CN107576690A - One kind detection seawater salinity and temperature integrated sensor chip and its manufacture method - Google Patents
One kind detection seawater salinity and temperature integrated sensor chip and its manufacture method Download PDFInfo
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- CN107576690A CN107576690A CN201711001450.2A CN201711001450A CN107576690A CN 107576690 A CN107576690 A CN 107576690A CN 201711001450 A CN201711001450 A CN 201711001450A CN 107576690 A CN107576690 A CN 107576690A
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Abstract
The invention belongs to sensor technical field,More particularly to a kind of detection seawater salinity integrates integrated sensor chip with temperature,Including salinity measurement electrode,Temperature detection electrode,Basalt glass substrate,Six salinity measurement electrodes are provided with first surface of basalt glass substrate,Salinity measurement electrode exterior is provided with the first thick film encapsulated layer,Thick film encapsulated layer leaves opening at salinity measurement electrode,Three temperature detection electrodes are provided with second surface of basalt glass substrate,The second thick film encapsulated layer is provided with the outside of temperature detection electrode,Existing sensor substrate is solved easily by seawater corrosion,The problem of error during detection be present,Realize seawater salinity and the synchro measure of temperature,Real-time temperature-compensating is carried out to seawater salinity testing result,There is multiple-working mode simultaneously,The electrode of damage or low precision can be detected,Improve precision.
Description
Technical field
The invention belongs to sensor technical field, more particularly to a kind of detection seawater salinity to integrate integrated sensor with temperature
Chip.
Background technology
Seawater salinity is an important parameter of marine information, in fishery cultivating etc., the height and stability of salinity
The survival rate and development condition of aquatile are directly affected, determines the nutrition condition and DYNAMIC DISTRIBUTION of water body；Shipping industry,
Ocean engineering etc., salinity is directly related with water body Density Distribution, and influences acoustic propagation parameter in current conditions and water.
At present, seawater salinity detection method is more, wherein, electrode detection method occupies critical role.
The functional single, shortage of electric pole type salinity measurement sensor and ocean temperature detection sensor used at present is reliably
Property the technical problem such as design, and substrate, easily by seawater corrosion, salinity sensor is single for single detection with temperature sensor
Member, detection error be present in detection or fail to judge, the testing result of single salinity sensor is affected by temperature
Larger, there is error in testing result, and existing salinity sensor does not have temperature compensation function, and error is larger.Salinity measurement electricity
Polarization phenomena can occur after a period of operation for pole, cause measurement error to be present, sensor is in the seawater due to originals such as corrosion
Thus often there is deviation in damage, the testing result of the sensor of partial destruction, it tends to be difficult to find.
The content of the invention
The brief overview on the present invention is given below, to provide on the basic of certain aspects of the invention
Understand.Should be understood to this general introduction is not the exhaustive general introduction on the present invention.It is not intended to determine the present invention's
Crucial or pith, nor is it intended to limit the scope of the present invention.Its purpose only provides some general in simplified form
Read, to be used as the preamble in greater detail discussed later.
In consideration of it, the invention provides a kind of simple in construction, reasonable in design, can be achieved by with a kind of anti-seawater corrosion
Substrate of the basalt glass as sensor, makes three salinity measurement units in one side, and another side makes three temperature inspections
Unit is surveyed, the problem of error be present at least to solve existing sensor substrate easily by seawater corrosion, during detection, realize seawater
The synchro measure of salinity and temperature, real-time temperature-compensating is carried out to seawater salinity testing result.
Technical scheme：
One kind detection seawater salinity and temperature integrated sensor chip, including：Salinity measurement electrode, temperature detection electrode,
Also include basalt glass substrate, the basalt glass substrate includes two surfaces, six being provided with its first surface
Salinity measurement electrode, six salinity measurement electrode runs parallels and interval setting, the left side point of first and second salinity measurement electrodes
A salinity electrode pad is not connected with, and a salinity electrode is connected on the right side of third and fourth salinity measurement electrode
Pad, a salinity electrode pad, the basalt glass are connected on the left of the 5th and the 6th salinity measurement electrode
The first thick film encapsulated layer is additionally provided with first surface of substrate, the first thick film encapsulated layer covers whole basalt glass
First surface of substrate, and leave salinity electrode opening in the position of salinity measurement electrode；The basalt glass substrate
Second surface on be provided with three temperature detection electrodes, three temperature detection electrodes head and the tail triangular in shape are not attached to cloth
Put, the temperature detection electrode both ends are respectively connected with a temperature electrode pad, second of the basalt glass substrate
The second thick film encapsulated layer is additionally provided with surface, the second thick film encapsulated layer covers second surface of whole basalt substrate, institute
The salinity electrode pad and temperature electrode pad stated are drawn by wire.
