CN107577043A - MEMS optical modulator for display - Google Patents
MEMS optical modulator for display Download PDFInfo
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- CN107577043A CN107577043A CN201610520637.2A CN201610520637A CN107577043A CN 107577043 A CN107577043 A CN 107577043A CN 201610520637 A CN201610520637 A CN 201610520637A CN 107577043 A CN107577043 A CN 107577043A
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- shadow shield
- display element
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- light
- support
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Abstract
The present invention relates to the mems optical modulator for display.Electromechanical optical modulator and backlight provide effective, low cost and Performance Monitor.A kind of electromechanical display element is provided, including：Shadow shield, it has first end and the second end, it is supported by the surface using the multiple supports being attached at the first end and the second end of the shadow shield, wherein the first power for being applied to the shadow shield is in a direction substantially parallel in the plane on the surface the mobile shadow shield in the horizontal direction relative to first power.
Description
Related U.S. patent document
The U.S. Application No. 12/584,465 that September in 2009 is submitted on the 3rd, it is the B2 of United States Patent (USP) 7,995,261 now；
The U.S. Application No. 14/589,699 that on January 5th, 2015 submits；The U.S. Application No. 14/589 that on January 5th, 2015 submits,
634；The U.S. Application No. 14/589,434 that on January 5th, 2015 submits；The U.S. Application No. 14/ that on January 5th, 2015 submits
589,551；The U.S. Application No. 14/589,715 that on January 5th, 2015 submits, these are applied for reference and are included in herein.
Background of invention
Invention field
The present invention relates generally to display.More particularly it relates to include the display of electromechanical pictorial element.
The discussion of correlation technique
At present, liquid crystal display occupies flat-panel monitor staple market.Display based on electromechanical optical modulator is carried
Go out as the viable alternative to LCD.The invention discloses what can be competed in terms of image property, light efficiency and cost with LCD
Electromechanical optical modulator and display.
Summary of the invention
It is hereafter the simple description of the illustrative embodiment of the present invention.It is provided to help in this area as preamble
Technical staff quickly understand ensuing detailed design discussion, and be also not intended to limit anyway it is appended by this paper, with
Just the scope of the claim of the present invention is particularly pointed out.
Subject description discloses several electromechanical optical modulators.According to the illustrative embodiment of the present invention, modulator includes
One or two electrostatic actuator, the shadow shield supported using multiple supports on the surface of substrate, the multiple support
Frame is attached to shadow shield at the first end of shadow shield and the second end.In operation, actuator exerts a force to shadow shield.Shading
The shadow shield of board support stand limitation in the direction of the force moves and allows shadow shield substantially to be moved on the horizontal direction of power.Hide
Tabula rasa is moved without being contacted with stationary components or surface physics between the first position and the second position in a lateral direction.Often
Individual electrostatic actuator includes being positioned to substantial parallel each other and apart from two close electrodes.In some embodiments, hide
Tabula rasa is conduction and serves as one of actuator electrode.In other designs, shadow shield is included with right angle from the edge of shadow shield
The flange of extension, and form the electrostatic actuator with fixed electrode.Fixed electrode may be positioned to substantially close to flange with shape
Into effective electrostatic actuator.
Between shadow shield and surface, therefore in the display, shadow shield may be positioned to real each other shading board support stand
Approached in matter, only allow the space for being used for shadow shield and moving between them.In some modulators, shadow shield uses cantilever
Beam is supported by the surface.The method of shadow shield the invention discloses manufacture cantilever beam and by cantilever beam support.The present invention is also
Display is disclosed, it includes：Light absorbing layer with transmitance region including for anti-towards the rear portion of light absorbing layer reflected light
The backlight of emitter and multiple modulators, each modulator includes the shadow shield between backlight and light absorbing layer, described
Shadow shield has transmitance region and is used to make the light reflective surface from the light recycling of backlight transmitting towards backlight, wherein from
Backlight is mapped to the light on the transmitance region of shadow shield, and light absorbing layer is transmitted through when shadow shield is at first position
Transmitance region, and absorbed when shadow shield is in the second place in light absorbing layer.
The invention also discloses another display, and it includes：Multiple modulators, each modulator include having transmitance region
Shadow shield；And the substrate with surface and multiple embedded reflective optical systems, wherein the embedded reflective optical system make light from
Leave substrate and be focused at the corresponding transmitance region of shadow shield in the surface of substrate.
Other purposes of foregoing teachings and the present invention are illustrated and are described in ensuing specification in the accompanying drawings.
The brief description of accompanying drawing
Figure 1A is the perspective view according to the optical occluder component of the illustrative embodiment of the present invention.
Figure 1B is the front view of the optical occluder component shown in Figure 1A.
Fig. 2A is the top view for manufacturing the exemplary mold of the optical occluder component shown in Figure 1A.
Fig. 2 B are the sectional views intercepted along the line 2B in Fig. 2A.
Fig. 3 A are the perspective views according to the optical modulator of the illustrative embodiment of the present invention.
Fig. 3 B are the front views of the optical modulator shown in Fig. 3 A.
Fig. 3 C are the front views of optical modulator shown in figure 3 a, show that shadow shield is located at first position.
Fig. 3 D are the front views of optical modulator shown in figure 3 a, show that shadow shield is located at the second place.
Fig. 4 A are the perspective views according to the optical modulator of the illustrative embodiment of the present invention.
Fig. 4 B are the front views of the optical modulator shown in Fig. 4 A.
Fig. 5 A are the perspective views according to the optical modulator of the illustrative embodiment of the present invention.
Fig. 5 B are the front views of the optical modulator shown in Fig. 5 A.
Fig. 6 A are the perspective views according to the optical modulator of the illustrative embodiment of the present invention.
Fig. 6 B are the side views of the optical modulator shown in Fig. 6 A.
Fig. 6 C are the perspective views for showing the shading board support stand in the optical modulator shown in Fig. 6 A.
