CN107484322A - A kind of high-tension shielding storehouse - Google Patents
A kind of high-tension shielding storehouse Download PDFInfo
- Publication number
- CN107484322A CN107484322A CN201710558950.XA CN201710558950A CN107484322A CN 107484322 A CN107484322 A CN 107484322A CN 201710558950 A CN201710558950 A CN 201710558950A CN 107484322 A CN107484322 A CN 107484322A
- Authority
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- China
- Prior art keywords
- summit
- metal tube
- component
- tension shielding
- frame structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000002184 metal Substances 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000007769 metal material Substances 0.000 claims abstract description 9
- 238000005468 ion implantation Methods 0.000 claims abstract description 8
- 238000009434 installation Methods 0.000 claims abstract description 4
- 238000005452 bending Methods 0.000 claims description 8
- 238000010079 rubber tapping Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Particle Accelerators (AREA)
Abstract
The invention belongs to high-pressure type accelerator high-tension shielding technical field, more particularly to a kind of high-tension shielding storehouse, for being shielded to the high potential equipment of high-pressure type accelerator or ion implantation apparatus, frame structure including Demountable metallic material and the metal tube (4) being removably arranged in the frame structure, the metal tube (4) is configured to shield the mask array of high pressure on each outer surface of the frame structure, also include the reserved passageway being arranged in the mask array, the frame structure after combination, mask array is shrouded in the periphery of the high potential equipment.Mask array is formed by using Demountable metallic pipe, and metal tube can be dismounted individually, without reserving special access path again, when some metal tubes of personnel and equipment at that need to only be pulled down when need to be installed or be overhauled by shielding device in high-tension shielding storehouse can be achieved；After the completion of installation or maintenance activity, only metal tube need to be installed again.
Description
Technical field
The invention belongs to high-pressure type accelerator high-tension shielding technical field, and in particular to a kind of high-tension shielding storehouse.
Background technology
High-pressure type accelerator is to make charged particle beam one or many by electric field caused by DC high-voltage power supply to obtain
The device of acceleration, available for atom nuclear tests, radioactive medical, radio chemistry, radioisotopic manufacture, non-destructive
Flaw detection etc..Ion implantation apparatus equally also has accelerator facility (specifically by ion gun, accelerator, lens, scanning system and target chamber
Deng composition), ion implantation apparatus can be used for the impurity doping of semi-conductor industry and substitute the old technique of thermal diffusion.Make semiconductor devices
Yield rate and property indices greatly improve.Corresponding high pressure is equipped with inside high-pressure type accelerator and ion implantation apparatus
Equipment, due to the requirement that function uses, have equipment that is large number of, coming in every shape and be arranged on high potential, these are in height
Local tip of current potential equipment etc. easily causes the generation of high-voltage partial discharge to the spatial relationship in the external world, and this electric discharge phenomena
The stable operation of whole accelerator can be not only had a strong impact on, and the immediate current during electrion even results in equipment not
Recoverable damage.Therefore, in high-pressure type accelerator and ion implantation apparatus, high-pressure type is realized in order to reduce equipment high voltage arc
The stable operation of accelerator or implanter, it is often required to the equipment in high potential being integrally placed in high-tension shielding storehouse, is simultaneously
It is easy to the installation to the equipment in high-tension shielding storehouse and maintenance, it is necessary to individually consider to reserve on the high-tension shielding storehouse in the design
Passage or dodge gate.The structure generally use metallic plate or net in existing high-tension shielding storehouse are built, in phase connecting plate or net
Easily there is tip in seam crossing between seam crossing, plate or net and shielding silo roof point fillet, shielding storehouse crossbeam and shielding storehouse column, in advance
Passage or dodge gate and the seam crossing in high-tension shielding storehouse is stayed to be also easy to tip occur due to repeating opening and closing.If not to these tips
Handled, the probability of high voltage arc generation can be greatly increased, have a strong impact on high-pressure type accelerator or the stable fortune of implanter
OK.
The content of the invention
The drawbacks of shielding construction for being used as high-tension shielding storehouse by metallic plate, wire netting for existing, mesh of the invention
To be that design is a kind of have a sharp protrusion, facilitate the high-tension shielding storehouse to being overhauled by shielding device.
To achieve the above objectives, the technical solution adopted by the present invention is a kind of high-tension shielding storehouse, for accelerating to high-pressure type
The high potential equipment of device or ion implantation apparatus is shielded, wherein, including the frame structure of Demountable metallic material and can
The metal tube being arranged in the frame structure of dismounting, the metal tube are formed on each outer surface of the frame structure
The mask array of high pressure can be shielded, in addition to the reserved passageway being arranged in the mask array, the framework after combination
Structure, mask array are shrouded in the periphery of the high potential equipment.
