CN107484410A - Multiple ultrahigh vacuum station structures and method of testing are realized on single vacuum cavity - Google Patents
Multiple ultrahigh vacuum station structures and method of testing are realized on single vacuum cavity Download PDFInfo
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- CN107484410A CN107484410A CN201710557498.5A CN201710557498A CN107484410A CN 107484410 A CN107484410 A CN 107484410A CN 201710557498 A CN201710557498 A CN 201710557498A CN 107484410 A CN107484410 A CN 107484410A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
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Abstract
The invention discloses multiple ultrahigh vacuum station structures and method of testing are realized on single vacuum cavity, in the vacuum that product test is carried out using traditional structure, it is difficult to secondary cabin is set to reach ultrahigh vacuum background state, even if reach, it is also required to a few hours, vacuum is poor, easily product is caused to damage.Using structure of the present invention, secondary cabin can be quickly set to reach ultrahigh vacuum background state within 1 hour；Molecular pump of the present invention realizes maximization to the actual pumping speed in secondary cabin, and on the premise of sharing a molecular pump in all secondary cabins, ultrahigh vacuum background state can be easily reached by paying less cost and allowing for each secondary cabin, better than 1 × 10‑5Pa, cost is significantly saved.
Description
Technical field
Multiple ultrahigh vacuum station structures and method of testing are realized on single vacuum cavity the present invention relates to one kind, is applicable
In all product mass testing fields that must can be carried out under UHV condition.
Background technology
Every hall thruster configures two negative electrodes, and each negative electrode is required for by unit performance test and meets to design
Hall thruster final assembly could be carried out after it is required that.Because negative electrode operation quantity is larger, and anticathode test needs
It could be carried out in ultra-high vacuum system, the full test cycle of a negative electrode includes：Negative electrode is installed, closes vacuum cavity, vacuum
Cavity is evacuated to background pressure, and (air pressure is better than 1 × 10-5Pa in), steam line cleaning and displacement, normal supply (air pressure better than 5 ×
10-3Pa), cathode test, cooled cathode, vacuum cavity inflation, dismounting negative electrode.Required according to charter, the test of a negative electrode
For up to hours up to a hundred.A single ultrahigh vacuum test equipment can not meet the needs of negative electrode batch testing completely.At present,
For the batch testing of negative electrode, most common following five kinds of methods：
1st, more vacuum equipments, every can only test a negative electrode.(no figure)
2nd, vacuum cavity volume is increased so that multiple negative electrodes can be placed in single cavity simultaneously, multiple negative electrodes must be same
Shi Jinhang is tested.(no figure)
3rd, the multiple stations of Vacuum System Design, i.e., multiple secondary cabins (301-304), main cabin are arranged around a main cabin (305)
(305) main pump (306) and a unique molecular pump (307) are installed, see Fig. 1.
4th, multistation vacuum system, main cabin (405) surrounding arrange multiple secondary cabins (401-404), and each secondary cabin installs one
Platform molecular pump (407-410), main cabin (405) installation main pump (406), is shown in Fig. 2.
5th, multistation vacuum system, main cabin (505) surrounding arrange multiple secondary cabins (501-504), and main cabin (505) installs main pump
(506) and a unique molecular pump (507), each secondary cabin are connected by pipeline (508-511) with the molecular pump (507),
See Fig. 3.
Consider many factors, the contrast situation of above-mentioned five kinds of methods is shown in Table 1.Underscore thickened portion is phase in table
The crucial rejection item of induction method.
The negative electrode of table 1 realizes the method contrast of batch testing
Although 5 kinds of methods respectively have advantage and disadvantage, by comprehensive comparative analysis it can be found that comparatively method 5 compares
It is preferable.But the problem of this method most serious is that each secondary cabin is connected by slender pipeline with the molecular pump in main cabin, and elongated
Pipeline can have a strong impact on actual pumping speed of the molecular pump to secondary cabin, and the background pressure that causing secondary cabin can reach can be significantly larger than main cabin
The background pressure that can reach.
The content of the invention
The technology of the present invention solves problem：Realized to overcome the shortcomings of the existing technology, providing one kind on single vacuum cavity
Multiple ultrahigh vacuum station structures and method of testing, realize that molecular pump realizes maximization to the actual pumping speed in secondary cabin, in secondary cabin
With in the handshaking procedures in main cabin, the air pressure fluctuation of whole vacuum system is realized minimizes.