Fig. 6 D are the top views of the optical modulator shown in Fig. 6 A.
Fig. 6 E are the top views of optical modulator shown in fig. 6, show that shadow shield is located at first position.
Fig. 6 F are the top views of optical modulator shown in fig. 6, show that shadow shield is located at the second place.
Fig. 7 A are the top views according to the optical modulator of the illustrative embodiment of the present invention.
Fig. 7 B are the side views of the optical modulator shown in Fig. 7 A.
Fig. 7 C are the top views for showing the shading board support stand in the optical modulator shown in Fig. 7 A.
Fig. 7 D are the top views of optical modulator shown in fig. 7, show that shadow shield is located at first position.
Fig. 8 A are the perspective views according to the shading board support stand of the illustrative embodiment of the present invention.
Fig. 8 B are the perspective views for manufacturing the mould of the shading board support stand shown in Fig. 8 A.
Fig. 8 C are to show being intercepted along the line C-C in Fig. 8 B the step of for manufacturing the shading board support stand shown in Fig. 8 A
Sectional view.
Fig. 8 D are to show top view the step of for manufacturing the shading board support stand shown in Fig. 8 A.
Fig. 8 E are to show front view the step of for manufacturing the shading board support stand shown in Fig. 8 A.
Fig. 8 F are to show front view the step of for manufacturing the shading board support stand shown in Fig. 8 A.
Fig. 8 G are to show top view the step of for manufacturing the shading board support stand shown in Fig. 8 A.
Fig. 8 J are to show side view the step of for manufacturing the shading board support stand shown in Fig. 8 A.
Fig. 9 A are the perspective views according to the shadow shield of the illustrative embodiment of the present invention.
Fig. 9 B are the perspective views for manufacturing the mould of the shadow shield shown in Fig. 9 A.
Fig. 9 C are to show the section intercepted along the line C-C in Fig. 9 B the step of for manufacturing the shadow shield shown in Fig. 9 A
Figure.
Fig. 9 D are to show perspective view the step of for manufacturing the shadow shield shown in Fig. 9 A.
Fig. 9 E are to show the section intercepted along the line E-E in Fig. 9 D the step of for manufacturing the shadow shield shown in Fig. 9 A
Figure.
Fig. 9 F are to show the section intercepted along the line F-F in Fig. 9 D the step of for manufacturing the shadow shield shown in Fig. 9 A
Figure.
Figure 10 A are the perspective views according to the display backlight of the illustrative embodiment of the present invention.
Figure 10 B are the side views of the display backlight shown in Figure 10 A.
Figure 10 C are the zoomed-in views in the region for being appointed as 10C in fig. 1 ob.
Figure 11 A to Figure 11 D are to show have embedded light anti-according to the manufacture that is used for of the illustrative embodiment of the present invention
The sectional view of the step of photosphere of emitter.
Figure 12 A to Figure 12 C are to show have embedded light anti-according to the manufacture that is used for of the illustrative embodiment of the present invention
The sectional view of the step of substrate of emitter.
Figure 13 A are the plans according to the display cover component of the illustrative embodiment of the present invention.
Figure 13 B are the sectional views intercepted along the line 13B in Figure 13 A.
Figure 14 A are according to the sectional view of the display of the illustrative embodiment of the present invention, show shadow shield positioned at the
One opening position.
Figure 14 B are the sectional views of the display shown in Figure 14 A, show that shadow shield is located at the second place.
Figure 15 A are according to the sectional view of the display of the illustrative embodiment of the present invention, show shadow shield positioned at the
One opening position.
Figure 15 B are the sectional views of the display shown in Figure 15 A, show that shadow shield is located at the second place.
Description of the invention
Figure 1A be according to the present invention illustrative embodiment optical occluder component 100 perspective view and Figure 1B is its forward sight
Figure.The shadow shield that optical occluder component 100 supports including the use of support 104 and 105 on the surface 103 of transparent substrates 102
101.Support 104 is attached at the first end 106 of shadow shield 101, and support 105 is attached at the second end of shadow shield 101
At 107.Support 104 and 105 be substantially it is straight, and tilt relative to each other and relative to surface 103 and with surface 103
The angle 113 formed between 70 degree and 85 degree.Support 104 and 105 is more than the support 104 and 105 on shadow shield 101
115 distance 114 of the distance between attachment point at the surface 103 of substrate 102 is attached to using pad 109.Optical occluder component
100 may be configured to have be angled with respect to each other and the support on surface 103 be attached at the distance 114 less than distance 115
104 and 105.Support 104 and 105 and pad 109 are constructed by thin conductive material and provided from surface 103 to shadow shield 101
Electrical connection.Shadow shield 101 is also constructed by thin conductive material or plural layers including conductive layer.Shadow shield 101 includes light transmission
Area 108 and photoresistance every or Resistance 110.Light blocking area 110 is bigger (wider and longer) than transmitance region 108.Transmitance region 108
The light of 90% light being mapped on transmitance region 108 or more, and light blocking area 110 stops at least 99% light.
The outward flange of shadow shield 101 or all edge bevels are to prevent shadow shield 101 from bending.Can be on mould by metal
(such as aluminium and silicon alloy) manufactures shadow shield 100.In one implementation, all surface of shadow shield 101 can have light absorbs face
Paint.In a further implementation, shadow shield 101 can have light reflection first surface 120 and light absorbs second surface 121.Light reflects table
80% or more light is reflected in face 120, and light-absorbing surface 121 absorbs the light of 80% light or more.
Deposited aluminum layer will provide specular first surface 120, and black oxidation to shadow shield 101 on the smooth surface of mould
Nitride layer can be formed by anodic oxidation on second surface 121.Black oxidation nitride layer can after transmitance region 108 is corroded shape
Into so the inward flange of transmitance region 108 will be covered with black oxidation nitride layer.
