CN107546563B - Automatic control method and device for laser energy - Google Patents

Automatic control method and device for laser energy Download PDF

Info

Publication number
CN107546563B
CN107546563B CN201610507372.2A CN201610507372A CN107546563B CN 107546563 B CN107546563 B CN 107546563B CN 201610507372 A CN201610507372 A CN 201610507372A CN 107546563 B CN107546563 B CN 107546563B
Authority
CN
China
Prior art keywords
laser
laser energy
pulse signal
pulse
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610507372.2A
Other languages
Chinese (zh)
Other versions
CN107546563A (en
Inventor
刘骝
李磊
喻佳俊
代新
黄正旭
高伟
李梅
李雪
刘平
刘浩友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Hexin Mass Spectrometry Technology Co ltd
Guangzhou Hexin Instrument Co Ltd
Original Assignee
Kunshan Hexin Mass Spectrometry Technology Co ltd
Jinan University
Guangzhou Hexin Instrument Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Hexin Mass Spectrometry Technology Co ltd, Jinan University, Guangzhou Hexin Instrument Co Ltd filed Critical Kunshan Hexin Mass Spectrometry Technology Co ltd
Priority to CN201610507372.2A priority Critical patent/CN107546563B/en
Publication of CN107546563A publication Critical patent/CN107546563A/en
Application granted granted Critical
Publication of CN107546563B publication Critical patent/CN107546563B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Lasers (AREA)

Abstract

The invention relates to a laser energy automatic control method and a device, wherein the method comprises the following steps: obtaining an average laser energy value output by a pulse type lamp pump solid laser; judging whether the average laser energy value is within a preset laser energy range, if not, adjusting a pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range, wherein the Flash pulse signal is used for controlling the triggering of a pump lamp of the pulse lamp pump solid laser, and the Fire pulse signal is used for controlling the triggering of a Q switch of the pulse lamp pump solid laser; and controlling the laser energy output by the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and Fire pulse signal. The invention can realize automatic control and regulation of the laser energy output by the pulse type lamp pump solid laser and improve the stability of the laser energy output by the pulse type lamp pump solid laser.

