CN107493110A - The cantilever beam receiver front end of the clutter collection of energy of internet of things oriented - Google Patents

The cantilever beam receiver front end of the clutter collection of energy of internet of things oriented Download PDF

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Publication number
CN107493110A
CN107493110A CN201710698783.9A CN201710698783A CN107493110A CN 107493110 A CN107493110 A CN 107493110A CN 201710698783 A CN201710698783 A CN 201710698783A CN 107493110 A CN107493110 A CN 107493110A
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China
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cantilever beam
condenser type
type cantilever
transmission line
energy
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廖小平
陈晨
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Southeast University
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Southeast University
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Priority to CN201710698783.9A priority Critical patent/CN107493110A/en
Publication of CN107493110A publication Critical patent/CN107493110A/en
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/06—Receivers
    • H04B1/16—Circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/06—Receivers
    • H04B1/16—Circuits
    • H04B1/1607—Supply circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/06—Receivers
    • H04B1/16—Circuits
    • H04B1/22—Circuits for receivers in which no local oscillation is generated

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Transceivers (AREA)

Abstract

The invention discloses a kind of cantilever beam receiver front end of the clutter collection of energy of internet of things oriented, form by microwave antenna, wave filter, low-noise amplifier, dc source and with the cantilever beam mixing system of clutter collection of energy, the cantilever beam mixing system with clutter collection of energy is made up of frequency mixer, local oscillator, LC bandstop filters, AC/DC modules, rechargeable battery and intermediate-frequency filter.Wherein, LC bandstop filters have two planar inductors and two condenser type cantilever beams, by control LC bandstop filters condenser type cantilever beam drop-down driving voltage come adjust access filter network electric capacity size, so as to adjust the stopband frequency domain of LC bandstop filters, LC bandstop filters can not be passed through in mixing system by the clutter of intermediate-frequency filter by alloing, and then changed by AC/DC modules, collected by rechargeable battery.By these collections simple in construction for efficiently realizing clutter energy in mixing system, the electromagnetic compatible environment of circuit is improved.

