CN107490821A - A kind of fiber waveguide device of broadband temperature-insensitive - Google Patents
A kind of fiber waveguide device of broadband temperature-insensitive Download PDFInfo
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- CN107490821A CN107490821A CN201610412018.1A CN201610412018A CN107490821A CN 107490821 A CN107490821 A CN 107490821A CN 201610412018 A CN201610412018 A CN 201610412018A CN 107490821 A CN107490821 A CN 107490821A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Abstract
The invention discloses a kind of fiber waveguide device of broadband temperature-insensitive, including the core area being layered on top of each other and covering, the core area uses silicon, the covering uses titanium dioxide, and the another side of the covering is provided with coating, and the coating uses the material of positive thermo-optical coeffecient, light intensity restriction factor in fiber waveguide per Rotating fields is influenceed by wavelength, after wavelength becomes big, the evanscent field that light transmits in fiber waveguide becomes big, and correspondingly the light intensity restriction factor in covering also becomes big；Therefore corresponding different wavelength, each layer of light intensity restriction factor will change, big with the change of wavelength, and the total thermo-optical coeffecient of fiber waveguide is no longer the curve for becoming similar parabola change with the dull change of temperature, can realize the temperature-insensitive of wide wave-length coverage.
Description
Technical field
The present invention relates to silicon substrate fiber waveguide field, specifically, is related to a kind of new wide wave-length coverage temperature-insensitive light wave
Lead device.
Background technology
Due to the higher thermo-optical properties of silicon materials, the micro resonant cavity based on SOI silicon-on-insulator waveguides is at work due to height
The Refractive Index of Material that temperate zone is come, which changes, will influence its resonance characteristic, cause the drift of resonance wavelength, in order to realize temperature-insensitive
Have many methods both at home and abroad, be broadly divided into it is active and passive, active approach by add a feedback-type thermoelectricity temperature-controlling system come[1]
Realize, this method will produce extra power consumption, be unfavorable for silicon substrate and integrate；Passive way includes：Guha et al. is in 2010
What year proposed proposes with Mach-Zehnder interferometers reduction temperature sensitivity method[2]Carry out coupling and realize thermal compensation, this side
Method size is larger, reduces the original integrated level of fiber waveguide；By adding the clad material of a negative warm coefficient of heat to realize
Temperature-insensitive, proposed first in 1998 by Kobukun et al.[3]The polymer P MMA of the negative warm coefficient of heat is compensated into silicon
The thermo-optical coeffecient of material in itself, it is contemplated that the mechanochemistry unstability of polymeric material, it is impossible to realize CMOS compatibilities；
Titanic oxide material also has negative thermo-optical coeffecient, therefore may also be used for realizing temperature-insensitive[4], compared to polymer, two
Titania meterial has mechanical stability, can be compatible with COMS.
It is existing to realize temperature-insensitive fiber waveguide both for Single wavelength to carry out size design, it is the defects of this design
Can not utilize need to realize in wide wave-length coverage it is accurate be not easy in by the device design of the resonance wavelength of temperature change (such as
The structures such as silicon substrate wavelength-division multiplex micro-ring resonant cavity).
[bibliography]
[1] K Padmaraju, J Chan et al.Thermal stabilization of a microring modulator using
feedback control[J].Optics Express,2012,20(27):27999-8008。
[2]B Guha,M Lipson et al.CMOS-compatible athermal silicon microring resonators[J].
Optics Express,2010,18(4):3487-93。
[3]Y.Kokubun,S.Yoneda,and S.Matsuura,Temperature-independent optical filter at
1.55μm wavelength using a silica-based athermal waveguide[J],Electron.Lett.34(4),367–369
(1998)。
[4]SS Djordjevic,K Shang,B Guan et al.CMOS-compatible,athermal silicon ring
modulators clad with titanium dioxide[J].Optics Express,2013,21(12):13958-13968。
The content of the invention
In order to solve existing fiber waveguide for this characteristic of temperature sensitivity in wide wave-length coverage, pass through superposition two for existing
Titanium oxide does clad material to realize the optical waveguide design method of Single wavelength temperature-insensitive[4], a kind of broadband temperature of present invention offer
Insensitive fiber waveguide device, the method by being superimposed one layer of positive thermo-optical coeffecient material, realizes broadband fiber waveguide and effectively reflects
Rate and resonance wave personal attendant's temperature change are insensitive.