Description

Automatic control method and device for laser energy
Technical Field
The invention relates to the technical field of control, in particular to a method and a device for automatically controlling laser energy.
Background
At present, lamp-pumped solid-state lasers are widely applied to various instruments, such as Single Particle Aerosol Mass Spectrometers (SPAMS) capable of analyzing particle sizes and chemical compositions of Single aerosols in real time, and the ionization source of the current SPAMS mainly adopts a 266nm Nd: YAG solid-state laser, and the 266nm Nd: YAG solid-state laser often causes phenomena of gradual reduction of laser energy output and poor stability due to continuous use or change of use environment temperature, as shown in fig. 1, the instability of results of acquiring spectrum data by the SPAMS directly causes the reduction of the working efficiency of the mass spectrometer. Therefore, the stability of the laser energy output by the solid laser is guaranteed, and the stability and the accuracy of data collected by an instrument are very important.
Disclosure of Invention
Accordingly, it is necessary to provide a method and an apparatus for automatically controlling laser energy, which can solve the problem that the laser energy output by the conventional lamp-pumped solid-state laser has poor stability with the increase of the usage time or the change of the usage environment temperature.
In order to solve the technical problems, the invention adopts the following technical scheme:
a method of automatic control of laser energy, the method comprising the steps of:
obtaining an average laser energy value output by a pulse type lamp pump solid laser;
judging whether the average laser energy value is within a preset laser energy range, if not, adjusting a pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range, wherein the Flash pulse signal is used for controlling the triggering of a pump lamp of the pulse lamp pump solid laser, and the Fire pulse signal is used for controlling the triggering of a Q switch of the pulse lamp pump solid laser;
and controlling the laser output of the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and the adjusted Fire pulse signal.
Correspondingly, the invention also provides a laser energy automatic control device, which comprises:
the acquisition module is used for acquiring the average laser energy value output by the pulse type lamp pump solid laser;
the judging module is used for judging whether the average laser energy value is within a preset laser energy range or not;
the adjusting module is used for adjusting the pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range when the judging result of the judging module is negative, wherein the Flash pulse signal is used for controlling the triggering of a pump lamp of the pulse lamp pump solid laser, and the Fire pulse signal is used for controlling the triggering of a Q switch of the pulse lamp pump solid laser;
and the control module is used for controlling the laser output of the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and the adjusted Fire pulse signal.
The automatic control method and the device for the laser energy judge whether the average laser energy value is in a preset laser energy range or not by obtaining the average laser energy value output by the pulse lamp pump solid laser, if not, adjust the pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range, and adjust the trigger time of a pump lamp and a Q switch of the pulse lamp pump solid laser in real time, thereby realizing the automatic control of the laser energy output by the pulse lamp pump solid laser. The method and the device for automatically controlling the laser energy not only can automatically control and adjust the laser energy output by the pulse type lamp pump solid laser and improve the stability of the laser energy output by the pulse type lamp pump solid laser, but also can basically neglect the influence of the time for automatically adjusting the laser energy output by the laser in millisecond magnitude on instrument sampling, thereby being beneficial to realizing the real-time adjustment of the laser energy in the original sampling state of the instrument and improving the stability of the instrument for acquiring spectrogram data.
Drawings
FIG. 1 is a schematic diagram of laser energy output by a solid state laser as a function of time without external intervention;
FIG. 2 is a schematic flow chart illustrating a method for automatically controlling laser energy according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the automatic control method for laser energy according to the present invention for automatically adjusting laser energy;
FIG. 4 is a spectrum of positive and negative ions of cigarette gas collected by SPAMS in the present invention;
FIG. 5 is a graph of mass to charge ratio versus peak area relative standard deviation in accordance with the present invention;
fig. 6 is a schematic structural diagram of an automatic control device for laser energy according to an embodiment of the present invention.
Detailed Description
The technical solution of the present invention will be described in detail with reference to the accompanying drawings and preferred embodiments.
In one embodiment, referring to fig. 2, a method for automatic control of laser energy comprises the steps of:
s100, an average laser energy value output by the pulse type lamp pump solid laser is obtained.
In this embodiment, a pulse lamp-pumped solid-state laser (such as Nd: YAG solid-state laser) is used as a control object to automatically control and adjust the laser energy output by the laser. The method comprises the steps of obtaining an average laser energy value output by a pulse lamp-pumped solid-state laser, wherein the obtained average laser energy value can be obtained by measuring laser energy output by the laser for a certain preset number of times by using a power meter, an energy meter or a spectrometer and the like, and performing statistical average calculation on the measured laser energy, wherein the laser energy measured for the certain preset number of times can be laser energy output by the pulse lamp-pumped solid-state laser within a certain time period and including the current laser energy output by the laser.
S200, judging whether the average laser energy value is within a preset laser energy range, if not, adjusting a pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range, wherein the Flash pulse signal is used for controlling the triggering of a pump lamp of the pulse lamp pump solid laser, and the Fire pulse signal is used for controlling the triggering of a Q switch of the pulse lamp pump solid laser.
After the average laser energy value is obtained, whether the average laser energy value is within a preset laser energy range is judged, the preset laser energy range can be set according to the type of the pulse type lamp pump solid laser and a specific application environment, if the average laser energy value is not within the preset laser energy range, a pulse time interval is adjusted according to the average laser energy value and the preset laser energy range, the pulse time interval refers to a pulse time interval between adjacent single pulses of a Flash pulse signal and a Fire pulse signal, and the Flash pulse signal and the Fire pulse signal are respectively used for controlling the triggering of a pump lamp of the solid laser and the triggering of a Q switch.
And S300, controlling the laser output of the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and Fire pulse signal. The Flash pulse signal and the Fire pulse signal in the embodiment are respectively used for controlling the triggering of a pump lamp and a Q switch of the solid laser, and the control of the on-time of the pump lamp and the Q switch can be realized by adjusting the time interval between two paths of pulse signals, namely the Flash pulse signal and the Fire pulse signal in real time, so that the control of the laser energy output by the solid laser is realized. The lamp-pumped Nd-YAG solid laser is taken as an example, the solid laser comprises a pump lamp, an Nd-YAG crystal, a resonant cavity and a Q Switch (Q-Switch element), and the working basic principle is that the Nd-YAG crystal radiates primary light with certain energy after being excited by the pump lamp, the energy of the primary light presents Gaussian distribution along with the increase of time, the energy of the primary light with different energy is different after passing through the same resonant cavity, and the output energy of the laser finally presents Gaussian distribution along with the increase of time, so that the Q Switch is timely turned on by a Fire pulse signal in the process of the change of the primary light along with time, the energy of the primary light can be controlled, and the output energy of the final solid laser can be controlled.