Description

The cantilever beam receiver front end of the clutter collection of energy of internet of things oriented
Technical field
The present invention proposes the cantilever beam receiver front end of the clutter collection of energy of internet of things oriented, belongs to microelectron-mechanical The technical field of system (MEMS).
Background technology
Microwave receiver front end plays important work in all many-sides such as industrial production, logistics transportation and radio communication With.One of technology is realized as the important of Internet of Things simultaneously, microwave receiver technology obtains in today of Internet of Things fast development More attention.Mixing system is the important component in microwave receiver, and traditional mixing system is by frequency mixer, originally Ground oscillator, intermediate-frequency filter composition, are mainly used to realize frequency transformation.In mixing system, do not pass through intermediate-frequency filter Clutter can form standing wave in systems, so as to cause electromagnetic interference to system.In face of this problem, there is clutter collection of energy to make The it is proposed of receiver front end has certain meaning.
The content of the invention
Technical problem：It is an object of the invention to provide a kind of cantilever beam receiver of the clutter collection of energy of internet of things oriented Front end, receiver front end of the invention receive microwave signal using microwave antenna, and microwave signal is put after device by LNA after filtering Greatly, finally access has the mixing system of clutter collection of energy, realizes that intermediate frequency exports, and complete to the clutter energy in mixing system Amount is collected, and is converted into direct current signal using AC/DC modular converters, is stored in rechargeable battery, for the self-powered of receiver, While realizing collection of energy, the electromagnetic compatible environment of receiver circuit is also improved.
Technical scheme：To achieve the above object, the technical solution adopted by the present invention is：
A kind of cantilever beam receiver front end of the clutter collection of energy of internet of things oriented, the receiver front end is by microwave day Line, wave filter, low-noise amplifier, dc source, frequency mixer, local oscillator, LC bandstop filters, AC/DC modules, charging Battery and intermediate-frequency filter are formed；Wherein, microwave antenna receives microwave signal, after filtering by low-noise amplifier after device filtering Amplification, amplified signal access from the input of frequency mixer, and frequency mixer is connected with local oscillator, the defeated termination intermediate frequency filter of frequency mixer Ripple device input, while the input of LC bandstop filters is also connected, LC bandstop filters cascade AC/DC modules, AC/DC modules Rechargeable battery, rechargeable battery connection dc source are connected, dc source supplies to low-noise amplifier, frequency mixer, local oscillator Electricity, the output end output intermediate-freuqncy signal of intermediate-frequency filter；
The intermediate-frequency filter is LC bandpass filters, and it is by the first planar inductor, the second planar inductor and the first electric capacity Formula cantilever beam, the second condenser type cantilever beam are formed, wherein, one end of the first condenser type cantilever beam is as microwave signal input Mouthful, and the first planar inductor is connected, and the other end connection ground of the first condenser type cantilever beam, the other end difference of the first planar inductor It is connected with the second planar inductor, the second condenser type cantilever beam, the other end ground connection of the second planar inductor, the second condenser type cantilever beam Output end of the other end as wave filter；
The LC bandstop filters are by the 3rd planar inductor, fourth plane inductance and the 3rd condenser type cantilever beam, the 4th electricity Appearance formula cantilever beam is formed, wherein, one end of the 4th condenser type cantilever beam connects fourth plane as microwave signal input port Inductance, the other end connection ground of the 4th condenser type cantilever beam, the other end of fourth plane inductance respectively with the 3rd planar inductor, the Three condenser type cantilever beams are connected, and the other end ground connection of the 3rd planar inductor, the other end of the 3rd condenser type cantilever beam is as filtering The output end of device.
In the LC bandpass filters, by controlling the drop-down of the first condenser type cantilever beam and the second condenser type cantilever beam to drive Drop-down driving voltage on moving electrode can adjust electric capacity C1, C2 of access size so as to adjust the passband of LC bandpass filters Frequency domain；The passband for forming the LC bandpass filters of intermediate-frequency filter is f1≤f≤f2, wherein
In the LC bandstop filters, by controlling the drop-down of the 3rd condenser type cantilever beam and the 4th condenser type cantilever beam to drive Drop-down driving voltage on moving electrode can adjust electric capacity C3, C4 of access size so as to adjust the stopband of LC bandstop filters Frequency domain is identical with the passband frequency domain of intermediate-frequency filter；The passband of LC bandstop filters is f≤f3Or f >=f4, wherein
Wherein, f1=f3, f2=f4。
First planar inductor, the second planar inductor, the 3rd planar inductor, the structure of fourth plane inductance are identical, It is arranged on HR-Si substrate, planar inductor includes being arranged at the first paragraph transmission line at HR-Si substrate upper surface both ends, second Section transmission line, and inductance coil, inductance coil are passed with first paragraph respectively by the first connection support column, the second connection support column Defeated line, the connection of second segment transmission line and vacantly the silicon nitride medium layer on first paragraph transmission line and second segment transmission line it On.