In order to solve the above-mentioned technical problem, the fiber waveguide device of a kind of broadband temperature-insensitive proposed by the present invention, including it is mutual
The core area of stacking and covering, the core area use silicon, and the covering uses titanium dioxide, and the another side of the covering, which is provided with, to be covered
Cap rock, the coating use the material of positive thermo-optical coeffecient, and the thermo-optical coeffecient expression formula of whole fiber waveguide is：
On the right of the equation of formula (1)：The coefficient Γ of Section 1c(λ) is the light intensity restriction factor of core area material,For the heat of silicon
Backscatter extinction logarithmic ratio；The coefficient Γ of Section 2cl1(λ) is the light intensity restriction factor of clad material,For the thermo-optical coeffecient of titanium dioxide；
The coefficient Γ of Section 3cl2(λ) is the light intensity restriction factor of covering layer material,For the thermo-optical coeffecient of covering layer material；Light
It is total that waveguide SMIS area material, clad material and the light intensity restriction factor of covering layer material and the light intensity of the region material account for fiber waveguide
The ratio of light intensity is directly proportional：The light intensity restriction factor of every kind of material refers to：In lightguide cross section Shang Xin areas, covering and covering
The area integral of electric-field intensity square accounts for the ratio Γ of total electric field square in each region of layerA：
ΓA=∫ ∫A|E|2dxdy/∫∫∞|E|2dxdy (2)
In formula (2), E is electric-field intensity, and A is signified region.
The fiber waveguide device of broadband temperature-insensitive of the present invention, the material for the positive thermo-optical coeffecient that the coating uses are selected from nitridation
Any one of silicon, silica, silicon and aluminium nitride.
The thermo-optical coeffecient of the silicon is 1.86 × 10-4K-1, the thermo-optical coeffecient of titanium dioxide is -1.0 × 10-4K-1, silicon nitride
Thermo-optical coeffecient is 4.0 × 10-5K-1, the thermo-optical coeffecient of silica is 1 × 10-5K-1, the thermo-optical coeffecient of aluminium nitride is
6×10-5K-1。
It is silicon nitride material for coating and silicon nitride is highly 500nm, the width of fiber waveguide is 500nm, core area
Highly it is 140nm, the height of covering is 136nm.
It is silicon nitride material for coating and silicon nitride is highly 500nm, the width of fiber waveguide is 500nm, core area
Highly it is 150nm, the height of covering is 160nm.
It is silicon nitride material for coating and silicon nitride is highly 500nm, the width of fiber waveguide is 500nm, core area
Highly it is 160nm, the height of covering is 190nm.
Compared with prior art, the beneficial effects of the invention are as follows：
(1) can be realized in certain wavelength model by adding positive thermo-optical coeffecient material-SiN in the design on original fiber waveguide basis
Effective refractive index in enclosing carries out simulation calculation with finite element software, first calculated in Single wavelength 1550nm with temperature-insensitive
Realize the combination of the titanium dioxide layer height and silicon nitride height required for Single wavelength temperature sensitivity, then the base in this height in place
1450nm to 2000nm wave-length coverage is scanned on plinth again, it is similar parabolic to obtain effective refractive index with wavelength change curve
The change curve of line.
(2) resonance wavelength obtained according to the change of effective refractive index is with the calculation formula of temperature offset amount：
The effective refractive index being calculated by back, which varies with temperature, can obtain resonance wavelength variation with temperature coefficient,
Due to effective refractive index vary with temperature it is insensitive realized in wide wave-length coverage, resonance peak will be caused in very wide wave-length coverage
Inside vary with temperature it is also insensitive, this for design micro resonant cavity filter be extremely important.