In addition, chromium oxide or niobium can deposit or black organic resin may be used on the surface of shadow shield 101 to form light absorbs
Surface.
Without limitation, the part of optical occluder component 100 can have following size.Shadow shield 101 can have
There are the width 115 between 50 microns to 1000 microns and the thickness from 0.5 micron to 5 microns.Transmitance region 108 can have from
2 microns to 50 microns of width 122.Support 104 and 105 can have width from 2 microns to 20 microns and from 0.5 micron to
5 microns of thickness.Support 104 and 105 can have the length 112 of 122 big 1.5 times to 3 times of the width than transmitance region 108.
Fig. 2A and Fig. 2 B show the mould 200 for manufacturing optical occluder component 100.Fig. 2A is the top view of mould 200, and
Fig. 2 B are the viewgraph of cross-section intercepted along the line 2B in Fig. 2A.
Mould 200 is constructed on the surface 103 of substrate 102 using gray level or multiple mask lithography methods.Sacrificial material layer
201 are deposited on surface 103.Groove 203 and recessed area 206 are formed on the surface 205 of layer 201.By deposition and it is selective
The thin layer of conducting film of the ground corrosion on the surface of mould 200 constructs optical occluder component 100.Support 104 and 105 is in groove
Formed in 203 side wall 204.Side wall 204 has relative to surface 103 and the identical inclination angle 113 of support 104 and 105.It is recessed
Enter the shadow shield 101 that area 206 is arranged to construct the edge with bevel.The edge of bevel helps prevent the shape of shadow shield 101
It is arcuate or curved.The direction of conductive material and the combination of conformal deposit can be used for control support 104 and 105 and shadow shield
101 relative thickness.
Fig. 3 A to Fig. 3 D show the optical modulator 300 of the illustrative embodiment according to the present invention.
With reference to figure 3A and Fig. 3 B, modulator 300 includes Figure 1A optical occluder component 100 and cap assemblies 303.Cap assemblies 303
The transparent substrates 304 supported including the use of dividing plate 306 and 307 on the surface 103 of substrate 102.Two electrodes 308 and 309
Formed on the inner surface 305 of substrate 304.
Electrode 308 and the first electrostatic actuator 311 of formation of conductive shadow shield 101, and electrode 309 and conductive shadow shield 101
Form the second electrostatic actuator 312.In operation, the voltage potential being applied between electrode 308 and shadow shield 101 produces will be attached
The support 104 at the first end 106 of shadow shield 101 is connected on to move to relative to the almost upright position and by shading of surface 103
The transverse shifting of plate 101 (Fig. 3 C) arrives the electrostatic force (Fig. 3 C) of first position, or is applied between electrode 309 and shadow shield 101
Voltage potential generation moves the support 105 being attached at the second end 107 of shadow shield 101 to almost straight relative to surface 103
Vertical position and the electrostatic force (Fig. 3 D) that the transverse shifting of shadow shield 101 (Fig. 3 C) is arrived to the second place.
The mechanical force stored in support 104 and 105 returns to shadow shield 101 from first position or the second place
To mechanical static or neutral position as shown in FIG 3 B.
In modulator 300, the first actuator 311 and the second actuator 312 each substantially in a same direction will
Power is applied to shadow shield 101 and in the opposite direction transverse shifting shadow shield 101.
In fig. 3 c, arrow 314 indicates to be applied to the direction of the power of shadow shield 101 by the first actuator 311, and arrow
315 instruction shadow shields 101 are from mechanical resting position to the direction of the transverse movement of first position.Shadow shield 101 is static from machinery
Position moves laterally to first position than on the direction for the power for being applied to shadow shield 101 by the first actuator 311 more at least five
Again (at least five times).
In fig. 3d, arrow 316 indicates to be applied to the direction of the power of shadow shield 101 by the second actuator 312, and arrow
317 indicate by the direction of the transverse movement of shadow shield 101 to the second place.
Increased voltage is applied to actuator 311 and the voltage of reduction is applied to actuator 312, will be in first position
The gradual mobile shade between the second place, or fixed voltage is applied to actuator 311 and variable voltage is applied to cause
Dynamic device 312 also will gradual mobile shade between the first position and the second position.
In the display, electrode 308 and 309 can form wider and by the optical occluder component in continuous row or column
Share.
Fig. 4 A and Fig. 4 B show the optical modulator 400 of the illustrative embodiment according to the present invention.Modulator 400 includes hiding
Light panel components 401 and cap assemblies 418.Optical occluder component 401 is including the use of support 406 and 407 on the surface of transparent substrates 402
The shadow shield 410 supported on 403.Support 407 is attached at the first end 408 of shadow shield 410, and support 406 is attached
At the second end 409 of shadow shield 410.Shadow shield 410 is formed by electrical insulator or dielectric substance and including transmitance region 411
With light blocking area 412.Shadow shield 410 also includes first electrode 405 and second electrode 404.Support 407 is provided from surface 403
To the electrical connection of electrode 405, and support 406 provides the electrical connection from surface 403 to electrode 404.
The transparent substrates 413 that cap assemblies 418 support including the use of dividing plate 416 and 417 on surface 403.Cap assemblies 418 are also
It is included in the transparency conducting layer 415 formed on the inner surface 414 of substrate 413 by the material of for example thin indium oxide.
In modulator 400, the first electrode 405 with conductive layer 415 forms the first electrostatic actuator 418, and has
The second electrode 404 of conductive layer 415 forms the second electrostatic actuator 419.
In operation, the first actuator moves support 407 relative to the almost upright position and by shading of surface 403 to
Plate 410 moves laterally to first position, and the second actuator moves support 406 relative to the almost upright position of surface 403 to
Put and shadow shield 410 is moved laterally into the second place.The mechanical force stored in support 406 and 407 is by shadow shield
410 return to mechanical static or neutral position from first position or the second place, as shown in figure 4b.
