CN107528011A - A kind of flexible display panels and preparation method thereof, flexible display - Google Patents

A kind of flexible display panels and preparation method thereof, flexible display Download PDF

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Publication number
CN107528011A
CN107528011A CN201710733417.2A CN201710733417A CN107528011A CN 107528011 A CN107528011 A CN 107528011A CN 201710733417 A CN201710733417 A CN 201710733417A CN 107528011 A CN107528011 A CN 107528011A
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CN
China
Prior art keywords
absorbing layer
light absorbing
flexible
substrate
flexible substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710733417.2A
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Chinese (zh)
Inventor
孙翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to CN201710733417.2A priority Critical patent/CN107528011A/en
Publication of CN107528011A publication Critical patent/CN107528011A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/80Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • H10K77/111Flexible substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

This application discloses a kind of flexible display panels and preparation method thereof, flexible display.The preparation method of the flexible display panels, which is included on a substrate, forms a light absorbing layer;Flexible substrates are formed on the light absorbing layer;Display device is formed in the flexible substrates;By light beam from the substrate incident to the light absorbing layer so that the light absorbing layer is destroyed to separate the substrate and the flexible substrates, forms the flexible display panels comprising the flexible substrates and the display device.The preparation method of the flexible display panels of the application between substrate and flexible substrates by setting a light absorbing layer, when flexible substrates are peeled off in substrate, incident light beam is absorbed by light absorbing layer, light absorbing layer is made to be destroyed in the presence of light beam, and then separate flexible substrates and substrate, avoid flexible substrates to receive the influence of incident light beam and carbonization phenomenon occur, improve the tack of flexible substrates.