Brief description of the drawings
Fig. 1 is the cross-sectional view of the fiber waveguide device of broadband temperature-insensitive of the present invention；
Fig. 2 is the thermo-optical coeffecient of the fiber waveguide of the embodiment of the present invention 1 with the change curve of titanium dioxide layer height；
Fig. 3 is the thermo-optical coeffecient of the fiber waveguide of the embodiment of the present invention 2 with the change curve of titanium dioxide layer height；
Fig. 4 is the thermo-optical coeffecient of the fiber waveguide of the embodiment of the present invention 3 with the change curve of titanium dioxide layer height；
Fig. 5 is to obtain the hot light of fiber waveguide with the wave-length coverage of COMSOL scannings 1450 to 2000nm to embodiment 1-3
The curve of coefficient by wavelength change.
Embodiment
Technical solution of the present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings, described specific implementation
Only the present invention is explained for example, is not intended to limit the invention.
The main mentality of designing of the fiber waveguide device of broadband temperature-insensitive of the present invention is：One layer of dioxy is superimposed in silicon waveguide
On the basis of the material of change this negative thermo-optical coeffecient of titanium is as covering, by being superimposed the material of one layer of positive thermo-optical coeffecient again, come real
Temperature-insensitive in existing wide wave-length coverage.
A kind of fiber waveguide device of broadband temperature-insensitive proposed by the present invention, including the core area being layered on top of each other and covering, it is described
Core area uses silicon, and the covering uses titanium dioxide, and the another side of the covering is provided with coating, the fiber waveguide shown in Fig. 1
The cross-sectional view of device.The coating uses the material of positive thermo-optical coeffecient, and the material of the positive thermo-optical coeffecient can select
From any one of silicon nitride, silica, silicon and aluminium nitride.The thermo-optical coeffecient of the silicon is 1.86 × 10-4K-1, dioxy
The thermo-optical coeffecient for changing titanium is -1.0 × 10-4K-1, the thermo-optical coeffecient of silicon nitride is 4.0 × 10-5K-1, the thermo-optical coeffecient of silica
For 1 × 10-5K-1, the thermo-optical coeffecient of aluminium nitride is 6 × 10-5K-1。
Entirely the thermo-optical coeffecient expression formula of fiber waveguide is：
On the right of the equation of formula (1)：
The coefficient Γ of Section 1c(λ) is the light intensity restriction factor of core area material,For the thermo-optical coeffecient of silicon；The coefficient of Section 2
Γcl1(λ) is the light intensity restriction factor of clad material,For the thermo-optical coeffecient of titanium dioxide；The coefficient Γ of Section 3cl2(λ) is
What the present invention added again on the basis of tradition realizes Single wavelength temperature-insensitive fiber waveguide is used as covering using positive thermo-optical coeffecient material
The light intensity restriction factor of the material of layer,For the thermo-optical coeffecient of covering layer material；Fiber waveguide SMIS area material, covering material
The ratio that the light intensity restriction factor of material and covering layer material accounts for fiber waveguide total light intensity to the light intensity of the region material is directly proportional：It is every kind of
The light intensity restriction factor of material refers to：The electric-field intensity in lightguide cross section Shang Xin areas, covering and each region of coating
Square area integral account for the ratio Γ of total electric field squareA：
ΓA=∫ ∫A|E|2dxdy/∫∫∞|E|2dxdy (2)
In formula (2), E is electric-field intensity, and A is signified region, all area of core in this way, covering or coating.
The light intensity restriction factor of (Ji Xin areas, covering and coating) structure is influenceed by wavelength every layer in fiber waveguide, and wavelength becomes
After big, the evanscent field that light transmits in fiber waveguide becomes big, and correspondingly the light intensity restriction factor in covering also becomes big；Therefore it is right
Different wavelength is answered, each layer of light intensity restriction factor will change, in other words, when only titanium dioxide covering and silicon core
In the case of area, a kind of fiber waveguide size design can only realize the temperature-insensitive under a wavelength, and in titanium dioxide titanium
One layer of positive thermo-optical coeffecient material is added on material again, big with the change of wavelength, the total thermo-optical coeffecient of fiber waveguide is no longer dull with temperature
Change, become the curve of similar parabola change, therefore, the fiber waveguide device that the present invention designs can realize wide wavelength model
The temperature-insensitive enclosed.