Fig. 5 A and 5B show the optical modulator 500 of the illustrative embodiment according to the present invention.Modulator 500 is included in base
The dividing plate 508 and 509 and optical occluder component 503 formed on the surface 502 at bottom 501 by polymer.Optical occluder component 503 includes
Shadow shield 507 and formed by conductive material and using conductive welding disk 512 and 513 be attached to dividing plate 508 and 509 shadow shield support
Frame 505 and 506.
Modulator 500 also includes two electrodes 510 and 511 formed on the surface 502 of substrate 501.Electrode 510 and lead
Electric shadow shield 507 forms the first electrostatic actuator 514, and electrode 511 and conductive shadow shield 507 form the second electrostatic actuator
515。
Optical occluder component 503 can be similarly constructed with optical occluder component 401, and two electrodes 510 and 511 can be with transparent
Conductive layer replaces.
Fig. 6 A to Fig. 6 F show the optical modulator 600 of the illustrative embodiment according to the present invention.With reference to figure 6A to Fig. 6 C,
Modulator 600 includes the shadow shield 601 by conductive material construction and including transmitance region 602 and light blocking area 603.
Shadow shield uses between shadow shield 601 and surface 605 and substantial formed in the border of shadow shield 601
Four cantilever beams 606 and 607 are supported on the surface 605 of substrate 604 (Fig. 6 C).The first end of each cantilever beam 606 and 607
Surface 605 is attached to using binding post 609 and conductive welding disk 610, and the second end is attached to shadow shield 601 using binding post 608.
Cantilever beam 606 is attached at the first end 618 of shadow shield 601, and cantilever beam 607 is attached at the second end 617 of shadow shield 601
Place.Beam 606 and 607 is positioned to be spaced apart the first gap 619 substantially parallel to surface 605 and with surface 605.Beam 606 and 607
It is also positioned to be spaced apart the second gap 620 substantially parallel to shadow shield 601 and with shadow shield 601.Cantilever beam 606 and 607 can
It is formed thin and long so that its flexible or warpage is without sizable power.In addition, beam 606 and 607 can be formed with
It is vertically oriented to surface 605 to support enough height of the weight of shadow shield 601.
Shadow shield 601 is additionally included in the first end or edge 618 from shadow shield 601 in 5 degree of from normal to surface 605
The first flange 613 extended towards surface 605.Shadow shield 601 be additionally included in 5 degree of from normal to surface 605 from second
The second flange 615 that edge 617 extends towards surface 605.
Beam 606 and 607 is relative to (the figure of angle 628 that the surface 629 of flange 613 tilts and is formed between 70 degree to 89 degree
6D)。
Modulator 600 also includes two electrodes 614 and 616 extended from surface 605 close to right angle.Electrode 614 uses
Conductive welding disk 611 is attached to surface 605, and electrode 616 is attached to surface 605 using conductive welding disk 612.Electrode 614 and flange
613 form the first electrostatic actuator 622, and electrode 616 and flange 615 form the second electrostatic actuator 621.
In operation, the first power 625 is applied to shadow shield 601 by actuator 622, and drawing is attached at the first of shadow shield 601
Hold the beam 606 at 618 and shadow shield 601 is substantially moved to first in the horizontal direction 626 relative to the first power 625
Put (Fig. 6 E), and the second power 627 is applied to shadow shield 601 by actuator 621, drawing is attached at the second end 617 of shadow shield 601
Beam 607 and substantially in the horizontal direction 628 relative to the second power 627 by shadow shield 601 be moved to the second place (figure
6F).Shadow shield 601 is on horizontal direction 626 than more movements at least 5 times of (at least on the direction of the first power 625
5times)。
The mechanical force stored in beam 606 and 607 by shadow shield 601 from first position or the second place return to as
Shown mechanical static or neutral position in figure 6d.Shadow shield 601 is in a direction substantially parallel in the plane on surface 605 first
Moved between position and the second place.
When shadow shield 601 is moved to first position (Fig. 6 E) from mechanical resting position (Fig. 6 D), beam 607 is being attached to
Linear range increase between the binding post 608 and 609 of end.For this reason, beam 607 is formed as slight curvature to compensate
Linear range increase between binding post 608 and 609.
Fig. 7 A to Fig. 7 D show the optical modulator 700 of the illustrative embodiment according to the present invention.Modulator 700 include by
Conductive material construction shadow shield 701 and including transmitance region 702 and light blocking area 703.Shadow shield 701 is additionally included in first end
The first flange 708 of shadow shield 701 is attached at 706.Shadow shield 701 is supported in substrate using four cantilever beams 712 and 714
On 705 surface 704 (Fig. 7 C).
The first end of each cantilever beam 712 and 714 is attached to surface 704 using binding post 716 and conductive welding disk 717, and
Second end is attached to shadow shield 701 using binding post 715.Cantilever beam 714 is attached at the first end 706 of shadow shield 701, and is hanged
Arm beam 712 is attached at the second end 707 of shadow shield 701.Cantilever beam 712 and 714 is substantially straight.The phase of cantilever beam 714
The angle 717 for tilting and being formed between 70 degree to 89 degree for flange 708, and cantilever beam 712 is formed close to 90 with flange 708
The angle 731 of degree.
Modulator 700 also includes from surface 704 vertically extending and being attached to the electricity on surface 704 using conductive welding disk 710
Pole 709.The flange 708 of electrode 709 and shadow shield 701 forms electrostatic actuator 711.
In operation, actuator 711 pulls up the beam 714 being attached at the first end 706 of shadow shield 701 in direction 720 simultaneously
Shadow shield 701 is moved to first position (Fig. 7 D) substantially on the horizontal direction 721 relative to direction 720.In the He of beam 712
Shadow shield 701 is returned to mechanical static or neutral position (Fig. 7 A) by the mechanical force stored in 714 from first position.Shading
Moved between the position that plate 701 is in a direction substantially parallel in the plane on surface 704.