The automatic control method for laser energy provided by this embodiment determines whether the average laser energy value is within a preset laser energy range by obtaining the average laser energy value output by the pulsed lamp pumped solid-state laser, and if not, adjusts the pulse time interval between the Flash pulse signal and the Fire pulse signal according to the average laser energy value and the preset laser energy range, and adjusts the trigger time of the pump lamp and the Q switch of the pulsed lamp pumped solid-state laser in real time, thereby implementing automatic control of laser energy output by the pulsed lamp pumped solid-state laser. The automatic control method for the laser energy can realize automatic control and adjustment of the laser energy output by the pulse type lamp pump solid laser, improves the stability of the laser energy output by the pulse type lamp pump solid laser, basically ignores the influence of the automatic adjustment time of the laser energy output by the laser on instrument sampling when the automatic adjustment time of the laser energy output by the laser is in millisecond level, is favorable for realizing real-time adjustment of the laser energy under the original sampling state of the instrument, and improves the stability and the accuracy of the instrument for acquiring spectrogram data.
As a specific implementation manner, before the step of obtaining the average laser energy value output by the pulse lamp pumped solid-state laser, the method further includes the following steps: collecting laser energy of preset times output by a pulse lamp pumping solid laser by using a laser energy meter; and calculating the average laser energy value according to the laser energy and the preset times. In the embodiment, the laser energy meter collects the laser energy output by the pulse lamp pump solid laser once when the pump lamp of the pulse lamp pump solid laser is triggered once under the control of a Flash pulse signal, specifically, a drive package of the laser energy meter provides a COM component, the mode of reading the laser energy is passive, the COM component triggers an event notification data acquisition software to read energy data, when the pulse lamp pump solid laser outputs laser once, the laser energy meter can timely collect the laser energy and immediately notify the acquisition software to read the energy value, so the laser energy meter can collect the laser energy of preset times output by the pulse lamp pump solid laser, wherein the preset times can be set according to the specific condition and the application environment of the pulse lamp pump solid laser; and then, carrying out average calculation on the collected laser energy of the pulse type solid laser for preset times to obtain an average laser energy value, wherein the average laser energy value at the moment is the average value of the laser energy output by the pulse type lamp pump solid laser for the preset times. For example, the laser energy output by the pulsed lamp-pumped solid-state laser and the relative standard deviation are preset as the energy range for automatic adjustment, if the laser energy output by the pulsed lamp-pumped solid-state laser is set to be 0.5mJ, and the relative standard deviation is 5%, the preset laser energy range is 0.475mJ to 0.525mJ, 10 times of laser energy including the laser energy currently output by the pulsed lamp-pumped solid-state laser is collected by a laser energy meter, the average value of the laser energy output by the pulsed lamp-pumped solid-state laser, that is, the average laser energy value is obtained through statistical calculation, and whether the average laser energy value is within the preset laser energy range of 0.475mJ to 0.525mJ is judged. In the embodiment, the laser energy meter is used for efficiently collecting the laser energy output by the pulse type lamp pump solid laser in real time, and the average laser energy value output by the pulse type lamp pump solid laser is calculated according to the data collected by the laser energy meter, so that a basis is provided for regulating the laser energy output by the pulse type lamp pump solid laser.
As a specific implementation manner, the process of determining whether the average laser energy value is within the preset laser energy range, if not, adjusting the pulse time interval according to the average laser energy value and the preset laser energy range, and controlling the laser output of the pulsed lamp-pumped solid-state laser according to the adjusted Flash pulse signal and the adjusted Fire pulse signal includes the following steps: judging whether the average laser energy value is larger than the lower limit of a preset laser energy range or not, and if not, increasing the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length; and controlling the laser output of the pulse type lamp pump solid laser according to the added Flash pulse signal and Fire pulse signal. For example, the laser energy output by the pulsed lamp-pumped solid-state laser is counted for 10 times, and the average value of the laser energy for 10 times is calculated to obtain the average laser energy value output by the pulsed lamp-pumped solid-state laser, and then in this embodiment, it is determined whether the average laser energy value is greater than the lower limit of the preset laser energy range, if not, the average laser energy value is less than or equal to the lower limit of the preset laser energy range, at this time, the pulse time interval between the Flash pulse signal and the Fire pulse signal is increased according to a preset step length (for example, the preset step length is 1, and the time unit of the preset step length is the same as the time unit of the pulse time interval), and then the laser energy output by the pulsed lamp-pumped solid-state laser is controlled according to the Flash pulse signal and the Fire pulse signal after the pulse time interval is increased. In the embodiment, aiming at the condition that the average laser energy value output by the pulse type lamp pumping solid laser is not in the preset laser energy range and is smaller than the preset laser energy range, the time interval between the Flash pulse signal and the Fire pulse signal is increased, and the opening time of the Q switch is prolonged, so that the laser energy output by the pulse type lamp pumping solid laser is increased, and the average laser energy value is improved and conforms to the preset laser energy range. After the pulse time interval between the Flash pulse signal and the Fire pulse signal is increased once by the preset step length, the average laser energy value output by the pulse type lamp pump solid laser is still smaller than the lower limit of the preset laser energy range, and the steps are repeated until the average laser energy value output by the pulse type lamp pump solid laser is within the preset laser energy range, so that the self-adaptive adjustment and control of the output laser energy of the pulse type solid laser are realized.
Corresponding to the situation that the laser energy value output by the pulse lamp pump solid laser is smaller than or equal to the lower limit of the preset laser energy range, as a specific implementation mode, whether the average laser energy value is within the preset laser energy range is judged, if not, the process of adjusting the pulse time interval according to the average laser energy value and the preset laser energy range and controlling the laser energy output by the pulse lamp pump solid laser according to the adjusted Flash pulse signal and Fire pulse signal comprises the following steps: judging whether the average laser energy value is smaller than the upper limit of a preset laser energy range, if not, reducing the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length; and controlling the laser energy output by the pulse type lamp pump solid laser according to the reduced Flash pulse signal and Fire pulse signal. In this embodiment, it is determined whether the average laser energy value is smaller than the upper limit of the preset laser energy range, if not, that is, the average laser energy value is greater than or equal to the upper limit of the preset laser energy range, at this time, the pulse time interval between the Flash pulse signal and the Fire pulse signal is reduced according to a preset step length (for example, the preset step length is 1, and the time unit of the preset step length is the same as the time unit of the pulse time interval), and then the laser energy output by the pulsed lamp pump solid-state laser is controlled according to the Flash pulse signal and the Fire pulse signal after the pulse time interval is reduced. In the embodiment, aiming at the condition that the average laser energy value output by the pulse type lamp pump solid laser is not in the preset laser energy range and is larger than the preset laser energy range, the time interval between the Flash pulse signal and the Fire pulse signal is reduced, and the time for opening the Q switch is reduced, so that the laser energy output by the pulse type lamp pump solid laser is reduced, the average laser energy value is reduced, and the average laser energy value is in line with the preset laser energy range. And when the pulse time interval between the Flash pulse signal and the Fire pulse signal is reduced for one time by a preset step length, the average laser energy value output by the pulse type lamp pump solid laser is still larger than the upper limit of the preset laser energy range, repeating the steps until the average laser energy value output by the pulse type lamp pump solid laser is in the preset laser energy range, and realizing the self-adaptive regulation and control of the output laser energy of the pulse type solid laser.