Description

A kind of flexible display panels and preparation method thereof, flexible display
Technical field
The application is related to display technology field, in particular to a kind of flexible display panels and preparation method thereof, flexibility Display.
Background technology
With the maturation of flexible display panels technology, the mass production of flexible display panels has become possibility.Prior art The preparation method of middle flexible display panels, flexible substrates are typically formed on substrate, then form display on a flexible substrate Part, substrate and flexible substrates are irradiated finally by the light beam of higher-strength, and then flexible substrates and substrate are peeled off.
However, light beam is usually to irradiate flexible substrates from substrate incident, the light beam of higher-strength can cause flexible substrates to go out Now different degrees of carbonization phenomenon, for example, molecule, crackle etc. are produced, and then the functional layer of the successive process made can not be put down Smoothization, the tack of flexible substrates is reduced, influence successive process, reduce product yield.
The content of the invention
The application provides a kind of flexible display panels and preparation method thereof, flexible display, the system of the flexible display panels Preparation Method can improve the tack of the flexible substrates for the flexible display panels being prepared.
On the one hand, a technical scheme of the embodiment of the application one proposition is:A kind of preparation of flexible display panels is provided Method, the preparation method include:
A light absorbing layer is formed on a substrate;
Flexible substrates are formed on the light absorbing layer;
Display device is formed in the flexible substrates;
By light beam from the substrate incident to the light absorbing layer so that the light absorbing layer is destroyed to separate the lining Bottom and the flexible substrates, form the flexible display panels comprising the flexible substrates and the display device.
Wherein, the light absorbing layer is ultraviolet light absorbing layer, and the light beam is ultraviolet light beams.
Wherein, the light absorbing layer is higher than absorption of the flexible substrates to the light beam to the absorptivity of the light beam Rate, and the hydrogen content of the light absorbing layer is higher than the hydrogen content of the flexible substrates.
Wherein, the light absorbing layer is amorphous silicon layer.
Wherein, the thickness of the light absorbing layer is 450-500 angstroms.
Wherein, by light beam from the substrate incident to the light absorbing layer so that the light absorbing layer is destroyed with separation The substrate and the flexible substrates, including:
By light beam from the substrate incident to the light absorbing layer, the light absorbing layer is made to absorb the light beam and hydrogen occurs It is quick-fried so that the light absorbing layer is destroyed to separate the substrate and the flexible substrates.
Wherein, it is described that a light absorbing layer is formed on a substrate, be specially:
Using plasma gas-phase deposit, the light absorbing layer is formed over the substrate.
Wherein, the display device is liquid crystal display device or OLED display device.
On the other hand, another embodiment of the application provides a kind of flexible display panels, and the flexible display panels include:
Flexible substrates, and the display device being arranged in the flexible substrates;
Wherein, the flexible display panels are prepared by the preparation method of the flexible display panels provided according to above-described embodiment Form.
On the other hand, the another embodiment of the application provides a kind of flexible display, and the flexible display is included in the application The flexible display panels provided in embodiment and drive circuit are provided, the drive circuit is connected with the flexible display panels, For driving the flexible display panels.
Beneficial effect:Prior art is different from, the preparation method of the flexible display panels of the embodiment of the present application is included in one A light absorbing layer is formed on substrate;Flexible substrates are formed on the light absorbing layer;Display is formed in the flexible substrates Part;By light beam from the substrate incident to the light absorbing layer so that the light absorbing layer it is destroyed with separate the substrate with The flexible substrates, form the flexible display panels comprising the flexible substrates and the display device.The flexibility of the application shows Show that the preparation method of panel by setting a light absorbing layer between substrate and flexible substrates, is peeled off in substrate by flexible substrates When, incident light beam is absorbed by light absorbing layer, and the light beam of incidence is not interfered with flexible substrates, light absorbing layer is in light beam Effect is lower destroyed, and then separates flexible substrates and substrate, avoids flexible substrates and receives the influence of incident light beam and occur Carbonization phenomenon, improve the tack of flexible substrates.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the preparation method first embodiment of the application flexible display panels;
Fig. 2 a-2d are that the structure of flexible display panels corresponding to each step of preparation method first embodiment shown in Fig. 1 is shown It is intended to;
Fig. 3 is the structural representation of the embodiment of the application flexible display panels one;