Modulator 700 may also include formed by the second flange 722 that shadow shield 701 is attached at the second end 707
Two electrostatic actuators 725 and vertically extend from surface 704 and the second electrode on surface 704 is attached to using conductive welding disk 724
723.In modulator 700, support 712 limits shadow shield 701 and second flange 722 to be moved closer to second electrode
723, so as to which second electrode 723 can closely be sentenced to form effective actuator positioned at second flange 722.
In the display, processes pixel voltage can be applied to the second actuator 725 and be used to optionally protect shadow shield 701
Hold at mechanical neutral position.
Fig. 8 A to Fig. 8 F are shown similar to illustrative embodiment in modulator 600 and 700, according to the present invention
The manufacturing step of shading board support stand 800.Fig. 8 A show the shading board support stand 800 for including cantilever beam 803.The first of beam 803
End is attached to first binding post 804 on the surface 801 that beam 803 is connected to substrate 802 using pad 805, and the second of beam 803
End is connected to the second binding post 806 of shadow shield after being attached to.First binding post 804 and the second binding post 806 each have
Three sides and top.
Support 800 is formed on mould 807.First manufacturing step is by expendable material on the surface 801 of substrate 802
Form mould 807 (Fig. 8 B).Shape of the mould 807 formed with rectangular prism simultaneously has four side walls 808,809,810 and 811 and
Top 812.Side wall is vertically oriented with surface 801 in +/- 5 degree relative to normal.Following step is to pass through magnetic control
Pipe sputtering to deposit the conformal layer of conductive material 814 on the surface of mould 807 and surface 801 and passes through electrophoretic deposition or spray
Apply the conformal layer of positive photoresist 815 coated in (Fig. 8 C) on conductive layer 814.
Next step be the first photomask 816 is positioned on mould 807 (Fig. 8 D) and with the divergence less than 2 degree and
Relative to the collimation at the inclination angle 817 between 45 degree to 75 degree and the UV light sources of inclined ray on surface 801 from the He of side wall 808
Illuminate photoresist layer 815 (Fig. 8 E and 8F) in 809 direction.The photomask 816 of mould 807 and first stops next comfortable photic anti-
The UV light in the area in oxidant layer 815 is lost, these regional boundaries are scheduled on cantilever beam 803, the first binding post 804, the second binding post 806 and pad
805 geometry.Another step is that the second photomask 818 is positioned on mould 807 into (Fig. 8 G) and from the side of side wall 811
To illuminating photoresist layer 815 (Fig. 8 J).This will illuminate the photoresist layer 815 applied in the lower part of side wall 811.
If the second binding post 806 can omit formed with the only both sides formed in the side wall 808 and 809 of mould 807 and top
Step shown in Fig. 8 G and 8J.
After being illuminated from all three directions, photoresist layer 815 is developed, and the unprotected area of conductive layer 814
It is removed by corroding.The cantilever beam 803 formed on mould 807 has the width of the thickness equal to conductive layer 814.
, can be using photoresist in the case where conductive layer 814 is formed by the material (such as aluminium) that can reflect UV light
Light absorbing layer is applied or formed on conductive layer 814 before layer 815.This will reduce the UV light from horizontal surface and vertical surface
Reflection.In order to reduce the reflection from the surface of photoresist layer 815, mould and mask, which can immerse, to be had and photoresist
In the liquid of the similar refractive index of oxidant layer 815.
Fig. 9 A to Fig. 9 F be shown similar to modulator 600 and 700, according to the present invention illustrative embodiment shading
The manufacturing step of plate 900 and electrode 905.
Fig. 9 A show the shadow shield 900 for including transmitance region 901 and flange 902.Shadow shield 900 is connected to recited above
The binding post 806 of support 800.Fig. 9 A also illustrate the electrode 905 on the surface 801 that substrate 802 is attached to using pad 904.
First manufacturing step is formed including two Hes of rectangular prism 911 on the surface 801 of substrate 802 by expendable material
912 mould 910 (Fig. 9 B).Prism 911 includes four side walls 914,915,916,917 and top 918.Prism 912 includes four
Individual side wall 920,921,923,924 and top 925.Side wall is vertically oriented relative to surface 801 in +/- 5 degree from normal.It is logical
Hole 926 is formed for shadow shield 900 to be connected to the binding post 806 of support 800 on the top 918 of prism 911.
Following step be the conformal layer of conductive material 930 is deposited on the surface and surface 801 of mould 910 and
The conformal layer of negative photoresist 931 is deposited on conductive layer 930 (Fig. 9 C).
Next step is that photomask 932 is positioned on mould 900 into (Fig. 9 D) and used from the direction of side wall 916 and 924
UV light sources with collimation and inclined ray illuminate photoresist layer 931 (Fig. 9 E and 9F).
Mask 932, which stops, applies the light on the surface of side wall 915,916,917,920 and 923 and the area of top surface 918
The UV light irradiations of resist layer 931 are caused, the transmitance region 901 of shadow shield 900 is formed in the area of top surface 918.Mould hinders
Keep off the lower part (wherein flange 902 and electrode 905 is formed in the lower part) on the surface of side wall 914 and 921 and in side wall 914
And the part on the surface 801 between 921.
After being illuminated from both direction, photoresist layer 931 is developed and the unprotected area of conductive layer 930 is rotten
Erosion.
Next step is removal sacrifice layer and discharges shadow shield 900 and support 800.
Shadow shield 900 can be formed to include flange, such as the flange 902 on all four edges of shadow shield 900.
These flanges effectively can prevent veiling glare from leaving display, so as to improve contrast.
Figure 10 A, 10B and 10C show the display backlight 1000 of the illustrative embodiment according to the present invention.Figure 10 A
It is the perspective view of backlight 1000, Figure 10 B are the side views of backlight 1000, and Figure 10 C are designated as 10C's in fig. 1 ob
The zoomed-in view in region.