Further, the salinity measurement electrode described in six has：2 salinity measurement electrode mode of operations, 3 salinity measurements electricity
Pole mode of operation, 4 salinity measurement electrode mode of operations, 5 salinity measurement electrode mode of operations and 6 salinity measurement electrode Working moulds
Formula, three temperature detection electrodes 5 have：1 temperature detection electrode mode of operation, 2 temperature detection electrode mode of operations and the inspection of 3 temperature
Survey electrode mode of operation.
Further, the 2 salinity measurement electrode mode of operation is：Lead to an alternating current to the first salinity measurement electrode, and
Detect the first salinity measurement electrode and the second salinity measurement inter-electrode voltage changes and then draws the impedance of solution, after delay, to
6th salinity measurement electrode leads to an alternating current, and detects the 5th salinity measurement electrode and the change of the 6th salinity measurement inter-electrode voltage
And then the impedance of solution is drawn, after delay, lead to an alternating current, so circulation to the first salinity measurement electrode；
The 3 salinity measurement electrode mode of operation is：Lead to an alternating current to the second salinity measurement electrode, detect the first salinity
Detecting electrode and the 3rd salinity measurement inter-electrode voltage change and then draw the impedance of solution, after delay, to the 3rd salinity salinity
Detecting electrode leads to an alternating current, detects the second salinity measurement electrode and the 4th salinity measurement inter-electrode voltage changes and then drawn molten
The impedance of liquid, after delay, lead to an alternating current to the 4th salinity salinity measurement electrode, detect the 3rd salinity measurement electrode and the 5th salt
Voltage change and then the impedance of solution is drawn between degree detecting electrode, after delay, to the logical exchange of the 5th salinity salinity measurement electrode
Electricity, detects the 4th salinity measurement electrode and the 6th salinity measurement inter-electrode voltage changes and then draws the impedance of solution, after delay,
Lead to an alternating current, so circulation to the second salinity measurement electrode；
The 4 salinity measurement electrode mode of operation is：To the first salinity measurement electrode and the 4th salinity measurement electrode logical one
Alternating current, detects the second salinity measurement electrode and the 3rd salinity measurement inter-electrode voltage changes and then draws the impedance of solution, changes
The salinity of surveyed solution is calculated, after delay, leads to an alternating current to the second salinity measurement pole and the 5th salinity measurement electrode, detection the
Three salinity measurement electrodes and the change of the 4th salinity measurement inter-electrode voltage, after delay, to the 3rd salinity measurement pole and the 6th salinity
Detecting electrode leads to an alternating current, detects the 4th salinity measurement electrode and the change of the 5th salinity measurement inter-electrode voltage, after delay, to
First salinity measurement electrode and the 4th salinity measurement electrode lead to an alternating current, so circulation；
The 5 salinity measurement electrode mode of operation is：To the first salinity measurement electrode and the 5th salinity measurement electrode logical one
Alternating current, detect the second salinity measurement electrode and the change of the 3rd salinity measurement inter-electrode voltage, the 3rd salinity measurement electrode and the
Four salinity measurement inter-electrode voltages change, and two voltage changes are averaged, converse surveyed salinity, after delay, to the
Two salinity detecting electrodes and the 6th salinity measurement electrode lead to an alternating current, detect the 3rd salinity measurement electrode and the 4th salinity measurement
Inter-electrode voltage changes, the 4th salinity measurement electrode and the change of the 5th salinity measurement inter-electrode voltage, by two voltage changes
Average, converse surveyed salinity, after delay, to the logical exchange of the first salinity measurement electrode and the 5th salinity measurement electrode
Electricity, so circulation；
The 6 salinity measurement electrode mode of operation is：To the first salinity measurement electrode and the 6th salinity measurement electrode logical one
Alternating current, detects the second salinity measurement electrode and the 3rd salinity measurement electrode draws seawater impedance, detection the 3rd salinity measurement electricity
Pole and the 4th salinity measurement electrode show that seawater impedance, the 4th salinity measurement electrode of detection and the 5th salinity measurement electrode must go to sea
Water resistance resists, and three seawater impedance values are averaged, converse salt angle value；
The 1 temperature detection electrode mode of operation is：First temperature detection electrode work, second and the 3rd temperature detection electricity
Very hot deposit, after delay, the work of second temperature detecting electrode, first and the 3rd temperature detection electrode hot reserve, after delay, the 3rd
Temperature detection electrode works, the first and second temperature detection electrode hot reserves, after delay, the work of the first temperature detection electrode, the
Two and the 3rd temperature detection electrode hot reserve, so circulation；
The 2 temperature detection electrode mode of operation is：First and second temperature detection electrodes work, the 3rd temperature detection electricity
Very hot deposit, take the average value of the first and second temperature detection electrode working results, after delay, second and the 3rd temperature detection electricity
Pole work, the first temperature detection electrode hot reserve, take second and the 3rd temperature detection electrode working result average value, delay
Afterwards, the 3rd and the first temperature detection electrode work, second temperature detecting electrode hot reserve, take the 3rd and the first temperature detection electrode
The average value of working result, after delay, the work of the first and second temperature detection electrodes, the 3rd temperature detection electrode hot reserve, take
The average value of first and second temperature detection electrode working results, so circulation；
The 3 temperature detection electrode mode of operation is：3 temperature detection electrodes work simultaneously, randomly select 2 closed on
Temperature detection electrode, averages.