The present invention technical solution be：
Realize multiple ultrahigh vacuum station structures on single vacuum cavity, including a main cabin and be connected on main cabin
Multiple secondary cabins, connection or isolation are realized by the opening and closing of push-pull valve between main cabin and secondary cabin, main cabin is taken out by pump-line and slightly
Valve (V) is connected with the thick vacuum pumping pump of the first order, and secondary cabin is connected by pump-line and valve with the thick vacuum pumping pump of the first order respectively；
Molecular pump axis overlaps with main cabin axis, and is connected by push-pull valve with main cabin, and each secondary cabin is each via one
Push-pull valve is connected with molecular pump；Molecular pump is connected by preceding step valve (V) with fore pump, and main pump is directly connected to main cabin；Main cabin and
Gamut vacuum meter is mounted in each secondary cabin；Vent valve is installed on each secondary cabin；
Main cabin is horizontal positioned circular cylindrical cavity, and one end is hatch door, and the flange-interface of installation main pump is reserved on hatch door；It is main
The cabin other end is end socket, and end socket center is the flange-interface of installation molecular pump, centered on the interface, is around uniformly distributed along the circumference
The flange-interface in multiple secondary cabins of installation, secondary cabin axis and molecular pump axis and main cabin diameter parallel.
Main pump is cryogenic pump or xenon pump.
End socket is dished (torispherical) head or the plane end socket by structural strengthening.
One multi-path accessory with multiple flange-interfaces is set between molecular pump and push-pull valve, and each secondary cabin passes through each
From push-pull valve be connected with the multi-path accessory, realize that each secondary cabin connects with the direct of molecular pump.
Multiple ultrahigh vacuum station method of testings are realized on single vacuum cavity, are concretely comprised the following steps：
(1) the thick vacuum pumping pump of the first order and roughing valve are opened so that main cabin air pressure reaches the level that can open molecular pump,
It is less than 20Pa；
(2) fore pump, preceding step valve and the molecular pump of molecular pump are opened, after molecular pump reaches rated operation, is closed thick
Valve and the thick vacuum pumping pump of the first order are taken out, opens push-pull valve so that molecular pump connects with main cabin, and main cabin proceeds by the second level and taken out
Gas；
(3) after main cabin air pressure reaches the level that can open main pump, i.e., less than 10-3Pa, opens main pump, main cabin in main pump and
The common air-extraction function of molecular pump is issued to ultrahigh vacuum background state, i.e., less than 10-5Pa；
(4) product to be measured is installed in secondary cabin, closes secondary cabin door；
(5) the thick vacuum pumping pump of the first order and valve are opened, secondary cabin is slightly taken out；
(6) secondary cabin air pressure is down to 1Pa, closes push-pull valve, roughing valve, opens molecular pump push-pull valve, closes the first order and slightly takes out
Vavuum pump；
(7) after secondary cabin air pressure reaches ultrahigh vacuum background state, i.e., less than 10-5Pa, main cabin connection push-pull valve is opened, is closed
Molecular pump push-pull valve；So far, secondary cabin connects with main cabin, and is in ultrahigh vacuum background state, i.e., less than 10-5Pa, Ke Yikai
Beginning is tested the product in secondary cabin.
The present invention has advantages below compared with prior art：
(1) in the vacuum that product test is carried out using traditional structure, it is difficult to make secondary cabin reach ultrahigh vacuum sheet
Bottom state, even if reaching, it is also desirable to which a few hours, vacuum is poor, easily causes to damage to product, utilizes structure of the present invention, energy
It is enough secondary cabin is reached ultrahigh vacuum background state within 1 hour.
(2) molecular pump of the present invention realizes maximization to the actual pumping speed in secondary cabin, and a molecular pump is shared in all secondary cabins
On the premise of, ultrahigh vacuum background state can be easily reached by paying less cost and allowing for each secondary cabin, better than 1 ×
10-5Pa, cost is significantly saved；
(3) it is of the invention because secondary cabin can reach ultrahigh vacuum background state before being connected with main cabin, therefore in secondary cabin and master
In the handshaking procedures in cabin, the air pressure fluctuation of whole vacuum system realizes minimum.