Backlight 1000 includes the other transparent of the refractive index n1 by acrylic resin or with value between 1.45 and 1.6
The fiber waveguide 1001 of the usual plane of material construction.Fiber waveguide 1001 includes top surface 1002, basal surface 1003, relative side table
Face 1004 and 1005 and light input end 1006.Basal surface 1003 is tilted relative to top surface 1002 and formed with about
The angle 1009 (Figure 10 B) of value between 0.1 degree to 2.0 degree.Basal surface 1003 away from light input end 1006 direction on top
Assemble together on surface 1002.
Backlight 1000 also includes the light absorping film 1010 of the nearside of basal surface 1003 positioned at fiber waveguide 1001 and positioned at light
The multiple light sources 1011 of the nearside of input 1006.
Backlight 1000 is also included by the substantially transparent material of the refractive index n2 with value between about 1.45 and 1.6
Expect the first photosphere 1015 of construction.First photosphere 1015 includes light exit surface 1016, optical input surface 1017 and defeated positioned at light
Enter multiple embedded reflective optical systems 1018 between surface 1017 and light exit surface 1016.Reflective optical system 1018 is reflected by glimmer
Material (such as aluminium or silver) formation.Reflective optical system 1018 can be with substantially planar surface or with about 20 microns to 80
The curved surface of the cross section of the radius of curvature of micron.Reflective optical system 1018 tilts relative to the top surface 1002 of fiber waveguide 1001
And form the angle 1026 with the value between about 20 degree and 40 degree.
Backlight 1000 is additionally included in the optical input surface 1017 of the first photosphere 1015 and the top surface of fiber waveguide 1001
The second photosphere 1020 formed between 1002.Folding of second photosphere 1020 by fluoropolymer or with value about 1.3 and 1.4
Penetrate rate n3 other substantially transparent material constructions.
In operation, from the light ray 1023 that the light input end 1006 of fiber waveguide 1001 enters from top surface 1002 and bottom table
Face 1003 is reflected, and changes angle towards relative to the normal of top surface 1002.When the incidence angle to top surface 1002 is less than by light
During critical angle 1024 (Figure 10 C) that the refractive index n3 of the refractive index n1 of waveguide 1001 and the second photosphere 1020 is defined, light ray
1023 leave fiber waveguide 1001.Enter the first photosphere through the light ray 1023 of the second photosphere 1020 from optical input surface 1017
1015 and change the angle that is defined by the refractive index n2 of the first photosphere 1015.Into most of light ray 1023 of the first photosphere 1015
Internally reflected from light exit surface 1016.Light ray from embedded reflective optical system 1018 by reflecting come from light exit surface
1016 leave the first photosphere 1015.The light ray reflected from bending reflective optical system 1018 leaves the first light from light exit surface 1016
Layer 1015 is simultaneously focused at from 1025 with a distance from light exit surface 1016.
Backlight 1000 may also include transparent substrates such as substrate of glass and be inserted in the first photosphere 1015 and the second photosphere
Dichroic filter layer between 1020.
Shown in Figure 11 A to Figure 11 D for manufacturing the photosphere with embedded reflective optical system or light reflective facets 1106
1108 the step of.In step (A), micro prism is constructed in substrate 1103 by transparent UV solidification liquid polymerses using photoetching process
1101.In step (B), substrate 1103 tilts (Figure 11 B) on angle 1105, and the extension 1104 of micro prism 1101 is by phase
Same liquid polymers is formed.Also it may be molded the micro prism 1101 with extension 1104.In step (C), mirror coating
It is deposited in each facet of extension 1104 to form light reflective facets 1106.In step (D), groove 1107 is filled with
Identical UV solidifies liquid polymers.Figure 11 D show the complete construction with the photosphere 1108 of embedded smooth reflective facets 106.
Photosphere 1108 can combine with the optical occluder component 100 or 401 in modulator 300 and 400 disclosed above.Photosphere
1108 can be built into substrate and between shading board support stand before optical occluder component 100 or 401 is constructed.For tool
There is the modulator 500,600 or 700 of the shadow shield closely located positioned at the surface from substrate, embedded reflective optical system can be by structure
Make in the substrate.
Figure 12 A, 12B and 12C show there is embedded reflective optical system according to the manufacture of the illustrative embodiment of the present invention
The step of 1205 substrate of glass 1200.First step is groove 1203 of the corrosion in substrate of glass 1200.Ensuing three
Individual step is similar to steps described above B, C and D.Second step is to tilt substrate 1200 and solidify liquid polymers by UV
Formed in the extension 1204 of each inside grooves.Third step is that mirror coating is deposited on extension 1204 with shape
Into light reflective facets 1205.Four steps is with identical UV solidification liquid polymer-filled grooves.Figure 12 C show to be configured with embedding
Enter the substrate of glass 1200 of formula reflective optical system 1205.The polymer of solidification preferably has substantially the same with substrate of glass 1200
Refractive index.In backlight 1000, the first photosphere 1015 can be replaced with substrate of glass 1200, and modulator 500,600
Or 700 can be built into substrate of glass 1200.
Figure 13 A and Figure 13 B show the display cover component 1400 of the illustrative embodiment according to the present invention.Cap assemblies
1400 include the transparent substrates 1401 with first surface 1402 and second surface 1403.Cap assemblies 1400 are additionally included in the first table
The light diffusion layer 1404 formed on face 1402 and the light absorbing layer 1405 formed on light diffusion layer 1404.For micro- with 200
The thin substrate of rice or smaller thickness, diffusion layer 1404 can be formed on second surface or outer surface 1403, and light absorbing layer
1405 can form on the inner surface 1402 of substrate 1401.Light absorbing layer 1405 includes transmitance region 1407 and opaque light absorbs
Area 1406.Cap assemblies 1400 may also include electrode, such as the opaque light in the light absorbing layer 1405 with light reflection mirror surface
Electricity in the electrode 308 and 309 or transparency conducting layer (such as in modulator 400) of the modulator 300 formed on uptake zone 1406
Pole 415.