Further, comprise the following steps：
Step 1：Basalt glass substrate cleans, using basalt glass substrate, Chemical cleaning, dedusting；
Step 2：Laser boring, using laser drilling, draw center in electrode pad and beat micro- fairlead；
Step 3：Salinity measurement electrode is printed, using thick film print technology, prints platinum film in basalt glass substrate surface
Salinity measurement electrode；
Step 4：High-temperature heat treatment, using high-temperature heat treatment process, the basalt to printing platinum film salinity measurement electrode
Glass substrate is heat-treated；
Step 5：Printing temperature detecting electrode, using thick film print technology, print platinum in basalt glass substrate another side
Film temperature detecting electrode；
Step 6：High-temperature heat treatment, using high-temperature heat treatment process, the basalt to printing platinum film temperature detection electrode
Substrate is heat-treated；
Step 7：Separation layer is printed, prints basalt glass substrate thick film bag with thick-film technique in salinity measurement electrode surface
Sealing slurry；
Step 8：High temperature sintering, using Technology for Heating Processing, the Black Warrior to printing basalt glass encapsulating separation layer slurry
Batholith piece is heat-treated；
Step 9：Freezed lead, and lead is stained with into platinum electrocondution slurry, is put into micro- fairlead, make platinum electrocondution slurry with
Electrode leads to client connects, and is put into sintering furnace and sinters, and forms detection seawater salinity and temperature integrated sensor chip.
Further, in the step 1, basalt glass substrate is using basalt glass substrate thick 1-5mm, chemistry
Cleaning uses sulfuric acid solution and sodium hydroxide solution, and dedusting is cleaned by ultrasonic using pure water, vacuum drying.
Further, in the step 2, a diameter of 0.1-0.15mm for beating micro- fairlead in center is drawn in electrode pad.
Further, in the step 3, platinum film salinity measurement electrode, thickness 0.3-5 μ are printed in basalt substrate surface
m。
Further, it is described Step 4: Step 6: in step 8, the temperature of heat treatment is 900-1200 DEG C.
Further, in the step 5, platinum film temperature detection electrode, thickness 0.5- are printed in basalt substrate another side
2.5μm。
Further, in the step 7, the thickness of printing basalt glass substrate thick film encapsulated layer slurry is 2-7 μm.
In step 9, it is 900-1000 DEG C to be put into the sintering temperature sintered in sintering furnace.
Beneficial effects of the present invention are：
1) present invention on first surface of basalt glass substrate by being provided with six salinity measurement electrodes, salinity
The outside of detecting electrode is provided with the first thick film encapsulated layer, and three temperature detection electrodes, temperature inspection are provided with second surface
Survey electrode exterior and be provided with the second thick film encapsulated layer, basalt glass has erosion-resisting work(in itself as the substrate of sensor
Can, the first and second thick film encapsulated layers further isolate seawater, solve existing sensor substrate easily by seawater corrosion,
The problem of error during detection be present, realize seawater salinity and the synchro measure of temperature, seawater salinity testing result is carried out real-time
Temperature-compensating.
2) six salinity measurement electrode runs parallels of the invention and interval setting, the left side of first and second salinity measurement electrodes
A salinity electrode pad is connected to, a salinity electricity is connected on the right side of third and fourth salinity measurement electrode
Pole pad, a salinity electrode pad, three temperature detections are connected on the left of the 5th and the 6th salinity measurement electrode
Electrode head and the tail triangular in shape are not attached to arrange, thus structure, it is ensured that still have portion when integrally partial destruction occurs for sensor
Sub-sensor is unaffected, solves the problems, such as that when sensor integral part damages measurement data can not be obtained.
3) six salinity measurement electrodes of the invention have：2 salinity measurement electrode mode of operations, 3 salinity measurement electrode works
Operation mode, 4 salinity measurement electrode mode of operations, 5 salinity measurement electrode mode of operations and 6 salinity measurement electrode mode of operations, lead to
Cross and switch different mode of operations and can realize, six salinity measurement electrode cycles work, solve due to single-sensor work
The existing picture of polarization caused by making overlong time, caused error, can solve Sensor section damage by switching working mode
Problem, can be solved by the working condition of the multilevel iudge sensor to multiple sensor values due to single-sensor
The problem of damaging and can not finding in time.
4) three temperature detection electrodes of the invention have：1 temperature detection electrode mode of operation, 2 temperature detection electrode works
Operation mode and 3 temperature detection electrode mode of operations, three temperature detection electrode cycle work, can pass through pair to testing result
The larger sensor of error, and then switching working mode are found when when, is measured from the high sensor of precision, led to simultaneously
Different working modes are crossed, testing result is averaged, further reduce measurement error.
