CN107564505B - Piezoelectric vibration sounding module - Google Patents

Piezoelectric vibration sounding module Download PDF

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CN107564505B
CN107564505B CN201710765132.7A CN201710765132A CN107564505B CN 107564505 B CN107564505 B CN 107564505B CN 201710765132 A CN201710765132 A CN 201710765132A CN 107564505 B CN107564505 B CN 107564505B
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piezoelectric
cantilever beam
vibration
fixed
piezoelectric sheet
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CN107564505A (en
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赵程
曾涛
张刚华
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Shanghai Material Research Institute Co ltd
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Shanghai Institute of Materials
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Abstract

The invention relates to a piezoelectric vibration sound production module, which comprises a base and a cantilever beam, wherein the cantilever beam is at least provided with a fixed area and is fixed on the base through the fixed area, the fixed area on the cantilever beam is a fixed end, the other free parts are free ends, the vibration sound production module also comprises a hardening piezoelectric piece for changing the resonance frequency of the vibration sound production module and a vibration piezoelectric piece for providing vibration, at least one hardening piezoelectric piece and at least one vibration piezoelectric piece are arranged, the hardening piezoelectric piece is arranged at the fixed end of the cantilever beam and extends towards the free end, the vibration piezoelectric piece is arranged at the free end of the cantilever beam and extends towards the fixed end, and a space is reserved between the hardening piezoelectric piece and the vibration piezoelectric piece; the hardened piezoelectric sheet is connected with excitation voltages with different frequencies, the resonance frequency of the whole module is changed, and the vibrating piezoelectric sheet generates touch vibration or emits sound. Compared with the prior art, the piezoelectric device with the composite function provided by the invention has the advantages that the cost of the device is reduced, and the volume is saved.