Brief description of the drawings
Fig. 1 is method 3 --- traditional multistation vacuum system；
Fig. 2 is method 4 --- more molecular pump schemes of installation；
Fig. 3 is method 5 --- secondary cabin shares a molecular pump scheme；
Fig. 4 is structure chart of the present invention；
Fig. 5 is Structure explosion diagram of the present invention.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
Multiple ultrahigh vacuum station structures are realized on single vacuum cavity, as shown in Figure 4, Figure 5, including a main cabin
605 and multiple secondary cabins for being connected on main cabin 605, between main cabin 605 and secondary cabin by the opening and closing of push-pull valve realize connection or every
From main cabin 605 is connected by pump-line and roughing valve V01 vacuum pumping pumps 613 thick with the first order, and secondary cabin passes through exhaust tube respectively
Road and valve vacuum pumping pump 613 thick with the first order are connected；
The axis of molecular pump 607 overlaps with the main axis of cabin 605, and is connected by push-pull valve V02 with main cabin 605, each secondary cabin
It is connected each via a push-pull valve with molecular pump 607；Molecular pump 607 is connected by preceding step valve V03 with fore pump 614, main pump
606 are directly connected to main cabin 605；Gamut vacuum meter is mounted in main cabin 605 and each secondary cabin；It is provided with each secondary cabin
Vent valve；
Main cabin 605 is horizontal positioned circular cylindrical cavity, and one end is hatch door, and the flange of installation main pump 606 is reserved on hatch door
Interface；The main other end of cabin 605 is end socket, and the flange-interface of molecular pump 607 is is installed in end socket center, centered on the interface,
Around be uniformly distributed along the circumference multiple flange-interfaces for installing secondary cabins, and secondary cabin axis is put down with the axis of molecular pump 607 and the axis of main cabin 605
OK.
Main pump 606 is cryogenic pump or xenon pump, and end socket is dished (torispherical) head or the plane end socket by structural strengthening, molecular pump
One multi-path accessory with multiple flange-interfaces is set between 607 and push-pull valve V02, and each secondary cabin passes through respective plate
Valve is connected with the multi-path accessory, realizes that each secondary cabin connects with the direct of molecular pump.
Multiple ultrahigh vacuum station method of testings are realized on single vacuum cavity, are concretely comprised the following steps：
(1) the thick vacuum pumping pump of the first order and roughing valve are opened so that main cabin air pressure reaches the level that can open molecular pump,
It is less than 20Pa；
(2) fore pump, preceding step valve and the molecular pump of molecular pump are opened, after molecular pump reaches rated operation, is closed thick
Valve and the thick vacuum pumping pump of the first order are taken out, opens push-pull valve so that molecular pump connects with main cabin, and main cabin proceeds by the second level and taken out
Gas；
(3) after main cabin air pressure reaches the level that can open main pump, i.e., less than 10-3Pa, opens main pump, main cabin in main pump and
The common air-extraction function of molecular pump is issued to ultrahigh vacuum background state, i.e., less than 10-5Pa；
(4) product to be measured is installed in secondary cabin, closes secondary cabin door；
(5) the thick vacuum pumping pump of the first order and valve are opened, secondary cabin is slightly taken out；
(6) secondary cabin air pressure is down to 1Pa, closes push-pull valve, roughing valve, opens molecular pump push-pull valve, closes the first order and slightly takes out
Vavuum pump；
(7) after secondary cabin air pressure reaches ultrahigh vacuum background state, i.e., less than 10-5Pa, main cabin connection push-pull valve is opened, is closed
Molecular pump push-pull valve；So far, secondary cabin connects with main cabin, and is in ultrahigh vacuum background state, i.e., less than 10-5Pa, Ke Yikai
Beginning is tested the product in secondary cabin.
Embodiment
(1) position relationship between secondary cabin and molecular pump is determined
Main cabin 605 is horizontal positioned circular cylindrical cavity, and one end is hatch door, and the installation (cryogenic pump of main pump 606 is reserved on hatch door
Or xenon pump) flange-interface.Plane end socket of the main other end of cabin 605 for dished (torispherical) head or by structural strengthening, end socket center
To install the flange-interface of molecular pump 607.Centered on the interface, be around uniformly distributed along the circumference four flange-interfaces, for installing
Four secondary cabin 601-604, make secondary cabin axis and molecular pump axis and main cabin diameter parallel.
(2) the main vacuum-pumping system of cabin 605 is configured
Main cabin 605 configures 613, roughing valve V01 of a roughing vacuum pump, a molecular pump 607 and molecular pump push-pull valve
V02, a molecular pump fore pump 614 and preceding step valve V03, main pump 606 (valve can be matched), a gamut vacuum meter G0.Its
In, it is desirable to selected molecular pump 607 must be the model for being capable of normal work under the state that is horizontally mounted.
(3) secondary cabin vacuum-pumping system is configured
In order that obtaining each secondary cabin can work independently, each secondary cabin need to be given to be equipped with corresponding vacuum fittings, including：Slightly take out
Valve V11, V21, V31, V41, molecular pump push-pull valve V12, V22, V32, V42, main cabin connection push-pull valve V13, V23, V33, V43,
Intake valve V14, V24, V34, V44, gamut vacuum meter G1-G4.