Brief description of the drawings
Fig. 1 is a kind of overall structure diagram for detecting seawater salinity and temperature integrated sensor chip；
Fig. 2 is a kind of salinity measurement cell distribution schematic diagram for detecting seawater salinity and temperature integrated sensor chip；
Fig. 3 is a kind of the first thick film encapsulated layer schematic diagram for detecting seawater salinity and temperature integrated sensor chip；
Fig. 4 is a kind of temperature detecting unit distribution schematic diagram for detecting seawater salinity and temperature integrated sensor chip；
Fig. 5 is a kind of detection seawater salinity and temperature integrated sensor chip manufacturing process block flow diagram；
In figure：1- salinity measurement electrodes；2- salinity electrode pads；3- the first thick film encapsulated layers；4- basalt glass substrates；
5- temperature detection electrodes；6- temperature electrode pads；7- the second thick film encapsulated layers.
Embodiment
Below with reference to accompanying drawing, the present invention is described in detail：
Embodiment one：
With reference to shown in Fig. 1 to Fig. 4, one kind detection seawater salinity and temperature integrated sensor chip, including：Salinity measurement electricity
Pole 1, temperature detection electrode 5, in addition to basalt glass substrate 4, basalt glass substrate 4 include two surfaces, its first
Six salinity measurement electrodes 1 are provided with surface, six salinity measurement electrodes 1 are parallel and are arranged at intervals, first and second salt
The left side of degree detecting electrode 1 is connected to a salinity electrode pad 2, the right side of third and fourth salinity measurement electrode 1
A salinity electrode pad 2 is connected to, the left side of the 5th and the 6th salinity measurement electrode 1 is connected to a salinity
Electrode pad 2, the first thick film encapsulated layer 3, the first thick film encapsulated layer are additionally provided with first surface of basalt glass substrate 4
First surface of the 3 whole basalt glass substrates 4 of covering, and leave salinity electrode in the position of salinity measurement electrode 1 and open
Mouthful；Three temperature detection electrodes 5 are provided with second surface of basalt glass substrate 4, three temperature detection electrodes 5 are in three
Angular head and the tail are not attached to arrange, the both ends of temperature detection electrode 5 are respectively connected with a temperature electrode pad 6, basalt glass base
The second thick film encapsulated layer 7 is additionally provided with second surface of piece 4, the second thick film encapsulated layer covers whole basalt substrate 4
Second surface, salinity electrode pad 2 and temperature electrode pad 6 are drawn by wire.
Salinity measurement principle is to be based on electric pole type electrical conductivity Cleaning Principle, when measuring the salinity parameter of seawater to be measured, selection
A pair of salinity measurement electrodes simultaneously apply alternating voltage, have electric current by passing through voltage and current to salinity measurement electrode tip at this
The equivalent resistance seawater electrode can be measured, so as to calculate the electrical conductivity of seawater to be measured, and then converses seawater salinity.Temperature
It is the resistance and temperature effect based on metal to spend Cleaning Principle, when detection object temperature change, the resistance of temperature detection electrode
Value can change with temperature change, be demarcated by normal temperature source, and certain change in resistance corresponds to certain temperature change, lead to
The resistance value of measurement temperature sensor is crossed, can accurately converse the temperature value at this moment.By temperature value to synchronization
The salt angle value measured is revised in real time, salinity measurement and temperature detection is synchronously carried out, and providing temperature for salinity sensor mends
Repay, improve accuracy of detection and response time.
Seawater salinity detecting electrode and temperature detection the electrode dispersed placement on basalt glass substrate, what is be partially damaged
In the case of can ensure that very big probability has undamaged electrode, and then ensure that sensor chip remains to pair under damage situations
Seawater salinity and temperature are detected, and waiting repair.
Embodiment two:
A kind of detection seawater salinity and temperature integrated sensor chip illustrated based on embodiment one, further
Ground, a kind of mode of operation for detecting seawater salinity and temperature integrated sensor chip, six salinity measurement electrodes 1 have：2 salinity
Detecting electrode mode of operation, 3 salinity measurement electrode mode of operations, 4 salinity measurement electrode mode of operations, 5 salinity measurement electrode works
Operation mode and 6 salinity measurement electrode mode of operations, three temperature detection electrodes 5 have：1 temperature detection electrode mode of operation, 2 temperature
Spend detecting electrode mode of operation and 3 temperature detection electrode mode of operations.
Switch the mode of operation of sensor chip according to different situations.
