CN107489750A - A kind of mechanical microdisplacement device - Google Patents
A kind of mechanical microdisplacement device Download PDFInfo
- Publication number
- CN107489750A CN107489750A CN201710785159.2A CN201710785159A CN107489750A CN 107489750 A CN107489750 A CN 107489750A CN 201710785159 A CN201710785159 A CN 201710785159A CN 107489750 A CN107489750 A CN 107489750A
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- CN
- China
- Prior art keywords
- work package
- package platform
- unit
- displacement
- variable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H21/00—Gearings comprising primarily only links or levers, with or without slides
- F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
- F16H21/44—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying or interconverting oscillating or reciprocating motions
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
According to mechanical microdisplacement device provided by the invention, including support unit, connection unit, work package platform, displacement input block, variable-speed unit and the first buffer cell, the input of first buffer cell is connected with the output end of variable-speed unit, output end is connected with the input of work package platform, first buffer cell has snubber part, the active force of work package platform is acted on from variable-speed unit for buffering, and reduces the displacement of work package platform.According to mechanical microdisplacement device involved in the present invention, the snubber part being connected with the variable-speed unit being connected with displacement input block and with work package platform, variable-speed unit exports after the displacement of input is carried out into speed change, snubber part can buffer the active force that work package platform is acted on from variable-speed unit, and the microdisplacement of work package platform has been obtained under connection unit, displacement input block, variable-speed unit and the first buffer cell collective effect.
Description
Technical field
The present invention relates to belong to mechanical field, and in particular to a kind of mechanical microdisplacement device.
Background technology
Microdisplacement device is that a kind of a certain part or part for enabling plant equipment is moved to specifically accurate, microly
Specific trace movement is made in position, conventional microdisplacement device, different according to their transmission principle, can be divided into machinery
Formula, thermal change form, magnetostriction type, elastic deformation formula, piezoelectric type etc..
During using long grating measuring length, due to the influence of the mismachining tolerance of key light grid and temperature error etc., when
When secondary grating moves (or opposite mobile) relative to key light grid and arrive required position, pitch error and pitch accumulation mistake are just produced
Difference, grating foozle or temperature change are bigger, and the position error of length is bigger.And the line-spacing machining accuracy of grating is limited
, it is impossible to reach zero error, therefore measurement certainly exists the error come due to machining accuracy and temperature band.
The content of the invention
The present invention is carried out to solve the problems, such as the purpose of the above-mentioned margin of error for how reducing grating scale, it is therefore intended that
A kind of mechanical microdisplacement device is provided, the present invention uses error correcting method, on the basis of former grating measurement, add height and put
The machine driven system of big ratio, increasedd or decreased when secondary grating is positioned to terminal one it is micro, this amount is exactly grating scale
The margin of error, measurement accuracy is set to reach much higher value.Project category mechanical device of the present invention, using wedge, spring, the combined type hung oneself from a beam
Structure, to adding the present invention on original device, it can further improve its measurement accuracy and reach measurement accuracy in 10nm.
The invention provides a kind of mechanical microdisplacement device, have the feature that, including support unit；Connection is single
Member, it is arranged in support unit；Work package platform, is connected with connection unit, and work package is arranged on work package platform；Displacement is defeated
Enter unit, for receiving the displacement in the external world, be slidably connected with support unit；Variable-speed unit, it is connected with displacement input block, uses
Exported after speed change is carried out to displacement；And first buffer cell, it is arranged between variable-speed unit and work package platform, this
The input of one buffer cell is connected with the output end of variable-speed unit, and output end is connected with the input of work package platform, and first
Buffer cell has snubber part, acts on the active force of work package platform from variable-speed unit for buffering, and reduces
The displacement of work package platform, wherein, snubber part is connected with work package platform, and variable-speed unit includes inclination angle-adjustable
Wedge mechanism or circular cone mechanism and the transferring member that is engaged with the Wedge mechanism or circular cone mechanism, Wedge mechanism or cone machine
Structure is connected with straight-bar, and transferring member is connected with snubber part.Wedge mechanism is connected with straight-bar, transferring member and snubber part
It is connected, Wedge mechanism includes：Tapered wedges, adjusting screw, spring and bearing pin, the thick end of tapered wedges are rotated by bearing pin and straight-bar
Connection, the middle part of tapered wedges is connected by spring with straight-bar, and adjusting screw matches with the screw set on straight-bar, its top and
The bottom surface of tapered wedges is in contact, for adjusting the inclined-plane of tapered wedges relative to the gradient of straight-bar.