The automatic control method of the laser energy provided by the invention can be realized based on a time sequence card for controlling the pulse type lamp pump solid laser, and a Flash pulse signal and a Fire pulse signal output by the time sequence card are respectively used for controlling the triggering of a pump lamp and a Q switch of the pulse type lamp pump solid laser, so that the regulation of the pulse time interval between the Flash pulse signal and the Fire pulse signal and the control of the laser energy output by the pulse type lamp pump solid laser according to the Flash pulse signal and the Fire pulse signal after the regulation of the time interval can be realized based on the time sequence card, and the method is realized by the following steps: controlling the time sequence card to stop, and updating the time interval parameter of the time sequence card at the adjusted pulse time interval; and restarting the time sequence card, wherein the time sequence card outputs the Flash pulse signal and the Fire pulse signal again according to the updated time interval parameter, and the Flash pulse signal and the Fire pulse signal output again by the time sequence card are respectively used for controlling the triggering of a pump lamp and a Q switch of the pulse lamp pump solid laser. The operation of the timing card will be described by taking the timing card USB9825M as an example, the working processes of other time sequence cards are similar, in the concrete implementation process, the function for controlling the time sequence card to stop is StopAD, the function for controlling the time sequence card to start is InitaD, the pulse time Interval between the Flash pulse signal and the Fire pulse signal output by the time sequence card is a parameter of the InitaD function, according to the above control method of the timing card, the StopAD function is first called to control the timing card to stop, updating the parameters of the InitAD function at the adjusted pulse time Interval, finally calling the InitAD function to restart the time sequence card, so that the time sequence card re-outputs the Flash pulse signal and the Fire pulse signal according to the updated time interval parameters, the laser energy output by the pulse type lamp pump solid laser is controlled, and finally the laser energy output by the pulse type lamp pump solid laser is controlled according to the Flash pulse signal and the Fire pulse signal after the pulse time interval is adjusted.
As a specific implementation manner, the pulse lamp-pumped solid-state laser is a laser for outputting an ionized laser in a Single Particle Aerosol Mass Spectrometer (spms), and the Flash pulse signal and the Fire pulse signal are pulse signals output by a time sequence card of the Single Particle Aerosol Mass Spectrometer, that is, the laser energy automatic control method provided by the present invention can be applied to the spms to control the stability of the laser energy output of the laser used as an ionization source in the spms, so as to improve the stability and the accuracy of the data of a spectrum acquired by the spms.
In order to more intuitively show the effectiveness and feasibility of the automatic control method for laser energy provided by the invention, firstly, the laser energy output by the pulse type lamp-pumped solid-state laser is artificially adjusted to be far away from a preset laser energy range, and then the change condition of the laser energy output by the pulse type lamp-pumped solid-state laser under the automatic control method for laser energy provided by the invention is recorded. As shown in fig. 3, the laser energy output by the pulsed lamp pumped solid-state laser is intentionally adjusted from the original normal 0.5mJ to 0.9mJ by human, and as can be seen from fig. 3, after about 140 times of adjustment, i.e., about 140 times of laser triggering, the laser energy output by the pulsed lamp pumped solid-state laser is adjusted from 0.9mJ to the normal 0.5mJ, and assuming that the output frequency of the pulsed lamp pumped solid-state laser is 20Hz, the laser energy is adjusted from 0.9mJ to 0.5mJ for about 7 seconds. However, in the actual sampling process, since the laser energy output by the pulse lamp pumped solid-state laser is adjusted in time, and the deviation is not so large, under the laser energy control method provided by the invention, the adjustment time of the laser energy output by the laser is generally in the millisecond level, and the influence on the sampling of an instrument using the pulse lamp pumped solid-state laser is basically negligible, so that the instrument can adjust the output laser energy of the laser in real time in the original sampling state, and the stability of the instrument for acquiring data is improved.
Meanwhile, the laser energy control method provided by the invention can be applied to the automatic control of the ionization laser energy output by the Nd-YAG pulse lamp pump solid laser of the lamp pump in the SPAMS, so that the laser energy control method provided by the invention can improve the stability of the ionization laser energy output by the Nd-YAG pulse lamp pump solid laser in the SPAMS, thereby further improving the stability of the collection of spectrogram data by the SPAMS. SPAMS is an instrument capable of analyzing the particle size and chemical composition of single aerosol in real time, and is a popular instrument for researching the physicochemical properties of aerosol, atmospheric chemical processes, particle source analysis and human body inhalation toxicology effects worldwide at present. The basic principle is as follows: atmospheric aerosol particles are pumped into the instrument through a sample introduction hole at the top end of the instrument, then are focused into a collimated particle beam through an aerodynamic lens, then enter a diameter measuring area, the aerodynamic diameter of the particle is converted in the diameter measuring area through calculating the flight time of the particle between double-beam diameter measuring lasers, finally the particle is analyzed and ionized in an ionization area by ultraviolet pulse laser emitted by 266nm Nd: YAG to generate positive and negative ions, the ions are detected by a bipolar flight time mass analyzer, and chemical composition spectrogram information of the particle is obtained on data acquisition software. The chemical composition information of the particles recorded by the spectrogram of the instrument is recorded in a spectral peak of ions, and information such as mass-to-charge ratio, peak height, peak width, peak area and the like of the ions can be obtained from the spectral peak, wherein the size of the peak area of the ions reflects the detection capability of the instrument on the ions, and the stability of the spectrogram data acquired by the instrument can be generally characterized by using the relative standard deviation of the peak area of the ions. The stability of the instrument for acquiring spectrogram data is an important index of the instrument performance and depends on the size and the stability of 266nm ionization laser energy. However, the ionization source of the existing instrument is a 266nm Nd: YAG pulse lamp pump solid laser, which causes the reduction of laser energy output and the deterioration of stability due to continuous use or the change of the temperature of the use environment, directly causes the instability of the result of the instrument for collecting spectrogram data, and causes the low working efficiency of the instrument. At present, aiming at the problem, the adopted method is only that an instrument operator monitors the laser emergent energy during sampling, so that the use is inconvenient, and the operator can only monitor the energy output and cannot simultaneously monitor the laser stability, so that the result that the instrument acquires spectrogram data is unstable due to the fact that the ionization laser energy stability is poor when the instrument continuously monitors for a long time. By applying the automatic laser energy control method provided by the invention to SPAMS, the stability of the ionization laser energy output by a 266nm Nd: YAG pulse lamp pump solid laser can be ensured, so that the stability of a SPAMS spectrogram data result is improved.
