方科技集团股份有限公司 | CMUT unit and preparation method thereof, CMUT panel and display panel |
| CN111026275B (en) * | 2019-12-12 | 2021-02-26 | 深圳市华星光电半导体显示技术有限公司 | Electrostatic feedback display array and active driving method and circuit |
| CN114461059B (en) * | 2020-11-10 | 2024-03-05 | 京东方科技集团股份有限公司 | Display substrate, preparation method thereof and display device |
| CN113030947B (en) * | 2021-02-26 | 2023-04-07 | 北京京东方技术开发有限公司 | Non-contact control device and electronic apparatus |
| CN114442807B (en) * | 2022-01-18 | 2024-01-19 | 惠州Tcl移动通信有限公司 | Ultrasonic wave generating assembly and electronic equipment |
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