Fig. 4 is the structural representation of the embodiment of the application flexible display one.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present application and embodiment, the technical scheme in the embodiment of the present application is carried out Clearly and completely describe, in specification and Figure of description, identical structure uses identical label, it is clear that described embodiment Only it is the part of the embodiment of the application, rather than whole embodiments.Based on the embodiment in the application, the common skill in this area The every other embodiment that art personnel are obtained under the premise of creative work is not made, belong to the model of the application protection Enclose.
Refering to Fig. 1, Fig. 1 is the schematic flow sheet of the preparation method first embodiment of the application flexible display panels, such as Fig. 1 Shown, the preparation method of the flexible display panels of the present embodiment may include following steps:
S101, a light absorbing layer is formed on a substrate.
In the present embodiment, before forming flexible substrates 30 over the substrate 10, a light absorbing layer 20 is initially formed over the substrate 10, such as Shown in Fig. 2 a.Light absorbing layer 20 can absorb the light beam for peeling off flexible substrates 30 and substrate 10, and can be in the effect of light beam Issue third contact of a total solar or lunar eclipse reaction and be destroyed.In the present embodiment, can be formed over the substrate 10 by the method for plasma gas-phase deposit Light absorbing layer 20.It is understood that in other embodiments, light absorbs can also be formed over the substrate 10 by other method Layer 20, such as chemical vapor deposition, sputtering, coating etc..
In the present embodiment, the material of substrate 10 is the transparent material for being capable of printing opacity, can be glass or organic synthesis material, It should be noted that substrate 10 will not be influenceed by light beam, and have certain hardness, and then can be to being formed on substrate 10 Light absorbing layer 20, the hierarchical structure such as flexible substrates 30 play a part of support.
S102, form flexible substrates on the light absorbing layer.
Step S101 formed light absorbing layer 20 above formed flexible substrates 30, obtained structure as shown in Figure 2 b, Embodiment is not particularly limited to the forming method of flexible substrates 30, can use plasma gas-phase deposit, chemical vapor deposition, Sputtering, coating etc..In the present embodiment, the material of flexible substrates 30 can be polyimides or other flexible materials.
Further, absorptivity of the light absorbing layer 20 to the light beam for peeling off flexible substrates 30 and substrate 10 in the present embodiment Be higher than the absorptivity of the flexible substrates 30 that are formed in this step to the light beam, and the hydrogen content of light absorbing layer 20 be also higher than it is soft The hydrogen content of property substrate 30.In this way, when finally peeling off flexible substrates 30 with substrate 10 using light beam, light absorbing layer 20 can be utilized To the higher absorptivity of light beam, reach the purpose for largely protecting flexible substrates 30 not influenceed by light beam, avoid flexibility Substrate 30 receives influence under the irradiation of light beam, carbonization phenomenon occurs;And the hydrogen content of light absorbing layer 20 is higher, light can be inhaled Layer 20 is received the quick-fried phenomenon of hydrogen occurs in the presence of light beam and is destroyed.
S103, form display device in the flexible substrates.
Display device 40 is further prepared in the flexible substrates 30 that step S102 is formed, obtained flexible display panels Structure is as shown in Figure 2 c.In the present embodiment, the concrete structure of display device 40 is not limited, can be prepared according to the actual requirements not Isostructural display device 40.Display device 40 can be liquid crystal display device, or OLED display device.
When display device 40 is liquid crystal display device, this step is that thin film transistor (TFT) battle array is formed in flexible substrates 30 Row.If display device 40 is OLED display device, this step, which is included in flexible substrates 30, sequentially forms ITO electrode layer, sky Cave implanted layer, hole transmission layer, organic luminous layer, electron transfer layer, electron injecting layer and metal electrode layer, and then be prepared into To including ITO electrode layer, hole injection layer, hole transmission layer, organic luminous layer, electron transfer layer, electron injecting layer and gold Belong to the OLED display device of electrode layer.
S104, by light beam from the substrate incident to the light absorbing layer, formed comprising flexible substrates and described aobvious Show the flexible display panels of device.
After the completion of prepared by display device 40, then need the flexible display panels comprising flexible substrates 30 and display device 40 Peel off from substrate 10, in other words, that is, need flexible substrates 30 with being peeled off on substrate 10.
Now, refering to Fig. 2 d, light beam is incident to light absorbing layer 20 from substrate 10, because light absorbing layer 20 has to the light beam There are higher absorptivity, and higher hydrogen content, therefore light absorbing layer 20 can absorb the light beam, and under the irradiation of light beam The quick-fried phenomenon of generation hydrogen, and then make light absorbing layer 20 destroyed, after light absorbing layer 20 is destroyed, flexible substrates 30 are then automatically and light Absorbed layer 20 is peeled off, and substrate 10 is also peeled off with light absorbing layer 20, and then is realized and peeled off flexible substrates 30 from substrate 10, shape The flexible display panels 100 of the display device 40 prepared into comprising flexible substrates 30 and step S103, now Flexible Displays face The structure of plate 100 is as shown in Figure 3.