Taking the example of the detection of the cigarette gas by the SPAMS as an example, as shown in FIG. 4, a positive ion spectrogram and a negative ion spectrogram of the cigarette gas actually acquired by the SPAMS under the condition that the ionization laser energy is 0.4mJ are shown, wherein the abscissa of the positive ion spectrogram is a mass-to-charge ratio (m/z), the ordinate is a positive ion peak area, the abscissa of the negative ion spectrogram is a mass-to-charge ratio (m/z), and the ordinate is a negative ion peak area. In order to compare the laser energy fluctuation with the stability of the result of the spectrum data acquired by the SPAMS when the laser energy fluctuation is stable, the experiment observes the stability of the detection spectrum of the SPAMS for the cigarette gas under the condition that the ionization laser energy is respectively 0.2mJ, 0.4mJ and 0.6mJ, 3 times of parallel experiments are carried out under each ionization laser energy, the mass-to-charge ratios-97, -42, -26, 39, 43, 51 and 63 shown in the figure 4 are taken as research objects, the negative ion peak areas corresponding to the mass-to-charge ratios-97, -42, -26 and 39, 43, 51 and 63 under the condition that the ionization laser energy output by the pulse type YAG lamp pump solid laser is not automatically adjusted, and the positive ion peak areas corresponding to the mass-to-charge ratios-97, -42, -26 and 39, 43, 51 and 63 under the condition that the ionization laser energy output by the pulse type YAG lamp pump solid laser is respectively 0.2mJ, 0.4mJ and 0.6mJ are automatically controlled at the same time, 43. 51 and 63, respectively calculating the average value and the relative standard deviation of the peak areas under 3 parallel experiments under each ionization laser energy, and as shown in fig. 5, showing a relation graph of mass-to-charge ratio and peak area relative standard deviation, according to the data result shown in fig. 5, the ionization laser energy output by the Nd: YAG pulse lamp pump solid laser of SPAMS is automatically controlled and adjusted by the laser energy automatic control method, so that the relative standard deviation of the collected ion peak areas can be reduced, and the stability of the collection spectrogram data of SPAMS can be effectively improved.
Accordingly, the present invention also provides an automatic control device for laser energy, which, in one embodiment, as shown in fig. 6, comprises:
an obtaining module 100, configured to obtain an average laser energy value output by a pulse-type lamp-pumped solid-state laser;
the judging module 200 is configured to judge whether the average laser energy value is within a preset laser energy range;
the adjusting module 300 is configured to adjust a pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range when the determination result of the determining module is negative, where the Flash pulse signal is used to control triggering of a pump lamp of the pulse lamp pump solid state laser, and the Fire pulse signal is used to control triggering of a Q switch of the pulse lamp pump solid state laser;
and the control module 400 is used for controlling the laser energy output by the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and Fire pulse signal.
In this embodiment, a pulse lamp-pumped solid-state laser (such as Nd: YAG solid-state laser) is used as a control object to automatically control and adjust the laser energy output by the laser. The obtaining module 100 obtains an average laser energy value output by the pulsed lamp pumped solid-state laser, where the obtained average laser energy value may be obtained by measuring laser energy output by the laser for a certain preset number of times by using a power meter, an energy meter, or a spectrometer, and performing statistical average calculation on the measured laser energy, where the laser energy output by the laser for the certain preset number of times may be laser energy output by the pulsed lamp pumped solid-state laser within a certain time period and including laser energy output by a current laser.
The determining module 200 determines whether the average laser energy value obtained by the obtaining module 100 is within a preset laser energy range, where the preset laser energy range may be set according to the type and specific application environment of the pulsed lamp-pumped solid-state laser, and if the determining module 200 determines that the average laser energy value is not within the preset laser energy range, the determining module adjusts a pulse time interval according to the average laser energy value and the preset laser energy range, where the pulse time interval is a pulse time interval between adjacent single pulses of a Flash pulse signal and a Fire pulse signal, where the Flash pulse signal and the Fire pulse signal are respectively used to control triggering of a pump lamp of the pulsed lamp-pumped solid-state laser and triggering of a Q switch.
The control module 400 controls the laser energy output by the pulse lamp pump solid laser according to the adjusted Flash pulse signal and Fire pulse signal. The control module 400 controls the pump lamp and the Q switch of the pulsed lamp pumped solid-state laser to be triggered respectively by using the Flash pulse signal and the Fire pulse signal after the pulse time interval is adjusted, and the purpose of controlling the laser energy output by the pulsed lamp pumped solid-state laser is achieved by adjusting the time interval between the two pulse signals of the Flash pulse signal and the Fire pulse signal in real time. For example, a lamp-pumped Nd: YAG pulse lamp-pumped solid-state laser, which includes a pump lamp, a Nd: YAG crystal, a resonant cavity, and a Q-Switch (Q-Switch element), operates according to the basic principle: YAG crystal receives primary light with certain energy radiated by a pump lamp after being excited, the energy of the primary light is in Gaussian distribution along with the increase of time, the energy output by the primary light with different energy after passing through the same resonant cavity is also different, and finally the output energy of the laser is in Gaussian distribution along with the increase of time, so that the control module 400 opens the Q switch in time in the process that the primary light changes along with time, the energy of the primary light can be controlled, and the control of the output energy of the final pulse type lamp pump solid laser is realized.
The automatic laser energy control device provided by this embodiment determines whether the average laser energy value is within a preset laser energy range by obtaining the average laser energy value output by the pulsed lamp pumped solid-state laser, and if not, adjusts the pulse time interval between the Flash pulse signal and the Fire pulse signal according to the average laser energy value and the preset laser energy range, and further adjusts the trigger time of the pump lamp and the Q switch of the pulsed lamp pumped solid-state laser in real time, thereby realizing automatic control of the laser energy output by the pulsed lamp pumped solid-state laser. The automatic laser energy control device can automatically control and adjust the laser energy output by the pulse type lamp pump solid laser, improves the stability of the laser energy output by the pulse type lamp pump solid laser, basically ignores the influence of the automatic adjustment time of the laser energy output by the laser on instrument sampling in millisecond magnitude, is favorable for realizing real-time adjustment of the laser energy under the original sampling state of the instrument, and improves the stability of the instrument for acquiring spectrogram data.
As a specific implementation manner, the automatic laser energy control device further comprises a laser energy meter module and a calculation module, wherein the laser energy meter module is used for collecting laser energy of preset times output by the pulse lamp pump solid laser; the calculation module is used for calculating an average laser energy value according to the laser energy and the preset times. In the embodiment, the laser energy meter module collects the laser energy output by the pulse lamp pumping solid laser once when the pump lamp of the pulse lamp pumping solid laser is triggered once under the control of the Flash pulse signal, specifically, the drive package of the laser energy meter module provides a COM component, the mode of reading the laser energy is passive, the COM component triggers an event to inform data acquisition software to read energy data, when the pulse lamp pump solid laser outputs laser light every time of triggering, the laser energy meter module can timely collect laser energy and immediately inform collection software to read the energy value, therefore, the laser energy meter module can collect the current output laser energy of the pulse type lamp pump solid laser and the output laser energy of the preset times before the current output laser energy, the preset times can be set according to the specific condition and application environment of the pulse lamp pumping solid laser; and then the calculating module calculates the average value of the current output laser energy and the output laser energy of the preset times to obtain an average laser energy value, wherein the average laser energy value at the moment is the average value of the laser energy output by the pulse lamp pump solid laser under the preset times. For example, the laser energy output by the pulsed lamp-pumped solid-state laser and the relative standard deviation are preset as the energy range for automatic adjustment, if the laser energy output by the pulsed lamp-pumped solid-state laser is set to be 0.5mJ and the relative standard deviation is 5%, the preset laser energy range is 0.475mJ to 0.525mJ, 10 times of laser energy including the laser energy currently output by the pulsed lamp-pumped solid-state laser is collected by using a laser energy meter module, the average laser energy value, which is the average laser energy value of the laser energy output by the pulsed lamp-pumped solid-state laser, is obtained by statistical calculation of a calculation module, and the judgment module judges whether the average laser energy value is within the preset laser energy range of 0.475mJ to 0.525 mJ. In the embodiment, the laser energy meter module is used for efficiently collecting the laser energy output by the pulse type lamp pump solid laser in real time, and the calculation module calculates the average laser energy value output by the pulse type lamp pump solid laser according to the data collected by the laser energy meter module, so that a basis is provided for regulating the laser energy output by the pulse type lamp pump solid laser.