Light absorbing layer 1405 can be formed by conductive material.Conductive light absorption layer 1405 may act as EMI in the display or
The electrode of electrostatic screen or actuator (such as actuator in modulator 400).
The light of absorbable 80% light being mapped on opaque light uptake zone 1406 of light absorbing layer 1405 or more and transmission
Light less than 1%.
Display based on electromechanical optical modulator may include to be arranged in a large amount of modulators in row and column.In the display
Each pictorial element or pixel may include one or more modulators.For illustrative purpose, accompanying drawing below shows only one
The display of individual modulator.
Figure 14 A and Figure 14 B show the viewgraph of cross-section of the display 1500 of the illustrative embodiment according to the present invention.It is aobvious
Show that device 1500 includes cap assemblies 1501, modulator 1502 and the backlight 1503 including back reflector 1504.Cap assemblies 1501
The light diffuser layer 1506 that is formed including transparent substrates 1505, on the first surface 1507 of substrate 1505 and in light diffuser layer
The light absorbing layer 1508 formed on 1506.Light absorbing layer 1508 includes transmitance region 1509 and opaque light uptake zone 1510.Adjust
Device 1502 processed includes the shadow shield 1511 with transmitance region 1514 and light blocking area 1515.Towards the shadow shield of backlight 1503
1511 surface is light reflective surface, and towards the surface of light absorbing layer 1508 be light-absorbing surface.The light of light absorbing layer 1508
Transmission area 1509 is bigger and smaller than the light blocking area 1515 of shadow shield 1511 than the transmitance region 1514 of shadow shield 1511.In Figure 14 A
Middle shadow shield 1511 is on first position or on-position, and shadow shield 1511 is in the second place or open position in Figure 14 B
On.The light 1520 of the transmitance region 1514 of shadow shield 1511 is mapped to from backlight 1503, when shadow shield 1511 is in first position (figure
Be transmitted through the transmitance region 1509 of light absorbing layer 1508 when on 14A), and when shadow shield when on the second place (Figure 14 B)
Absorbed in light absorbing layer 1508.The light being mapped in the light blocking area 1515 of shadow shield 1511 reflects back into backlight 1503 and led to
Cross and reflect and recycle from back reflector 1504.Modulator 1502 can be in modulator disclosed above any one or
Including with towards backlight 1503 for make from backlight 1503 launch light recycling light reflective surface shadow shield
Modulator.
Design modulator is it is important that wherein shading board support stand is unlike occupying substantially more needed for shadow shield
Display surface so that shadow shield may be positioned to substantially closer to each other, a permission shadow shield motion and between them some
The space of conductor.
Optical occluder component disclosed above meets this requirement.It is located at the side of shadow shield and accounts for shading board support stand
Optical occluder component according to some prior arts of the display surface more than 50% compares, in optical occluder component disclosed above,
Shading board support stand is located between shadow shield and surface (shadow shield is supported by the surface) and is positioned essentially at shadow shield
Border in, the border include between the first and second positions shadow shield motion.
This by increase relative to total transmitance region of display surface come increase light efficiency and reduce display row and
Gap between row.
In display 1500, light absorbing layer 1508 can be formed by conductive material and can replace modulator disclosed above
Electrode 415 in 400.
The electrode 308 and 309 of modulator 300 can be in the light absorbing layer with the light reflective surface towards backlight 1503
Formed on 1508, and shadow shield 101 can be supported on the surface 1522 of substrate 1521.The shadow shield 601 and tune of modulator 600
The shadow shield 701 of device 700 processed can be also supported on the surface 1522 of substrate 1521.The dividing plate 508 and 509 of modulator 500 can
Formed on light absorbing layer 1508 and shadow shield 503 can be hung by dividing plate 508 and 509.
In display 1500, the emitting surface light of backlight 1503 and can be from edge-illuminated known to LCD display
Or the backlight directly illuminated.
Figure 15 A and 15B show the viewgraph of cross-section of the display 1700 of the illustrative embodiment according to the present invention.Display
Device 1700 includes cap assemblies 1701, modulator 1702 and backlight 1703.Cap assemblies 1701 include transparent substrates 1705, in substrate
The light diffuser layer 1706 formed on 1705 first surface 1707 and the light absorbing layer formed on light diffuser layer 1706
1708.Light absorbing layer 1708 includes transmitance region 1709 and light absorbs area 1710.Modulator 1702 includes having transmitance region
1714 and the shadow shield 1711 in light blocking area 1715.Surface towards the shadow shield 1711 of backlight 1703 can be light reflection table
Face or light-absorbing surface, and towards the surface of light absorbing layer 1708 be light-absorbing surface.The transmitance region of light absorbing layer 1708
1709 are more than the transmitance region 1714 of shadow shield 1711 and less than the light blocking area 1715 of shadow shield 1711.Modulator 1702 also wraps
Include the substrate 1716 with light exit surface 1721 and embedded smooth reflective facets 1717.Facet 1717 is bending, and makes to come
Substrate 1716 is left from the light 1720 of backlight 1703 and is focused at the transmitance region 1714 of shadow shield 1711.Shadow shield 1711
It is supported on the surface 1721 of substrate 1716.Backlight 1703 includes fiber waveguide 1719 and positioned at fiber waveguide 1719 and substrate
Photosphere 1718 between 1716.Backlight 1703 is similar to Figure 10 A to Figure 10 C backlight 1000.Backlight 1703 also includes
It is used for the light absorbing layer 1704 for absorbing veiling glare or the light reflected from shadow shield 1711 below positioned at fiber waveguide 1719.