Light beam in the present embodiment can use laser beam, because laser beam can possess higher energy.
The preparation method of the flexible display panels of the present embodiment between substrate 10 and flexible substrates 30 by setting a light Absorbed layer 20, when flexible substrates 30 are peeled off in substrate 10, the light beam of incidence is absorbed by light absorbing layer 20, and make incidence Light beam does not interfere with flexible substrates 30, and light absorbing layer 20 occurs the quick-fried phenomenon of hydrogen under the irradiation of light beam and is destroyed, and then separates Flexible substrates 30 and substrate 10, avoid flexible substrates 30 and receive the influence of incident light beam and carbonization phenomenon occur, order is flexible Light beam of the tack of substrate 30 not by incidence is influenceed, and that improves flexible display panels prepares yield.
Further, in the present embodiment, the light beam for peeling off flexible substrates 30 and substrate 10 can be ultraviolet light beams, phase Answer, light absorbing layer 20 is ultraviolet light absorbing layer 20, and thus, light absorbing layer 20 can be amorphous silicon layer, it is to be understood that In other embodiment, light absorbing layer 20 can also be other materials layer, and the application is not particularly limited.It is ultraviolet in the present embodiment The wavelength of light light beam is between 200 nanometers to 325 nanometers.
Further, in order to cause during peeling off flexible substrates 30 and substrate 10 in step S104, Neng Gouling Light absorbing layer 20 is completely destroyed relatively, makes light absorbing layer 20 not have residual and be attached to flexible substrates 30 as far as possible On, and light absorbing layer 20 as much as possible can absorb light beam and make light beam not influence flexible substrates 30, and therefore, light absorbs Thickness need corresponding control, in the present embodiment, the thickness of light absorbing layer 20 is 450-500 angstroms.It is understood that at it The thickness of light absorbs can be adjusted according to the demand of reality in his embodiment.
Further, the application also proposed a flexible display panels embodiment, the flexible display panels 100 of the present embodiment Structure as shown in figure 3, including flexible substrates 30 and the display device 40 being arranged in the flexible substrates 30, wherein, this is soft Property display panel 100 is that the preparation method first embodiment of the flexible display panels according to Fig. 1 is prepared, herein no longer Repeat.
In the present embodiment, the display device 40 in flexible substrates 30 can be liquid crystal display device, or OLED shows Show device.If the display device 40 of the present embodiment is liquid crystal display device, the display device 40 forms thin film transistor (TFT) array; If the display device 40 of the present embodiment is OLED display device, the display device 40 includes the ITO electrode being cascading Layer, hole injection layer, hole transmission layer, organic luminous layer, electron transfer layer, electron injecting layer and metal electrode layer, and then It is prepared comprising ITO electrode layer, hole injection layer, hole transmission layer, organic luminous layer, electron transfer layer, electron injecting layer And the OLED display device of metal electrode layer.
The flexible display panels of the present embodiment are because in its preparation process, flexible substrates 30 will not be received for peeling off flexibility The influence of the light beam of substrate 30 and substrate 10, thus there is preferable tack, can make thereon it is square into display device 40 It is difficult for drop-off, and be hardly damaged in subsequent preparation process, and then improve and prepare flexible display using the flexible display panels When prepare yield.
Further, a flexible display embodiment is also disclosed in the application, as shown in figure 4, the flexible display of the present embodiment 200 include a flexible display panels and drive circuit 50, and drive circuit 50 connects the flexible display panels, for driving this soft Property display panel, to flexible display panels transmit drive signal.
Flexible display panels in the flexible display of the present embodiment are the flexible display panels 100 shown in Fig. 3, and its is specific Structure refers to Fig. 3 and the above-mentioned detailed description to Fig. 3, and here is omitted.
The flexible display of the present embodiment, it is used for because the flexible substrates 30 in flexible display panels therein will not receive Peel off the influence of the light beam of flexible substrates 30 and substrate 10, thus there is preferable tack, it is possible to increase the present embodiment it is soft Property display prepares yield.
Embodiments herein is these are only, not thereby limits the scope of the claims of the application, it is every to be said using the application The equivalent structure or equivalent flow conversion that bright book and accompanying drawing content are made, or directly or indirectly it is used in other related technology necks Domain, similarly it is included in the scope of patent protection of the application.