As a specific implementation manner, the judging module judges whether the average laser energy value is larger than the lower limit of the preset laser energy range, if not, the adjusting module increases the pulse time interval between the Flash pulse signal and the Fire pulse signal according to the preset step length; and the control module controls the laser energy output by the pulse type lamp pump solid laser according to the added Flash pulse signal and Fire pulse signal. For example, the calculation module counts the laser energy values output by 10 pulsed lamp-pumped solid-state lasers, and calculating the average value of the 10 laser energy values to obtain the average laser energy value output by the pulse lamp pumping solid laser, then, in the present embodiment, the determining module determines whether the average laser energy value is greater than the lower limit of the preset laser energy range, and if not, namely, the judging module judges that the average laser energy value is less than or equal to the lower limit of the preset laser energy range, at the moment, the adjusting module increases the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length (if the preset step length is 1, the time unit of the preset step length is the same as the time unit of the pulse time interval), and the control module controls the laser energy output by the pulse type lamp pump solid laser according to the Flash pulse signal and the Fire pulse signal after the pulse time interval is increased. In the embodiment, aiming at the condition that the average laser energy value output by the pulse type lamp pump solid laser is not in the preset laser energy range and is smaller than the preset laser energy range, the time interval between the Flash pulse signal and the Fire pulse signal is increased through the adjusting module, and the opening time of the Q switch is prolonged, so that the laser energy output by the pulse type lamp pump solid laser under the control of the control module is increased, and the average laser energy value is improved and is in line with the preset laser energy range. When the adjusting module increases the pulse time interval between the Flash pulse signal and the Fire pulse signal once by a preset step length, the judging module still judges that the average laser energy value output by the pulse type lamp pump solid laser is smaller than the lower limit of the preset laser energy range, and the adjusting module continues to adjust the pulse time interval until the average laser energy value output by the pulse type lamp pump solid laser is within the preset laser energy range, so that the self-adaptive adjustment and control of the output laser energy of the pulse type solid laser are realized.
Corresponding to the situation that the laser energy value output by the pulse lamp pump solid laser is smaller than or equal to the lower limit of the preset laser energy range, as a specific implementation mode, the judging module judges whether the average laser energy value is smaller than the upper limit of the preset laser energy range, and if not, the adjusting module reduces the pulse time interval between the Flash pulse signal and the Fire pulse signal according to the preset step length; and the control module controls the laser energy output by the pulse type lamp pump solid laser according to the reduced Flash pulse signal and the Fire pulse signal. For example, the calculation module counts the laser energy output by the 10 pulse lamp pumping solid laser devices, and calculating the average value of the 10 laser energy values to obtain the average laser energy value output by the pulse lamp pumping solid laser, then, in the present embodiment, the determining module determines whether the average laser energy value is smaller than the upper limit of the preset laser energy range, and if not, namely, the judging module judges that the average laser energy value is larger than or equal to the upper limit of the preset laser energy range, at the moment, the adjusting module reduces the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length (if the preset step length is 1, the time unit of the preset step length is the same as the time unit of the pulse time interval), and the control module controls the laser energy output by the pulse type lamp pump solid laser according to the Flash pulse signal and the Fire pulse signal after the pulse time interval is reduced. In the embodiment, aiming at the condition that the average laser energy value output by the pulse type lamp pump solid laser is not in the preset laser energy range and is larger than the preset laser energy range, the time interval between the Flash pulse signal and the Fire pulse signal is reduced through the adjusting module, and the time for opening the Q switch is reduced, so that the laser energy output by the pulse type lamp pump solid laser under the control of the control module is reduced, and the average laser energy value is reduced and conforms to the preset laser energy range. When the adjusting module reduces the pulse time interval between the Flash pulse signal and the Fire pulse signal by a preset step length, the judging module still judges that the average laser energy value output by the pulse type lamp pump solid laser is larger than the upper limit of the preset laser energy range, and the adjusting module continues to adjust the pulse time interval until the average laser energy value output by the pulse type lamp pump solid laser is in the preset laser energy range, so that the self-adaptive adjustment and control of the output laser energy of the pulse type solid laser are realized.
The automatic laser energy control device provided by the invention can be realized based on a time sequence card for controlling a pulse type lamp pump solid laser, and a Flash pulse signal and a Fire pulse signal output by the time sequence card are respectively used for controlling the triggering of a pump lamp and a Q switch of the pulse type lamp pump solid laser, so that the adjusting module for adjusting the pulse time interval between the Flash pulse signal and the Fire pulse signal and the control module for controlling the laser energy output by the pulse type lamp pump solid laser according to the Flash pulse signal and the Fire pulse signal after the time interval is adjusted can be realized based on the time sequence card: controlling the time sequence card to stop, and updating the time interval parameter of the time sequence card at the adjusted pulse time interval; and restarting the time sequence card, wherein the time sequence card outputs the Flash pulse signal and the Fire pulse signal again according to the updated time interval parameter, and the Flash pulse signal and the Fire pulse signal output again by the time sequence card are respectively used for controlling the triggering of a pump lamp and a Q switch of the pulse lamp pump solid laser. The operation of the timing card will be described by taking the timing card USB9825M as an example, the working processes of other time sequence cards are similar, in the concrete implementation process, the function for controlling the time sequence card to stop is StopAD, the function for controlling the time sequence card to start is InitaD, the pulse time Interval between the Flash pulse signal and the Fire pulse signal output by the time sequence card is a parameter of the InitaD function, according to the above control method of the timing card, the StopAD function is first called to control the timing card to stop, updating the parameters of the InitAD function at the adjusted pulse time Interval, finally calling the InitAD function to restart the time sequence card, so that the time sequence card re-outputs the Flash pulse signal and the Fire pulse signal according to the updated time interval parameters, the laser energy output by the pulse type lamp pump solid laser is controlled, and finally the laser energy output by the pulse type lamp pump solid laser is controlled according to the Flash pulse signal and the Fire pulse signal after the pulse time interval is adjusted.
As a specific implementation manner, the pulse lamp-pumped solid-state laser is a laser for outputting an ionized laser in a Single Particle Aerosol Mass Spectrometer (spms), and the Flash pulse signal and the Fire pulse signal are pulse signals output by a time sequence card of the Single Particle Aerosol Mass Spectrometer, that is, the laser energy automatic control device provided by the invention can be applied to the spms to control the stability of the laser energy output of the laser used as an ionization source in the spms, so as to improve the stability and accuracy of spectrum data acquired by the spms.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (6)