The first condenser type cantilever beam, the second condenser type cantilever beam, the 3rd condenser type cantilever beam, the 4th condenser type cantilever The structure of beam is identical, is arranged on HR-Si substrate, and condenser type cantilever beam includes being arranged on HR-Si substrate upper surface both ends The 3rd section of transmission line and the 4th section of transmission line, and be similarly disposed at the pull-down electrode of HR-Si substrate upper surface, drop-down electricity Between the 3rd section of transmission line and the 4th section of transmission line, the 3rd section of transmission line Shang Youmao area, anchor is connected with cantilever beam in area for pole, Cantilever beam is vacantly in pull-down electrode and the top of the 4th section of transmission line.
The inside upper part of the 4th section of transmission line is provided with the second silicon nitride medium layer.
The pull-down electrode is provided with the first silicon nitride medium layer.
The HR-Si substrate is using silicon as substrate, aoxidizes one layer of SiO on a silicon substrate2Layer.
Beneficial effect：Tool is employed in the cantilever beam receiver front end of the clutter collection of energy of the internet of things oriented of the present invention There is the mixing system that clutter collection of energy acts on, be connected in parallel between the frequency mixer and intermediate-frequency filter in traditional mixing system LC bandstop filters, those are failed to be filtered out by LC bandstop filters by the clutter of intermediate-frequency filter after frequency mixer, and Charged, the self-powered of the receipts that achieve a butt joint machine front end, filtered out to rechargeable battery for direct current signal by the AC/DC module converters of rear class While mixing system clutter, the energy of clutter is collected, also improves the electromagnetic compatible environment of circuit, is had higher Potential value.
Brief description of the drawings
Fig. 1 is the structure chart of the cantilever beam receiver front end of the clutter collection of energy of the internet of things oriented of the present invention.
Fig. 2 is the schematic diagram for the LC bandpass filters that intermediate-frequency filter is formed in the present invention；
Fig. 3 is the equivalent circuit diagram for the LC bandpass filters that intermediate-frequency filter is formed in the present invention；
Fig. 4 is the schematic diagram of LC bandstop filters in the present invention；
Fig. 5 is the equivalent circuit diagram of LC bandstop filters in the present invention；
Fig. 6 is the top view of planar inductor；
Fig. 7 is AA ' the faces profile of planar inductor；
Fig. 8 is the top view of condenser type cantilever beam；
Fig. 9 is BB ' the faces profile of condenser type cantilever beam.
In figure, 1- microwave antennas, 2- wave filters, 3- low-noise amplifiers, 4- dc sources, 5- frequency mixers, 6- locally shakes Swing device, 7-LC bandstop filters, 8-AC/DC modules, 9- rechargeable batteries, 10- intermediate-frequency filters, the planar inductors of L1- first, L2- Second planar inductor, K1- the first condenser type cantilever beams, K2- the second condenser type cantilever beams, the planar inductors of L3- the 3rd, L4- the 4th Planar inductor, the condenser type cantilever beams of K3- the 3rd, the condenser type cantilever beams of K4- the 4th, 11- silicon substrates, 12-SiO2Layer, 13- first Section transmission line, 14- second segment transmission lines, 15- inductance coils, the connection support columns of 16- first, the connection support columns of 17- second, 18- Silicon nitride medium layer, 19- pull-down electrodes, the 3rd section of transmission line of 20-, the 4th section of transmission line of 21-, 22- the second silicon nitride medium layers, 23- the first silicon nitride medium layers, 24- anchors area, 25- cantilever beams.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
The cantilever beam receiver front end of the clutter collection of energy of internet of things oriented as shown in Figure 1 for the present invention, the reception Mix by microwave antenna 1, wave filter 2, low-noise amplifier 3, dc source 4 and with the cantilever beam of clutter collection of energy machine front end Display system is formed, and has the cantilever beam mixing system of clutter collection of energy by frequency mixer 5, local oscillator 6, LC bandstop filters 7th, AC/DC modules 8, rechargeable battery 9 and intermediate-frequency filter 10 are formed；Wherein, microwave antenna 1 receives microwave signal, after filtering Device 2 is amplified after filtering by low-noise amplifier 3, and amplified signal accesses from the input of frequency mixer 5, frequency mixer 5 and local oscillations Device 6 is connected, the output termination input of intermediate-frequency filter 10 of frequency mixer 5, while also connects the input of LC bandstop filters 7, LC bandstop filters 7 cascade AC/DC modules 8, and AC/DC modules 8 connect rechargeable battery 9, and rechargeable battery 9 connects dc source 4, directly Stream power supply 4 is powered to low-noise amplifier 3, frequency mixer 5, local oscillator 6, the output end output intermediate frequency letter of intermediate-frequency filter 10 Number.
Such as Fig. 2 and 3, intermediate-frequency filter 10 is LC bandpass filters, and it is by the first planar inductor L1, the second planar inductor L2 Formed with the first condenser type cantilever beam K1, the second condenser type cantilever beam K2, wherein, the first condenser type cantilever beam K1 one end conduct Microwave signal input port, and the first planar inductor L1, the first condenser type cantilever beam K1 other end connection ground is connected, first is flat The face inductance L1 other end is connected with the second planar inductor L2, the second condenser type cantilever beam K2 respectively, the second planar inductor L2's The other end is grounded, the output end of the second condenser type cantilever beam K2 other end as wave filter.
Such as Figure 4 and 5, LC bandstop filters 7 are by the 3rd planar inductor L3, fourth plane inductance L4 and the 3rd condenser type cantilever Beam K3, the 4th condenser type cantilever beam K4 are formed, wherein, the 4th condenser type cantilever beam K4 one end is as microwave signal input Mouthful, and fourth plane inductance L4, the 4th condenser type cantilever beam K4 other end connection ground are connected, fourth plane inductance L4's is another End is connected with the 3rd planar inductor L3, the 3rd condenser type cantilever beam K3 respectively, the 3rd planar inductor L3 other end ground connection, and the 3rd Output end of the condenser type cantilever beam K3 other end as wave filter.