2 salinity measurement electrode mode of operations are：Lead to an alternating current to the first salinity measurement electrode, and detect the inspection of the first salinity
Survey electrode and the second salinity measurement inter-electrode voltage changes and then draws the impedance of solution, after delay, to the 6th salinity measurement electricity
An extremely logical alternating current, and detect the 5th salinity measurement electrode and the change of the 6th salinity measurement inter-electrode voltage and then draw solution
Impedance, after delay, lead to an alternating current, so circulation to the first salinity measurement electrode；
This mode of operation occupancy salinity measurement electrode is minimum, ensures when well damage only remains two salinity measurement electrodes still
Ensure detection, while salinity measurement electrode avoids testing result caused by working long hours from being forbidden by the way of circulation work
Really.
3 salinity measurement electrode mode of operations are：Lead to an alternating current to the second salinity measurement electrode, detect the first salinity measurement
Electrode and the 3rd salinity measurement inter-electrode voltage change and then draw the impedance of solution, after delay, to the 3rd salinity salinity measurement
Electrode leads to an alternating current, detects the second salinity measurement electrode and the 4th salinity measurement inter-electrode voltage changes and then draws solution
Impedance, after delay, lead to an alternating current to the 4th salinity salinity measurement electrode, detect the 3rd salinity measurement electrode and the inspection of the 5th salinity
Survey inter-electrode voltage to change and then draw the impedance of solution, after delay, lead to an alternating current, inspection to the 5th salinity salinity measurement electrode
Survey the 4th salinity measurement electrode and the 6th salinity measurement inter-electrode voltage to change and then draw the impedance of solution, after delay, to the
Two salinity detecting electrodes lead to an alternating current, so circulation；
This mode of operation takes three salinity measurement electrodes, measures two groups of data every time, two groups of data can be averaged
It is worth and then improves accuracy of detection, while working sensor state can be judged according to two groups of data difference sizes, simultaneously
Salinity measurement electrode avoids testing result caused by working long hours inaccurate by the way of circulation work.
4 salinity measurement electrode mode of operations are：To the logical exchange of the first salinity measurement electrode and the 4th salinity measurement electrode
Electricity, detects the second salinity measurement electrode and the 3rd salinity measurement inter-electrode voltage changes and then draws the impedance of solution, converses
The salinity of surveyed solution, after delay, lead to an alternating current to the second salinity measurement pole and the 5th salinity measurement electrode, detect the 3rd salt
Detecting electrode and the change of the 4th salinity measurement inter-electrode voltage are spent, after delay, to the 3rd salinity measurement pole and the 6th salinity measurement
Electrode leads to an alternating current, the 4th salinity measurement electrode and the change of the 5th salinity measurement inter-electrode voltage is detected, after delay, to first
Salinity measurement electrode and the 4th salinity measurement electrode lead to an alternating current, so circulation；
This mode of operation takes four salinity measurement electrodes, measures two groups of data every time, two groups of data independently of each other not by
Influence, two groups of data can be averaged and then improve accuracy of detection, while can be according to two groups of data difference sizes to passing
Sense device working state is judged, while salinity measurement electrode avoids the caused inspection that works long hours by the way of circulation work
It is inaccurate to survey result.
5 salinity measurement electrode mode of operations are：To the logical exchange of the first salinity measurement electrode and the 5th salinity measurement electrode
Electricity, detect the second salinity measurement electrode and the change of the 3rd salinity measurement inter-electrode voltage, the 3rd salinity measurement electrode and the 4th salt
Voltage change between degree detecting electrode, two voltage changes are averaged, converse surveyed salinity, after delay, to the second salt
Spend detecting electrode and the 6th salinity measurement electrode leads to an alternating current, detect the 3rd salinity measurement electrode and the 4th salinity measurement electrode
Between voltage change, the 4th salinity measurement electrode and the 5th salinity measurement inter-electrode voltage change, two voltage changes are made even
Average, surveyed salinity is conversed, after delay, lead to an alternating current to the first salinity measurement electrode and the 5th salinity measurement electrode, such as
This circulation；
This mode of operation takes five salinity measurement electrodes, measures two groups of data every time, two groups of data can be averaged
It is worth and then improves accuracy of detection, while working sensor state can be judged according to two groups of data difference sizes, simultaneously
Salinity measurement electrode avoids testing result caused by working long hours inaccurate by the way of circulation work.
6 salinity measurement electrode mode of operations are：To the logical exchange of the first salinity measurement electrode and the 6th salinity measurement electrode
Electricity, detect the second salinity measurement electrode and the 3rd salinity measurement electrode draw seawater impedance, the 3rd salinity measurement electrode of detection and
4th salinity measurement electrode show that seawater impedance, the 4th salinity measurement electrode of detection and the 5th salinity measurement electrode show that seawater hinders
It is anti-, three seawater impedance values are averaged, converse salt angle value；
This mode of operation takes six salinity measurement electrodes, three groups of data is measured every time, by being averaged to three groups of data
It is worth and then improves accuracy of detection, while working sensor state can be judged according to three groups of data difference sizes, simultaneously
Salinity measurement electrode avoids testing result caused by working long hours inaccurate by the way of circulation work.