Further, the frame structure includes several summit components and some frame beam columns, each set of vertices
Part can connect some frame beam columns, and the frame beam column is cylinder, the summit component and the frame beam column
One end be connected, the frame beam column connects and composes the frame structure by the summit component.
Further, the summit component is connected by connector with one end of the frame beam column, and the connector is ring
Without sharp protrusion, the edge of the connector is provided with the chamfering or fillet that prevent high voltage arc for shape, surface and edge.
Further, the summit component by cylindric tubing by bending and connection is made, the summit component appearance
Face and bent angle are that smooth surface does not have sharp protrusion.
Further, the frame beam column is provided with the mounting hole of array arrangement, the metal tube by the mounting hole, into
Array-like is arranged on the outer surface that the frame beam column is formed, and forms the mask array.
Further, the reserved passageway is arranged in the mask array, including cable channel and line device channels,
By setting corresponding round hole in the mask array and setting ring plate to realize in the tapping, the ring
The diameter of shape flat board is adapted with the diameter for opening sky, and the metal tube with forming the round hole is connected；It is described
Ring plate is metal material, and surface and edge be without sharp protrusion, and edge be provided with the chamfering that prevents high voltage arc or
Person's fillet.
Further, the metal being located in by the ring plate in the mask array is also included on the cable channel
The cable pipe of material, the surface and edge of the cable pipe are without sharp protrusion, and edge is provided with prevents high voltage arc
Chamfering or fillet.
Further, the frame structure is cube, and the frame beam column includes column and crossbeam；The summit component by
A piece bend pipe for bending to 90 degree and a straight tube are formed, and the bend pipe connects two crossbeams, and the straight tube connects one
The column, the angle being connected between the column of the same summit component, crossbeam is 90 degree；The mounting hole
It is equidistant to be evenly arranged in the crossbeam side.
Further, the crossbeam, summit component are made using diameter 200mm metal tube；On the summit component
The bending radius of 90 degree of bend pipes is 300mm；The column is made using diameter 168mm metal tube；The metal tube
A diameter of 40mm, the spacing between the metal tube in mask array is 100mm；Assemble the high-tension shielding cabin length finished
4800mm, wide 3600mm, high 2720mm.
The beneficial effects of the present invention are：
Mask array is formed by using Demountable metallic pipe, and metal tube can be dismounted individually, without reserving again
Special access path, when that need to be installed or be overhauled by shielding device in high-tension shielding storehouse, it only need to pull down personnel and equipment is entered
Some metal tubes for entering place can be achieved；After the completion of installation or maintenance activity, only metal tube need to be installed again,
High-tension shielding effect will not be impacted.
Brief description of the drawings
Fig. 1 is the schematic diagram in high-tension shielding storehouse described in the specific embodiment of the invention；
In figure：1- crossbeams, 2- summits component (2), 3- columns, 4- metal tubes, 5- cable pipes, 6- line device channels,
7- connectors, 8- ring plates.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
A kind of high-tension shielding storehouse (as shown in Figure 1) provided by the invention, for high-pressure type accelerator or ion implanting
The high potential equipment of machine is shielded, and is made up of the frame structure and metal tube 4 of metal quality, wherein, frame structure is removable
The structure unloaded, metal tube 4 are also to be arranged on by dismountable mode in frame structure.Metal tube 4 is in each of frame structure
Arranged on outer surface with array way, these metal tube arrays just constitute the mask array that can shield high pressure.After combination
Frame structure, mask array shroud the height in the periphery of high potential equipment, realized to high-pressure type accelerator or ion implantation apparatus
The effect that current potential equipment is shielded.
In the mask array of frame structure, according to the reserved passageway that is provided with different size is actually needed, for being shielded
The various pipelines connection for the high potential equipment covered and the connection with high-tension shielding storehouse external equipment.
Frame structure is made up of several summit components 2 and some frame beam columns, if each summit component 2 can connect
Dry root frame beam column, frame beam column are cylindrical metal tubing, and surface is without sharp protrusion (preventing high voltage arc), each set of vertices
Part 2 is connected with one end of frame beam column, and frame beam column connects and composes frame structure by summit component 2.(that is each top
Point component 2 is all the point that one end of some frame beam columns is collected).Wherein, frame beam column is provided with the peace of array arrangement
Hole is filled, metal tube 4 is arranged on the outer surface of frame beam column composition into array-like by mounting hole, forms mask array.
In the present invention, frame structure is cube, and frame beam column includes 1 two kinds of column 3 and crossbeam, and (wherein, crossbeam 1 is again
It is divided into different two kinds of length, respectively constitutes cubical " length " and " width ").It can also be needed according to shielding object to framework
Structure is adjusted (different frame beam columns and the summit component 2 of connection different frames beam column quantity), forms various polyhedrons,
Corresponding mask array is set on polyhedral each outer surface, so as to form various shielding storehouses, meets the need of shielding object
Will.