(4) configuration six is logical
Six logical 612 be the core component of whole system, for connecting molecular pump 607 and main cabin 605 and four secondary cabin 601-
604, it is to ensure that secondary cabin 601-604 can realize the key of ultrahigh vacuum background.Six logical 612 be hexahedron structure, and each face has
One flange-interface, one of interface connection molecule pump 607, main cabin 605 is connected to side interface, the interface of side four each connects
Meet a secondary cabin 601-604.
(5) secondary cabin side flange interface is determined
According to push-pull valve V13, V23, V33, V43 and V02 thickness and six logical 612 axial dimension, it is determined that secondary cabin 601-
604 with the positions of six logical 612 flanges being connected.
(6) overall package
According to shown in explosive view, each accessory of whole vacuum system is assembled.Main cabin 605 only shows one in figure
The end socket at end, main pump 606 are not shown, and suitably conceal the secondary accessory of system.
Specifically, realize multiple ultrahigh vacuum station structures on single vacuum cavity, including a main cabin 605 and it is connected to
Four secondary cabin 601-604 on main cabin 605, connection is realized by push-pull valve V13-V43 opening and closing between main cabin 605 and secondary cabin
Or isolation, main cabin 605 are connected by pump-line and roughing valve V01 vacuum pumping pumps 613 thick with the first order, secondary cabin is respectively by taking out
Feed channel and valve V11-V41 vacuum pumping pumps 613 thick with the first order are connected；
The axis of molecular pump 607 overlaps with the main axis of cabin 605, and is connected by push-pull valve V02 with main cabin 605, each secondary cabin
Each via a push-pull valve (V12-V42) and molecular pump 607) it is connected；Molecular pump 607 passes through preceding step valve V03 and fore pump 614
Connection, main pump 606 are directly connected to main cabin 605；Gamut vacuum meter G0-G4 is mounted in main cabin 605 and each secondary cabin；Often
Vent valve V14-V44 is installed on individual secondary cabin；
Main cabin 605 is horizontal positioned circular cylindrical cavity, and one end is hatch door, and installation main pump 606 is reserved on hatch door；Main cabin
605 other ends are dished (torispherical) head or the plane end socket by structural strengthening, and end socket center connects for the flange of installation molecular pump 607
Mouthful, centered on the interface, be around uniformly distributed along the circumference four flange-interfaces, for installing four secondary cabin 601-604, secondary cabin axis
With the axis of molecular pump 607 and the diameter parallel of main cabin 605.
In the vacuum that product test is carried out using traditional structure, it is difficult to make secondary cabin reach ultrahigh vacuum background shape
State, even if reaching, it is also desirable to which a few hours, vacuum is poor, easily causes to damage to product., can be 1 using structure of the present invention
Secondary cabin is quickly set to reach ultrahigh vacuum background state within hour.
The non-detailed description of the present invention is known to the skilled person technology.
Claims (5)
1. multiple ultrahigh vacuum station structures are realized on single vacuum cavity, it is characterised in that：Including a main cabin (605) and
The multiple secondary cabins being connected on main cabin (605), between main cabin (605) and secondary cabin by push-pull valve opening and closing realize connection or every
From main cabin (605) is connected by pump-line and roughing valve (V01) with the thick vacuum pumping pump of the first order (613), and secondary cabin passes through respectively
Pump-line and valve are connected with the thick vacuum pumping pump of the first order (613)；
Molecular pump (607) axis overlaps with main cabin (605) axis, and is connected by push-pull valve (V02) with main cabin (605), each
Secondary cabin is connected each via a push-pull valve with molecular pump (607)；Molecular pump (607) passes through preceding step valve (V03) and fore pump
(614) connect, main pump (606) is directly connected to main cabin (605)；It is true that gamut is mounted in main cabin (605) and each secondary cabin
Sky meter；Vent valve is installed on each secondary cabin；
Main cabin (605) is horizontal positioned circular cylindrical cavity, and one end is hatch door, and the flange of installation main pump (606) is reserved on hatch door
Interface；Main cabin (605) other end is end socket, and the flange-interface of molecular pump (607) is is installed in end socket center, using the interface in
The heart, the flange-interface in multiple secondary cabins of installation that are around uniformly distributed along the circumference, secondary cabin axis and molecular pump (607) axis and main cabin (605)
Diameter parallel.