1 temperature detection electrode mode of operation is：First temperature detection electrode work, second and the 3rd temperature detection electrode heat
Deposit, after delay, the work of second temperature detecting electrode, first and the 3rd temperature detection electrode hot reserve, after delay, the 3rd temperature
Detecting electrode works, the first and second temperature detection electrode hot reserves, after delay, the work of the first temperature detection electrode, and the second He
3rd temperature detection electrode hot reserve, so circulation；
This mode of operation takes a temperature detection electrode cycle job, by three temperature detection electrode detection results
Contrast the working condition of sensor can be judged, while can be according to the result pair of other two temperature detection electrodes
Single temperature detection electrode is modified.
2 temperature detection electrode mode of operations are：First and second temperature detection electrodes work, the 3rd temperature detection electrode heat
Deposit, the average value of the first and second temperature detection electrode working results is taken, after delay, second and the 3rd temperature detection electrode work
Make, the first temperature detection electrode hot reserve, take second and the 3rd temperature detection electrode working result average value, after delay, the
Three and first temperature detection electrode work, second temperature detecting electrode hot reserve, take the 3rd and first temperature detection electrode work
As a result average value, after delay, the work of the first and second temperature detection electrodes, the 3rd temperature detection electrode hot reserve, first is taken
With the average value of second temperature detecting electrode working result, so circulation；
This mode of operation takes two temperature detection electrode cycle work, by two temperature detection electrode detection results
Average and then improve precision, while remaining temperature detection electrode can be modified.
3 temperature detection electrode mode of operations are：3 temperature detection electrodes work simultaneously, randomly select 2 temperature closed on
Detecting electrode, average.
This mode of operation takes three temperature detection electrodes, measures three groups of data every time, is made even using randomly selecting two
Average, or the mode averaged to three groups of data improve accuracy of detection.
Embodiment three：
A kind of detection seawater salinity and temperature integrated sensor chip illustrated based on embodiment one, further
A kind of ground, manufacture method for detecting seawater salinity and temperature integrated sensor chip, with reference to shown in Fig. 5, comprises the following steps：
Step 1：Basalt glass substrate cleans, using basalt glass substrate, Chemical cleaning, dedusting；
Step 2：Laser boring, using laser drilling, draw center in electrode pad and beat micro- fairlead；
Step 3：Salinity measurement electrode is printed, using thick film print technology, prints platinum film in basalt glass substrate surface
Salinity measurement electrode；
Step 4：High-temperature heat treatment, using high-temperature heat treatment process, the basalt to printing platinum film salinity measurement electrode
Glass substrate is heat-treated；
Step 5：Printing temperature detecting electrode, using thick film print technology, print platinum in basalt glass substrate another side
Film temperature detecting electrode；
Step 6：High-temperature heat treatment, using high-temperature heat treatment process, the basalt to printing platinum film temperature detection electrode
Substrate is heat-treated；
Step 7：Separation layer is printed, prints basalt glass substrate thick film bag with thick-film technique in salinity measurement electrode surface
Sealing slurry；
Step 8：High temperature sintering, using Technology for Heating Processing, the Black Warrior to printing basalt glass encapsulating separation layer slurry
Batholith piece is heat-treated；
Step 9：Freezed lead, and lead is stained with into platinum electrocondution slurry, is put into micro- fairlead, make platinum electrocondution slurry with
Electrode leads to client connects, and is put into sintering furnace and sinters, and forms detection seawater salinity and temperature integrated sensor chip.
Specifically, in the step 1, basalt glass substrate is clear using basalt glass substrate thick 1-5mm, chemistry
Wash and use sulfuric acid solution and sodium hydroxide solution, dedusting is cleaned by ultrasonic using pure water, vacuum drying.
Specifically, in step 2, a diameter of 0.1-0.15mm for beating micro- fairlead in center is drawn in electrode pad.
Specifically, in step 3, platinum film salinity measurement electrode, 0.3-5 μm of thickness are printed in basalt substrate surface.
Specifically, Step 4: Step 6: in step 8, the temperature of heat treatment is 900-1200 DEG C.
Specifically, in step 5, platinum film temperature detection electrode, 0.5-2.5 μm of thickness are printed in basalt substrate another side.
Specifically, in step 7, the thickness of printing basalt glass substrate thick film encapsulated layer slurry is 2-7 μm.
In step 9, it is 900-1000 DEG C to be put into the sintering temperature sintered in sintering furnace.
Above example is the exemplary illustration to this patent, does not limit its protection domain, people in the art
Member can also be changed to its part, as long as no the Spirit Essence beyond this patent, all in the protection domain of this patent.