Claims (10)

  1. A kind of 1. preparation method of flexible display panels, it is characterised in that including
    A light absorbing layer is formed on a substrate;
    Flexible substrates are formed on the light absorbing layer;
    Display device is formed in the flexible substrates;
    By light beam from the substrate incident to the light absorbing layer so that the light absorbing layer it is destroyed with separate the substrate with The flexible substrates, form the flexible display panels comprising the flexible substrates and the display device.
  2. 2. preparation method according to claim 1, it is characterised in that the light absorbing layer is ultraviolet light absorbing layer, described Light beam is ultraviolet light beams.
  3. 3. preparation method according to claim 1, it is characterised in that the light absorbing layer is high to the absorptivity of the light beam Absorptivity in the flexible substrates to the light beam, and the hydrogen content of the light absorbing layer is hydrogeneous higher than the flexible substrates Amount.
  4. 4. preparation method according to claim 1, it is characterised in that the light absorbing layer is amorphous silicon layer.
  5. 5. preparation method according to claim 1, it is characterised in that the thickness of the light absorbing layer is 450-500 angstroms.
  6. 6. preparation method according to claim 1, it is characterised in that by light beam from the substrate incident to the light absorbs Layer so that the light absorbing layer is destroyed to separate the substrate and the flexible substrates, including:
    By light beam from the substrate incident to the light absorbing layer, the light absorbing layer is made to absorb the light beam and to occur hydrogen quick-fried, So that the light absorbing layer is destroyed to separate the substrate and the flexible substrates.
  7. 7. preparation method according to claim 1, it is characterised in that described that a light absorbing layer, tool are formed on a substrate Body is:
    Using plasma gas-phase deposit, the light absorbing layer is formed over the substrate.
  8. 8. preparation method according to claim 1, it is characterised in that the display device is liquid crystal display device or OLED Display device.
  9. A kind of 9. flexible display panels, it is characterised in that including:
    Flexible substrates, and the display device being arranged in the flexible substrates;
    Wherein, the flexible display panels are that the preparation method according to claim any one of 1-8 is prepared.
  10. A kind of 10. flexible display, it is characterised in that including the flexible display panels and drive circuit described in claim 9, The drive circuit is connected with the flexible display panels, for driving the flexible display panels.
CN201710733417.2A 2017-08-21 2017-08-21 A kind of flexible display panels and preparation method thereof, flexible display Pending CN107528011A (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN201710733417.2A CN107528011A (en) 2017-08-21 2017-08-21 A kind of flexible display panels and preparation method thereof, flexible display

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN108172543A (en) * 2018-01-12 2018-06-15 武汉华星光电半导体显示技术有限公司 The stripping means and underlay substrate of a kind of flexible substrates
CN109713164A (en) * 2018-12-29 2019-05-03 武汉天马微电子有限公司 Display panel and display device
CN110619818A (en) * 2019-08-27 2019-12-27 武汉华星光电半导体显示技术有限公司 Display panel and manufacturing method thereof
WO2020010535A1 (en) * 2018-07-11 2020-01-16 深圳市柔宇科技有限公司 Flexible display panel and flexible display device
WO2020029351A1 (en) * 2018-08-10 2020-02-13 武汉华星光电半导体显示技术有限公司 Composite coating and manufacturing method therefor, and manufacturing method for oled display panel
CN112331771A (en) * 2019-08-05 2021-02-05 上海和辉光电有限公司 Method for separating flexible device from substrate

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US20150125972A1 (en) * 2013-11-04 2015-05-07 Lg Display Co., Ltd. Method of manufacturing flexible display device
CN105118837A (en) * 2015-09-16 2015-12-02 京东方科技集团股份有限公司 Flexible substrate, preparation method thereof, and display device
CN206163489U (en) * 2016-10-31 2017-05-10 昆山国显光电有限公司 Flexible display panel

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CN104051496A (en) * 2014-06-04 2014-09-17 昆山工研院新型平板显示技术中心有限公司 Flexible display and manufacturing method thereof
CN105118837A (en) * 2015-09-16 2015-12-02 京东方科技集团股份有限公司 Flexible substrate, preparation method thereof, and display device
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108172543A (en) * 2018-01-12 2018-06-15 武汉华星光电半导体显示技术有限公司 The stripping means and underlay substrate of a kind of flexible substrates
WO2020010535A1 (en) * 2018-07-11 2020-01-16 深圳市柔宇科技有限公司 Flexible display panel and flexible display device
WO2020029351A1 (en) * 2018-08-10 2020-02-13 武汉华星光电半导体显示技术有限公司 Composite coating and manufacturing method therefor, and manufacturing method for oled display panel
CN109713164A (en) * 2018-12-29 2019-05-03 武汉天马微电子有限公司 Display panel and display device
CN112331771A (en) * 2019-08-05 2021-02-05 上海和辉光电有限公司 Method for separating flexible device from substrate
CN110619818A (en) * 2019-08-27 2019-12-27 武汉华星光电半导体显示技术有限公司 Display panel and manufacturing method thereof

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