Description

Piezoelectric vibration sounding module
Technical Field
The invention relates to a piezoelectric module, in particular to a piezoelectric vibration sounding module.
Background
When the piezoelectric element is connected to an ac signal, vibration can be generated. The lower frequency (0-300 Hz) signal can produce tactile vibration, and the higher frequency (300-20000 Hz) signal produces audio vibration. Therefore, piezoelectric elements are often used as sources of vibration for haptic feedback or speakers. The piezoelectric element has the advantage of clear vibration as a vibration source for tactile feedback, and meanwhile, the piezoelectric element can provide a high-quality high-frequency vibration signal as the vibration source for the loudspeaker, and can provide certain waterproof performance because sound can penetrate through the panel without passing through the sound emitting hole due to large vibration quantity and high acoustic impedance. Patent CN 103386397 a discloses a piezoelectric vibration module providing tactile feedback capable of transmitting generated vibration force directly to an input device. The vibration module can provide strong vibratory forces below 300Hz, but weak vibratory forces at audio frequencies. Patent CN 103581810A discloses a loudspeaker with vibration. The vibrations provided by the speaker (below 300Hz) are non-resonant vibrations and therefore provide only weak tactile feedback. Since haptic feedback requires the device to provide vibration in a resonant state, and audio vibration requires a frequency band to provide strong vibration, the same device often cannot achieve both haptic feedback and audio output with good effect.
Disclosure of Invention
The present invention is directed to a piezoelectric vibration sound module for overcoming the above-mentioned drawbacks of the prior art.
The purpose of the invention can be realized by the following technical scheme:
a piezoelectric vibration sound production module comprises a base and a cantilever beam, wherein the cantilever beam is arranged on the base, the cantilever beam is at least provided with a fixed area and is fixed on the base through the fixed area, the fixed area on the cantilever beam is a fixed end, the rest free parts are free ends, the vibration sound production module further comprises a hardening piezoelectric sheet for changing the resonance frequency of the vibration sound production module and a vibration piezoelectric sheet for providing vibration, at least one hardening piezoelectric sheet and at least one vibration piezoelectric sheet are arranged, the hardening piezoelectric sheet is arranged at the fixed end of the cantilever beam and extends from the starting end of the fixed end to the free end, the vibration piezoelectric sheet is arranged at the free end of the cantilever beam and extends from the tail end of the free end to the fixed end, and a space is reserved between the hardening piezoelectric sheet and the vibration piezoelectric sheet;
the hardened piezoelectric sheet is connected with excitation voltages with different frequencies, so that the resonance frequency of the piezoelectric vibration sounding module is changed, and the vibration piezoelectric sheet vibrates according to the corresponding resonance frequency to generate touch vibration or sound.
The base is provided with a boss for fixing the fixing area of the cantilever beam and the base, and the length of the boss is equal to that of the fixing area of the cantilever beam.
One end of the cantilever beam is provided with the fixed area which is the fixed end, and the other end of the cantilever beam is the free end;
the fixed end of the cantilever beam is fixed on the boss;
the hardened piezoelectric sheet is provided with one fixed end and fixed on the cantilever beam, the hardened piezoelectric sheet extends from the fixed end to the free end, and the length of the hardened piezoelectric sheet is greater than that of the boss;
the vibrating piezoelectric sheet is provided with one and fixed at the free end of the cantilever beam, the vibrating piezoelectric sheet extends from the tail end of the free end to the fixed end, and a distance is reserved between the hardening piezoelectric sheet and the vibrating piezoelectric sheet.
The middle part of the cantilever beam is the fixed area, and two free ends of the cantilever beam are arranged at two ends of the cantilever beam fixed area;
one boss is arranged and positioned in the middle of the base;
the hardened piezoelectric sheet is provided with a fixed area fixed in the middle of the cantilever beam, the hardened piezoelectric sheet covers the fixed area, two ends of the hardened piezoelectric sheet respectively extend to two free ends of the cantilever beam, and edges of two ends of the hardened piezoelectric sheet exceed edges of the boss;
the two vibrating piezoelectric sheets are arranged at two free ends of the cantilever beam respectively, extend from the tail ends of the free ends to a fixed area in the middle of the cantilever beam respectively, and are spaced from the hardening piezoelectric sheets.
Two ends of the cantilever beam are respectively provided with a fixed area so as to form two fixed ends, and the area between the two fixed ends is the free end of the cantilever beam arm;
the two bosses are arranged and are respectively positioned at the two ends of the base, and the fixing areas at the two ends of the cantilever beam are respectively fixed on the two bosses;
the two ends of the cantilever beam are respectively provided with a hardening piezoelectric sheet, the hardening piezoelectric sheets are arranged at the fixed end of the cantilever beam and extend towards the free end, the length of the hardening piezoelectric sheets is larger than that of the corresponding bosses, the vibration piezoelectric sheets are arranged in the middle of the cantilever beam and extend towards the two ends from the middle, and a distance is reserved between the hardening piezoelectric sheets and the vibration piezoelectric sheets.
The cantilever beam comprises any one of a metal substrate, a ceramic substrate, a fiber substrate and a composite substrate.