In mechanical microdisplacement device provided by the invention, it can also have the feature that：Wherein, support unit
For box-section trestle or frame structure, work package platform is frame structure.
In addition, in mechanical microdisplacement device provided by the invention, can also have the feature that：Wherein, even
Order member is arranged in support unit including an at least cantilever beam, outrigger horizontal, and one end is fixedly connected with support unit,
The other end is hanging cantilever, and work package platform is arranged on cantilever.
In addition, in mechanical microdisplacement device provided by the invention, can also have the feature that：Wherein,
One buffer cell includes at least one elastomer, and elastomer is any one in spring, bellows and bellows.
In addition, in mechanical microdisplacement device provided by the invention, it is characterised in that also include：Second buffering is single
Member, it is arranged between work package platform and support unit, the input of the second buffer cell is connected with work package platform, and second is slow
The output end for rushing unit is connected with support unit.
In addition, in mechanical microdisplacement device provided by the invention, can also have the feature that：Wherein,
Two buffer cells include at least one elastomer, and elastomer is any one in spring, bellows and bellows.
The effect of invention and effect
According to mechanical microdisplacement device involved in the present invention, because with the speed change being connected with displacement input block
Unit, therefore, variable-speed unit export after the displacement of input is carried out into speed change；In addition, mechanical type micro involved in the present invention
Gearshift also has the snubber part being connected with work package platform, and therefore, the snubber part, which can buffer, to be come from
Variable-speed unit acts on the active force of work package platform, and reduces the displacement of work package platform.
Brief description of the drawings
Fig. 1 is the schematic diagram of mechanical microdisplacement device in embodiments of the invention.
Embodiment
In order that the technical means, the inventive features, the objects and the advantages of the present invention are easy to understand, it is real below
Example combination accompanying drawing is applied to be specifically addressed microdisplacement device of the present invention.
Embodiment
Mechanical microdisplacement device 10 includes support unit, connection unit, work package platform, displacement input block, change
Fast unit and the first buffer cell.
Support unit is box-section trestle or frame structure, and in the present embodiment, support unit is box-section trestle as shown in Figure 1
11, there is the first support base 111, the second support base 112 and the 3rd support base 113.
Connection unit is arranged in support unit, and connection unit includes an at least cantilever beam, and the outrigger horizontal is set
In support unit, one end is fixedly connected with support unit 11, and the other end is hanging cantilever, and in embodiment, connection unit is
The cantilever beam 12 of four rectangular settings of difference as shown in Figure 1, the cantilever beam 12 shown in Fig. 1 are the section of beam, cantilever beam
12 be spring leaf cantilever beam, the whipping property square of cantilever beam 12 try one's best design it is sufficiently large.Cantilever beam 12 and elastic component, have energy
The effect for absorbing and buffering.
Cantilever beam 12 can also be flexible cantilever beam, its rectangular cross-section, it is I-shaped ,] shape, circle, ellipse
In any one.
Work package platform is connected with connection unit, and work package G is arranged on work package platform, and in embodiment, work package is put down
Platform is framework 13.Framework 13 is arranged on four cantilevers of cantilever beam 12.
Connection unit can also include one or two or three cantilever beams 12.
Displacement input block is slidably connected with support unit, and in the present embodiment, displacement input block includes slidable straight
Bar 14 and entangle the straight-bar 14 respectively and be located at the first support base 111, the bearing in the second support base 112, straight-bar 14 can more than
Box-section trestle 11 is exposed in lower slider, the working end of straight-bar 14, and straight-bar 14 works end head in tip, for receiving the displacement in the external world
Amount.
Variable-speed unit is connected with displacement input block, after the extraneous displacement for being received to straight-bar 14 carries out speed change
Output；The Wedge mechanism or circular cone mechanism of variable-speed unit including inclination angle-adjustable and with the Wedge mechanism or circular cone mechanism phase
The transferring member of cooperation.