1. A laser energy automatic control method is characterized by comprising the following steps:
obtaining an average laser energy value output by a pulse type lamp pump solid laser;
judging whether the average laser energy value is within a preset laser energy range, if not, adjusting the pulse time interval between a Flash pulse signal and a Fire pulse signal according to the average laser energy value and the preset laser energy range, and adjusting the trigger time of a pump lamp and a Q switch of the pulse lamp pump solid laser in real time, thereby realizing the automatic control of the laser energy output by the pulse lamp pump solid laser; the Flash pulse signal is used for controlling the triggering of a pump lamp of the pulse lamp pump solid laser, and the Fire pulse signal is used for controlling the triggering of a Q switch of the pulse lamp pump solid laser;
controlling the laser output of the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and Fire pulse signal;
the process of judging whether the average laser energy value is within a preset laser energy range comprises the following steps:
judging whether the average laser energy value is larger than the lower limit of the preset laser energy range or not;
if not, increasing the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length;
controlling the laser output of the pulse type lamp pump solid laser according to the added Flash pulse signal and Fire pulse signal;
judging whether the average laser energy value is smaller than the upper limit of the preset laser energy range or not;
if not, reducing the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length;
and controlling the laser output of the pulse type lamp pump solid laser according to the reduced Flash pulse signal and Fire pulse signal.
2. The method of claim 1, wherein the step of obtaining an average laser energy value output by the pulsed lamp-pumped solid state laser is preceded by the step of:
collecting laser energy of preset times output by the pulse type lamp pumping solid laser by using a laser energy meter;
and calculating the average laser energy value according to the laser energy and the preset times.
3. The automatic laser energy control method according to claim 1 or 2,
the pulse type lamp-pumped solid laser is a laser used for outputting ionization laser in a single-particle aerosol mass spectrometer, and the Flash pulse signal and the Fire pulse signal are pulse signals output by a time sequence card of the single-particle aerosol mass spectrometer.
4. An automatic control device for laser energy, comprising:
the acquisition module is used for acquiring the average laser energy value output by the pulse type lamp pump solid laser;
the judging module is used for judging whether the average laser energy value is within a preset laser energy range or not;
the adjusting module is used for adjusting the pulse time interval between the Flash pulse signal and the Fire pulse signal according to the average laser energy value and the preset laser energy range and adjusting the trigger time of a pump lamp and a Q switch of the pulse lamp pump solid laser in real time when the judging result of the judging module is negative, so that the laser energy output by the pulse lamp pump solid laser is automatically controlled; the Flash pulse signal is used for controlling the triggering of a pump lamp of the pulse lamp pump solid laser, and the Fire pulse signal is used for controlling the triggering of a Q switch of the pulse lamp pump solid laser;
the control module is used for controlling the laser output of the pulse type lamp pump solid laser according to the adjusted Flash pulse signal and the adjusted Fire pulse signal;
the judging module judges whether the average laser energy value is larger than the lower limit of the preset laser energy range,
if not, the adjusting module increases the pulse time interval between the Flash pulse signal and the Fire pulse signal according to the preset step length,
the control module controls the laser output of the pulse type lamp pump solid laser according to the added Flash pulse signal and Fire pulse signal;
the judging module judges whether the average laser energy value is smaller than the upper limit of the preset laser energy range,
if not, the adjusting module reduces the pulse time interval between the Flash pulse signal and the Fire pulse signal according to a preset step length,
and the control module controls the laser output of the pulse type lamp pump solid laser according to the reduced Flash pulse signal and the reduced Fire pulse signal.
5. The laser energy automatic control device according to claim 4, further comprising a laser energy meter module and a calculation module,
the laser energy meter module is used for collecting laser energy of preset times output by the pulse lamp pumping solid laser;
the calculation module is used for calculating the average laser energy value according to the laser energy and the preset times.
6. The automatic laser energy control device according to claim 4 or 5,
the pulse type lamp-pumped solid laser is a laser used for outputting ionization laser in a single-particle aerosol mass spectrometer, and the Flash pulse signal and the Fire pulse signal are pulse signals output by a time sequence card of the single-particle aerosol mass spectrometer.
CN201610507372.2A 2016-06-28 2016-06-28 Automatic control method and device for laser energy Active CN107546563B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610507372.2A CN107546563B (en) 2016-06-28 2016-06-28 Automatic control method and device for laser energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610507372.2A CN107546563B (en) 2016-06-28 2016-06-28 Automatic control method and device for laser energy