In order to determine the cross sectional dimensions of the fiber waveguide device of broadband temperature-insensitive, so that coating is silicon nitride as an example, with having
Finite element analysis software COMSOL is emulated as follows：
First, the total thermo-optical coeffecient of fiber waveguide is simulated with finite element analysis software COMSOL, using formula (1), wherein, two
The thermo-optical coeffecient of titanium oxide takes 1 × 10-4K-1, the thermo-optical coeffecient of silicon is 1.86 × 10-4K-1, the thermo-optical coeffecient of silicon nitride material for 4 ×
10-5K-1, it is set in that coating is silicon nitride material and silicon nitride is highly 500nm, wavelength 1550nm, fiber waveguide
Under conditions of width is 500nm, the height in coring area is 140nm, 150nm and 160nm respectively, is then scanned
The height of titanium dioxide layer, corresponds to 136nm, 160nm and 190nm respectively, so as to obtain under the height of each silicon
For the thermo-optical coeffecient of fiber waveguide with the change curve of titanium dioxide layer height, it is highly 140nm fiber waveguide that Fig. 2, which shows core area,
Thermo-optical coeffecient with titanium dioxide layer height change curve, Fig. 3 show core area highly for 150nm fiber waveguide hot light
Coefficient with titanium dioxide layer height change curve, Fig. 4 show core area highly for 160nm fiber waveguide thermo-optical coeffecient with
The change curve of titanium dioxide layer height.
Then, three kinds of height groups of the titanium dioxide with regard to temperature-insensitive under Single wavelength obtained in the previous step (1550nm) and silicon
(height in Ji Xin areas is 140nm, and the height of covering is 136nm for conjunction；The height in core area is 150nm, and the height of covering is
160nm；The height in core area is 160nm, and the height of covering is 190nm), arrive 2000nm with COMSOL scannings 1450
Wave-length coverage, obtain the thermo-optical coeffecient of fiber waveguide and change with wavelength change similar to parabola, as shown in Figure 5, it can be deduced that
The fiber waveguide that the present invention designs realizes the temperature-insensitive in wide wave-length coverage.
It can be drawn by the result (block curve) of the scanning wavelength in Fig. 5, titanium dioxide and silicon in fiber waveguide of the present invention
Highly smaller, obtained lightwave conduction backscatter extinction logarithmic ratio is more flat with wavelength change, because by reducing titanium dioxide and silicon
Highly, wavelength is elongated, and evanscent field becomes big, and more light will be caused to be covered what is be made up of positive thermo-optical coeffecient material (silicon nitride)
Deck portion, the thermo-optical coeffecient of fiber waveguide is more flat with wavelength change, i.e., the fiber waveguide that the present invention designs realizes broadband light
Waveguide effective index and resonance wave personal attendant's temperature change are insensitive.
Although above in conjunction with accompanying drawing, invention has been described, the invention is not limited in above-mentioned embodiment,
Above-mentioned embodiment is only schematical, rather than restricted, and one of ordinary skill in the art is in the present invention
Enlightenment under, without deviating from the spirit of the invention, many variations can also be made, these belong to the present invention guarantor
Within shield.