In embodiment, variable-speed unit is Wedge mechanism 15 and transferring member, and Wedge mechanism 15 includes tapered wedges 151, adjustment spiral shell
Nail 152, spring 153 and bearing pin 154, connect as shown in figure 1, the thick end of tapered wedges 151 is rotated by bearing pin 154 and straight-bar 14
Connect, the middle part of tapered wedges 151 is connected by spring 153 with straight-bar 14, adjusting screw 152 and the screw phase set on straight-bar 14
Match somebody with somebody, the top of adjusting screw 152 is in contact with the bottom surface of tapered wedges 151, passes through the distance of stretch out and draw back wedge of adjusting screw 152
151 micro- rotation of block, so as to adjust gradient of the inclined-plane of tapered wedges 151 relative to straight-bar 14.
Transferring member is transmission lever 155, and transmission lever 155 is arranged in the 3rd support base 113, as shown in figure 1, transmission lever 155
It can be moved horizontally in the 3rd support base 113, left end is that working face is in contact with the inclined-plane of tapered wedges 151, right-hand member and first
Buffer cell is connected.
In addition, variable-speed unit can also replace Wedge mechanism 15 using circular cone mechanism, have centered on circular cone mechanism logical
The cone in hole.Straight-bar 14 is connected through through hole and with cone.
First buffer cell has snubber part, acts on the work of work package platform from variable-speed unit for buffering
Firmly, and the displacement of work package platform is reduced, the first buffer cell includes at least one elastomer, and elastomer is spring, ripple
Any one in line pipe and bellows.
First buffer cell can also include two elastomers or three elastomers or four elastomers and multiple elasticity
Body.
In embodiment, the first buffer cell is spring 16, and the input of spring 16 is connected with the right-hand member of transmission lever 155, bullet
The output end of spring 16 is connected with the left end of framework 13.
Another embodiment, is provided with the second buffer cell in microdisplacement device 10, and the second buffer cell includes
At least one elastomer.
Second buffer cell can also include two elastomers or three elastomers or four elastomers and multiple elasticity
Body, elastomer are any one in spring, bellows and bellows.
As shown in figure 1, the second buffer cell is spring 17, the input of spring 17 is connected with the right-hand member of framework 13, spring
13 output end is connected with box-section trestle 11, and spring 17 not only has the function that with energy absorption, buffered but also to framework 13
With reaction force.
The operation principle of mechanical microdisplacement device 10：
Straight-bar 14 moves up displacement 1 after receiving the upward displacement 1 in the external world, drives tapered wedges 151 to move up position
Move 1 and carry out output displacement 2 after speed change, due to the input end in contact of inclined-plane and the transmission lever 155 of tapered wedges 151, now tapered wedges
151 drive transmission levers 155 move right displacement 2 and drive spring 16 move output displacement 3, spring 16 promote framework 13 move right
Dynamic displacement 4, therefore, the work package G moving displacements 4 in framework 13.
The effect of embodiment and effect
Mechanical microdisplacement device according to involved by the present embodiment, because with the Wedge mechanism being connected with straight-bar,
Therefore, Wedge mechanism exports after the displacement of input is carried out into speed change；Meanwhile microdisplacement device involved in the present invention also has
There is the spring being connected with work package platform, the spring can buffer the active force that work package platform is acted on from transmission lever, and
Further reduce the displacement of work package platform.
Further, since the whipping property square of cantilever beam is big, so identical external force promotes the work package platform set on a cantilever beam
Displacement with regard to small.
Further, the advantages of Wedge mechanism of inclination angle-adjustable has simple in construction, easily manufactured, and gear ratio is big.
Further, embodiment also includes the second buffer cell with energy absorption function, increases to work package platform
Buffering and reduce the effect of the displacement of work package platform.
Above-mentioned embodiment is the preferred case of the present invention, is not intended to limit protection scope of the present invention.
Claims (6)
1. a kind of mechanical microdisplacement device, for producing micro displacement and exporting the work package to outside, its feature exists
In, including：
Support unit；
Connection unit, it is arranged in the support unit；
Work package platform, it is connected with the connection unit, the work package is arranged on work package platform；
Displacement input block, for receiving the displacement in the external world, it is slidably connected with the support unit；
Variable-speed unit, it is connected with the displacement input block, for being exported after carrying out speed change to the displacement；And
First buffer cell, it is arranged between the variable-speed unit and the work package platform, the input of first buffer cell
End is connected with the output end of the variable-speed unit, and output end is connected with the input of the work package platform, first buffering
Unit has snubber part, acts on the active force of the work package platform from the variable-speed unit for buffering, and
Reduce the displacement of the work package platform,
Wherein, the snubber part is connected with the work package platform,
The Wedge mechanism or circular cone mechanism of the variable-speed unit including inclination angle-adjustable and with the Wedge mechanism or cone machine
The transferring member that structure is engaged,
Wedge mechanism or the circular cone mechanism is connected with the straight-bar, and the transferring member is connected with the snubber part.