Publications (2)

Publication Number Publication Date
CN107546563A CN107546563A (en) 2018-01-05
CN107546563B true CN107546563B (en) 2020-04-21

Family

ID=60966027

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610507372.2A Active CN107546563B (en) 2016-06-28 2016-06-28 Automatic control method and device for laser energy

Country Status (1)

Country Link
CN (1) CN107546563B (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6229113B1 (en) * 1999-07-19 2001-05-08 United Technologies Corporation Method and apparatus for producing a laser drilled hole in a structure
CN1309826A (en) * 1998-06-12 2001-08-22 通用扫描公司 Pulse control in laser systems
US6490299B1 (en) * 2000-07-20 2002-12-03 Troitski Method and laser system for generating laser radiation of specific temporal shape for production of high quality laser-induced damage images
CN1801551A (en) * 2006-01-12 2006-07-12 中国科学院上海光学精密机械研究所 Control system for laser diode pumping source
CN102946046A (en) * 2012-11-22 2013-02-27 深圳市大族激光科技股份有限公司 Laser energy control method and system
CN105598582A (en) * 2016-02-04 2016-05-25 广东正业科技股份有限公司 Laser energy adjustment device and laser micromachining equipment

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1309826A (en) * 1998-06-12 2001-08-22 通用扫描公司 Pulse control in laser systems
US6229113B1 (en) * 1999-07-19 2001-05-08 United Technologies Corporation Method and apparatus for producing a laser drilled hole in a structure
US6490299B1 (en) * 2000-07-20 2002-12-03 Troitski Method and laser system for generating laser radiation of specific temporal shape for production of high quality laser-induced damage images
CN1801551A (en) * 2006-01-12 2006-07-12 中国科学院上海光学精密机械研究所 Control system for laser diode pumping source
CN102946046A (en) * 2012-11-22 2013-02-27 深圳市大族激光科技股份有限公司 Laser energy control method and system
CN105598582A (en) * 2016-02-04 2016-05-25 广东正业科技股份有限公司 Laser energy adjustment device and laser micromachining equipment

Also Published As

Publication number Publication date
CN107546563A (en) 2018-01-05

Similar Documents

Publication Publication Date Title
JP6616432B2 (en) Method of detecting steel sample components using multi-pulse laser induced plasma spectrum analyzer
US20050279929A1 (en) Laser desorption and ionization mass spectrometer with quantitative reproducibility
US20070045527A1 (en) Laser irradiation mass spectrometer
CA2666756A1 (en) Multi-channel detection
Mitra et al. Hybrid arc/glow microdischarges at atmospheric pressure and their use in portable systems for liquid and gas sensing
Rohlfing et al. Investigation of the desorption process in UV matrix-assisted laser desorption/ionization with a liquid 3-nitrobenzyl alcohol matrix by photoacoustic analysis, fast-flash imaging, and UV-laser postionization
Phares et al. Performance of a single ultrafine particle mass spectrometer
US20140339423A1 (en) Ultraviolet diode and atomic mass analysis ionization source collecting device using ultraviolet diode and an mcp
CN107546563B (en) Automatic control method and device for laser energy
US9373493B2 (en) Mass spectrometer and method of adjusting same
KR101235145B1 (en) Spectrometer using Continuous Wave Laser and Photomultiplier Tube
JPH09184900A (en) Pulse x-ray irradiating apparatus
JP2011023167A (en) Ion trapping device
CN111223740B (en) Method and system for regulating and controlling ion quantity in mass spectrometer ion trap mass analyzer
JP6976445B2 (en) Mass spectrometer and mass spectrometry method
JP2005025946A (en) Time-of-flight mass spectrometry apparatus
JP4701720B2 (en) MALDI ion trap mass spectrometer and analysis method
Griffin et al. Fast switching of alkali atom dispensers using laser-induced heating
JP3740853B2 (en) Mass spectrometer
JPH07325020A (en) Sample introducing apparatus for ion analytical instrument
JP6686557B2 (en) Particle measuring device and particle measuring method
JP6075311B2 (en) Ion trap mass spectrometer and mass spectrometry method using the apparatus
US20230178316A1 (en) Optical path system for detecting vacuum degree of vacuum switch and method thereof
JP2013036779A (en) Laser-induced breakdown spectral analyzer
JPS6142979A (en) Laser device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20210414

Address after: 510700 Room 102, building A3, 11 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province

Patentee after: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd.

Patentee after: KUNSHAN HEXIN MASS SPECTROMETRY TECHNOLOGY Co.,Ltd.

Address before: 510530 Guangdong Guangzhou Guangzhou hi tech Industrial Development Zone, Science City, 11 yuan A3 Road third floor.

Patentee before: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd.

Patentee before: Jinan University

Patentee before: KUNSHAN HEXIN MASS SPECTROMETRY TECHNOLOGY Co.,Ltd.

CP02 Change in the address of a patent holder
CP02 Change in the address of a patent holder

Address after: 510535 No. 16, Xinrui Road, Huangpu District, Guangzhou, Guangdong

Patentee after: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd.

Patentee after: Kunshan Hexin Mass Spectrometry Technology Co., Ltd

Address before: 510700 Room 102, building A3, 11 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province

Patentee before: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd.

Patentee before: Kunshan Hexin Mass Spectrometry Technology Co., Ltd