Claims (10)
1. one kind detection seawater salinity and temperature integrated sensor chip, including：Salinity measurement electrode (1), temperature detection electrode
(5), it is characterised in that also include two surfaces including basalt glass substrate (4), the basalt glass substrate (4), it
Six salinity measurement electrodes (1) are provided with one surface, six salinity measurement electrodes (1) are parallel and are arranged at intervals, the first He
A salinity electrode pad (2), third and fourth salinity measurement are connected on the left of second salinity measurement electrode (1)
A salinity electrode pad (2), the left side of the 5th and the 6th salinity measurement electrode (1) are connected on the right side of electrode (1)
A salinity electrode pad (2) is connected to, first is additionally provided with first surface of the basalt glass substrate (4)
Thick film encapsulated layer (3), the first thick film encapsulated layer (3) cover first surface of whole basalt glass substrate (4), and
Salinity electrode opening is left in the position of salinity measurement electrode (1)；Set on second surface of the basalt glass substrate (4)
Three temperature detection electrodes (5) are equipped with, three temperature detection electrodes (5) head and the tail triangular in shape are not attached to arrange, the temperature
Degree detecting electrode (5) both ends are respectively connected with a temperature electrode pad (6), second of the basalt glass substrate (4)
The second thick film encapsulated layer (7) is additionally provided with surface, the second thick film encapsulated layer covers second table of whole basalt substrate (4)
Face, described salinity electrode pad (2) and temperature electrode pad (6) are drawn by wire.
2. the mode of operation of a kind of a kind of detection seawater salinity based on claim 1 and temperature integrated sensor chip, it is special
Sign is that the salinity measurement electrode (1) described in six has：2 salinity measurement electrode mode of operations, the work of 3 salinity measurement electrodes
Pattern, 4 salinity measurement electrode mode of operations, 5 salinity measurement electrode mode of operations and 6 salinity measurement electrode mode of operations, three
Temperature detection electrode (5) has：1 temperature detection electrode mode of operation, 2 temperature detection electrode mode of operations and 3 temperature detections electricity
Pole mode of operation.
3. a kind of mode of operation for detecting seawater salinity and temperature integrated sensor chip according to claim 2, it is special
Sign is：The 2 salinity measurement electrode mode of operation is：Lead to an alternating current to the first salinity measurement electrode, and detect the first salt
Degree detecting electrode and the second salinity measurement inter-electrode voltage change and then draw the impedance of solution, after delay, are examined to the 6th salinity
Survey electrode and lead to an alternating current, and detect the 5th salinity measurement electrode and the change of the 6th salinity measurement inter-electrode voltage and then draw molten
The impedance of liquid, after delay, lead to an alternating current, so circulation to the first salinity measurement electrode；
The 3 salinity measurement electrode mode of operation is：Lead to an alternating current to the second salinity measurement electrode, detect the first salinity measurement
Electrode and the 3rd salinity measurement inter-electrode voltage change and then draw the impedance of solution, after delay, to the 3rd salinity salinity measurement
Electrode leads to an alternating current, detects the second salinity measurement electrode and the 4th salinity measurement inter-electrode voltage changes and then draws solution
Impedance, after delay, lead to an alternating current to the 4th salinity salinity measurement electrode, detect the 3rd salinity measurement electrode and the inspection of the 5th salinity
Survey inter-electrode voltage to change and then draw the impedance of solution, after delay, lead to an alternating current, inspection to the 5th salinity salinity measurement electrode
Survey the 4th salinity measurement electrode and the 6th salinity measurement inter-electrode voltage to change and then draw the impedance of solution, after delay, to the
Two salinity detecting electrodes lead to an alternating current, so circulation；
The 4 salinity measurement electrode mode of operation is：To the logical exchange of the first salinity measurement electrode and the 4th salinity measurement electrode
Electricity, detects the second salinity measurement electrode and the 3rd salinity measurement inter-electrode voltage changes and then draws the impedance of solution, converses
The salinity of surveyed solution, after delay, lead to an alternating current to the second salinity measurement pole and the 5th salinity measurement electrode, detect the 3rd salt
Detecting electrode and the change of the 4th salinity measurement inter-electrode voltage are spent, after delay, to the 3rd salinity measurement pole and the 6th salinity measurement
Electrode leads to an alternating current, the 4th salinity measurement electrode and the change of the 5th salinity measurement inter-electrode voltage is detected, after delay, to first
Salinity measurement electrode and the 4th salinity measurement electrode lead to an alternating current, so circulation；
The 5 salinity measurement electrode mode of operation is：To the logical exchange of the first salinity measurement electrode and the 5th salinity measurement electrode
Electricity, detect the second salinity measurement electrode and the change of the 3rd salinity measurement inter-electrode voltage, the 3rd salinity measurement electrode and the 4th salt
Voltage change between degree detecting electrode, two voltage changes are averaged, converse surveyed salinity, after delay, to the second salt
Spend detecting electrode and the 6th salinity measurement electrode leads to an alternating current, detect the 3rd salinity measurement electrode and the 4th salinity measurement electrode