The Wedge mechanism is connected with the straight-bar, and the transferring member is connected with the snubber part,
The Wedge mechanism includes：Tapered wedges, adjusting screw, spring and bearing pin,
The thick end of the tapered wedges is rotatablely connected by the bearing pin and the straight-bar,
The middle part of the tapered wedges is connected by the spring with the straight-bar,
The adjusting screw matches with the screw set on the straight-bar, and its top is in contact with the bottom surface of the tapered wedges,
For adjusting the inclined-plane of the tapered wedges relative to the gradient of the straight-bar.
2. mechanical microdisplacement device according to claim 1, it is characterised in that：
Wherein, the support unit is box-section trestle or frame structure,
The work package platform is frame structure.
3. mechanical microdisplacement device according to claim 1, it is characterised in that：
Wherein, the connection unit is arranged in the support unit including an at least cantilever beam, outrigger horizontal, one end
It is fixedly connected with the support unit, the other end is hanging cantilever,
The work package platform is arranged on the cantilever.
4. mechanical microdisplacement device according to claim 1, it is characterised in that：
Wherein, first buffer cell includes at least one elastomer, and the elastomer is in spring, bellows and bellows
Any one.
5. mechanical microdisplacement device according to claim 1, it is characterised in that also include：
Second buffer cell, be arranged between the work package platform and the support unit, second buffer cell it is defeated
Enter end with the work package platform to be connected, the output end of second buffer cell is connected with the support unit.
6. mechanical microdisplacement device according to claim 5, it is characterised in that：
Wherein, second buffer cell includes at least one elastomer, and the elastomer is in spring, bellows and bellows
Any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710785159.2A CN107489750A (en) | 2017-09-04 | 2017-09-04 | A kind of mechanical microdisplacement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710785159.2A CN107489750A (en) | 2017-09-04 | 2017-09-04 | A kind of mechanical microdisplacement device |
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| Publication Number | Publication Date |
|---|---|
| CN107489750A true CN107489750A (en) | 2017-12-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710785159.2A Pending CN107489750A (en) | 2017-09-04 | 2017-09-04 | A kind of mechanical microdisplacement device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5452220A (en) * | 1994-05-05 | 1995-09-19 | The Coe Manufacturing Company | Automatic adjustment of veneer lathe nose bar height relative to knife during peeling |
| JPH08320389A (en) * | 1995-05-26 | 1996-12-03 | Dainippon Screen Mfg Co Ltd | Measuring stage |
| CN2418492Y (en) * | 1999-08-31 | 2001-02-07 | 中国地震局地震研究所 | Short-baseline expansion instrument |
| CN201583784U (en) * | 2009-08-11 | 2010-09-15 | 上海微电子装备有限公司 | Vertical leveling focusing mechanism |
| CN202562431U (en) * | 2012-05-24 | 2012-11-28 | 曹玉 | Micrometric displacement measurement device |
-
2017
- 2017-09-04 CN CN201710785159.2A patent/CN107489750A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5452220A (en) * | 1994-05-05 | 1995-09-19 | The Coe Manufacturing Company | Automatic adjustment of veneer lathe nose bar height relative to knife during peeling |
| JPH08320389A (en) * | 1995-05-26 | 1996-12-03 | Dainippon Screen Mfg Co Ltd | Measuring stage |
| CN2418492Y (en) * | 1999-08-31 | 2001-02-07 | 中国地震局地震研究所 | Short-baseline expansion instrument |
| CN201583784U (en) * | 2009-08-11 | 2010-09-15 | 上海微电子装备有限公司 | Vertical leveling focusing mechanism |
| CN202562431U (en) * | 2012-05-24 | 2012-11-28 | 曹玉 | Micrometric displacement measurement device |
Non-Patent Citations (1)
| Title |
|---|
| 黎永明等: "纳米级微量误差校正装置", 《磨床与磨削》 * |
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Application publication date: 20171219 |
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