Such as Fig. 6 and 7, the first planar inductor L1, the second planar inductor L2, the 3rd planar inductor L3, fourth plane inductance L4 Structure it is identical, be arranged on HR-Si substrate, planar inductor include be arranged at the first of HR-Si substrate upper surface both ends Section transmission line 13, second segment transmission line 14, and inductance coil 15, inductance coil 15 pass through the first connection support column 16, second Connection support column 17 is connected with first paragraph transmission line 13, second segment transmission line 14 and vacantly positioned at first paragraph transmission line 13 respectively On silicon nitride medium layer 18 and second segment transmission line 14 on.
Such as Fig. 8 and 9, the first condenser type cantilever beam K1, the second condenser type cantilever beam K2, the 3rd condenser type cantilever beam K3, Four condenser type cantilever beam K4 structure is identical, is arranged on HR-Si substrate, and condenser type cantilever beam includes being arranged on High Resistivity Si The 3rd section of transmission line 20 and the 4th section of transmission line 21 at substrate top surface both ends, and it is similarly disposed at HR-Si substrate upper surface Pull-down electrode 19, pull-down electrode 19 is between the 3rd section of transmission line 20 and the 4th section of transmission line 21, the 4th section of transmission line 21 Inside upper part be provided with the second silicon nitride medium layer 22, pull-down electrode 19 is provided with the first silicon nitride medium layer 23, the 3rd section of biography The defeated Shang Youmao areas 24 of line 20, cantilever beam 25 are connected with anchor area 24, cantilever beam 25 is vacantly in the first silicon nitride medium layer 23 and The top of nitride silicon dielectric layer 22.
HR-Si substrate is using silicon as substrate, and one layer of SiO is aoxidized on silicon substrate 112Layer 12.
For intermediate-frequency filter, belong to LC bandpass filters, applying specific drop-down driving voltage makes the first condenser type cantilever Beam K1 and the second condenser type cantilever beam K2 conductings, now the two condenser type cantilever beams are equivalent to electric capacity C1 and C2, intermediate frequency filtering Device equivalent circuit is the circuit shown in Fig. 3, therefore according to formula (1), the upper band connection frequency of intermediate-frequency filter is f1：
According to formula (2), lower band connection frequency is f2：
Wherein f1<f2.The frequency f for radiofrequency signal that and if only if meets f1≤f≤f2When, intermediate-frequency filter can be passed through.It is logical The first condenser type cantilever beam K1 and the second condenser type cantilever beam K2 equivalent electric can be adjusted by overregulating application drop-down driving voltage Hold C1, C2 so as to adjust the passband frequency domain of intermediate-frequency filter.
For LC bandstop filters, applying specific drop-down driving voltage makes the 3rd condenser type cantilever beam K3 and the 4th condenser type Cantilever beam K4 is turned on, and now the two condenser type cantilever beams are equivalent to electric capacity C3 and C4, LC bandstop filter equivalent circuit are Fig. 5 Shown circuit, therefore according to formula (3), the lower limiting frequency of LC tunable band-stop filters is f3：
According to formula (4), upper cut off frequency f4：
Wherein f3<f4.The frequency f for microwave signal that and if only if meets f≤f3Or f >=f4When, bandreject filtering can be passed through Device.Apply drop-down driving voltage by adjusting and can adjust condenser type cantilever beam K1, K2 equivalent capacity C1, C2 so as to adjust The passband frequency domain of LC tunable band-stop filters is saved, makes its passband section and the passband section of intermediate-frequency filter complementary.
Wherein, f1=f3, f2=f4。
Microwave signal is received by microwave antenna, and by being amplified after wave filter by LNA, the signal input after amplification has clutter The mixing system of collection of energy, input signal reach intermediate-frequency filter after frequency mixer and local oscillated signal mixing, wherein Meeting the signal of intermediate-frequency filter passband section can be exported by wave filter, and then can not be by simultaneously by the clutter of intermediate-frequency filter The LC bandstop filters of intermediate-frequency filter input are associated in, are then direct current signal by AC/DC module converters, and then be electrically charged electricity Clutter energy storage is used for power supply of the dc source to receiver front end active device by pond.
Present invention be distinguished in that：
The cantilever beam receiver front end of the clutter collection of energy of the internet of things oriented of the present invention is employed with clutter energy The mixing system of collecting action, LC bandreject filterings are connected in parallel between the frequency mixer and intermediate-frequency filter in traditional mixing system Device, those are failed to be filtered out by LC bandstop filters by the clutter of intermediate-frequency filter after frequency mixer, and by the AC/ of rear class DC module converters are that direct current signal charges to rechargeable battery, and while mixing system clutter is filtered out, the energy of clutter is carried out Collect.LC tunable band-stop filters are made up of two planar inductors and two condenser type cantilever beams, by controlling condenser type to hang The drop-down driving voltage of arm beam can adjust the capacitance of access filter network so as to adjusting the stopband frequency domain of wave filter so that LC The stopband frequency domain of bandstop filter is identical with the passband frequency domain of middle frequency wave device.
Meet that the structure of conditions above is considered as the cantilever beam reception of the clutter collection of energy of the internet of things oriented of the present invention Machine front end.