Between voltage change, the 4th salinity measurement electrode and the 5th salinity measurement inter-electrode voltage change, two voltage changes are made even
Average, surveyed salinity is conversed, after delay, lead to an alternating current to the first salinity measurement electrode and the 5th salinity measurement electrode, such as
This circulation；
The 6 salinity measurement electrode mode of operation is：To the logical exchange of the first salinity measurement electrode and the 6th salinity measurement electrode
Electricity, detect the second salinity measurement electrode and the 3rd salinity measurement electrode draw seawater impedance, the 3rd salinity measurement electrode of detection and
4th salinity measurement electrode show that seawater impedance, the 4th salinity measurement electrode of detection and the 5th salinity measurement electrode show that seawater hinders
It is anti-, three seawater impedance values are averaged, converse salt angle value；
The 1 temperature detection electrode mode of operation is：First temperature detection electrode work, second and the 3rd temperature detection electrode heat
Deposit, after delay, the work of second temperature detecting electrode, first and the 3rd temperature detection electrode hot reserve, after delay, the 3rd temperature
Detecting electrode works, the first and second temperature detection electrode hot reserves, after delay, the work of the first temperature detection electrode, and the second He
3rd temperature detection electrode hot reserve, so circulation；
The 2 temperature detection electrode mode of operation is：First and second temperature detection electrodes work, the 3rd temperature detection electrode heat
Deposit, the average value of the first and second temperature detection electrode working results is taken, after delay, second and the 3rd temperature detection electrode work
Make, the first temperature detection electrode hot reserve, take second and the 3rd temperature detection electrode working result average value, after delay, the
Three and first temperature detection electrode work, second temperature detecting electrode hot reserve, take the 3rd and first temperature detection electrode work
As a result average value, after delay, the work of the first and second temperature detection electrodes, the 3rd temperature detection electrode hot reserve, first is taken
With the average value of second temperature detecting electrode working result, so circulation；
The 3 temperature detection electrode mode of operation is：3 temperature detection electrodes work simultaneously, randomly select 2 temperature closed on
Detecting electrode, average.
4. the manufacture method of a kind of a kind of detection seawater salinity based on claim 1 and temperature integrated sensor chip, it is special
Sign is, comprises the following steps：
Step 1：Basalt glass substrate cleans, using basalt glass substrate, Chemical cleaning, dedusting；
Step 2：Laser boring, using laser drilling, draw center in electrode pad and beat micro- fairlead；
Step 3：Salinity measurement electrode is printed, using thick film print technology, prints platinum film salinity in basalt glass substrate surface
Detecting electrode；
Step 4：High-temperature heat treatment, using high-temperature heat treatment process, the basalt glass to printing platinum film salinity measurement electrode
Substrate is heat-treated；
Step 5：Printing temperature detecting electrode, using thick film print technology, print platinum film temperature in basalt glass substrate another side
Spend detecting electrode；
Step 6：High-temperature heat treatment, using high-temperature heat treatment process, the basalt substrate to printing platinum film temperature detection electrode
Heat treatment；
Step 7：Separation layer is printed, prints basalt glass substrate thick film encapsulated layer with thick-film technique in salinity measurement electrode surface
Slurry；
Step 8：High temperature sintering, using Technology for Heating Processing, the Black Warrior batholith to printing basalt glass encapsulating separation layer slurry
Piece is heat-treated；
Step 9：Freezed lead, and lead is stained with into platinum electrocondution slurry, is put into micro- fairlead, makes platinum electrocondution slurry and electrode
Exit connects, and is put into sintering furnace and sinters, and forms detection seawater salinity and temperature integrated sensor chip.
5. a kind of manufacture method for detecting seawater salinity and temperature integrated sensor chip according to claim 4, it is special
Sign is, in the step 1, basalt glass substrate uses sulphur using basalt glass substrate thick 1-5mm, Chemical cleaning
Acid solution and sodium hydroxide solution, dedusting are cleaned by ultrasonic using pure water, vacuum drying.
6. a kind of manufacture method for detecting seawater salinity and temperature integrated sensor chip according to claim 4, it is special
Sign is, in the step 2, a diameter of 0.1-0.15mm for beating micro- fairlead in center is drawn in electrode pad.
7. a kind of manufacture method for detecting seawater salinity and temperature integrated sensor chip according to claim 4, it is special
Sign is, in the step 3, prints platinum film salinity measurement electrode, 0.3-5 μm of thickness in basalt substrate surface.
8. a kind of manufacture method for detecting seawater salinity and temperature integrated sensor chip according to claim 4, it is special
Sign is that described Step 4: Step 6: in step 8, the temperature of heat treatment is 900-1200 DEG C.
9. a kind of manufacture method for detecting seawater salinity and temperature integrated sensor chip according to claim 4, it is special
Sign is, in the step 5, prints platinum film temperature detection electrode, 0.5-2.5 μm of thickness in basalt substrate another side.
10. a kind of manufacture method for detecting seawater salinity and temperature integrated sensor chip according to claim 3, it is special
Sign is, in the step 7, the thickness of printing basalt glass substrate thick film encapsulated layer slurry is 2-7 μm.
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