The hardened piezoelectric sheet or the vibrating piezoelectric sheet comprises any one of single-layer piezoelectric ceramics, multi-layer piezoelectric ceramics, flexible piezoelectric materials and composite piezoelectric materials.
Compared with the prior art, the invention has the following advantages:
(1) the invention provides a vibration sounding module, which is characterized in that at least one hardening piezoelectric sheet for changing the resonance frequency of the vibration sounding module and at least one vibration piezoelectric sheet for providing vibration are arranged, excitation voltages with different frequencies are applied to the hardening piezoelectric sheets, the hardening piezoelectric sheets stretch or contract to generate a spring hardening effect, so that the resonance frequency of the vibration sounding module is changed, and the vibration module vibrates at the corresponding resonance frequency to generate touch vibration or sound, specifically: when high-frequency (1kHz-20kHz) sine wave voltage is applied to the hardened piezoelectric sheet, the rigidity of the joint of the cantilever beam and the boss is high, the resonance frequency of the cantilever beam is increased to be above 300Hz, so that the whole module generates audio vibration, and when low-frequency (0-1kHz) sine wave voltage is applied to the hardened piezoelectric sheet, the resonance frequency of the cantilever beam is reduced to be below 300Hz, so that the whole module generates touch vibration, and the piezoelectric device with the composite function is provided, so that the cost of the device is reduced, and the volume is also saved;
(2) the piezoelectric vibration sounding module has various specific structures, only needs to provide a pair of hardening piezoelectric sheets and vibration piezoelectric sheets which are arranged on the same cantilever beam and work in a matching mode, can be reasonably configured according to actual application requirements, and is wide in application range.
Drawings
Fig. 1 is a schematic perspective view of a piezoelectric vibration sound module in embodiment 1;
fig. 2 is a schematic view showing the mounting of a cantilever beam and a piezoelectric plate in embodiment 1;
FIG. 3 is a partial sectional view of a flexible electrode in example 1;
fig. 4 is a schematic perspective view of a piezoelectric vibration sound module according to embodiment 2;
fig. 5 is a schematic view showing the mounting of a cantilever beam and a piezoelectric plate in embodiment 2;
fig. 6 is a schematic perspective view of a piezoelectric vibration sound module according to embodiment 3;
fig. 7 is a schematic view of the mounting of the cantilever beam and the piezoelectric sheet in embodiment 3.
In the drawing, 1 is a vibration sound module, 111 is a base, 112 is a boss, 12 is a cantilever, 121 is a substrate, 122 is a hardened piezoelectric sheet, 123 is a vibration piezoelectric sheet, 13 is a flexible electrode, 131 is a first circular copper electrode, 132 is a second circular copper electrode, and 133 is a third circular copper electrode.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments.
Example 1
A piezoelectric vibration sound production module 1 comprises a base 111 and a cantilever beam 12, wherein the cantilever beam 12 is arranged on the base 111, the cantilever beam 12 is at least provided with a fixed area and is fixed on the base 111 through the fixed area, the fixed area on the cantilever beam 12 is a fixed end, and the rest free parts are free ends, the vibration sound production module 1 further comprises a hardening piezoelectric sheet 122 for changing the resonance frequency of the vibration sound production module 1 and a vibration piezoelectric sheet 123 for providing vibration, at least one hardening piezoelectric sheet 122 and at least one vibration piezoelectric sheet 123 are arranged, the hardening piezoelectric sheet 122 is arranged at the fixed end of the cantilever beam 12 and extends from the initial end of the fixed end to the free end, the vibration piezoelectric sheet 123 is arranged at the free end of the cantilever beam 12 and extends from the tail end of the free end to the fixed end, and a distance is reserved between the hardening piezoelectric sheet 122 and the vibration piezoelectric sheet 123; the hardened piezoelectric plate 122 is connected with excitation voltages with different frequencies, so that the resonance frequency of the piezoelectric vibration sounding module 1 is changed, and the vibration piezoelectric plate 123 vibrates according to the corresponding resonance frequency to generate touch vibration or sound. The base 111 is provided with a boss 112 for fixing the fixing region of the cantilever 12 to the base 111, and the length of the boss 112 is equal to the length of the fixing region of the cantilever 12. The cantilever beam 12 is formed by a substrate 121, which includes any one of a metal substrate, a ceramic substrate, a fiber substrate, and a composite substrate. The hardened piezoelectric sheet 122 or the vibrating piezoelectric sheet 123 includes any one of a single-layer piezoelectric ceramic, a multilayer piezoelectric ceramic, a flexible piezoelectric material, and a composite piezoelectric material.
As shown in fig. 1 to 3, in the present embodiment, one cantilever beam 12 is provided, one end of the cantilever beam 12 is provided with the fixing region, which is the fixing end, the other end of the cantilever beam 12 is the free end, the cantilever beam 12 is made of a metal sheet, and the hardened piezoelectric sheet 122 and the vibrating piezoelectric sheet 123 are made of single-layer piezoelectric ceramics;
one boss 112 is arranged and positioned at one end of the base 111, and the fixed end of the cantilever beam 12 is fixed on the boss 112;
the hardened piezoelectric sheet 122 is provided with one fixed end and fixed on the cantilever beam 12, the hardened piezoelectric sheet 122 extends from the fixed end to the free end, and the length of the hardened piezoelectric sheet 122 is greater than that of the boss 112;