Claims (7)

  1. A kind of 1. cantilever beam receiver front end of the clutter collection of energy of internet of things oriented, it is characterised in that：The receiver front end By microwave antenna (1), wave filter (2), low-noise amplifier (3), dc source (4), frequency mixer (5), local oscillator (6), LC bandstop filters (7), AC/DC modules (8), rechargeable battery (9) and intermediate-frequency filter (10) are formed；Wherein, microwave antenna (1) Receive microwave signal, amplified after filtering after device (2) filtering by low-noise amplifier (3), amplified signal is defeated from frequency mixer (5) Enter to terminate into frequency mixer (5) is connected with local oscillator (6), output termination intermediate-frequency filter (10) input of frequency mixer (5) End, while also connect the input of LC bandstop filters (7), LC bandstop filters (7) cascade AC/DC modules (8), AC/DC moulds Block (8) connection rechargeable battery (9), rechargeable battery (9) connection dc source (4), dc source (4) to low-noise amplifier (3), Frequency mixer (5), local oscillator (6) power supply, the output end output intermediate-freuqncy signal of intermediate-frequency filter (10)；Realize clutter energy Collection, improve electromagnetic compatible environment；
    The intermediate-frequency filter (10) is LC bandpass filters, its by the first planar inductor (L1), the second planar inductor (L2) and First condenser type cantilever beam (K1), the second condenser type cantilever beam (K2) are formed, wherein, one end of the first condenser type cantilever beam (K1) As microwave signal input port, and the first planar inductor (L1) is connected, the other end connection of the first condenser type cantilever beam (K1) Ground, the other end of the first planar inductor (L1) are connected with the second planar inductor (L2), the second condenser type cantilever beam (K2) respectively, the The other end ground connection of two planar inductors (L2), the output end of the other end of the second condenser type cantilever beam (K2) as wave filter；
    The LC bandstop filters (7) are by the 3rd planar inductor (L3), fourth plane inductance (L4) and the 3rd condenser type cantilever beam (K3), the 4th condenser type cantilever beam (K4) is formed, wherein, one end of the 4th condenser type cantilever beam (K4) inputs as microwave signal Port, and fourth plane inductance (L4) is connected, the other end connection ground of the 4th condenser type cantilever beam (K4), fourth plane inductance (L4) the other end is connected with the 3rd planar inductor (L3), the 3rd condenser type cantilever beam (K3) respectively, the 3rd planar inductor (L3) Other end ground connection, the output end of the other end of the 3rd condenser type cantilever beam (K3) as wave filter.
  2. 2. the cantilever beam receiver front end of the clutter collection of energy of internet of things oriented according to claim 1, its feature exist In：In the LC bandpass filters, by controlling under the first condenser type cantilever beam (K1) and the second condenser type cantilever beam (K2) The drop-down driving voltage in driving electrodes is drawn to adjust electric capacity C1, C2 of access size so as to adjusting LC bandpass filters Passband frequency domain；The passband for forming the LC bandpass filters of intermediate-frequency filter (10) is f1≤f≤f2, wherein
    In the LC bandstop filters, by controlling under the 3rd condenser type cantilever beam (K3) and the 4th condenser type cantilever beam (K4) The drop-down driving voltage in driving electrodes is drawn to adjust electric capacity C3, C4 of access size so as to adjusting LC bandstop filters (7) stopband frequency domain is identical with the passband frequency domain of intermediate-frequency filter (10)；The passband of LC bandstop filters (3) is f≤f3Or f >= f4, wherein
    Wherein, f1=f3, f2=f4。
  3. 3. the cantilever beam receiver front end of the clutter collection of energy of internet of things oriented according to claim 1, its feature exist In：First planar inductor (L1), the second planar inductor (L2), the 3rd planar inductor (L3), fourth plane inductance (L4) Structure is identical, is arranged on HR-Si substrate, and planar inductor includes the first paragraph for being arranged at HR-Si substrate upper surface both ends Transmission line (13), second segment transmission line (14), and inductance coil (15), inductance coil (15) pass through the first connection support column (16), the second connection support column (17) is connected simultaneously hanging in place with first paragraph transmission line (13), second segment transmission line (14) respectively On the silicon nitride medium layer (18) and second segment transmission line (14) on first paragraph transmission line (13).
  4. 4. the cantilever beam receiver front end of the clutter collection of energy of internet of things oriented according to claim 1, its feature exist In：The first condenser type cantilever beam (K1), the second condenser type cantilever beam (K2), the 3rd condenser type cantilever beam (K3), the 4th electricity The structure of appearance formula cantilever beam (K4) is identical, is arranged on HR-Si substrate, and condenser type cantilever beam includes being arranged on High Resistivity Si lining The 3rd section of transmission line (20) and the 4th section of transmission line (21) at bottom upper surface both ends, and it is similarly disposed at HR-Si substrate upper table The pull-down electrode (19) in face, pull-down electrode (19) is between the 3rd section of transmission line (20) and the 4th section of transmission line (21), and the 3rd Section transmission line (20) Shang Youmao areas (24), are connected with cantilever beam (25), cantilever beam (25) is vacantly in pull-down electrode on anchor area (24) (19) and the 4th section of transmission line (21) top.
  5. 5. the cantilever beam receiver front end of the clutter collection of energy of internet of things oriented according to claim 4, its feature exist In：The inside upper part of the 4th section of transmission line (21) is provided with the second silicon nitride medium layer (22).
  6. 6. the cantilever beam receiver front end of the clutter collection of energy of internet of things oriented according to claim 4, its feature exist In：The pull-down electrode (19) is provided with the first silicon nitride medium layer (23).
  7. 7. the cantilever beam receiver front end of the clutter collection of energy of the internet of things oriented according to claim 3 or 4, its feature It is：The HR-Si substrate is using silicon as substrate, and one layer of SiO is aoxidized on silicon substrate (11)2Layer (12).
CN201710698783.9A 2017-08-15 2017-08-15 The cantilever beam receiver front end of the clutter collection of energy of internet of things oriented Pending CN107493110A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023079470A1 (en) * 2021-11-03 2023-05-11 Leonardo Busi Planar inductor in air, especially for radio frequency power circuits