For summit component 2 by cylindric tubing by bending and connection is made, the outer surface of summit component 2 and bent angle are round and smooth
Surface does not have sharp protrusion.In the present invention, summit component 2 is specifically and is made up of a bend pipe and a straight tube, wherein bend pipe
90 degree of fillets are processed to, bend pipe connects two crossbeams 1, and straight tube connects a root post 3, is connected on same summit component 2
Column 3, the angle between crossbeam 1 be 90 degree；Mounting hole is equidistant to be evenly arranged in the side of crossbeam 1.
In high-tension shielding storehouse provided by the present invention, crossbeam 1, summit component 2 use diameter 200mm metal control
Make；The bending radius of 90 degree of fillet bend pipes on summit component 2 is 300mm；Column 3 is made using diameter 168mm metal tube；
A diameter of 40mm of metal tube 4, the spacing between metal tube 4 in mask array is 100mm；Assemble the high-tension shielding cabin finished
Long 4800mm, wide 3600mm, high 2720mm.The spacing (spacing between metal tube 4 i.e. in mask array) and gold of mounting hole
The diameter of category pipe 4, the bending radius of the bend pipe of summit component 2 can be selected according to the size of voltage difference, the requirement of shielding, utilize
The smooth surface of itself of metal tube 4 is avoided the occurrence of in face of the tip of ground potential so as to effectively reduce high voltage arc probability of happening.
Summit component 2 is connected by connector 7 with one end of frame beam column (crossbeam 1, column 3), and connector 7 is annular,
Without sharp protrusion, the edge of connector 7 is provided with the chamfering or fillet that prevent high voltage arc, summit component 2 for surface and edge
Linked together with frame beam column (crossbeam 1, column 3) by way of inserting in connector 7.Connector 7 is similarly metal material
Matter.
Reserved passageway is arranged in mask array, and in the present invention, reserved passageway includes cable channel and line equipment is led to
Road 6, by setting corresponding round hole in mask array and setting ring plate 8 to realize in tapping, ring plate 8
Diameter with open sky diameter be adapted, and with form round hole metal tube 4 be connected.Form the metal tube 4 of round hole
Corresponding cutting is done, and with ring plate 8 by being welded to connect, ring plate 8 is similarly metal material, and surface and edge are equal
Without sharp protrusion, and edge is provided with the chamfering or fillet for preventing high voltage arc.Cable channel and line device channels 6 it is straight
Footpath is set according to being actually needed.On high-tension shielding storehouse provided by the present invention, two Hes of line device channels 6 are provided with
One cable channel (being provided with cable pipe 5).
In order to ensure shield effectiveness, cable pipe 5 is additionally provided with cable channel, cable pipe 5 passes through ring plate 8
It is located in mask array, cable pipe 5 is metal material, for the electricity connected needed for the level equipment by being shielded
The pipelines such as cable, cable.The surface of cable pipe 5 and edge are without sharp protrusion, and edge is provided with the chamfering for preventing high voltage arc
Or fillet.
Device of the present invention is not limited to the embodiment described in embodiment, those skilled in the art according to
Technical scheme draws other embodiments, also belongs to the technological innovation scope of the present invention.
Claims (9)
1. a kind of high-tension shielding storehouse, for being shielded to the high potential equipment of high-pressure type accelerator or ion implantation apparatus, its
It is characterized in：Frame structure including Demountable metallic material and the metal tube being removably arranged in the frame structure
(4), the metal tube (4) is configured to shield the mask array of high pressure on each outer surface of the frame structure, also wraps
The reserved passageway being arranged in the mask array is included, the frame structure, the mask array after combination are shrouded in the high electricity
The periphery of position equipment.
2. high-tension shielding storehouse as claimed in claim 1, it is characterized in that：The frame structure includes several summit components (2)
With some frame beam columns, each summit component (2) can connect some frame beam columns, and the frame beam column is
Cylinder, the summit component (2) are connected with one end of the frame beam column, and the frame beam column passes through the summit component
(2) frame structure is connected and composed.
3. high-tension shielding storehouse as claimed in claim 2, it is characterized in that：The summit component (2) by connector (7) with it is described
One end of frame beam column is connected, and the connector (7) is annular, surface and edge without sharp protrusion, the connector (7)
The edge is provided with the chamfering or fillet for preventing high voltage arc.
4. high-tension shielding storehouse as claimed in claim 3, it is characterized in that：The summit component (2) is passed through curved by cylindric tubing
System and connection are made, and summit component (2) outer surface and bent angle are that smooth surface does not have sharp protrusion.