2. multiple ultrahigh vacuum station structures are realized on single vacuum cavity as claimed in claim 1, it is characterised in that：It is main
Pump (606) is cryogenic pump or xenon pump.
3. multiple ultrahigh vacuum station structures are realized on single vacuum cavity as claimed in claim 1, it is characterised in that：Envelope
Plane end socket of the head for dished (torispherical) head or by structural strengthening.
4. multiple ultrahigh vacuum station structures are realized on single vacuum cavity as claimed in claim 1, it is characterised in that：Point
One multi-path accessory with multiple flange-interfaces is set between sub- pump (607) and push-pull valve (V02), and each secondary cabin passes through each
From push-pull valve be connected with the multi-path accessory, realize that each secondary cabin connects with the direct of molecular pump.
5. multiple ultrahigh vacuum station method of testings are realized on single vacuum cavity, it is characterised in that concretely comprise the following steps：
(1) the thick vacuum pumping pump of the first order and roughing valve are opened so that main cabin air pressure reaches the level that can open molecular pump, i.e., small
In 20Pa；
(2) fore pump, preceding step valve and the molecular pump of molecular pump are opened, after molecular pump reaches rated operation, closes roughing valve
And the thick vacuum pumping pump of the first order, open push-pull valve so that molecular pump connects with main cabin, and main cabin proceeds by second level pumping；
(3) after main cabin air pressure reaches the level that can open main pump, i.e., less than 10-3Pa, main pump is opened, main cabin is in main pump and molecule
The common air-extraction function of pump is issued to ultrahigh vacuum background state, i.e., less than 10-5Pa；
(4) product to be measured is installed in secondary cabin, closes secondary cabin door；
(5) the thick vacuum pumping pump of the first order and valve are opened, secondary cabin is slightly taken out；
(6) secondary cabin air pressure is down to 1Pa, closes push-pull valve, roughing valve, opens molecular pump push-pull valve, closes the first order and slightly vacuumizes
Pump；
(7) after secondary cabin air pressure reaches ultrahigh vacuum background state, i.e., less than 10-5Pa, main cabin connection push-pull valve is opened, closes molecule
Pump push-pull valve；So far, secondary cabin connects with main cabin, and is in ultrahigh vacuum background state, i.e., less than 10-5Pa, can start pair
Product in secondary cabin is tested.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710557498.5A CN107484410B (en) | 2017-07-10 | 2017-07-10 | Structure for realizing multiple ultrahigh vacuum stations on single vacuum cavity and testing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710557498.5A CN107484410B (en) | 2017-07-10 | 2017-07-10 | Structure for realizing multiple ultrahigh vacuum stations on single vacuum cavity and testing method |
Publications (2)
| Publication Number | Publication Date |
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| CN107484410A true CN107484410A (en) | 2017-12-15 |
| CN107484410B CN107484410B (en) | 2020-03-24 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114777664A (en) * | 2022-06-20 | 2022-07-22 | 山西天宝集团有限公司 | Wind power tower cylinder flange parameter control auxiliary tool and method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011020703A (en) * | 2009-07-15 | 2011-02-03 | Shitara Seisakusho:Kk | Vacuum packaging machine for heat insulating material |
| CN203130430U (en) * | 2013-01-31 | 2013-08-14 | 中国科学院上海技术物理研究所 | Multistation vacuum pumping device for infrared detector |
| CN105000202A (en) * | 2015-07-16 | 2015-10-28 | 兰州空间技术物理研究所 | Vacuum pumping system of test equipment of ion thrusters |
-
2017
- 2017-07-10 CN CN201710557498.5A patent/CN107484410B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011020703A (en) * | 2009-07-15 | 2011-02-03 | Shitara Seisakusho:Kk | Vacuum packaging machine for heat insulating material |
| CN203130430U (en) * | 2013-01-31 | 2013-08-14 | 中国科学院上海技术物理研究所 | Multistation vacuum pumping device for infrared detector |
| CN105000202A (en) * | 2015-07-16 | 2015-10-28 | 兰州空间技术物理研究所 | Vacuum pumping system of test equipment of ion thrusters |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114777664A (en) * | 2022-06-20 | 2022-07-22 | 山西天宝集团有限公司 | Wind power tower cylinder flange parameter control auxiliary tool and method thereof |
| CN114777664B (en) * | 2022-06-20 | 2022-09-27 | 山西天宝集团有限公司 | Wind power tower cylinder flange parameter control auxiliary tool and method thereof |
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| CN107484410B (en) | 2020-03-24 |
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