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Publication number Priority date Publication date Assignee Title
CN2524433Y (en) * 2002-02-06 2002-12-04 信息产业部电子第五十四研究所 Multichannel radio signal transponder
CN101141120A (en) * 2007-10-12 2008-03-12 东南大学 Microelectronic mechanical variable bandpass filter and process for producing the same
JP2010062606A (en) * 2008-09-01 2010-03-18 Panasonic Corp Receiver, and electronic equipment using the same
CN102098067A (en) * 2011-01-07 2011-06-15 东南大学 Microwave receiver front end based on online microelectro mechanical microwave power sensor
CN104254958A (en) * 2012-02-09 2014-12-31 胡玛沃克斯公司 Energy harvesting system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2524433Y (en) * 2002-02-06 2002-12-04 信息产业部电子第五十四研究所 Multichannel radio signal transponder
CN101141120A (en) * 2007-10-12 2008-03-12 东南大学 Microelectronic mechanical variable bandpass filter and process for producing the same
JP2010062606A (en) * 2008-09-01 2010-03-18 Panasonic Corp Receiver, and electronic equipment using the same
CN102098067A (en) * 2011-01-07 2011-06-15 东南大学 Microwave receiver front end based on online microelectro mechanical microwave power sensor
CN104254958A (en) * 2012-02-09 2014-12-31 胡玛沃克斯公司 Energy harvesting system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023079470A1 (en) * 2021-11-03 2023-05-11 Leonardo Busi Planar inductor in air, especially for radio frequency power circuits

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Application publication date: 20171219