5. high-tension shielding storehouse as claimed in claim 2, it is characterized in that：The frame beam column is provided with the installation of array arrangement
Hole, the metal tube (4) are arranged on the outer surface that the frame beam column forms into array-like by the mounting hole,
Form the mask array.
6. high-tension shielding storehouse as claimed in claim 5, it is characterized in that：The reserved passageway is arranged in the mask array,
Including cable channel and line device channels (6), by setting corresponding round hole in the mask array and described
Tapping sets ring plate (8) to realize, the diameter of the ring plate (8) is adapted with the diameter for opening sky, and and structure
The metal tube (4) into the round hole is connected；The ring plate (8) is metal material, and the equal nothing in surface and edge
Sharp protrusion, and edge is provided with the chamfering or fillet for preventing high voltage arc.
7. high-tension shielding storehouse as claimed in claim 6, it is characterized in that：Also include passing through the annular flat on the cable channel
Plate (8) is located in the cable pipe (5) of the metal material in the mask array, the surface and edge of the cable pipe (5)
Without sharp protrusion, and edge is provided with the chamfering or fillet for preventing high voltage arc.
8. high-tension shielding storehouse as claimed in claim 5, it is characterized in that：The frame structure is cube, the frame beam column
Including column (3) and crossbeam (1)；The summit component (2) is made up of a bend pipe for bending to 90 degree and a straight tube, described
Bend pipe connects two crossbeams (1), and the straight tube connects a column (3), is connected to the same summit component
(2) angle between the column (3), crossbeam (1) is 90 degree；The mounting hole is equidistant to be evenly arranged in the crossbeam
(1) side.
9. high-tension shielding storehouse as claimed in claim 8, it is characterized in that：The crossbeam (1), summit component (2) use diameter
200mm metal tube makes；The bending radius of 90 degree of bend pipes on the summit component (2) is 300mm；The column
(3) made using diameter 168mm metal tube；A diameter of 40mm of the metal tube (4), the metal tube in mask array
(4) spacing between is 100mm；Assemble the long 4800mm in the high-tension shielding cabin, wide 3600mm, the high 2720mm finished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558950.XA CN107484322B (en) | 2017-07-10 | 2017-07-10 | High-voltage shielding bin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558950.XA CN107484322B (en) | 2017-07-10 | 2017-07-10 | High-voltage shielding bin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107484322A true CN107484322A (en) | 2017-12-15 |
| CN107484322B CN107484322B (en) | 2023-11-10 |
Family
ID=60596261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710558950.XA Active CN107484322B (en) | 2017-07-10 | 2017-07-10 | High-voltage shielding bin |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107484322B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108682600A (en) * | 2018-07-16 | 2018-10-19 | 中国原子能科学研究院 | A kind of ion source with anti-ignition device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5463268A (en) * | 1994-05-23 | 1995-10-31 | National Electrostatics Corp. | Magnetically shielded high voltage electron accelerator |
| CN102687231A (en) * | 2009-10-09 | 2012-09-19 | 迈普尔平版印刷Ip有限公司 | High voltage shielding arrangement |
| CN104302089A (en) * | 2014-10-11 | 2015-01-21 | 江苏达胜加速器制造有限公司 | Horizontal type self-shielding accelerator |
| CN105448371A (en) * | 2015-11-20 | 2016-03-30 | 中国电子科技集团公司第四十八研究所 | High voltage protection and ray shield system of electrostatic field accelerated high energy ion implantation machine |
| CN207235190U (en) * | 2017-07-10 | 2018-04-13 | 中国原子能科学研究院 | A kind of high-tension shielding storehouse |
-
2017
- 2017-07-10 CN CN201710558950.XA patent/CN107484322B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5463268A (en) * | 1994-05-23 | 1995-10-31 | National Electrostatics Corp. | Magnetically shielded high voltage electron accelerator |
| CN102687231A (en) * | 2009-10-09 | 2012-09-19 | 迈普尔平版印刷Ip有限公司 | High voltage shielding arrangement |
| CN104302089A (en) * | 2014-10-11 | 2015-01-21 | 江苏达胜加速器制造有限公司 | Horizontal type self-shielding accelerator |
| CN105448371A (en) * | 2015-11-20 | 2016-03-30 | 中国电子科技集团公司第四十八研究所 | High voltage protection and ray shield system of electrostatic field accelerated high energy ion implantation machine |
| CN207235190U (en) * | 2017-07-10 | 2018-04-13 | 中国原子能科学研究院 | A kind of high-tension shielding storehouse |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108682600A (en) * | 2018-07-16 | 2018-10-19 | 中国原子能科学研究院 | A kind of ion source with anti-ignition device |
| CN108682600B (en) * | 2018-07-16 | 2024-05-14 | 中国原子能科学研究院 | Ion source with anti-sparking device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107484322B (en) | 2023-11-10 |
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