the vibrating piezoelectric piece 123 is provided and fixed at the free end of the cantilever 12, the vibrating piezoelectric piece 123 extends from the end of the free end to the fixed end, and a distance is reserved between the hardening piezoelectric piece 122 and the vibrating piezoelectric piece 123.
The cantilever beam 12 is formed by attaching the hardened piezoelectric sheet 122 and the vibrating piezoelectric sheet 123 to a metal cantilever beam 12, and the cantilever beam 12 is fixed on the boss 112 in an adhesion or riveting mode; wherein the hardened piezoelectric sheet 122 adjacent the boss 112 extends from the edge of the boss 112 towards the free end of the cantilever beam 12 and the length of the hardened piezoelectric sheet 122 exceeds the length of the boss 112; the vibrating piezoelectric plate 123 near the free end of the cantilever 12 extends from the free end toward the boss 112 and does not contact the hardened piezoelectric plate 122 at the fixed end. The widths of the hardened piezoelectric sheet 122 and the vibrating piezoelectric sheet 123 are consistent with the width of the cantilever 12, and the ratio of the thicknesses of the hardened piezoelectric sheet 122 and the vibrating piezoelectric sheet 123 to the thickness of the cantilever 12 is 10: 1-1: 2.
The hardened piezoelectric piece 122 and the vibrating piezoelectric piece 123 are both coated with metal electrodes and subjected to polarization treatment, and one surface of the cantilever 12 in the polarization direction is a negative electrode, and the other surface is a positive electrode. In addition, the piezoelectric vibration sound generating module 1 further comprises a flexible electrode 13, and the flexible electrode 13 comprises a first circular copper electrode 131 and a second circular copper electrode 132 which are respectively used as positive terminals of the hardened piezoelectric sheet 122 and the vibration piezoelectric sheet 123, and a third circular copper electrode 133 which is used as a ground terminal. The bottom surface of the cantilever beam 12 is electrically connected with the third circular copper electrode 133 of the flexible electrode 13 in a bonding mode and is used as a grounding end; the hardened piezoelectric sheet 122 is electrically connected to the first circular copper electrode 131 of the flexible electrode 13 by bonding, and the vibrating piezoelectric sheet 123 is connected to the second circular copper electrode 132 of the flexible electrode 13 by bonding. The flexible electrode 13 is insulated from the hardened piezoelectric sheet 122, the vibrating piezoelectric sheet 123, and the cantilever 12 except for three circular copper electrodes.
When high-frequency (1kHz-20kHz) sine wave voltage is applied to the hardened piezoelectric sheet 122, the rigidity of the joint of the cantilever beam 12 and the boss 112 is high, the resonance frequency of the cantilever beam 12 is improved to be more than 300Hz, and therefore the whole module generates audio vibration; when the hardened piezoelectric patch 122 applies a low frequency (0-1kHz) sine wave voltage, the resonant frequency of the cantilever beam 12 drops below 300Hz, thereby generating tactile vibrations throughout the module. The purpose of adjusting the frequency range of the piezoelectric vibration sound generating module 1 is achieved by applying voltages with different frequencies to the hardened piezoelectric sheet 122.
Example 2
As shown in fig. 4 and 5, the present embodiment is different from embodiment 1 in that: one cantilever beam 12 is arranged, the middle part of the cantilever beam 12 is a fixed area, and two free ends of the cantilever beam 12 are arranged at two ends of the fixed area of the cantilever beam 12; one boss 112 is arranged and positioned in the middle of the base 111; the hardened piezoelectric sheet 122 is provided with a fixed area fixed in the middle of the cantilever beam 12, the hardened piezoelectric sheet 122 covers the fixed area, two ends of the hardened piezoelectric sheet extend to two free ends of the cantilever beam 12 respectively, and edges of two ends of the hardened piezoelectric sheet 122 exceed edges of the boss 112; the two vibrating piezoelectric sheets 123 are arranged at two free ends of the cantilever beam 12 respectively, the two vibrating piezoelectric sheets 123 extend from the tail ends of the free ends to a fixed area in the middle of the cantilever beam 12 respectively, and a space is reserved between each vibrating piezoelectric sheet 123 and the corresponding hardening piezoelectric sheet 122. Meanwhile, the flexible electrode 13 is provided with four copper electrodes, one of which serves as a common ground (i.e., a negative electrode) for the hardened piezoelectric sheet 122 and the two vibrating piezoelectric sheets 123, and the other three of which serve as common grounds for the hardened piezoelectric sheet 122 and the two vibrating piezoelectric sheets 123, respectively. The rest is the same as in example 1.
Example 3
As shown in fig. 6 and 7, the present embodiment is different from embodiment 1 in that: one cantilever beam 12 is arranged, two ends of the cantilever beam 12 are respectively provided with a fixed area, so that two fixed ends are formed, and the area between the two fixed ends is the free end of the cantilever beam 12; two bosses 112 are arranged and are respectively positioned at two ends of the base 111, and fixed ends at two ends of the cantilever beam 12 are respectively fixed on the two bosses 112; the two ends of the cantilever beam 12 are respectively provided with a hardening piezoelectric sheet 122, the hardening piezoelectric sheet 122 is arranged at the fixed end of the cantilever beam 12 and extends towards the free end, the length of the hardening piezoelectric sheet 122 is greater than that of the corresponding boss 112, the middle part of the cantilever beam 12 is provided with a vibration piezoelectric sheet 123, the vibration piezoelectric sheet 123 extends from the middle part of the cantilever beam 12 towards the two ends, and a distance is reserved between the hardening piezoelectric sheet 122 and the vibration piezoelectric sheet 123. While each cantilever beam 12 is provided with a flexible electrode 13 as described in embodiment 1. The rest is the same as in example 1.