Claims (6)
1. a kind of fiber waveguide device of broadband temperature-insensitive, including the core area being layered on top of each other and covering, the core area use silicon,
The covering uses titanium dioxide, it is characterised in that the another side of the covering is provided with coating, and the coating is using just
The material of thermo-optical coeffecient, the thermo-optical coeffecient expression formula of whole fiber waveguide are：
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On the right of the equation of formula (1)：
The coefficient Γ of Section 1c(λ) is the light intensity restriction factor of core area material,For the thermo-optical coeffecient of silicon；
The coefficient Γ of Section 2cl1(λ) is the light intensity restriction factor of clad material,For the thermo-optical coeffecient of titanium dioxide；
The coefficient Γ of Section 3cl2(λ) is the light intensity restriction factor of covering layer material,For the thermo-optical coeffecient of covering layer material；
The light intensity restriction factor of fiber waveguide SMIS area material, clad material and covering layer material refers to：On lightguide cross section
The area integral of electric-field intensity square accounts for the ratio Γ of total electric field square in each region of core area, covering and coatingA：
ΓA=∫ ∫A|E|2dxdy/∫∫∞|E|2dxdy (2)
In formula (2), E is electric-field intensity, and A is signified region.
2. the fiber waveguide device of broadband temperature-insensitive according to claim 1, it is characterised in that what the coating used
The material of positive thermo-optical coeffecient is selected from any one of silicon nitride, silica, silicon and aluminium nitride.
3. the fiber waveguide device of broadband temperature-insensitive according to claim 2, it is characterised in that the thermo-optical coeffecient of the silicon
For 1.86 × 10-4K-1, the thermo-optical coeffecient of titanium dioxide is -1.0 × 10-4K-1, the thermo-optical coeffecient of silicon nitride is 4.0 × 10-5K-1,
The thermo-optical coeffecient of silica is 1 × 10-5K-1, the thermo-optical coeffecient of aluminium nitride is 6 × 10-5K-1。
4. the fiber waveguide device of broadband temperature-insensitive according to claim 2, it is characterised in that for coating be nitridation
Silicon materials and silicon nitride are highly 500nm, and the width of fiber waveguide is 500nm, and the height in core area is 140nm, covering
Highly it is 136nm.
5. the fiber waveguide device of broadband temperature-insensitive according to claim 2, it is characterised in that for coating be nitridation
Silicon materials and silicon nitride are highly 500nm, and the width of fiber waveguide is 500nm, and the height in core area is 150nm, covering
Highly it is 160nm.
6. the fiber waveguide device of broadband temperature-insensitive according to claim 2, it is characterised in that for coating be nitridation
Silicon materials and silicon nitride are highly 500nm, and the width of fiber waveguide is 500nm, and the height in core area is 160nm, covering
Highly it is 190nm.
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Cited By (4)
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| CN109507490A (en) * | 2018-11-23 | 2019-03-22 | 清华大学 | A kind of common path interference electric-field sensor that quiescent point temperature is stable |
| CN110389406A (en) * | 2018-04-17 | 2019-10-29 | 华为技术有限公司 | A kind of waveguide assemblies, unequal arm Mach-Zehnder interferometer and parameter determination method |
| CN112162350A (en) * | 2020-10-12 | 2021-01-01 | 上海航天科工电器研究院有限公司 | Temperature-insensitive silicon-based arrayed waveguide grating structure wavelength division multiplexer |
| CN116045954A (en) * | 2023-03-31 | 2023-05-02 | 中国船舶集团有限公司第七〇七研究所 | Hybrid resonant cavity for optical gyro and optical gyro |
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| CN110389406B (en) * | 2018-04-17 | 2020-10-27 | 华为技术有限公司 | Waveguide assembly, unequal-arm Mach-Zehnder interferometer and parameter determination method |
| CN109507490A (en) * | 2018-11-23 | 2019-03-22 | 清华大学 | A kind of common path interference electric-field sensor that quiescent point temperature is stable |
| CN109507490B (en) * | 2018-11-23 | 2020-10-16 | 清华大学 | Common-path interference electric field sensor with stable temperature of static working point |
| CN112162350A (en) * | 2020-10-12 | 2021-01-01 | 上海航天科工电器研究院有限公司 | Temperature-insensitive silicon-based arrayed waveguide grating structure wavelength division multiplexer |
| CN116045954A (en) * | 2023-03-31 | 2023-05-02 | 中国船舶集团有限公司第七〇七研究所 | Hybrid resonant cavity for optical gyro and optical gyro |
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