Shadow shield 1711 is at first position or on-position in Figure 15 A, and shadow shield 1711 is second in Figure 15 B
At position or open position.The light 1720 launched from substrate 1716, is transmitted when shadow shield 1711 is at (Figure 15 A) on first position
Through the transmitance region 1714 of shadow shield 1711 and the transmitance region 1709 of light absorbing layer 1708, and when shadow shield 1711 is second
Stopped on position when (Figure 15 B) by the light blocking area 1715 of shadow shield 1711.Reflected from the light blocking area 1715 of shadow shield 1711
The light returned is absorbed in light absorbing layer 1704.
In display 1700, compared with plane reflector, curvature reflectors 1717 increase the visual angle of display and reduction
The required displacement of shadow shield 1711 between on-position and open position.
Display recited above may also include for maintain the accurate distance between substrate dividing plate, at one or two
Row and column conductor, one or more thin film transistor (TFT)s and the storage capacitance for processing display pixel formed in individual substrate
Device, ground connection or voltage plane, public interconnection, dichroic filter or colour filter and ARC for resetting display pixel.
Display described above can be marked as electromechanics, micromechanics, micro electronmechanical or MEMS (MEMS) display.
Display recited above can be monochrome display, color monitor or color sequence displayer.
The present invention is described in detail according to the requirement of patent statute now, those of skill in the art are in each portion
Point or their associated component or manufacture method in make a change and change so as to meet specific requirement or condition will without be stranded
It is difficult.These can be made to change and modifications without departing from the scope and spirit of the present invention such as illustrated in the following claims.
Claims (15)
1. a kind of electromechanical display element, including：
Shadow shield, it has a first end and the second end, the shadow shield using the first end for being attached at the shadow shield and
Multiple supports at second end are supported by the surface, wherein being applied to the first power of the shadow shield relative to institute
State and the mobile shadow shield is in a direction substantially parallel in the plane on the surface on the horizontal direction of the first power.
2. a kind of electromechanical display element, including：
Shadow shield, it has first end and the second end, and the shadow shield is supported by the surface using multiple supports, described more
Individual support is positioned to be attached to the shading substantially parallel to the surface and at the first end and second end
Plate, wherein the first power for being applied to the shadow shield moves the shadow shield in the horizontal direction relative to first power.
3. a kind of electromechanical display element, including：
Shadow shield, it has first end and the second end, and the shadow shield use is attached at the first end and second end
Multiple supports be supported by the surface, the shadow shield also include extend from the edge of the shadow shield and formed with consolidate
The flange of the electrostatic actuator of fixed electrode, wherein the electrostatic actuator is substantially perpendicular to the first of the surface of the flange
Direction pull-up be attached at the support at the first end of the shadow shield and relative to the first direction in horizontal stroke
The shadow shield is moved up to side.
4. a kind of electromechanical display element, including：
Shadow shield, it has a first end and the second end, the shadow shield using the first end for being attached at the shadow shield and
Multiple cantilever beams at second end are supported by the surface, and the cantilever beam is between the shadow shield and the surface
And the first gap is spaced apart with the shadow shield and is spaced apart the second gap with the surface.
5. the electromechanical display element as described in any one of claim 1-3, wherein the shadow shield, which uses, is located at the screening
Cantilever beam between tabula rasa and the surface is supported by said surface.
6. the electromechanical display element as described in any one of claim 1-3, wherein the shadow shield is propped up using cantilever beam
Hold on said surface, and the first end of wherein each cantilever beam is attached to the surface using the first binding post, and
Second end is attached to the shadow shield using the second binding post.
7. the electromechanical display element as described in any one of claim 1-3, wherein the support is substantially straight,
And it is attached at the support at the first end and is tilted relative to the support being attached at second end.
8. the electromechanical display element as described in any one of claim 1-3, wherein being attached at described at the first end
Support is substantially straight, and the support being attached at second end is bending.
9. the electromechanical display element as described in any one of claim 1-3, wherein the support is located at the shadow shield
The first gap is spaced apart between the surface and with the shadow shield and is spaced apart the second gap with the surface.
10. the electromechanical display element as described in any one of claim 1,2 or 4, wherein the shadow shield includes forming tool
There is the flange of the electrostatic actuator of fixed electrode.
11. the electromechanical display element as described in any one of claim 1,2 or 4, wherein the shadow shield includes flange, and
The angle that the support is tilted and formed between 70 degree to 89 degree relative to the surface of the flange.
12. the electromechanical display element as described in any one of claim 1,2 or 4, wherein the shadow shield is included from described
The edge of shadow shield extends and forms the flange of the electrostatic actuator with fixed electrode, wherein the electrostatic actuator is in essence
On first direction pull-up perpendicular to the surface of the flange be attached at the support at the first end of the shadow shield
Frame simultaneously substantially moves the shadow shield relative to the first direction in horizontal direction.
13. the electromechanical display element as described in any one of claim 1-4, wherein the shadow shield includes light absorbs first
Surface and light reflection second surface.
14. electromechanical display element as claimed in claim 1 or 2, wherein the shadow shield on the horizontal direction ratio in institute
State how mobile at least 5 times on the direction of the first power.
15. the electromechanical display element as described in any one of claim 1-3, wherein the shadow shield is included from the shading
The first end of plate extends and forms the first flange of the first electrostatic actuator with first electrode, and including from the screening
Second end of tabula rasa extends and forms the second flange of the second electrostatic actuator with second electrode.
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| CN201610520637.2A CN107577043B (en) | 2016-07-04 | 2016-07-04 | MEMS light modulator for display |
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|---|---|---|---|
| CN201610520637.2A CN107577043B (en) | 2016-07-04 | 2016-07-04 | MEMS light modulator for display |
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| CN107577043B CN107577043B (en) | 2021-10-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022140944A1 (en) * | 2020-12-28 | 2022-07-07 | 深圳清华大学研究院 | Display structure and display |
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