Claims (7)

1. The utility model provides a piezoelectricity vibration sound production module, this vibration sound production module (1) include base (111) and cantilever beam (12), cantilever beam (12) set up on base (111), its characterized in that, cantilever beam (12) set up a fixed area at least and pass through fixed area fix on base (111), fixed area on cantilever beam (12) is the stiff end, all the other free parts are the free end, vibration sound production module (1) still including be used for changing the sclerosis piezoelectric patches (122) of vibration sound production module (1) resonant frequency and be used for providing vibration piezoelectric patches (123) of vibration, sclerosis piezoelectric patches (122) and vibration piezoelectric patches (123) all set up one at least, sclerosis piezoelectric patches (122) set up at cantilever beam (12) stiff end and extend to the free end from the initiating terminal of stiff end, vibration piezoelectric patches (123) set up at cantilever beam (12) free end and from the terminal of free end to solid piezoelectric patches (123) of free end The fixed end extends, and a space is reserved between the hardened piezoelectric sheet (122) and the vibrating piezoelectric sheet (123);
the hardened piezoelectric sheet (122) is connected with excitation voltages with different frequencies, so that the resonance frequency of the piezoelectric vibration sounding module (1) is changed, the vibration piezoelectric sheet (123) vibrates according to the corresponding resonance frequency to generate touch vibration or sound, and specifically:
when a high-frequency sine wave voltage of 1kHz-20kHz is applied to the hardened piezoelectric sheet (122), the rigidity of the joint of the cantilever beam (12) and the boss (112) is high, the resonance frequency of the cantilever beam (12) is increased to be above 300Hz, so that the whole module generates audio vibration, and when a low-frequency sine wave voltage of 0 kHz-1 kHz is applied to the hardened piezoelectric sheet (122), the resonance frequency of the cantilever beam (12) is reduced to be below 300Hz, so that the whole module generates tactile vibration.
2. The piezoelectric vibration sound production module according to claim 1, wherein the base (111) is provided with a boss (112) for fixing the fixing area of the cantilever beam (12) to the base (111), and the length of the boss (112) is equal to the length of the fixing area of the cantilever beam (12).
3. A piezoelectric vibration sound generating module according to claim 2, wherein one end of the cantilever beam (12) is provided with the fixing region, i.e. the fixing end, and the other end of the cantilever beam (12) is the free end;
one boss (112) is arranged and positioned at one end of the base (111), and the fixed end of the cantilever beam (12) is fixed on the boss (112);
the hardened piezoelectric sheet (122) is provided with one fixed end and fixed on the cantilever beam (12), the hardened piezoelectric sheet (122) extends from the fixed end to the free end, and the length of the hardened piezoelectric sheet (122) is greater than that of the boss (112);
the vibrating piezoelectric sheet (123) is provided with one and fixed at the free end of the cantilever beam (12), the vibrating piezoelectric sheet (123) extends from the tail end of the free end to the fixed end, and a distance is reserved between the hardening piezoelectric sheet (122) and the vibrating piezoelectric sheet (123).
4. The piezoelectric vibration sound production module according to claim 2, wherein the middle of the cantilever beam (12) is the fixing area, and two free ends of the cantilever beam (12) are arranged at two ends of the fixing area of the cantilever beam (12);
one boss (112) is arranged and positioned in the middle of the base (111);
the hardened piezoelectric sheet (122) is provided with a fixed area which is fixed in the middle of the cantilever beam (12), the hardened piezoelectric sheet (122) covers the fixed area, two ends of the hardened piezoelectric sheet respectively extend to two free ends of the cantilever beam (12), and edges of two ends of the hardened piezoelectric sheet (122) exceed edges of the boss (112);
the two vibrating piezoelectric sheets (123) are arranged at two free ends of the cantilever beam (12) respectively, the two vibrating piezoelectric sheets (123) extend from the tail ends of the free ends to a fixed area in the middle of the cantilever beam (12) respectively, and a space is reserved between the two vibrating piezoelectric sheets (123) and the hardening piezoelectric sheet (122).
5. The piezoelectric vibration sound production module according to claim 1, wherein two ends of the cantilever beam (12) are respectively provided with a fixing area, so as to form two fixing ends, and the area between the two fixing ends is the free end of the cantilever beam (12);
the two bosses (112) are arranged and are respectively positioned at the two ends of the base (111), and the fixing areas at the two ends of the cantilever beam (12) are respectively fixed on the two bosses (112);
two ends of the cantilever beam (12) are respectively provided with a hardening piezoelectric sheet (122), the hardening piezoelectric sheets (122) are arranged at the fixed end of the cantilever beam (12) and extend towards the free end, the length of the hardening piezoelectric sheets (122) is larger than that of the corresponding lug boss (112), the vibration piezoelectric sheets (123) are arranged in the middle of the cantilever beam (12) and extend towards the two ends from the middle, and a distance is reserved between the hardening piezoelectric sheets (122) and the vibration piezoelectric sheets (123).
6. A piezoelectric vibration sound emitting module according to claim 1, wherein the cantilever beam (12) comprises any one of a metal substrate, a ceramic substrate, a fiber substrate and a composite substrate.
7. A piezoelectric vibration sound generating module according to claim 1, wherein the hardened piezoelectric sheet (122) or the vibration piezoelectric sheet (123) comprises any one of a single-layer piezoelectric ceramic, a multi-layer piezoelectric ceramic, a flexible piezoelectric material, and a composite piezoelectric material.
CN201710765132.7A 2017-08-30 2017-08-30 Piezoelectric vibration sounding module Active CN107564505B (en)

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Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
CN213991016U (en) * 2020-11-19 2021-08-17 瑞声科技(南京)有限公司 Piezoelectric microphone
CN217693709U (en) * 2022-06-20 2022-10-28 瑞声开泰科技(武汉)有限公司 MEMS loudspeaker

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100364A1 (en) * 2003-05-07 2004-11-18 Seiko Epson Corporation Tuning-fork piezoelectric device manufacturing method and tuning-fork piezoelectric device
US20070053531A1 (en) * 2005-09-05 2007-03-08 Citizen Electronics Co., Ltd. Panel-typed loud speaker and an exciter therefor
CN102271302A (en) * 2011-06-30 2011-12-07 国光电器股份有限公司 Piezoelectric loudspeaker
CN202121776U (en) * 2011-06-30 2012-01-18 国光电器股份有限公司 Piezoelectric loudspeaker
CN102395092A (en) * 2011-09-27 2012-03-28 清华大学 Piezoelectric speaker based on piezoelectric cantilever beam
CN204069327U (en) * 2014-07-31 2014-12-31 昆山攀特电陶科技有限公司 New Resonance piezoelectric speaker
CN104822112A (en) * 2015-04-22 2015-08-05 歌尔声学股份有限公司 Speaker device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10300594A (en) * 1997-04-21 1998-11-13 Olympus Optical Co Ltd Tactile sensor
CN205754054U (en) * 2016-05-24 2016-11-30 江苏联能电子技术有限公司 Vibrating device based on high piezoelectric characteristic ceramic material

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100364A1 (en) * 2003-05-07 2004-11-18 Seiko Epson Corporation Tuning-fork piezoelectric device manufacturing method and tuning-fork piezoelectric device
US20070053531A1 (en) * 2005-09-05 2007-03-08 Citizen Electronics Co., Ltd. Panel-typed loud speaker and an exciter therefor
CN102271302A (en) * 2011-06-30 2011-12-07 国光电器股份有限公司 Piezoelectric loudspeaker
CN202121776U (en) * 2011-06-30 2012-01-18 国光电器股份有限公司 Piezoelectric loudspeaker
CN102395092A (en) * 2011-09-27 2012-03-28 清华大学 Piezoelectric speaker based on piezoelectric cantilever beam
CN204069327U (en) * 2014-07-31 2014-12-31 昆山攀特电陶科技有限公司 New Resonance piezoelectric speaker
CN104822112A (en) * 2015-04-22 2015-08-05 歌尔声学股份有限公司 Speaker device

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